CN208688435U - A kind of precise displacement sensor based on corner cube mirror group - Google Patents
A kind of precise displacement sensor based on corner cube mirror group Download PDFInfo
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- CN208688435U CN208688435U CN201821128340.2U CN201821128340U CN208688435U CN 208688435 U CN208688435 U CN 208688435U CN 201821128340 U CN201821128340 U CN 201821128340U CN 208688435 U CN208688435 U CN 208688435U
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Abstract
The utility model relates to a kind of precise displacement sensor based on corner cube mirror group, the precise displacement sensor includes laser source, and for launching laser beam, and the laser beam is incident to the reflecting mirror one of the first reflection microscope group；Reflecting mirror two for receiving the laser beam of the reflection of reflecting mirror one, and makes received laser beam reflex to reflecting mirror three or photodetector；Reflecting mirror three is used to receive the laser beam of the reflection of reflecting mirror two, and received laser beam is made to reflex to reflecting mirror four；Photodetector reflects and no longer by the received laser beam of reflecting mirror three through reflecting mirror two for receiving, and measures its incoming position；Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector calculate the change in displacement value of testee.The sensor structure is simple, and measurement accuracy is high, convenient for batch production.
Description
Technical field
The utility model relates to field of measuring technique, and in particular to a kind of accurate displacement biography based on corner cube mirror group
Sense.
Background technique
Displacement measurement new principle based on optical triangulation amplifying method is on the basis of optical triangulation amplifying method, in conjunction with three
Angle wave optical device and high-precision PSD (Position Sensitive Device, position sensitive (sensitivity) detector) are realized
's.Amplify by optical triangulation, horizontal thin tail sheep t is amplified to T on photodetector (PSD), can be by the essence of linear measure longimetry
Degree greatly promotes.To which optical sensor becomes the widely applied tool of current field of measuring technique, but these instruments are big
More structure is complicated, at high cost.
Utility model content
The purpose of this utility model is that proposing a kind of precise displacement sensor based on corner cube mirror group.
To achieve the goals above, the utility model the following technical schemes are provided:
A kind of precise displacement sensor based on corner cube mirror group, comprising:
First reflection microscope group, including reflecting mirror one and reflecting mirror two, the reflecting mirror one form angle with reflecting mirror two and are
The reflection microscope group at right angle；
Laser source, for launching laser beam, and the laser beam is incident to the reflecting mirror one of the first reflection microscope group；
The reflecting mirror two for receiving the laser beam of the reflection of reflecting mirror one, and reflects received laser beam；
Photodetector for receiving the laser beam reflected through reflecting mirror two, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates tested
The change in displacement value of object.
It further include shell in further embodiment, laser source, photodetector are fixedly installed in shell, composition
One reading head.By the setting of shell, the position that laser source, photodetector can be kept mutual is fixed, can also be with
Ensure that the two keeps synchronous shift.
In further embodiment, the reading head is at least three, and the position between at least three reading head
Relationship meets: in measurement process, at least one reading head can read incident position of the laser beam on photodetector
Set variable quantity.It ensure that the continuous measurement of displacement sensor.
