CN108444396B - Light path consistent displacement sensor and measuring method thereof - Google Patents
Light path consistent displacement sensor and measuring method thereof Download PDFInfo
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- CN108444396B CN108444396B CN201810481645.XA CN201810481645A CN108444396B CN 108444396 B CN108444396 B CN 108444396B CN 201810481645 A CN201810481645 A CN 201810481645A CN 108444396 B CN108444396 B CN 108444396B
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- 238000005259 measurement Methods 0.000 abstract description 26
- 230000003321 amplification Effects 0.000 description 9
- 238000003199 nucleic acid amplification method Methods 0.000 description 9
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- 230000026676 system process Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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Abstract
The invention provides a light path consistent displacement sensor and a measuring method thereof, wherein the light path consistent displacement sensor comprises a first laser beam; the first reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and enabling the laser beam to be reflected to the second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the laser beam is incident to the same first reflecting surface; the photoelectric detector I is used for receiving the laser beam reflected by the second reflecting surface of the triangular wave reflecting mirror after being reflected by the first reflecting surface of the triangular wave reflecting mirror and measuring the incident position of the laser beam; and the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the first laser beam received by the first photoelectric detector. According to the light path consistent displacement sensor, the laser before and after displacement can be made to enter the photoelectric detector along the same path through the arrangement of the reflecting mirror, so that the measurement accuracy of the light path consistent displacement sensor can be improved.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a light path consistent displacement sensor and a measurement method thereof.
Background
The novel displacement measurement principle based on the optical triangular amplification method is realized by combining a triangular wave optical device and a high-precision PSD (Position Sensitive Device, position sensitive detector) on the basis of the optical triangular amplification method. The triangular wave optical device subdivides the linear displacement at equal intervals, reduces the processing precision and the size requirement of the optical device, simultaneously reduces the size requirement of the high-precision PSD, and realizes high-precision displacement measurement in a small range. As shown in FIG. 1, the displacement measurement principle and structure based on the optical triangular amplification method can be seen from FIG. 1, after the reading head and the triangular wave optical reflection component are relatively displaced, the horizontal small displacement T is amplified to T on the photoelectric detector (PSD) through optical triangular amplification, so that the accuracy of length measurement can be greatly improved. However, the measurement magnification of the displacement sensor of the conventional optical triangle amplification method is related to not only the PSD incidence angle but also the reflection surface angle of the triangle wave reflector, and the magnification of the sensor is easily affected.
Disclosure of Invention
The invention aims to provide an optical path consistent displacement sensor capable of improving measurement accuracy and a method for measuring displacement by using the same.
In order to achieve the above object, the present invention provides the following technical solutions:
an optical path coincident displacement sensor comprising:
the triangular wave reflector comprises a first reflecting surface and a second reflecting surface;
the first laser beam is incident to a first reflecting surface of the triangular wave reflecting mirror;
the first reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and enabling the laser beam to be reflected to the second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the laser beam is incident to the same first reflecting surface;
the photoelectric detector I is used for receiving the laser beam reflected by the second reflecting surface of the triangular wave reflecting mirror after being reflected by the first reflecting surface of the triangular wave reflecting mirror and measuring the incident position of the laser beam;
and the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the first laser beam received by the first photoelectric detector.
As an implementation manner, the included angles between the first reflecting surface and the second reflecting surface of the triangular wave reflecting mirror and the horizontal plane are 150 degrees, the incident angle of the laser beam incident on the first reflecting surface is 30 degrees, and the reflecting mirror is parallel to the first reflecting surface.
On the other hand, the embodiment of the invention also provides a measuring method of the light path consistent displacement sensor, which comprises the following steps:
fixing the measured object on a triangular wave reflector or a reading head;
the position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first reflecting mirror is adjusted, so that the first reflecting mirror receives the first laser beam reflected by the first reflecting surface of the triangular wave reflector, the first laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the first laser beam incident to the same first reflecting surface, and the first photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector;
transmitting a first laser beam, wherein the first laser beam passes through a first reflecting surface of the triangular wave reflecting mirror, the first reflecting surface of the reflecting mirror and a second reflecting surface of the reflecting mirror in sequence, and then the initial position of the reflected laser beam is detected by a first photoelectric detector;
the displacement of the detected object, wherein in the displacement process, the photoelectric detector I detects the position change of the laser beam I until the detected object stops displacement;
the processing system obtains a displacement value of the measured object by processing the position change detected by the photoelectric detector.
