KR102073186B1 - Optical system of super spectroscopic decomposer with multi-layer diffraction grating structure - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical system of a hyperspectral decomposer having a multilayer diffraction grating structure. Or a first reflection diffraction grating and a second transmission diffraction grating in two stages, or a first transmission diffraction grating and a second reflection rotation grating in two stages, or a first reflection diffraction grating And a second reflective diffraction grating in two stages, the optical system of a hyperspectral decomposer having a multilayer diffraction grating structure, which makes it possible to measure a broad spectrum.

Description

OPTICAL SYSTEM OF SUPER SPECTROSCOPIC DECOMPOSER WITH MULTI-LAYER DIFFRACTION GRATING STRUCTURE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical system of a hyperspectral decomposer having a multilayer diffraction grating structure. Or the first reflective diffraction grating and the second transmission diffraction grating in two stages, or the first transmission diffraction grating and the second reflective diffraction grating in two stages, or the first reflective diffraction grating And a second reflective diffraction grating in two stages, the optical system of a hyperspectral decomposer having a multilayer diffraction grating structure, which makes it possible to measure a broad spectrum.

In general, an image spectroscopic analyzer refers to a device capable of acquiring three-dimensional data by simultaneously acquiring image information of a two-dimensional space and wavelength information of each pixel, and among them, an image spectroscopic analyzer having a wavelength resolution of 10 nm or less It is called (Hyperspectral Imaging System). It is an electro-optical sensor that spectroscopically measures incident light and measures the spectrum of each pixel in an image. It is a device that analyzes the unique optical properties and absorption and reflection characteristics of materials.

Korean Journal of Military Science and Technology Vol. 13, No. 2, pp. 328-335, April 2010 (hereinafter referred to as Non-Patent Document 1) discloses optical system design and image processing of a hyperspectral decomposer.

1 is a view showing an optical system of a push-broom hyperspectral decomposer that obtains one-dimensional spatial information and one-dimensional wavelength information and scans in a direction perpendicular to the one-dimensional spatial information to obtain the remaining spatial information. A scanning unit (1) for acquiring additional one-dimensional spatial information at the front, a general optical unit (2) and a slit (3) for acquiring the one-dimensional spatial information acquired by the scanning unit (1) at a desired position, Measuring the collimation part 4 to make the one-dimensional spatial information obtained at the position into parallel light, the dispersing element 5 to disperse the light, the condenser 6 collecting the scattered light and the image information of the collected light The image sensor 7 is included.

However, such non-patent document 1 has a limited range (wavelength range) of the light source diffracted by one diffraction grating when the diffraction angle is set to 5 ° to 60 ° with respect to the light source passing through the minimum slit, and the optical system In this case, since the measurement cannot be performed at a time over a large area from the visible light region to the infrared region, there is a problem that only two or three consecutive optical systems of different wavelength ranges can be measured.

Accordingly, the present invention has been made to solve the above problems, and an object of the present invention is to provide a multispectral splitter structure having a multi-layer diffraction grating structure capable of measuring a broad spectrum using a plurality of sensors with one light source. An optical system is provided.

In order to achieve the above object, an optical system of a hyperspectral decomposer having a multi-layer diffraction grating structure according to an embodiment of the present invention comprises a scanning unit configured to obtain one-dimensional spatial information; A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position; A collimator configured to make parallel light into one-dimensional spatial information obtained from the first optical part and the slit; A first transmission diffraction grating configured to diffract and disperse while transmitting parallel light produced by the collimator; A second transmission diffraction grating disposed in parallel with the first transmission diffraction grating to diffract and disperse while transmitting the light transmitted through the first transmission diffraction grating; First and second light collecting parts configured to collect light scattered from each of the first and second transmission diffraction gratings; And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units, wherein the first and second transmission diffraction gratings have different grating sizes. .

In order to achieve the above object, an optical system of a hyperspectral decomposer having a multilayer diffraction grating structure according to another embodiment of the present invention includes a scan unit configured to obtain one-dimensional spatial information; A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position; A collimator configured to make parallel light into one-dimensional spatial information obtained from the first optical part and the slit; A first reflective diffraction grating configured to diffract and disperse while reflecting parallel light produced by the collimator; A second transmission diffraction grating disposed in parallel with the first reflection diffraction grating to diffract and disperse while transmitting the light reflected by the first reflection diffraction grating; First and second light collecting parts configured to collect light scattered from each of the first reflective diffraction grating and the second transmission diffraction grating; And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units, wherein the first reflective diffraction grating and the second transmission diffraction grating have different grating sizes. Characterized in having a.

