CN202916196U - Laser-induced breakdown spectrum analyzing device based on single light beam splitting - Google Patents
Laser-induced breakdown spectrum analyzing device based on single light beam splitting Download PDFInfo
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- CN202916196U CN202916196U CN 201220634312 CN201220634312U CN202916196U CN 202916196 U CN202916196 U CN 202916196U CN 201220634312 CN201220634312 CN 201220634312 CN 201220634312 U CN201220634312 U CN 201220634312U CN 202916196 U CN202916196 U CN 202916196U
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Abstract
The utility model discloses a laser-induced breakdown spectrum analyzing device based on single light beam splitting, which comprises a laser source, a laser splitting device, a straight-pass optical transmission device and a bypass optical transmission device that are all correspondingly linked through light paths, and further comprises a fiber optic detector, a spectrograph and a data analyzer. A laser beam emitted by the laser source is divided into two laser beams by the laser splitting device; one of the laser beams is focused by the straight-pass optical transmission device and is vertically incident onto the surface of a sample, while the other laser beam is adjusted to an incident angle where the incidence angle of the laser coincides with an action point of the vertical incident angle on the surface of the sample and is focused to be incident onto the surface of the sample; the two laser beams work together to cause the sample to generate plasma bodies; the fiber optic detector used for collecting the plasma bodies is connected with the spectrograph through optical fibers; a plasma body emission spectrum is coupled into the spectrograph; and the spectrograph transmits collected spectrum data to the data analyzer by a USB data line for detecting and analyzing composition of the sample, so as to obtain the sample composition information.
Description
Technical field
The utility model belongs to field of spectral analysis technology, relate to a kind of laser spectral analysis technology, especially a kind of Laser-induced Breakdown Spectroscopy analytical technology based on single beam beam splitting technology generation twin-beam is specifically related to a kind of double light beam laser induced breakdown spectroscopy analytical approach and device for carrying out said thereof.
Background technology
Laser-induced Breakdown Spectroscopy (Laser Induced Breakdown Spectroscopy, LIBS) technology is a kind of New type atom Emission Spectroscopy, this technology is fast by feat of detection speed, simultaneous determination of multiponents, possess on-the-spot original position analysis ability and need not the complicated advantages such as sample pre-treatments, is widely used in the numerous areas such as oil-gas mining, geologic prospecting, metallurgical electric power and environmental monitoring.But in recent years, the sensitivity that it is lower and higher detection limit had become the bottleneck of restriction LIBS technical development, therefore obtained numerous LIBS researchist's great attention.Solution for problems mainly comprises at present:
1. based on the auxiliary signal Enhancement Method of microwave: the method adds microwave energy around testing sample, by changing the living environment of laser induced plasma, realized the enhancing to the LIBS spectral signal;
2. based on the auxiliary signal Enhancement Method of effluve: the method adds two high-field electrodes at the laser induced plasma place, realize secondary excitation by the effluve plasma, has realized the enhancing to the LIBS spectral signal;
3. based on the signal Enhancement Method of laser dipulse: the method utilizes two laser instruments and a chronotron to produce two laser pulses with certain time delay (Microsecond grade), by two laser pulses priorities and sample or laser induced plasma effect, realize the secondary excitation of plasma, promoted the intensity of LIBS spectral signal.
Above-mentioned solution is in the intensity that has promoted in varying degrees the LIBS spectral signal, although implementation method is different, but its ultimate principle belongs to a class together, the additional energy that namely provides based on second excitaton source (such as microwave, effluve, pulse laser etc.), increase the launching efficiency of laser induced plasma, and then reach the sensitivity that promotes LIBS and the purpose that reduces detection limit.This shows that the condition precedent that this type of scheme realizes is: at excitaton source of original LIBS system's increase, for plasma provides extra excitation energy.Yet the excitaton source that increases will increase extra device or annex (such as microwave cavity, microwave generator, high-voltage pulse power source, laserresonator, pumping lamp water cooling plant etc.) for the LIBS system, such device or annex, volume is large, complex structure and expensive, will certainly increase the realization cost of LIBS system and the complexity of experimental provision, this will be unfavorable for the propagation and employment of LIBS Signal Enhanced Technology and relevant apparatus.
