CN113957391B - Vacuum coating device adopting core rod heating structure to uniformly distribute metal vapor - Google Patents
Vacuum coating device adopting core rod heating structure to uniformly distribute metal vapor Download PDFInfo
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- CN113957391B CN113957391B CN202010702098.0A CN202010702098A CN113957391B CN 113957391 B CN113957391 B CN 113957391B CN 202010702098 A CN202010702098 A CN 202010702098A CN 113957391 B CN113957391 B CN 113957391B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a vacuum coating device for uniformly distributing metal vapor by adopting a core rod heating structure, which comprises a crucible, wherein an induction heater for heating metal liquid in the crucible to form metal vapor is arranged on the outer side of the crucible, a flow distribution box body is connected to the top of the crucible through a vapor metal pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged at the top of the flow distribution box body, an induction coil is arranged on the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the vapor metal pipeline; the core rod is provided with a plurality of heating holes, resistance wires are arranged in the heating holes, and a plurality of impact grooves are formed in the surface of the core rod facing the steam metal pipeline; the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the position of the core rod. When the high-temperature steam is contacted with the low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a vacuum coating device for uniformly distributing metal vapor by adopting a core rod heating structure.
Background
Physical Vapor Deposition (PVD) refers to a process technique in which a metallization is heated under vacuum to deposit the metallization in a gaseous state onto a substrate to form a coating. Electric heating (resistive or inductive) and electron beam gun heating (EBPVD) are classified according to the heating mode. Vacuum coating has been widely used in the industries of electronics, glass, plastics, etc. as a surface modification and coating process, and the vacuum coating technology has the main advantages of environmental protection, good coating performance and variety of plateable substances. The key point of the vacuum coating technology for continuous strip steel is that the continuous coating production, large-area, high-speed and large-scale production are carried out, and since the last eighties of century, various large steel companies in the world have carried out a great deal of research on the technology, and along with the maturation of hot galvanizing and electrogalvanizing technologies, the technology is receiving unprecedented importance and is artificially an innovative surface coating technology.
The key point in the vacuum coating process is how to obtain a coating with uniform thickness through the arrangement of nozzles. The data currently disclosed abroad mainly comprise the following aspects:
1) Integral structure of evaporation crucible and flow distribution nozzle
European patent nos. BE1009321A6, BE1009317a61 disclose a crucible nozzle structure as in fig. 1, 2, respectively, in the structure of fig. 1, the upper part of the crucible 1 is provided with a cover 2, so that a nozzle structure is formed between the cover 2 and the furnace wall for direct injection of vaporized metal. In the structure of fig. 2, a filter plate 3 is added to the evaporation crucible, and then a slit nozzle at the top is used for the injection of the metal vapor. In the design process of the two device nozzles, one adopts a Laval nozzle structure, the other adopts a convergent nozzle, and the nozzle is sprayed laterally at one direction position and is sprayed vertically at the other direction position.
The related evaporating crucible and nozzle structure is also disclosed in the JPS59177370A, US4552092a patent, fig. 3 shows a crucible nozzle structure with automatic metal liquid replenishment, the nozzle 4 adopts a wider outlet, and a heater 5 is also arranged at the upper part of the crucible for heating steam and the like. In the structure of the crucible nozzle shown in fig. 4, the structure is unfolded by a side arc 6, the side spraying is performed, and a heating pipe 7 is also arranged on the outer side of the crucible wall for heating the wall surface.
2) Split structure of evaporation crucible and flow distribution nozzle
In patent WO2018/020311A1, a split type crucible nozzle structure is disclosed, as shown in fig. 5, in which a crucible is connected at the bottom with a molten metal supply tank 8, the upper part of which sends metal vapor to a tubular distributor and a front-end vapor nozzle through a split type pipe 9, and then the metal vapor is sprayed to a metal plate through the nozzle at a high speed.
In patent CN103249860a, a split type distributor and nozzle structure is disclosed, as shown in fig. 6, steam is sent into an upper horizontal pipe 10 through a pipe, and a porous nozzle is provided at the top of the horizontal pipe 10 to uniformly spray the metal steam on the surface of the metal plate.
