CN113568095B - Wide-body surface grating, antenna system thereof and laser radar three-dimensional scanning system - Google Patents
Wide-body surface grating, antenna system thereof and laser radar three-dimensional scanning system Download PDFInfo
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- CN113568095B CN113568095B CN202111110617.5A CN202111110617A CN113568095B CN 113568095 B CN113568095 B CN 113568095B CN 202111110617 A CN202111110617 A CN 202111110617A CN 113568095 B CN113568095 B CN 113568095B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
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Abstract
The invention provides a wide surface grating and an antenna system and a laser radar three-dimensional scanning system thereof, wherein the wide surface grating comprises: one or two groups of waveguide arrays with a plurality of input waveguides, and a first grating part and a second grating part which are alternately arranged in sequence along the direction of the input waveguides; in a direction perpendicular to a plane of the wide-body surface grating, the thickness of the first grating part is smaller than that of the second grating part; when the number of the waveguide arrays is two, the two waveguide arrays are positioned at two opposite sides. The wide-body surface grating can shorten the distance between radiation points excited by the spaced input waveguide, relax the close-range requirement between the waveguides, avoid the interference of a plurality of gratings, has simple process, high tolerance and high lighting efficiency, can control the emergent direction of light wave signals while eliminating crosstalk, and can generate different radiation patterns by changing the period of the wide-body surface grating.
Description
Technical Field
The invention relates to the technical field of optical device design, in particular to a wide surface grating, an antenna system thereof and a laser radar three-dimensional scanning system.
Background
The optical phased array is one of the basic scanning modes of the laser radar, and is the main scanning mode adopted by the current integrated laser radar.
In order to avoid grating lobes in the radiation pattern, the antenna spacing in the optical phased array needs to be smaller than the average of the emission wavelengths; for example, taking a communication band around 1550nm as an example, the antenna pitch needs to be smaller than 775 nm; for on-chip phased arrays, it is desirable that the spacing between the grating and the preceding transmission waveguide be less than 775 nm.
However, this can cause crosstalk between different waveguides and different gratings, making it difficult to accurately control the amplitude and phase, which in turn affects the scan quality; at present, a specially designed waveguide array is adopted as a mode for eliminating crosstalk, but the technologies depend on the precision of the geometric shape of the waveguide and are difficult to be widely applied in practical production.
Disclosure of Invention
In view of the above, in order to solve the above problems, the present invention provides a wide surface grating and an antenna system thereof, and a laser radar three-dimensional scanning system, and the technical scheme is as follows:
a wide body surface grating, the wide body surface grating comprising:
one or two groups of waveguide arrays with a plurality of input waveguides, and a first grating part and a second grating part which are alternately arranged in sequence along the direction of the input waveguides;
in a direction perpendicular to a plane of the wide-body surface grating, the thickness of the first grating part is smaller than that of the second grating part;
when the number of the waveguide arrays is two, the two waveguide arrays are positioned at two opposite sides.
Preferably, in the above-described wide-body surface grating, a length of the wide-body surface grating in the input waveguide direction is 40 um;
in the direction perpendicular with input waveguide, the width of wide body surface grating is 10 um.
Preferably, in the above-described wide-body surface grating, a total length of adjacent first grating portions and second grating portions in the input waveguide direction is 0.8 um;
the length of the second grating portion in the input waveguide direction is 0.4 um.
Preferably, in the wide-body surface grating, in a direction perpendicular to a plane of the wide-body surface grating, the thickness of the second grating portion is 220 nm;
in the direction perpendicular to the plane of the wide surface grating, the thickness difference between the second grating part and the first grating part is 70 nm.
Preferably, in the above-described wide-volume surface grating, the width of each of the input waveguides is the same.
A wide body surface grating antenna system, comprising:
the broad surface grating of any of the above;
a phase shifter is arranged on part or all of the input waveguides;
the incident laser is input to the wide surface grating through the waveguide array to be emitted;
the phase shifter is used for changing the horizontal rotation angle emitted by the wide surface grating for scanning.
Preferably, in the above-described wide-body surface grating antenna system, the wide-body surface grating has a plurality of periods;
the period is changed with the period number according to a first preset rule, and the duty ratio of the second grating part is changed according to a second preset rule, so that the wide-body surface grating antenna system generates a strip radiation pattern.