Summary of the invention
For the present situation of above-mentioned existing LIBS Signal Enhanced Technology and the problem of existence, the purpose of this utility model aims to provide a kind of Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting of brand new, the mode that strengthens to enrich the LIBS signal, overcome the device for carrying out said complex structure that existing LIBS Signal Enhanced Technology exists, the problems such as installation cost height.
Be used for realizing the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting of the utility model above-mentioned purpose, the lasing light emitter that mainly comprises the corresponding connection of light path, the laser beam splitter device, the forthright optical transmission apparatus, the bypass optical transmission apparatus, and fiber-optical probe, spectrometer and data-analyzing machine, described laser beam splitter device is divided into two bundle laser with the beam of laser of lasing light emitter emission, wherein beam of laser impinges perpendicularly on sample surfaces after being focused on by the forthright optical transmission apparatus, another Shu Jiguang adjusts laser incident angle to the angle and the line focus that overlap with the application point of vertical incidence laser on sample surfaces by the bypass optical transmission apparatus and incides sample surfaces, the common excited sample of two bundle laser produces plasma, the fiber-optical probe that detection window is aimed at plasma is linked to each other with spectrometer by optical fiber, plasma emission spectroscopy is coupled into spectrometer, and spectrometer is transferred to data-analyzing machine by the usb data line with the spectroscopic data that gathers sample composition is detected analysis.
Because the utility model relates to a kind of laser spectrum quasi-instrument, for the ease of the relation between each device of statement, with the device incident light direction and node definition be " light input interface ", with the device emergent light direction and node definition be " light output interface ", when " the light output interface " of " the light input interface " of previous device and a rear device that is right after when linking to each other, the direction that represents the light beam that previous device is exported is identical with the light beam incident direction of a rear device, and by the incident node.According to above-mentioned definition, device for carrying out said of the present utility model also can be described as: " the light output interface " of lasing light emitter is connected with " the light input interface " of laser beam splitter device, the laser beam splitter device is divided into forthright excitation laser and bypass excitation laser two bundle laser with this Shu Jiguang, wherein " the light output interface " of forthright excitation laser is connected with " the light input interface " of forthright optical transmission apparatus, " the light output interface " of bypass excitation laser is connected with " the light input interface " of bypass optical transmission apparatus, the laser action of " the light output interface " of forthright optical transmission apparatus and bypass optical delivery output same point to the sample surfaces, and produce plasma; The detection window of fiber-optical probe is aimed at plasma, and process optical fiber links to each other with spectrometer, plasma emission spectroscopy is coupled into spectrometer, and spectrometer is transferred to data-analyzing machine by the usb data line with the spectroscopic data that gathers, and finishes the analysis to sample composition.
In technique scheme, the lasing light emitter preferred energy is burnt greater than 30 millis, wavelength is the pulse laser of 1064nm, the wavelength of lasing light emitter also can be the pulse laser of 532nm, 355nm or 266nm, as long as the energy of single bundle of pulsed laser is burnt greater than 30 millis, the wavelength of concrete lasing light emitter is selected and energy selects to depend on actual demand.
In technique scheme, described laser beam splitter device is made of a laser beam splitter mirror that possesses the first mirror holder of spinfunction and be placed on the mirror holder.The mirror holder that wherein possesses spinfunction is responsible for fixedly beam splitter, and the angle α by spinfunction change beam splitter axis and incident laser, wherein α ∈ (0 °, 90 °).Beam splitter is responsible for the beam of laser pulse that lasing light emitter produces is divided into forthright excitation laser and bypass excitation laser two bundle laser, and the laser energy (because the variation of angle [alpha], beam splitter can lose certain energy) of two after beam splitting bundle laser energy summation before less than or equal to beam splitting.
In technique scheme, described forthright optical transmission apparatus is f by a burnt length
1The first condenser lens and the second mirror holder form, by the second mirror holder first lens is fixed on sample surfaces top f
1The place, its purpose is in order to guarantee that the first condenser lens focus is at sample surfaces.
