CN117097411A - Conjugated heterodyne balance detection chip and differential phase balance detection chip - Google Patents

Conjugated heterodyne balance detection chip and differential phase balance detection chip Download PDF

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CN117097411A
CN117097411A CN202311345664.7A CN202311345664A CN117097411A CN 117097411 A CN117097411 A CN 117097411A CN 202311345664 A CN202311345664 A CN 202311345664A CN 117097411 A CN117097411 A CN 117097411A
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waveguide
beam splitter
photodiode
heterodyne
conjugate
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CN117097411B (en
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赵义博
王东
陈东升
丁瑶
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Beijing Zhongkeguoguang Quantum Technology Co ltd
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/60Receivers
    • H04B10/61Coherent receivers
    • H04B10/64Heterodyne, i.e. coherent receivers where, after the opto-electronic conversion, an electrical signal at an intermediate frequency [IF] is obtained
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/486Receivers
    • G01S7/4861Circuits for detection, sampling, integration or read-out
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4913Circuits for detection, sampling, integration or read-out
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4295Coupling light guides with opto-electronic elements coupling with semiconductor devices activated by light through the light guide, e.g. thyristors, phototransistors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B10/00Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
    • H04B10/60Receivers
    • H04B10/61Coherent receivers
    • H04B10/616Details of the electronic signal processing in coherent optical receivers

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
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  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
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Abstract

The invention belongs to the technical field of secret communication, and discloses a conjugate heterodyne balance detection chip and a differential phase balance detection chip, wherein the conjugate heterodyne balance detection chip comprises a laser diode and a conjugate heterodyne frequency mixing detection module, the conjugate heterodyne frequency mixing detection module comprises four waveguide beam splitters and four photodiodes which are integrally connected through four waveguides, the lengths of the four waveguides meet a preset relation, and the differential phase balance detection chip comprises two conjugate heterodyne frequency mixing detection modules. Compared with the prior art, the balanced detection chip can avoid the problems of phase mutation and loss increase caused by waveguide intersection when the chip is integrated by arranging the position of the waveguide beam splitter and the length of the connecting waveguide. And the precise consistency of the waveguide length is not required, so that the chip manufacturing difficulty is reduced. In addition, two paths of output signals of the chip can be utilized for phase feedback compensation, so that the detection accuracy is improved.

Description

Conjugated heterodyne balance detection chip and differential phase balance detection chip
Technical Field
The invention relates to the technical field of secret communication, in particular to a conjugated heterodyne balance detection chip and a differential phase balance detection chip.
Background
The coherent detection phase has the advantages of high resolution, strong anti-interference capability, multichannel measurement, holographic imaging and the like in optical measurement, is an important optical measurement technology, and has wide application in the fields of optical communication, laser radar, optical sensing and the like. In the coherent detection technology, the two paths of interference signals are directly subtracted in the balanced detection, so that the direct current components of the two paths can be counteracted, the influence of signal fluctuation on a measurement result is eliminated, and the balanced detection method has extremely strong practicability.
In most balanced detection application scenarios, the X component and the P component of the signal to be detected need to be measured simultaneously, namely conjugated heterodyne detection is performed, the signal to be detected and the local oscillation light are divided into two paths, balanced detection is performed respectively, one path of local oscillation light needs to be modulated to have a relative phase of 90 degrees, and a 90-degree mixer is generally used for realizing mixing of the local oscillation light and the signal to be detected. Conventional 90 ° mixers, due to the crossed waveguide structure, introduce additional phases in the channels passing through the crossed waveguides, which in turn affect the subsequent interference process, resulting in reduced performance of the 90 ° optical mixer. In order to solve the problem, the present technical solution is to artificially add the cross waveguide at the place where the cross waveguide does not exist, and introduce the compensated phase, so as to ensure that the 90-degree optical mixer can work normally, as in patent CN109358396B. However, artificially added cross waveguides may cause optical power loss, and to some extent, a degradation of the performance of the 90 ° optical mixer. The patent CN115933169a eliminates the phase by a phase elimination method, avoids the introduction of additional cross waveguides, but requires to precisely calculate a plurality of parameters such as the bending radius and angle of the bending waveguide and the waveguide spacing of the coupler, and has very high requirements on manufacturing precision and great difficulty in realization.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a conjugated heterodyne balance detection chip and a differential phase balance detection chip.
