DE102008048064A1 - Microfluidic valve, microfluidic pump, microfluidic system and a manufacturing process - Google Patents

Abstract

The invention relates to a microfluidic valve, a microfluidic pump, a microfluidic system and a method for the production thereof. A microfluidic valve comprises: an actuator element having at least one actuator, a flow element having at least one flow channel, a membrane holder having a membrane holder top connected to the actuator element, a membrane holder bottom connected to the flow element, at least one membrane holder opening and at least one actuatable, resilient, in particular elastically deformable, membrane, which is arranged in the at least one membrane holder opening, wherein the at least one membrane with a membrane base with the diameter Du at least partially disposed on the at least one flow channel, wherein the at least one membrane with a membrane top with the Druchmesser Do is at least partially disposed on the at least one actuator, wherein the diameter Do is greater than the diameter Du and wherein the wall of the at least one flow channel through the at least one aktuierb Are membrane in a valve seat mechanically contacted, so that the at least one flow channel is substantially completely closed by the membrane.

Description

The The invention relates to a microfluidic valve, a microfluidic Pump, a microfluidic system and a method for their production.

A Microfluidic components in the context of this application are, for example a microfluidic valve (microvalve) or a microfluidic Pump (micropump). The controlled by the micro valve or regulated Fluid lines or flow channels are for fluid transport with flow rates of about 1 μl / min designed to about 10 ml / min. Accordingly, the flow channels have diameters in the range of about 100 microns up to about 1 mm. Accordingly, micropumps are designed to the above flow rates to generate in the flow channels.

to Production of a microfluidic component is therefore a manufacturing process necessary, which the flow channels and the form further elements of the microfluidic component with sufficient precision. In many cases, therefore, the microfluidic components with process manufactured, which originate from the range of the silicon technology. It is necessary to structure two to three silicon wafers and to connect with each other to the necessary structures of a Micro valve or a micropump form. Due to the hardness of the Silicon are not microfluidic components made therefrom Particulate tolerant, so that, for example in the valve area stuck particles closing the Prevent microvalve.

Therefore the task is to produce a microfluidic component and provide the more reliable can be operated while simpler and cheaper is to produce.

The Task is by the independent claims solved. Preferred embodiments are the subject of the dependent Claims.

The manufacturing process according to one aspect

• – Bereitstellen eines Membranhalters mit einer Membranhalteroberseite, die ausgelegt ist mit einem Aktuationselement verbunden zu werden, einer Membranhalterunterseite, die ausgelegt ist mit einem Durchflußelement verbunden zu werden und zumindest einer Membranhalteröffnung, welche an der Membranhalteroberseite jeweils einen Durchmesser D_o und an der Membranhalterunterseite jeweils einen Durchmesser D_u aufweist;
• – Ausbilden zumindest einer rückstellfähigen, insbesondere elastisch verformbaren, Membran in der Membranhalteröffnung;
• – Bereitstellen eines Aktuationselementes mit zumindest einem Aktuator;
• – Verbinden des zumindest einen Aktuationselementes mit der Membranhalteroberseite des Membranhalters, so daß die Membran zumindest bereichsweise an zumindest einem Aktuator angeordnet ist, so daß die Membran durch den Aktuator aktuierbar ist;
• – Bereitstellen eines Durchflußelementes mit zumindest einem Durchflußkanal;
• – Verbinden des Durchflußelementes mit der Membranhalterunterseite des Membranhalters so daß die zumindest eine Membran zumindest bereichsweise an zumindest einem Durchflußkanal angeordnet ist, so daß die Wandung des Durchflußkanals durch die aktuierbare Membran in einem Ventilsitz mechanisch kontaktierbar ist.

One aspect of the present invention relates to a method for producing a microfluidic component, comprising the steps:

• Providing a membrane holder having a membrane holder top adapted to be connected to an actuator, a membrane holder bottom adapted to be connected to a flow member, and at least one membrane holder opening having a diameter D _o on the membrane holder top and one on the membrane holder bottom, respectively Having diameter D _u ;
• - Forming at least one resilient, in particular elastically deformable, membrane in the membrane holder opening;
• - Providing an actuator element with at least one actuator;
• - Connecting the at least one Aktuationselementes with the membrane holder top of the membrane holder, so that the membrane is at least partially disposed on at least one actuator, so that the membrane can be actuated by the actuator;
• - Providing a flow element with at least one flow channel;
• - Connecting the flow element to the membrane holder bottom of the membrane holder so that the at least one membrane is at least partially disposed on at least one flow channel, so that the wall of the flow channel through the actuatable membrane in a valve seat is mechanically contacted.

advantageously, is the microvalve without elaborate steps or use expensive materials easily and inexpensively. By the Forming the resilient membrane in the membrane holder is a particularly reliable and durable attachment of the membrane. Further, for the membrane and the membrane holder Advantageously, different materials are used, the can be selected according to their function.

Especially the membrane holder can be made in one piece be. Furthermore, the membrane holder made of metal, in particular stainless steel, or of a polymer, in particular of polymethyl methacrylate or Acrylic glass or polyimide.

The diameter D _u is in particular approximately equal to the Durchflußkanaldurchmesser. For microfluidic components in the context of this application, the diameter D _{u is} in a range of about 100 microns to about 1000 microns.

Of the Area of the flow channel where the membrane is located and the wall of the flow channel in the operating position contacted mechanically is referred to as a valve seat.

definitions

To the easier understanding In the following, a multitude of terms will be defined by way of example.

Of the Membrane holder has a substantially flat shape. To the clear Description of directions and geometric relations will be in the following description assumed that the substantially planar Membrane holder through the two orthogonal direction vectors of x- and y-direction of a Cartesian coordinate system spanned is. Perpendicular to the z-direction extends upward, d. H. against the direction of gravity. Accordingly, the relative Positional terms defined such that an upper position of the bottom position seen substantially in the z-direction from the bottom Position is spaced.

of extension, Force and / or displacement direction (s) can / with respect to a coordinate system be specified. Related in the following description using the term "essentially" with a directional indication, this means, in particular, that the direction to be indicated is that of said reference direction is less than about ± 20 degrees, preferably less than about ± 15 degrees, more preferably less than about ± 10 Degrees, and more preferably less than about ± 5 degrees, in particular less than about ± 2 Degree deviates. The term "im essential "can especially a minor one Describe deviation from a target value, in particular a deviation within the manufacturing accuracy and / or within the scope of the necessary Accuracy, so that one Effect is maintained, as it is present at the setpoint. The term "im essential "can therefore, a deviation of less than about ± 30%, less than about ± 20%, less as about ± 10%, less than about ± 5%, less than about ± 2%, preferably less than about ± 1% from a setpoint, etc., respectively. The term "substantially" includes the term "identical," d. H. without deviation from a desired value, a desired position, etc.

Becomes in the following description in connection with an indication in a unit of measurement Degree the term "about" used this means, in particular, that the value to be indicated by the said set point by less than ± 10%, and preferably by less as ± 5%, more preferably less than ± 2%, more preferably about less than ± 1%, in particular by less than ± 0,5% differs.

The term "diameter" is, as far as it is not to be understood in the sense of a circle diameter, to be understood as the maximum extent along a direction. For example, a square hole with the edge length 1 mm according to this definition has a diameter of √ 2 mm.

The The aforementioned positions and directions are exemplary and serve in particular as a reference to the description z. B. from the side of Membrane holder and / or for the determination of directions, for example clearly definable or determinable coordinates. Possibly can also other positions are used or another coordinate system.

Preferred embodiments of the manufacturing process

Preferably, the diameter D _{o is} greater than the diameter D _u . In particular, the membrane holder opening may be conical, for example by a conical cutting of the membrane holder opening from the membrane holder or by drilling or lowering a conical membrane holder opening by means of a conical drilling or countersinking tool in the, in particular plate-shaped, membrane holder. Particularly preferably, the ratio of the diameter D _o / D _{u is} preferably greater than 1.1, more preferably greater than 1.2, greater than 1.4, greater than 2, greater than 2.8 and in particular greater than 4.

advantageously, is by an example conical design of the membrane holder opening in it held diaphragm prevented to shift down - ie opposite to the z-direction - when the membrane opposes by applying a force to the membrane the z direction is actuated, d. H. against the z-direction deformed or shifted, is.

Further Advantageously, the contact surface between the membrane holder and the membrane enlarges, so that the Bonding force between the two is also increased if the specific Binding force per unit area between membrane holder and membrane remains constant.

• – Bereitstellen einer unteren Membranträgerschicht;
• – Bereitstellen einer oberen Membranträgerschicht;
• – Ausbilden zumindest einer unteren Membranträgeröffnung in der unteren Membranträgerschicht mit jeweils einer Mittelachse M_u und jeweils einem Durchmesser D_u;
• – Ausbilden zumindest einer oberen Membranträgeröffnung in der oberen Membranträgerschicht mit jeweils einer Mittelachse M_o und jeweils einem Durchmesser D_o;
• – Verbinden der oberen Membranträgerschicht mit der unteren Membranträgerschicht unter Ausbildung des Membranhalters, so daß die Mittelachsen M_u und M_o im wesentlichen zusammenfallen, so daß die untere Membranträgeröffnung und die obere Membranträgeröffnung die Membranhalteröffnung ausbilden.

Preferably, the method further comprises the steps of:

• - Providing a lower membrane support layer;
• Providing an upper membrane carrier layer;
• - Forming at least one lower membrane carrier opening in the lower membrane carrier layer, each having a central axis M _u and each having a diameter D _u ;
• - Forming at least one upper membrane carrier opening in the upper membrane carrier layer, each having a central axis M _o and each having a diameter D _o ;
• - Connecting the upper membrane carrier layer with the lower membrane carrier layer to form the membrane holder, so that the central axes M _u and M _o substantially coincide, so that the lower membrane carrier opening and the upper membrane carrier opening form the membrane holder opening.

A Membrane support layer is essentially a flat planar or plate-shaped workpiece, in particular a foil that is substantially parallel to the x-y plane extends. The layer thickness or thickness of the membrane carrier layer along the z-direction is more preferably less than about 1000 μm, further preferably less than about 500 microns, more preferably less than about 300 μm, especially preferably less than about 100 μm, and in particular less than about 30 microns. Particularly preferred the lower and upper membrane support layer from a polymer, in particular a polyimide.