In technique scheme, described bypass optical transmission apparatus is f by the first catoptron, burnt length at least
2The second condenser lens, to settle the 3rd mirror holder of the first catoptron, the 4th mirror holder, the radius that the second condenser lens is installed be R
1The first circular arc type track and radius be R
2The second circular arc type track form, described the 3rd mirror holder movably is arranged on the first circular arc type track, described the 4th mirror holder movably is arranged on the second circular arc type track, and the 3rd mirror holder and the 4th mirror holder are the mirror holder with spinfunction, and the radius R of the second circular arc type track
2With the burnt long f of the second condenser lens
2Unanimously, be used for ensureing that the focus of the second condenser lens is at sample surfaces.Namely in this device, when the first catoptron be used for to change the bypass excitation laser and incides sample surfaces and the angle β of sample surfaces vertical direction, β ∈ (20 ° 80 °); The burnt long f of the second condenser lens
2, be responsible for focusing on the bypass excitation laser, for the focus after the focusing that guarantees the bypass excitation laser overlaps (application point that definition forthright excitation laser focuses on rear and sample surfaces is initial point) with initial point, so R
2=f
2The center of circle of described the first circular arc type track and described the second circular arc type track preferably overlaps.
In technique scheme, for adapt to the bypass laser that emits from the laser beam splitter device can not glancing incidence to the situation of the first catoptron, described bypass optical transmission apparatus preferred design has the bypass excitation laser to adjust light path, described adjustment light path can be by the second catoptron, the 3rd catoptron, the 5th mirror holder and the 6th mirror holder that the second catoptron and the 3rd catoptron possess spinfunction is installed respectively forms, two catoptrons pass through the separately rotation change angle of mirror holder, and then realize the adjustment of bypass laser position.The second catoptron and the 3rd catoptron are preferably and be arranged in parallel.The position height of the position height of described the 3rd catoptron and the first catoptron preferably is consistent.
In technique scheme, described mirror holder with spinfunction can be designed to by be used for mirror holder be fixed on external frame on other members, rotatably be placed in the inner frame that is used for installing catoptron or condenser lens in the external frame, be used for rotating the rotating handle of inner frame and be used for the align member etc. that the inner frame of adjusting to the right place is positioned in the external frame is consisted of.
In technique scheme, fiber-optical probe is used for collecting two bundle laser-produced plasma emission spectrum, and the spectrum of collecting is advanced spectrometer by coupling fiber; Spectrometer is used for gathering the collected spectrum of fiber-optical probe, and is translated into electric signal, is transferred to data-analyzing machine by the usb data line; Data-analyzing machine is used for calculating, analyzes and processes the electric signal that spectrometer transmits, and shows by the spectrum of display with this sample at last.
Optical delivery scheme of the present utility model such as Fig. 3, Fig. 4 or shown in Figure 6, lasing light emitter produces the beam of laser pulse, behind beam splitter, be divided into a branch of forthright excitation laser and a branch of bypass excitation laser, wherein the forthright excitation laser is behind the first condenser lens, perpendicular to sample surfaces incident, the bypass excitation laser changes transmission path through the second catoptron and the 3rd catoptron, and incide the first catoptron from horizontal direction, laser through the first mirror reflects incides the second condenser lens, finally focus on sample surfaces, and focus point overlaps with the application point of sample with the forthright excitation laser of vertical incidence.In whole optical delivery scheme, when β numerical value changes, the optics that needs to adjust comprises the second catoptron, the 3rd catoptron, the first catoptron and the second condenser lens, and detailed adjusting is described as follows, and wherein the space structure synoptic diagram of these several mirrors is as shown in Figure 5:
1. the regulative mode of the second catoptron: the effect of this catoptron is to realize the position adjustments of bypass excitation laser, before the explanation control method, need to calculate a critical angle, the laser of definition lasing light emitter emission is d with respect to the level height of sample surfaces, when not using the second catoptron to change bypass excitation laser level height, the angle β of the laser that the first catoptron reflects and forthright excitation laser
0=arccos (d/R
1), therefore as β＜β
0The time, need to the raise level height of bypass excitation laser of the Main Function of the second catoptron is shown in the second catoptron among Fig. 3; Work as β〉β
0The time, the Main Function of the second catoptron need to reduce the level height of bypass excitation laser, and shown in the second catoptron among Fig. 4, adjustment process is finished by the 4th mirror holder in the bypass optical transmission apparatus.