A lidar three-dimensional scanning system, comprising: a plurality of said wide body surface grating antenna systems;
wherein each period of the wide body surface grating in each of the wide body surface grating antenna systems is the same;
and the periods of the wide surface grating in the wide surface grating antenna system are different.
Preferably, in the laser radar three-dimensional scanning system, a plurality of the wide surface grating antenna systems are sequentially arranged in a horizontal direction.
Preferably, in the laser radar three-dimensional scanning system, a plurality of the wide surface grating antenna systems are arranged in a two-dimensional array.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a wide surface grating, comprising: one or two groups of waveguide arrays with a plurality of input waveguides, and a first grating part and a second grating part which are alternately arranged in sequence along the direction of the input waveguides; in a direction perpendicular to a plane of the wide-body surface grating, the thickness of the first grating part is smaller than that of the second grating part; when the number of the waveguide arrays is two, the two waveguide arrays are positioned at two opposite sides. The wide-body surface grating can shorten the distance between radiation points excited by the spaced input waveguide, relax the close-range requirement between the waveguides, avoid the interference of a plurality of gratings, has simple process, high tolerance and high lighting efficiency, can control the emergent direction of light wave signals while eliminating crosstalk, and can generate different radiation patterns by changing the period of the wide-body surface grating.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic top view of a wide surface grating according to an embodiment of the present invention;
fig. 2 is a schematic cross-sectional structure diagram of a wide-volume surface grating according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a top view structure with exemplary parameters of a wide-volume surface grating according to an embodiment of the present invention;
fig. 4 is a schematic top view of another broad surface grating according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a scanning principle using combination of wide-body surface gratings according to an embodiment of the present invention;
FIG. 6 is a diagram illustrating a near field of radiation generated by a second waveguide alone input in FIG. 1, perpendicular to the direction of the input waveguide, from bottom to top, according to an embodiment of the present invention;
FIG. 7 is a diagram illustrating a radiated near field generated by a third waveguide independently input from the bottom to the top in the direction perpendicular to the input waveguide in FIG. 1 according to an embodiment of the present invention;
fig. 8 is a schematic diagram of far-field radiation after all input waveguides input the same-phase and same-amplitude optical field according to the embodiment of the present invention;
FIG. 9 is a far field diagram after phase rotation by an angle φ through a modulating waveguide array according to an embodiment of the present invention;
FIG. 10 is a graphical representation of the period of a possible periodic wide-volume surface grating as a function of the number of periods, according to an embodiment of the present invention;
fig. 11 is a schematic diagram illustrating a possible duty cycle variation of the second grating portion according to an embodiment of the present invention;
fig. 12 is a schematic diagram of far-field radiation after all input waveguides input an optical field with the same phase and amplitude according to another embodiment of the present invention;
FIG. 13 is a far field diagram after phase rotation by an angle φ through a modulating waveguide array in accordance with an embodiment of the present invention;
fig. 14 is a schematic layout diagram of a lidar three-dimensional scanning system according to an embodiment of the present invention;
FIG. 15 is a schematic layout diagram of another lidar scanning system according to an embodiment of the present invention;
fig. 16 is a graph of the variation of the exit pitch angle θ with the period of the wide-body surface grating according to the embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1, fig. 1 is a schematic top view of a wide surface grating according to an embodiment of the present invention; referring to fig. 2, fig. 2 is a schematic cross-sectional structural diagram of a wide-volume surface grating according to an embodiment of the present invention.
Referring to fig. 3, fig. 3 is a schematic diagram of a top view structure of a wide-volume surface grating with exemplary parameters according to an embodiment of the present invention.
The wide body surface grating includes:
one or two waveguide arrays 10 having a plurality of input waveguides, and first and second grating portions 11 and 12 alternately arranged in sequence along the input waveguide direction;
in a direction perpendicular to a plane in which the wide-body surface grating is located, the thickness of the first grating portion 11 is smaller than that of the second grating portion 12;
referring to fig. 4, fig. 4 is a schematic top view of another broad surface grating according to an embodiment of the present invention; when the number of the waveguide arrays 10 is two, the two waveguide arrays 10 are located on two opposite sides.
In the embodiment, the wide-body surface grating can shorten the distance between radiation points excited by the input waveguide with intervals, relax the requirement on the close distance between the waveguides, avoid the interference of a plurality of gratings, has simple process, high tolerance and high lighting efficiency, can control the emergent direction of the light wave signal while eliminating crosstalk, and can generate different radiation patterns by changing the period of the wide-body surface grating.
