CN205209927U - Optic fibre dust particle sensor - Google Patents
Optic fibre dust particle sensor Download PDFInfo
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- CN205209927U CN205209927U CN201521100413.3U CN201521100413U CN205209927U CN 205209927 U CN205209927 U CN 205209927U CN 201521100413 U CN201521100413 U CN 201521100413U CN 205209927 U CN205209927 U CN 205209927U
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- optical fiber
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Abstract
The utility model provides an it is anti -interference, it is miniaturized, moreover, the steam generator is simple in structure, the SNR is high, particle diameter resolution ratio is high, sampling flow is big, long service life's optic fibre dust particle sensor, the inside incident optical fiber that is equipped with of sensor, emitting optical fiber, the optic fibre support, cylinder reflection beam expanding lens, the magazine, the collimater, the outgoing diaphragm, the absorbed layer, the light trapping, spherical reflecting mirror and miniature lens, the photosensitive area below is equipped with cylindrical lens, main lens hood, sub - lens hood, miniature lens and emitting optical fiber, five miniature lens and five emitting optical fiber constitute discrete sensitization part, the same moment can be divided and is appeared 1~3 particle, the sensor adopts optical fiber sensing and discrete sensitization, the inside great lens of partly volume of sensor have been left out, diaphragm and preamplification circuit, 50 power line interferences that sensor portion divides have been eliminated, the length that the illumination key light was restrainted has been shortened, the volume of sensor has been reduced, it restraints the degree of consistency in the photosensitive area to have strengthened the illumination key light, the erroneous judgement probability of dust particle diameter and dust amount has been reduced, the particle diameter resolution ratio of sensor and the sampling flow in the unit interval have been improved.
Description
Technical field
The present invention relates to a kind of dust particle sensor, particularly relate to a kind of optical fiber type, large discharge, high-resolution airborne particle counter, belong to air purity detection technique field.
Background technology
Modern industrial technology, especially precision machining industry, as camera production, chip manufacturing, liquid crystal display processing and automotive lacquer etc. all need the very high air ambient of a cleanliness factor, how to detect this air ambient and need relevant means of testing, at present, there are more product and patented claim in this respect both at home and abroad, but these products and patent ubiquity some shortcomings: one is that the volume of sensor is comparatively large, not Portable belt; Two is that sampling flow is limited, and sampling flow is generally all within 50L/min; Three is there is small probability erroneous judgement, and the particle less to two particle diameters entering photosensitive area simultaneously may judge into the larger particle of a particle diameter by accident, and this is because photo-sensitive cell is that an overall reason causes; Four is easily be subject to environment 50Hz Hz noise, and this is because sensor internal has amplifying circuit and cable to cause.
Summary of the invention
The object of the present invention is to provide a kind of miniaturization, structure be simple, signal to noise ratio (S/N ratio) is high, particle size resolution is high, sampling flow is large, long service life and anti-interference strong optical fiber dust particle sensor.
