CN114280790B - Diffraction optical waveguide device and near-to-eye display equipment - Google Patents

Diffraction optical waveguide device and near-to-eye display equipment Download PDF

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CN114280790B
CN114280790B CN202111636377.2A CN202111636377A CN114280790B CN 114280790 B CN114280790 B CN 114280790B CN 202111636377 A CN202111636377 A CN 202111636377A CN 114280790 B CN114280790 B CN 114280790B
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grating
optical waveguide
grating structure
waveguide substrate
light
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CN114280790A (en
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黄伟
江天润
许洁
朱志盼
李清文
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Gusu Laboratory of Materials
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Abstract

The embodiment of the invention discloses a diffraction optical waveguide device and near-to-eye display equipment. The diffractive optical waveguide device includes: an optical waveguide substrate; the optical waveguide substrate comprises a first grating region, the first grating region of the optical waveguide substrate comprises at least two grating subregions with different refractive indexes, the refractive indexes in each grating subregion are the same, and each grating subregion corresponds to one-time light coupling output; the first grating structure is positioned in the first grating area, is arranged on one side of the optical waveguide substrate, and is used for coupling out light rays in the optical waveguide substrate, and the heights of the grating lines of the first grating structure are the same. According to the technical scheme provided by the embodiment of the invention, the uniformity of light emission is regulated through the difference of the refractive indexes of the media in different areas under the condition that the heights of the gratings are consistent, the processing difficulty of the gratings is reduced, and the preparation cost of the diffraction optical waveguide device is greatly reduced.

Description

Diffraction optical waveguide device and near-to-eye display equipment
Technical Field
The embodiment of the invention relates to an optical element technology, in particular to a diffraction optical waveguide device and near-eye display equipment.
Background
Currently, relief grating waveguide technology is gaining widespread attention in near-eye display (e.g., augmented Reality, AR augmented reality) devices. Due to the convenience of nanoimprinting, and the advantages of the relief grating waveguide scheme over other waveguide schemes, such as a large field of view and a large eye movement range, relief grating waveguide schemes are being more and more widely studied.
The prior proposal of the relief grating waveguide mainly comprises a waveguide proposal based on a one-dimensional grating and a waveguide proposal based on a two-dimensional grating, wherein the two-dimensional grating waveguide proposal comprises an optical waveguide substrate, a coupling-in grating and a coupling-out grating which are arranged on the optical waveguide substrate, an image light beam emitted by an image light source is coupled into the optical waveguide substrate through the diffraction of the coupling-in grating and propagates in the optical waveguide substrate in a total reflection mode, and the coupling-out grating is used for diffracting and coupling the image light in the optical waveguide substrate into human eyes.
If the diffraction efficiency of the out-coupling grating is not changed, the image becomes darker gradually along the light ray in the transmission direction of the waveguide. Fig. 1 is a schematic diagram of an optical waveguide device fabricated by using grating groove depth modulation in the prior art, where uniform exit pupil is achieved by modulating the grating groove depth. Referring to fig. 1, light output by an optical system 101 is coupled into a substrate 102 through a coupling-in grating 103, and is transmitted to a coupling-out grating 104 by total reflection. Upon reaching the out-coupling grating 104, a portion of the light flux, i.e. rays 105, 106 and 107, is coupled out each time the out-coupling grating 104 is reached. The depth of the grooves of the out-coupling grating 104 gradually increases in the direction in which the light is transmitted in the optical waveguide device, and the coupling-out efficiency gradually increases accordingly, so that although the light flux reaching the out-coupling grating 104 before the diffraction output will be less than the light flux reaching the out-coupling grating 104 before, the light fluxes carried by the emitted light rays 105, 106 and 107 can be kept substantially uniform, so that the human eye sees the same brightness of the image when receiving the light rays 105, 106 and 107.
The uniformity of the light emission can be improved by adopting a groove depth modulation mode, but the etching difficulty of gratings with different heights in the actual processing process is high, and the manufacturing cost is high.
Disclosure of Invention
The embodiment of the invention provides a diffraction optical waveguide device and near-to-eye display equipment, which can adjust the uniformity of light emission through the difference of refractive indexes of media in different areas under the condition of ensuring the consistent grating height, reduce the processing difficulty and greatly reduce the preparation cost of the diffraction optical waveguide device.