Compared with the prior art, the invention has the following beneficial effects:
the light path consistent displacement sensor can enable laser before and after displacement to enter the photoelectric detector along the same path through the arrangement of the reflecting mirror, namely the amplification factor of displacement measurement is irrelevant to the angle of the reflecting surface of the triangular wave, so that the amplification factor is not limited by the angle of the reflecting surface and is reduced, in other words, the amplification factor can be increased, and the measurement precision is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of a displacement measurement principle of a displacement sensor with inconsistent optical paths in the prior art.
Fig. 2 is a schematic diagram showing a measurement principle of an optical path uniform displacement sensor with a structure according to embodiment 1.
Fig. 3 is a schematic diagram showing a measurement principle of an optical path coincident displacement sensor of another structure provided in embodiment 1.
Fig. 4 is a schematic diagram showing a measurement principle of an optical path uniform displacement sensor with a structure according to embodiment 2.
Fig. 5 is a schematic diagram of a displacement calculation formula.
The reference numerals in the figures illustrate:
a first laser source 1, a second laser source 2, a first laser beam 3, a second laser beam 4, a triangular wave reflector 5, a shell 6, a first photoelectric detector 7, a second photoelectric detector 8, a first reflector 9, a second reflector 10, a first reflecting surface 51 and a second reflecting surface 52.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be obtained by a person skilled in the art without creative efforts, are included in the protection scope of the present invention based on the embodiments of the present invention.
Example 1
Referring to fig. 2, the present embodiment provides an optical path consistent displacement sensor, which includes a first laser source 1, a triangular wave reflector 5, a first reflector 9, and a first photodetector 7, wherein the triangular wave reflector 5 includes a plurality of reflecting surfaces, and for convenience of understanding, a reflecting surface for receiving a laser beam emitted by the first laser source (or the second laser source) is defined as a first reflecting surface, and a reflecting surface for receiving a laser beam reflected by the first reflector (or the second laser source) is defined as a second reflecting surface.
In this novel light path unanimous displacement sensor:
the first laser source 1 is used for emitting a first laser beam 3 and directing the first laser beam to the first reflecting surface 51 of the triangular wave reflector 5; the first mirror 9 is configured to receive the laser beam 3 reflected by the first reflecting surface 51 of the triangular wave reflector 5, and reflect the laser beam to the second reflecting surface 52 of the triangular wave reflector 5 along the same path during the measurement process that the laser beam 3 is incident on the same first reflecting surface 51; the first photodetector 7 is configured to receive the laser beam reflected by the second reflecting surface 52 of the triangular wave reflector 5 after being reflected by the first reflecting surface 9, and measure an incident position of the laser beam; the processing system is used for calculating the displacement change value of the measured object according to the incident position change value of the laser beam I3 received by the photoelectric detector I7.
In order to ensure the amplification performance of the light path consistent displacement sensor, the included angle between the laser beam incident to the first photoelectric detector 7 and the first photoelectric detector 7 is preferably smaller than 45 degrees.
As shown in fig. 2, the first photosensor 7 adopts a PSD, the first laser beam 3 before displacement is indicated by a solid line, the first laser beam 3 after displacement is indicated by a broken line, and the transmission path of the first laser beam 3 is as follows:
before displacement, the first laser source 1 emits the first laser beam 3 to the first reflecting surface 51 of the triangular wave reflecting mirror 5, the first reflecting surface 51 of the triangular wave reflecting mirror 5 reflects the first laser beam 3 to the first reflecting mirror 9, the first reflecting mirror 9 reflects the laser beam reflected by the first reflecting surface 51 to the second reflecting surface 52, the second reflecting surface 52 reflects the incident laser beam to the first photodetector 7, the first photodetector 7 receives the laser beam reflected by the second reflecting surface 52, and the incident position is measured, which is referred to herein as the first incident position.