Technical matters to be solved by this invention is achieved through the following technical solutions: optical fiber dust particle sensor comprises incident optical 1, optical fiber jacket 2, outgoing optical fiber 3, optical fiber jacket 4, draft tube 5, sensor outer housing 6, escape pipe 7, structure of fiber_optic 8, incident light 9, main beam 10, cylindrical surface for reflection beam expanding lens 11, magazine 12, collimating apparatus 13, spherical reflector 14, reflected light 15, photosensitive area 16, outgoing diaphragm 17, absorption layer 18, light trapping 19, support 20, main light shield 21, sub-light shield 22, micro lens 23, lens carrier 24, base 25, cylindrical lens 26, lasing light emitter 27, signal-processing board 28 and optical fiber dust particle analyze main frame 29, lasing light emitter 27, incident optical 1, cylindrical surface for reflection beam expanding lens 11, collimating apparatus 13, main beam 10 and photosensitive area 16 form lighting mechanism, and draft tube 5 and escape pipe 7 form gas circuit mechanism, cylindrical lens 26, spherical reflector 14, reflected light 15, micro lens 23, outgoing optical fiber 3 and signal-processing board 28 form measuring mechanism, main beam 10 and gas circuit mechanism vertical form right angle scatter-type optical system mutually,
Sensor outer housing 6 inside is provided with incident optical 1, outgoing optical fiber 3, structure of fiber_optic 8, cylindrical surface for reflection beam expanding lens 11, magazine 12, collimating apparatus 13, outgoing diaphragm 17, absorption layer 18, light trapping 19, support 20, spherical reflector 14, cylindrical lens 26, main light shield 21, sub-light shield 22, micro lens 23, lens carrier 24 and base 25, sensor outer housing 6 outside is provided with optical fiber jacket 2, optical fiber jacket 4, lasing light emitter 27, signal-processing board 28 and optical fiber dust particle analyze main frame 29, main optical path working direction are followed successively by lasing light emitter 27, incident optical 1, incident light 9, cylindrical surface for reflection beam expanding lens 11, main beam 10, collimating apparatus 13, photosensitive area 16, outgoing diaphragm 17, light trapping 19, absorption layer 18, the scattered light that photosensitive area 16 sends divides two-way, under a road direction, focused on by cylindrical lens 26, in a road direction, focused on by spherical reflector 14, light after two-way focuses on is incident upon the end face of micro lens 23, after micro lens 23 converges, be transported to signal-processing board 28 by outgoing optical fiber 3,
The center line of main beam 10, the center line of reflected light 15, orthogonal between the center line three of draft tube 5 and escape pipe 7, draft tube 5 and escape pipe 7 are positioned at the both sides of photosensitive area 16, air-flow in draft tube 5 and escape pipe 7 gap and the intersection of main beam 10 form photosensitive area 16, the top of photosensitive area 16 is provided with a spherical reflector 14, below is provided with a cylindrical lens 26, a main light shield 21, four sub-light shields 22, five micro lens 23 and five outgoing optical fiber 3, five micro lens 23 and five outgoing optical fiber 3 form discrete photosensitive-member, outer setting lens carrier 24 of micro lens 23, lens carrier 24 is arranged on the top of base 25,
The outside of cylindrical surface for reflection beam expanding lens 11 is provided with a magazine 12, magazine 12, the inner side of sensor outer housing 6 and light trapping 19 is black frosting, the inside of light trapping 19 is provided with one deck absorption layer 18, absorption layer 18 is black albatross, the core diameter of incident optical 1 and outgoing optical fiber 3 is 200 μm, cladding outer diameter is 230 μm, for plastics step index fiber, the reflecting surface of cylindrical surface for reflection beam expanding lens 11 is mirror face stainless steel, the end face of micro lens 23 is rectangle sphere, bottom surface is circular flat, circular diameter and the core diameter of outgoing optical fiber 3 match, it is 200 μm, transition is had from rectangle to circle, there is one deck magnesium fluoride plated film the end face of micro lens 23 and bottom surface.
Owing to adopting technique scheme, the advantage that the present invention has and good effect are: sensor internal adopt Fibre Optical Sensor and discrete photosensitive after, eliminate the lens that a part of volume is larger, diaphragm and pre-amplification circuit, eliminate the 50Hz Hz noise of Sensor section, shorten the length of illumination main beam, decrease the scattering of main beam, reduce the volume of sensor, enhance the uniformity coefficient of illumination main beam in photosensitive area, reduce the probability of miscarriage of justice of dust particle diameter and dust amount, improve the particle size resolution of sensor and the sampling flow in the unit interval.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described, and the present invention has following 10 width accompanying drawings:
Fig. 1 is optical fiber dust particle sensor profile front elevation of the present invention,
Fig. 2 is this sensor profile upward view,
Fig. 3 is this sensor elevational cross-sectional view A-A,
Fig. 4 is the main index path of this sensor,
Fig. 5 is this sensor upwarding cutaway view B-B,
Fig. 6 is this sensor vertical view cutaway drawing C-C,
Fig. 7 is the front elevation of this sensor main light shield, sub-light shield, micro lens, lens carrier,
Fig. 8 is the front elevation of this sensor main light shield, sub-light shield, micro lens,
Fig. 9 is this sensor micro lens stereographic map,
Figure 10 is this sensing system figure.
