CN113960812B - Integrated optical phased array and control method thereof - Google Patents

Integrated optical phased array and control method thereof Download PDF

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Publication number
CN113960812B
CN113960812B CN202010705016.8A CN202010705016A CN113960812B CN 113960812 B CN113960812 B CN 113960812B CN 202010705016 A CN202010705016 A CN 202010705016A CN 113960812 B CN113960812 B CN 113960812B
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light
waveguide
phase
phased array
optical phased
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CN113960812A (en
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白雅文
林天华
储涛
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Zhejiang University ZJU
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Zhejiang University ZJU
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Priority to PCT/CN2020/125444 priority patent/WO2022016734A1/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102Constructional details, not otherwise provided for in this subclass
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/2676Optically controlled phased array

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The application provides an integrated optical phased array and a control method thereof, which are applied to the field of optical phased arrays, wherein the integrated optical phased array comprises: the device comprises a laser, a beam splitter, a phase shifter, a dense waveguide, a slab waveguide and a curved grating; the laser is used for generating a light source and inputting the light source into the beam splitter to obtain a plurality of beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after the phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beams after phase modulation into the slab waveguide, and the slab waveguide is used for performing light deflection after coupling a plurality of light beams into one beam and emitting the light beams after light deflection through the bending grating. Therefore, the problem that crosstalk is generated due to poor mode field constraint of the grating antenna of the conventional optical phased array is solved, and the problem that the size is large due to the fact that the arrangement distance of grating antenna units of the conventional optical phased array cannot be reduced to one half of the wavelength is solved.

Description

Integrated optical phased array and control method thereof
Technical Field
The application relates to the technical field of optical phased arrays, in particular to an integrated optical phased array and a control method thereof.
Background
In the related art, as shown in fig. 1, a beam splitter is used to split a laser beam into a plurality of beams, each beam is subjected to phase modulation with a specific phase shift, and then the beam is emitted through an optical antenna, so that the deflection or shaping of the laser beam is realized in space.
Therefore, it can be seen that in a silicon-based optoelectronic integrated chip, due to the limitation of optical diffraction and waveguide structure, it is difficult to reduce the arrangement interval of the grating antenna units to one half of the wavelength, in order to avoid the occurrence of redundant grating lobes, the Gao Jieshan lobes need to be suppressed by the non-uniform arrangement of the array to achieve the effect of only one grating lobe output, which results in larger device size, and due to the limitation of the grating antenna on the mode field constraint, the crosstalk of light transmitted in the grating antenna can not be optimized continuously to a certain extent, which is higher than the crosstalk transmitted in the waveguide.
Disclosure of Invention
The present application aims to solve, at least to some extent, one of the technical problems in the related art.
Therefore, an object of the present application is to provide an integrated optical phased array, which realizes on-chip optical rotation, solves the problem that the existing optical phased array generates crosstalk due to poor mode field constraint of the grating antenna, and can reduce the size of the device, and solves the problem that the spacing between the existing optical phased array grating antenna units cannot be reduced to one half of the wavelength, so that the size is larger.
Another object of the present application is to propose a control method applying an integrated optical phased array.
To achieve the above object, an embodiment of the present application provides an integrated optical phased array, including: the device comprises a laser, a beam splitter, a phase shifter, a dense waveguide, a slab waveguide and a curved grating; the laser is used for generating a light source and inputting the light source into the beam splitter to obtain multiple beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light subjected to the phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beams after phase modulation into the slab waveguide, and the slab waveguide is used for carrying out optical deflection on each light beam and emitting each light beam after optical deflection through the curved grating.
The integrated optical phased array is used for generating a light source through a laser and inputting the light source into a beam splitter to obtain multiple beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after the phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beams after phase modulation into the slab waveguide, and the slab waveguide is used for performing light deflection after coupling a plurality of light beams into one beam and emitting the light beams after light deflection through the bending grating. Therefore, the problems that the crosstalk is generated due to poor mode field constraint of the grating antenna of the conventional optical phased array and the size is large due to the fact that the arrangement distance of the grating antenna units of the conventional optical phased array cannot be reduced to one half of the wavelength are solved, and the purposes of on-chip optical rotation and device size reduction are achieved.