The technical scheme of the invention is realized as follows:
a conjugated heterodyne balance detection chip, which comprises a laser diode LD, a conjugated heterodyne frequency mixing detection module, wherein the conjugated heterodyne frequency mixing detection module comprises a first waveguide beam splitter BS1, a second waveguide beam splitter BS2, a third waveguide beam splitter BS3, a fourth waveguide beam splitter BS4, a first waveguide L1, a second waveguide L2, a third waveguide L3, a fourth waveguide L4, a first photodiode PD1, a second photodiode PD2, a third photodiode PD3 and a fourth photodiode PD4,
the two output ports of the first waveguide beam splitter BS1 are correspondingly connected with one input port of the second waveguide beam splitter BS2 and one input port of the fourth waveguide beam splitter BS4 through a first waveguide L1 and a second waveguide L2 respectively; the length difference between the second waveguide L2 and the first waveguide L1 is
The two output ports of the third waveguide beam splitter BS3 are correspondingly connected with the other input port of the second waveguide beam splitter BS2 and the other input port of the fourth waveguide beam splitter BS4 through a third waveguide L3 and a fourth waveguide L4 respectively; the length difference between the fourth waveguide L4 and the third waveguide L3 is
And->Satisfy->,/>The wavelengths of the signal to be measured and the local oscillation light are respectively,the refractive indexes of the signal to be measured and the local oscillation light in the waveguide are respectively;
the first waveguide L1, the second waveguide L2, the third waveguide L3 and the fourth waveguide L4 have no cross;
the optical signal output by the laser diode LD is used as local oscillation light;
one input port of the first waveguide beam splitter BS1 is used as an input port of a signal to be measured;
an input port of the third waveguide beam splitter BS3 is used as a local oscillation light input port of the conjugate heterodyne mixing detection module and is connected with the laser diode LD;
two output ports of the second waveguide beam splitter BS2 are connected to the first photodiode PD1 and the second photodiode PD2, respectively; the subtraction of photocurrents of the first photodiode PD1 and the second photodiode PD2 generates a first differential current as a first output signal of the chip;
two output ports of the fourth waveguide beam splitter BS4 are connected to the third photodiode PD3 and the fourth photodiode PD4, respectively; the subtraction of the photocurrents of the third photodiode PD3 and the fourth photodiode PD4 generates a second differential current as a second output signal of the chip;
the splitting ratio of each waveguide beam splitter is 50:50.
preferably, the second waveguide L2 is further provided with an electrically controlled phase shifting module PS for implementing a 90 ° phase difference using a feedback algorithm.
Preferably, the feedback algorithm comprises the steps of:
s1: filtering the square sum signal of the first output signal and the second output signal to remove the direct current component;
s2: integrating the signals obtained in the step S1 and taking absolute values;
s3: adjusting the voltage of the electric control phase shifting module to enable the signal value obtained in the step S2 to be minimum;
s4: comparing absolute values of the first output signal and the second output signal, and stopping changing the voltage of the electric control phase shifting module if the absolute values are unequal, so as to finish the adjustment of the 90-degree phase difference; otherwise, continuing to adjust the voltage of the electric control phase shifting module.
Preferably, the first and third waveguides L1 and L3 are equal in length, and≠0。
preferably, the first waveguide beam splitter BS1 to the fourth waveguide beam splitter BS4 and the first waveguide L1 to the fourth waveguide L4 are integrated on the PLC waveguide.
Preferably, the laser diode LD is coupled to one input port of the waveguide splitter third waveguide splitter BS3 by lens alignment; the two output ports of the second waveguide beam splitter BS2 are coupled with the first photodiode PD1 and the second photodiode PD2 through lenses, respectively; the two output ports of the fourth waveguide splitter BS4 are coupled to the third photodiode PD3 and the fourth photodiode PD4, respectively, through lenses.
Preferably, the photodiodes are InGaAs PIN tubes.
Preferably, the temperature of the detection chip is controlled, and the temperature control precision is higher than 0.01 ℃.
The invention also discloses a differential phase balance detection chip, which comprises a laser diode LD, a fifth waveguide beam splitter BS5 and 2 conjugated heterodyne mixing detection modules,
the laser diode LD is connected with one input port of the fifth waveguide beam splitter BS 5;
two output ports of the fifth waveguide beam splitter BS5 are respectively connected with a local oscillation optical input port of a conjugate heterodyne mixing detection module;
the signal input ports to be detected of the 2 conjugated heterodyne mixing detection modules are respectively used for inputting two paths of signal light of differential phase signals.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a conjugate heterodyne balance detection chip and a differential phase balance detection chip, which can avoid the problems of phase mutation and loss increase caused by waveguide crossing during chip integration by arranging the position of a waveguide beam splitter and the length of a connecting waveguide. And the precise consistency of the waveguide length is not required, so that the chip manufacturing difficulty is reduced. In addition, two paths of output signals of the chip can be utilized for phase feedback compensation, so that the detection accuracy is improved.