1. incident optical, 2. optical fiber jacket, 3. outgoing optical fiber, 4. optical fiber jacket, 5. draft tube, 6. sensor outer housing, 7. escape pipe, 8. structure of fiber_optic, 9. incident light, 10. main beam, 11. cylindrical surface for reflection beam expanding lenss, 12. magazines, 13. collimating apparatuss, 14. spherical reflectors, 15. reflected light, 16. photosensitive areas, 17. outgoing diaphragms, 18. absorption layers, 19. light trappings, 20. supports, 21. main light shields, 22. sub-light shields, 23. micro lens, 24. lens carriers, 25. bases, 26. cylindrical lenses, 27. lasing light emitters, 28. signal-processing boards, 29. optical fiber dust particles analyze main frame.
Embodiment
1. according to Fig. 1 to Fig. 6, Figure 10, optical fiber dust particle sensor comprises incident optical 1, optical fiber jacket 2, outgoing optical fiber 3, optical fiber jacket 4, draft tube 5, sensor outer housing 6, escape pipe 7, structure of fiber_optic 8, incident light 9, main beam 10, cylindrical surface for reflection beam expanding lens 11, magazine 12, collimating apparatus 13, spherical reflector 14, reflected light 15, photosensitive area 16, outgoing diaphragm 17, absorption layer 18, light trapping 19, support 20, main light shield 21, sub-light shield 22, micro lens 23, lens carrier 24, base 25, cylindrical lens 26, lasing light emitter 27, signal-processing board 28 and optical fiber dust particle analyze main frame 29, lasing light emitter 27, incident optical 1, cylindrical surface for reflection beam expanding lens 11, collimating apparatus 13, main beam 10 and photosensitive area 16 form lighting mechanism, and draft tube 5 and escape pipe 7 form gas circuit mechanism, cylindrical lens 26, spherical reflector 14, reflected light 15, micro lens 23, outgoing optical fiber 3 and signal-processing board 28 form measuring mechanism, main beam 10 and gas circuit mechanism vertical form right angle scatter-type optical system mutually.
2., according to Fig. 3 and Figure 10, sensor outer housing 6 inside is provided with incident optical 1, outgoing optical fiber 3, structure of fiber_optic 8, cylindrical surface for reflection beam expanding lens 11, magazine 12, collimating apparatus 13, outgoing diaphragm 17, absorption layer 18, light trapping 19, support 20, spherical reflector 14, cylindrical lens 26, main light shield 21, sub-light shield 22, micro lens 23, lens carrier 24 and base 25, sensor outer housing 6 outside is provided with optical fiber jacket 2, optical fiber jacket 4, lasing light emitter 27, signal-processing board 28 and optical fiber dust particle analyze main frame 29, main optical path working direction are followed successively by lasing light emitter 27, incident optical 1, incident light 9, cylindrical surface for reflection beam expanding lens 11, main beam 10, collimating apparatus 13, photosensitive area 16, outgoing diaphragm 17, light trapping 19, absorption layer 18, the scattered light that photosensitive area 16 sends divides two-way, under a road direction, focused on by cylindrical lens 26, in a road direction, focused on by spherical reflector 14, light after two-way focuses on is incident upon the end face of micro lens 23, after micro lens 23 converges, be transported to signal-processing board 28 by outgoing optical fiber 3.