In addition, the integrated optical phased array according to the above embodiments of the present application may further have the following additional technical features:
further, in one embodiment of the present application, the beam splitter is a 1 x 2 multimode interference beam splitter cascade or star coupler.
Further, in an embodiment of the present application, the phase shifter is a thermo-optic phase shifter or an electro-optic phase shifter.
Further, in one embodiment of the present application, the phase shifter is configured to perform phase modulation on each beam of light, and includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:wherein,x i =id;
where λ is the wavelength, d is the adjacent waveguide, i is the waveguide sequence (i=0, 1, 2.).
Further, in one embodiment of the present application, the dense waveguide uses a sinusoidal spatial modulation based waveguide array structure.
Further, in one embodiment of the present application, each light beam is emitted from the dense waveguide, and the slab waveguide has a transmission field of:
where En is the magnitude of the field strength, r n Is the distance of the monitoring point from the transmitting point,is the phase factor, ψ, generated during propagation n In (theta, phi) is the far-field direction function of the slab waveguide for the additional phase; calculating the phase shift arm attachment by the above formula when the light deflection angle is θPhase ψn, beam deflection.
Further, in one embodiment of the present application, when no phase shift is added,
wherein lambda is the operating wavelength, d 0 For array element interval, when the order m is not equal to 0,
to achieve the above object, an embodiment of a second aspect of the present application provides a control method for applying an integrated optical phased array, including: acquiring a light source, and splitting the light source to obtain a plurality of beams of light; phase modulating each of the plurality of beams of light; coupling each beam of light subjected to phase modulation into a slab waveguide through a dense waveguide; the slab waveguide is used for carrying out light deflection on each beam of light and emitting each beam of light after light deflection through the curved grating.
According to the control method for the application of the integrated optical phased array, the light source is obtained, and the light source is subjected to beam splitting treatment to obtain multiple beams of light; phase modulating each of the plurality of beams of light; coupling each beam of light subjected to phase modulation into a slab waveguide through a dense waveguide; the slab waveguide is used for optically deflecting the coupled light beam and emitting the light beam after the optical deflection through the curved grating. Thereby, the purpose of on-chip optical rotation and reduction of the device size is achieved.
In addition, the control method for applying the integrated optical phased array according to the embodiment of the application may further have the following additional technical features:
further, in an embodiment of the present application, the phase modulating each of the plurality of beams of light includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:wherein,x i =id;
where λ is the wavelength, d is the adjacent waveguide, i is the waveguide sequence (i=0, 1, 2.).
Further, in one embodiment of the present application, the slab waveguide is configured to optically deflect each beam of light, and includes:
each light beam is emitted from the dense waveguide, and the slab waveguide has a transmission field of:
where En is the magnitude of the field strength, r n Is the distance of the monitoring point from the transmitting point,is the phase factor, ψ, generated during propagation n In (theta, phi) is the far-field direction function of the slab waveguide for the additional phase; when the light deflection angle is θ, the additional phase ψn of the phase shift arm is calculated by the above formula, and the light beam deflection is performed.
Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a prior art optical phased array in accordance with an embodiment of the present application;
FIG. 2 is a diagram illustrating an example structure of an integrated optical phased array according to an embodiment of the application;
FIG. 3 is a schematic diagram of an integrated optical phased array on-chip without crosstalk according to an embodiment of the present application;
FIG. 4 is a simulation diagram of an optical phased array implementation process according to an embodiment of the present application;
fig. 5 is a flow chart of a control method for applying an integrated optical phased array according to an embodiment of the present application.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and intended for the purpose of explaining the present application and are not to be construed as limiting the present application.
An integrated optical phased array and a control method thereof according to an embodiment of the present application are described below with reference to the accompanying drawings.
Fig. 2 is a structural example diagram of an integrated optical phased array according to an embodiment of the application. As shown in fig. 2, the method for generating high-speed video by the integrated optical phased array according to a single motion blur image includes: a laser 1, a beam splitter 2, a phase shifter 3, a dense waveguide 4, a slab waveguide 5 and a curved grating 6.
