CN114279303B - Device and method for detecting verticality of double-sided micro-cylindrical lens array - Google Patents
Device and method for detecting verticality of double-sided micro-cylindrical lens array Download PDFInfo
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Abstract
The invention discloses a device and a method for detecting the verticality of a double-sided micro-cylindrical lens array, wherein the device comprises a double-sided micro-cylindrical lens array (101), a first small ball (102), a second small ball (103), a rotary table (105) around a Z axis, a two-dimensional translation table (104) along an X axis and a Y axis, a Z-axis height contact measuring device (106) and a computer (107). The first small ball (102) and the second small ball (103) are two same small balls, and the relation between the double-sided micro-cylindrical lens array and the motion axis is accurately adjusted through positioning of the two small balls and fitting processing of test data. By testing and processing the profile data of the upper and lower cylindrical surfaces, the bus direction of the two cylindrical surfaces is calculated, and the accurate detection of the verticality of the double-sided micro cylindrical lens array is realized.
Description
Technical Field
The invention belongs to the field of optical element detection, and particularly relates to a device and a method for detecting the verticality of a double-sided micro-cylindrical lens array.
Background
The micro-lens cylindrical array is formed by orderly arranging sub-cylindrical mirrors with the diameters of tens to hundreds of microns on a substrate. Due to the characteristics of small unit size, high integration level and the like, the micro-lens cylindrical array is widely applied to systems such as laser array scanning, light beam homogenization and light beam shaping. In practical use, due to space limitation and assembly problems, the design is usually a double-sided microlens cylinder array, that is, the upper and lower surfaces are both microlens cylinder arrays, and the generatrix of the upper and lower microlens cylinder arrays is vertical. Because two directions are used in a matched mode in the light path, the requirement for perpendicularity of two surfaces is high. Because the structures on two sides are not on one side, the high-precision detection of the verticality of the two sides is difficult.
Disclosure of Invention
In order to solve the technical problem, the invention provides a device and a method for detecting the verticality of a double-sided micro-cylindrical lens array, which realize high-precision detection of the verticality of the double-sided micro-cylindrical lens array.
In order to achieve the above object, the present invention provides a device for detecting the verticality of a double-sided micro cylindrical lens array, comprising: a double-sided micro-cylindrical lens array 101, a first ball 102, a second ball 103, a two-dimensional translation stage 104 along the X-axis and Y-axis, a rotation stage 105 around the Z-axis, a Z-axis height contact measurement device 106, and a computer 107. Wherein the XYZ coordinate system is a coordinate system of the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotation stage 105 around the Z-axis, and the Z-axis direction height contact measuring device 106. Wherein the double-sided micro-cylindrical lens array 101 is placed on a rotary stage 105 around the Z-axis, the rotary stage 105 around the Z-axis is placed on a two-dimensional translation stage 104 along the X-axis and the Y-axis, and the double-sided micro-cylindrical lens array 101 is located below the Z-axis direction height contact measuring apparatus 106. Wherein the Z-axis direction height contact measuring device 106 can move along the Z-axis and accurately measure height information. The upper surface of the double-sided micro cylindrical lens array 101 is a micro cylindrical lens array, and the lower surface is also a micro cylindrical lens array. The computer 107 is connected to the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotation stage 105 around the Z-axis, and the Z-axis height contact measurement apparatus 106, and is configured to send out control signals and obtain topographical information of the object to be measured. The first small ball 102 and the second small ball 103 are the same in size, the curvature radius R is known, the surface shape precision is high, and 1/5 of a sphere is cut at the bottom.