In two membrane carrier layers are formed, in particular circular, openings with mutually different diameters D _u and D _o , wherein D _{u is formed} as a smaller diameter. The membrane carrier layer with the smaller opening having the diameter Du becomes the lower membrane carrier layer, the remaining membrane carrier layer thus becomes the upper membrane carrier layer. The membrane carrier layers are superimposed and connected to one another such that the central axes M _u and M _{o of} the openings, in the case of circular openings, these are the cylinder axes of the openings, substantially coincide. That is, the offset between the center axes M _u and M _{o is} less than about 20% of the diameter D _u , more preferably less than about 10% or about 5% of the diameter D _u .

at non-circular or cylindrical openings Let be the central axis of the opening defined by the fact that the Central axis parallel to the z-direction and through the geometric Center of the opening runs.

advantageously, may be a membrane holder opening particularly easy by, in particular rectangular, cutting two openings in the membrane carrier layers by means of a blade or a laser beam, in particular by machine, be generated. By connecting the two membrane carrier layers is then formed the membrane holder, wherein the compound in particular by gluing, laminating, welding or vulcanization can.

The membrane advantageously has an enlarged bearing surface on the lower membrane carrier layer. In order to keep the membrane safe under high pressure loading of about 100 kPa to about 500 kPa, the ratio of the diameters D _o / D _{u is} preferably greater than 1.1, more preferably greater than 1.2, greater than 1.4, greater than 2, greater than 2.8, greater than 4, in particular greater than 5.

Preferably is the lower membrane carrier layer and / or the upper membrane carrier layer coated on at least one side with an adhesive and bonding the upper membrane carrier layer with the lower membrane carrier layer done by gluing.

Especially Preferably, the adhesive may be a hot melt adhesive, in particular an acrylic monomer that is thermally crosslinked. Especially is the temperature when connecting the membrane carrier layers in a range of about 100 ° C up to about 200 ° C. The compound is preferably by means of rolling lamination or by pressing.

advantageously, the connection between the membrane carrier layers by the adhesive is especially easy and reliable manufacture.

• – Anordnen einer Abdeckung an den Membranhalter, um die Membranhalteröffnung einseitig zu verschliessen;
• – Anordnen einer Schablone an der unverschlossenen Seite der Membranhalteröffnung, wobei die Schablone eine im wesentlichen zu der zumindest einen Membranhalteröffnung kongruenten Schablonenöffnung aufweist, so daß der Membranhalter außerhalb der Membranhalteröffnung im wesentlichen vollständig abgedeckt ist.

Preferably, the method further comprises the steps of:

• - Arranging a cover to the membrane holder to close the membrane holder opening on one side sen;
• Arranging a template on the unsealed side of the membrane holder opening, the template having a template opening substantially congruent with the at least one membrane holder opening, so that the membrane holder outside the membrane holder opening is substantially completely covered.

By that, in particular flush, Close the membrane holder opening on one side, can over the still accessible Side of the membrane opening a substance is introduced into the membrane holder opening, which subsequently forms the membrane. This substance is going through the cover is prevented from exiting the membrane holder opening. Conveniently, the cover is arranged on the membrane holder bottom.

Around the membrane holder during filling the substance and the subsequent Shielding to protect against contamination by the substance is the template is placed on the uncovered side of the membrane holder opening.

advantageously, allows the formation of the membrane of a still liquid, further solidifying Substance the formation of a connection between the membrane and the membrane holder. An additional Adhesive is not necessary as opposed to inserting a prefabricated membrane in the membrane holder opening.

Particularly preferably, the template consists of metal. The opening of the template with the diameter D _o can be formed in particular by a (photo) lithographic process. In particular, the opening in a metal foil can be formed by an etching bath.

Preferably comprises the method further comprises the step of: doctoring an elastically strengthening one Substance for forming the membrane. This is advantageous Scrape the substance very easily and with little effort perform.

• – Anordnen einer Form an den Membranhalter, wobei die Form zu jeder Membranhalteröffnung an der Membranhalteroberseite jeweils eine im wesentlichen zu dieser kongruente Aussparung sowie jeweils zumindest eine Zu- und Ableitung, welche die Aussparung mit dem Äußeren der Form verbinden, aufweist;
• – Zuführen einer flüssigen sich elastisch verfestigenden Substanz in den durch den Membranhalter, die Abdeckung und die Form gebildeten Hohlraum;
• – Verfestigen der flüssigen Substanz zur Ausbildung der Membran.

Preferably, the method further comprises the steps of:

• Arranging a mold on the membrane holder, wherein the mold to each membrane holder opening on the membrane holder top each having a substantially congruent to this recess and in each case at least one inlet and outlet, which connect the recess with the exterior of the mold;
• Feeding a liquid elastically solidifying substance into the cavity formed by the membrane holder, the cover and the mold;
• - Solidifying the liquid substance to form the membrane.

Especially the mold is placed on the membrane holder top so that each congruent recess of the mold with the associated membrane holder opening covers. In this position, the mold is pressed against the membrane holder or glued, so that a essentially fluid-tight, detachable formed mechanical contact between the mold and the membrane holder is.

The Form has at least one supply line and at least one derivative on which each connect between the exterior and the cavity formed by the mold, the membrane holder and the cover is formed. In particular, the mold is made of polymethylmethacrylate (PMMA) or acrylic glass. Particularly preferably, the recess of Form substantially frusto-conical shape.

Preferably over the Supply line becomes a liquid elastically solidifying substance introduced into the cavity, wherein the air in the cavity escape via the discharge can. The supply of liquid Substance stops when the substance exits the drain. In particular, however, you can both the supply and the discharge serve to the liquid substance supply or to divert the air.

Especially Preferably, the supply of liquid is elastically solidifying Substance in the following two steps. In the first step takes place the supply of liquid Substance by means of the Dispensierspitze, by one of the supply lines or introduced into the mold through one of the leads. In this case, the dispensing tip is preferably close to the cover introduced, whereby the cavity between the mold and the membrane holder of At its lowest point can be filled with the liquid substance. Advantageously, this prevents the inclusion of air bubbles.

Before the supplied Amount of liquid Substance reaches a mouth hole of an inlet or outlet, the Dispensing tip removed from the mold, so that in a second step the supply of liquid Substance over one of the supply lines, the dispensing tip preferably not protrudes into the cavity, but only partially in the supply line introduced is.

advantageously, is the choice of possible liquid elastically solidifying substance in this process for Production of the membrane is particularly extensive.

Preferably is the cover by a solvent soluble and / or by a solvent essentially detachable without force. Conveniently, does not make the formed membrane or membrane holder, too not partially, by the solvent solved. Particularly preferred is the solvent Water.

Especially the cover is preferably a film, in particular a polyester film, which is coated with polyvinyl alcohol and / or polyvinylpyrolidone is. The coating is water soluble, so that the cover Solvable without force from the membrane holder, d. H. removable by water is.

advantageously, The cover can be released from the membrane holder and without force the trained membrane detached so that one damage the membrane is prevented.

Preferably comprises the method of dispensing a liquid elastically solidifying substance from the edge of the membrane holder opening towards the center, in particular spirally, so that the membrane holder opening is closed becomes. Particularly preferably, the edge of the membrane holder opening is through the elastically solidifying substance is substantially completely covered and more specifically, the membrane holder opening becomes through this substance essentially complete filled.

These alternative type of membrane training advantageously requires neither a cover still a template. However, the selection is on membrane-forming substances in addition restricted by the viscosity, since the membrane-forming substance must, on the one hand, be able to flow in order to form a smooth membrane surface, but on the other hand, it must be firm enough to be at the predetermined Position in the membrane holder opening to persist until the curing process is complete is. Furthermore, the membrane holder must not rest on a work surface.

advantageously, can by accurately metering the amount of substance a substantially flat membrane are formed, which is substantially no surface structure having. Furthermore, soiling can of the membrane holder can be avoided by the membrane-forming substance.

Preferably, the method comprises forming a drop of a liquid elastically solidifying substance at a dispensing tip, the drop having a diameter greater than or equal to the diameter D _{u of} the membrane holder opening at the membrane holder bottom ( 21 ) and placing the drop on the membrane holder opening so that the membrane holder opening is closed.

there the dispensing tip is at a sufficient distance from the occlusive Membrane holder opening positioned when a sufficient amount of the liquid itself elastically solidifying substance is expelled from the dispensing tip, to form the drop, so that the substance initially not with the membrane holder in contact arrives. After a predetermined amount of the liquid is elastically solidifying Substance leaked from the Dispensierspitze and formed the drop is, the dispensing tip is displaced in the direction of the membrane holder opening, to arrange the drop at the membrane holder opening, so that this closed is. After curing the liquid Substance is formed of the elastic membrane.

These alternative type of membrane training also needed advantageously neither a cover nor a template. Further advantageously There is one compared to the previously described method bigger selection on membrane-forming substances, since the restriction on the viscosity less is engraved.

Preferably is the elastically solidifying substance for forming the membrane a polymer.

Preferably, the elastically solidifying substance for forming the membrane is silicone. In particular, the membranes can be formed of a technical silicone, as the sealing and Adhesive material is used.

advantageously, this material has particularly good adhesion to surfaces, so that one secure connection with the membrane holder can be formed. Further advantageously, the elongation at break is about 500%. There Silicone in general is transparent, can be beneficial the quality the diaphragm formed in the membrane holder can be easily judged.

Further Preferably, the solidification or structural cross-linking takes place of the silicone at an elevated level Temperature of preferably about 60 ° C to about 120 ° C, further preferably from about 75 ° C up to about 105 ° C, in particular about 90 ° C.

• – Bereitstellen einer Basis;
• – Bereitstellen einer Durchflußkanalschicht mit zumindest einer Ausnehmung;
• – Verbinden der Durchflußkanalschicht mit der Basis, wodurch das Durchflußelement mit dem Durchflußkanal ausgebildet wird.

Preferably, the method comprises the steps:

• - providing a base;
• - Providing a Durchflußkanalschicht with at least one recess;
• - Connecting the flow channel layer to the base, whereby the flow element is formed with the flow channel.