Based on the wide surface grating shown in fig. 4, the width of the wide surface grating is not changed and is bilaterally symmetric in the present application, and bidirectional transmission and reception can be performed, that is, signals in the original unidirectional transmission direction and the original direction can be transmitted simultaneously, or signals in the original unidirectional reception direction and the original direction can be received simultaneously.
The wide surface grating shown in fig. 4 of the present application can improve the utilization efficiency of the grating; the pitch angles which are symmetrical at two sides can be received at the same time, and the number of gratings required by the grating array is reduced; and secondly, the processing tolerance is small, as shown in the attached drawing-fig. 16 of the application specification, when the transmitting/receiving pitch angle is smaller than zero, the slope is larger, which means that the processing tolerance of the corresponding grating is smaller, and the grating structure with larger tolerance at the symmetrical pitch angle can be used for transmitting/receiving by using the bidirectional transmitting/receiving structure.
Further, a constant grating width facilitates mode field distribution, and a stronger confinement of the mode field by the grating walls relative to other structures (e.g., trapezoidal structures) facilitates control of the far field pattern, such as the strip far field radiation pattern shown in fig. 12.
Optionally, each of the input waveguides has the same width, and the input waveguides having the same width are convenient for phase control and only need to perform linear phase adjustment to perform scanning; and the input waveguides of uniform width are more process tolerant during processing.
Alternatively, in another embodiment of the present invention, as shown in figures 3 and 2,
in the input waveguide direction, the length of the wide body surface grating is 40 um.
In the direction perpendicular with input waveguide, the width of wide body surface grating is 10 um.
In the input waveguide direction, a total length of adjacent first and second grating portions is 0.8 um.
In this embodiment, the length of the wide-body surface grating in the direction of the input waveguide may be understood as the total period of the wide-body surface grating, and the adjacent first grating portion 11 and the second grating portion 12 constitute one period; illustratively, the period length of the wide-body surface grating in this embodiment is 0.8 um.
Alternatively, in another embodiment of the present invention, as shown in figures 3 and 2,
the thickness of the second grating portion in a direction perpendicular to the plane of the wide-body surface grating is 220 nm.
In the direction perpendicular to the plane of the wide surface grating, the thickness difference between the second grating part and the first grating part is 70 nm.
The length of the second grating portion in the input waveguide direction is 0.4 um.
In this embodiment, by properly setting the length of the second grating portion 12 in the direction of the input waveguide, the duty ratio of the second grating portion 12 in each period can be adjusted to adjust the optical characteristics of the wide-body surface grating.
Optionally, in another embodiment of the present invention, the wide-body surface grating has a plurality of periods;
each cycle is the same.
That is, each individual wide-volume surface grating, when having multiple periods, each period is the same, illustratively, each period is 0.8um in length.
Or, each cycle may be different.
That is, each individual wide-body surface grating has a plurality of periods, each period being different from each other, and illustratively, one period length is 0.8um, and the other period length may be 0.4um or 1.8um, etc.
Or, the periods of part of the periods are the same, and the periods of the rest of the periods are different.
That is to say, in the embodiment of the present invention, there is no strict limitation on the period of the wide surface grating, and the period can be flexibly set according to the actual situation to realize different optical functions.
Optionally, based on all the above embodiments of the present invention, in another embodiment of the present invention, there is further provided a wide-body surface grating antenna system, referring to fig. 5, and fig. 5 is a schematic diagram of a principle of scanning by combining wide-body surface gratings according to an embodiment of the present invention.
The wide body surface grating antenna system includes:
the wide body surface grating (Tx) described in the above embodiments; the wide body surface grating includes: the grating array comprises a waveguide array with a plurality of input waveguides, and a first grating part and a second grating part which are sequentially and alternately arranged along the direction of the input waveguides; in a direction perpendicular to a plane in which the wide-body surface grating is located, a thickness of the first grating portion is smaller than a thickness of the second grating portion.
In which, some or all of the input waveguides are provided with phase shifters, and fig. 5 illustrates an example in which some of the input waveguides are provided with phase shifters.
Specifically, incident laser light is input to the wide body surface grating (Tx) through the waveguide array to be emitted;
the phase shifter is used for changing the horizontal rotation angle of the wide body surface grating (Tx) emission for scanning.