In addition, the invention provides a method for detecting the verticality of a double-sided micro cylindrical lens array, and by using the device, the method comprises the following steps:
step (1), placing a double-sided micro cylindrical lens array 101 on a rotating table 105 around a Z axis, and adjusting to enable the end face ABCD of the double-sided micro cylindrical lens array 101 to be parallel to an X axis;
step (2), testing the appearance of a certain cylindrical surface area on the upper surface of the double-sided micro cylindrical lens array 101, andperforming cylindrical surface fitting to obtain a generatrix direction vector (a) of the upper surface of the double-sided micro-cylindrical lens array 101 1 ,b 1 ,c 1 )；
Step (3), the double-sided micro cylindrical lens array 101 is rotated 180 degrees around the Y axis and then placed on a rotating table 105 around the Z axis, and the adjustment is carried out to enable the end face ABCD of the double-sided micro cylindrical lens array 101 to be parallel to the X axis;
step (4), testing the appearance of a certain cylindrical surface area of the lower surface of the double-sided micro cylindrical lens array 101, and performing cylindrical surface fitting to obtain the generatrix direction and the direction vector (a) of the lower surface of the double-sided micro cylindrical lens array 101 2 ,b 2 ,c 2 )；
Step (5), calculating an included angle theta between the generatrix direction of the upper surface cylindrical surface and the generatrix direction of the lower surface cylindrical surface of the double-sided micro-cylindrical lens array 101, as shown in the following formula,
further, when the double-sided micro cylindrical lens array 101 is placed on the rotating table 105 around the Z axis and adjusted so that the end face ABCD of the double-sided micro cylindrical lens array 101 is parallel to the X axis, the following method is adopted:
(11) Placing a double-sided micro cylindrical lens array 101 on a rotating platform 105 around a Z axis, wherein the end face ABCD of the double-sided micro cylindrical lens array (101) is approximately vertical to the X axis, a first small ball 102 is placed on the rotating platform 105 around the Z axis and is tangent to the end face ABCD of the double-sided micro cylindrical lens array 101, and a second small ball 103 is placed on the rotating platform 105 around the Z axis and is tangent to the end face ABCD of the double-sided micro cylindrical lens array 101;
(12) Testing the appearance of the top area of the first small ball 102, performing spherical surface fitting to obtain the center coordinates of the first small ball 102, controlling a two-dimensional translation table 104 along an X axis and a Y axis and a Z axis height contact measuring device 106 by a computer 107, testing the top area of the first small ball 102, and obtaining data points (X and Y) 1i ,y 1i ,z 1i ),i＝1,2,…,N 1 ，N 1 For the total number of test points, a least square method is used for spherical fitting, so thatFitted residual epsilon 1 At a minimum, the coordinates (x) of the center of sphere of first sphere 102 are obtained 10 ,y 10 ,z 10 ) R is the curvature radius of the small ball, as shown in the following formula,
(13) Testing the appearance of the top area of the second small ball 103, fitting to obtain the center coordinates of the second small ball 103, controlling a two-dimensional translation table 104 along the X axis and the Y axis and a Z axis direction height contact measuring device 106 by a computer 107, testing the top area of the second small ball 103, and obtaining data points (X and Y) 2j ,y 2j ,z 2j ),j＝1,2,…,N 2 ，N 2 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 2 At minimum, the coordinates (x) of the sphere center of the second bead 103 are obtained 20 ,y 20 ,z 20 ) R is the curvature radius of the small ball, as shown in the following formula,
(14) Calculating to obtain an included angle alpha between the connecting line of the sphere center of the first small ball 102 and the sphere center of the second small ball 103 and the X axis, wherein the calculation method is as follows,
(15) And the computer 107 controls the rotation-alpha of the rotating platform 105 around the Z axis, so that the connecting line of the spherical centers of the first small ball 102 and the second small ball 103 is parallel to the X axis, namely the end face ABCD of the double-sided micro cylindrical lens array 101 is parallel to the X axis.