In a first aspect, an embodiment of the present invention provides a diffractive optical waveguide device, including:
an optical waveguide substrate;
the optical waveguide substrate comprises a first grating region, the first grating region of the optical waveguide substrate comprises at least two grating subregions with different refractive indexes, the refractive indexes in each grating subregion are the same, and each grating subregion corresponds to one-time light coupling output;
the first grating structure is positioned in the first grating area, the first grating structure is arranged on one side of the optical waveguide substrate, the first grating structure is used for coupling out light rays in the optical waveguide substrate, and the heights of grating lines of the first grating structure are the same.
Optionally, the optical waveguide substrate further includes a second grating region and a third grating region;
the second grating region comprises a second grating structure, the third grating region comprises a third grating structure, and the second grating structure and the third grating structure are arranged on the same side of the optical waveguide substrate as the first grating structure;
the second grating structure and the third grating structure are arranged along a first direction, the second grating structure and the first grating structure are arranged along a second direction, the second grating structure is used for coupling external light into the optical waveguide substrate, and the third grating structure is used for receiving the light beam transmitted by the second grating structure, and coupling the light beam into the first grating structure after expanding the beam;
the first direction and the second direction are parallel to the plane where the optical waveguide substrate is located, and the first direction and the second direction are intersected.
Optionally, in the first grating region, the refractive index of the grating sub-regions sequentially increases in a direction away from the third grating region.
Optionally, the refractive index of the optical waveguide substrate is greater than or equal to 1.5 and less than or equal to 2.0.
Optionally, a protective layer is disposed between the gate lines of the first grating structure, and the refractive index of the protective layer is smaller than that of the optical waveguide substrate.
Optionally, the refractive index of the protective layer is greater than or equal to 1 and less than or equal to 1.1.
Optionally, the grating sub-regions are uniformly distributed in the first grating region.
Optionally, the optical waveguide substrate includes a glass substrate, a semiconductor substrate, or an optical resin substrate.
In a second aspect, an embodiment of the present invention further provides a near-eye display device, including any one of the diffractive optical waveguide devices described above.
Optionally, the near-eye display device is a virtual reality display device or an augmented reality display device.
The diffraction optical waveguide device provided by the embodiment of the invention comprises an optical waveguide substrate, wherein at least two grating subareas with different refractive indexes are arranged in a first grating area of the optical waveguide substrate, the refractive indexes in the grating subareas are the same, the positions of the grating subareas are arranged according to the propagation step length of light rays in the optical waveguide substrate, so that each grating subarea corresponds to the coupling output of primary light rays, the heights of grating lines of all the grating subareas are the same, the uniformity of light emission is regulated by utilizing the refractive index change of a medium, the height modulation of the grating lines is not needed, the grating processing difficulty is reduced, and the preparation cost of the diffraction optical waveguide device is greatly reduced.
Drawings
FIG. 1 is a schematic diagram of an optical waveguide device fabricated by grating groove depth modulation in the prior art;
FIG. 2 is a schematic diagram of the optical path of an optical waveguide device;
FIG. 3 is a schematic diagram of a partial cross-sectional structure of a diffractive optical waveguide device according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a partial cross-sectional structure of another diffractive optical waveguide device according to an embodiment of the present invention;