Drawings
FIG. 1 is a schematic block diagram of a conjugated heterodyne balance detection chip of the present invention;
FIG. 2 is a schematic block diagram of a conjugated heterodyne balance detection chip according to an embodiment of the present invention;
FIG. 3 is a graph showing the phase change relationship of the feedback signal modulated by the electrically controlled phase shifter according to the present invention;
fig. 4 is a schematic block diagram of a conjugate heterodyne balance detection chip for differential phase measurement according to the present invention.
Detailed Description
The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the invention are shown.
As shown in fig. 1, a conjugate heterodyne balance detection chip comprises a laser diode LD, a conjugate heterodyne frequency mixing detection module, wherein the conjugate heterodyne frequency mixing detection module comprises a first waveguide beam splitter BS1, a second waveguide beam splitter BS2, a third waveguide beam splitter BS3, a fourth waveguide beam splitter BS4, a first waveguide L1, a second waveguide L2, a third waveguide L3, a fourth waveguide L4, a first photodiode PD1, a second photodiode PD2, a third photodiode PD3, a fourth photodiode PD4,
the two output ports of the first waveguide beam splitter BS1 are correspondingly connected with one input port of the second waveguide beam splitter BS2 and one input port of the fourth waveguide beam splitter BS4 through a first waveguide L1 and a second waveguide L2 respectively; the length difference between the second waveguide L2 and the first waveguide L1 is
The two output ports of the third waveguide beam splitter BS3 are correspondingly connected with the other input port of the second waveguide beam splitter BS2 and the other input port of the fourth waveguide beam splitter BS4 through a third waveguide L3 and a fourth waveguide L4 respectively; the length difference between the fourth waveguide L4 and the third waveguide L3 is
And->Satisfy->,/>The wavelengths of the signal to be measured and the local oscillation light are respectively,the refractive indexes of the signal to be measured and the local oscillation light in the waveguide are respectively;
the first waveguide L1, the second waveguide L2, the third waveguide L3 and the fourth waveguide L4 have no cross;
the optical signal output by the laser diode LD is used as local oscillation light;
one input port of the first waveguide beam splitter BS1 is used as an input port of a signal to be measured;
an input port of the third waveguide beam splitter BS3 is used as a local oscillation light input port of the conjugate heterodyne mixing detection module and is connected with the laser diode LD;
two output ports of the second waveguide beam splitter BS2 are connected to the first photodiode PD1 and the second photodiode PD2, respectively; the subtraction of photocurrents of the first photodiode PD1 and the second photodiode PD2 generates a first differential current as a first output signal of the chip;
two output ports of the fourth waveguide beam splitter BS4 are connected to the third photodiode PD3 and the fourth photodiode PD4, respectively; the subtraction of the photocurrents of the third photodiode PD3 and the fourth photodiode PD4 generates a second differential current as a second output signal of the chip;
the splitting ratio of each waveguide beam splitter is 50:50.
the specific working principle is as follows:
local oscillation light generated by the laser diode LD can be written as
Wherein,the amplitude, frequency and initial phase of the local oscillation light are respectively.
The signal light can be written as
Wherein,the signal light frequency and the initial phase are respectively, and the regular components X and P satisfyIs the amplitude of the signal light.
The signal light enters an input port of the first waveguide beam splitter BS1 and is split into a first signal light component and a second signal light component with equal amplitude, the first signal light component and the second signal light component propagate along the second waveguide L2 and the first waveguide L1 respectively, and the corresponding phase changes are respectively
The local oscillation light enters an input port of a third waveguide beam splitter BS3 and is split into a first local oscillation light component and a second local oscillation light component with equal amplitude, the first local oscillation light component and the second local oscillation light component propagate along a third waveguide L3 and a fourth waveguide L4 respectively, and the corresponding phase changes are respectively
Realizing conjugated heterodyne detection satisfies the following phase relation
Can obtain
Thus, the first and second substrates are bonded together,and->The conjugated heterodyne detection can be performed by only meeting the relation, namely, the measurement of the X component and the P component is realized at the same time.
The first signal light component and the first local oscillator light component interfere on the second waveguide beam splitter BS2 to generate a first interference result and a second interference result, which can be written as
The second signal light component and the second local oscillator light component interfere on the fourth waveguide beam splitter BS4 to generate a third interference result and a fourth interference result, which can be written as
Where j is the phase difference 90 °.
The first interference result and the second interference result respectively enter the first photodiode PD1 and the second photodiode PD2 to be detected, two paths of photocurrents are generated and are differentiated, and the obtained differential photon arithmetic symbol is
Wherein,,/>is a local oscillatorThe difference frequency between the light and the signal light.