In this embodiment, the wide body surface grating antenna system is composed of a plurality of input waveguides with phase shifters and a wide body surface grating (Tx). Laser is input into the wide surface grating (Tx) through the input waveguide for emission, the phase of an optical field in the input waveguide is linearly distributed by controlling the phase shifter, and the outgoing horizontal rotation angle phi of the wide surface grating (Tx) can be changed by controlling the coefficient of the linear distribution, so that scanning is performed.
Because different periods of the wide surface grating (Tx) correspond to different emergent pitch angles, the radiation pattern can be controlled by manufacturing the wide surface grating (Tx) with different periods or period changes.
Alternatively, based on the above-described embodiment of the present invention, as shown in fig. 3,
wherein the width of one of the input waveguides is 0.45um in a direction perpendicular to the input waveguides.
Optionally, in a direction perpendicular to the input waveguides, a distance between two adjacent input waveguides is 0.55um, that is, a sum of the distance between two adjacent input waveguides and a width of one output waveguide is 1 um.
Referring to fig. 6, fig. 6 is a diagram illustrating a radiated near field generated by a second waveguide separately input from the bottom to the top in fig. 1, the second waveguide being perpendicular to the direction of the input waveguide according to an embodiment of the present invention; referring to fig. 7, fig. 7 is a diagram illustrating a radiated near field generated by a third waveguide in fig. 1 separately input from bottom to top in a direction perpendicular to the direction of the input waveguide according to an embodiment of the present invention.
As can be seen in connection with fig. 6 and 7, the uniformity of the radiation patterns produced by the different input waveguide inputs and the mutual interference in the broad-body surface grating result in the cancellation of the grating lobes.
Referring to fig. 8, fig. 8 is a schematic diagram of far-field radiation after all input waveguides input the same-phase and same-amplitude optical fields according to an embodiment of the present invention. Referring to fig. 9, fig. 9 is a far field diagram after phase rotation by an angle phi through a modulation waveguide array according to an embodiment of the present invention.
As can be seen from fig. 8 and 9, the radiation pattern can be controlled to rotate by changing the linear phase distribution coefficient of the waveguide array; and no grating lobe is generated even if the input waveguide pitch is larger than a half wavelength.
Alternatively, in the above embodiments, it is mentioned that when each individual wide-body surface grating has a plurality of periods, the periods are different from each other, for example, one period length is 0.8um, and another period length may be 0.4um or 1.8um, etc.
Referring to fig. 10, fig. 10 is a graph illustrating the variation of the period of a possible period-varying wide-body surface grating according to the embodiment of the present invention; referring to fig. 11, fig. 11 is a schematic diagram illustrating a possible duty cycle variation curve of the second grating portion according to an embodiment of the present invention; referring to fig. 12, fig. 12 is a schematic diagram of far-field radiation after all input waveguides input the same-phase and same-amplitude optical fields according to another embodiment of the present invention.
As shown in fig. 10, the period varies with the number of periods according to a first preset rule; as shown in fig. 11, the duty ratio of the second grating part is changed according to a second preset rule.
As can be seen from fig. 10, 11 and 12, the period and/or duty ratio of the grating on the wide-body surface changes with the propagation direction of the optical field, so that a far-field radiation pattern with a stripe distribution can be realized.
Referring to fig. 13, fig. 13 is a far field diagram after phase rotation by an angle phi through a modulation waveguide array according to an embodiment of the present invention.
As can be seen from fig. 13, on the basis of realizing the strip-shaped distributed far-field radiation pattern, the rotation of the strip-shaped radiation pattern can be controlled by changing the linear phase distribution coefficient of the waveguide array.
Optionally, based on the foregoing embodiment of the present invention, in another embodiment of the present invention, a laser radar three-dimensional scanning system is further provided, referring to fig. 14, and fig. 14 is a schematic configuration diagram of the laser radar three-dimensional scanning system provided in the embodiment of the present invention; referring to fig. 15, fig. 15 is a schematic diagram of another arrangement of a lidar three-dimensional scanning system according to an embodiment of the present invention.
The laser radar three-dimensional scanning system comprises: a plurality of the wide body surface grating antenna systems of the above embodiments;
wherein each period of the wide body surface grating (Tx) in each of the wide body surface grating antenna systems is the same;
and, the period of the wide body surface grating (Tx) in the different wide body surface grating antenna systems is different.