2. the regulative mode of the 3rd catoptron: the effect of this catoptron is to change the transmission path of bypass excitation laser, the purpose of its path changing is to make bypass excitation laser along continuous straight runs to incide the first catoptron, therefore the relative and keeping parallelism of reflecting surface of the second catoptron and the 3rd catoptron, the height of the height of the 3rd catoptron and the first catoptron is consistent.
3. the regulative mode of the first catoptron: the effect of the first catoptron is to change the transmission path of bypass excitation laser, and the purpose of its path changing is to make the bypass excitation laser to incide sample surfaces according to predetermined angle β.Because the incident laser of the first catoptron is horizontal direction, according to the triangle geometry principle, the angle of the reflector laser of the first catoptron and incident laser is 90 °-β so, and again according to principle of reflection as can be known, the axis of the first catoptron and the angle of horizontal direction are (45 °-β/2).Other the first catoptron is with respect to the level height h of sample surfaces
1, can calculate according to the triangle geometry principle equally, result of calculation is h
1=R
1Cos β.According to above-mentioned result of calculation, by spinfunction and the first circular arc type track of the second mirror holder, adjust the angle and height of the first catoptron.
4. the regulative mode of the second condenser lens: the effect of the second condenser lens is the reflector laser of the first catoptron is focused on, principle of work according to condenser lens, the position of the second condenser lens should guarantee that incident laser is through the geometric center of lens, and along the Propagation of these lens, so according to the triangle geometry principle, the axis of the second condenser lens and the angle of vertical direction are β, the height h of the second condenser lens
2=R
2Cos β.According to above-mentioned result of calculation, by spinfunction and the second circular arc type track of the 3rd mirror holder, adjust the angle and height of the second condenser lens.
The utility model is compared with existing LIBS dipulse analytical technology, has very outstanding difference in essence aspect the ultimate principle of its realization and Optical System Design, is described as follows:
1, ultimate principle is different.Existing LIBS Signal Enhanced Technology all realizes that by excitaton source of extra increase the LIBS signal strengthens, no matter this excitaton source is microwave, high-voltage power supply or laser pulse, all need to increase an excitaton source than basic LIBS system, the required energy of system has nearly increase at double.And the Enhancement Method that the utility model proposes, it is the single-pulse laser that basic LIBS system is produced, be divided into two bundle laser, the energy summation of this two bundles laser is less than or equal to the single-pulse laser energy before the beam splitting, can find out, the required system capacity of the utility model is identical with basic LIBS system, need not extra excitaton source, so the utility model all is better than existing LIBS Signal Enhanced Technology greatly on the cost of device and structure complexity.
2, understanding mistaken ideas of the prior art have been overcome.The Optical System Design scheme of present existing dipulse technology mainly comprises two classes: 1. vertical collinearity, and namely two laser pulses successively incide sample surfaces from vertical direction; 2. right-angled intersection, namely a laser pulse is perpendicular to sample surfaces incident, and another laser pulse is parallel to sample surfaces incident.Existing document all shows with actual test, when such scheme all requires be not less than 2 microsecond two time delays between the laser pulse, just can produce obvious humidification to LIBS spectrum wire size, if time delay too short (less than 1 microsecond), the LIBS spectral signal not only can not strengthen, the trend that can occur weakening on the contrary.And the twin-beam that the utility model adopts is produced by a laser pulse, only determined by the optical path difference of two bundle laser the interval time that two bundle laser arrive sample surfaces, the optical path difference of two bundle laser is generally less than 1 meter, namely the interval time of two bundle laser arrival sample surfaces will be less than 5 nanoseconds (being far smaller than 1 microsecond), as seen by the understanding of prior art, the monopulse double-beam technique that the utility model proposes is that the LIBS spectral signal is strengthened.But the inventor is by deep research and discovery, change existing dipulse design proposal, a brand-new double-pulse laser incident path geometric model is proposed, i.e. the first bundle laser vertical sample surfaces incident, and the second bundle laser and the first at an angle from the side incident of bundle laser, through experimental verification, the geometric model that the utility model proposes almost not have can realize equally in the situation of delay (less than 5 nanoseconds) enhancing of LIBS spectral signal at two bundle laser.