In patent CN101175866a, a metal vapor flow distributor and a nozzle form are disclosed, as shown in fig. 7, the cross-section form of the nozzle is shown, wires are wound on the outside of a pipe 11 of the flow distributor to heat the pipe, the nozzle part is a square shell, as shown in fig. 8, an annular pipe made of another material is nested inside the square shell 12, the annular pipe is used for spraying metal vapor, and a vapor outlet form used by the nozzle is porous.
These patents refer to the specific form of the nozzle during the coating process, but they do not show that the coating process using these nozzles can be performed to a uniform extent, and the uniformity of the coating on the surface of the steel sheet has a critical factor for the subsequent use processes such as bending and stamping.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a vacuum coating device for uniformly distributing metal vapor by adopting a mandrel heating structure, wherein the mandrel heating structure is utilized to uniformly distribute the metal vapor, a stabilizing plate is utilized to secondarily distribute the metal vapor, the metal vapor is sprayed out from a coating nozzle, and finally, a uniform coating is formed on the surface of a steel plate.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the vacuum coating device comprises a crucible, wherein an induction heater for heating molten metal in the crucible to form the metal vapor is arranged on the outer side of the crucible, a flow distribution box body is connected to the top of the crucible through a vapor metal pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged at the top of the flow distribution box body, an induction coil is arranged on the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the vapor metal pipeline;
the core rod is provided with a plurality of heating holes, resistance wires are arranged in the heating holes, and a plurality of impact grooves are formed in the surface of the core rod facing the steam metal pipeline;
the inner wall of the flow distribution box body is provided with a buffer groove, and the buffer groove corresponds to the position of the core rod.
Preferably, the mandrel is in the shape of a circular, oval, trapezoid or rectangular column.
Preferably, the shape of the impact groove is any one and/or a plurality of combinations of circles, ovals, trapezoids or rectangles.
Preferably, the impact grooves are arranged in a continuous type arrangement and/or a discontinuous type arrangement.
Preferably, the depth of the impact groove, the distance between the edge of the single side of the core rod and the buffer groove, the depth of the buffer groove and the total power of the resistance wire are set as follows:
when the metal steam pressure in the steam metal pipeline is 50000-100000 Pa, the depth of the impact groove is 8-10 mm, the distance between the edge of the single side of the core rod and the buffer groove is 4-6 mm, the depth of the buffer groove is 5-6 mm, and the total power of the resistance wire is 15-20 KW;
when the metal steam pressure in the steam metal pipeline is 10000-50000 Pa, the depth of the impact groove is 5-8 mm, the distance between the edge of the single side of the core rod and the buffer groove is 3-4 mm, the depth of the buffer groove is 4-5 mm, and the total power of the resistance wire is 10-15 KW;
when the metal steam pressure in the steam metal pipeline is 1000-10000 Pa, the depth of the impact groove is 2-5 mm, the distance between the edge of the single side of the core rod and the buffer groove is 2-3 mm, the depth of the buffer groove is 3-4 mm, and the total power of the resistance wire is 5-10 KW.
Preferably, the voltage stabilizing plate is arranged into a porous structure, and the total pore area S of the voltage stabilizing plate Total area of pores Area S at the outlet position of the coating nozzle An outlet The ratio is more than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
Preferably, the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
Preferably, the pore trend on the pressure stabilizing plate is a straight line or a curve.
Preferably, the outlet of the coating nozzle is slit-type or porous, and the outlet area S of the coating nozzle An outlet A position S connected with the top of the crucible and the steam metal pipeline An inlet The ratio is more than or equal to 0.05 to 5, namely:
S an outlet /S An inlet ≥0.05～5。
Preferably, when the coating nozzle is arranged in a slit shape, the line shape of the coating nozzle is a straight line shape or a curve shape, and when the coating nozzle is arranged in a porous shape, the line shape of the coating nozzle is a rectangle, a circle or a trapezoid.
