CN110632038A - Light path time-delay double-pulse LIBS device - Google Patents
Light path time-delay double-pulse LIBS device Download PDFInfo
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- CN110632038A CN110632038A CN201911030570.4A CN201911030570A CN110632038A CN 110632038 A CN110632038 A CN 110632038A CN 201911030570 A CN201911030570 A CN 201911030570A CN 110632038 A CN110632038 A CN 110632038A
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- 238000001299 laser-induced shock wave plasma spectroscopy Methods 0.000 title claims abstract description 49
- 230000003287 optical effect Effects 0.000 claims abstract description 37
- 238000002310 reflectometry Methods 0.000 claims abstract description 3
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 239000013307 optical fiber Substances 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 238000002679 ablation Methods 0.000 claims description 5
- 238000003303 reheating Methods 0.000 claims description 4
- 230000010354 integration Effects 0.000 abstract description 3
- 230000001934 delay Effects 0.000 abstract description 2
- 238000002834 transmittance Methods 0.000 abstract 1
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/631—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using photolysis and investigating photolysed fragments
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses an optical path delay double-pulse LIBS device. The device adopts the spectroscope to divide a laser beam emitted by one laser into two beams, wherein one beam of light is focused and then directly irradiates the surface of a sample to be measured, and the other beam of light firstly delays for a certain time through the light path delayer, then is focused and finally irradiates the surface of the sample to be measured. The adjustment of the energy of the split beam can be realized by selecting the beam splitter with different reflectivity and transmittance. By adjusting the optical path delayer, the optical path of the delay optical path can be changed, so that the optical path difference of the two laser beams is changed, and the change of the delay time is realized. Compared with the existing double-pulse LIBS device, the device only needs one laser and does not need a digital delay pulse generator, so that the system cost is reduced, the system volume is reduced, and the integration, popularization and miniaturization of the double-pulse LIBS device are facilitated.
Description
Technical Field
The invention relates to the field of laser diagnosis and spectrum detection, in particular to a light path time-delay double-pulse Laser Induced Breakdown Spectroscopy (LIBS) device.
Background
The Laser Induced Breakdown Spectroscopy (LIBS) technology is an element component analysis technology which is developed rapidly in recent years, pulse laser with high energy and short pulse width is used as an excitation source, the pulse laser is focused and then irradiated on the surface of a sample, the sample is heated, ablated, dissociated, excited and ionized to generate plasma, and the element component and element concentration information of the sample can be obtained by analyzing the position and intensity signals of a characteristic spectral line in the plasma emission spectrum. The LIBS technology has the characteristics of high detection speed, almost no need of sample preparation, wide detection element range and capability of in-situ detection, thereby having wide application in the element detection and industrial fields.
The double-pulse Laser Induced Breakdown Spectroscopy (LIBS) technology is mainly divided into three types: collinear double-pulse LIBS techniques, orthogonal pre-ablation double-pulse LIBS techniques, and orthogonal reheat double-pulse LIBS techniques. The collinear double-pulse LIBS technology adopts two collinear pulse lasers to sequentially and vertically ablate a sample and induces the sample to generate plasma; the orthogonal pre-ablation double-pulse LIBS technology firstly adopts pulse laser parallel to the surface of a sample to puncture air near the surface of the sample, and then adopts the pulse laser vertical to the surface of the sample to ablate the sample, so that the sample generates plasma; the orthogonal reheating double-pulse LIBS technology firstly adopts pulse laser vertical to the surface of a sample to ablate the sample to generate plasma, and then adopts the pulse laser parallel to the surface of the sample to continuously heat the generated plasma. Compared with single-pulse LIBS, the double-pulse LIBS can enhance the intensity of the emission spectrum signal, improve the signal-to-noise ratio and improve the signal stability, thereby being more and more widely applied.
The traditional double-pulse LIBS system needs two lasers to generate two high-energy pulse lasers with short pulse widths, and needs a digital delay pulse generator to control the delay time between the two pulse lasers. Compared with a single-pulse LIBS system, the double-pulse LIBS system has the advantages of large size, high cost, inconvenience for integration and popularization of the double-pulse LIBS system and obstruction to miniaturization of the double-pulse LIBS system.
