CN201464039U - Miniature cylindrical mirror multi-grating spectrum analysis instrument - Google Patents
Miniature cylindrical mirror multi-grating spectrum analysis instrument Download PDFInfo
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- CN201464039U CN201464039U CN2009200692863U CN200920069286U CN201464039U CN 201464039 U CN201464039 U CN 201464039U CN 2009200692863 U CN2009200692863 U CN 2009200692863U CN 200920069286 U CN200920069286 U CN 200920069286U CN 201464039 U CN201464039 U CN 201464039U
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Abstract
The utility model discloses a miniature cylindrical mirror multi-grating spectrum analysis instrument which is characterized in that the main structure thereof comprises a slit S1, a plane mirror M1, and a spherical reflection mirror M2, a combined grating Gx, a cylindrical reflection mirror Mx3, a detector Dx and the like, wherein the combined grating Gx consists of a plurality of gratings; the Mx3 is a cylindrical reflection optical mirror; the Dx is an area array detector; the gratings are fixed; and normal directions of sub grating surfaces are arranged in a combined manner according to a corresponding connection sequence of sub spectrum areas. The miniature cylindrical mirror multi-grating spectrum analysis instrument solves the problems that in the prior art, the pixel dimension and the number of the detectors are restricted, and the spectrum coverage width and resolution ratio are difficult to be considered, adopts the combined grating formed by a plurality of sub gratings and the area array detector and a detector system and has no mechanical displacement of any optical parts, thus being capable of realizing the fast detection and analysis of full spectrum, and having very high spectrum resolution ratio and working reliability.
Description
Technical field
The utility model relates to a kind of optical electron device, is specially integrated small-sized many grating spectrums of the cylindrical mirror analyser of a kind of cylindrical mirror and many gratings.
Background technology
Can the monochromator that photon energy and wavelength carry out high accuracy analysis be had a wide range of applications at optics and optoelectronic areas, be the core optical device of multispectral analysis instruments such as modern Raman and fluorescence spectrum, light absorption, light reflectance spectrum, infrared remote sensing, optical communication spectrum, biochip spectrum; Wherein, most widely used is to work in the grating type monochromator of near ultraviolet to the near-infrared region, optical grating construction is generally having and is carved with many equally spaced grooves on the optical substrate of certain size, as 600 every millimeter or 1200 every millimeter etc., actual striped number depends on concrete operation wavelength district and designing requirement, light wave incides the amplitude and the phase place that will cause different wave length on the grating and superposes, make the photon after the reflection do to arrange regularly by energy or wavelength in the space, its relational expression is:
dsinθ
m＝mλ+g
o (1)
D is the separation of grating in the formula, θ
mThe wavelength that is the m level be the photon of λ at the spatial distributions angle, g
oBe the constant relevant with the structure of optical system, therefore for the first-order diffraction light of m=1, can on position, different θ angle, detect the photon of respective wavelength, in the design of traditional raster monochromator, the incident of photon and exit slit invariant position adopt a mechanical driving device, and rotate at the θ angle of control grating, wavelength is scanned, just can from exit slit, obtain needed monochromaticity photon; Therefore, the traditional raster monochromator need possess following control function:
1. machinery control grating rotates, and realizes length scanning;
2. displacement grating, spectrum workspace at broad, only just has the highest diffraction efficiency at specific wavelength position diffraction grating, for obtaining best signal to noise ratio (S/N ratio) quality, need usually to change grating, for example by operation wavelength, use maximum 200-1100nm wavelength coverages at present, at least need 2 blocks of gratings, even three blocks of gratings, could satisfy the requirement of high precision spectral analysis;
3. displacement color filter, by formula (1) as can be known, though wavelength difference, but the diffraction light of m=1 and m=2 (or more high order) can occur at identical θ angle, therefore, in actual applications, need to use one or more color filter, with high order (m 〉=2) diffraction light elimination, could satisfy the requirement of detected photon monochromaticity.