FIG. 5 is a schematic top view of a diffractive optical waveguide device according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a partial cross-sectional structure of another diffractive optical waveguide device according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. It should be noted that, the terms "upper", "lower", "left", "right", and the like in the embodiments of the present invention are described in terms of the angles shown in the drawings, and should not be construed as limiting the embodiments of the present invention. In addition, in the context, it will also be understood that when an element is referred to as being formed "on" or "under" another element, it can be directly formed "on" or "under" the other element or be indirectly formed "on" or "under" the other element through intervening elements. The terms "first," "second," and the like, are used for descriptive purposes only and not for any order, quantity, or importance, but rather are used to distinguish between different components. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The near-eye display (such as AR) device is generally worn in a manner similar to that of ordinary glasses, and is characterized in that the device can transmit light rays emitted by real world objects and can also enable light rays of virtual images to enter human eyes. The imaging system of the near-eye display device comprises an optical mechanical system and an optical waveguide device, wherein the optical mechanical system is a micro projector or a screen and is responsible for converting an electric signal into an optical signal and outputting a virtual image; the optical waveguide device is responsible for transmitting the output virtual image light to the position in front of human eyes, and enabling the light to enter human eyes to realize virtual image imaging. Light propagates along the optical waveguide by total reflection at the interface of the optical waveguide within the optical waveguide device, wherein the propagation step of the light beam represents the distance between the locations of incidence of two adjacent total reflections of the light beam at the same interface of the optical waveguide. In a practical scenario, different light beams transmitted in the optical waveguide may generate different propagation steps due to different angles of incidence of the light or different wavelengths of the light. Fig. 2 is a schematic diagram of the optical path of an optical waveguide device. Referring to fig. 2, the propagation step of the light ray 110 transmitted in the optical waveguide 100 is d 1 The propagation step of ray 120 is d 2 Propagation step d 1 Smaller than the propagation step d 2 . When light propagates to the out-coupling region 130, the light diffracts and a portion of the light is coupled forwardOutside the combined optical waveguide 100, the optical outcoupling locations are spaced apart by the same step length as the propagation of the light beam within the optical waveguide 100. Because the propagation step length of the light ray 110 is shorter, the coupled-out light rays are denser, and the coupled-out light rays are sparser because the propagation step length of the light ray 120 is longer. If the relative positions of the human eye 140 and the coupling-out region 130 are fixed, as in the case of fig. 2, since the size of the entrance pupil of the human eye 140 is fixed, more light rays 110 with smaller intervals enter the human eye 140 (2 bundles in the figure), and less coupling-out light rays 120 with larger intervals are received by the human eye 140 (1 bundle in the figure). The brightness of the light imaged by the human eye 140 is the superposition of the brightness of the multiple beams received by the human eye 140, so that in the virtual image formed by the human eye 140, the image formed by the light 110 is brighter, and the image formed by the light 120 is darker. That is, the human eye 140 is fixed in position relative to the optical waveguide 100, and the brightness of the image formed by the light beams with different propagation steps is different, which may cause distortion of the virtual image information acquired by the human eye 140, for example, in the form of "dark bands", "distortion of the image brightness", etc., which is directly reflected in the virtual image imaging effect received by the human eye 140, which greatly restricts the practical use of the optical waveguide scheme.
At present, the mode of grating height modulation is favorable for improving the uniformity of light emission, but the grating with the height modulation has the defects of high processing difficulty and higher cost, and is not favorable for popularization and application.
In order to solve the above-described problems, embodiments of the present invention provide a diffractive optical waveguide device. Fig. 3 is a schematic diagram illustrating a partial cross-sectional structure of a diffractive optical waveguide device according to an embodiment of the present invention. Referring to fig. 3, the diffractive optical waveguide device includes: an optical waveguide substrate 10; the optical waveguide substrate comprises a first grating region 11, the first grating region 11 of the optical waveguide substrate 10 comprises at least two grating subregions 111 with different refractive indexes (four grating subregions are schematically shown in fig. 3 and are not limiting to the embodiment of the present invention), the refractive index in each grating subregion 111 is the same, and each grating subregion 111 corresponds to one-time light coupling output; the first grating structure 112 is located in the first grating region 11, the first grating structure 112 is disposed on one side of the optical waveguide substrate 10, the first grating structure 112 is used for coupling out light in the optical waveguide substrate 10, and the heights of the grating lines of the first grating structure 112 are the same.