Further, when the generatrix direction of the upper surface cylindrical surface of the double-sided micro cylindrical lens array 101 is obtained, the following method is adopted: a computer 107 controls a two-dimensional translation table 104 along the X axis and the Y axis and a Z axis direction height contact measuring device 106 to test a certain column on the upper surface of the double-sided micro cylindrical lens array 101Area of surface, obtaining data points (x) 3k ,y 3k ,z 3k ),k＝1,2,…,N 3 ，N 3 For the total number of test points, a least square algorithm is used for cylindrical surface fitting, so that the fitting residual error epsilon 3 Minimum, obtaining a radius of curvature R 3 Cylindrical bus crossing point (x) 30 ,y 30 ,z 30 ) Direction vector (a) of cylindrical generatrix 1 ,b 1 ,c 1 ) As shown in the following formula:
wherein, a 1 2 +b 1 2 +c 1 2 ＝1。
Further, after rotating the double-sided micro-cylindrical lens array 101 by 180 degrees around the Y axis, the double-sided micro-cylindrical lens array is placed on the rotating table 105 around the Z axis, and the adjustment is performed so that the end face ABCD of the double-sided micro-cylindrical lens array 101 and the X axis are flat, the following method is adopted:
(31) After rotating 180 degrees around the Y axis, the double-sided micro cylindrical lens array 101 is placed on a rotating table 105 around the Z axis, the end face ABCD of the double-sided micro cylindrical lens array 101 is approximately vertical to the X axis, a first small ball 102 is placed on the rotating table 105 around the Z axis and is tangent to the end face ABCD of the double-sided micro cylindrical lens array 101, and a second small ball 103 is placed on the rotating table 105 around the Z axis and is tangent to the end face ABCD of the double-sided micro cylindrical lens array 101;
(32) Testing the appearance of the top area of the first small ball 102, performing spherical surface fitting to obtain the spherical center coordinate of the first small ball 102, controlling the two-dimensional translation table 104 along the X axis and the Y axis and the height contact measuring equipment 106 along the Z axis by the computer 107, testing the top area of the first small ball 102, and obtaining a data point (X axis) 4l ,y 4l ,z 4l ),l＝1,2,…,N 4 ，N 4 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 4 At a minimum, the coordinates (x) of the center of sphere of first sphere 102 are obtained 40 ,y 40 ,z 40 ) And R is the curvature radius of the small sphere and is shown as the following formula.
(33) Testing the appearance of the top area of the second small ball 103, fitting to obtain the center coordinate of the second small ball 103, controlling the two-dimensional translation table 104 along the X axis and the Y axis and the Z axis direction height contact measuring equipment 106 by the computer 107, testing the top area of the second small ball 103, and obtaining a data point (X) 5m ,y 5m ,z 5m ),j＝1,2,…,N 5 ，N 5 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 5 At minimum, the coordinates (x) of the sphere center of the second bead 103 are obtained 50 ,y 50 ,z 50 ) The radius of curvature of the pellet is given by:
(34) Calculating to obtain the included angle beta between the connecting line of the sphere center of the first small ball 102 and the sphere center of the second small ball 103 and the X axis, wherein the calculation method is as follows,
(35) And the computer 107 controls the rotation-beta of the rotating platform 105 around the Z axis, so that the connecting line of the spherical centers of the first small ball 102 and the second small ball 103 is parallel to the X axis, namely the end face ABCE of the double-sided micro cylindrical lens array 101 is parallel to the X axis.
Further, when obtaining the generatrix direction of the lower surface cylindrical surface of the double-sided micro-cylindrical lens array 101, the method adopted is as follows: the computer 107 controls the two-dimensional translation stage 104 along the X axis and the Y axis and the Z axis direction height contact measurement equipment 106 to test a certain cylindrical area on the upper surface of the double-sided micro cylindrical lens array 101 to obtain a data point (X) 6n ,y 6n ,z 6n ),n＝1,2,…,N 6 ，N 6 For the total number of test points, a least square algorithm is used for cylindrical surface fitting, so that the fitting residual error epsilon 6 Minimum, radius of curvatureIs R 6 Cylindrical bus crossing point (x) 60 ,y 60 ,z 60 ) Direction vector (a) of cylindrical generatrix 2 ,b 2 ,c 2 ) As shown in the following formula:
wherein, a 2 2 +b 2 2 +c 2 2 ＝1。
Compared with the prior art, the invention has the advantages that:
(1) When the upper surface and the lower surface of the double-sided micro cylindrical lens array are tested, the end face of the double-sided micro cylindrical lens array is used as a reference, so that the detection method of the verticality of the double-sided micro cylindrical lens array becomes feasible.