Preferably, the core rod is connected with the flow distribution box body in a threaded mode or an embedded mode.
According to the vacuum coating device adopting the core rod heating structure to uniformly distribute metal vapor, the metal vapor is obtained by melting and evaporating metal liquid through the induction heating crucible of the induction heater, the metal vapor enters the flow distribution box body through the vapor metal pipeline, the induction coil is arranged at the outer side of the flow distribution box body for heating, the core rod is arranged in the flow distribution box body, the core rod is fixed in the flow distribution box body in a threaded or inlaid mode, and the heating hole is formed in the core rod for introducing the resistance wire for heating. After the nozzle and the core rod are heated to the required temperature according to the temperature of metal vapor evaporation, the pressure regulating valve is opened, and the metal vapor enters the flow distribution box body and impacts the surface of the core rod. The surface of the core rod is provided with an impact groove for guiding metal vapor, and matched with the inside of the flow distribution box body for distributing the vertically-reached metal vapor evenly into the distribution cavity, the distribution cavity is internally provided with a voltage stabilizing plate for secondarily distributing the metal vapor entering the distribution cavity, and then the metal vapor is sprayed out of the coating nozzle and is contacted with the pretreated metal plate at a high speed to form uniform metal coating.
Drawings
FIG. 1 is a schematic illustration of European patent BE1009321A 6;
FIG. 2 is a schematic diagram of European patent BE1009317A 61;
FIG. 3 is a schematic diagram of patent JPS 59177370A;
fig. 4 is a schematic diagram of patent US4552092 a;
FIG. 5 is a schematic diagram of patent WO2018/020311A 1;
fig. 6 is a schematic diagram of patent CN103249860 a;
fig. 7 is a schematic diagram of patent CN101175866 a;
FIG. 8 is a schematic view of the square housing of FIG. 7;
FIG. 9 is a schematic view of a vacuum coating apparatus according to the present invention;
FIG. 10 is a schematic view of the depth of the impact groove, the distance between the edge of the single side of the core rod and the buffer groove, and the depth of the buffer groove in the vacuum coating device of the present invention;
FIG. 11 is a schematic diagram showing the classification of the parameter area in the vacuum coating apparatus of FIG. 9.
FIG. 12 is a schematic view of a vacuum coating apparatus of the present invention in which the impingement slots on the core rod are arranged in a discontinuous manner;
FIG. 13 is a schematic view showing the arrangement of the impact grooves on the core rod in a continuous arrangement in the vacuum coating apparatus of the present invention.
Detailed Description
The technical scheme of the invention is further described below with reference to the accompanying drawings and examples.
Referring to fig. 9, the vacuum coating device for uniformly distributing metal vapor by using a core rod heating structure provided by the invention comprises a crucible 13, wherein an induction heater 16 for heating a metal liquid 14 in the crucible 13 to form metal vapor 15 is arranged on the outer side of the crucible 13, a flow distribution box 18 is connected to the top of the crucible 13 through a vapor metal pipeline 17, a horizontal core rod 19 and a pressure stabilizing plate 20 are arranged in the flow distribution box 18, the core rod 19 is positioned below the pressure stabilizing plate 20, the core rod 19 is connected with the flow distribution box 18 in a threaded mode or an embedded mode, a coating nozzle 21 is arranged on the top of the flow distribution box 18, an induction coil 22 is arranged on the outer side of the flow distribution box 18, and a pressure regulating valve 23 is arranged on the vapor metal pipeline 17.
The inside of the core rod 19 is provided with a plurality of axial heating holes 24, resistance wires are arranged in the heating holes 24 and used for heating the core rod 19, and a plurality of impact grooves 25 are arranged on the surface of the core rod 19 facing the steam metal pipeline 17.
The mandrel 19 may be in the shape of a column, such as a circle, an ellipse, a trapezoid, or a rectangle, and the main function of the mandrel 19 is to buffer and distribute the metal vapor 15 entering the distribution box 18 from the vapor metal pipe 17, and then the metal vapor 15 flows along the surface of the mandrel 19.