3, device for carrying out said is simple in structure, and cost of manufacture is low.Device for carrying out said of the present utility model only has a lasing light emitter, lifting LIBS spectral signal intensity device for carrying out said compared to prior art, at excitaton source of original LIBS system's increase, for plasma provides extra excitation energy, an excitaton source and supporting device or annex have with it been saved.Increase an excitaton source, the LIBS system need be equipped with a plurality of servicing units or annex simultaneously, such as microwave cavity, microwave generator, high-voltage pulse power source, laserresonator, pumping lamp water cooling plant etc., and this type of servicing unit or accessory structure are complicated, expensive, volume is larger, has therefore greatly increased the manufacturing cost of LIBS system and device and the complexity of experimental provision, is unfavorable for the propagation and employment of LIBS Signal Enhanced Technology and relevant apparatus.
Description of drawings:
Fig. 1 is device for carrying out said one-piece construction schematic block diagram of the present utility model;
Fig. 2 is the laser beam splitter apparatus structure synoptic diagram in the device for carrying out said;
Fig. 3 is the optical delivery conceptual design figure (β＜β 0) of device for carrying out said of the present utility model;
Fig. 4 is the optical delivery conceptual design figure (β〉β 0) of device for carrying out said of the present utility model;
Fig. 5 is the locus synoptic diagram of optical mirror slip in the bypass optical transmission apparatus;
Fig. 6 is with the device for carrying out said optical delivery conceptual design figure of transmission laser as the vertical incidence excitation laser;
Fig. 7 is the Mirror frame structure synoptic diagram that possesses spinfunction;
When Fig. 8 was two bundle excitation laser incident angle β=60 °, two bundle excitation lasers strengthened design sketch with the spectral signal of common activated plasma respectively;
When Fig. 9 was two bundle excitation laser incident angle β=30 °, two bundle excitation lasers strengthened design sketch with the spectral signal of common activated plasma respectively.
The object that each shown by reference numeral table is known in the above-mentioned accompanying drawing is respectively: the 1-lasing light emitter; 2-laser beam splitter device; 3-forthright optical transmission apparatus; 4-bypass optical transmission apparatus; The 5-fiber-optical probe; The 6-spectrometer; The 7-data-analyzing machine; The 8-beam splitter; 9-forthright excitation laser; 10-bypass excitation laser; 11-the first condenser lens; 12-the second catoptron; 13-the 3rd catoptron; 14-the first catoptron; 15 first circular arc type tracks; 16-the second focus lamp; 17-the second circular arc type track; The 18-sample; 19-mirror holder external frame; 20-mirror holder inner frame; 21-mirror holder swingle; 22-mirror holder fixed screw.
Embodiment:
Provide specific embodiment of the utility model below in conjunction with accompanying drawing, and by embodiment the utility model is further described specifically.Be necessary to point out at this, the following examples just are used for setting forth better principle of work of the present utility model and practical application thereof, so that the technician in other field is used for the various facilities in its field with the utility model, and improve according to the imagination of various special-purposes.Although the utility model discloses its first-selected embodiment by literal; but but can understand wherein optimization and alterability by reading these technology explanatory notes; and improve not departing from scope and spirit of the present utility model, but such improvement should still belong to the protection domain of the utility model claim.
Embodiment
The Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting of present embodiment, its structured flowchart install the optical delivery conceptual design as shown in Figure 3 and Figure 4 as shown in Figure 1.With wavelength 1064nm, single beam laser pulse energy 100mJ, the Nd:YAG laser instrument of pulse width 8ns is lasing light emitter 1, the pulse laser of lasing light emitter emission is divided into a branch of forthright excitation laser 9 and a branch of bypass excitation laser 10 through behind the beam splitter 8, wherein the forthright excitation laser is behind the first condenser lens 11, perpendicular to sample 18 surperficial incidents, and focus is positioned at sample surfaces; The bypass excitation laser is through the second catoptron 12, make its beam Propagation path from left to right change into vertical direction from bottom to up by horizontal direction, and incide the 3rd catoptron 13, make its beam Propagation path change into from bottom to up horizontal direction from left to right by vertical direction, and incide the first catoptron 14, laser through 14 reflections of the first catoptron incides the second condenser lens 16, and focus on sample surfaces, and focus overlaps with the focus that the forthright excitation laser converges to sample surfaces, because the acting in conjunction of two bundle laser, can produce plasma at sample surfaces, the emission spectrum of plasma is collected by fiber-optical probe 5, and be coupled to spectrometer 6 and carry out data acquisition and photosignal and transform, finally be transferred to data-analyzing machine 7 by the usb data line and carry out spectrum analysis.Wherein the second catoptron, the 3rd catoptron, the first catoptron and the second condenser lens are installed on the second mirror holder, the 3rd mirror holder, the 4th mirror holder and the 5th mirror holder successively, mirror holder possesses spinfunction, its structure as shown in Figure 7, external frame 19 is used for mirror holder and is fixed on other poles, inner frame 20 is used for installing catoptron or condenser lens, swingle 21 is used for rotating inner frame, to reach the angle of inclination of adjusting eyeglass on the inner frame, after fixed screw 22 is screwed down, angle of inclination that can the fixing internal framework.In the adjustable optical mirror slip of these several angles, the second catoptron and the 3rd catoptron just need to carry out angular setting when this device is built, in case device is built complete, when beginning to carry out analytical test, need not to adjust angle, only need to carry out angular adjustment to the first catoptron and the second condenser lens, to reach the incident angle that changes bypass excitation laser and forthright excitation laser.