3. according to Fig. 4 to Fig. 6, the center line of main beam 10, the center line of reflected light 15, orthogonal between the center line three of draft tube 5 and escape pipe 7, draft tube 5 and escape pipe 7 are positioned at the both sides of photosensitive area 16, air-flow in draft tube 5 and escape pipe 7 gap and the intersection of main beam 10 form photosensitive area 16, the top of photosensitive area 16 is provided with a spherical reflector 14, below is provided with a cylindrical lens 26, a main light shield 21, four sub-light shields 22, five micro lens 23 and five outgoing optical fiber 3, according to Fig. 7 and Fig. 8, five micro lens 23 and five outgoing optical fiber 3 form discrete photosensitive-member, the outside of micro lens 23 is provided with lens carrier 24, lens carrier 24 is arranged on the top of base 25, the numbering of five micro lens 23 and five outgoing optical fiber 3 is followed successively by No. 1 from left to right, No. 2, No. 3, No. 4 and No. 5.
4. according to Fig. 3, the outside of cylindrical surface for reflection beam expanding lens 11 is provided with a magazine 12, the inner side of magazine 12, sensor outer housing 6 and light trapping 19 is black frosting, the inside of light trapping 19 is provided with one deck absorption layer 18, absorption layer 18 is black albatross, the core diameter of incident optical 1 and outgoing optical fiber 3 is 200 μm, cladding outer diameter is 230 μm, for plastics step index fiber, the reflecting surface of cylindrical surface for reflection beam expanding lens 11 is mirror face stainless steel, according to Fig. 9, the end face of micro lens 23 is rectangle sphere, is of a size of 1.5 × 0.7mm
2, bottom surface is circular flat, and circular diameter and the core diameter of outgoing optical fiber 3 match, and being 200 μm, from rectangle to circle, having transition, is highly 3mm, and there is one deck magnesium fluoride plated film the end face of micro lens 23 and bottom surface.
5. according to Fig. 3, magazine 12 is for eliminating incident light 9, main beam 10 and cylindrical surface for reflection beam expanding lens 11 outwards scattered light, magazine 12, black frosting inside sensor outer housing 6 and light trapping 19 is used for the scattered stray light in absorbing cavity, absorption layer 18 is for strengthening the extinction capability of light trapping 19, main light shield 21 is for stopping horizontal parasitic light, the effect of sub-light shield 22 is: when dust particle enters photosensitive area 16, the scattered light of dust particle is respectively under the focussing force of cylindrical lens 26 and spherical reflector 14, correctly be imaged on micro lens 23 end face of concrete numbering, prevent its scattered light from disturbing the micro lens 23 closed on.
6. according to Fig. 3, collimating apparatus 13 is arranged on magazine 12, and magazine 12 is arranged on structure of fiber_optic 8, and outgoing diaphragm 17 is arranged on light trapping 19, and light trapping 19 is arranged on support 20, and structure of fiber_optic 8 and support 20 are arranged on base 25.
7. according to Fig. 1, Fig. 5 and Fig. 6, draft tube 5 and the part of escape pipe 7 outside sensor outer housing 6 are tubular, and internal diameter is 1mm, and draft tube 5 and escape pipe 7 are rectangular flat mouth structure in the part near photosensitive area 16, and the inside dimension of mouth mouth is 0.5 × 1.5mm
2, draft tube 5 and escape pipe 7 are positioned at the both sides of photosensitive area 16, and at a distance of 5mm, main beam 10 is 0.2 × 0.6mm in the sectional dimension at photosensitive area 16 place
2, the air-flow in draft tube 5 and escape pipe 7 gap and the intersection of main beam 10 are photosensitive areas 16, and photosensitive area 16 is of a size of 0.2 × 0.5 × 1.5mm
3.