As shown in fig. 12, the impingement slots 25 may be arranged in various shapes (such as circular, oval, trapezoid and/or rectangular shapes) in a discontinuous manner, and the impingement slots 25 greatly increase the roughness of the surface of the core rod 19 to some extent, thereby forming a gas "impingement pad" and providing a great buffering and friction effect during the impingement of the metal vapor 15 into the impingement slots 25.
As shown in fig. 13, the impact grooves 25 may be arranged continuously, and are mainly characterized by a structure that spreads from the center to the edge of the mandrel 19, and the impact grooves 25 may be linear or multi-fold or curved.
The inner wall of the flow distribution box 18 is provided with a buffer groove 26, and the buffer groove 26 corresponds to the position of the core rod 19.
The working flow of the vacuum coating device of the invention is as follows:
1) The metal block is melted into molten metal 14 in the crucible 13 under the action of the induction heater 16, and the molten metal 14 begins to vaporize under higher superheat degree and low pressure to gradually form metal vapor 15;
2) At the beginning, the pressure regulating valve 23 on the steam metal pipeline 17 connected with the crucible 13 is in a closed state, as the molten metal 14 is continuously vaporized, the metal steam 15 in the inner cavity of the crucible 13 is continuously increased, and when the pressure in the inner cavity of the crucible 13 reaches a certain value, the pressure regulating valve 23 is started to keep a certain pressure to flow out;
3) At this time, the induction heater 16 needs to be increased at the same time, so that the pressure reduced by the opening of the pressure regulating valve 23 is supplemented, and the power range of the induction heater 16 is adjusted, so that the pressure of the metal vapor 15 in the inner cavity of the crucible 13 is kept in a constant range;
4) After the pressure regulating valve 23 is opened, the metal vapor 15 flows forwards along the vapor metal pipeline 17, when entering the flow distribution box 18, the original high-speed pipeline air flow is subjected to resistance when passing through the core rod 19 due to the action of the core rod 19, and the air flow flows along the surface of the core rod 19;
5) The surface of the core rod 19 is provided with an impact groove 25 for distributing the air flow on the surface of the core rod 19 to a position far away from the main air flow, the impact groove 25 and the buffer groove 26 are used together to enable the uniform metal steam 15 to flow into the distribution cavity, the inside of the core rod 19 is provided with a heating hole 24 for placing a resistance wire for heating the core rod 19 in the working process so as not to enable the inflowing metal steam 15 to solidify, and the outside of the flow distribution box 18 is provided with an induction coil 22 for heating the whole flow distribution box 18 so as not to enable the metal steam 15 in the flow process to solidify;
6) A pressure stabilizing plate 20 is arranged in the distribution cavity and is used for carrying out secondary buffer distribution on the airflow of the metal vapor 15 entering the distribution cavity, and then the uniform metal vapor 15 uniformly flows out from a coating nozzle 21 at the top of the flow distribution box 18;
7) The metal vapor 15 flows out at a high speed due to the narrow outlet of the coating nozzle 21, and the moving pre-treated metal plate 27 is arranged above the metal vapor, so that the metal vapor 15 is quickly solidified when encountering the pre-treated metal plate 27 with a low temperature due to the high temperature of the metal vapor 15, and the metal coating 28 is formed.
The molten metal 14 may contain the following ranges: metals such as zinc, magnesium, aluminum, tin, nickel, copper, iron, and the like, and low melting point (below 2000 ℃) oxides of these elements.
The pretreated metal sheet 27 is cleaned by plasma and other devices before vacuum coating, and the preheating temperature reaches 80-300 ℃.