The operating process of adopting double light beam laser induced breakdown spectroscopy analytical equipment of the present utility model to measure solid sample can be divided into following three phases:
1. preparatory stage: before the experiment beginning, at first according to above-mentioned optical delivery scheme, adjust the angle of inclination of beam splitter, the second catoptron and the 3rd catoptron, and by fixed screw the pitch angle of these three optical mirror slips is fixed.Then solid sample to be measured is carried out compressing tablet, and adjust the sample surfaces height by sample stage, so that the focus of the upper surface of sample and the first condenser lens is in the same level face.
2. parameter arranges the stage: the angle β when inciding sample surfaces according to the preassigned forthright excitation laser of experiment condition and bypass excitation laser, and the control method of above-mentioned the first catoptron and the second condenser lens, calculating the axis of the first catoptron and the angle of horizontal direction is that (45 °-β/2), the first catoptron are R with respect to the height of sample surfaces
1The axis of cos β, the second condenser lens and the angle of vertical direction are that β, the second condenser lens are R with respect to the height of sample surfaces
2Cos β, and adjust the first catoptron and the second condenser lens according to result of calculation, then start laser instrument, and the first catoptron and the second condenser lens are finely tuned at the first circular arc type track 15 and the second circular arc type track 17, overlap at sample surfaces with the focus point of guaranteeing two bundle laser.Experimental specific requirement arranges the experiment parameters such as energy, repetition frequency, spectrometer integral time, spectrometer time delay and average testing time of laser instrument.
3. analytical test stage: when Preparatory work of experiment stage and parameter arrange the stage complete after, start laser instrument and send a synchronizing signal to spectrometer, open forthright optical transmission apparatus 3 and bypass optical transmission apparatus 4, so that forthright excitation laser and bypass excitation laser almost focus on same point on the sample surfaces simultaneously, the spectral analysis software of operational data analysis device is analyzed the spectrogram that obtains, store.
In order further to set forth the utility model in the advantage aspect the enhancing of LIBS signal, the below is take the standard model (GBW03104) of shale as example, and provides concrete experiment parameter and the result of this experiment.Si in the selected shale is element to be measured, and the wavelength of its atomic emissions characteristic spectral line is 288.15nm; The running parameter of laser instrument and spectrometer: single beam laser pulse energy 100mJ, laser instrument repetition frequency 5Hz, spectrometer 3ms integral time, spectrometer signals collecting μ s time delays 3.5, data average time 50 times; Angle β when forthright excitation laser and bypass excitation laser incide sample surfaces is chosen as respectively 30 ° and 60 °.Under these conditions, when β=60 °, beam splitter is replaced with catoptron, open the forthright optical transmission apparatus, close the bypass optical transmission apparatus, only use the forthright excitation laser excited sample of vertical direction, average 50 times test result, and the data of preservation spectrometer collection, Z=3 curve among experimental result such as Fig. 8; Remove beam splitter, open the bypass optical transmission apparatus, close the forthright optical transmission apparatus, only use bypass excitation laser excited sample, average 50 times test result, and preserve the data that spectrometer gathers, Z=2 curve among experimental result such as Fig. 8; Recover the installation of beam splitter, open simultaneously forthright optical transmission apparatus and bypass optical transmission apparatus, use forthright excitation laser and the acting in conjunction of bypass excitation laser at sample surfaces, average 50 times test result, and the data of preservation spectrometer collection, Z=1 curve among experimental result such as Fig. 8 can be found out method and device for carrying out said that the utility model provides, can effectively strengthen the LIBS signal.