Wherein a laser 1 is used to generate a light source and input the light source to a beam splitter 2 to obtain a plurality of beams of light.
The phase shifter 3 is used for phase modulating each beam of light, and each beam of light after the phase modulation is input to the dense waveguide 4.
The dense waveguide 4 is used for coupling the phase modulated light beam into the slab waveguide 5, and the slab waveguide 5 is used for coupling a plurality of light beams into one beam for light deflection and emitting the light beam after light deflection through the curved grating 6.
That is, the light emitted from the laser 1 is split into a plurality of beams by the beam splitter 2, coupled to the slab waveguide 5 by the dense waveguide 4, phase-modulated with a specific phase shift added to each beam of light on the dense waveguide 4, phase-deflected on the slab waveguide 5, and emitted by the curved grating, thereby realizing the deflection or shaping of the laser beam on the chip.
Therefore, the difference is that the existing optical phased array realizes light deflection in space, and the application realizes light beam deflection in a slab waveguide and on-chip light rotation. Due to the limitation of the constraint of the grating antenna on the mode field, the crosstalk of light in the waveguide is smaller than that of the grating antenna, so that the optical phased array for eliminating the crosstalk is realized. The existing optical phased array is oversized due to the space requirement of the grating antenna, and the size of the device is reduced through the use of the waveguide.
In the embodiment of the application, the beam splitter 2 realizes a function of uniform light splitting, and can be formed by cascading 1×2 multimode interference beam splitters or a star coupler.
In the embodiment of the present application, the phase shifter 3 is a thermo-optic phase shifter or an electro-optic phase shifter.
In the embodiment of the present application, the phase shifter 3 is configured to perform phase modulation on each beam of light, and includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:wherein,x i =id。
where λ is the wavelength, d is the adjacent waveguide, i is the waveguide sequence (i=0, 1, 2.).
In the embodiment of the application, the dense waveguide 4 uses a waveguide array structure based on sinusoidal spatial modulation, and it can be understood that the dense waveguide 4 couples the light beam after phase modulation into the slab waveguide 5, the bandwidth of the structure is large, the loss is low, the crosstalk can reach below-40 dB, the interval of the output waveguide array arrangement can be reduced to one half of the wavelength, the occurrence of grating lobes is avoided, and the problem of larger crosstalk caused by using grating antennas in the existing optical phased array is solved.
In the embodiment of the present application, the slab waveguide 5 is used for completing on-chip optical rotation, each beam is emitted from the dense waveguide 4, and a transmission field is formed in the slab waveguide 5:
where En is the magnitude of the field strength, r n Is the distance of the monitoring point from the transmitting point,is the phase factor, ψ, generated during propagation n In (theta, phi) is the far-field direction function of the slab waveguide for the additional phase; when the light deflection angle is θ, the additional phase ψn of the phase shift arm is calculated by the above formula, and the light beam deflection is performed.
In the embodiments of the present application, when no phase shift is added,
wherein lambda is the operating wavelength, d 0 For array element interval, when the order m is not equal to 0,
it will be appreciated that in silicon-based optoelectronic integrated chips, limited to optical diffraction and waveguide structures, it is difficult to reduce the pitch of the grating antenna element arrangement to one half of the wavelength, but in this application this problem is effectively avoided due to the design of the dense waveguide 4 and on-chip beam deflection is achieved.
In the embodiment of the application, the curved grating 6 can emit the light beam with the specific deflection angle from the flat plate area, so that the function of the optical phased array is realized.
For the sake of clarity of those skilled in the art, as shown in fig. 3, an integrated optical phased array on a chip without crosstalk includes, in order from left to right: a laser 1, a beam splitter 2, a phase shifter 3, a dense waveguide 4, a slab waveguide 5 and a curved grating 6.
Specifically, the beam splitter 2 may be configured by using a cascade of 1×2 multimode interference (MMI) beam splitters or a star coupler, so as to implement a function of uniform light splitting.
The phase shifter 3 may be an electro-optical phase shifter or a thermo-optical phase shifter, and may perform a function of modulating the phase of each beam and adding a specific phase shift.
Wherein, the dense waveguide 4 can use a waveguide array structure based on sinusoidal spatial modulation, and can realize the coupling of the light beam after phase modulation into the slab waveguide 5.