8. during working sensor, draft tube 5 connects dust particle sampling sample by flexible pipe, escape pipe 7 connects aspiration pump by flexible pipe, connect the power supply that optical fiber dust particle analyzes main frame 29, make whole system work, the rotating speed of adjustment aspiration pump, makes the gas flow in draft tube 5 and escape pipe 7 gap conform with the regulations requirement, lasing light emitter 27 is solid-state, semiconductor laser, power is 20mW, the laser produced from lasing light emitter 27 is incorporated into described sensor by incident optical 1, the incident light 9 that incident optical 1 sends is through 90 ° of cylindrical surface for reflection beam expanding lens 11 reflections and form main beam 10 after expanding, main beam 10 is after collimating apparatus 13 collimates, through photosensitive area 16 and outgoing diaphragm 17 laggard enter light trapping 19, after the absorption of absorption layer 18 and light trapping 19, eliminate the reflection of light and the generation of parasitic light, when dust particle passes through the photosensitive area 16 in draft tube 5 and escape pipe 7 gap, scattered light is produced under the irradiation of main beam 10, under scattered light one road direction, focused on by cylindrical lens 26, in one road direction, focused on by spherical reflector 14, light after two-way focuses on is imaged on the dust particle in photosensitive area on the end face of micro lens 23, cylindrical lens 26 is consistent with the imaging direction of spherical reflector 14, according to image-forming principle, the dust particle being positioned at photosensitive area 16 center position is imaged on No. 3 micro lens 23, the dust particle being positioned at photosensitive area 16 right positions is imaged on No. 1 micro lens 23, the dust particle being positioned at photosensitive area 16 leftward position is imaged on No. 5 micro lens 23, imaging direction is contrary with object direction, light after two imagings is transported to process and analysis in signal-processing board 28 by outgoing optical fiber 3 after micro lens 23 converges.
9. when the particle diameter of dust particle is less, the scattered light produced is less, and the light intensity that outgoing optical fiber 3 is collected is more weak; When the particle diameter of dust particle is larger, the scattered light produced is more, and the light intensity that outgoing optical fiber 3 is collected is larger; When two or three dust particles enter photosensitive area 16 simultaneously, if the position difference that dust particle is residing in photosensitive area 16, the scattered light then sent is photosensitive through the discrete of cylindrical lens 26 and the focusing of spherical reflector 14, the anti-tampering and micro lens 23 of sub-light shield 22, in photosensitive area 16, the dust particle of diverse location is just imaged on the micro lens 23 of different numbering, through the transmission of corresponding numbering outgoing optical fiber 3, processed by signal-processing board 27 and analyzed, judge diameter and the quantity of dust particle; If two optical fiber adjacent in five outgoing optical fiber 3 (such as No. 1 and No. 2) have signal simultaneously, just be judged as a particle, if non-conterminous two optical fiber (such as No. 2 and No. 4) have signal simultaneously, just be judged as YES two particles, if non-conterminous three outgoing optical fiber 3 have signal simultaneously, just be judged as YES three particles, because sensor can analyze 1 ~ 3 particle at synchronization, so the sampling flow of sensor obviously increases.
10. the physical dimension of this sensor main body is φ 60 × 90mm, and sampling flow is 80L/min.
Claims (3)
1. an optical fiber dust particle sensor, comprises incident optical (1), optical fiber jacket (2), outgoing optical fiber (3), optical fiber jacket (4), draft tube (5), sensor outer housing (6), escape pipe (7), structure of fiber_optic (8), incident light (9), main beam (10), cylindrical surface for reflection beam expanding lens (11), magazine (12), collimating apparatus (13), spherical reflector (14), reflected light (15), photosensitive area (16), outgoing diaphragm (17), absorption layer (18), light trapping (19), support (20), main light shield (21), sub-light shield (22), micro lens (23), lens carrier (24), base (25), cylindrical lens (26), lasing light emitter (27), signal-processing board (28) and optical fiber dust particle analyze main frame (29), lasing light emitter (27), incident optical (1), cylindrical surface for reflection beam expanding lens (11), collimating apparatus (13), main beam (10) and photosensitive area (16) form lighting mechanism, and draft tube (5) and escape pipe (7) form gas circuit mechanism, cylindrical lens (26), spherical reflector (14), reflected light (15), micro lens (23), outgoing optical fiber (3) and signal-processing board (28) form measuring mechanism, main beam (10) and gas circuit mechanism vertical form right angle scatter-type optical system mutually,
It is characterized in that: sensor outer housing (6) inside is provided with incident optical (1), outgoing optical fiber (3), structure of fiber_optic (8), cylindrical surface for reflection beam expanding lens (11), magazine (12), collimating apparatus (13), outgoing diaphragm (17), absorption layer (18), light trapping (19), support (20), spherical reflector (14), cylindrical lens (26), main light shield (21), sub-light shield (22), micro lens (23), lens carrier (24) and base (25), sensor outer housing (6) outside is provided with optical fiber jacket (2), optical fiber jacket (4), lasing light emitter (27), signal-processing board (28) and optical fiber dust particle analyze main frame (29), main optical path working direction are followed successively by lasing light emitter (27), incident optical (1), incident light (9), cylindrical surface for reflection beam expanding lens (11), main beam (10), collimating apparatus (13), photosensitive area (16), outgoing diaphragm (17), light trapping (19), absorption layer (18), the scattered light that photosensitive area (16) sends divides two-way, under one road direction, focused on by cylindrical lens (26), in one road direction, focused on by spherical reflector (14), the light after two-way focuses on is incident upon the end face of micro lens (23), after micro lens (23) converges, be transported to signal-processing board (28) by outgoing optical fiber (3).
