CN113125368A - Aerosol extinction instrument and measurement method thereof - Google Patents
Aerosol extinction instrument and measurement method thereof Download PDFInfo
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- CN113125368A CN113125368A CN202110521422.3A CN202110521422A CN113125368A CN 113125368 A CN113125368 A CN 113125368A CN 202110521422 A CN202110521422 A CN 202110521422A CN 113125368 A CN113125368 A CN 113125368A
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Abstract
The invention relates to an aerosol extinction instrument and a measurement method thereof, wherein the aerosol extinction instrument comprises: the device comprises a first light beam output module, a first light beam receiving module, a second light beam output module, a second light beam receiving module and a butterfly-shaped ring-down cavity; four inclined cavity mirrors are arranged in the butterfly-shaped ring-down cavity; the first light beam output module is used for outputting a light beam with a first wavelength and outputting the light beam to the first cavity mirror; the second light beam output module is used for outputting a light beam with a second wavelength and outputting the light beam to the third cavity mirror; the included angle between the direction of the light beam with the first wavelength reflected to the first cavity mirror and the direction output to the first cavity mirror by the first light beam output module is not equal to 180 degrees, and the included angle between the direction of the light beam with the second wavelength reflected to the third cavity mirror and the direction output to the third cavity mirror by the second light beam output module is not equal to 180 degrees. According to the scheme, the aerosol extinction coefficients can be measured simultaneously aiming at two wavelengths under the condition of reducing the interference of the optical feedback effect.
Description
Technical Field
The invention relates to the technical field of optical instruments, in particular to an aerosol extinction meter and a measurement method thereof.
Background
The aerosol extinction instrument is used for measuring the extinction coefficient of the aerosol. Among them, aerosols are homogeneous and relatively stable mixtures of liquid or solid particles that can be suspended in air. Aerosols have an absorption and scattering effect on the light propagating therein, which combine to give extinction properties. The extinction coefficient is often used to characterize such extinction properties of aerosols.
The cavity ring-down spectroscopy technology is used as an absorption spectroscopy technology with high sensitivity and high precision and can be used for measuring the extinction coefficient of aerosol. In the related art, aerosol extinction meters based on cavity ring-down technology generally employ a linear ring-down cavity. However, the linear ring-down cavity can only measure the extinction coefficient of the aerosol for a single wavelength and is interfered by the optical feedback effect.
In view of the above, it is desirable to provide a new aerosol extinction device to solve the above-mentioned disadvantages.
Disclosure of Invention
The invention provides an aerosol extinction meter and a measurement method thereof, aiming at the defects in the prior art, and aiming at how to measure the extinction coefficients of aerosol at a plurality of wavelengths simultaneously under the condition of reducing the interference of an optical feedback effect.
In order to solve the above technical problem, the present invention provides an aerosol extinction instrument, including: the device comprises a first light beam output module, a first light beam receiving module, a second light beam output module, a second light beam receiving module and a butterfly-shaped ring-down cavity;
the butterfly-shaped ring-down cavity is internally provided with a first inclined cavity mirror, a second inclined cavity mirror, a third inclined cavity mirror and a fourth inclined cavity mirror; the first light beam output module is used for outputting a light beam with a first wavelength and outputting the light beam to the first cavity mirror; the second light beam output module is used for outputting a light beam with a second wavelength and outputting the light beam to the third cavity mirror;
the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are sequentially connected to form a quadrangle, and the quadrangle is used for transmitting the light beam with the first wavelength to be output to the first light beam receiving module and reflecting the light beam with the first wavelength to the first cavity mirror, and an included angle between the direction of the light beam with the first wavelength reflected to the first cavity mirror and the direction of the light beam output to the first cavity mirror by the first light beam output module is not equal to 180 degrees; and the second light beam receiving module is used for transmitting the light beam with the second wavelength to output the light beam to the second light beam receiving module, reflecting the light beam with the second wavelength to the third cavity mirror, wherein an included angle between the direction of the light beam with the second wavelength reflected to the third cavity mirror and the direction of the light beam output by the second light beam output module to the third cavity mirror is not equal to 180 degrees.