After displacement (shown as displacement to the left in fig. 2, the laser source 1, the mirror 9 and the photodetector 7 are synchronously displaced), the laser source 1 emits the laser beam 3 to the first reflecting surface 51 of the triangular wave mirror 5, the first reflecting surface 51 of the triangular wave mirror 5 reflects the laser beam 3 to the mirror 9, the mirror 9 reflects the laser beam reflected by the first reflecting surface 51 to the second reflecting surface 52 along the same path before displacement, the second reflecting surface 52 reflects the incident laser beam to the photodetector 7 along the same path before displacement, and the photodetector 7 receives the laser beam reflected by the second reflecting surface 52 and measures the incident position, which is herein denoted as the second incident position. The displacement of the first laser source 1, i.e. the displacement of the object to be measured, can be calculated according to the first incident position and the second incident position. The calculation process can be obtained according to the triangle geometry relationship, as shown in figure 5,θ is the angle between the laser beam incident to the first photodetector and the first photodetector, and δ is the angle between the first photodetector and the object to be detectedAnd measuring the acute included angle of the displacement direction of the object.
As a preferred embodiment, as shown in fig. 2, the first reflecting surface 51 and the second reflecting surface 52 of the triangular wave reflecting mirror 5 have an angle of 150 degrees with respect to the horizontal plane (for example, only the horizontal direction is positive and the laser source 1 rotates counterclockwise), the incident angle of the laser beam 3 incident on the first reflecting surface 51 is 30 degrees, and the reflecting mirror 9 is parallel to the first reflecting surface 51. In the case of the second reflecting surface 52 of the triangular wave reflecting mirror 5 reflecting along the same path in the measurement process of ensuring that the first reflecting mirror 9 makes the first laser beam 3 incident on the same first reflecting surface 51, there may be other different arrangements.
For example, as shown in fig. 3, in the measurement process in which the first laser beam 3 is incident on the same first reflecting surface 51, the first laser beam reflected by the mirror is reflected to the second reflecting surface 52 of the triangular wave mirror 5 along the same path before and after displacement by: the mirror one 9 is parallel to the first reflecting surface 51 and also parallel to the second reflecting surface 52, and the acute angle of the laser beam one 3 with the first reflecting surface 51 is equal to twice the angle of the first reflecting surface 51 with the horizontal plane, i.e. the angle 1 indicated in fig. 3 is equal to the angle 2.
As can be seen from fig. 3, the specific structure of the triangular wave reflecting mirror 5 is not limited under the condition that the first reflecting surface and the second reflecting surface are parallel (i.e. the included angle between the two reflecting surfaces is consistent with the horizontal plane), i.e. the included angle between the two reflecting surfaces forming the triangular wave is not limited, for example, the included angle between the two reflecting surfaces is 120 degrees as shown in fig. 2; also for example, in fig. 3, the angle between the two reflecting surfaces is 150 degrees, etc. The triangular wave is not necessarily an isosceles triangular wave, that is, the acute angles of the two reflecting surfaces forming the triangular wave and the horizontal plane may be equal or unequal.
Referring to fig. 1, the optical path consistent displacement sensor may further include a housing 6, where the first laser source 1, the first reflecting mirror 9 and the first photodetector 7 are fixedly disposed in the housing 6 to form a reading head, and the first laser beam 3 emitted by the first laser source 1 and the reflected beam thereof may pass through a transmitting-receiving end surface of the reading head. The laser source 1, the reflecting mirror 9 and the photoelectric detector 7 are fixedly arranged in the shell 6, so that the positions of the laser source 1, the reflecting mirror 9 and the photoelectric detector are kept fixed, and synchronous displacement of the laser source, the reflecting mirror and the photoelectric detector can be ensured.
During measurement, the triangular wave reflector 5 can be fixed on the measured object according to actual application conditions, the reading head is kept fixed, and when the measured object is displaced, the triangular wave reflector 5 and the reading head move relatively, and the reading head can measure and obtain the displacement value of the triangular wave reflector 5, namely the measured object; or the reading head can be fixed on the measured object, the triangular wave reflector 5 is kept motionless, the measured object is displaced to drive the reading head to move, the reading head and the triangular wave reflector 5 are relatively displaced, the reading head can measure the relative displacement between the reading head and the triangular wave reflector 5, and then the displacement value of the measured object is obtained; the triangular wave reflector 5 or the reading head is selected for measurement to be fixed on the measured object, so that the measurement convenience is improved.