On the other hand, the present invention also provides the measurement method of the above-mentioned precise displacement sensor based on corner cube mirror group,
The following steps are included:
Testee is fixed in the first reflection microscope group or reading head；
Laser source, the first reflection microscope group, the positional relationship of photodetector are adjusted, so that the laser beam of laser source transmitting enters
It is incident upon the reflecting mirror one of the first reflection microscope group, is incident to reflecting mirror two after the reflecting mirror one reflection, reflecting mirror two receives instead
The laser beam of the reflection of mirror one is penetrated, and reflects received laser beam, is incident to photodetector；
Transmitting laser beam is visited after the laser beam reflects between reflecting mirror one and reflecting mirror two by photodetector
Measure its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Meanwhile the present invention also proposes another precise displacement sensor based on corner cube mirror group, comprising:
At least two first reflection microscope groups, each first reflection microscope group includes reflecting mirror one and reflecting mirror two, the reflection
Mirror one and reflecting mirror two form the reflection microscope group that angle is right angle, at least two first reflections microscope group along moving direction successively
Distribution；
At least one second reflection microscope group, each second reflection microscope group includes reflecting mirror three and reflecting mirror four, the reflection
Mirror three and reflecting mirror four form the reflection microscope group that angle is right angle, at least one described second reflection microscope group along moving direction successively
Distribution；
The reflecting mirror three is parallel with reflecting mirror two, and the reflecting mirror four is parallel with reflecting mirror one；
Laser source, for launching laser beam, and the laser beam is incident to the reflecting mirror one of one first reflection microscope group；
The reflecting mirror two for receiving the laser beam of the reflection of reflecting mirror one, and reflects received laser beam；
The reflecting mirror three for receiving the laser beam of the reflection of reflecting mirror two, and makes received laser beam reflex to reflection
Mirror four；
The reflecting mirror four, for receiving the laser beam of the reflection of reflecting mirror three, and it is next to reflex to received laser beam
The reflecting mirror one of a first reflection microscope group；
The reflecting mirror one, the laser that laser beam or the reflecting mirror four for receiving the laser source transmitting reflect
Beam, and received laser beam is made to reflex to reflecting mirror two；
Photodetector is reflected and no longer by the received laser beam of reflecting mirror three through reflecting mirror two for receiving, and is measured
Its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates tested
The change in displacement value of object.
In further embodiment, the laser beam of laser source transmitting is incident to reflecting mirror one in 45 degree of angles.It is incident to reflection
The incident ray of mirror one and from two face of reflecting mirror be emitted light ray parallel make whole to be conducive to the arrangement of each component in system
Body structure minimizes as far as possible, is also convenient to the displacement calculation of testee.
In further embodiment, at least two first reflections microscope group head and the tail are connected, and strip zigzag is integrally formed
Structure.
It further include shell in further embodiment, laser source, the second reflection microscope group, photodetector are fixedly installed
In in shell.By the setting of shell, the position that laser source, the second reflection microscope group, photodetector can be kept mutual
It is fixed, it can also ensure that three keeps synchronous shift, form a reading head.
In further embodiment, the reading head is at least five, and the position between at least five reading head
Relationship meets: in measurement process, at least one reading head can read incident position of the laser beam on photodetector
Set variable quantity.It ensure that the continuous measurement of displacement sensor.
On the other hand, the utility model provides the above-mentioned precise displacement sensor based on corner cube mirror group of one kind simultaneously
Measurement method, comprising the following steps:
Testee is fixed in the first reflection microscope group or reading head；
Laser source, the first reflection microscope group, the second reflection microscope group, the positional relationship of photodetector are adjusted, so that laser source
The laser beam of transmitting is incident to a reflecting mirror one of the first reflection microscope group, is incident to reflecting mirror after the reflecting mirror one reflection
Two, reflecting mirror two receives the laser beam of the reflection of reflecting mirror one, and received laser beam is made to reflex to the anti-of the second reflection microscope group
Mirror three is penetrated, incident laser beam is reflexed to reflecting mirror four by reflecting mirror three, and reflecting mirror four receives the laser beam that reflecting mirror three reflects,
And received laser beam is set to reflex to next first reflection microscope group, and laser beam is in the first reflection microscope group and the second reflection microscope group
Reflecting mirror between photodetector is finally incident to after multiple reflections；
Emit laser beam, laser beam multiple reflections between the first reflection microscope group and the reflecting mirror of the second reflection microscope group
Afterwards, its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Compared with prior art, using a kind of accurate displacement sensing based on corner cube mirror group provided by the utility model
Device, it has the advantage that: realizing accurate displacement measurement by corner cube mirror group disposed in parallel, the sensor structure is simple,
Measurement accuracy is high, convenient for batch production.In addition, being based on corner cube mirror group, by reflecting the increase of microscope group group number, may be implemented
Multiple reflections realize more times of amplifications, and further expansion amplification factor then further increases measurement accuracy, and equipment is integrally tied
Structure is small.By the setting of at least two reading heads, the continuous measurement of displacement sensor ensure that.Meanwhile it being provided with correcting device,
Amendment is made incident angle error caused by testee displacement variable of the laser beam of laser source injection, is improved again
Measurement accuracy.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is a kind of structure of the precise displacement sensor based on corner cube mirror group provided in the embodiment of the present invention 2
Schematic diagram.