The third interference result and the fourth interference result respectively enter a third photodiode PD3 and a fourth photodiode PD4 to be detected, two paths of photocurrents are generated and are differentiated, and the obtained differential photon arithmetic symbol is
Due toThe obtained first differential current and second differential current can be written as respectively
R is the response coefficient of the detector, namely the I component and the Q component of the signal can be obtained, and the X component and the P component of the signal can be obtained.
Embodiment one:
as shown in fig. 2, the second waveguide L2 is further provided with an electrically controlled phase shifting module PS for implementing a 90 ° phase difference using a feedback algorithm.
The feedback algorithm comprises the following steps:
s1: filtering the square sum signal of the first output signal and the second output signal to remove the direct current component;
s2: integrating the signals obtained in the step S1 and taking absolute values;
s3: adjusting the voltage of the electric control phase shifting module to enable the signal value obtained in the step S2 to be minimum;
s4: comparing absolute values of the first output signal and the second output signal, and stopping changing the voltage of the electric control phase shifting module if the absolute values are unequal, so as to finish the adjustment of the 90-degree phase difference; otherwise, continuing to adjust the voltage of the electric control phase shifting module.
The specific principle is as follows:
when the phase difference provided by the waveguide length difference is 90 DEG, the first differential current and the second differential current output by the conjugated heterodyne balance detection chip can be written as respectively
However, there is a phase error caused by the external environment temperature, waveguide length manufacturing error, etc., so that the phase difference is not 90 °, which can be written as
By arranging the electric control phase shifting module PS, the phase difference can be adjusted.For a fast time-varying phase caused by the difference frequency, the +.>Then->And->The sum of squares can be written as
Filtering the above signals to remove DC component, integrating and taking absolute value
Taking the above signal as a feedback signal, the phase change relationship of the signal modulated by the electrically controlled phase shifter is shown in fig. 3, it can be seen that when the integral value reaches the minimum, ϕ may have a plurality of values ϕ =0, pi/2, pi. However, when ϕ =0,the method comprises the steps of carrying out a first treatment on the surface of the When ϕ =pi,/>Obviously not what we need, both of these cases can be compared +.>And->To exclude. Therefore, when the integrated value reaches the minimum, the +.>And->ϕ =pi/2.
As shown in fig. 4, a differential phase balance detection chip includes a laser diode LD, a fifth waveguide beam splitter BS5 and 2 conjugate heterodyne mixing detection modules,
the laser diode LD is connected with one input port of the fifth waveguide beam splitter BS 5;
two output ports of the fifth waveguide beam splitter BS5 are respectively connected with a local oscillation optical input port of a conjugate heterodyne mixing detection module;
the signal input ports to be detected of the 2 conjugated heterodyne mixing detection modules are respectively used for inputting two paths of signal light of differential phase signals.
The working principle is as follows:
firstly, two paths of signal light of a differential phase signal to be detected are respectively input into two signal input ports to be detected of a differential phase balance detection chip, and respectively enter into 2 conjugated heterodyne mixing detection modules. The laser diode LD enters an input port of the fifth waveguide beam splitter BS5 and is split into two paths of optical signals with equal amplitude, namely a first local oscillation light and a second local oscillation light.
The first local oscillation light and one path of signal light of the differential phase signal to be detected are mixed and detected in one conjugated heterodyne mixing and detecting module to generate a first output signal and a second output signal which can be written as
The phase difference between the signal light and the first local oscillation light is obtained
The second local oscillation light and the other path of signal light of the differential phase signal to be detected are mixed and detected in the other conjugated heterodyne mixing detection module, and a third output signal and a fourth output signal are generated and can be written as respectively
The phase difference between the signal light and the first local oscillation light is obtained
Thus, the phase difference of the differential phase signal to be measured can be obtained as
As can be seen from the various embodiments of the present invention, the present invention provides a conjugate heterodyne balance detection chip and a differential phase balance detection chip, which can avoid the problems of phase mutation and loss increase caused by waveguide crossing during chip integration by setting the position of a waveguide beam splitter and the length of a connecting waveguide. And the precise consistency of the waveguide length is not required, so that the chip manufacturing difficulty is reduced. In addition, two paths of output signals of the chip can be utilized for phase feedback compensation, so that the detection accuracy is improved.