Based on the light path consistent displacement sensor, the measuring method comprises the following steps:
step one: the measured object is fixed on a triangular wave reflector or a reading head, wherein the reading head is that a laser source I, a reflector I and a photoelectric detector I are fixedly arranged in a shell.
Step two: the position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first reflecting mirror is adjusted, so that the first reflecting mirror receives the first laser beam reflected by the first reflecting surface of the triangular wave reflector, the first laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the first laser beam incident to the same first reflecting surface, and the first photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector.
Step three: transmitting a first laser beam, wherein the first laser beam passes through a first reflecting surface of the triangular wave reflecting mirror, the first reflecting surface of the reflecting mirror and a second reflecting surface of the reflecting mirror in sequence, and then the initial position of the reflected laser beam is detected by a first photoelectric detector;
step four: the displacement of the detected object, wherein in the displacement process, the photoelectric detector I detects the position change of the laser beam I until the detected object stops displacement;
step five: the first photoelectric detector is communicated with a processing system, and the processing system processes the position change detected by the first photoelectric detector, namely, performs triangle relation operation to obtain a displacement value of the detected object.
Example 2
Referring to fig. 4, compared with the optical path coincident displacement sensor described in embodiment 1, the optical path coincident displacement sensor provided in this embodiment further includes a second laser beam 4 incident on the first reflecting surface 51 of the triangular wave mirror 5; the following components:
a second mirror 10 for receiving the laser beam reflected by the first reflecting surface 51 of the triangular wave reflecting mirror 5 from the second laser beam 4, and reflecting the laser beam to the other second reflecting surface 52 of the triangular wave reflecting mirror 5 along the same path in the measuring process of the laser beam incident on the same first reflecting surface 51 from the second laser beam 4;
the second photodetector 8 is configured to receive the laser beam reflected by the second reflecting surface 52 of the triangular wave reflecting mirror 5 after being reflected by the second reflecting surface 10, and measure an incident position of the laser beam;
in the light path consistent displacement sensor, the processing system processes and obtains the displacement variation value of the measured object according to the incident position variation of the first laser beam 3 received by the first photoelectric detector 7 or the incident position variation of the second laser beam 4 received by the second photoelectric detector 8.
The optical path consistent displacement sensor in the embodiment can realize continuous displacement measurement. Specifically, one of the two laser beams may be selected for measurement, when one of the laser beam reflection points is located at some positions of the reflection surfaces, such as the top end of the reflection surface, the intersection position of the two reflection surfaces, etc., the length of the corresponding photo detector is limited, so that the photo detector cannot calculate the displacement value of the corresponding photo detector, the other laser beam reflection point is located at other positions of the other reflection surface, and can reflect to the corresponding photo detector and perform conversion measurement, so that each moment of the movement of the measured object can be realized, at least one of the laser beams reflected by each second reflection surface 52 on the triangular wave reflector 5 can reflect to the corresponding photo detector, and at this moment, the processing system can switch back and forth to calculate the position changes of the reflected laser beams of the two photo detectors for superposition accumulation, so as to realize the measurement of the displacement one-time change or continuous incremental displacement change of the measured object.
It is to be understood that, in this embodiment, the purpose of setting the first laser source 1 and the second laser source 2 is to avoid that when one group of photodetectors (one or two) cannot receive the laser beam, the other group of photodetectors can receive the laser beam to realize displacement measurement, so other setting modes besides the setting mode shown in fig. 4 are also possible, as long as the first laser source and the second laser source are set in a staggered manner, so that the initial incident point positions of the first laser beam and the second laser beam incident on the first reflecting surface of the triangular wave reflecting mirror are different. For example, the second laser beam may be incident on another first reflecting surface on the same side as the first reflecting surface on which the first laser beam is incident, or may be incident on another first reflecting surface on the opposite side to the first reflecting surface on which the first laser beam is incident (see fig. 4), or may be incident on the same reflecting surface on which the first laser beam is incident, but the incident point positions are different.
As shown in fig. 4, the first laser beam 3 and the second laser beam 4 are emitted by the first laser source 1 and the second laser source 2, respectively.