Fig. 2 is a kind of structure of the precise displacement sensor based on corner cube mirror group provided in the embodiment of the present invention 2
Schematic diagram.
Description of symbols in figure
Laser 1, laser beam 2, the first reflection microscope group 3, reflecting mirror 1, reflecting mirror 2 32, the second reflection microscope group 4, instead
Penetrate mirror 3 41, reflecting mirror 4 42, photodetector 5, shell 6.
Specific embodiment
Below in conjunction with attached drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear
Chu is fully described by, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole realities
Apply example.The component of the utility model embodiment being usually described and illustrated herein in the accompanying drawings can be come with a variety of different configurations
Arrangement and design.Therefore, the detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit below
The range of claimed invention, but it is merely representative of the selected embodiment of the utility model.Based on the utility model
Embodiment, those skilled in the art's every other embodiment obtained without making creative work, all
Belong to the range of the utility model protection.
Embodiment 1
The present embodiment schematically discloses a kind of precise displacement sensor based on corner cube mirror group, including laser
1, the first reflection microscope group 3, the first reflection microscope group 3 includes reflecting mirror 1 and reflecting mirror 2 32, photodetector 5, shell 6.Its
The angle of middle reflecting mirror 1 and reflecting mirror 2 32 is right angle.
In precise displacement sensor of the utility model based on corner cube mirror group:
Laser 1 launches laser beam 2, and laser beam 2 is incident to the reflecting mirror 1 of first group of first reflection microscope group 3, institute
It states reflecting mirror 1 and incident laser beam 2 is reflexed into reflecting mirror 2 32, reflecting mirror 2 32 receives swashing for the reflection of reflecting mirror 1
Light beam 2, and laser beam 2 is reflected, photodetector 5 receives the laser beam 2 that reflecting mirror 2 32 reflects, and measures it and enter
Penetrate position；Processing system, the incoming position variable quantity of the laser beam 2 for being received according to photodetector 5 calculate tested
The displacement variable of object.
It further include shell 6, laser source 1, photodetector 5 are fixedly installed on shell as a kind of preferably embodiment
Internal 6, form a reading head.By the setting of shell, the position that laser source, photodetector can be kept mutual is solid
It is fixed, it can also ensure that the two keeps synchronous shift.
It when measurement, can be fixed on testee according to practical situations using by reading head, the first reflection microscope group
Fixed, when testee is subjected to displacement, relative motion occurs for reading head and the first reflection microscope group, and photodetector 5 can be with
Measurement obtains the shift value of testee；Alternatively, can also be fixed on testee using by the first reflection microscope group, reading head
It remains stationary, testee is subjected to displacement drive the first reflection microscope group movement, and opposite position occurs for the first reflection microscope group and reading head
It moves, photodetector 5 can measure the shift value of testee；Measurement selection first reflects microscope group or reading head to be fixed on
On testee, measurement convenience is improved.
In further embodiment, the reading head is at least three, and the position between at least three reading head
Relationship meets: in measurement process, at least one reading head can read incident position of the laser beam on photodetector
Set variable quantity.It ensure that the continuous measurement of displacement sensor.