Disclosure of Invention
The invention aims to provide an optical path delay double-pulse LIBS device, which replaces a double laser and a digital pulse delayer by laser beam splitting and optical path delay methods and solves the problems of high cost, large volume and the like of the traditional double-pulse LIBS system.
The technical scheme adopted by the invention is as follows:
an optical path time-delay double-pulse LIBS device comprises a pulse laser, a spectroscope, an optical path time delay device with an adjustable optical path, a reflector A, a reflector B, a beam expanding and collimating focusing lens group A, a beam expanding and collimating focusing lens group B, a collecting lens, an optical fiber, a spectrometer, a computer and a displacement table for placing a sample to be measured;
pulse laser emitted by the pulse laser is divided into transmitted light and reflected light by the spectroscope, wherein the reflected light is reflected by the reflector B and then is focused by the beam expanding collimation focusing lens group A to irradiate the surface of a sample to be measured; the transmitted light passes through the light path delayer, is reflected by the reflector A, and is irradiated on the surface of a sample to be measured after being focused by the beam expanding collimating focusing lens group B;
two beams of laser double pulses irradiate the surface of a sample to be detected to generate plasma, light emitted by the plasma is collected by a collecting lens and transmitted to a spectrometer through an optical fiber, and the spectrometer is connected with a computer and can analyze the collected spectrum;
and the computer controls the displacement table to move the sample to be detected to the designated position.
In the spectroscope, laser can be divided into two beams after passing through the spectroscope, one beam is transmitted light, the other beam is reflected light, and the proportion of the energy of the double-pulse LIBS light beam can be changed by adopting the spectroscope with different transmissivity and reflectivity. .
The optical path delayer can change the optical path by adjusting the internal structure of the delay optical path, such as the length of an optical fiber, the position of a reflector and the like, and adjust the time of laser passing through the optical path delayer, thereby controlling the delay time.
The spectrometer is provided with an external trigger module and a time delay module, and is connected with the laser, so that the delay time between laser generation and spectrum collection can be adjusted, and the signal-to-noise ratio of collected spectra is optimized.
The optical path time-delay double-pulse LIBS device can realize four modes, namely an orthogonal reheating type double-pulse LIBS mode, an orthogonal pre-ablation type double-pulse LIBS mode, a collinear double-pulse LIBS mode and an intersected double-pulse LIBS mode, by adjusting the incidence angles of two beams of laser and the arrangement positions of optical path time delays.
The realization method comprises the following steps: for orthogonal double-pulse LIBS, two beams of laser can be orthogonally incident, wherein one beam is perpendicular to the surface of a sample to be measured, the other beam is parallel to the surface of the sample to be measured, if the optical path delayer is arranged in a perpendicular incident optical path, parallel light is firstly incident, the perpendicular light is incident after time delay, orthogonal pre-ablation LIBS can be realized, and if the optical path delayer is arranged in a parallel incident optical path, the perpendicular light is firstly incident, the parallel light is incident after time delay, and orthogonal reheating LIBS can be realized. For the collinear double-pulse LIBS mode, two laser beams can be collinearly vertically incident on the surface of a sample to be detected, a light path delayer is arranged in one light path, the time delay between the two laser beams is controlled, and the collinear double-pulse LIBS is realized. For the cross-type double-pulse LIBS, the angle between two beams of laser can be adjusted to enable the two beams of laser to be incident in a cross mode, the optical path delayer is installed in one beam of optical path, the time delay between the two beams of laser is controlled, and the cross-type double-pulse LIBS is achieved.