LIBS is strengthened the impact of effect for the incident angle β that proves forthright excitation laser and bypass excitation laser, the β angle of above-mentioned experiment condition is set to 30 °, and repeat above-mentioned analytical test step, experimental result as shown in Figure 9, wherein only use the forthright excitation laser excitation result of vertical direction to be the Z=3 curve, only use bypass excitation laser excitation result to be the Z=2 curve, open simultaneously forthright optical transmission apparatus and bypass optical transmission apparatus, use forthright excitation laser and the acting in conjunction of bypass excitation laser at sample, acquired results is the Z=1 curve.By comparison diagram 8 and Fig. 9, can find out, the different enhancing effects that can affect spectral line of the angle of two bundle laser, this also is the purpose that changes two bundle excitation laser incident angles.
The utility model is not limited to embodiment mentioned above, the suitable modification of carrying out at architecture basics described in the utility model and optimizing as long as the scope that defines in claim all belongs to category of the present utility model.
Claims (10)
1. Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting, it is characterized in that mainly comprising the lasing light emitter (1) of the corresponding connection of light path, laser beam splitter device (2), forthright optical transmission apparatus (3), bypass optical transmission apparatus (4), and fiber-optical probe (5), spectrometer (6) and data-analyzing machine (7), described laser beam splitter device is divided into two bundle excitation lasers with the beam of laser of lasing light emitter emission, wherein a branch of excitation laser impinges perpendicularly on sample surfaces after being focused on by the forthright optical transmission apparatus, another bundle excitation laser is adjusted laser incident angle to the angle and the line focus that overlap with the application point of forthright excitation laser on sample surfaces by the bypass optical transmission apparatus and is incided sample surfaces, the common excited sample of two bundle excitation lasers produces plasma, the fiber-optical probe that detection window is aimed at plasma is linked to each other with spectrometer by optical fiber, plasma emission spectroscopy is coupled into spectrometer, and spectrometer is transferred to data-analyzing machine by the usb data line with the spectroscopic data that gathers sample composition is detected analysis.
2. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 1 is characterized in that described lasing light emitter is that energy is not less than 30 milli Jiao, wavelength is the pulse laser of 1064nm, 532nm, 355nm or 266nm.
3. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 1 is characterized in that described laser beam splitter device (2) is made of a laser beam splitter mirror (8) that possesses the first mirror holder of spinfunction and be placed on the mirror holder.
4. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 1 is characterized in that described forthright optical transmission apparatus is f by a burnt length
1The first condenser lens and the second mirror holder form, by the second mirror holder first lens is fixed on sample surfaces top f
1The place.
5. according to claim 1 to one of 4 described Laser-induced Breakdown Spectroscopy analytical equipments based on the single beam beam splitting, it is characterized in that described bypass optical transmission apparatus (4) is by at least one first catoptron (14), the burnt long f that is
2The second condenser lens (16), the 3rd mirror holder that the first catoptron is installed, the 4th mirror holder, the radius that the second condenser lens is installed be R
1The first circular arc type track (15) and radius be R
2The second circular arc type track (17) form, described the 3rd mirror holder movably is arranged on the first circular arc type track (15), described the 4th mirror holder movably is arranged on the second circular arc type track (17), and the radius R of the second circular arc type track
2With f
2Unanimously, the 3rd mirror holder and the 4th mirror holder are the mirror holder with spinfunction.
6. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 5, it is characterized in that described bypass optical transmission apparatus (4) also is provided with the bypass excitation laser and adjusts light path, this adjustment optical routing second catoptron (12), the 3rd catoptron (13), the 5th mirror holder and the 6th mirror holder the second catoptron and the 3rd catoptron being installed and being possessed spinfunction respectively form, two catoptrons pass through the separately rotation change angle of mirror holder, and then realize the adjustment of bypass excitation laser position.
7. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 6 is characterized in that the second catoptron (12) and the 3rd catoptron (13) that described bypass excitation laser is adjusted in the light path be arranged in parallel.
8. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 7 is characterized in that the position height of described the 3rd catoptron (13) and the position height of the first catoptron (14) are consistent
9. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 5 is characterized in that the center of circle of described the first circular arc type track (15) and described the second circular arc type track (17) overlaps.
10. the Laser-induced Breakdown Spectroscopy analytical equipment based on the single beam beam splitting according to claim 6, it is characterized in that described mirror holder with spinfunction by be used for mirror holder be fixed on external frame (19) on other members, rotatably be placed in the inner frame (20) that is used for installing catoptron or condenser lens in the external frame, be used for rotating the rotating handle (21) of inner frame and be used for the align member (22) that the inner frame of adjusting to the right place is positioned in the external frame is consisted of.
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| CN 201220634312 CN202916196U (en) | 2012-11-27 | 2012-11-27 | Laser-induced breakdown spectrum analyzing device based on single light beam splitting |
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| CN 201220634312 CN202916196U (en) | 2012-11-27 | 2012-11-27 | Laser-induced breakdown spectrum analyzing device based on single light beam splitting |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103123320A (en) * | 2012-11-27 | 2013-05-29 | 四川大学 | Laser-induced breakdown spectroscopy analysis method and implementation device based on single-light beam splitting |
| CN104931462A (en) * | 2014-03-17 | 2015-09-23 | 以恒科技(北京)有限公司 | Mixed light source focusing enhancing plasma detection system |
| CN105556291A (en) * | 2013-05-30 | 2016-05-04 | 激光测距光谱有限公司 | Method of laser-induced breakdown spectroscopy in air |
| CN105758841A (en) * | 2016-04-08 | 2016-07-13 | 苏州启翔仪器科技有限公司 | Laser-induced breakdown spectrum analyzer |
| CN105758842A (en) * | 2016-04-08 | 2016-07-13 | 苏州启翔仪器科技有限公司 | Filtering system of laser-induced breakdown spectrum analyzer |
| CN105842207A (en) * | 2016-04-08 | 2016-08-10 | 苏州启翔仪器科技有限公司 | A laser-induced breakdown spectroanalysis instrument |
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2012
- 2012-11-27 CN CN 201220634312 patent/CN202916196U/en not_active Expired - Lifetime
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103123320A (en) * | 2012-11-27 | 2013-05-29 | 四川大学 | Laser-induced breakdown spectroscopy analysis method and implementation device based on single-light beam splitting |
| CN105556291A (en) * | 2013-05-30 | 2016-05-04 | 激光测距光谱有限公司 | Method of laser-induced breakdown spectroscopy in air |
| US9891173B2 (en) | 2013-05-30 | 2018-02-13 | Laser Distance Spectrometry Ltd. | Method of laser-induced breakdown spectroscopy in air |
| CN104931462A (en) * | 2014-03-17 | 2015-09-23 | 以恒科技(北京)有限公司 | Mixed light source focusing enhancing plasma detection system |
| CN105758841A (en) * | 2016-04-08 | 2016-07-13 | 苏州启翔仪器科技有限公司 | Laser-induced breakdown spectrum analyzer |
| CN105758842A (en) * | 2016-04-08 | 2016-07-13 | 苏州启翔仪器科技有限公司 | Filtering system of laser-induced breakdown spectrum analyzer |
| CN105842207A (en) * | 2016-04-08 | 2016-08-10 | 苏州启翔仪器科技有限公司 | A laser-induced breakdown spectroanalysis instrument |
| CN105758842B (en) * | 2016-04-08 | 2018-10-19 | 苏州启翔仪器科技有限公司 | A kind of filtering system of laser induced breakdown spectroscopy analyzer |
| CN105758841B (en) * | 2016-04-08 | 2018-10-19 | 苏州启翔仪器科技有限公司 | A kind of laser induced breakdown spectroscopy analyzer |
| CN105842207B (en) * | 2016-04-08 | 2018-12-11 | 苏州启翔仪器科技有限公司 | A kind of laser induced breakdown spectroscopy analyzer |
| CN106338499A (en) * | 2016-08-31 | 2017-01-18 | 徐金杰 | Element laser detection and analysis instrument and mineral element analysis method |
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