(2) The small ball is used, so that the end face of the double-sided micro cylindrical lens array can be quickly and accurately aligned to be parallel to the X axis, and the verticality of the double-sided micro cylindrical lens array can be more accurately detected.
(3) According to the invention, the position of the double-sided micro-cylindrical lens array is adjusted by analyzing and processing the test data, so that the installation requirement of the double-sided micro-cylindrical lens array during measurement is reduced, and the rapid test is realized.
Drawings
FIG. 1 is a schematic diagram of a device for detecting the verticality of a double-sided micro-cylindrical lens array according to the present invention;
FIG. 2 is a three-dimensional schematic diagram of a double-sided micro-cylindrical lens array according to the present invention;
FIG. 3 is a front view of a pellet of the present invention;
FIG. 4 is a schematic diagram of the mounting of pellets in testing the upper surface of a double-sided micro-cylindrical lens array according to the present invention;
FIG. 5 is a right side view of a ball mounting of the present invention in testing the upper surface of a double-sided micro cylindrical lens array;
FIG. 6 is a schematic diagram of the mounting of pellets when testing the lower surface of a double-sided micro-cylindrical lens array according to the present invention;
FIG. 7 is a right side view of a ball mounting of the present invention testing the lower surface of a double-sided micro cylindrical lens array;
in the figure, 101 is a double-sided micro cylindrical lens array, 102 is a first sphere, 103 is a second sphere, 104 is a two-dimensional translation stage along the X axis and the Y axis, 105 is a rotation stage around the Z axis, 106 is a Z-axis direction height contact measuring apparatus, and 107 is a computer.
Detailed Description
The invention is further described with reference to the following figures and specific examples.
Fig. 1 is a schematic diagram of a device for detecting the verticality of a double-sided micro-cylindrical lens array according to the present invention, which comprises a double-sided micro-cylindrical lens array 101, a first small sphere 102, a second small sphere 103, a two-dimensional translation stage 104 along the X-axis and the Y-axis, a rotation stage 105 around the Z-axis, a Z-axis height contact measurement apparatus 106, and a computer 107. Wherein the XYZ coordinate system is the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotation stage 105 around the Z-axis and the coordinate system of the Z-direction height contact measuring device 106. Wherein the double-sided micro-cylindrical lens array 101 is placed on a rotary stage 105 around the Z-axis, the rotary stage 105 around the Z-axis is placed on a two-dimensional translation stage 104 along the X-axis and the Y-axis, and the double-sided micro-cylindrical lens array 101 is located below the Z-axis direction height contact measuring apparatus 106. Wherein the Z-axis direction height contact measuring device 106 can move along the Z-axis and accurately measure height information. Fig. 1 shows a schematic structural diagram of a double-sided micro cylindrical lens array 101, in which the upper surface is a micro cylindrical lens array, and the lower surface is also a micro cylindrical lens array. The computer 107 is connected to the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotation stage 105 around the Z-axis, and the Z-axis height contact measurement apparatus 106, and is configured to send out control signals and obtain topographical information of the object to be measured. The first small ball 102 and the second small ball 103 are the same in size, have known curvature radius R and high surface shape precision, and are 1/5 of a sphere with a cut-off bottom, and a schematic diagram of the sphere is shown in FIG. 3.
The method for detecting the verticality of the double-sided micro cylindrical lens array by adopting the device comprises the following steps:
and (1) obtaining the bus direction of the upper surface cylindrical surface of the double-sided micro cylindrical lens array 101. The method comprises the following specific steps:
and (11) placing the double-sided micro-cylindrical lens array 101, the small ball 102 and the small ball 103. The double-sided micro cylindrical lens array 101 is placed on a rotary table 105 around the Z axis, and the end face ABCD of the double-sided micro cylindrical lens array 101 is substantially perpendicular to the X axis. The ball 102 is placed on the rotation stage 105 around the Z-axis and tangent to the end face ABCD of the double-sided micro-cylindrical lens array 101, and the ball 103 is placed on the rotation stage 105 around the Z-axis and tangent to the end face ABCE of the double-sided micro-cylindrical lens array 101, as shown in FIG. 4, and as shown in FIG. 5 in the right view.