In order to achieve the above object, an optical system of a hyperspectral decomposer having a multi-layer diffraction grating structure according to another embodiment of the present invention includes a scan unit configured to obtain one-dimensional spatial information; A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position; A collimator configured to make parallel light into one-dimensional spatial information obtained from the first optical part and the slit; A first transmission diffraction grating configured to diffract and disperse while transmitting parallel light produced by the collimator; A second reflective diffraction grating arranged in parallel with the first transmission diffraction grating to diffract and disperse while reflecting light transmitted from the first transmission diffraction grating; First and second light collecting parts configured to collect light scattered from each of the first transmission diffraction grating and the second reflection diffraction grating; And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units, wherein the first transmission diffraction grating and the second reflection diffraction grating have different grating sizes. Characterized in having a.

In order to achieve the above object, an optical system of a hyperspectral decomposer having a multi-layer diffraction grating structure according to another embodiment of the present invention includes a scan unit configured to obtain one-dimensional spatial information; A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position; A collimator configured to make parallel light into one-dimensional spatial information obtained from the first optical part and the slit; A first reflective diffraction grating configured to diffract and disperse while reflecting parallel light produced by the collimator; A second reflective diffraction grating disposed in parallel with the first reflective diffraction grating to diffract and diffuse light reflected by the first reflective diffraction grating; First and second light collecting parts configured to collect light scattered from each of the first and second reflective diffraction gratings; And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units, wherein the first and second reflective diffraction gratings have different grating sizes. do.

According to an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to embodiments of the present invention, there is provided an optical system comprising: a scan unit configured to obtain one-dimensional spatial information; A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position; A collimator configured to make parallel light into one-dimensional spatial information obtained from the first optical part and the slit; Two diffraction gratings configured to diffract and disperse parallel light produced by the collimator in two stages; First and second light collecting parts configured to collect light scattered from each of the two diffraction gratings; And first and second image sensors configured to analyze image information of light emitted from each of the first and second condensers, wherein the two diffraction gratings are configured to have different grating sizes. In addition, there is an excellent effect that the spectrum of a wide area can be measured using a plurality of sensors with one light source.

1 is a view showing the structure of a conventional push-broom hyperspectral decomposer optical system.
2 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a first embodiment of the present invention.
3 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a second embodiment of the present invention.
4 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a third embodiment of the present invention.
FIG. 5 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a fourth embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

The optical system of the hyperspectral decomposer applied to the present invention includes a scanning unit for acquiring one-dimensional spatial information while scanning the subject on a vertical axis, and an all-optical optical unit for acquiring the one-dimensional spatial information obtained by the scanning unit at a desired position. And two slits, two diffraction gratings and two diffraction gratings, each diffraction grating configured to diffract and distribute the parallel light produced by the collimator in two stages. The light collecting unit for collecting the light scattered in the and includes an image sensor for measuring the image information of the light collected from the light collecting unit.

Embodiments to be described below are identical in configuration of the scan unit, the front optical unit, the slit and the collimator unit, and differ in the configuration of the diffraction grating, the light collecting unit, and the image sensor.

[First Embodiment]

2 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a first embodiment of the present invention.

According to the first embodiment of the present invention, an optical system of a hyperspectral decomposer having a multilayer diffraction grating structure includes, as shown in FIG. 2, a scan unit 10, a general optical unit 20, a slit 30, And a collimating part 40, a first transmission diffraction grating 51, a second transmission diffraction grating 52, first and second condensing parts 61 and 62, and first and second image sensors 71 and 72. .

The scan unit 10 acquires one-dimensional spatial information while scanning the vertical axis of the subject.

The first half optical unit 20 and the slit 30 serve to acquire the one-dimensional spatial information acquired by the scan unit 10 at a desired position.

The collimator 40 is a collimating lens that serves to receive 1D spatial information obtained from the first half optical unit 20 and the slit 30 into parallel light.

The first transmission diffraction grating 51 serves to diffract and disperse while transmitting the parallel light produced by the collimator 40.

The second transmission diffraction grating 52 is disposed in parallel with the first transmission diffraction grating 51 and serves to diffract and disperse while transmitting the light transmitted through the first transmission diffraction grating 51.

Since the second transmission diffraction grating 52 has a grating size different from that of the first transmission diffraction grating 51, the wavelength band of light dispersed by the first and second transmission diffraction gratings 51 and 52 is reduced. It is different.

The first and second light collecting parts 61 and 62 collect light scattered from each of the first and second transmission diffraction gratings 51 and 52 and transmit the collected light to the first and second image sensors 71 and 72. to be.

