CN113916834B - Stray light eliminating multidirectional monitoring laser scattering spectrum device - Google Patents
Stray light eliminating multidirectional monitoring laser scattering spectrum device Download PDFInfo
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- CN113916834B CN113916834B CN202111177839.9A CN202111177839A CN113916834B CN 113916834 B CN113916834 B CN 113916834B CN 202111177839 A CN202111177839 A CN 202111177839A CN 113916834 B CN113916834 B CN 113916834B
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- 238000001228 spectrum Methods 0.000 title claims abstract description 47
- 238000012544 monitoring process Methods 0.000 title claims abstract description 8
- 230000008033 biological extinction Effects 0.000 claims abstract description 13
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 238000000149 argon plasma sintering Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 239000005304 optical glass Substances 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 7
- 238000004458 analytical method Methods 0.000 abstract description 6
- 230000008030 elimination Effects 0.000 abstract description 5
- 238000003379 elimination reaction Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000003313 weakening effect Effects 0.000 abstract description 2
- 238000013508 migration Methods 0.000 description 4
- 230000005012 migration Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention discloses a stray light elimination multi-direction monitoring laser scattering spectrum device which comprises a light generation scattering spectrum vacuum ball, a vacuum ball fixing support, a horizontal moving platform and a stray light elimination system, wherein the laser generation scattering spectrum vacuum ball is fixed on the horizontal moving platform through the vacuum ball fixing support, the stray light elimination system comprises a view field light trap and a laser extinction device, the view field light trap is positioned in the vacuum ball and used for weakening stray light generated in the vacuum, and the laser extinction device is arranged at a laser inlet and a laser outlet of the light generation scattering spectrum vacuum ball and used for absorbing experimental tail light. The invention can effectively eliminate stray light of laser wavelength and avoid the influence of the stray light on the spectrum detection of the substance, thereby improving the accuracy of spectrum measurement and substance analysis.
Description
Technical Field
The invention belongs to the technical field of light scattering spectrum devices, and particularly relates to a stray light eliminating multidirectional monitoring laser scattering spectrum device.
Background
The spectrum detection technology is widely used for gas component measurement, impurity content detection, particle physical property measurement, plasma parameter measurement and the like. Stray Light (Stray Light): it is meant that the detector is doped with light that does not belong to the incident beam or outside the passband, in the light received at a given wavelength. Stray light can deform the absorption spectrum, directly affecting the accuracy of the analysis. The influence of the stray light on the analysis is changed along with the magnitude of the stray light, and the influence degree is different due to the magnitude of the absorbance value. The detection of different substance spectra is susceptible to stray light, in particular laser wavelength stray light.
Therefore, an urgent need exists in the art to provide a multi-directional laser scattering spectrum monitoring device capable of eliminating stray light.
Disclosure of Invention
In view of this, the invention provides a stray light elimination laser scattering spectrum device for multi-azimuth monitoring, which can effectively eliminate stray light of laser wavelengths and avoid the influence of the stray light on substance spectrum detection, thereby improving the accuracy of substance analysis.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a multidirectional monitoring laser scattering spectrometry device of stray light disappears, includes: the laser scattering spectrum vacuum ball is fixed on the horizontal moving platform through the vacuum ball fixing support, the stray light eliminating system comprises a view field light trap and a laser extinction device, the view field light trap is located inside the vacuum ball and used for weakening stray light generated inside vacuum, and the laser extinction device is placed at a laser inlet and a laser outlet of the light scattering spectrum vacuum ball and used for absorbing experimental tail light.
Furthermore, the light-generating scattering spectrum vacuum ball is provided with a vacuum air exhaust interface, is connected with a vacuum air exhaust pump, and is used for vacuumizing the light-generating scattering spectrum vacuum ball.
Furthermore, a multi-azimuth observation window and a laser inlet and outlet are arranged on the light-generated scattering spectrum vacuum ball, optical glass sealing windows with vacuum flanges are arranged on the multi-azimuth observation window and the laser inlet and outlet, an antireflection film is plated on glass of the optical glass sealing windows, and scattering signals at a plurality of horizontal and vertical reverse angles are observed and collected through the glass windows.
Furthermore, a vacuum barometer port and a gas barometer port are arranged on the light-generated scattering spectrum vacuum ball, the vacuum barometer port is used for installing a vacuum barometer, and the gas barometer port is used for installing a gas barometer.
Furthermore, the vacuum ball fixing support comprises two half-arc structures, the bottoms of the half-arc structures are fixed on the horizontal moving platform through bolts, arc openings of the two half-arc structures are opposite, and the light-generated scattering spectrum vacuum balls are placed on the two half-arc structures.