In present most of commodity monochromator structures, above-mentioned three control function (raster scanning, displacement grating, displacement color filter) are all undertaken by mechanical transmission structure independently; Design and structural complexity that this has increased instrument have on the one hand reduced reliability, bring many inconveniences to use on the other hand, very time-consuming and trouble; For efficient and the precision that improves length scanning, detectors such as planar array type CCD and CMOS have been widely used in the grating type monochromator, owing to the optical grating diffraction subtended angle structure that is subjected to being determined and the restriction of detector size by formula (1), even adopt the planar array type detector, because of its in one dimension direction limited pixel and size, still be difficult to be implemented in and carry out in the spectral range of broad that high-precision all-wave is long to cover scanning with a grating; Therefore, in present most of commodity CCD grating monochromators, still need to adopt polylith grating and color filter, can realize high-quality and high-precision length scanning, its optical texture comprises: light source, grating G
x, spherical mirror M
x, detector D
x, grating G
xBe that one or more grating forms, adopt and manually or automatically waits mechanical transmission mechanism to control, by the diffraction light of grating outgoing through single spherical reflector M
x, focus on the imaging surface of planar array type detector and form spectrum, realize branch wavelength domain scanning and measurement to wavelength, owing to still need to use mechanical driving device, weakened the advantage that adopts the planar array type detector to a certain extent, limited spectral measurement speed.
The utility model content
Be difficult to make the miniaturization spectrometer to have wide spectrum workspace and high-resolution deficiency simultaneously in order to overcome existing monochromatic light gate device, the utility model provides a kind of any mechanical transmission mechanism that need not, small-sized many grating spectrums of cylindrical mirror analyser that system works is reliable, the life-span is long, this spectrometer not only has wide spectrum workspace and high resolving power, and volume is little, weigh light, easy to operate, can apply in a flexible way under various environment occasions.
It is as follows that the utility model solves the technical scheme that problems of the prior art adopted:
Small-sized many grating spectrums of cylindrical mirror analyser, primary structure is by slit S1, level crossing M1, spherical reflector M2, combination grating Gx, cylindrical mirror Mx3, detector Dx forms, Gx is made up of the polylith grating, Mx3 is a cylinder catoptrics mirror, Dx is a planar array detector, grating is fixed, the order that the normal direction of each sub-gratings face connects by corresponding each sub-spectral region is made combined type and is arranged, be provided with width between light source and the combination grating Gx and be 20 microns slit S1, the centre also is provided with level crossing M1 and spherical reflector M2, make light source through S1, M1 is to M2, and the M2 emergent light is a directional light; By the diffraction light with different wave length of different grating outgoing by cylindrical mirror M
xFocus on, be imaged on corresponding planar array detector D with different Diffractive Grating Spectrum district
xZones of different on, thereby realize the quick high-resolution imaging of wavelength at full spectral region, can remove the needs that mechanical rotation grating and limit switch are set from, thereby the design and the structure of instrument have extremely been simplified, the reliable long-term working and the life-span of system have been increased, the speed of its full spectroscopic data check and analysis only depends on the time of response time of face battle array photodetector and subsequent data transmissions, processing, and the resolution of simultaneously full spectral region can be better than 0.3nm.
Optical principle of the present utility model is as described below:
When incident beam is not a vertical incidence during to grating planar, grating equation is
I is an incident angle in the formula,
Be angle of diffraction; "+" number expression incident light and diffraction light are positioned at the normal homonymy, and "-" number expression incident light and diffraction light are positioned at the normal heteropleural, and in this structural design, incident light and diffraction light are positioned at the normal homonymy; Grating equation of the present utility model is:
Can get
α is a fixed angle in the formula, λ
nBe the centre wavelength of wavelength coverage that every block of grating covers, d is the separation of every block of grating, for first-order diffraction light m=1, can calculate the corresponding respectively angle of diffraction of every block of grating under the known situation of α, λ and d
Then according to the angle of diffraction that calculates
Determine the normal direction of every block of grating and carry out structural design and installation, determine that planar array detector Dx pixel plane is positioned on the focus of level crossing M1, through such design and installation, can guarantee that light path through every optical grating diffraction is incident on cylindrical focusing camera lens Mx3 with identical subtended angle and is imaged on the planar array detector Dx.
In the design of the present utility model, focal length is the cylindrical mirror Mx3 of f1, answers with n sub-grating pair, and the number n of sub-gratings depends on the total spectral region λ and the width Delta λ of sub-wavelength zone
n, that is: n=λ/Δ λ
n, establish n=5, according to the characteristics of detector, the operation wavelength district of design is 300-1000nm, so Δ λ=λ
f-λ
i=1000nm-300nm=700nm, the spectral discrimination of will working entirely is 5 subareas, Δ λ
1=Δ λ
2=Δ λ
3=Δ λ
4=Δ λ
5=700/5=140nm, adopt the CCD planar array detector of 512 * 512 pixels, therefore attainable limiting resolution is: 140nm/512 (pixel)=0.27nm, incident light is through 5 optical grating diffractions, with plane of incidence vertical direction, can form 5 end to end wavelength zones of sub-wavelength, constitute to cover the full wavelength zone of 300nm to 1000nm wavelength, these 5 monochromatic collimated beams with identical outgoing subtended angle are the cylindrical mirror M of 50mm through focal length
X3Directions X along the wavelength diffraction is assembled, and light spectrum image-forming is being placed the planar array detector D of reflector focal point
xPixel plane on.