The first and second image sensors 71 and 72 serve to analyze image information of light emitted from each of the first and second light collecting units 61 and 62.

Hereinafter, the operation of the optical system of the hyperspectral decomposer having the multilayer diffraction grating structure according to the first embodiment of the present invention configured as described above will be described.

First, the scan unit 10 acquires one-dimensional spatial information while scanning the vertical axis of the subject.

The obtained one-dimensional spatial information is obtained at a desired position by the front optical unit 20 and the slit 40, and the obtained one-dimensional spatial information is made into parallel light by the collimating unit 40.

The parallel light generated by the collimator 40 is diffracted and dispersed while being transmitted by the first transmission diffraction grating 51, and a part of the light transmitted by the first transmission diffraction grating 51 is the second transmission diffraction grating 52. Is diffracted and dispersed as it is transmitted.

Light scattered from each of the first and second transmission diffraction gratings 51 and 52 is collected by the first and second light collecting parts 61 and 62, and the light that is collected by the first and second light collecting parts 61 and 62 is first made. Incident on the first and second image sensors 71 and 72, the image information of the light is analyzed.

Second Embodiment

3 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a second embodiment of the present invention.

According to a second embodiment of the present invention, an optical system of a hyperspectral splitter having a multilayer diffraction grating structure, as shown in FIG. 3, includes a scan unit 10, a general optical unit 20, a slit 30, The collimator 40 includes a collimating part 40, a first reflective diffraction grating 53, a second transmissive diffraction grating 54, first and second condensing parts 63 and 64, and first and second image sensors 73 and 74. do.

The scan unit 10 acquires one-dimensional spatial information while scanning the vertical axis of the subject.

The first half optical unit 20 and the slit 30 serve to acquire one-dimensional spatial information obtained by the scan unit 10 at a desired position.

The collimator 40 is a collimating lens that serves to receive 1D spatial information obtained from the first half optical unit 20 and the slit 30 into parallel light.

The first reflective diffraction grating 53 serves to diffract and disperse while reflecting parallel light produced by the collimator 40.

The second transmission diffraction grating 54 is disposed in parallel with the first reflection diffraction grating 53 and serves to diffract and disperse while transmitting the light reflected by the first reflection diffraction grating 53.

Since the second transmission diffraction grating 54 has a grating size different from the first reflection diffraction grating 53, the second transmission diffraction grating 53 has a different grating size. The wavelength bands are different.

The first and second light collecting parts 63 and 64 collect light scattered from each of the first reflective diffraction grating 53 and the second transmission diffraction grating 54, and transmit the light to the first and second image sensors 73 and 74. It is a condenser lens that plays a role.

The first and second image sensors 73 and 74 serve to analyze image information of light emitted from each of the first and second light collecting units 63 and 64.

Hereinafter, the operation of the optical system of the hyperspectral decomposer having the multilayer diffraction grating structure according to the second embodiment of the present invention configured as described above will be described.

First, the scan unit 10 acquires one-dimensional spatial information while scanning the vertical axis of the subject.

The obtained one-dimensional spatial information is obtained at a desired position by the front optical unit 20 and the slit 30, and the obtained one-dimensional spatial information is made into parallel light by the collimating unit 40.

The parallel light generated by the collimator 40 is diffracted and dispersed while being reflected by the first reflective diffraction grating 53, and a part of the light reflected by the first reflective diffraction grating 53 is the second transmission diffraction grating ( 54, diffracted and dispersed as transmitted.

Light dispersed in each of the first reflective diffraction grating 53 and the second transmission diffraction grating 54 is collected by the first and second light collecting parts 63 and 64, and the first and second light collecting parts 63 and 64. The light condensed at is incident on the first and second image sensors 73 and 74 to analyze image information of the light.

Third Embodiment

4 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a third embodiment of the present invention.

According to a third embodiment of the present invention, an optical system of a hyperspectral splitter having a multilayer diffraction grating structure includes, as shown in FIG. 4, a scan unit 10, a general optical unit 20, a slit 30, The collimator 40 includes a collimating part 40, a first transmission diffraction grating 55, a second reflection diffraction grating 56, first and second condensing parts 65 and 66, and first and second image sensors 75 and 76. do.

The scan unit 10 acquires one-dimensional space information for acquiring the one-dimensional space information while scanning the vertical axis of the subject.

The first half optical unit 20 and the slit 30 serve to acquire the one-dimensional spatial information acquired by the scan unit 10 at a desired position.

The collimator 40 is a collimating lens that serves to receive 1D spatial information obtained from the first half optical unit 20 and the slit 30 into parallel light.