Claims (9)

1. The conjugate heterodyne balance detection chip is characterized by comprising a laser diode LD and a conjugate heterodyne frequency mixing detection module, wherein the conjugate heterodyne frequency mixing detection module comprises a first waveguide beam splitter BS1, a second waveguide beam splitter BS2, a third waveguide beam splitter BS3, a fourth waveguide beam splitter BS4, a first waveguide L1, a second waveguide L2, a third waveguide L3, a fourth waveguide L4, a first photodiode PD1, a second photodiode PD2, a third photodiode PD3 and a fourth photodiode PD4,
the two output ports of the first waveguide beam splitter BS1 are correspondingly connected with one input port of the second waveguide beam splitter BS2 and one input port of the fourth waveguide beam splitter BS4 through a first waveguide L1 and a second waveguide L2 respectively; the length difference between the second waveguide L2 and the first waveguide L1 is
The two output ports of the third waveguide beam splitter BS3 are correspondingly connected with the other input port of the second waveguide beam splitter BS2 and the other input port of the fourth waveguide beam splitter BS4 through a third waveguide L3 and a fourth waveguide L4 respectively; the length difference between the fourth waveguide L4 and the third waveguide L3 is
And->Satisfy->,/>The wavelengths of the signal to be measured and the local oscillation light are respectively,the refractive indexes of the signal to be measured and the local oscillation light in the waveguide are respectively;
the first waveguide L1, the second waveguide L2, the third waveguide L3 and the fourth waveguide L4 have no cross;
the optical signal output by the laser diode LD is used as local oscillation light;
one input port of the first waveguide beam splitter BS1 is used as an input port of a signal to be measured;
an input port of the third waveguide beam splitter BS3 is used as a local oscillation light input port of the conjugate heterodyne mixing detection module and is connected with the laser diode LD;
two output ports of the second waveguide beam splitter BS2 are connected to the first photodiode PD1 and the second photodiode PD2, respectively; the subtraction of photocurrents of the first photodiode PD1 and the second photodiode PD2 generates a first differential current as a first output signal of the chip;
two output ports of the fourth waveguide beam splitter BS4 are connected to the third photodiode PD3 and the fourth photodiode PD4, respectively; the subtraction of the photocurrents of the third photodiode PD3 and the fourth photodiode PD4 generates a second differential current as a second output signal of the chip;
the splitting ratio of each waveguide beam splitter is 50:50.
2. the conjugate heterodyne balance detection chip according to claim 1, wherein the second waveguide L2 is further provided with an electronically controlled phase shift module PS for implementing a 90 ° phase difference using a feedback algorithm.
3. The conjugate heterodyne balance detection chip of claim 2, wherein the feedback algorithm includes the steps of:
s1: filtering the square sum signal of the first output signal and the second output signal to remove the direct current component;
s2: integrating the signals obtained in the step S1 and taking absolute values;
s3: adjusting the voltage of the electric control phase shifting module to enable the signal value obtained in the step S2 to be minimum;
s4: comparing absolute values of the first output signal and the second output signal, and stopping changing the voltage of the electric control phase shifting module if the absolute values are unequal, so as to finish the adjustment of the 90-degree phase difference; otherwise, continuing to adjust the voltage of the electric control phase shifting module.
4. The conjugate heterodyne balance detection chip of claim 1, wherein the first waveguide L1 and the third waveguide L3 are equal in length, and≠0。
5. the conjugate heterodyne balance detection chip according to claim 1, wherein the first waveguide splitter BS1 to the fourth waveguide splitter BS4 and the first waveguide L1 to the fourth waveguide L4 are integrated on a PLC waveguide.
6. The conjugate heterodyne balance detection chip of claim 1, wherein the laser diode LD is coupled to one input port of the waveguide splitter third waveguide splitter BS3 by lens alignment; the two output ports of the second waveguide beam splitter BS2 are coupled with the first photodiode PD1 and the second photodiode PD2 through lenses, respectively; the two output ports of the fourth waveguide splitter BS4 are coupled to the third photodiode PD3 and the fourth photodiode PD4, respectively, through lenses.
7. The conjugate heterodyne balance detection chip of claim 1, wherein the photodiode is an InGaAs PIN tube.
8. The conjugate heterodyne balance detection chip of claim 1, wherein the detection chip is temperature controlled with a temperature control accuracy of greater than 0.01 ℃.
9. A differential phase balance detection chip is characterized by comprising a laser diode LD, a fifth waveguide beam splitter BS5 and 2 conjugated heterodyne mixing detection modules as claimed in any one of claims 1 to 8,
the laser diode LD is connected with one input port of the fifth waveguide beam splitter BS 5;
two output ports of the fifth waveguide beam splitter BS5 are respectively connected with a local oscillation optical input port of a conjugate heterodyne mixing detection module;
the signal input ports to be detected of the 2 conjugated heterodyne mixing detection modules are respectively used for inputting two paths of signal light of differential phase signals.
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