Further, horizontal migration platform includes square platform and removes the wheel, removes the wheel and installs in square platform bottom.
Furthermore, the laser extinction device is provided with a circular inlet, a two-stage small-angle V-shaped absorption structure is arranged inside the laser extinction device, and a small gap is formed between the first-stage V-shaped absorption structure and the second-stage V-shaped absorption structure.
Furthermore, the field-of-view optical traps are 45-degree angle grooves, are distributed in the light-generating scattering spectrum vacuum ball and are positioned at the laser inlet and the laser outlet.
The invention has the beneficial effects that:
the invention can effectively eliminate stray light of laser wavelength and avoid the influence of the stray light on the spectrum detection of the substance, thereby improving the signal-to-noise ratio of the system and the accuracy of substance analysis.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram of the present invention.
Fig. 2 is a schematic view of another aspect of the present invention.
Wherein, in the figure:
1-light-producing scattering spectrum vacuum ball; 2-vacuum ball fixing support; 3-a horizontal moving platform; 4-fixing the ring; 5-tightening the bolt; 6-vacuum pumping interface; 7-a multi-azimuth observation window; 8-laser access; 9-vacuum barometer port; 10-gas barometer port; 11-limiting plate; 12-a feed inlet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a stray light elimination multi-directional laser scattering spectrum monitoring device, which comprises: the light produces scattering spectrum vacuum ball 1, vacuum ball fixed bolster 2, horizontal migration platform 3 and stray light system that disappears, laser produces scattering spectrum vacuum ball 1 and is fixed in on horizontal migration platform 3 through vacuum ball fixed bolster 2, stray light system that disappears includes visual field light trap and laser extinction ware, the visual field light trap is located inside the light produces scattering spectrum vacuum ball 1 for weaken the inside stray light that produces in vacuum, the laser extinction ware is placed in the laser business turn over mouth department that the light produced scattering spectrum vacuum ball 1, be used for the tail light of the suction experiment.
In this embodiment, light produces scattering spectrum vacuum ball 1 includes two hemispheres that the opening is relative, and two hemisphere edges all are connected with solid fixed ring 4, the solid fixed ring laminating of two hemispheres to lock through tie bolt 5, thereby realize the leakproofness of light production scattering spectrum vacuum ball 1.
In this embodiment, the light-scattering-spectrum-generating vacuum ball 1 is provided with a vacuum pumping interface 6, connected to a vacuum pump, and configured to pump vacuum to the light-scattering-spectrum-generating vacuum ball 1.
In this embodiment, the light-scattering-spectrum-generating vacuum ball 1 is provided with a multi-directional observation window 7 and a laser inlet/outlet 8, the multi-directional observation window 7 and the laser inlet/outlet 8 are both provided with optical glass sealed windows with vacuum flanges, the glass of the optical glass sealed windows is plated with an antireflection film, and scattering signals at multiple angles in horizontal and vertical directions are observed and collected through the glass windows.
In this embodiment, the light-generating scattering spectrum vacuum ball 1 is provided with a vacuum barometer port 9 and a gas barometer port 10, the vacuum barometer port 9 is used for installing a vacuum barometer, and the gas barometer port 10 is used for installing a gas barometer and is used for measuring the vacuum degree and the gas pressure inside the light-generating scattering spectrum vacuum ball 1, so that the vacuum degree and the gas pressure inside the light-generating scattering spectrum vacuum ball 1 can be accurately controlled conveniently.
In this embodiment, vacuum ball fixed bolster 2 includes two half arc structures, and the bolt fastening is passed through on horizontal migration platform 3 to half arc structure bottom, and the nock of two half arc structures is relative, and light produces scattering spectrum vacuum ball 1 and places on two half arc structures, can improve the stability of whole monitoring laser scattering spectrum device structure.
In this embodiment, the horizontal moving platform 3 includes a square platform and moving wheels, and the moving wheels are installed at the bottom end of the square platform.
In this embodiment, 2 tops of vacuum ball fixed bolster are provided with limiting plate 11 for the card is died the vacuum ball and is avoided the spheroid to rock.
In this embodiment, the laser extinction device is provided with a circular inlet, a two-stage small-angle V-shaped absorption structure is arranged inside the laser extinction device, a small gap is formed between the first-stage V-shaped absorption structure and the second-stage V-shaped absorption structure, the metal surface for manufacturing the V-shaped absorption structure is polished, a laser beam enters the extinction device and is absorbed for many times to be exhausted, and basically no stray light leaks.