Based on the above-mentioned precise displacement sensor based on corner cube mirror group, measurement method the following steps are included:
Testee is fixed in the first reflection microscope group or reading head；
Laser source, the first reflection microscope group, the positional relationship of photodetector are adjusted, so that the laser beam of laser source transmitting enters
It is incident upon the reflecting mirror one of the first reflection microscope group, is incident to reflecting mirror two after the reflecting mirror one reflection, reflecting mirror two receives instead
The laser beam of the reflection of mirror one is penetrated, and reflects received laser beam, is incident to photodetector；
Transmitting laser beam is visited after the laser beam reflects between reflecting mirror one and reflecting mirror two by photodetector
Measure its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Embodiment 2
Fig. 1, Fig. 2 are please referred to, the present embodiment schematically discloses a kind of accurate displacement biography based on corner cube mirror group
Sensor, including laser 1, first reflection microscope group 3, first reflection microscope group 3 include reflecting mirror 1 and reflecting mirror 2 32, second
Microscope group 4 is reflected, the second reflection microscope group 4 includes reflecting mirror 3 41 and reflecting mirror 4 42, photodetector 5, shell 6.Wherein reflect
The angle of mirror 1 and reflecting mirror 2 32 is right angle, and the angle of reflecting mirror 3 41 and reflecting mirror 4 42 is right angle.Reflecting mirror 3 41
Parallel with 2 32 pairs of reflecting mirror, reflecting mirror 4 42 is parallel with reflecting mirror 1.
In precise displacement sensor of the utility model based on corner cube mirror group:
Laser 1 launches laser beam 2, and laser beam 2 is incident to the reflecting mirror 1 of first group of first reflection microscope group 3, institute
It states reflecting mirror 1 and incident laser beam 2 is reflexed into reflecting mirror 2 32, reflecting mirror 2 32 receives swashing for the reflection of reflecting mirror 1
Light beam 2, and laser beam 2 is made to reflex to corresponding reflecting mirror 3 41 in the second reflection microscope group 4, the reflecting mirror 3 41 receives anti-
The laser beam of the reflection of mirror 2 32 is penetrated, and laser beam 2 is made to reflex to reflecting mirror 4 42, the reflecting mirror 4 42 makes through reflecting mirror
The laser beam 2 of 3 41 reflections reflexes to corresponding first reflection microscope group 1 in next group first reflection microscope group 3, and repeatedly circulation is anti-
It penetrates, is reflected until photodetector 5 is received through reflecting mirror 2 32, and not by the second reflection received laser beam 2 of microscope group 4, and
Measure its incoming position；The incoming position of processing system, the laser beam 2 for being received according to photodetector 5 changes meter
Calculate the displacement variable of testee.
As a kind of preferably embodiment, the laser beam of laser source transmitting is incident to the first reflecting mirror in 45 degree of angles.Enter
The light ray parallel for being incident upon the incident ray of reflecting mirror one and being emitted from reflecting mirror two, to be conducive to the cloth of each component in system
It sets, minimizes overall structure as far as possible, be also convenient to the displacement calculation of testee.
As a kind of preferably embodiment, at least three or more the first reflection microscope group head and the tail are connected, and length is integrally formed
Laciniation.
It further include shell 6 as a kind of preferably embodiment, laser source 1, second reflects microscope group 4, photodetector 5
It is fixedly installed in shell 6.By the setting of shell, laser source, the second reflection microscope group, photodetector can be kept mutual
Between position fix, can also ensure three keep synchronous shift.
It when measurement, can be fixed on testee according to practical situations using by reading head, the first reflection microscope group
Fixed, when testee is subjected to displacement, relative motion occurs for reading head and the first reflection microscope group, and photodetector 5 can be with
Measurement obtains the shift value of testee；Alternatively, can also be fixed on testee using by the first reflection microscope group, reading head
It remains stationary, testee is subjected to displacement drive the first reflection microscope group movement, and opposite position occurs for the first reflection microscope group and reading head
It moves, photodetector 5 can measure the shift value of testee；Measurement selection first reflects microscope group or reading head to be fixed on
On testee, measurement convenience is improved.