Compared with the prior art, the invention has the advantages that the number of the lasers needed by the double-pulse LIBS is reduced from two lasers to one laser by adopting a light splitting mode, the digital pulse delayer is replaced by the optical path delay, the cost and the volume of the double-pulse LIBS system are reduced, the performance of the double-pulse LIBS system is not influenced, and the popularization, the integration and the miniaturization of the double-pulse LIBS are facilitated
Drawings
FIG. 1 is a schematic structural diagram of an optical-path delay double-pulse LIBS device according to the present invention,
in the figure: 1. a pulsed laser; 2. a beam splitter; 3. an optical path delayer; 4. a reflector A; 5. a reflective mirror B; 6. a beam expanding collimation focusing lens group A; 7. a beam expanding collimation focusing lens group B; 8. a collection lens; 9. an optical fiber; 10. a spectrometer; 11. a computer; 12. a displacement table.
Detailed Description
The invention is further illustrated with reference to the following examples and figures, without thereby limiting the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an optical path delay double-pulse LIBS device of the present invention, and as shown in the figure, the optical path delay double-pulse LIBS detection device includes a pulse laser 1, a spectroscope 2, an optical path delayer 3, a reflective mirror A4, a reflective mirror B5, an expanded beam collimating focusing lens group A6, an expanded beam collimating focusing lens group B7, a collecting lens 8, an optical fiber 9, a spectrometer 10, a computer 11, and a displacement table 12.
The specific implementation process is as follows:
1) the sample to be measured is placed on the triaxial displacement table 12, and the triaxial displacement table 12 is controlled by the computer 11 to move the sample to be measured 13 to a specified position.
2) The pulse laser 1 emits a beam of pulse laser, and the pulse laser is divided into two beams of refracted light and transmitted light by the spectroscope 2, wherein one beam of light is reflected by the reflector B5, and is irradiated on the surface of a sample to be measured after being focused by the beam expanding collimation focusing lens group A6. And the other beam of light passes through the optical path delayer 3 with adjustable optical path, is reflected by the reflector A4, is focused by the beam expanding collimation focusing lens group B7 and then irradiates the surface of the sample to be measured.
3) The laser double-pulse irradiates the surface of a sample to generate plasma, light emitted by the plasma is collected by a collecting lens 8 and then transmitted to a spectrometer 10 through an optical fiber 9, and the spectrometer 10 is connected with a computer 11 and can analyze the collected spectrum to obtain element composition and content information of the sample to be detected.
Claims (5)
1. An optical path time-delay double-pulse LIBS device comprises a pulse laser (1), a spectroscope (2), an optical path time delay device (3) with an adjustable optical path, a reflector A (4), a reflector B (5), a beam expanding collimation focusing lens group A (6), a beam expanding collimation focusing lens group B (7), a collecting lens (8), an optical fiber (9), a spectrometer (10), a computer (11) and a displacement table (12) for placing a sample (13) to be measured; the method is characterized in that:
pulse laser emitted by the pulse laser (1) is divided into transmitted light and reflected light by the spectroscope (2), wherein the reflected light is reflected by the reflector B (5) and then is focused by the beam expanding collimation focusing lens group A (6) to irradiate the surface of a sample to be measured; the transmitted light passes through the light path delayer (3), is reflected by the reflector A (4), is focused by the beam expanding collimation focusing lens group B (7), and then irradiates the surface of the sample to be measured;
two beams of laser double pulses irradiate on the surface of a sample to be detected to generate plasma, light emitted by the plasma is collected by a collecting lens (8) and transmitted to a spectrometer (10) through an optical fiber (9), and the spectrometer (10) is connected with a computer (11) and can analyze the collected spectrum;
the computer (11) controls the displacement table (12) to move the sample (13) to be measured to a specified position.
2. The optical-path time-delay double-pulse LIBS device according to claim 1, wherein: the spectroscope (2) adopts the spectroscopes with different transmissivity and reflectivity to change the proportion of the double-pulse LIBS light beam energy.
3. The optical delay double-pulse LIBS device according to claim 1, wherein the optical delay device (3) can control the delay time by adjusting the internal structure of the delay optical path, changing the optical length, and adjusting the time of the laser passing through the optical delay device.
4. The optical-path time-delay double-pulse LIBS device according to claim 1, wherein the spectrometer is provided with an external trigger module and a time delay module, and is connected with the laser device, so that the delay time between laser generation and spectrum collection can be adjusted, and the signal-to-noise ratio of the collected spectrum can be optimized.