The first transmission diffraction grating 55 serves to diffract and disperse while transmitting the parallel light produced by the collimator 40.

The second reflective diffraction grating 56 is disposed in parallel with the first transmission diffraction grating 55 and serves to diffract and disperse while reflecting the light transmitted from the first transmission diffraction grating 55.

Since the second reflective diffraction grating 56 has a grating size different from that of the first transmission diffraction grating 55, the second diffraction grating 55 and the second reflection diffraction grating 56 The wavelength bands are different.

The first and second light collecting parts 65 and 66 collect light scattered from each of the first transmission diffraction grating 55 and the second reflection diffraction grating 56 and transmit the light to the first and second image sensors 75 and 76. It is a condenser lens that plays a role.

The first and second image sensors 75 and 76 serve to analyze image information of light emitted from each of the first and second condensing parts 65 and 66.

Hereinafter, the operation of the optical system of the hyperspectral splitter having the multilayer diffraction grating structure according to the third embodiment of the present invention configured as described above will be described.

First, the scan unit 10 acquires one-dimensional spatial information while scanning the vertical axis of the subject.

The obtained one-dimensional spatial information is obtained by the front-end optical unit 20 and the slit 30 in one-dimensional spatial information, the obtained one-dimensional spatial information is made of parallel light by the collimating unit 40. .

The parallel light produced by the collimator 40 is diffracted and dispersed while being transmitted by the first transmission diffraction grating 55, and a part of the light transmitted by the first transmission diffraction grating 55 is partially reflected by the second reflection diffraction grating 56. Reflected and diffracted and dispersed.

Light dispersed in each of the first transmission diffraction grating 55 and the second reflection diffraction grating 56 is collected by the first and second light collecting parts 65 and 66, and the first and second light collecting parts 65 and 66. The light condensed at is incident on the first and second image sensors 75 and 76 to analyze image information of the light.

[Example 4]

FIG. 5 is a diagram showing the structure of an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to a fourth embodiment of the present invention.

According to a fourth embodiment of the present invention, an optical system of a hyperspectral splitter having a multilayer diffraction grating structure includes, as shown in FIG. 5, a scan unit 10, a general optical unit 20, a slit 30, The collimator 40, the first reflective diffraction grating 57, the second reflective diffraction grating 58, the first and second condensing parts 67 and 68 and the first and second image sensors 77 and 78 Include.

The scan unit 10 acquires one-dimensional space information for acquiring the one-dimensional space information while scanning the vertical axis of the subject.

The first half optical unit 20 and the slit 30 serve to acquire the one-dimensional spatial information acquired by the scan unit 10 at a desired position.

The collimator 40 is a collimating lens that serves to receive 1D spatial information obtained from the first half optical unit 20 and the slit 30 into parallel light.

The first reflective diffraction grating 57 serves to diffract and disperse while reflecting parallel light produced by the collimator 40.

The second reflective diffraction grating 58 is disposed in parallel with the first reflective diffraction grating 57 and serves to diffract and disperse while reflecting light reflected from the first reflective diffraction grating 57.

Since the second reflective diffraction grating 58 has a different grating size from the first reflective diffraction grating 57, it is dispersed by the first reflective diffraction grating 57 and the second reflective diffraction grating 58. The wavelength band of light is different.

The first and second light collecting parts 67 and 68 collect light scattered from each of the first reflective diffraction grating 57 and the second reflective diffraction grating 58 and transmit the light to the first and second image sensors 77 and 78. It is a condenser lens that plays a role.

The first and second image sensors 77 and 78 serve to analyze image information of light emitted from each of the first and second condensing parts 67 and 68.

Hereinafter, the operation of the optical system of the hyperspectral decomposer having the multilayer diffraction grating structure according to the fourth embodiment of the present invention configured as described above will be described.

First, the scan unit 10 acquires one-dimensional spatial information while scanning the vertical axis of the subject.

The obtained one-dimensional spatial information is obtained by the front-end optical unit 20 and the slit 30 in one-dimensional spatial information, the obtained one-dimensional spatial information is made of parallel light by the collimating unit 40. .

The parallel light produced by the collimator 40 is diffracted and dispersed while being reflected by the first reflective diffraction grating 57, and a part of the light reflected by the first reflective diffraction grating 57 is the second reflective diffraction grating. Reflected at 58, diffracted and dispersed.

Light dispersed in each of the first reflective diffraction grating 57 and the second reflective diffraction grating 58 is collected by the first and second light collecting parts 67 and 68, and the first and second light collecting parts 67 and 68. ), The light collected by the light incident light is incident on the first and second image sensors 77 and 78 to analyze image information of the light.