2. a kind of optical fiber dust particle sensor according to claim 1, it is characterized in that: the center line of main beam (10), the center line of reflected light (15), orthogonal between the center line three of draft tube (5) and escape pipe (7), draft tube (5) and escape pipe (7) are positioned at the both sides of photosensitive area (16), air-flow in draft tube (5) and escape pipe (7) gap and the intersection of main beam (10) form photosensitive area (16), the top of photosensitive area (16) is provided with a spherical reflector (14), below is provided with a cylindrical lens (26), a main light shield (21), four sub-light shields (22), five micro lens (23) and five outgoing optical fiber (3), five micro lens (23) and five outgoing optical fiber (3) composition discrete photosensitive-members, outer setting lens carrier (24) of micro lens (23), lens carrier (24) is arranged on the top of base (25).
3. a kind of optical fiber dust particle sensor according to claim 1, it is characterized in that: the outside of cylindrical surface for reflection beam expanding lens (11) is provided with a magazine (12), magazine (12), the inner side of sensor outer housing (6) and light trapping (19) is black frosting, the inside of light trapping (19) is provided with one deck absorption layer (18), absorption layer (18) is black albatross, the core diameter of incident optical (1) and outgoing optical fiber (3) is 200 μm, cladding outer diameter is 230 μm, for plastics step index fiber, the reflecting surface of cylindrical surface for reflection beam expanding lens (11) is mirror face stainless steel, the end face of micro lens (23) is rectangle sphere, bottom surface is circular flat, circular diameter and the core diameter of outgoing optical fiber (3) match, it is 200 μm, transition is had from rectangle to circle, there is one deck magnesium fluoride plated film the end face of micro lens (23) and bottom surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521100413.3U CN205209927U (en) | 2015-12-18 | 2015-12-18 | Optic fibre dust particle sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521100413.3U CN205209927U (en) | 2015-12-18 | 2015-12-18 | Optic fibre dust particle sensor |
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| Publication Number | Publication Date |
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| CN205209927U true CN205209927U (en) | 2016-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521100413.3U Withdrawn - After Issue CN205209927U (en) | 2015-12-18 | 2015-12-18 | Optic fibre dust particle sensor |
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| CN (1) | CN205209927U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466821A (en) * | 2015-12-18 | 2016-04-06 | 盐城师范学院 | Optical fiber dust particle sensor |
-
2015
- 2015-12-18 CN CN201521100413.3U patent/CN205209927U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466821A (en) * | 2015-12-18 | 2016-04-06 | 盐城师范学院 | Optical fiber dust particle sensor |
| CN105466821B (en) * | 2015-12-18 | 2018-04-17 | 盐城师范学院 | Optical fiber dust particle sensor |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160504 Effective date of abandoning: 20180417 |
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| AV01 | Patent right actively abandoned |