The Basis is essentially a flat surface or plate-shaped workpiece, which both rigid and flexible. In particular, the Based on a polymer plate, a metal plate or a (polymer) or metal) foil, the base being substantially parallel extends to the x-y plane.

The term rigid in relation to flexible in the context of the invention is understood to mean that the modulus of elasticity E and / or the shear modulus G of the rigid body by at least a factor of 2, preferably at least a factor of 5, factor 10 or factor 100, and particularly preferred at least a factor of 1000 greater than the modulus of elasticity E and / or the shear modulus G of the flexible body in comparison. In particular, a body is considered inherently rigid if its modulus of elasticity E and / or shear modulus G is greater than 1 × 10 ⁸ Nm ^-2 , greater than 5 × 10 ⁸ Nm ^-2 , greater than 1 × 10 ⁹ Nm ^-2 , greater than 5 × 10 ⁹ Nm ^-2 and in particular greater than 1 × 10 ¹⁰ Nm ^-2 . In particular, a body is considered flexible per se, if its modulus of elasticity E and / or the shear modulus G is less than 1 × 10 Nm ^-2 , less than 5 × 10 ⁶ Nm ^-2 , less than 1 × 10 ⁶ Nm ^-2 and in particular smaller than 5 × 10 ⁵ Nm ^-2 .

Parallel at the base becomes the flow channel layer arranged, which also has a substantially flat or disc-shaped Workpiece, in particular a film, is. The layer thickness or strength of Durchflußkanalschicht along the z-direction is more preferably less than about 1000 microns, more preferably smaller as about 500 μm or less than about 250 microns or less than about 150 μm, more preferably less than about 100 microns or less than about 50 microns or less than about 25 microns or less than about 10 microns, and in particular less than about 5 microns. Particularly preferred the flow channel layer from a polymer, in particular a polyimide.

In the Durchflußkanalschicht at least one recess is formed, which later forms at least partially a flow channel. The recess can be particularly easily generated by, in particular rectangular, cutting by means of a blade or a laser beam. Preferably, the recess extends substantially, in particular in a straight line, along a longitudinal direction L ₁ .

By the connection of the base to the flow channel layer then becomes the flow element formed, wherein the compound in particular by gluing, laminating, welding or vulcanization can take place.

Especially Preferably, the base and / or the flow channel layer is at least one-sided coated with an adhesive and bonding base with the Durchflußkanalschicht done by gluing. In particular, the adhesive may be a hot melt adhesive be as described above. Advantageously, the compound made particularly easy and reliable by the adhesive.

Preferably comprises the method of forming the flow element providing a flow channel layer and forming at least one flow channel through material removal Processing.

As an alternative to the above-described embodiment of the flow-through element by connecting a base to a flow-through layer, the flow-through element may be formed in one piece. The at least one flow channel can then be formed by a material-removing machining, for example by machining, shaving and / or eroding machining or by etching, depending on the material of the flow element. Advantageously, eliminates in this alternative, the step of bonding.

Preferably comprises the method of applying a wetting filler to the valve seat, so that the free surface of the wetting filler due to the surface tension a steadily curved one Takes shape and the subsequent Harden of the wetting filler.

Especially can the flow element with at least one flow channel be formed, wherein the flow channel is a substantially has rectangular cross section, so that the flow passage through a membrane can not be completely closed substantially since a fluid in the corner regions of the flow channel find a flow path can. Preferably, the flow channel having a trapezoidal cross-section be formed.

advantageously, completes a liquid Filler, in the flow channel is dispensed due to the surface tension of the filler the corners off. The membrane is therefore better on the wall of the flow channel on and off the flow channel therefore better.

Preferably is the wetting filler a UV-curing Adhesive and curing takes place by irradiation with ultraviolet light.

• – Bereitstellen einer Aktuationskanalschicht, mit zumindest einem Aktuationskanal als Aktuator;
• – Verbinden der Aktuationskanalschicht mit der Membranhalteroberseite des Membranhalters, so daß die Membran zumindest bereichsweise an zumindest einem Aktuationskanal angeordnet ist.

Preferably, the actuation element is formed by the following steps:

• - Providing a Aktuationskanalschicht, with at least one Aktuationskanal as an actuator;
• - Connecting the Aktuationskanalschicht with the membrane holder top of the membrane holder, so that the membrane is at least partially disposed on at least one Aktuationskanal.

• – Verbinden einer Deckschicht mit der Aktuationskanalschicht.

Further preferably, the step additionally takes place:

• - Connecting a cover layer with the Aktuationskanalschicht.

The Covering layer is essentially a flat planar or plate-shaped workpiece, which both rigid and flexible. In particular, the Base may be a polymer plate or a film, with the base extends substantially parallel to the x-y plane.

Parallel to the cover layer, the Aktuationskanalschicht is arranged, the likewise a substantially flat planar or plate-shaped workpiece, in particular a foil is. The layer thickness or strength of the Aktuationskanalschicht along the z-direction is more preferably less than about 1000 μm, more preferably less than about 500 microns or less than about 250 microns or less than about 150 μm, more preferably less than about 100 microns or less than about 50 microns or less as about 25 microns or less than about 10 microns, and in particular less than about 5 microns. Particularly preferred the Aktuationskanalschicht of a polymer, in particular a Polyimide.

In the Aktuationskanalschicht at least one recess is formed, which later forms at least partially an actuation channel. The recess can be particularly easily generated by, in particular rectangular, cutting by means of a blade or a laser beam. Preferably, the recess extends substantially, in particular in a straight line, along a longitudinal direction L ₂ .

By the connection of the cover layer with the Aktuationskanalschicht is then formed the Aktuationselement, the connection in particular by gluing, laminating, welding or vulcanization can.

Especially Preferably, the cover layer and / or the Aktuationskanalschicht coated on at least one side with an adhesive and bonding Cover layer with the Aktuationskanalschicht by gluing. In particular, the adhesive may be a hot melt adhesive, as above described. Advantageously, the connection is through the adhesive especially easy and reliable manufacture.

alternative can the actuator element in one piece be formed, wherein the at least one Aktuationskanal by a material removal or material displacement process, for example Milling, planing, or hot stamping, formed becomes. Alternatively, the actuation element can also be formed in one piece by injection molding become.

Preferably, the at least one flow channel is substantially along a first longitudinal direction L ₁ is arranged to extend and the at least one Aktuationskanal is arranged extending substantially along a second longitudinal direction L ₂ . In this case, the angle θ enclosed between the longitudinal directions L1 and L2 is preferably different from zero.

Especially Preferably, the included angle θ is between about 15 degrees and about 90 degrees. In particular, amounts the included angle θ approximately 90 degrees, about 60 degrees or about 45 degrees.

advantageously, occurs a displacement or deformation of the flow channel and thus a reduction in the Durchflußkanalquerschnitts only in the range the membrane. A pressure difference between the Aktuationskanal and the flow channel leads due of the big one Distance in the case of a non-zero angle only to one small deformation of the flow channel.

The microfluidic valve according to one aspect

• – ein Aktuationselement mit zumindest einem Aktuator,
• – ein Durchflußelement mit zumindest einem Durchflußkanal,
• – einen Membranhalter mit einer Membranhalteroberseite, die mit dem Aktuationselement verbunden ist, einer Membranhalterunterseite, die mit dem Durchflußelement verbunden ist, zumindest einer Membranhalteröffnung und zumindest einer aktuierbaren, rückstellfähigen, insbesondere elastisch verformbaren, Membran, welche in der zumindest einen Membranhalteröffnung angeordnet ist,

wobei die zumindest eine Membran mit einer Membranunterseite mit dem Durchmesser D_u zumindest bereichsweise an dem zumindest einem Durchflußkanal angeordnet ist, wobei die zumindest eine Membran mit einer Membranoberseite mit dem Durchmesser D_o zumindest bereichsweise an dem zumindest einem Aktuator angeordnet ist, wobei der Durchmesser D_o größer als der Durchmesser D_u ist und wobei die Wandung des zumindest einen Durchflußkanals durch die zumindest eine aktuierbare Membran in einem Ventilsitz mechanisch kontaktierbar ist, so daß der zumindest eine Durchflußkanal im wesentlichen vollständig durch die Membran verschließbar ist.One aspect of the present invention relates to a microfluidic valve for flow control of fluids comprising:

• An actuation element with at least one actuator,
• A flow element with at least one flow channel,
• A membrane holder having a membrane holder upper side which is connected to the actuation element, a membrane holder underside which is connected to the flow element, at least one membrane holder opening and at least one actuatable, resilient, in particular elastically deformable, membrane which is arranged in the at least one membrane holder opening,

wherein the at least one membrane with a membrane base with the diameter D _u at least partially disposed on the at least one flow channel, wherein the at least one membrane with a membrane top with the diameter D _o at least partially disposed on the at least one actuator, wherein the diameter D _{o is} greater than the diameter D _u and wherein the wall of the at least one flow channel through the at least one actuatable membrane in a valve seat is mechanically contacted, so that the at least one flow channel is substantially completely closed by the membrane.

advantageously, in the membrane of the microvalve is formed resilient. This means that the membrane by applying a force K through the, in particular one-piece, Actuator along an actuating direction B is transferable from a rest position to an actuation position, wherein the membrane returns to the rest position when the force K is not more is created. In particular, the membrane is substantially elastic and only slightly plastically deformable, so that the Membrane in the operating position is substantially elastically deformed and due to their inherent elastic Restoring force essentially in the original one Rest position returns, when the deforming force K is no longer applied to the membrane is.

Therefore the microvalve is advantageously particle tolerant as a foreign body in the area of the valve seat the transition Do not prevent the diaphragm from the rest position to the operating position can. Rather, the membrane is due to the foreign body in the actuation position deformed accordingly. The flow channel can despite the foreign body in the Area of the valve seat are substantially completely closed.

Of the Term "direction of actuation" in the sense This invention describes a direction along which a Power applied and a body, In particular, the membrane can be displaced or deformed. For example can the actuation direction B substantially perpendicular to the cover layer or the membrane holder be the microvalve. It is also possible that the actuating direction B with the reference plane, For example, the membrane holder an angle between about 85 ° and about 60 °.