On the other hand, in the above description of the first to fourth embodiments, an example in which the transmission diffraction grating, the transmission diffraction grating, the reflection diffraction grating and the transmission diffraction grating, and the reflection diffraction grating and the reflection diffraction grating are selectively configured in two stages is described. Although heard, it can arrange | position in 3 or more steps, and is not specifically limited.

According to an optical system of a hyperspectral splitter having a multilayer diffraction grating structure according to the embodiments of the present invention, the scanning unit configured to obtain one-dimensional spatial information; A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position; A collimator configured to make parallel light into one-dimensional spatial information obtained from the first optical part and the slit; Two diffraction gratings configured to diffract and disperse parallel light produced by the collimator in two stages; First and second light collecting parts configured to collect light scattered from each of the two diffraction gratings; And first and second image sensors configured to analyze image information of light emitted from each of the first and second condensers, wherein the two diffraction gratings are configured to have different grating sizes. In one light source, a plurality of sensors can be used to measure a broad spectrum.

The drawings and the specification disclose the best embodiments, and specific terminology has been used, but it is used only for the purpose of describing embodiments of the invention and is intended to limit the meaning or limit the scope of the invention described in the claims. It is not. Therefore, it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

10: scan unit
20: first half optics
30: slit
40: collimator
51, 55: first transmission diffraction grating
52, 54: second transmission diffraction grating
53, 57: first reflective diffraction grating
56, 58: second reflective diffraction grating
61, 63, 65, 67: first condenser
62, 64, 66, 68: second condenser
71, 73, 75, 77: first image sensor
72, 74, 76, 78: second image sensor

Claims (4)

A scan unit configured to acquire one-dimensional spatial information;
A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position;
A collimator configured to make parallel light into one-dimensional spatial information obtained at a desired position in the first optical unit and the slit;
A first transmission diffraction grating configured to diffract and disperse while transmitting parallel light produced by the collimator;
A second transmission diffraction grating disposed in parallel with the first transmission diffraction grating to diffract and disperse while transmitting the light transmitted through the first transmission diffraction grating;
First and second light collecting parts configured to collect light scattered from each of the first and second transmission diffraction gratings; And
And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units.
And the first and second transmission diffraction gratings have different grating sizes, so that the wavelength bands of the scattered light are different from each other. A scan unit configured to acquire one-dimensional spatial information;
A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position;
A collimator configured to make parallel light into one-dimensional spatial information obtained at a desired position in the first optical unit and the slit;
A first reflective diffraction grating configured to diffract and disperse while reflecting parallel light produced by the collimator;
A second transmission diffraction grating disposed in parallel with the first reflection diffraction grating to diffract and disperse while transmitting the light reflected by the first reflection diffraction grating;
First and second light collecting parts configured to collect light scattered from each of the first reflective diffraction grating and the second transmission diffraction grating; And
And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units.
And the first reflective diffraction grating and the second transmission diffraction grating have different grating sizes, so that wavelength bands of scattered light are different from each other. A scan unit configured to acquire one-dimensional spatial information;
A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position;
A collimator configured to make parallel light into one-dimensional spatial information obtained at a desired position in the first optical unit and the slit;
A first transmission diffraction grating configured to diffract and disperse while transmitting parallel light produced by the collimator;
A second reflective diffraction grating arranged in parallel with the first transmission diffraction grating to diffract and disperse while reflecting light transmitted from the first transmission diffraction grating;
First and second light collecting parts configured to collect light scattered from each of the first transmission diffraction grating and the second reflection diffraction grating; And
And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units:
And the first transmission diffraction grating and the second reflection diffraction grating have different grating sizes, so that wavelength bands of scattered light are different from each other. A scan unit configured to acquire one-dimensional spatial information;
A general optical unit and a slit configured to acquire the one-dimensional spatial information obtained by the scanning unit at a desired position;
A collimator configured to make parallel light into one-dimensional spatial information obtained at a desired position in the first optical unit and the slit;
A first reflective diffraction grating configured to diffract and disperse while reflecting parallel light produced by the collimator;
A second reflective diffraction grating disposed in parallel with the first reflective diffraction grating to diffract and diffuse light reflected by the first reflective diffraction grating;
First and second light collecting parts configured to collect light scattered from each of the first and second reflective diffraction gratings; And
And first and second image sensors configured to analyze image information of light emitted from each of the first and second light collecting units:
And the first and second reflective diffraction gratings have different grating sizes, so that the wavelength bands of the scattered light are different from each other.

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