5. The optical-path-delay double-pulse LIBS device as claimed in claim 1, wherein four modes of an orthogonal reheating type double-pulse LIBS mode, an orthogonal pre-ablation type double-pulse LIBS mode, a collinear double-pulse LIBS mode and a crossed type double-pulse LIBS mode are realized by adjusting the incidence angles of two beams of laser incident on a sample (13) to be measured and the arrangement position of the optical-path delay device.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911030570.4A CN110632038A (en) | 2019-10-28 | 2019-10-28 | Light path time-delay double-pulse LIBS device |
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| CN201911030570.4A CN110632038A (en) | 2019-10-28 | 2019-10-28 | Light path time-delay double-pulse LIBS device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111912836A (en) * | 2020-08-31 | 2020-11-10 | 中北大学 | Coaxial annular double-pulse LIBS system |
| CN112213297A (en) * | 2020-10-10 | 2021-01-12 | 中北大学南通智能光机电研究院 | Paraxial double-pulse LIBS system based on annular light beam |
| CN113848200A (en) * | 2021-10-08 | 2021-12-28 | 重庆建安仪器有限责任公司 | Double-pulse LIBS walking platform measuring method |
Citations (5)
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| CN203385665U (en) * | 2013-06-21 | 2014-01-08 | 中国科学院上海技术物理研究所 | Laser-induced breakdown spectroscopy (LIBS) detection system based on double pulse defocusing pre-ablating |
| CN103529000A (en) * | 2013-10-17 | 2014-01-22 | 中国科学院西安光学精密机械研究所 | Single-light-source dual-wavelength LIBS (laser-induced breakdown spectroscopy) measurement device and method |
| CN104181146A (en) * | 2013-05-22 | 2014-12-03 | 中国科学院光电研究院 | Multipulse laser-induced breakdown spectrum on-line detection system |
| CN204989016U (en) * | 2015-06-26 | 2016-01-20 | 浙江师范大学 | Utilize separate unit pulse YAG laser instrument to realize induced spectral detection's of puncture of two pulsed laser of dual wavelength device |
| CN211179532U (en) * | 2019-10-28 | 2020-08-04 | 中国科学院上海光学精密机械研究所 | Light path delay double-pulse L IBS device |
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2019
- 2019-10-28 CN CN201911030570.4A patent/CN110632038A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104181146A (en) * | 2013-05-22 | 2014-12-03 | 中国科学院光电研究院 | Multipulse laser-induced breakdown spectrum on-line detection system |
| CN203385665U (en) * | 2013-06-21 | 2014-01-08 | 中国科学院上海技术物理研究所 | Laser-induced breakdown spectroscopy (LIBS) detection system based on double pulse defocusing pre-ablating |
| CN103529000A (en) * | 2013-10-17 | 2014-01-22 | 中国科学院西安光学精密机械研究所 | Single-light-source dual-wavelength LIBS (laser-induced breakdown spectroscopy) measurement device and method |
| CN204989016U (en) * | 2015-06-26 | 2016-01-20 | 浙江师范大学 | Utilize separate unit pulse YAG laser instrument to realize induced spectral detection's of puncture of two pulsed laser of dual wavelength device |
| CN211179532U (en) * | 2019-10-28 | 2020-08-04 | 中国科学院上海光学精密机械研究所 | Light path delay double-pulse L IBS device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111912836A (en) * | 2020-08-31 | 2020-11-10 | 中北大学 | Coaxial annular double-pulse LIBS system |
| CN111912836B (en) * | 2020-08-31 | 2023-06-20 | 中北大学 | Coaxial annular double-pulse LIBS system |
| CN112213297A (en) * | 2020-10-10 | 2021-01-12 | 中北大学南通智能光机电研究院 | Paraxial double-pulse LIBS system based on annular light beam |
| CN113848200A (en) * | 2021-10-08 | 2021-12-28 | 重庆建安仪器有限责任公司 | Double-pulse LIBS walking platform measuring method |
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