In this embodiment, the optical waveguide substrate 10 may be a glass substrate, a semiconductor substrate or an optical resin substrate, and may be selected according to practical situations, which is not limited in the embodiment of the present invention. In a specific implementation, the refractive index of the optical waveguide substrate 10 is between 1.5 and 2.0, and for example, four grating sub-regions 111 shown in fig. 3 are respectively provided with four different refractive indices. The refractive indexes of the four grating subareas 111 from left to right can be set to be 1.5, 1.6, 1.7 and 1.8 respectively, and when in practical implementation, the refractive index of each grating subarea can be set according to practical requirements. The refractive index difference of the specific different regions may be formed by doping other materials during the manufacturing process, controlling different environmental conditions, and the like, which is not limited in the embodiment of the present invention. When the refractive indices of the different regions of the optical waveguide substrate 10 are different, the coupling-out efficiency of the grating is different. For example, the light propagates from left to right, and each grating subarea 111 corresponds to the coupling-out of a primary light, that is, the coupling-in of a light from left in fig. 3, and as a part of the light is coupled out, the total energy of the light from right decreases, and as the refractive index of the medium is larger, the coupling-out efficiency of the gratings with the same structure is higher, so that the refractive index of the optical waveguide substrate 10 may be set to be higher toward the right, so as to improve the uniformity of light output. It can be understood that when the incident angles of the light rays are different, the propagation steps of the light rays in the diffraction grating device are different, and when the diffraction optical waveguide device is designed in this embodiment, the incident angle of the incident light rays is considered first, and the size of the grating subregions is designed according to the propagation steps of the light rays, so that each grating subregion realizes one-time coupling output. In the implementation, only the area within the specific range of the light output position can be set as the grating subarea, and the grating subarea which is uniformly divided can be also set similarly to the grating subarea in fig. 3. The diffraction optical waveguide device with uniform light output can be designed by comprehensively considering the factors such as the refractive index, the coupling efficiency of the grating structure, the residual energy of light after each coupling-out and the like. In addition, it should be noted that, the shape of each grating sub-region 111 shown in fig. 3 is the same, that is, the uniform distribution of the grating sub-regions 111 in the first grating region 11 is only schematic, and the shape and refractive index of the grating sub-regions 111 may be designed according to practical situations in practical implementation.
In further embodiments, multiple types of grating sub-regions may be provided according to different propagation steps, considering that the diffractive optical waveguide device may need to accommodate light rays at multiple angles of incidence. Fig. 4 is a schematic diagram illustrating a partial cross-sectional structure of another diffractive optical waveguide device according to an embodiment of the present invention. Referring to fig. 4, propagation steps of light a and light b are different, and for light a, a corresponding plurality of first-type grating sub-regions 111a are provided, and refractive indexes of the first-type grating sub-regions 111a sequentially increase from left to right; for the light ray b, a plurality of corresponding second-type grating subregions 111b are arranged, and the refractive indexes of the second-type grating subregions 111b are sequentially increased from left to right so as to match incident light rays with different angles. For light rays with more propagation steps, corresponding grating subareas can be set according to requirements.
According to the technical scheme, at least two grating subareas with different refractive indexes are arranged in the first grating area of the optical waveguide substrate, the refractive indexes in the grating subareas are the same, the positions of the grating subareas are arranged according to the propagation step length of light rays in the optical waveguide substrate, so that each grating subarea corresponds to the coupling output of primary light rays, the heights of grating lines of each grating subarea are the same, the uniformity of light emission is regulated by utilizing the refractive index change of a medium, the height modulation of the grating lines is not needed, the grating processing difficulty is reduced, and the preparation cost of a diffraction optical waveguide device is greatly reduced.
Based on the above technical solutions, fig. 5 is a schematic top view structure of a diffractive optical waveguide device according to an embodiment of the present invention. Referring to fig. 5, the optical waveguide substrate 10 may optionally further include a second grating region 12 and a third grating region 13; the second grating region 12 includes a second grating structure 121, the third grating region 13 includes a third grating structure 131, and the second grating structure 121 and the third grating structure 131 are disposed on the same side of the optical waveguide substrate 10 as the first grating structure 112; the second grating structure 121 and the third grating structure 131 are arranged along the first direction x, the second grating structure 121 and the first grating structure 112 are arranged along the second direction y, the second grating structure 121 is used for coupling external light into the optical waveguide substrate 10, and the third grating structure 131 is used for receiving the light beam transmitted by the second grating structure 121, and coupling the light beam into the first grating structure 112 after expanding the light beam; the first direction x and the second direction y are parallel to the plane of the optical waveguide substrate 10, and the first direction x and the second direction y intersect.
It will be appreciated that the second grating region 12 is a coupling-in grating region of the diffractive optical waveguide device for receiving light incident from the outside (e.g. an optical-mechanical system), the third grating region 13 is a turning grating region of the diffractive optical waveguide device for changing the direction of light from the transmission and expanding the beam, and the first grating region 11 is a coupling-out grating region of the diffractive optical waveguide device for emitting modulated light.
Alternatively, within the first grating region 11, the refractive index of the grating sub-regions increases in sequence in a direction away from the third grating region 13. The arrangement is favorable for improving the uniformity of the emergent light, the specific refractive index and the shape of the grating subareas can be designed according to practical conditions, and the embodiment of the invention is not limited to the above.