As a kind of preferably embodiment, the reading head is at least seven, and between at least seven reading head
Positional relationship meet: in measurement process, at least one reading head can read laser beam on photodetector
Incoming position variable quantity.It ensure that the continuous measurement of displacement sensor.
Specifically, the number of reading head is related with the first reflection number of microscope group of optical reflection is participated in measurement process,
The number of reading head is at least twice of the first reflection microscope group number that optical reflection is participated in measurement process, for absolute guarantor
Incoming position variable quantity of the laser beam on photodetector, the number of reading head can be read by hindering at least one reading head
Twice that the first reflection microscope group number of optical reflection is participated at least in measurement process adds 1 again, can make adjacent two in this way
The measurement range of a reading head has certain overlapping, i.e., can have two in the critical point of the reflecting mirror one (or two) of the first reflection microscope group
A reading head measurement obtains change in location value, ensures the reliability continuously measured.
Such as in structure shown in FIG. 1, six reading heads are at least needed, but it is any in measurement process in order to ensure
Moment all at least one reading heads can read incoming position variable quantity of the laser beam on photodetector, be preferably provided with
Seven or more reading heads.
Based on the above-mentioned precise displacement sensor based on corner cube mirror group, measurement method the following steps are included:
Testee is fixed in the first reflection microscope group or reading head；
Laser source, the first reflection microscope group, the second reflection microscope group, the positional relationship of photodetector are adjusted, so that laser source
The laser beam of transmitting is incident to the reflecting mirror one of first first reflection microscope group, is incident to reflecting mirror after the reflecting mirror one reflection
Two, reflecting mirror two receives the laser beam of the reflection of reflecting mirror one, and received laser beam is made to reflex to the anti-of the second reflection microscope group
Mirror three is penetrated, incident laser beam is reflexed to reflecting mirror four by reflecting mirror three, and reflecting mirror four receives the laser beam that reflecting mirror three reflects,
And received laser beam is set to reflex to next first reflection microscope group, and laser beam is in the first reflection microscope group and the second reflection microscope group
Reflecting mirror between photodetector is finally incident to after multiple reflections；
Emit laser beam, laser beam multiple reflections between the first reflection microscope group and the reflecting mirror of the second reflection microscope group
Afterwards, its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
The laser 1 of the utility model, the first reflection microscope group 3, the first reflection microscope group 3 includes reflecting mirror 1 and reflection
Mirror 2 32, the second reflection microscope group 4, the second reflection microscope group 4 includes reflecting mirror 3 41, reflecting mirror 4 42, photodetector 5, shell
6, component is universal standard part or component as known to those skilled in the art, and structure and principle are all that this technology personnel are equal
It can be learnt by technical manual or be known by routine experiment method, the utility model solves the problems, such as it is existing displacement sensing
Device the problems such as structure is complicated, and measurement accuracy is low, the utility model is combined with each other by above-mentioned component, by disposed in parallel straight
Corner reflection microscope group realizes accurate displacement measurement, and the sensor structure is simple, and measurement accuracy is high, convenient for batch production.
Above description is only a specific implementation of the present invention, the protection scope of the utility model is not limited to
This, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation or
Replacement, should be covered within the scope of the utility model.
Claims (8)
1. a kind of precise displacement sensor based on corner cube mirror group characterized by comprising
First reflection microscope group, including reflecting mirror one and reflecting mirror two, it is right angle that the reflecting mirror one, which forms angle with reflecting mirror two,
Reflection microscope group；
Laser source, for launching laser beam, and the laser beam is incident to the reflecting mirror one of the first reflection microscope group；
The reflecting mirror two for receiving the laser beam of the reflection of reflecting mirror one, and reflects received laser beam；
Photodetector for receiving the laser beam reflected through reflecting mirror two, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates testee
Change in displacement value.
2. the precise displacement sensor according to claim 1 based on corner cube mirror group, which is characterized in that further include shell
Body, laser source, photodetector are fixedly installed in shell, form a reading head.