And (12) testing the appearance of the top area of the small ball 102, and performing spherical fitting to obtain the spherical center coordinates of the small ball 102. The computer 106 controls the two-dimensional translation stage 104 along the X-axis and Y-axis and the Z-axis height contact measurement device 106 to test the top area of the ball 102 and obtain data points (X) 1i ,y 1i ,z 1i ),i＝1,2,…,N 1 ，N 1 Is the total number of test points. Using least square method to make spherical surface fitting so as to make fitting residual error epsilon 1 At a minimum, the coordinates (x) of the center of sphere 102 are obtained 10 ,y 10 ,z 10 ) R is the curvature radius of the small ball, as shown in the following formula,
and (13) testing the appearance of the top area of the small ball 103, and fitting to obtain the spherical center coordinate of the small ball 103. The computer 106 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the Z-axis height contact measurement device 106 to test the top area of the ball 103 and obtain data points (X) 2j ,y 2j ,z 2j ),j＝1,2,…,N 2 ，N 2 Is the total number of test points. Performing spherical fitting by using least square method to obtain fitting residual error epsilon 2 At the minimum, the coordinates (x) of the sphere center of the small sphere 103 are obtained 20 ,y 20 ,z 20 ) R is the curvature radius of the small ball, as shown in the following formula,
step (14), calculating to obtain an included angle alpha between a connecting line of the sphere center of the small sphere 102 and the sphere center of the small sphere 103 and the X axis, wherein the calculation method is as follows,
and (15) controlling the rotation-alpha of the rotating platform 105 around the Z axis by the computer 106, so that the connecting line of the spherical centers of the small balls 102 and 103 is parallel to the X axis, namely the end face ABCE of the double-sided micro cylindrical lens array 101 is parallel to the X axis.
And (16) testing the appearance of a certain cylindrical surface area on the upper surface of the double-sided micro cylindrical lens array 101, and performing cylindrical surface fitting to obtain a generatrix direction vector of the cylindrical surface. The computer 107 controls the two-dimensional translation stage 104 along the X axis and the Y axis and the Z axis direction height contact measurement equipment 106 to test a certain cylindrical area on the upper surface of the double-sided micro cylindrical lens array 101 to obtain a data point (X) 3k ,y 3k ,z 3k ),k＝1,2,…,N 3 ，N 3 Is the total number of test points. Performing cylindrical surface fitting by using least square algorithm to ensure that fitting residual error epsilon 3 Minimum, obtain radius of curvature R 3 Cylindrical bus crossing point (x) 30 ,y 30 ,z 30 ) Direction vector (a) of cylindrical generatrix 1 ,b 1 ,c 1 ) As shown in the following formula,
wherein, a 1 2 +b 1 2 +c 1 2 ＝1。
And (2) obtaining the bus direction of the lower surface cylindrical surface of the double-sided micro cylindrical lens array 101. The specific steps are as follows:
and (21) rotating the double-sided micro cylindrical lens array 101 for 180 degrees around the Y axis and then placing the double-sided micro cylindrical lens array on a rotating table 105 around the Z axis, wherein the end face ABCD of the double-sided micro cylindrical lens array 101 is approximately vertical to the X axis. The ball 102 is placed on the rotation stage 105 around the Z-axis and tangent to the end face ABCD of the double-sided micro-cylindrical lens array 101, and the ball 103 is placed on the rotation stage 105 around the Z-axis and tangent to the end face ABCE of the double-sided micro-cylindrical lens array 101, as shown in FIG. 6, and as shown in FIG. 7 in the right view.