Fig. 6 is a schematic diagram of a partial cross-sectional structure of another diffractive optical waveguide device according to an embodiment of the present invention. Referring to fig. 6, optionally, a protective layer 113 is disposed between the gate lines of the first grating structure 112, and the refractive index of the protective layer 113 is smaller than that of the optical waveguide substrate 10.
By providing the low refractive index protective layer 113 between the grating lines of the first grating structure 11, the grating structure can be protected, which is advantageous for packaging the diffractive optical waveguide device. The same heights of the protective layer 113 and the grating are merely illustrative, and the thickness of the protective layer 113 is not limited in implementation, and the refractive index of the protective layer is greater than or equal to 1 and less than or equal to 1.1 in implementation.
The embodiment of the invention also provides near-eye display equipment, which comprises any one of the diffraction optical waveguide devices provided by the embodiment. In particular implementations, the near-eye display device may be a virtual reality display device or an augmented reality display device.
Since the near-eye display device provided by the embodiment of the present invention includes any one of the diffractive optical waveguide devices provided by the above embodiment, the same technical effects as or corresponding to the diffractive optical waveguide device are provided, and will not be described in detail herein.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.

Claims (10)

1. A diffractive optical waveguide device, comprising:
an optical waveguide substrate;
the optical waveguide substrate comprises a first grating region, the first grating region of the optical waveguide substrate comprises at least two grating subregions with different refractive indexes, the refractive indexes in each grating subregion are the same, and each grating subregion corresponds to one-time light coupling output;
designing the size of the grating subareas according to the propagation step length of the light rays; setting multiple types of grating subregions according to the propagation steps of different light rays;
the first grating structure is positioned in the first grating area, the first grating structure is arranged on one side of the optical waveguide substrate, the first grating structure is used for coupling out light rays in the optical waveguide substrate, and the heights of grating lines of the first grating structure are the same.
2. The diffractive optical waveguide device according to claim 1, characterized in that the optical waveguide substrate further comprises a second grating region and a third grating region;
the second grating region comprises a second grating structure, the third grating region comprises a third grating structure, and the second grating structure and the third grating structure are arranged on the same side of the optical waveguide substrate as the first grating structure;
the second grating structure and the third grating structure are arranged along a first direction, the first grating structure is arranged along a second direction, the second grating structure is used for coupling external light into the optical waveguide substrate, and the third grating structure is used for receiving the light beam transmitted by the second grating structure, and coupling the light beam into the first grating structure after expanding the light beam;
the first direction and the second direction are parallel to the plane where the optical waveguide substrate is located, and the first direction and the second direction are intersected.
3. The diffractive optical waveguide device according to claim 2, characterized in that in the first grating region, the refractive index of the grating subregions increases in succession in a direction away from the third grating region.
4. The diffractive optical waveguide device according to claim 1, wherein the refractive index of the optical waveguide substrate is greater than or equal to 1.5 and less than or equal to 2.0.
5. The diffractive optical waveguide device according to claim 1, characterized in that a protective layer is arranged between the grating lines of the first grating structure, the refractive index of the protective layer being smaller than the refractive index of the optical waveguide substrate.
6. The diffractive optical waveguide device according to claim 5, characterized in that the refractive index of the protective layer is greater than or equal to 1 and less than or equal to 1.1.
7. The diffractive optical waveguide device according to claim 1, characterized in that the grating subregions are uniformly distributed in the first grating region.
8. The diffractive optical waveguide device according to claim 1, wherein the optical waveguide substrate comprises a glass substrate, a semiconductor substrate or an optical resin substrate.
9. A near-eye display device comprising the diffractive optical waveguide device according to any one of claims 1 to 8.
10. The near-eye display device of claim 9, wherein the near-eye display device is a virtual reality display device or an augmented reality display device.
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CN114280791B (en) * 2021-12-29 2024-03-05 材料科学姑苏实验室 Diffraction optical waveguide device and preparation method thereof
CN114994918A (en) * 2022-06-17 2022-09-02 京东方科技集团股份有限公司 Optical waveguide lens and packaging method thereof
CN115128801A (en) * 2022-06-30 2022-09-30 北京灵犀微光科技有限公司 Optical waveguide display method, device, equipment and medium based on electric signal control

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