Preferably, the first and second electrodes are formed of a metal,
the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror form a light path sequence when the light beam with the first wavelength is reflected to the first cavity mirror: the first cavity mirror, the second cavity mirror, the fourth cavity mirror, the third cavity mirror to the first cavity mirror;
the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror form a light path sequence when the light beam with the second wavelength is reflected to the third cavity mirror: the third chamber mirror, the fourth chamber mirror, the second chamber mirror, the first chamber mirror to the third chamber mirror.
Preferably, the first and second electrodes are formed of a metal,
when the second cavity mirror reflects the light beam with the second wavelength to the first cavity mirror, the light beam with the second wavelength can penetrate through the first cavity mirror to be vertically incident into the first light beam output module;
when the fourth cavity mirror reflects the light beam with the first wavelength to the third cavity mirror, the light beam with the first wavelength can penetrate through the third cavity mirror to vertically enter the second light beam output module.
Preferably, the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are the same plano-concave reflecting mirror;
the concave surfaces of the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror face the interior of the butterfly-shaped ring-down cavity; and the concave surfaces are plated with high reflection films, and the reflectivities of the high reflection films to the light beams with the first wavelength and the light beams with the second wavelength are not less than a set reflection value.
Preferably, the quadrilateral is a rectangle.
Preferably, the distance between the two cavity mirrors on the shorter side of the rectangle is not more than a set distance;
the distance between the two cavity mirrors on the longer side of the rectangle and the distance between the two cavity mirrors on the shorter side of the rectangle satisfy the ABCD matrix theory.
Preferably, the first and second electrodes are formed of a metal,
further comprising: the first optical filter is positioned between the second cavity mirror and the first light beam receiving module and used for preventing the light beam with the second wavelength from entering the first light beam receiving module;
and/or the presence of a gas in the gas,
further comprising: and the second optical filter is positioned between the fourth cavity mirror and the second light beam receiving module and used for preventing the light beam with the first wavelength from entering the second light beam receiving module.
Preferably, the first and second electrodes are formed of a metal,
the distance between the first optical filter and the first light beam receiving module is not less than 2 mm;
and/or the presence of a gas in the gas,
the distance between the second optical filter and the second light beam receiving module is not less than 2 mm.
Preferably, further comprising: one of the three-way gas path interfaces is used for inputting gas into the butterfly-shaped ring-down cavity, and the other three-way gas path interface is used for outputting the gas in the butterfly-shaped ring-down cavity to the outside of the butterfly-shaped ring-down cavity;
the three-way gas path joint is of a Y-shaped structure, two vent holes of the three-way gas path joint extend into the butterfly-shaped ring-down cavity, and the third vent hole is positioned outside the butterfly-shaped ring-down cavity.
The embodiment of the invention also provides a method for measuring the extinction coefficient of the aerosol based on any one of the aerosol extinction meters, which comprises the following steps:
when zero gas is introduced into the butterfly-shaped ring-down cavity, acquiring a first time length required when the light intensity of the light beam received by the first light beam receiving module is attenuated to 1/e of a first set threshold value from the first set threshold value, and acquiring a second time length required when the light intensity of the light beam received by the second light beam receiving module is attenuated to 1/e of a second set threshold value from the second set threshold value;
when the aerosol is introduced into the butterfly ring-down cavity, acquiring a third time length required when the light intensity of the light beam received by the first light beam receiving module is attenuated to 1/e of the first set threshold value from the first set threshold value, and acquiring a fourth time length required when the light intensity of the light beam received by the second light beam receiving module is attenuated to 1/e of the second set threshold value from the second set threshold value;
calculating the extinction coefficient of the aerosol when the light beam is at the first wavelength according to the first time length and the third time length;
and calculating the extinction coefficient of the aerosol when the light beam has the second wavelength according to the second time length and the fourth time length.