The two sets of measuring systems can be arranged in one shell to form one reading head, or the two sets of measuring systems can be respectively arranged in one shell to form two reading heads. Specifically, the first laser source, the second laser source, the first reflecting mirror, the second reflecting mirror, the first photoelectric detector and the second photoelectric detector are fixedly arranged in a shell to form a reading head. Or the first laser source, the first reflecting mirror and the first photoelectric detector are fixedly arranged in one shell to form a reading head, and the second laser source, the second reflecting mirror and the second photoelectric detector are fixedly arranged in the other shell to form the other reading head.
When the light path consistent displacement sensor in the embodiment is used for measurement, the steps are as follows:
step one, fixing an object to be measured on a triangular wave reflector or a reading head;
step two, adjusting the position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first reflector, so that the first reflector receives the first laser beam reflected by the first reflecting surface of the triangular wave reflector, the first laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the first laser beam incident to the same first reflecting surface, and the first photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector; the position relation of the second laser beam, the triangular wave reflector, the second photoelectric detector and the second reflecting mirror is adjusted, so that the second reflecting mirror receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process that the second laser beam is incident to the same first reflecting surface, and the second photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector;
step three, emitting a first laser beam, wherein the first laser beam passes through a first reflecting surface of the triangular wave reflecting mirror, a first reflecting surface of the reflecting mirror and a second reflecting surface of the reflecting mirror in sequence, and then the initial position of the reflected laser beam is detected by a first photoelectric detector; or, emitting a second laser beam, wherein the second laser beam passes through the first reflecting surface, the second reflecting surface and the second reflecting surface of the triangular wave reflecting mirror in sequence and then is detected by the second photoelectric detector to reflect the initial position of the laser beam;
fourthly, the measured object is displaced, and in the displacement process, the first photoelectric detector detects the position change of the first laser beam, or the second photoelectric detector detects the position change of the second laser beam until the measured object stops displacing;
and fifthly, the processing system processes the position change detected by the photoelectric detector I or the photoelectric detector II to obtain a displacement value of the detected object.
As shown in fig. 2, a position sensitive detector PSD is used as the photodetector.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that changes and substitutions are within the scope of the present invention.
Claims (9)
1. An optical path coincident displacement sensor, comprising:
the triangular wave reflector comprises a first reflecting surface and a second reflecting surface;
the first laser beam is incident to a first reflecting surface of the triangular wave reflecting mirror;
the first reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and enabling the laser beam to be reflected to the second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process that the laser beam is incident to the same first reflecting surface;
the photoelectric detector I is used for receiving the laser beam reflected by the second reflecting surface of the triangular wave reflecting mirror after being reflected by the first reflecting surface of the triangular wave reflecting mirror and measuring the incident position of the laser beam;
the processing system is used for calculating a displacement change value of the measured object according to the incident position change value of the first laser beam received by the first photoelectric detector;
the first reflecting mirror is parallel to the first reflecting surface and is also parallel to the second reflecting surface, and the included angle of the acute angle of the laser beam with the first reflecting surface is equal to twice the included angle of the first reflecting surface with the horizontal plane.
2. The optical path coincident displacement sensor according to claim 1, wherein the first reflecting surface and the second reflecting surface of the triangular reflecting mirror respectively have an angle of 150 degrees with respect to a horizontal plane, and an incident angle of the laser beam upon the first reflecting surface is 30 degrees.
3. The optical path coincident displacement sensor according to claim 2, wherein the first laser beam is emitted by the first laser source.
4. The optical path coincident displacement sensor according to claim 3, further comprising a housing, wherein the first laser source, the first mirror and the first photodetector are fixedly disposed within the housing to form a read head.
5. A light path uniform displacement sensor according to any of claims 1-3, further comprising: the first laser beam is incident to the first reflecting surface of the triangular wave reflecting mirror, and the initial incident point position of the first laser beam and the initial incident point position of the second laser beam on the first reflecting surface are different;
the second reflecting mirror is used for receiving the laser beam reflected by the first reflecting surface of the triangular wave reflecting mirror and reflecting the laser beam to the second reflecting surface of the triangular wave reflecting mirror along the same path in the measuring process of the laser beam incident to the same first reflecting surface;
the photoelectric detector II is used for receiving the laser beam reflected by the second reflecting surface of the triangular wave reflecting mirror after being reflected by the second reflecting surface of the triangular wave reflecting mirror and measuring the incident position of the laser beam;
the processing system is specifically configured to process the displacement variation value of the measured object according to the variation of the incident position of the first laser beam received by the first photodetector or the variation of the incident position of the second laser beam received by the second photodetector.