The slab waveguide 5 is used for finishing on-chip optical rotation, and after the phase difference is generated by the phase shift arm, the equal phase surface is not perpendicular to the waveguide direction any more, but has certain deflection, beams meeting the equal phase relation are coherent and constructive, and beams not meeting the equal phase condition are mutually offset, so that the direction of the beams is always perpendicular to the equal phase surface, and on-chip optical deflection is realized.
For example, as shown in fig. 4, the above process is verified by using mode solutions (multifunctional waveguide mode solving and propagation simulation software), an optical phased array with a scan angle of 60 ° at 1550nm is simulated, the slab waveguide material is SiON, and the simulation result is shown in fig. 3, and on-chip optical deflection can be realized through verification, where fig. 4 (a) is a-30 ° optical field diagram; fig. 4 (b) is a 30 ° light field diagram; FIG. 4 (c) is a-30 ° far field plot; fig. 4 (d) is a 30 ° far field plot.
Therefore, the curved grating 6 can emit the light beam with a specific deflection angle from the flat plate area, thereby realizing the function of deflecting the light beam of the optical phased array.
The integrated optical phased array is used for generating a light source through a laser and inputting the light source into a beam splitter to obtain multiple beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after the phase modulation into the dense waveguide; the dense waveguide is used for coupling the phase modulated light beam into the slab waveguide, and the slab waveguide is used for optically deflecting the coupled light beam and emitting the optically deflected light beam through the curved grating. Therefore, the problems that the crosstalk is generated due to poor mode field constraint of the grating antenna of the conventional optical phased array and the size is large due to the fact that the arrangement distance of the grating antenna units of the conventional optical phased array cannot be reduced to one half of the wavelength are solved, and the purposes of on-chip optical rotation and device size reduction are achieved.
In order to achieve the above embodiment, the present application further provides a control method for applying the integrated optical phased array.
Fig. 5 is a flow chart of a control method for applying an integrated optical phased array according to an embodiment of the present application.
As shown in fig. 5, the method includes:
step 101, acquiring a light source, and splitting the light source to obtain a plurality of beams of light.
Step 102, phase modulating each of the plurality of beams of light.
Step 103, coupling each beam of light subjected to phase modulation into the slab waveguide through the dense waveguide.
And 104, the slab waveguide is used for carrying out optical deflection on the coupled light beam and emitting the light beam after the optical deflection through the curved grating.
In an embodiment of the present application, phase modulating each of the plurality of light beams includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:wherein,x i =id;
where λ is the wavelength, d is the adjacent waveguide, i is the waveguide sequence (i=0, 1, 2.).
In an embodiment of the present application, a slab waveguide is configured to optically deflect each beam of light, including:
each beam is emitted from a dense waveguide, and a transmission field is formed in the slab waveguide:
where En is the magnitude of the field strength, r n Is the distance of the monitoring point from the transmitting point,is the phase factor, ψ, generated during propagation n In (theta, phi) is the far-field direction function of the slab waveguide for the additional phase; when the light deflection angle is θ, the additional phase ψn of the phase shift arm is calculated by the above formula, and the light beam deflection is performed.
When no phase shift is to be added,
wherein lambda is the operating wavelength, d 0 For array element interval, when the order m is not equal to 0,
it should be noted that the foregoing explanation of the embodiment of the integrated optical phased array is also applicable to the method of this embodiment, and will not be repeated here.
According to the high-speed video generating device, a light source is obtained, and the light source is subjected to beam splitting treatment to obtain multiple beams of light; phase modulating each of the plurality of beams of light; coupling each beam of light subjected to phase modulation into a slab waveguide through a dense waveguide; the slab waveguide is used for optically deflecting the coupled light beam and emitting the light beam after the optical deflection through the curved grating. Thereby, the purpose of on-chip optical rotation and reduction of the device size is achieved.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless explicitly defined otherwise.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and additional implementations are included within the scope of the preferred embodiment of the present application in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present application.
Logic and/or steps represented in the flowcharts or otherwise described herein, e.g., a ordered listing of executable instructions for implementing logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). In addition, the computer readable medium may even be paper or other suitable medium on which the program is printed, as the program may be electronically captured, via, for instance, optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory.