As shown in fig. 10 to 11, the relationship between the depth D1 of the impingement slot 25, the distance D2 between the edge of the single side of the core rod 19 and the buffer slot 26, the depth D3 of the buffer slot 26, and the total power setting of the resistance wire and the pressure of the metal vapor 15 is as follows:
when the pressure of the metal vapor 15 in the vapor metal pipeline 17 is 50000Pa to 100000Pa, the depth D1 of the impact groove 25 is 8mm to 10mm, the distance D2 between the edge of one side of the core rod 19 and the buffer groove 26 is 4mm to 6mm, the depth D3 of the buffer groove 26 is 5mm to 6mm, and the total power of the resistance wire is 15KW to 20KW;
when the pressure of the metal vapor 15 in the vapor metal pipeline 17 is 10000-50000 Pa, the depth D1 of the impact groove 25 is 5-8 mm, the distance D2 between the edge of the single side of the core rod 19 and the buffer groove 26 is 3-4 mm, the depth D3 of the buffer groove 26 is 4-5 mm, and the total power of the resistance wire is 10-15 KW;
when the pressure of the metal vapor 15 in the vapor metal pipeline 17 is 1000-10000 Pa, the depth D1 of the impact groove 25 is 2-5 mm, the distance D2 between the edge of the single side of the core rod 19 and the buffer groove 26 is 2-3 mm, the depth of the buffer groove 26 is 3-4 mm, and the total power of the resistance wire is 5-10 KW.
The pressure stabilizing plate 20 is arranged into a porous structure, and the total pore area S of the pressure stabilizing plate 20 Total area of pores Area S at the outlet position of the coating nozzle 21 An outlet The ratio is more than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
The hole pattern on the pressure stabilizing plate 20 is a round hole, a square hole or a triangular hole and other shapes.
The apertures in the stabilizing plate 20 may be oriented in various forms such as straight lines, curved lines, or a multi-layer structure.
The outlet of the coating nozzle 21 is arranged to be slit-shaped or porous, and the outlet position area S of the coating nozzle 21 An outlet Position S connected to the top of crucible 13 and to steam metal pipe 17 An inlet The ratio is more than or equal to 0.05 to 5, namely:
S an outlet /S An inlet ≥0.05～5。
When the coating nozzle 21 is provided in a slit shape, the line shape thereof is a straight line shape or a curved line shape, and when the coating nozzle 21 is provided in a porous shape, the line shape thereof is a rectangular shape, a circular shape, a trapezoid shape, or the like.
The coating nozzle 21 may be made of: graphite, ceramic or metal, and other materials that may be processed.
Examples
The surface of the pre-treatment metal plate 27 is steamed and galvanized, the width of the pre-treatment metal plate 27 is 1200mm, and after the pre-treatment metal plate 27 is cleaned and dried, the pre-treatment metal plate 27 is heated to 150 ℃. The crucible 13 is heated by the induction heater 16 to evaporate zinc, and the pressure of zinc vapor in the crucible 13 is controlled to 30000Pa by controlling power, and the pressure regulating valve 23 is in a closed state. When the gas pressure in the crucible 13 reaches 30000Pa, the pressure regulating valve 23 is opened, the metal vapor 15 enters the flow distribution box 18 through the vapor metal pipeline 17, and the core rod 19 and the pressure stabilizing plate 20 are arranged in the flow distribution box 18.
The core rod 19 is provided in a cylindrical shape, and the surface is provided with discontinuously arranged impact grooves 25, the depth of the impact grooves 25 is 6mm, and the impact grooves 25 are rectangular grooves as shown in fig. 12.
The depth of the buffer groove 26 in the flow distribution box 18 is 4mm, the distance from the edge of the core rod 19 to the inner wall of the buffer groove 26 is 3mm, and the total power of the resistance wire arrangement in the heating hole 24 on the core rod 19 is 12KW.
The voltage stabilizing plate 20 has a porous structure, S Total area of pores /S An outlet ＝2.5。
The working pressure in the coating nozzle 21 is 20000Pa, the coating nozzle 21 is made of graphite, the outlet of the coating nozzle 21 is slit-shaped and rectangular, wherein S An outlet /S An inlet ＝0.95。
It will be appreciated by persons skilled in the art that the above embodiments are provided for illustration only and not for limitation of the invention, and that variations and modifications of the above described embodiments are intended to fall within the scope of the claims of the invention as long as they fall within the true spirit of the invention.