The utility model is owing to the mechanical shift of no any optics in full spectral measurement, can realize the high speed and the high resolving power measurement of spectrum, spectral detection speed only is subjected to the restriction of planar array detector response speed and subsequent data transmissions and processing speed, full spectral measurement speed with 12-16bit Data Dynamic scope can be faster than 0.01 second, when realizing full spectrum fast detecting, spectral resolution is subjected to detector pixel density, the restriction of the focal length and the wavelength number of partitions, the highest resolution of spectrum can be better than 0.3nm.
Owing to adopted above technical scheme, the utlity model has following beneficial effect:
1. adopt optical fiber coupling and the combination of many gratings (5 gratings or the combination of more on demand gratings) technology, adopt two-dimensional CCD (or CMOS) array detection device, be implemented in two-dimensional array detector focal plane polishing wax and divide picture and integrated into, in the 300-1000nm wide spectral range, do not have any mechanical shift parts, produce the spectrum dynamic resolution characteristic that is better than 0.3nm and 12bits.
2. instrument has remarkable advantages such as pocket, high-speed data acquisition, wide spectral range, high resolving power.
3. the spectral resolution height is highly sensitive, and pocket volume is little, the reliability height, and the life-span is long, is better than the index of international similar commercial apparatus, the original innovation characteristics and the advance that possess skills.
Description of drawings
Fig. 1 is an optical schematic diagram of the present utility model;
Fig. 2 is the plan structure synoptic diagram of the utility model embodiment.
Angle MON is 2 α among Fig. 1, and angle PON is
M
2Be spherical reflector, G
xBe combination grating, M
X3Be cylindrical mirror, D
xBe planar array detector.
Among Fig. 2: 1, entrance slit S
1, 2, plane mirror M
1, 3, spherical reflector M
2, 4, cylindrical mirror M
X3, 5, multispectral color filter, 6, combination grating G
x, 7, planar array detector D
x
Embodiment
Design is further described to the utility model below in conjunction with drawings and Examples:
With reference to accompanying drawing 1, the light that goes out from light emitted is through slit S
1Incide spherical mirror M
2, be directional light after reflection, this directional light incides combination grating G
xProduce diffraction light, OP is the normal direction (different grating normal direction difference) of certain grating, M
X3Be cylindrical mirror, by M
2, M
X3With combination grating G
xThe angle MON that constitutes
Be 2 α, grating diffration angle PON is
Diffraction monochromatic light is through M
X3After the cylindrical mirror reflection, focus on D
xOn the pixel imaging surface of area array CCD detector.
With reference to accompanying drawing 2, small-sized many grating spectrums of cylindrical mirror analyser, its structure comprises: light source, slit S
11, level crossing M
12, spherical reflector M
23, combination grating G
x6, cylindrical mirror M
X34, planar array detector D
x7, multispectral optical filter 5; Light source is that 0.22 high purity quartz optical fiber imports to entrance slit S through a numerical aperture
11, this optical fiber has the effect that converges light source increase light intensity, entrance slit S
11 width is 20 microns, from the light of slit outgoing via plane mirror M
12 and focal length be f
2The spherical reflector M of=50mm
2Reflection makes light source through S
1, M
1To M
2The light of back outgoing is directional light, and this directional light incides combination grating G
x6, wherein, combination grating G
xForm by 5 blocks of gratings, the separation of every block of grating is 833nm, these 5 blocks of gratings are respectively by 5 wavelength zone Δ λ 1, Δ λ 2 ... Δ λ 5 arranges along the y direction perpendicular to the plane of incidence, by formula (3) and (4), every block of grating (being the x direction) in the plane of incidence has identical diffraction subtended angle scope, every sub-gratings is of a size of 2 * 10mm, the diffraction area of the integrated grating of combination is 10 * 10mm, the order that the normal direction of each sub-gratings face connects by corresponding each sub-spectral region is made combined type and is arranged, and inciding focal length from the different wave length that makes up the grating outgoing is f
3The cylindrical mirror M of=50mm
X3, make from grating G