The Membrane is one along the direction of actuation rejuvenated trained, so that the Membrane is advantageously kept particularly reliable when the Membrane acted upon by a force K along the direction of actuation B. is to be overrun in the operating position.

The term "rest position", as used in the context of the present invention, describes, for example, the state or the position of one or more parts or elements of the microvalve, in particular the membrane. The term "rest position", as used in the context of the present invention, describes in particular that position of the membrane when the microvalve in the unused state (Zu was directly after production) or opened state. In other words, in the rest position, the membrane does not protrude into the flow channel, so that a fluid can pass through the microvalve substantially unhindered.

Of the Term "operating position", as he is used in the context of the present invention, describes a different from the aforementioned state or the aforementioned position State or position of the aforementioned parts or elements, in particular the membrane. In contrast to the rest position is in the actuation position a force K exerted on one or more parts or elements of the microvalve. Especially the diaphragm is in the actuation position at least partially deformed along the direction of actuation B. or displaced and protrudes at least partially into the flow channel. Here, the areas of the membrane, which are close to the center axis of the Membrane holder opening are arranged, shifted more or deformed, as the areas of the membrane, with the membrane holder to contact.

Of the flow channel is in the operating position essentially, in particular completely, closed by the membrane. In other words, a fluid can not travel along in the actuation position the flow direction F through the flow channel flow, d. H. the microvalve substantially completely blocks the flow channel. there stand the direction of actuation B and the flow direction Preferably substantially perpendicular to each other.

Of the Term "operating position", as he is used in the context of the present invention, thus describes in particular a position according to the Membrane the wall of the flow channel, especially in the area of the valve seat, mechanically contacted. In particular, it is a direct one made mechanical contact between the membrane and the valve seat.

Particularly preferably, the membrane holder is integrally formed. Further preferably, the membrane holder of the microvalve comprises a lower membrane carrier layer, in which at least one lower membrane carrier opening, each having a central axis M _u and a diameter D _{u is} formed and an upper membrane carrier layer in which at least one upper membrane carrier opening, each having a central axis M _o and respectively a diameter D _{o is} formed, wherein the upper membrane support layer is connected to the lower membrane support layer so that the central axes M _u and M _o substantially coincide, so that the lower membrane support opening and the upper membrane support opening form the membrane holder opening.

Preferably is the lower membrane carrier layer and / or the upper membrane carrier layer at least one side coated with an adhesive and the top Membrane support layer with the lower membrane carrier layer glued by means of the adhesive.

Preferably the adhesive is a hot melt adhesive.

Preferably the membrane consists of a polymer and in particular of a Elastomer.

Preferably the membrane consists of a silicone or silicone mixture.

Preferably comprises the microvalve has a base and a flow channel layer with at least a recess, wherein the flow channel layer with the base connected is.

Preferably is the flow element formed integrally with the at least one flow channel.

Preferably is the at least one flow channel at least in regions with a continuously curved, in particular a conical or trapezoidal or semi-circular, Cross section formed.

Preferably is the valve seat by a cured filler at least partially steadily curved educated.

Preferably is the cured one filler a UV-curing Adhesive.

The actuation of the membrane can be effected in particular pneumatically, hydraulically, mechanically, electro-magnetically, thermoelectrically and / or piezoelectrically. The mechanical actuation can be, for example by plungers, which are controlled by cams. Alternatively, the plunger can also be controlled electromagnetically, for. B. by a surrounding coil. A thermoelectric actuation can be carried out by electrically heating up a fluid or solid volume, which actuates the membrane as a result of the thermal expansion or the increase in volume when the state of matter (evaporation) changes. Alternatively, the expansion of a solid and the resulting actuation can also take place by means of the piezoelectric effect. In particular, the actuation of the membrane can also be effected by pressurization by means of a fluid, ie a gas or a liquid.

Preferably comprises the Aktuationselement an Aktuationskanalschicht with at least an actuation channel and a cover layer, wherein the Aktuationskanalschicht is connected to the membrane holder top of the membrane holder and wherein the cover layer is connected to the actuation channel layer is.

Further Preferably, the cover layer and / or the Aktuationskanalschicht rigid or relative to the flexible membrane rigid, so that the Cover layer and / or the Aktuationskanalschicht substantially do not deform when the pressure in the actuation channel is increased. Advantageously allows an actuation element designed in this way has an improved actuation the membrane, since only small pressure losses due to deformation of the Aktuationselementes occur.

Especially Preferably, the actuator can be integrally formed.

Preferably the cover layer and / or the Aktuationskanalschicht is at least coated on one side with an adhesive and the topcoat glued to the Aktuationskanalschicht by means of the adhesive.

Preferably, the at least one flow passage extends substantially along a first longitudinal direction L ₁ and the at least one actuation channel extends substantially along a second longitudinal direction L ₂ , the angle θ included between the longitudinal directions L1 and L2 being different from zero.

advantageously, occurs a displacement or deformation of the flow channel wall only in the area of the membrane. A pressure difference between the Actuation channel and the flow channel leads due to the large distance between them in the case of a nonzero angle a small deformation of the membrane holder and thus the flow channel.

Preferably comprises the actuator element of the microvalve to each membrane one of respective diaphragm associated plunger as a preferred actuator. Advantageously, the actuation is particularly simple in this case mechanically through the use of cams or electromechanical through coil magnet systems perform.

The microfluidic pump according to one aspect

One Aspect of the present invention relates to a microfluidic Pump or micropump for moving fluids (i.e., gases and / or Liquids), wherein the micropump at least three microvalves according to the invention having. In particular, the at least three microvalves are operatively along of the flow channel connected in series. The pumping of the fluid takes place according to the principle peristalsis by cyclic opening and closing of the Microvalves. Advantageously, the pumping direction can be reversed of the opening and closing cycle be reversed.

Preferably the micropump is in one piece. Particularly preferred is the micropump formed from polymer films which are glued together or laminated and thereby form a part.

The microfluidic system according to one aspect

One Aspect of the present invention relates to a microfluidic System comprising at least one microfluidic component according to the invention (i.e., at least one microvalve according to the invention and / or at least a microfluidic according to the invention Pump), at least one flow channel for a fluid and at least one Functional component, which can be contacted with the fluid in the flow channel is included.

Under "contacted" is in Meaning of the invention understood that a mechanical and / or electrical and / or thermal contact between the fluid in the flow channel and the functional component.

Preferably is the functional component a sensor for determining physical, chemical and / or biological properties of the fluid.

Especially the fluid can be supplied to the sensor by means of the flow channel, then that the Sensor, for example, the temperature, the pressure, the density, the electric conductivity, the viscosity, the coloring, the chemical composition, the type and amount of substances dissolved in the fluid and / or gases and / or particles present in the fluid and / or colloids and the number of microbiological organisms present in the fluid.

Preferably, the functional component is an electronic component, whereby by means of the flow channel ( 47 ) a fluid for cooling the electronic component can be provided.

Further Preferably, the electronic component is at least during its Operating a cooling fluid supplied in heat converted electrical power dissipation of the electronic component dissipate from this. In the cooling fluid it is preferably a liquid with a high heat capacity. Further Preferably, the cooling fluid also a liquid with a boiling point of less than or equal to 100 ° C, more preferably smaller or equal to 80 ° C, in particular be less than or equal to 40 ° C. Further preferred a cooling fluid with a high enthalpy of vaporization or energy. Preferably, the Evaporation energy greater than 350 kJ / kg, more preferably the evaporation energy is greater than 450 kJ / kg, greater than 800 kJ / kg, in particular greater than 2200 kJ / kg. In particular, the cooling fluid may be water or ethanol be. The cooling the electronic component can preferably by only by warming of the cooling fluid or by evaporation or evaporation of the cooling fluid.

The The present invention is not limited to the above, by way of example embodiments limited. Rather, you can individual elements and / or features of each described aspect and / or each described embodiment with individual elements and / or features of the further aspects and / or other embodiments be combined in any way with each other and thus more Aspects and / or embodiments be formed.

figure description

following become preferred embodiments of the present invention with reference to the accompanying drawings by way of example explained. Show it:

1a -I: cross sections through the elements, semi-finished products and the microvalve in the rest position according to an embodiment in the individual steps of production;

1j a cross section through the microvalve in the actuated position;

1k Figure 1 is a cross-sectional view of individual elements of the microvalve in an alternative method of forming the membrane;

2a -G: cross sections through the elements, semi-finished products and the microvalve in the rest position according to an embodiment in the individual steps of production;

2h a cross section through the microvalve in the actuated position;

3a D: cross sections through the elements, semi-finished products and the microvalve in the rest position according to an embodiment in the individual steps of production;

4 a cross section through a micropump;

5 : an embodiment of a microfluidic system.

The 1a -I show the individual steps of a preferred manufacturing process of a microvalve 1 , As in 1a is shown, in a first step, a lower membrane carrier layer 3 provided, which extends substantially parallel to the xy plane and in the at least one lower membrane carrier opening 5 is trained. Each lower membrane carrier opening 5 has a central axis M _u , which extends substantially parallel to the z-direction, and a diameter D _u . Further, an upper membrane carrier layer 7 provided in the at least one upper membrane carrier opening 9 is trained. Each upper membrane carrier opening 9 has a central axis M _o , which extends substantially parallel to the z-direction, and a diameter D _o . In particular, the diameter D _{o of} the upper membrane carrier layer opening 9 greater than the diameter D _u , preferably by a factor greater than 1.5.

The upper and lower membrane carrier layer 3 . 7 are preferably polyimide substrates having a thickness of about 25 microns to about 50 microns. The surfaces of the membrane carrier layers 3 . 7 can be smooth, profiled, rough and / or differently structured. In particular, the upper membrane carrier layer 7 on the side of which the lower membrane carrier layer 3 facing with an adhesive 11 coated.

The membrane carrier layers are arranged prior to mutual bonding such that the central axes M _u and M _o substantially coincide and then temporarily fixed in this arrangement. The temporary fixing can be done for example by registration pins, clamps or adhesive strips, so that mutual displacement is prevented.