6. The optical path coincident displacement sensor according to claim 5, further comprising a housing, wherein the first laser beam and the second laser beam are respectively emitted by the first laser source and the second laser source, and the first laser source, the second laser source, the first reflecting mirror, the second reflecting mirror, the first photoelectric detector and the second photoelectric detector are fixedly arranged in the housing to form a reading head; or, the laser beam I and the laser beam II are respectively emitted by the laser source I and the laser source II, the laser source I, the reflector I and the photoelectric detector I are fixedly arranged in one shell to form a reading head, and the laser source II, the reflector II and the photoelectric detector II are fixedly arranged in the other shell to form another reading head.
7. The optical path coincident displacement sensor according to claim 6, wherein the first and second laser beams are each incident on the same first reflecting surface of the triangular mirror, or the first and second laser beams are each incident on two different first reflecting surfaces of the triangular mirror.
8. A method of measuring an optical path coincident displacement sensor according to any one of claims 1 to 3, comprising the steps of:
fixing the measured object on a triangular wave reflector or a reading head;
the position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first reflecting mirror is adjusted, so that the first reflecting mirror receives the first laser beam reflected by the first reflecting surface of the triangular wave reflector, the first laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the first laser beam incident to the same first reflecting surface, and the first photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector;
transmitting a first laser beam, wherein the first laser beam passes through a first reflecting surface of the triangular wave reflecting mirror, the first reflecting surface of the reflecting mirror and a second reflecting surface of the reflecting mirror in sequence, and then the initial position of the reflected laser beam is detected by a first photoelectric detector;
the displacement of the detected object, wherein in the displacement process, the photoelectric detector I detects the position change of the laser beam I until the detected object stops displacement;
the processing system obtains a displacement value of the measured object by processing the position change detected by the photoelectric detector.
9. The measuring method of the light path coincidence type displacement sensor as claimed in any one of claims 5 to 7, characterized by comprising the steps of:
fixing the measured object on a triangular wave reflector or a reading head;
the position relation among the first laser beam, the triangular wave reflector, the first photoelectric detector and the first reflecting mirror is adjusted, so that the first reflecting mirror receives the first laser beam reflected by the first reflecting surface of the triangular wave reflector, the first laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process of the first laser beam incident to the same first reflecting surface, and the first photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector; the position relation of the second laser beam, the triangular wave reflector, the second photoelectric detector and the second reflecting mirror is adjusted, so that the second reflecting mirror receives the laser beam reflected by the first reflecting surface of the triangular wave reflector, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in the measuring process that the second laser beam is incident to the same first reflecting surface, and the second photoelectric detector can receive the laser beam reflected by the second reflecting surface of the triangular wave reflector;
transmitting a first laser beam, wherein the first laser beam passes through a first reflecting surface of the triangular wave reflecting mirror, the first reflecting surface of the reflecting mirror and a second reflecting surface of the reflecting mirror in sequence, and then the initial position of the reflected laser beam is detected by a first photoelectric detector; or, emitting a second laser beam, wherein the second laser beam passes through the first reflecting surface, the second reflecting surface and the second reflecting surface of the triangular wave reflecting mirror in sequence and then is detected by the second photoelectric detector to reflect the initial position of the laser beam;
the displacement of the detected object is detected, and in the displacement process, the first photoelectric detector detects the position change of the first laser beam, or the second photoelectric detector detects the position change of the second laser beam until the detected object stops displacement;
the processing system is used for processing the position change detected by the first photoelectric detector or the second photoelectric detector to obtain the displacement value of the detected object.