xThe monochromatic light that each sub-gratings diffraction of group goes out focuses on two-dimensional array detector focal plane along the x direction of spectral distribution, and at y direction keeping parallelism; Therefore, the y direction can be divided into 5 light spectrum image-forming districts in upper edge, two-dimensional array detector focal plane, and is corresponding with 5 sub-grating diffration spectral region, is respectively 300-440nm, 440-580nm, 580-720nm, 720-860nm, 860-1000nm; Two-dimensional array detector D
xBeing the CCD photoelectric device, is 512 * 512 pixels, and each pixel must be of a size of 25 * 25 microns, and the imaging focal plane is of a size of 12.8 * 12.8mm, and the imaging detection focal plane of planar array type detector places cylindrical mirror M
X3Focus on, therefore, by the sub-spectral region diffraction light with different wave length of different grating outgoing by cylinder light spectrum image-forming mirror M
X3Reflection, parallel along the y direction, along the x direction focusing, be imaged on two-dimensional array detector D
xOn, form different spectral region, because through cylinder light spectrum image-forming mirror M
X3The diffraction light of reflection is parallel along the y direction, at two-dimensional array detector D
xOn each sub-spectral region corresponding with the diffraction spectrum district of each sub-gratings respectively, be 2mm at the width of each sub-spectral region of y direction, 5 synthetic total spectral region width of sub-spectral region are 2mm * 5=10mm.
In addition, at combination grating G
xEach sub-gratings before corresponding multispectral color filter A is set, with the high order diffraction light elimination of m 〉=2, at two-dimensional array detector D
xEach sub-spectral region collect photosignal by each wavelength of different pixel representatives after, by software analysis and calibration, the wavelength of 5 sub-spectral region is joined end to end, form the complete spectrum signal of 300-1000nm spectral region.
The typical overall dimensions of the miniaturization spectrometer of the utility model design are 90mm * 70mm * 51mm (length * wide * height), portably use conveniently, can be science and actual being applicable of industrial circle acquisition such as sun power, biomedicine, environment, photoelectrons; Owing to adopted cylindrical mirror and 5 grating partitioned organizations, on the two-dimensional array detector, carry out the spectrum subregion, in having very undersized spectrometer design, there are not any mechanical shift parts, can realize＞2500 pixels and the wide spectrum workspace that is better than the spectrally resolved and 300-1000nm of 0.3nm, can satisfy the demand of many applications for the high-accuracy portable spectral analysis, this is the remarkable advantage of spectrometer design of the present invention.
It should be noted that at last: above embodiment only in order to the explanation the utility model and and the described technical scheme of unrestricted the utility model; Therefore, although this instructions has been described in detail the utility model with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the utility model; And all do not break away from the technical scheme and the improvement thereof of spirit and scope of the present utility model, and it all should be encompassed in the claim scope of the present utility model.
Claims (5)
1. small-sized many grating spectrums of cylindrical mirror analyser is characterized in that primary structure is by slit S
1, level crossing M
1, spherical reflector M
2, combination grating G
x, cylindrical mirror M
X3, detector D
xForm G
xForm M by the polylith grating
X3Be cylinder catoptrics mirror, D
xBe planar array detector, grating is fixed, and the order that the normal direction of each sub-gratings face connects by corresponding each sub-spectral region is made combined type and arranged.
2. small-sized cylindrical mirror multiple grating spectrograph imaging device according to claim 1 is characterized in that: combination grating G
xThe sub-gratings number be that n is by the total spectral region λ and the width Delta λ of sub-wavelength zone
n, that is: n=λ/Δ λ
n
3. small-sized cylindrical mirror multiple grating spectrograph imaging device according to claim 1 is characterized in that: focal length is the cylindrical mirror M of f1
X3, answer with n sub-grating pair.
4. small-sized cylindrical mirror multiple grating spectrograph imaging device according to claim 1 is characterized in that: planar array detector D
xPixel plane is positioned at M
1Focus on.