To the membrane holder 13 form, the upper membrane carrier layer 7 with the lower membrane carrier layer 3 connected by gluing or laminating. The bonding process may include heating and compressing the membrane support layers. Will a hot melt adhesive as an adhesive 11 used, the membrane support layers and the interposed melt adhesive must be heated to temperatures of about 100 ° C to about 200 ° C to liquefy the hot melt adhesive and perform the bonding by the subsequent crosslinking of the hot melt adhesive. After the formation of the membrane holder 13 form the lower membrane carrier opening 5 and the upper membrane support opening 9 together the membrane holder opening 15 out.

The membrane holder 13 has a membrane holder top 17 on, which is designed to work with an actuator element 19 to be connected, and a membrane holder base 21 that is designed to work with a flow element 23 to be connected.

As in 1b is shown at the membrane holder base 21 a cover 25 to the membrane holder 13 arranged around the membrane holder opening 15 to close. The cover 25 is preferably a polyvinyl alcohol-coated polyester film. The cover 25 is due to the water-soluble coating 27 in a later step in a water bath of the membrane holder 13 detachable force-free.

At the membrane holder top 17 becomes a template 29 , in particular a metal template, to the membrane holder 13 arranged around the edge of the membrane holder opening 15 cover. That's why the template has 29 to each membrane holder opening 15 each a substantially this congruent template opening 31 ,

Subsequently, a liquid silicone mixture 33 on the template 29 applied and with a squeegee 34 into the sealed membrane holder opening 15 introduced or scrape. The membrane holder top 17 is through the template 29 during doctoring against contamination by the silicone mixture 33 protected.

As in 1c shown, the membrane becomes 37 through the cured silicone mixture 33 in the membrane holder opening 15 educated. The curing takes place at an elevated temperature of about 90 ° C in order to favor the cross-linking of the individual silicone molecules and the mechanical strength of the membrane 37 to improve. The membrane 37 is more flexible or elastic than the membrane holder. Ie. by acting in each case the same size, the same direction K force is the membrane 37 spatially displaced or deformed more than the membrane holder 13 , In other words, the membrane holder 13 relative to the membrane 37 essentially rigid.

The template 29 and the cover 25 be after the formation of the membrane 37 , as in 1d shown again from the membrane holder 13 away.

In the next step, as in the 1e and 1f shown an actuator element 19 with an actuator 39 on the membrane holder 13 arranged and fastened. The actuator used in the embodiment shown 19 includes an actuation channel 41 , The actuation channel 41 is formed by walls that at least partially through the membrane holder 13 , an actuation channel layer 43 and a cover layer 45 be formed.

In the actuation channel layer 43 is an actuation channel 41 as a preferred actuator 39 educated. The actuation channel layer 43 comes with the membrane holder top 17 of the membrane holder 13 glued so that the membrane 37 at least partially on at least one Aktuationskanal 41 is arranged. In other words, the membrane forms 13 partially the wall of the Aktuationskanals 41 , Subsequently, the cover layer 45 with the actuation channel layer 43 connected to the actuation channel 41 substantially fluid-tight, with the exception of at least one fluid connection in the cover layer 45 and the actuation channel layer 43 which is designed for the actuation channel 41 with a fluid, ie a liquid or a gas supply. In other words, via the fluid port by means of the fluid in the Aktuationskanal 41 a fluid pressure can be built up.

The connection of topcoat 45 , Actuation channel layer 43 and membrane holder 13 is preferably done by gluing. The cover layer shown 45 and actuator channel layer 43 are preferably coated on one side with a hot melt adhesive, so that the connection can be carried out by means of lamination under elevated temperature and elevated contact pressure.

As in 1g shown, in the next step, a flow element 23 with at least one flow channel 47 provided. The flow element 23 is through a base 49 and a flow channel layer 51 with a recess 53 educated.

The flow channel layer 51 is a flat layer, with the recess 53 forming cut surfaces through the Durchflußkanalschicht 51 preferably at a right angle to the layer plane. Alternatively, the cut surfaces may also be at an angle greater than 0 degrees and less than 90 degrees to the layer plane.

The flow channel layer 51 will be with the base 49 , For example, by gluing, connected and then form the flow element 23 , Alternatively, the base 49 , with a suitable choice of material (eg dry resist Pyralux PC-1015 from DuPont for the base 49 and polyimide film LF-1030 also from DuPont for the flow channel layer 51 by rolling on the non-melt-coated side of the flow channel layer 51 get connected.

The adhesive coated side of the flow channel layer 51 is designed with the membrane holder base 21 to be connected. The walls of the base 49 , the flow channel layer 51 and the membrane holder base 21 form after the connection at least partially the flow channel 47 out. The area of the flow channel 47 where the membrane 37 is arranged as a valve seat 55 designated.

As in 1g has been shown produced by the described method flow channel 47 a rectangular or trapezoidal cross-section. An edge 57 between the base 49 and the flow channel layer 51 is designed essentially angular. This embodiment may result in that the flow channel 47 can not be completely closed and remains in the region of the abutting edge a flow path with a small cross-section. Preferably, the abutting edge 57 therefore rounded.

Around this corner at the bumper 57 to round, as in 1h shown, a wall wetting, liquid filler 59 be applied. Due to the surface tension of the filler 59 The free surface takes on a steadily curved shape. After curing of the filler 59 is the corner of the bumper 57 and thus the wall of the flow channel 47 rounded. The the flow channel 47 facing surface of the cured filler is hereinafter referred to as part of the wall of the flow channel 47 considered. The rounding can be along the entire edge 57 done or only partially, especially in the area of the later valve seat 55 , ie in particular the region of the flow channel 47 which will mechanically contact the membrane in the operating position of the microvalve.

The filler 59 may be a solid at room temperature and molten before application, which cures by cooling or solidification. Alternatively, the filler could 59 be a dissolved in a solvent substance which cures by evaporation of the solvent. Preferably, the filler could 59 a UV-curable adhesive, wherein the curing is carried out by irradiation with ultraviolet light.

As in 1i is shown after curing of the filler 59 the flow element 23 with the membrane holder base 21 of the membrane holder 13 connected so that the membrane 37 at least partially on the flow channel 47 is arranged. The wall of the flow channel 47 is then through the actuatable membrane 37 in the valve seat 55 mechanically contactable. Connecting the flow channel 47 is done by gluing, in particular by means of an adhesive with the Durchflußkanalschicht 51 be is layered. Preferably, the flow channel layer 51 coated with a hot melt adhesive, so that the flow element 23 with the membrane holder 13 can be connected by lamination.

The 1i shows the microvalve 1 in the rest position, in which the membrane in particular not in the flow channel 47 protrudes. The membrane 37 is deflectable by a force K along the direction of actuation B, wherein the actuating direction B is substantially parallel to the z-direction. This force K is generated by that of the Aktuationskanal 41 with a pressure P is applied. The pressure P acts omnidirectionally and thus exerts a force K in the direction of actuation B, the magnitude of the force K being proportional to the area of the membrane 37 is, which is acted upon by the pressure P. Because the membrane holder 13 and the actuation element 19 relative to the membrane 37 are rigid, the omnidirectional pressure P leads essentially to a deformation of the membrane 37 along the direction of actuation B.

Like in the 1i shown, the flow channel extends 47 essentially along a first longitudinal direction L ₁ , which is in particular substantially parallel to the y-direction. Substantially perpendicular to this extends the Aktuationskanal 41 along a second longitudinal direction L ₂ , which is in particular substantially parallel to the x-direction. Ie. the included angle θ between the longitudinal directions L1 and L2 is about 90 degrees. This will make the area outside the membrane 37 minimized, in which the Aktuationskanal 41 and the flow channel 47 spatially only by the (small) layer thickness of the membrane holder 13 are spaced. As a result, a deformation of the membrane holder and thus the cross section of the Aktuationskanals 41 and the flow channel 47 minimized, which due to a pressure difference between the Aktuationskanal 41 and the flow channel 47 arises. By this preferred embodiment, the membrane holder 13 and thus the membrane 37 be formed thinner, since the membrane holder 13 must absorb lower mechanical loads.

Alternatively, the first and second longitudinal directions L ₁ and L _{2 may} also include any angle θ when the membrane holder 13 is designed accordingly to deform sufficiently little in the pressure loads occurring.

The 1j shows the microvalve 1 in the operating position. The membrane 37 is deflected by a force K along the direction of actuation B against the z-direction, due to the in the Aktuationskanal 41 prevailing pressure P on the membrane 37 acts.

The membrane 37 is partially deformed or displaced in the actuation position along the direction of actuation B and partially protrudes into the flow channel 47 into it. The areas of the membrane are 37 which is close to the central axis M _{o of} the membrane holder opening 15 are arranged, more displaced or deformed, than the areas of the membrane 37 that with the membrane holder 13 to contact.

The membrane is deformed so that it is the wall of the flow channel 47 in the area of the valve seat 55 contacted essentially completely mechanically. This will be the flow channel 47 essentially completely closed. As in 1j shown, the continuously curved surface or surface of the membrane nestles 37 entering the flow channel 47 protrudes, substantially conforming to the wall of the flow channel 47 at. Because the resilient membrane 37 is deformed substantially elastically at the transition from the rest position to the actuation position, this deformation is reversible. That is, the membrane returns to the rest position when in the actuation channel 47 no pressure P is applied.

Because the membrane holder 13 and the actuation element 19 relative to the membrane 37 are rigid, are the membrane holder 13 and the actuation element 19 essentially not displaced or deformed compared to the resting position.

The 1k shows analogous to 1b a cross section through the membrane holder during the formation of the membrane by means of an alternative method. To the membrane holder 13 is, as in 1b shown the removable cover 25 arranged around the membrane holder opening 15 to close one-sided.

At the membrane holder top 17 becomes a form 65 to the membrane holder 13 arranged. Form 65 points to each membrane holder opening 15 at the membrane holder top 17 each a substantially congruent to this recess 67 on. Form 65 becomes such on the membrane holder top 17 arranged that the recess 67 the form 65 with the membrane holder opening 15 covers. In this position the shape 65 to the membrane holder 13 pressed so that a substantially fluid-tight, releasable mechanical contact between the mold 65 and the membrane holder 13 consists. Alternatively to applying egg A sufficient contact pressure can be between at the membrane holder top 17 or the bottom of the mold 65 an adhesive, in particular an adhesive tape, are applied or arranged to prevent ingress of silicone mixture 33 between the membrane holder top 17 and the bottom of the mold 65 to prevent.