The aerosol extinction instrument comprises two light beam output modules and two light beam receiving modules, wherein the two light beam output modules can emit light beams with different wavelengths, and the two light beam receiving modules respectively receive the light beams with the two different wavelengths, so that the aerosol extinction coefficient can be measured aiming at the two wavelengths simultaneously. In addition, the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are arranged in the butterfly-shaped ring-down cavity, the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are sequentially connected to form a quadrangle for reflecting the light beam with the first wavelength to the first cavity mirror, and an included angle between the direction of the light beam with the first wavelength reflected to the first cavity mirror and the direction output to the first cavity mirror by the first light beam output module is not equal to 180 degrees, so that the reflected light beam with the first wavelength cannot vertically enter the first light beam output module or cannot enter the first light beam output module, and the interference of the optical feedback effect on the first light beam output module can be reduced; in the same way, the interference of the optical feedback effect on the second light beam output module can be reduced. Therefore, the method and the device can realize the simultaneous measurement of the aerosol extinction coefficients aiming at the two wavelengths under the condition of reducing the interference of the optical feedback effect.
Drawings
Fig. 1 is a schematic structural diagram of an aerosol extinction instrument according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another aerosol extinction instrument provided by an embodiment of the invention;
FIG. 3 is a flow chart of a method for measuring an extinction coefficient of an aerosol according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a laser beam output by a laser according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of laser intensity detected by a photodetector according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the laser intensity detected by another photo detector provided in the embodiment of the present invention;
FIG. 7 is a schematic diagram of another laser output beam provided by an embodiment of the present invention;
FIG. 8 is a schematic diagram of laser intensity detected by another photo detector provided in the embodiments of the present invention;
FIG. 9 is a schematic diagram of laser intensity detected by another photo detector according to an embodiment of the present invention;
the reference numbers are as follows:
1-a first laser; 2-a first beam shaping module; 3-a first cavity mirror; 4-a second cavity mirror; 5-a first optical filter; 6-a first lens; 7-a first photodetector; 8-a second photodetector; 9-a second lens; 10-a second optical filter; 11-a fourth cavity mirror; 12-a third cavity mirror; 13-a second beam shaping module; 14-a second laser; 15-a type sleeve; 16/18-three-way gas circuit joint; 17-a butterfly ring down cavity; 19-adjusting the frame; 20-a universal sleeve; 21-B type sleeves; 22-a first beam output module; 23-a first beam receiving module; 24-a second beam output module; 25-second beam receiving module.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
As described above, in the related art, the aerosol extinction instrument based on the cavity ring-down technique includes a beam output module, a beam receiving module, and a linear ring-down cavity to perform measurement of the aerosol extinction coefficient for a single wavelength. The linear ring-down cavity is composed of two cavity mirrors (such as a cavity mirror A and a cavity mirror B), and the two cavity mirrors are vertically arranged. The light beam output by the light beam output module enters the linear ring-down cavity after passing through the cavity mirror A, and then passes through the cavity mirror B to enter the light beam receiving module. When the light beam enters the ring-down cavity, the optical feedback effect is generated, and the optical feedback effect is as follows: the light beam incident on the cavity mirror is partially transmitted through the cavity mirror, and the other part of the light beam is reflected by the cavity mirror. When the light beam penetrating through the cavity mirror A reaches the cavity mirror B, the cavity mirror B transmits and outputs part of the light beam to the light beam receiving module, and reflects the other part of the light beam. Because the two cavity mirrors are vertically arranged, the light beam can be vertically reflected to the cavity mirror A by the cavity mirror B, and the light beam reflected to the cavity mirror A can vertically penetrate into the light beam output module through the cavity mirror A, so that the light beam emitted by the light beam output module is interfered.
Based on the above problem, it is considered that when the optical feedback effect occurs in the ring-down cavity, the reflected light beam forms an angle when reaching the cavity mirror corresponding to the light beam output module, and the reflected light beam is prevented from vertically entering the light beam output module after passing through the cavity mirror corresponding to the light beam output module. Thus, it is possible to consider the cavity mirror to be disposed obliquely to solve the above-described problem.
The following describes a specific concept of the present solution.