And (22) testing the appearance of the top area of the small ball 102, and performing spherical fitting to obtain the spherical center coordinates of the small ball 102. The computer 106 controls the two-dimensional translation stage 104 along the X-axis and Y-axis and the Z-axis height contact measurement device 106 to test the top area of the ball 102 and obtain data points (X) 4l ,y 4l ,z 4l ),l＝1,2,…,N 4 ，N 4 Is the total number of test points. Using least square method to make spherical surface fitting so as to make fitting residual error epsilon 4 At a minimum, the coordinates (x) of the center of sphere 102 are obtained 40 ,y 40 ,z 40 ) R is the curvature radius of the small ball, as shown in the following formula,
step (23), testing the appearance of the top area of the small ball 103, fitting to obtain the spherical center coordinate of the small ball 103, controlling the two-dimensional translation table 104 along the X axis and the Y axis and the Z axis to contact the measuring equipment 106 in height direction by the computer 106, testing the top area of the small ball 103, and obtaining a data point (X axis) 5m ,y 5m ,z 5m ),j＝1,2,…,N 5 ，N 5 Is the total number of test points. Using least square method to make spherical surface fitting so as to make fitting residual error epsilon 5 At a minimum, the coordinates (x) of the center of the sphere 103 are obtained 50 ,y 50 ,z 50 ) R is the curvature radius of the small ball, as shown in the following formula,
step (24), calculating to obtain an included angle beta between a connecting line of the sphere center of the small sphere 102 and the sphere center of the small sphere 103 and the X axis, wherein the calculation method is as follows,
and (25) controlling the rotation-beta of the rotating platform 105 around the Z axis by the computer 107, so that the connecting line of the spherical centers of the small balls 102 and 103 is parallel to the X axis, namely the end face ABCE of the double-sided micro cylindrical lens array 101 is parallel to the X axis.
And (26) testing the appearance of a certain cylindrical surface area on the lower surface of the double-sided micro cylindrical lens array 101, and performing cylindrical surface fitting to obtain a generatrix direction vector of the cylindrical surface on the lower surface of the double-sided micro cylindrical lens array 101. The computer 106 controls the two-dimensional translation stage 104 along the X axis and the Y axis and the Z axis direction height contact measurement equipment 106 to test a certain cylindrical area on the upper surface of the double-sided micro cylindrical lens array 101 to obtain a data point (X) 6n ,y 6n ,z 6n ),n＝1,2,…,N 6 ，N 6 Is the total number of test points. Performing cylindrical surface fitting by using least square algorithm to ensure that fitting residual error epsilon 6 Minimum, obtain radius of curvature R 6 Cylindrical bus crossing point (x) 60 ,y 60 ,z 60 ) Direction vector (a) of cylindrical generatrix 2 ,b 2 ,c 2 ) The compound is represented by the following formula,
wherein, a 2 2 +b 2 2 +c 2 2 ＝1。
Step (3), calculating an included angle theta between the generatrix direction of the upper surface cylindrical surface and the generatrix direction of the lower surface cylindrical surface of the double-sided micro-cylindrical lens array 101, as shown in the following formula,
the invention has not been described in detail and is part of the common general knowledge of a person skilled in the art.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions made by those skilled in the art within the technical scope of the present invention shall be covered by the scope of the present invention, and therefore, the scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (4)
1. A detection method of a detection device based on the verticality of a double-sided micro-cylindrical lens array is characterized by comprising the following steps: the device comprises: a double-sided micro-cylindrical lens array (101), a first small ball (102), a second small ball (103), a two-dimensional translation stage (104) along an X axis and a Y axis, a rotation stage (105) around a Z axis, a Z-axis direction height contact measuring device (106) and a computer (107); wherein:
the double-sided micro-cylindrical lens array (101) is placed on a rotating table (105) around a Z axis, the rotating table (105) around the Z axis is placed on a two-dimensional translation table (104) along an X axis and a Y axis, and the double-sided micro-cylindrical lens array (101) is positioned below a height contact measuring device (106) in the Z axis direction; wherein, the height contact measuring equipment (106) in the Z-axis direction can move along the Z-axis and accurately measure the height information; the computer (107) is connected with the two-dimensional translation table (104) along the X axis and the Y axis, the rotating table (105) around the Z axis and the height contact measuring equipment (106) in the Z axis direction, and is used for sending out a control signal and acquiring the topography information of the measured object;