Form 65 is preferably made of polymethyl methacrylate (PMMA) or acrylic glass. The recess 67 the form 65 is preferably substantially frusto-conical. Furthermore, the shape 65 at least one supply line 69 and a derivative 71 on which each the recess 67 with the exterior of the form 65 connect so that a silicone mixture 33 be fed from outside and between the mold 65 and the membrane holder 13 trapped air can escape. Preferably, the mouth hole of the supply line 69 in the recess 67 near the contact surface between the mold 65 and the membrane holder 13 arranged. More preferably, the mouth hole is the drainage 71 in the recess 67 in one of the contact surface between the mold 65 and the membrane holder 13 removed area, in particular the top of the conical recess 67 arranged.

To form the membrane, a silicone mixture 33 through the supply line 69 into the mold 65 be introduced, wherein in the form 65 trapped air through the drain 71 escapes. The supply of the silicone mixture 33 will be finished as soon as silicone compound 33 from the derivative 71 exit.

Preferably, the supply of the silicone mixture takes place in two steps. In the first step, the supply of the silicone mixture takes place 33 by means of a dispensing tip 35 passing through the in the apex of the recess 67 opening derivative 71 is introduced. At this time, the dispensing tip * 35 preferably becomes close to the cover 25 led, whereby the cavity between the form 65 and the membrane holder 13 from its lowest point is filled with the silicone mixture. Advantageously, this prevents the inclusion of air bubbles.

Before the supplied amount of the silicone mixture 33 the mouth hole of the supply line 69 reached, the Dispensierspitze 35 removed from the cavity. While extracting the dispensing tip 35 is preferably continuously dispensed, which advantageously prevents the formation of a local negative pressure, which could cause an inclusion of air bubbles.

In a second step, the supply of the silicone mixture takes place 33 over the supply line 69 where the dispensing tip 35 preferably does not protrude into the cavity, but only partially in the supply line 69 is introduced. Preferably, the supply line 69 a smaller diameter than the derivative 71 on. Preferably, the silicone compound flow rate, that is, the supplied amount of the silicone mixture 33 per unit time, the viscosity of the silicone mixture 33 adapted so that a substantially horizontal air-silicone mixture interface is formed in the cavity. This interface increases during the silicone compound feed to the top of the recess 67 in the shape 65 and continue to the derivation 71 , Once the silicone mix 33 from the derivative 71 exits, the supply of silicone mixture 33 completed.

The 1l shows the one with the cover 25 provided membrane holder 13 after hardening of the silicone mixture and removal of the mold 65 , The hardening of the silicone mixture 33 for the formation of the membrane 37 is preferably carried out at a temperature of about 90 ° C. The membrane formed by this preferred method 37 is above the membrane holder top 17 sublime. The further development of the microvalve can then as the 1d -J described.

The 2a -G show the individual steps of an alternative preferred manufacturing method of a microvalve 1 , As in 2a is shown in a first step, a membrane holder 13 provided in the at least one membrane holder opening 15 is trained. Without limiting the generality, the following is merely the case of a membrane holder opening 15 considered. The membrane holder opening 15 has on the membrane holder base 21 a diameter D _u and has on the membrane holder top 17 a diameter D _o . In particular, the diameter D _{o is} greater than the diameter D _u , preferably by a factor greater than 1.5. In other words, the membrane holder opening 15 conical.

The membrane holder top 17 is designed to work with an actuator element 19 to be connected, and the membrane holder base 21 is designed to work with a flow element 23 to be connected.

As in 2 B shown, the membrane holder 13 arranged on spacers, so that the membrane holder 13 does not rest with one side on a work surface. A liquid silicone mixture 33 is from the Edge forth in the membrane holder opening 15 dispensed. During the material order, the dispenser tip becomes 35 at a suitable distance to the membrane holder 13 Move on a suitable way, so that the membrane holder opening 15 from the edge with the silicone mixture 33 filled in and, as in 2c shown, ultimately closed.

By appropriately dosing the applied amount of the silicone mixture 33 depending on the viscosity of the silicone mixture 33 and the speed of movement and subsequent curing of the silicone mixture 33 , is a substantially planar membrane with this method 37 in the membrane holder opening 15 produced.

The membrane 37 has on its membrane underside a diameter D _u corresponding to the diameter D _{u of} the membrane holder opening 15 on the membrane holder base 21 on. Analog has the membrane 37 on its upper membrane face a diameter D _o corresponding to the diameter D _{o of} the membrane holder opening 15 on the membrane holder top 17 on.

To avoid contamination of the membrane holder are advantageously neither a cover 25 another template 29 necessary. The contamination is instead controlled by precise control of the travel path of the dispenser tip 35 reliably avoided.

As in the 2d and 2e is shown, then an actuation element 19 with an actuator 39 on the membrane holder 13 arranged and fastened. The actuator used in the embodiment shown 19 comprises an electrical, in particular a piezoelectric, actuator 39 , The actuator 39 and its electrical leads 61 be within an actuation channel layer 43 on the membrane 37 arranged.

The actuation channel layer 43 comes with the membrane holder top 17 of the membrane holder 13 bonded. Subsequently, a cover layer 45 with the actuation channel layer 43 connected. The cover layer 45 is preferably substantially rigid to an abutment for the actuator 39 to build.

The connection of topcoat 45 , Actuation channel layer 43 and membrane holder 13 is preferably done by gluing, as to the 1e and 1f described.

As in 2f is shown in the next step, a flow element 23 with at least one flow channel 47 provided. The flow element 23 is integrally formed, wherein the flow channel 47 by removing material in the flow element 23 is trained. The cross section of the flow channel 47 is in particular trapezoidal or trough-shaped or circular arc-shaped. The corners of the flow channel 47 in particular, they may already be round, so that subsequent rounding is not necessary.

As in 2g is shown, the flow element 23 with the membrane holder base 21 of the membrane holder 13 connected so that the membrane 37 at least partially on the flow channel 47 is arranged. The wall of the flow channel 47 is then through the actuatable membrane 37 in the valve seat 55 mechanically contactable. Connecting the flow channel 47 takes place by gluing, in particular by means of an adhesive with which the flow element 23 or the membrane holder base 21 is coated. Preferably, the adhesive is a hot melt adhesive so that bonding can be accomplished by lamination.

The 2g shows the microvalve 1 in the rest position, in which the membrane 37 especially not in the flow channel 47 protruding, wherein the flow channel 47 along the longitudinal direction L ₁ , that extends substantially in the y-direction. The membrane 37 is by a force K, that of the electric actuator 39 is applied, along the operating direction B, ie in particular substantially against the z-direction, deflected. This force K can be generated by the actuator 39 along the direction of actuation B expands. In particular, the actuator 39 a piezo-crystal, which expands due to the piezo-electric effect when applying a voltage of the actuating direction B. Alternatively, the actuator could 39 a coil and a magnet which displace against each other when a current flows through the coil, so that the longitudinal extent of the actuator 39 along the actuating direction B is increased. In particular, the actuating direction B and the longitudinal direction L ₁ are substantially perpendicular to each other.

The 2h shows the microvalve 1 in the operating position. The membrane 37 is by a Vergrö ßerung of the actuator 39 acted upon and deflected by a force K along the direction of actuation B. The membrane is deformed so that it is the wall of the flow channel 47 in the area of the valve seat 55 contacted substantially completely mechanically and the flow channel 47 essentially completely closes. The actuator returns 39 back to its rest position, so also returns the resilient membrane 37 in the rest position in back. Because the membrane holder 13 and the actuation element 19 relative to the membrane 37 are rigid, are the membrane holder 13 and the actuation element 19 essentially not displaced or deformed compared to the resting position.

The 3a -D show the individual steps of a further alternative preferred production method of a microvalve 1 , As in 3a is shown in a first step, a membrane holder 13 provided, which may preferably be a one-piece metal plate, in particular an approximately 1 mm thick steel plate. In the membrane holder 13 becomes at least one membrane holder opening 15 educated. Without limiting the generality, the following is merely the case of a membrane holder opening 15 considered. The membrane holder opening 15 has on the membrane holder base 21 a diameter D _u and has on the membrane holder top 17 a diameter D _o .

In particular, the diameter D _{o is} greater than the diameter D _u , preferably by a factor greater than 1.5. In other words, the membrane holder opening 15 tapered, preferably with a point angle of the corresponding truncated cone of about 90 ° to about 120 ° degree.

More preferably, the membrane holder opening 15 formed by machining or by machining by means of a laser beam. In particular, the conical membrane holder opening 15 be produced by drilling and subsequent reworking or in one operation by means of a countersinking drill.

The membrane holder 13 is placed on a spacer such that the membrane holder opening 15 is not closed by a work surface. A liquid silicone mixture 33 becomes downwardly open membrane holder opening 15 eindispensiert. In this case, one for closing the membrane holder opening 15 sufficient amount of the liquid silicone mixture 33 from a dispensing tip 35 ejected, wherein the dispensing tip at a sufficient distance from the membrane holder opening to be closed 15 is positioned so that the liquid silicone mixture 33 initially not with the membrane holder 13 come into contact. Due to its surface tension, the liquid silicone mixture remains 33 in the form of a drop first at the Dispensierspitze 35 ,

After a predetermined amount of the liquid silicone mixture 33 from the dispensing tip 35 is leaked, the Dispensierspitze is in the direction of the membrane holder opening 15 relocated. In this case, the drop at the membrane holder opening 15 arranged so that it is closed. After curing of the liquid silicone mixture 33 is the membrane 37 educated. To the membrane 37 with the membrane holder 13 Finally, in a flush design, additional liquid silicone mixture can be added along the edge of the membrane holder opening 33 be dispensed, whereby the membrane holder opening 15 is essentially completely closed.

As in 3b shown, the amount of einspensierten silicone mixture 33 be dimensioned so small that in the membrane holder opening 15 a menisci-containing membrane 37 is trained. The crosslinking or curing of the silicone mixture to form an elastic membrane is preferably carried out at a temperature of about 80 ° C to 100 ° C.