It is to be understood that portions of the present application may be implemented in hardware, software, firmware, or a combination thereof. In the above-described embodiments, the various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. As with the other embodiments, if implemented in hardware, may be implemented using any one or combination of the following techniques, as is well known in the art: discrete logic circuits having logic gates for implementing logic functions on data signals, application specific integrated circuits having suitable combinational logic gates, programmable Gate Arrays (PGAs), field Programmable Gate Arrays (FPGAs), and the like.
Those of ordinary skill in the art will appreciate that all or a portion of the steps carried out in the method of the above-described embodiments may be implemented by a program to instruct related hardware, where the program may be stored in a computer readable storage medium, and where the program, when executed, includes one or a combination of the steps of the method embodiments.
In addition, each functional unit in each embodiment of the present application may be integrated in one processing module, or each unit may exist alone physically, or two or more units may be integrated in one module. The integrated modules may be implemented in hardware or in software functional modules. The integrated modules may also be stored in a computer readable storage medium if implemented in the form of software functional modules and sold or used as a stand-alone product.
The above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, or the like. Although embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the application.

Claims (7)

1. An integrated optical phased array comprising: the device comprises a laser, a beam splitter, a phase shifter, a dense waveguide, a slab waveguide and a curved grating;
the laser is used for generating a light source and inputting the light source into the beam splitter to obtain multiple beams of light;
the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light subjected to the phase modulation into the dense waveguide;
the dense waveguide is used for coupling the light beams after phase modulation into the slab waveguide, and the slab waveguide is used for coupling a plurality of light beams into one beam for light deflection and transmitting the light beams after light deflection through the curved grating;
wherein each light beam is emitted from the dense waveguide, and a transmission field is formed in the slab waveguide:
where En is the magnitude of the field strength, r n Is the distance of the monitoring point from the transmitting point,is the phase factor, ψ, generated during propagation n In (theta, phi) is the far-field direction function of the slab waveguide for the additional phase; when the light deflection angle is theta, calculating the additional phase psi n of the phase shift arm through the formula, and performing light beam deflection; when no phase shift is to be added,
wherein lambda is the operating wavelength, d 0 For array element interval, when the order m is not equal to 0,
2. the integrated optical phased array of claim 1,
the beam splitter is formed by cascading 1X 2 multimode interference beam splitters or star couplers.
3. The integrated optical phased array of claim 1,
the phase shifter is a thermo-optic phase shifter or an electro-optic phase shifter.
4. The integrated optical phased array of claim 1,
the phase shifter is used for carrying out phase modulation on each beam of light, and comprises the following steps:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:wherein,x i =id;
where λ is the wavelength, d is the adjacent waveguide, i is the waveguide sequence (i=0, 1, 2.).
5. The integrated optical phased array of claim 1,
the dense waveguide uses a waveguide array structure based on sinusoidal spatial modulation.
6. A control method applying the integrated optical phased array of any of claims 1-5, comprising:
acquiring a light source, and splitting the light source to obtain a plurality of beams of light;
phase modulating each of the plurality of beams of light;
coupling each beam of light subjected to phase modulation into a slab waveguide through a dense waveguide;
the slab waveguide is used for carrying out optical deflection on the coupled light beams and emitting the light beams after the optical deflection through the curved grating;
wherein each light beam is emitted from the dense waveguide, and a transmission field is formed in the slab waveguide:
where En is the magnitude of the field strength, r n Is the distance of the monitoring point from the transmitting point,is the phase factor, ψ, generated during propagation n In (theta, phi) is the far-field direction function of the slab waveguide for the additional phase; when the light deflection angle is theta, calculating the additional phase psi n of the phase shift arm through the formula, and performing light beam deflection; when no phase shift is to be added,
wherein lambda is the operating wavelength, d 0 For array element interval, when the order m is not equal to 0,
7. the method of claim 6, wherein the phase modulating each of the plurality of beams of light comprises:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:wherein,
where λ is the wavelength, d is the adjacent waveguide, i is the waveguide sequence (i=0, 1, 2.).
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