As shown in fig. 1, an aerosol extinction instrument provided by an embodiment of the present invention includes: a first light beam output module 22, a first light beam receiving module 23, a second light beam output module 24, a second light beam receiving module 25 and a butterfly ring-down cavity 17;
the butterfly-shaped ring-down cavity 17 is internally provided with a first inclined cavity mirror 3, a second inclined cavity mirror 4, a third inclined cavity mirror 12 and a fourth inclined cavity mirror 11; the first light beam output module 22 is configured to output a light beam with a first wavelength to the first cavity mirror 3; the second light beam output module 24 is configured to output a light beam with a second wavelength, and output the light beam to the third cavity mirror 12;
the first cavity mirror 3, the second cavity mirror 4, the third cavity mirror 12 and the fourth cavity mirror 11 are connected in sequence to form a quadrangle, and the quadrangle is used for transmitting the light beam with the first wavelength to be output to the first light beam receiving module 23, reflecting the light beam with the first wavelength to the first cavity mirror 3, and enabling an included angle between the direction of the light beam with the first wavelength when the light beam with the first wavelength is reflected to the first cavity mirror 3 and the direction of the light beam output by the first light beam output module 22 to the first cavity mirror 3 to be unequal to 180 degrees; and a direction included angle between the direction of the light beam with the second wavelength reflected to the third cavity mirror 12 and the direction output to the third cavity mirror 12 by the second light beam output module 24 is not equal to 180 degrees.
In the embodiment of the invention, the aerosol extinction instrument comprises two light beam output modules and two light beam receiving modules, the two light beam output modules can emit light beams with different wavelengths, and the two light beam receiving modules respectively receive the light beams with the two different wavelengths, so that the aerosol extinction coefficients can be measured aiming at the two wavelengths at the same time.
In the embodiment of the invention, the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are arranged in the butterfly-shaped ring-down cavity, and the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are sequentially connected to form a quadrangle for reflecting the light beam with the first wavelength to the first cavity mirror, and an included angle between the direction of the light beam with the first wavelength reflected to the first cavity mirror and the direction output to the first cavity mirror by the first light beam output module is not equal to 180 degrees, so that the reflected light beam with the first wavelength cannot vertically enter the first light beam output module or enter the first light beam output module, and the interference of the optical feedback effect on the first light beam output module can be reduced; in the same way, the interference of the optical feedback effect on the second light beam output module can be reduced.
In an embodiment of the present invention, in order to achieve a purpose (denoted as a first purpose) that an included angle between a direction in which a light beam with a first wavelength is reflected to the first cavity mirror 3 and a direction in which the light beam with the first wavelength is output to the first cavity mirror 3 by the first light beam output module 22 is not equal to 180 degrees, and a purpose (denoted as a second purpose) that an included angle between a direction in which a light beam with a second wavelength is reflected to the third cavity mirror 12 and a direction in which the light beam with the second wavelength is output to the third cavity mirror 12 by the second light beam output module 24 is not equal to 180 degrees, the setting positions and the setting angles of the first cavity mirror 3, the second cavity mirror 4, the third cavity mirror 12, and the fourth cavity mirror 11 may simultaneously satisfy the following two conditions:
condition 1: the sequence of the light paths formed by the first cavity mirror 3, the second cavity mirror 4, the third cavity mirror 12 and the fourth cavity mirror 11 when reflecting the light beam with the first wavelength to the first cavity mirror 3 may be: a first cavity mirror 3, a second cavity mirror 4, a fourth cavity mirror 11, a third cavity mirror 12 to the first cavity mirror 3; the light path sequence refers to the arrow direction of the inner solid part of the butterfly ring-down cavity 17 in fig. 1;
condition 2: the sequence of the light paths formed when the first cavity mirror 3, the second cavity mirror 4, the third cavity mirror 12 and the fourth cavity mirror 11 reflect the light beam with the second wavelength to the third cavity mirror 12 may be: a third chamber mirror 12, a fourth chamber mirror 11, a second chamber mirror 4, and first to third chamber mirrors 3 to 12; the light path sequence is shown in the arrow direction of the dotted line portion in the butterfly ring down cavity 17 in fig. 1.