As in 3c is shown in the next step, a flow element 23 with at least one flow channel 47 provided. The flow element 23 is integrally formed, wherein the flow channel 47 by removing material in the flow element 23 is trained. The cross section of the flow channel 47 is executed in this embodiment is substantially rectangular with rounded corners. Alternatively, the cross section may in particular also be trapezoidal or channel-shaped, each with or without rounded corners, or circular arc-shaped. Because the corners of the flow channel 47 already round in this embodiment, a subsequent rounding is not necessary.

As in 3d is shown, the flow element 23 with the membrane holder base 21 of the membrane holder 13 connected so that the membrane 37 at least partially on the flow channel 47 is arranged. The wall of the flow channel 47 is then through the actuatable membrane 37 in the valve seat 55 mechanically contactable. Connecting the flow channel 47 takes place by gluing, in particular by means of an adhesive with which the flow element 23 or the membrane holder base 21 be is layered. Preferably, the adhesive is a hot melt adhesive so that bonding can be accomplished by lamination.

On the the flow channel 47 opposite side of the membrane 37 becomes an actuation element in this embodiment 19 (not shown in detail) with a plunger 39 or stamp 39 as a preferred actuator 39 on the membrane holder 13 arranged. The 3d shows the microvalve 1 in the rest position, in which the membrane 37 especially not in the flow channel 47 protruding, wherein the flow channel 47 along the longitudinal direction L ₁ , that extends substantially in the y-direction. The pestle 39 can the membrane 37 by applying a force K actuate along the direction of actuation B, ie in particular deflecting substantially counter to the z-direction. This can be the movement of the plunger 39 and thereby on the membrane 37 applied force K by other means of Aktuationselementes 19 be controlled or controlled mechanically, electro-mechanically, hydraulically and / or pneumatically.

Alternative to the pestle 39 can the actuator 39 in particular, a piezo-crystal (as in the 2g and 2h shown), which expands upon application of a voltage of the actuating direction B due to the piezoelectric effect. Alternatively, the actuator could 39 a coil and a magnet which displace against each other when a current flows through the coil, so that the longitudinal extent of the actuator 39 along the actuating direction B is increased.

As the connection of the individual components or layers of a microvalve 1 how to the 1 to 3 described preferably by gluing or lamination, the components to be joined must be exposed to elevated temperatures and pressures during the bonding step. In order to fix the components during the bonding or lamination, so that the relative position in the x / y direction does not change substantially, the individual components may be provided with registration holes. In these holes engage corresponding registration pins, which are introduced along the z-direction in the registration holes, so that a relative displacement is prevented from each other. The registration pins can in particular be arranged on a mounting plate, wherein this mounting plate can serve as an abutment during lamination.

The 4 shows a section through a micropump 63 with three microvalves 1 . 1' . 1'' which are designed the flow channel 47 each in the area of the valve seats 55 . 55 ' . 55 '' to close. Each microvalve has its own actuation channel 41 . 41 ' . 41 '' for the pneumatic actuation of the membranes 37 . 37 ' . 37 '' along the actuating direction B. The required pneumatic pressure in the Aktuationskanälen 41 . 41 ' . 41 '' is provided and controlled by a device not shown.

In order to achieve the delivery of a fluid in a flow direction F substantially perpendicular to the direction of actuation B, the at least three microvalves 1 . 1' . 1'' be actuated in a suitable sequence. Suppose the fluid should be the three microvalves 1 . 1' . 1'' flow through in this order, ie from the first microvalve 1 (Inlet valve) through the second microvalve 1' (Displacer) to the third microvalve 1'' (Exhaust valve), so can the microvalves 1 . 1' . 1'' for example, in the sequence shown in Table 1 are operated. The sequence of steps 1 to 5 can be cyclic and unlimited. step intake valve 1 displacement 1' outlet valve 1'' 1 closed open open 2 closed closed open 3 open closed closed 4 open open closed 5 closed open closed Table 1: A sequence of actuation of the microvalves for fluid delivery

The 4 shows the micropump 63 in a state between steps 3 and 4. Due to this exemplary sequence of microvalve actuation, during steps 1-3, the fluid may only ever be in the direction of the exhaust valve 1'' from the micropump 63 escape. Before the diaphragm of the displacer 1' is relieved again and returns to the rest position and thus creates a vacuum that can suck the fluid, the exhaust valve must 1'' closed and the inlet valve 1 be open (step 4). During pressure equalization, the fluid flows through the inlet valve 1 in the direction of the displacer 1' , After pressure equalization, the inlet valve 1 closed (step 5). Thereafter, steps 1 to 5 become periodic or repeated cyclically.

The 5 shows a schematic plan view of an embodiment of a microfluidic system 73 , This exemplary microfluidic system 73 is designed to be a microbiological cell culture (not shown) in a cell culture chamber 79 by means of a flow channel 47 to provide a fluid and to monitor the fluid.

The microfluidic system 73 comprises a micropump according to the invention 63 which in turn has three microvalves 1 . 1' and 1'' to the fluid through the flow channel 47 the cell culture chamber 79 supply. Within the flow channel, the fluid flows along the flow direction F.

The cell culture chamber 79 upstream or upstream comprises the flow channel 47 a dialysis area 75 and a gas exchange area 77 to allow a mass transfer between fluid and the exterior.

Following the cell culture chamber 79 leads the flow channel 47 back to the micropump 63 so that the microfluidic system is closed. In order to enable an exchange of fluid, the microfluidic system comprises 73 a process 95 and a feed 97 , The feed 97 is preferably by a microvalve according to the invention 1''' Lockout. But it is also possible that the inlet 97 is formed such that the blocking by means of a valve outside the microfluidic system 73 he follows. The valve 1''' in the inflow 97 is preferably in the inflow direction f a filter 81 preceded by the penetration of unwanted particles into the microfluidic system 73 to prevent.

The sequence 95 is preferably also analogous to the feed 97 Lockout. In this embodiment, the valve (not shown) is wide in the flow direction f '(compared to the removal of the valve 1''' ) from the flow channel 47 arranged away. Advantageously, this can be done in the process 95 contained fluid to compensate for fluid fluctuations in the flow channel 47 be used or the volume in the process 95 be made available as compensation volume.

Downstream to the cell culture chamber 79 are in the flow channel 47 arranged to detect chemical or biochemical or physical quantities corresponding sensors. In particular, these are a pH sensor 83 , an oxygen sensor 85 , a glucose sensor 87 , a lactate sensor 89 , a pressure sensor 91 and a flow rate sensor 93 ,

The The present invention is not the same as those described above by way of example Limited embodiments. Much more can individual elements and / or features of each described aspect and / or each described embodiment with individual elements and / or features of the further aspects and / or other embodiments be combined in any way with each other and thus more Aspects and / or embodiments be formed.

In particular, the various process steps for the preparation of the membrane 37 without limitation, with the various embodiments of the membrane holder 13 (one-piece, made of layers, with conical or straight membrane holder opening 15 ) be performed. Furthermore, the various embodiments of the actuator shown 19 (one-piece, multi-part, with actuation channel 41 with piezoelectric actuation or with mechanical actuation by plunger) and the various embodiments of the flow element shown 23 (one-piece, multi-part, with straight or rounded or conical or circular flow channel 47 ) in any combination with the illustrated embodiments of the membrane holder 13 including the various configurations of a membrane 37 be combined.

Farther can Also, the individual process steps are executed in a changed order. In particular, the order with respect to the arrangement of the flow element and the Aktuationselementes to the membrane holder arbitrarily.

1

microvalve

3

lower Membrane support layer

5

lower Membrane support opening

7

upper Membrane support layer

9

upper Membrane support opening

11

melt adhesive

13

membrane holder

15

Membrane holder opening

17

Membrane halter top

19

Aktuationselement

21

Membrane holder bottom

23

flow element

25

cover

27

water-soluble coating

29

template

31

stencil opening

33

silicone mixture

34

doctor

35

dispenser tip

37

membrane

39

actuator

41

Aktuationskanal

43

Aktuationskanalschicht

45

topcoat

47

flow channel

49

Base

51

Durchflußkanalschicht

53

recess

55

valve seat

57

impact edge

59

wetting filler

61

electrical supply

63

micropump

65

shape

67

Recess in the form 65

69

Supply line in the form 65

71

Derivative in the form 65

73

microfluidic system

75

dialysis treatment

77

Gas exchange area

79

Cell culture chamber

81

filter

83

pH sensor

85

oxygen sensor

87

glucose sensor

89

lactate sensor

91

pressure sensor

93

Flow rate sensor

95

procedure

97

Intake

B

operating direction

D _o

diameter

D _u

diameter

F

flow direction

f

Flow direction in the inlet 97

f '

Flow direction in the drain 95

K

force

L ₁

first longitudinal direction

L ₂

second longitudinal direction

M _o

central axis

M _u

central axis

P

print

Claims (38)