3. the precise displacement sensor according to claim 2 based on corner cube mirror group, which is characterized in that the reading
Head is at least three, and the positional relationship between at least three reading head meets: in measurement process, at least one reading
Several can read incoming position variable quantity of the laser beam on photodetector.
4. a kind of precise displacement sensor based on corner cube mirror group characterized by comprising
At least two first reflection microscope groups, each first reflection microscope group includes reflecting mirror one and reflecting mirror two, the reflecting mirror one
The reflection microscope group that angle is right angle is formed with reflecting mirror two, at least two first reflections microscope group is successively divided along moving direction
Cloth；
At least one second reflection microscope group, each second reflection microscope group includes reflecting mirror three and reflecting mirror four, the reflecting mirror three
The reflection microscope group that angle is right angle is formed with reflecting mirror four, at least one described second reflection microscope group is successively divided along moving direction
Cloth；
The reflecting mirror three is parallel with reflecting mirror two, and the reflecting mirror four is parallel with reflecting mirror one；
Laser source, for launching laser beam, and the laser beam is incident to the reflecting mirror one of one first reflection microscope group；
The reflecting mirror two for receiving the laser beam of the reflection of reflecting mirror one, and reflects received laser beam；
The reflecting mirror three for receiving the laser beam of the reflection of reflecting mirror two, and makes received laser beam reflex to reflecting mirror four；
The reflecting mirror four for receiving the laser beam of the reflection of reflecting mirror three, and makes received laser beam reflex to next the
The reflecting mirror one of one reflection microscope group；
The reflecting mirror one, the laser beam that laser beam or the reflecting mirror four for receiving the laser source transmitting reflect, and
Received laser beam is set to reflex to reflecting mirror two；
Photodetector reflects and no longer by the received laser beam of reflecting mirror three through reflecting mirror two for receiving, and measures it and enter
Penetrate position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates testee
Change in displacement value.
5. the precise displacement sensor according to claim 4 based on corner cube mirror group, which is characterized in that laser source hair
The laser beam penetrated is incident to reflecting mirror one in 45 degree of angles.
6. the precise displacement sensor according to claim 4 based on corner cube mirror group, which is characterized in that it is described at least
Two first reflection microscope group head and the tail connect, and strip laciniation is integrally formed.
7. the precise displacement sensor according to claim 4 based on corner cube mirror group, which is characterized in that further include shell
Body, laser source, the second reflection microscope group, photodetector are fixedly installed in shell, form a reading head.
8. the precise displacement sensor according to claim 7 based on corner cube mirror group, which is characterized in that the reading
Head is at least five, and the positional relationship between at least five reading head meets: in measurement process, at least one reading
Several can read incoming position variable quantity of the laser beam on photodetector.
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| CN201821128340.2U CN208688435U (en) | 2018-07-17 | 2018-07-17 | A kind of precise displacement sensor based on corner cube mirror group |
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| CN201821128340.2U CN208688435U (en) | 2018-07-17 | 2018-07-17 | A kind of precise displacement sensor based on corner cube mirror group |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108662984A (en) * | 2018-07-17 | 2018-10-16 | 北方民族大学 | A kind of precise displacement sensor and its measurement method based on corner cube mirror group |
| CN111174680A (en) * | 2020-02-10 | 2020-05-19 | 覃高杰 | Sensor and sensor multipoint deformation synchronous detection method |
-
2018
- 2018-07-17 CN CN201821128340.2U patent/CN208688435U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108662984A (en) * | 2018-07-17 | 2018-10-16 | 北方民族大学 | A kind of precise displacement sensor and its measurement method based on corner cube mirror group |
| CN111174680A (en) * | 2020-02-10 | 2020-05-19 | 覃高杰 | Sensor and sensor multipoint deformation synchronous detection method |
| CN111174680B (en) * | 2020-02-10 | 2021-08-03 | 覃高杰 | Sensor and sensor multipoint deformation synchronous detection method |
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