Therefore, the light path sequence formed by the light beams with two wavelengths reflected inside the butterfly-shaped ring-down cavity is butterfly-shaped, and after the four cavity mirrors are arranged inside the butterfly-shaped ring-down cavity, the light path sequence of the light beams reflected inside the butterfly-shaped ring-down cavity can be accurately obtained, so that the interference of the light beams on the measurement process of the aerosol extinction coefficient due to the fact that the light paths of the light beams inside the butterfly-shaped ring-down cavity cannot be accurately obtained can be reduced.
In the embodiment of the present invention, the setting positions and setting angles of the four cavity mirrors can be achieved by satisfying the above conditions 1 and 2 to achieve the first object and the second object simultaneously, and other setting manners can be used. For example, the sequence of the optical path formed when the light beam with the first wavelength is reflected to the first cavity mirror 3 is as follows: the endoscope comprises a first endoscope 3, a second endoscope 4, a third endoscope 12 to the first endoscope 3, or the first endoscope 3, the second endoscope 4, a fourth endoscope 11 to the first endoscope 3.
In an embodiment of the present invention, the setting positions and the setting angles of the first cavity mirror 3, the second cavity mirror 4, the third cavity mirror 12 and the fourth cavity mirror 11 can simultaneously satisfy the following two conditions on the basis of satisfying the above conditions 1 and 2:
condition 3: when the second cavity mirror 4 reflects the light beam with the second wavelength to the first cavity mirror 3, the light beam with the second wavelength can penetrate through the first cavity mirror 3 to vertically enter the first light beam output module 22;
condition 4: when the fourth cavity mirror 11 reflects the light beam with the first wavelength to the third cavity mirror 12, the light beam with the first wavelength can vertically enter the second light beam output module 24 through the third cavity mirror 12.
Since the light beam output by the first light beam output module 22 has the first wavelength different from the second wavelength, in general, for the measurement of the extinction coefficient of the aerosol, the two wavelengths are not in the same wavelength band, and therefore, when the light beam with the second wavelength is vertically incident into the first light beam output module 22, the first light beam output module is not interfered. Similarly, the light beam with the first wavelength does not interfere with the second light beam output module 24 when perpendicularly incident on the second light beam output module.
The first beam output module 22, the first cavity mirror 3, the second cavity mirror 4 and the first beam receiving module 23 are on the same straight line, then when the above condition 3 is satisfied, there may be: the first cavity mirror 3 can reflect the light beam with the first wavelength reflected by the third cavity mirror 12 to the second cavity mirror 4, the light path of the light beam with the first wavelength reflected by the first cavity mirror 3 to the second cavity mirror 4 is the same as the light path of the light beam with the first wavelength output by the first light beam output module, the reflection light path of the light beam with the first wavelength in the butterfly-shaped ring-down cavity is a closed loop and is the same light path, and therefore the influence caused by the optical feedback effect can be further reduced.
Similarly, the second beam output module 24, the third cavity mirror 12, the fourth cavity mirror 11 and the second beam receiving module 25 are on the same straight line, and then when the above condition 4 is satisfied, there may be: the third cavity mirror 12 can reflect the light beam with the second wavelength reflected by the first cavity mirror 3 to the fourth cavity mirror 11, the light path of the light beam with the second wavelength reflected by the third cavity mirror 12 to the fourth cavity mirror 12 is the same as the light path of the light beam with the second wavelength output by the second light beam output module, which reaches the fourth cavity mirror 11 through the third cavity mirror 12, and the reflection light path of the light beam with the second wavelength in the butterfly ring-down cavity is a closed loop and is the same light path, so that the influence caused by the optical feedback effect can be further reduced.
In one embodiment of the invention, in order to ensure that the light beam is reflected inside the butterfly ring-down cavity, the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror may be the same plano-concave reflecting mirror; namely, one surface is a plane, and the other surface is a concave surface;
the concave surfaces of the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror face the interior of the butterfly-shaped ring-down cavity 17; and the concave surfaces are plated with high reflection films, and the reflectivities of the high reflection films to the light beams with the first wavelength and the light beams with the second wavelength are not less than a set reflection value.
For example, the first wavelength is 532nm, the second wavelength is 488nm, and the high-reflection film needs to ensure that the reflectivity of the light beams with the two wavelengths is not less than a set reflection value, for example, the set reflection value is 0.9999, so that it can be ensured that any one cavity mirror can realize high reflection on the light beams with the two wavelengths.