Method for the production of a microfluidic component, comprising the steps: - providing a membrane holder ( 13 ) with - a membrane holder top ( 17 ), which is designed with an actuation element ( 19 ), - a membrane holder base ( 21 ) which is designed with a flow element ( 23 ) and - at least one membrane holder opening ( 15 ), which at the membrane holder top ( 17 ) each have a diameter D _o and at the membrane holder bottom side ( 21 ) each has a diameter D _u ; Forming at least one resilient membrane ( 37 ) in the membrane holder opening ( 15 ); Providing an actuation element ( 19 ) with at least one actuator ( 39 ); Connecting the at least one actuation element ( 19 ) with the membrane holder top ( 17 ) of the membrane holder ( 13 ), so that the membrane ( 37 ) at least in regions on at least one actuator ( 39 ) is arranged so that the membrane ( 37 ) by the actuator ( 39 ) is actuatable; Providing a flow element ( 23 ) with at least one flow channel ( 47 ); - connecting the flow element ( 23 ) with the membrane holder underside ( 21 ) of the membrane holder ( 3 ), so that the at least one membrane ( 37 ) at least partially on at least one flow channel ( 47 ) is arranged so that the wall of the flow channel ( 47 ) through the actuatable membrane ( 37 ) in a valve seat ( 55 ) is mechanically contactable. The method of claim 1, wherein the diameter D _o is greater than the diameter D _u. The method of claim 1 or 2, further comprising the steps of: - providing a lower membrane support layer ( 3 ); Providing an upper membrane carrier layer ( 7 ); Forming at least one lower membrane carrier opening ( 5 ) in the lower membrane carrier layer ( 3 ) each having a central axis M _u and each having a diameter D _u ; Forming at least one upper membrane carrier opening ( 9 ) in the upper membrane carrier layer ( 7 ) each having a central axis M _o and each having a diameter D _o ; Connecting the upper membrane carrier layer ( 7 ) with the lower membrane carrier layer ( 3 ) with formation of the membrane holder ( 13 ), so that the central axes M _u and M _o substantially coincide, so that the lower membrane carrier opening ( 5 ) and the upper membrane carrier opening ( 9 ) the membrane holder opening ( 15 ) train. Method according to claim 3, wherein the lower membrane carrier layer ( 3 ) and / or the upper membrane carrier layer ( 7 ) is coated on at least one side with an adhesive and bonding the upper membrane carrier layer ( 7 ) with the lower membrane carrier layer ( 3 ) by gluing. Method according to one of the preceding claims, further comprising the steps: - arranging a cover ( 25 ) to the membrane holder ( 13 ) to the membrane holder opening ( 15 ) to close on one side; - arranging a template ( 29 ) on the unclosed side of the membrane holder opening ( 15 ), the template ( 29 ) substantially to the at least one membrane holder opening ( 15 ) congruent template opening ( 31 ), so that the membrane holder ( 13 ) outside the membrane holder opening ( 15 ) is substantially completely covered. The method according to claim 5, further comprising the step of: doctoring an elastically solidifying substance to form the membrane ( 37 ). Method according to one of claims 1 to 4, further comprising the steps: - arranging a cover ( 25 ) to the membrane holder ( 13 ) to the membrane holder opening ( 15 ) to close on one side; Arranging a mold ( 65 ) to the membrane holder ( 13 ), the shape ( 65 ) to each membrane holder opening ( 15 ) on the membrane holder top ( 17 ) each a substantially congruent to this recess ( 67 ) and in each case at least one inlet and outlet ( 69 . 71 ), which the recess ( 67 ) with the exterior of the form ( 65 ), has; Feeding a liquid, elastically solidifying substance ( 33 ) in the through the membrane holder ( 13 ), the cover ( 25 ) and the form ( 65 ) formed cavity; Solidifying the liquid substance ( 33 ) for forming the membrane ( 37 ). Method according to one of claims 5 to 7, wherein the cover 25 is soluble by a solvent and / or substantially force-free detachable by a solvent. Method according to one of claims 1 to 4, further comprising the step: dispensing a liquid elastically solidifying substance from the edge of the membrane holder opening ( 15 ) towards the center, so that the membrane holder opening ( 15 ) is closed. Method according to one of claims 1 to 4, further comprising the steps: - forming a drop of a liquid elastically solidifying substance on a dispensing tip ( 35 ), wherein the droplet has a diameter which is greater than or equal to the diameter D _{u of} the membrane holder opening ( 15 ) on the membrane holder underside ( 21 ); Placing the drop on the membrane holder opening ( 15 ), so that the membrane holder opening ( 15 ) is closed. Method according to one of the preceding claims, wherein the elastically solidifying substance for forming the membrane ( 37 ) is a polymer. Method according to one of the preceding claims, wherein the elastically solidifying substance for forming the membrane ( 37 ) Silicone is. Method according to one of the preceding claims, further comprising the steps: - providing a base ( 49 ); Providing a flow channel layer ( 51 ) with at least one recess ( 53 ); Connecting the flow channel layer ( 51 ) with the base ( 49 ), whereby the flow element ( 23 ) with the flow channel ( 47 ) is formed. Method according to one of claims 1 to 12, further comprising the steps for the formation of the flow element ( 23 ): - providing a flow channel layer ( 51 ) - forming at least one flow channel ( 47 ) by material removal processing. Method according to one of the preceding claims, further comprising the steps: - applying a wetting filler ( 59 ) on the valve seat ( 55 ), so that the free surface of the wetting filler ( 59 ) assumes a continuously curved shape due to the surface tension; Hardening of the wetting filler ( 59 ). Process according to claim 15, wherein the wetting filler ( 59 ) is a UV-curing adhesive and the curing is carried out by irradiation with ultraviolet light. Method according to one of the preceding claims, wherein the actuation element ( 19 ) is formed by the following steps: - providing an actuation channel layer ( 43 ), further comprising at least one actuation channel ( 41 ) as an actuator ( 39 ); Connecting the actuation channel layer ( 43 ) with the membrane holder top ( 17 ) of the membrane holder ( 13 ), so that the membrane ( 37 ) at least in regions on at least one Aktuationskanal ( 41 ) is arranged. Method according to claim 17, wherein the at least one flow channel ( 47 ) is arranged extending substantially along a first longitudinal direction L ₁ and the at least one Aktuationskanal ( 41 ) is arranged to extend substantially along a second longitudinal direction L ₂ , the angle included between the longitudinal directions L _{1 and} L ₂ being different from zero. Microvalve for controlling the flow of fluids, comprising: - an actuation element ( 19 ) with at least one actuator ( 39 ), - a flow element ( 23 ) with at least one flow channel ( 47 ), - a membrane holder ( 13 ) with - a membrane holder top ( 17 ) connected to the actuation element ( 19 ), - a membrane holder base ( 21 ) connected to the flow element ( 23 ), - at least one membrane holder opening ( 15 ) and At least one actuatable resettable membrane ( 37 ), which in the at least one membrane holder opening ( 15 ), wherein the at least one membrane ( 37 ) with a membrane lower side with the diameter D _u at least partially on the at least one flow channel ( 47 ), wherein the at least one membrane ( 37 ) with a membrane top surface with the diameter D _o at least in regions on the at least one actuator ( 47 ), wherein the diameter D _{o is} greater than the diameter D _u and wherein the wall of the at least one flow channel ( 47 ) by the at least one actuatable membrane ( 37 ) in a valve seat ( 55 ) is mechanically contactable, so that the at least one flow channel ( 47 ) substantially completely through the membrane ( 37 ) is closable. A microvalve according to claim 19, wherein the membrane holder ( 13 ) further comprises: - a lower membrane carrier layer ( 3 ), in which at least one lower membrane carrier opening ( 5 ) is formed in each case with a central axis M _u and in each case a diameter D _u and - an upper membrane carrier layer ( 7 ), in which at least one upper membrane carrier opening ( 9 ) is formed in each case with a central axis M _o and in each case a diameter D _o , wherein the upper membrane carrier layer ( 7 ) with the lower membrane carrier layer ( 3 ) is connected so that the central axes M _u and M _o substantially coincide, so that the lower membrane carrier opening ( 5 ) and the upper membrane carrier opening ( 9 ) the membrane holder opening ( 15 ) train. A microvalve according to claim 20, wherein the lower membrane carrier layer ( 3 ) and / or the upper membrane carrier layer ( 7 ) is coated on at least one side with an adhesive and the upper membrane carrier layer ( 7 ) with the lower membrane carrier layer ( 3 ) is glued by means of the adhesive. A microvalve according to claim 21, wherein the adhesive is a hot melt adhesive. Microvalve according to one of claims 19 to 22, wherein the membrane ( 37 ) consists of a polymer. Microvalve according to one of claims 19 to 23, wherein the membrane ( 37 ) consists of a silicone. Microvalve according to one of claims 19 to 24, wherein the flow element ( 23 ) comprises: - a base ( 49 ) and - a flow channel layer ( 51 ) with at least one recess ( 53 ), wherein the flow channel layer ( 51 ) with the base ( 49 ) connected is. Microvalve according to one of claims 19 to 24, wherein the flow element ( 23 ) with the at least one flow channel ( 47 ) is integrally formed. Microvalve according to one of claims 19 to 26, wherein the at least one flow channel ( 47 ) is formed at least partially with a continuously curved cross-section. Microvalve according to one of claims 19 to 27, wherein the valve seat ( 55 ) by a cured filler ( 59 ) is at least partially formed continuously curved. A microvalve according to claim 28, wherein the cured filler ( 59 ) is a UV-curing adhesive. Microvalve according to one of claims 19 to 29, wherein the actuation element ( 19 ) further comprises: - an actuation channel layer ( 43 ) with at least one actuation channel ( 41 ) and - a cover layer ( 45 ), wherein the actuation channel layer ( 43 ) with the membrane holder top ( 17 ) of the membrane holder ( 13 ) and wherein the cover layer ( 45 ) with the actuation channel layer ( 43 ) connected is. A microvalve according to claim 30, wherein the cover layer ( 45 ) and / or the actuation channel layer ( 43 ) is coated on at least one side with an adhesive and the cover layer ( 45 ) with the actuation channel layer ( 43 ) is glued by means of the adhesive. A microvalve according to claim 30 or 31, wherein the at least one flow channel ( 47 ) extends substantially along a first longitudinal direction L ₁ and the at least one actuation channel ( 41 ) extends substantially along a second longitudinal direction L ₂ , wherein the included between the longitudinal directions L1 and L2 angle θ is different from zero. Microvalve according to one of claims 19 to 29, wherein the actuation element ( 19 ) to each membrane ( 37 ) one of the respective membrane ( 37 ) associated plunger ( 39 ). Microfluidic pump for moving fluids containing at least three microvalves ( 1 ) according to any one of claims 19 to 33. Microfluidic pump according to claim 34, wherein the microfluidic pump ( 63 ) is one-piece. Microfluidic system comprising: - at least one microvalve ( 1 ) according to one of claims 19 to 33 and / or at least one microfluidic pump ( 63 ) according to claim 34 or 35, - at least one flow channel ( 47 ) for a fluid, - at least one functional component associated with the fluid in the flow channel ( 47 ) is contactable. The microfluidic system of claim 36, wherein the functional component is a sensor for determining physical, chemical and / or biological properties of the fluid. The microfluidic system of claim 36, wherein the functional component is an electronic component, wherein by means of the flow channel (FIG. 47 ) a fluid for cooling the electronic component can be provided.