5. small-sized cylindrical mirror multiple grating spectrograph imaging device according to claim 1 is characterized in that: light source and combination grating G
xBetween to be provided with width be 20 microns slit S
1, to inject for light source, the centre also is provided with level crossing M
1With spherical reflector M
2, make light source through S
1, M
1To M
2, M
2Emergent light is a directional light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200692863U CN201464039U (en) | 2009-03-24 | 2009-03-24 | Miniature cylindrical mirror multi-grating spectrum analysis instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200692863U CN201464039U (en) | 2009-03-24 | 2009-03-24 | Miniature cylindrical mirror multi-grating spectrum analysis instrument |
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| Publication Number | Publication Date |
|---|---|
| CN201464039U true CN201464039U (en) | 2010-05-12 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183304A (en) * | 2011-01-21 | 2011-09-14 | 北京理工大学 | Optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer |
| CN102738039A (en) * | 2011-03-30 | 2012-10-17 | 东京毅力科创株式会社 | Measuring apparatus and plasma processing apparatus |
| CN103630238A (en) * | 2013-11-22 | 2014-03-12 | 中国科学院南京地理与湖泊研究所 | Spectrum collecting system for water surface imaging of shallow lake and synchronous automatic monitoring method |
| CN103930754A (en) * | 2011-06-24 | 2014-07-16 | 龙卷风医疗系统有限公司 | Spectrograph with anamorphic beam expansion |
| CN104330161A (en) * | 2014-11-05 | 2015-02-04 | 中国科学院长春光学精密机械与物理研究所 | Cylindrical lens based Wadsworth grating imaging spectrometer |
| CN105758521A (en) * | 2015-10-14 | 2016-07-13 | 北京信息科技大学 | Fiber grating demodulation system and method using micro grating to improve spectral resolution |
| CN102183304B (en) * | 2011-01-21 | 2016-12-14 | 北京理工大学 | A kind of optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer |
| CN109580581A (en) * | 2018-12-12 | 2019-04-05 | 哈尔滨工业大学（威海） | A kind of laser Raman spectrometer based on composite grating |
| CN110926612A (en) * | 2019-12-18 | 2020-03-27 | 复旦大学 | Multi-channel broadband high-resolution spectrometer |
| CN111158158A (en) * | 2018-11-08 | 2020-05-15 | 三星电子株式会社 | Spectrometer optical system and semiconductor inspection device |
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- 2009-03-24 CN CN2009200692863U patent/CN201464039U/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102183304B (en) * | 2011-01-21 | 2016-12-14 | 北京理工大学 | A kind of optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer |
| CN102183304A (en) * | 2011-01-21 | 2011-09-14 | 北京理工大学 | Optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer |
| CN102738039B (en) * | 2011-03-30 | 2015-01-21 | 东京毅力科创株式会社 | Measuring apparatus and plasma processing apparatus |
| CN102738039A (en) * | 2011-03-30 | 2012-10-17 | 东京毅力科创株式会社 | Measuring apparatus and plasma processing apparatus |
| CN103930754A (en) * | 2011-06-24 | 2014-07-16 | 龙卷风医疗系统有限公司 | Spectrograph with anamorphic beam expansion |
| CN103930754B (en) * | 2011-06-24 | 2016-11-02 | 龙卷风光谱系统有限公司 | There is the spectrogrph of distortion beam expansion |
| CN103630238B (en) * | 2013-11-22 | 2016-01-13 | 中国科学院南京地理与湖泊研究所 | A kind of shallow lake water surface imaging spectral acquisition system and synchronous automatic monitoring method |
| CN103630238A (en) * | 2013-11-22 | 2014-03-12 | 中国科学院南京地理与湖泊研究所 | Spectrum collecting system for water surface imaging of shallow lake and synchronous automatic monitoring method |
| CN104330161A (en) * | 2014-11-05 | 2015-02-04 | 中国科学院长春光学精密机械与物理研究所 | Cylindrical lens based Wadsworth grating imaging spectrometer |
| CN105758521A (en) * | 2015-10-14 | 2016-07-13 | 北京信息科技大学 | Fiber grating demodulation system and method using micro grating to improve spectral resolution |
| CN111158158A (en) * | 2018-11-08 | 2020-05-15 | 三星电子株式会社 | Spectrometer optical system and semiconductor inspection device |
| CN111158158B (en) * | 2018-11-08 | 2023-04-25 | 三星电子株式会社 | Spectrometer optical system and semiconductor inspection device |
| CN109580581A (en) * | 2018-12-12 | 2019-04-05 | 哈尔滨工业大学（威海） | A kind of laser Raman spectrometer based on composite grating |
| CN110926612A (en) * | 2019-12-18 | 2020-03-27 | 复旦大学 | Multi-channel broadband high-resolution spectrometer |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100512 Termination date: 20140324 |