In this embodiment, the field optical traps are 45 degree angled grooves distributed inside the light scattering spectrum-generating vacuum spheres and located at the laser inlets and outlets.
In this embodiment, the light-scattering spectrum-generating vacuum ball 1 is provided with a feeding port 12.
The invention can effectively eliminate stray light of laser wavelength and avoid the influence of the stray light on the spectrum detection of the substance, thereby improving the accuracy of substance analysis.
In the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed in the embodiment corresponds to the method disclosed in the embodiment, so that the description is simple, and the relevant points can be referred to the description of the method part.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (5)
1. The utility model provides a multidirectional monitoring laser scattering spectrum device of stray light that disappears which characterized in that includes: the device comprises a light-generating scattering spectrum vacuum ball, a vacuum ball fixing support, a horizontal moving platform and a stray light eliminating system, wherein the laser-generating scattering spectrum vacuum ball is fixed on the horizontal moving platform through the vacuum ball fixing support;
the light-generated scattering spectrum vacuum ball is provided with a multi-directional observation window and a laser inlet and outlet, the multi-directional observation window and the laser inlet and outlet are respectively provided with an optical glass sealing window with a vacuum flange, the glass of the optical glass sealing window is plated with an anti-reflection film, and scattering signals at a plurality of angles in the horizontal direction and the vertical direction are observed and collected through the glass window;
the laser extinction device is provided with a circular inlet, a two-stage small-angle V-shaped absorption structure is arranged inside the laser extinction device, and a small gap is formed between the first-stage V-shaped absorption structure and the second-stage V-shaped absorption structure so as to absorb experimental tail light;
the field-of-view optical traps are 45-degree angle grooves, are distributed in the light-generating scattering spectrum vacuum ball and are positioned at the laser inlet and the laser outlet, so that stray light generated in the vacuum is weakened.
2. The apparatus as claimed in claim 1, wherein the light scattering spectrum vacuum bulb is provided with a vacuum pumping port connected to a vacuum pump for pumping vacuum to the light scattering spectrum vacuum bulb.
3. The apparatus as claimed in claim 1, wherein the light-generating scattering spectrum vacuum ball is provided with a vacuum pressure gauge port for mounting a vacuum pressure gauge and a gas pressure gauge port for mounting a gas pressure gauge.
4. The apparatus as claimed in claim 1, wherein the vacuum ball fixing bracket comprises two half-arc structures, the bottom of the half-arc structure is fixed on the horizontal moving platform by bolts, the arc openings of the two half-arc structures are opposite, and the light-generating scattering spectrum vacuum ball is placed on the two half-arc structures.
5. The apparatus as claimed in claim 1 or 4, wherein the horizontal moving platform comprises a square platform and a moving wheel, the moving wheel is mounted at a bottom end of the square platform.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111177839.9A CN113916834B (en) | 2021-10-09 | 2021-10-09 | Stray light eliminating multidirectional monitoring laser scattering spectrum device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111177839.9A CN113916834B (en) | 2021-10-09 | 2021-10-09 | Stray light eliminating multidirectional monitoring laser scattering spectrum device |
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| Publication Number | Publication Date |
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| CN113916834A CN113916834A (en) | 2022-01-11 |
| CN113916834B true CN113916834B (en) | 2022-11-29 |
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| CN1502524A (en) * | 2002-11-26 | 2004-06-09 | 中国科学院光电技术研究所 | Light shading cover for star sensor and design method thereof |
| CN201673116U (en) * | 2010-04-30 | 2010-12-15 | 中国科学技术大学 | Experiment device used for measuring spaying characteristics under condition of low atmospheric pressure |
| CN105466822B (en) * | 2016-02-06 | 2018-03-06 | 无锡迈通科学仪器有限公司 | Aerosol real-time monitor |
| CN107765413A (en) * | 2017-09-22 | 2018-03-06 | 中国科学院合肥物质科学研究院 | A kind of multiple reflections improve the optical system of short-pulse laser energy |
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Effective date of registration: 20240422 Address after: 230031 Building 2, Dongpu Island, Hefei City, Anhui Province Patentee after: Hefei Science Island Holdings Co.,Ltd. Country or region after: China Address before: 230000 No. 350 Shushan Lake Road, Hefei City, Anhui Province Patentee before: HEFEI INSTITUTES OF PHYSICAL SCIENCE, CHINESE ACADEMY OF SCIENCES Country or region before: China |