Preferably, the plane may be coated with an antireflection film.
In an embodiment of the present invention, the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror may be identical cavity mirrors or different cavity mirrors, for example, different in curvature radius, size, and the like. Whether the four cavity mirrors are the same or not, the conditions of the present embodiment need to be satisfied when the four cavity mirrors are set, and the design needs to be performed according to the ABCD matrix theory (laser principle optical resonator theory in an optical system).
Preferably, the quadrangle formed by connecting the four cavity mirrors in sequence can be rectangular, so that the minimum volume of the aerosol extinction instrument can be ensured during installation.
In an embodiment of the invention, when the four cavity mirrors are connected in sequence to form a rectangle, the limitation of the side length at least may include:
the distance between the two cavity mirrors on the shorter side length of the rectangle is not more than a set distance;
the distance between the two cavity mirrors on the longer side of the rectangle and the distance between the two cavity mirrors on the shorter side of the rectangle satisfy the ABCD matrix theory.
For example, in fig. 1, the first cavity mirror 3 and the fourth cavity mirror 11 located on the shorter side of the rectangle are better when the distance is smaller, and the smaller the distance is, the smaller the volume of the aerosol extinction instrument is, but the distance needs to ensure that the two cavity mirrors are not blocked and interfered when the first cavity mirror 3 and the fourth cavity mirror 11 are used for fine adjustment, and therefore, the set distance needs to be determined according to the model size of the cavity mirrors.
After the shorter side length is determined, the distance between the two cavity mirrors on the longer side length of the rectangle can be calculated according to the ABCD matrix theory, wherein the shorter side length and the longer side length meet the ABCD matrix theory.
In an embodiment of the present invention, referring to fig. 1, the aerosol extinction instrument may further include:
the first optical filter 5 is positioned between the second cavity mirror 4 and the first beam receiving module 23 and is used for preventing the light beam with the second wavelength from entering the first beam receiving module 23;
and/or the presence of a gas in the gas,
and the second optical filter 10 is positioned between the fourth cavity mirror 11 and the second beam receiving module 25 and is used for preventing the light beam with the first wavelength from entering the second beam receiving module 25.
For example, the first filter 5 may be a 532nm narrowband filter, which can prevent the 488nm light beam from entering the first light beam receiving module, and the second filter 10 may be a 488nm narrowband filter, which can prevent the 532nm light beam from entering the second light beam receiving module. Therefore, the influence on the light intensity received by the light beam receiving module can be reduced by adding the optical filter, so that the accuracy of the measuring result in aerosol measurement is improved.
In one embodiment of the present invention, the distance between the first filter 5 and the first beam receiving module 23 is not less than 2 mm;
and/or the presence of a gas in the gas,
the distance between the second filter 10 and the second light beam receiving module 25 is not less than 2 mm.
If the distance is less than 2mm, the installation of the optical filter and the light beam receiving module can be influenced, so that the distance between the optical filter and the light beam receiving module is set to be not less than 2mm, the installation of each device can be conveniently ensured when a product is formed, and the production efficiency is improved.
When the aerosol extinction coefficient is measured by using the aerosol extinction instrument, a zero gas or an aerosol sample needs to be introduced into the butterfly ring-down cavity, so that the butterfly ring-down cavity also needs to comprise two vent holes, one vent hole is used for introducing gas into the butterfly ring-down cavity, and the other vent hole is used for discharging the gas in the butterfly ring-down cavity, so that the same internal and external pressure of the ring-down cavity is ensured.
In an embodiment of the present invention, the vent hole may be implemented by three-way gas path interfaces, please refer to fig. 2, in which one three-way gas path interface 16 is used to input gas into the butterfly ring-down cavity, and the other three-way gas path interface 18 is used to output gas inside the butterfly ring-down cavity to the outside of the butterfly ring-down cavity;
the three-way gas circuit joint is of a Y-shaped structure, two vent holes of the three-way gas circuit joint extend into the butterfly-shaped ring-down cavity, and the third vent hole is positioned outside the butterfly-shaped ring-down cavity.