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| CN109084691B (en) * | 2018-11-05 | 2024-04-05 | 四川惠科达仪表制造有限公司 | Refractive displacement sensor and measuring method thereof |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1446463A1 (en) * | 1987-06-29 | 1988-12-23 | Харьковский авиационный институт им.Н.Е.Жуковского | Apparatus for monitoring spatial position of an object |
| JPH08219743A (en) * | 1995-02-13 | 1996-08-30 | Ricoh Co Ltd | Method for evaluating plastic molding |
| JP2001183178A (en) * | 1999-12-17 | 2001-07-06 | Huajin Photoelectric Sci & Technol Co Ltd | Diffraction grating revolving laser optical encoder |
| DE10347898A1 (en) * | 2003-10-15 | 2005-05-19 | Carl Zeiss | Light source beam guiding system, e.g. for sensor, has variable spacing and/or angle of two mirrors for varying deflection of outgoing light beam |
| JP2005156943A (en) * | 2003-11-26 | 2005-06-16 | Samsung Yokohama Research Institute Co Ltd | Optical scanner |
| CN1719192A (en) * | 2005-06-23 | 2006-01-11 | 哈尔滨工业大学 | Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method |
| CN102255666A (en) * | 2010-05-18 | 2011-11-23 | 昂纳信息技术（深圳）有限公司 | Dispersion compensator |
| CN103075964A (en) * | 2011-10-26 | 2013-05-01 | 株式会社森精机制作所 | Displacement detecting device |
| CN103673892A (en) * | 2013-11-21 | 2014-03-26 | 清华大学 | Symmetric-type grating heterodyne interference secondary diffraction measuring device |
| CN104897064A (en) * | 2015-06-09 | 2015-09-09 | 张白 | Novel light-arm-amplification type high-precision length sensor and measurement method thereof |
| CN106017441A (en) * | 2016-08-07 | 2016-10-12 | 哈尔滨工业大学 | Portable high-precision laser long-working distance auto-collimation apparatus and method thereof |
| CN208171190U (en) * | 2018-05-18 | 2018-11-30 | 北方民族大学 | A kind of consistent formula displacement sensor of optical path |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4208483B2 (en) * | 2002-05-21 | 2009-01-14 | キヤノン株式会社 | Optical encoder |
-
2018
- 2018-05-18 CN CN201810481645.XA patent/CN108444396B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1446463A1 (en) * | 1987-06-29 | 1988-12-23 | Харьковский авиационный институт им.Н.Е.Жуковского | Apparatus for monitoring spatial position of an object |
| JPH08219743A (en) * | 1995-02-13 | 1996-08-30 | Ricoh Co Ltd | Method for evaluating plastic molding |
| JP2001183178A (en) * | 1999-12-17 | 2001-07-06 | Huajin Photoelectric Sci & Technol Co Ltd | Diffraction grating revolving laser optical encoder |
| DE10347898A1 (en) * | 2003-10-15 | 2005-05-19 | Carl Zeiss | Light source beam guiding system, e.g. for sensor, has variable spacing and/or angle of two mirrors for varying deflection of outgoing light beam |
| JP2005156943A (en) * | 2003-11-26 | 2005-06-16 | Samsung Yokohama Research Institute Co Ltd | Optical scanner |
| CN1719192A (en) * | 2005-06-23 | 2006-01-11 | 哈尔滨工业大学 | Bidimension photoelectric self collimating device based on optical length multiplication compensation method and its measuring method |
| CN102255666A (en) * | 2010-05-18 | 2011-11-23 | 昂纳信息技术（深圳）有限公司 | Dispersion compensator |
| CN103075964A (en) * | 2011-10-26 | 2013-05-01 | 株式会社森精机制作所 | Displacement detecting device |
| CN103673892A (en) * | 2013-11-21 | 2014-03-26 | 清华大学 | Symmetric-type grating heterodyne interference secondary diffraction measuring device |
| CN104897064A (en) * | 2015-06-09 | 2015-09-09 | 张白 | Novel light-arm-amplification type high-precision length sensor and measurement method thereof |
| CN106017441A (en) * | 2016-08-07 | 2016-10-12 | 哈尔滨工业大学 | Portable high-precision laser long-working distance auto-collimation apparatus and method thereof |
| CN208171190U (en) * | 2018-05-18 | 2018-11-30 | 北方民族大学 | A kind of consistent formula displacement sensor of optical path |
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