the upper surface of the double-sided micro cylindrical lens array (101) is a micro cylindrical lens array, and the lower surface of the double-sided micro cylindrical lens array is also a micro cylindrical lens array;
the first small ball (102) and the second small ball (103) are the same in size, the curvature radius R is known, the surface shape precision is high, and 1/5 of a ball body is cut off from the bottom;
the generatrixes of the upper and lower surface microlens cylinder arrays are mutually vertical;
the method comprises the following steps:
the method comprises the following steps of (1) placing a double-sided micro-cylindrical lens array (101) on a rotating table (105) around a Z axis, and adjusting to enable the end face ABCD of the double-sided micro-cylindrical lens array (101) to be parallel to an X axis;
step (2), testing the appearance of a certain cylindrical surface area on the upper surface of the double-sided micro-cylindrical lens array (101), and performing cylindrical surface fitting to obtain a generatrix direction vector (a) of the upper surface of the double-sided micro-cylindrical lens array (101) 1 ,b 1 ,c 1 )；
Step (3), the double-sided micro-cylindrical lens array (101) is rotated 180 degrees around the Y axis and then placed on a rotating table (105) around the Z axis, and the adjustment is carried out to enable the end face ABCD of the double-sided micro-cylindrical lens array (101) to be parallel to the X axis;
step (4) of testing the appearance of a certain cylindrical area on the lower surface of the double-sided micro cylindrical lens array (101), and performing cylindrical fitting to obtain a generatrix direction vector (a) of the lower surface of the double-sided micro cylindrical lens array (101) 2 ,b 2 ,c 2 )；
Step (5), calculating an included angle theta between a generatrix direction vector of the upper surface cylindrical surface and a generatrix direction vector of the lower surface cylindrical surface of the double-sided micro cylindrical lens array (101) as shown in the following formula,
when the double-sided micro-cylindrical lens array (101) is placed on a rotating table (105) around a Z axis and adjusted so that the end face ABCD of the double-sided micro-cylindrical lens array (101) is parallel to an X axis, the method adopted is as follows:
(11) Placing a double-sided micro-cylindrical lens array (101) on a rotating table (105) around a Z axis, wherein the end face ABCD of the double-sided micro-cylindrical lens array (101) is approximately vertical to the X axis, a first small ball (102) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101), and a second small ball (103) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101);
(12) The appearance of the top area of the first small ball (102) is tested, spherical fitting is carried out to obtain the center coordinates of the first small ball (102), the computer (107) controls the two-dimensional translation table (104) along the X axis and the Y axis and the Z axis to be in height contact with the measuring equipment (106), the top area of the first small ball (102) is tested, and data points (X and Y) are obtained 1i ,y 1i ,z 1i ),i＝1,2,…,N 1 ，N 1 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 1 At a minimum, the coordinates (x) of the center of the first sphere (102) are obtained 10 ,y 10 ,z 10 ) R isThe radius of curvature of the pellet, as shown in the following formula,
(13) Testing the appearance of the top area of the second small ball (103), fitting to obtain the center coordinates of the second small ball (103), controlling a two-dimensional translation table (104) along an X axis and a Y axis and a Z axis to contact with a measuring device (106) in height, testing the top area of the second small ball (103), and obtaining data points (X and Y) 2j ,y 2j ,z 2j ),j＝1,2,…,N 2 ，N 2 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 2 At minimum, the coordinates (x) of the center of the second ball (103) are obtained 20 ,y 20 ,z 20 ) R is the curvature radius of the small ball, as shown in the following formula,
(14) Calculating to obtain the included angle alpha between the connecting line of the sphere center of the first small ball (102) and the sphere center of the second small ball (103) and the X axis, wherein the calculation method is as follows,
(15) And the computer (107) controls the rotating table (105) to rotate alpha around the Z axis, so that the connecting line of the spherical centers of the first small ball (102) and the second small ball (103) is parallel to the X axis, namely the end face ABCD of the double-sided micro-cylindrical lens array (101) is parallel to the X axis.