Furthermore, the two three-way gas path interfaces are located at two ends of the butterfly-shaped ring-down cavity, and the distance between the two vent holes extending into the butterfly-shaped ring-down cavity can be enlarged as much as possible, for example, the four vent holes extending into the butterfly-shaped ring-down cavity on the two three-way gas path interfaces are respectively located at four corners of the butterfly-shaped ring-down cavity, so that the introduced gas is distributed more uniformly in the butterfly-shaped ring-down cavity, and the accuracy of the measurement result is improved.
In an embodiment of the present invention, each of the first beam output module and the second beam output module may include a laser and a beam shaping module, the laser is configured to output a laser beam with a corresponding wavelength, and the beam shaping module is configured to collimate the laser beam and perform mode matching with the butterfly ring-down cavity, so as to achieve optimal coupling between the laser beam and the butterfly ring-down cavity.
The first light beam receiving module and the second light beam receiving module can both comprise a focusing lens and a photoelectric detector, wherein the focusing lens is used for focusing light beams on an image plane of the photoelectric detector, namely the distance between the focusing lens and the image plane of the photoelectric detector is equal to the focal length of the focusing lens, so that the photoelectric detector can detect the optimal light intensity of the light beams.
The preferred structure of the aerosol extinction instrument according to the embodiment of the present invention will be described with reference to fig. 1 and 2, taking 532nm as an example of the first wavelength and 488nm as an example of the second wavelength.
The aerosol extinction instrument comprises a first light beam output module 22 consisting of a first laser 1 and a first light beam shaping module 2, a second light beam output module 24 consisting of a second laser 14 and a second light beam shaping module 13, a butterfly ring-down cavity 17 consisting of a first cavity mirror 3, a second cavity mirror 4, a fourth cavity mirror 11 and a third cavity mirror 12, two first optical filters 5 and second optical filters 10 corresponding to laser wavelengths, a first light beam receiving module 23 consisting of a first lens 6 and a first photoelectric detector 7, and a second light beam receiving module 25 consisting of a second lens 9 and a second photoelectric detector 8.
The first laser 1 is a continuous solid laser with an output wavelength of 532nm, single-mode output, and beam quality M2<1.1。
The second laser 14 is a continuous semiconductor laser with an output wavelength of 488nm, single-mode output, and a beam quality M2<1.1。
The first beam shaping module 2 has a function of collimating 532nm laser light emitted by the first laser 1 and performing mode matching with the butterfly ring-down cavity 17, so that optimal coupling of the laser beam and the optical resonant cavity is realized. The first beam shaping module 2 can be composed of three lenses, the surfaces of the lenses are plated with 532nm antireflection films, and the substrate is made of fused quartz or K9 glass.
The second beam shaping module 13 is used for collimating 488nm laser emitted by the second laser 14 and performing mode matching with the butterfly ring-down cavity 17, so as to realize the optimal coupling of the laser beam and the optical resonant cavity. The second beam shaping module 13 may be composed of three lenses, the surface of the lens is plated with 488nm anti-reflection film, and the substrate is made of fused quartz or K9 glass.
The first laser 1 and the first beam shaping module 2 are connected by an A-type sleeve 15, and the second laser 14 and the second beam shaping module 13 are connected by a B-type sleeve 21. The A-type sleeve 15 and the B-type sleeve 21 are connected with the laser through external threads, and are connected with the beam shaping module through internal threads. The material of the A-type sleeve 15, the B-type sleeve 21 and the universal sleeve is aluminum 2A12, and the inner and outer surfaces are blackened to suppress specular reflection.
The butterfly-shaped ring-down cavity 17 is an annular optical resonant cavity and consists of four cavity mirrors (a first cavity mirror 3, a second cavity mirror 4, a third cavity mirror 11 and a fourth cavity mirror 12), and the materials are stainless steel or microcrystalline glass. When the four cavity mirrors are completely the same, the four cavity mirrors can be plano-concave reflectors, the concave surfaces of the four cavity mirrors are plated with high reflection films, the reflectivity at 532nm and 488nm is superior to 0.9999, the planes of the four cavity mirrors are plated with anti-reflection films, the four cavity mirrors are fixed in the butterfly-shaped ring-down cavity 17 through the adjusting mirror frames 19 made of stainless steel materials, and the concave surfaces face the interior of the butterfly-shaped ring-down cavity.