In this embodiment, each period of the wide-body-surface grating (Tx) in each of the wide-body-surface-grating antenna systems is the same, that is, each period in each individual wide-body-surface grating (Tx) is the same, for example, a period of 0.8 um.
However, the periods of the wide-body surface gratings (Tx) in the wide-body surface grating antenna systems are different, that is, each period of the wide-body surface grating (Tx) in one of the wide-body surface grating antenna systems is 0.8um, and each period of the wide-body surface grating (Tx) in the other one of the wide-body surface grating antenna systems is 0.4um or 1.6um, etc.
As shown in fig. 14, a plurality of the wide surface grating antenna systems are arranged in sequence in the horizontal direction.
As shown in fig. 15, a plurality of the wide surface grating antenna systems are arranged in a two-dimensional array.
It should be noted that fig. 14 and 15 are only different in arrangement, and fig. 15 is more compact in arrangement compared with the arrangement of fig. 14.
Referring to fig. 16, fig. 16 is a graph showing variation of the exit pitch angle θ with the period of the wide-body surface grating according to the embodiment of the present invention.
Because different periods of the wide surface gratings (Tx) correspond to different pitch angles theta, when the wide surface grating scanning device is used, one of the wide surface gratings (Tx) is opened gradually, the phase shifter is controlled to scan a horizontal angle phi, then the wide surface grating (Tx) is closed, and the next wide surface grating (Tx) is opened, so that the pitch angle theta is changed, and the scanning of the whole detection area is realized.
As can be seen from the above description, the wide-body surface grating, the antenna system thereof, and the laser radar three-dimensional scanning system provided by the embodiment of the present invention increase the input waveguide distance without generating grating lobes, and eliminate the problem of input waveguide crosstalk; and the single wide surface grating replaces the traditional grating array, thus eliminating the error caused by the difference between the grating and the grating; and different radiation patterns can be realized by controlling the period of the wide-body surface grating.
The broad-body surface grating, the antenna system thereof and the laser radar three-dimensional scanning system provided by the invention are introduced in detail, a specific example is applied in the text to explain the principle and the implementation mode of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include or include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. A broad surface grating, comprising:
the grating array comprises one or two groups of waveguide arrays with a plurality of input waveguides, and a first grating part and a second grating part which are sequentially and alternately arranged along the direction of the input waveguides, wherein the width of each input waveguide is the same;
in a direction perpendicular to a plane of the wide-body surface grating, the thickness of the first grating part is smaller than that of the second grating part;
when the number of the waveguide arrays is two, the two waveguide arrays are positioned at two opposite sides.
2. The broad body surface grating of claim 1, wherein the length of the broad body surface grating in the input waveguiding direction is 40 um;
in the direction perpendicular with input waveguide, the width of wide body surface grating is 10 um.
3. The wide body surface grating of claim 1, wherein a total length of adjacent first and second grating portions in the input waveguide direction is 0.8 um;
the length of the second grating portion in the input waveguide direction is 0.4 um.
4. The broad surface grating as defined in claim 1, wherein the second grating portion has a thickness of 220nm in a direction perpendicular to the plane of the broad surface grating;
in the direction perpendicular to the plane of the wide surface grating, the thickness difference between the second grating part and the first grating part is 70 nm.
5. A wide body surface grating antenna system, comprising:
the broad surface grating of any one of claims 1-4;
a phase shifter is arranged on part or all of the input waveguides, and the width of each input waveguide is the same;
the incident laser is input to the wide surface grating through the waveguide array to be emitted;
the phase shifter is used for changing the horizontal rotation angle emitted by the wide surface grating for scanning.
6. The wide body surface grating antenna system of claim 5, wherein the wide body surface grating has a plurality of periods;
the period is changed with the period number according to a first preset rule, and the duty ratio of the second grating part is changed according to a second preset rule, so that the wide-body surface grating antenna system generates a strip radiation pattern.
7. A lidar three-dimensional scanning system, comprising: a plurality of the wide body surface grating antenna system of claim 5;
wherein each period of the wide body surface grating in each of the wide body surface grating antenna systems is the same;
and the periods of the wide surface grating in the wide surface grating antenna system are different.
8. The lidar three-dimensional scanning system of claim 7, wherein a plurality of the wide-body surface grating antenna systems are arranged in sequence along a horizontal direction.
9. The lidar three-dimensional scanning system of claim 7, wherein a plurality of the wide-volume surface grating antenna systems are arranged in a two-dimensional array.
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