2. The detection method according to claim 1, characterized in that when obtaining the generatrix direction vector of the upper surface cylindrical surface of the double-sided micro-cylindrical lens array (101), the following method is adopted: the computer (107) controls the two-dimensional translation stage (104) along the X-axis and the Y-axis and the Z-axis height contact measuring equipment (106) to measureA certain cylindrical area on the upper surface of the double-sided micro cylindrical lens array (101) is tried to obtain a data point (x) 3k ,y 3k ,z 3k ),k＝1,2,…,N 3 ，N 3 For the total number of test points, a least square algorithm is used for cylindrical surface fitting, so that the fitting residual error epsilon 3 Minimum, obtaining a radius of curvature R 3 Cylindrical bus crossing point (x) 30 ,y 30 ,z 30 ) Direction vector (a) of cylindrical generatrix 1 ,b 1 ,c 1 ) As shown in the following formula,
wherein, a 1 2 +b 1 2 +c 1 2 ＝1。
3. The inspection method according to claim 1, wherein the double-sided micro-cylindrical lens array (101) is rotated 180 degrees around the Y-axis and then placed on a rotary stage (105) around the Z-axis, and the adjustment is made so that the end face ABCD of the double-sided micro-cylindrical lens array (101) is flat with the X-axis by the following method:
(31) The double-sided micro-cylindrical lens array (101) is rotated 180 degrees around a Y axis and then placed on a rotating table (105) around a Z axis, the end face ABCD of the double-sided micro-cylindrical lens array (101) is approximately vertical to the X axis, a first small ball (102) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101), and a second small ball (103) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101);
(32) The appearance of the top area of the first small ball (102) is tested, spherical fitting is carried out to obtain the center coordinates of the first small ball (102), the computer (107) controls the two-dimensional translation table (104) along the X axis and the Y axis and the Z axis to be in height contact with the measuring equipment (106), the top area of the first small ball (102) is tested, and data points (X and Y) are obtained 4l ,y 4l ,z 4l ),l＝1,2,…,N 4 ，N 4 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 4 At a minimum, the coordinates (x) of the sphere center of the first small sphere (102) are obtained 40 ,y 40 ,z 40 ) And R is the curvature radius of the small ball and is shown as the following formula:
(33) Testing the appearance of the top area of the second small ball (103), fitting to obtain the center coordinates of the second small ball (103), controlling a two-dimensional translation table (104) along an X axis and a Y axis and a Z axis to contact with a measuring device (106) in height, testing the top area of the second small ball (103), and obtaining data points (X and Y) 5m ,y 5m ,z 5m ),j＝1,2,…,N 5 ，N 5 For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon 5 At minimum, the coordinates (x) of the center of the second ball (103) are obtained 50 ,y 50 ,z 50 ) The radius of curvature of the pellet is shown as follows,
(34) Calculating to obtain the included angle beta between the connecting line of the sphere center of the first small ball (102) and the sphere center of the second small ball (103) and the X axis, wherein the calculation method is as follows,
(35) And the computer (107) controls the rotating platform (105) to rotate-beta around the Z axis, so that the connecting line of the spherical centers of the first small ball (102) and the second small ball (103) is parallel to the X axis, namely the end face ABCE of the double-sided micro-cylindrical lens array (101) is parallel to the X axis.
4. The detection method according to claim 1, wherein when obtaining the generatrix direction vector of the lower surface cylindrical surface of the double-sided micro-cylindrical lens array (101), the following method is adopted: meterA computer (107) controls a two-dimensional translation table (104) along an X axis and a Y axis and a Z axis direction height contact measuring device (106), a certain cylindrical area of the upper surface of the double-sided micro-cylindrical lens array (101) is tested, and a data point (X) is obtained 6n ,y 6n ,z 6n ),n＝1,2,…,N 6 ，N 6 Performing cylindrical surface fitting for the total number of the test points by using a least square algorithm to ensure that a fitting residual error epsilon 6 Minimum, obtaining a radius of curvature R 6 Cylindrical bus crossing point (x) 60 ,y 60 ,z 60 ) Direction vector (a) of cylindrical generatrix 2 ,b 2 ,c 2 ) As shown in the following formula:
wherein, a 2 2 +b 2 2 +c 2 2 ＝1。
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