Claims (9)
1. A vacuum coating device that adopts plug heating structure evenly distributed metal vapor for forming even cladding material on steel sheet surface, its characterized in that: the metal liquid heating device comprises a crucible, wherein an induction heater for heating molten metal in the crucible to form metal vapor is arranged on the outer side of the crucible, a flow distribution box body is connected to the top of the crucible through a vapor metal pipeline, a horizontal core rod and a pressure stabilizing plate are arranged in the flow distribution box body, the core rod is positioned below the pressure stabilizing plate, a coating nozzle is arranged at the top of the flow distribution box body, an induction coil is arranged on the outer side of the flow distribution box body, and a pressure regulating valve is arranged on the vapor metal pipeline;
the core rod is provided with a plurality of heating holes, resistance wires are arranged in the heating holes, and a plurality of impact grooves are formed in the surface of the core rod facing the steam metal pipeline;
a buffer groove is arranged on the inner wall of the flow distribution box body, the buffer groove corresponds to the position of the core rod,
the depth of the impact groove, the distance between the edge of the single side of the core rod and the buffer groove, the depth of the buffer groove and the total power of the resistance wire are set as follows:
when the metal steam pressure in the steam metal pipeline is 50000-100000 Pa, the depth of the impact groove is 8-10 mm, the distance between the edge of the single side of the core rod and the buffer groove is 4-6 mm, the depth of the buffer groove is 5-6 mm, and the total power of the resistance wire is 15-20 KW;
when the metal steam pressure in the steam metal pipeline is 10000-50000 Pa, the depth of the impact groove is 5-8 mm, the distance between the edge of the single side of the core rod and the buffer groove is 3-4 mm, the depth of the buffer groove is 4-5 mm, and the total power of the resistance wire is 10-15 KW;
when the metal vapor pressure in the vapor metal pipeline is 1000-10000 Pa, the depth of the impact groove is 2-5 mm, the distance between the edge of the single side of the core rod and the buffer groove is 2-3 mm, the depth of the buffer groove is 3-4 mm, the total power of the resistance wire is 5-10 KW,
the voltage stabilizing plate is arranged into a porous structure, and the total pore area S of the voltage stabilizing plate Total area of pores Area S at the outlet position of the coating nozzle An outlet The ratio is more than or equal to 0.1, namely:
S total area of pores /S An outlet ≥0.1。
2. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 1, wherein: the core rod is in a column shape of a circle, an ellipse, a trapezoid or a rectangle.
3. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 1, wherein: the shape of the impact groove is any one and/or a plurality of combinations of circles, ellipses, trapezoids or rectangles.
4. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as claimed in claim 3, wherein: the impact grooves are arranged in a continuous type or a discontinuous type.
5. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 1, wherein: the hole pattern on the pressure stabilizing plate is a round hole, a square hole or a triangular hole.
6. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 5, wherein: and the trend of the pore on the pressure stabilizing plate is a straight line or a curve.
7. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 1, wherein: the outlet of the coating nozzle is arranged to be slit-shaped or porous, and the outlet position area S of the coating nozzle An outlet Area S of the joint between the top of the crucible and the steam metal pipeline An inlet The ratio is more than or equal to 0.05 to 5, namely:
S an outlet /S An inlet ≥0.05～5。
8. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 7, wherein: when the coating nozzle is arranged in a slit shape, the line shape of the coating nozzle is linear or curved, and when the coating nozzle is arranged in a porous shape, the line shape of the coating nozzle is rectangular, circular or trapezoidal.
9. The vacuum coating apparatus for uniformly distributing metal vapor using a mandrel heating structure as set forth in claim 1, wherein: the core rod is connected with the flow distribution box body in a threaded mode or an embedded mode.
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| US4777908A (en) * | 1986-11-26 | 1988-10-18 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| BE1009321A6 (en) * | 1995-05-17 | 1997-02-04 | Centre Rech Metallurgique | Device for coating a galvanised steel strip |
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