For 532nm laser light emitted by the first laser 1, the optical path sequence in the butterfly ring-down cavity 17 is: the first cavity mirror 3, the second cavity mirror 4, the fourth cavity mirror 11, the third cavity mirror 12 and the first cavity mirror 3 form a closed loop.
For the 488nm laser emitted by the second laser 14, the sequence of the light paths in the butterfly ring-down cavity 17 is: the third cavity mirror 12, the fourth cavity mirror 11, the second cavity mirror 4, the first cavity mirror 3 to the third cavity mirror 12 form a closed loop with the optical path opposite to that of the former.
The first filter 5 is a 532nm narrowband filter for blocking the 488nm laser beam from entering the first photodetector 7.
The second filter 10 is a 488nm narrowband filter, and is used for preventing 532nm laser beams from entering the second photodetector 8.
The first lens 6 and the second lens 9 are short-focal convex lenses, can be made of K9 glass, and are coated with MgF2 antireflection films on the surfaces.
The first photoelectric detector 7 and the second photoelectric detector 8 are gain-adjustable high-sensitivity detectors, and the same type can be selected.
The interval between the first optical filter 5 and the first lens 6 is more than or equal to 2mm, the plane of the first lens 6 faces the first optical filter 5, the convex surface faces the first photoelectric detector 7, and the distance from the plane of the first lens 6 to the image surface of the first photoelectric detector 7 is the focal length of the first lens 6. The first optical filter 5 and the first lens 6 are connected with the first photoelectric detector 7 through the universal sleeve 20, the first optical filter 5 and the first lens 6 are screwed into the internal thread of the universal sleeve 20 through the external thread on the frame, and the internal thread at one end of the universal sleeve 20 is connected with the external thread on the first photoelectric detector 7. The second filter 10, the second lens 9 and the second photodetector 8 are also connected in the above manner.
On the butterfly-shaped ring-down cavity 17, a three-way gas path joint 16 for gas intake and a three-way gas path joint 18 for gas exhaust are installed. The three-way gas circuit joint 16 and the three-way gas circuit joint 18 are made of nylon plastics, and the outer diameter size can be 6mm (or 8mm) so as to ensure that the gas circuit is normal. The connection mode of the three-way air path joint 16 and the three-way air path joint 18 with the air inlet/exhaust pipe is a quick insertion mode, and the connection mode with the butterfly-shaped ring-down cavity 17 adopts flange fixation.
Referring to fig. 3, an embodiment of the present invention further provides a method for measuring an aerosol extinction coefficient based on any one of the aerosol extinction meters in the above embodiments, including:
step 301: when zero gas is introduced into the butterfly-shaped ring-down cavity, the first time length required when the light intensity of the light beam received by the first light beam receiving module is attenuated to 1/e of the first set threshold value from the first set threshold value is obtained, and the second time length required when the light intensity of the light beam received by the second light beam receiving module is attenuated to 1/e of the second set threshold value from the second set threshold value is obtained.
Step 302: when the aerosol is introduced into the butterfly ring-down cavity, the third time length required when the light intensity of the light beam received by the first light beam receiving module is attenuated to 1/e of the first set threshold value from the first set threshold value is obtained, and the fourth time length required when the light intensity of the light beam received by the second light beam receiving module is attenuated to 1/e of the second set threshold value from the second set threshold value is obtained.
With respect to step 301 and step 302, the time when the light intensity of the light beam received by the first light beam receiving module attenuates from the first set threshold may be the same as the time when the light intensity of the light beam received by the second light beam receiving module attenuates from the second set threshold, so that the accuracy of the measurement result may be improved.
Step 303: calculating the extinction coefficient of the aerosol when the light beam is at the first wavelength according to the first time length and the third time length; and calculating the extinction coefficient of the aerosol when the light beam has the second wavelength according to the second time length and the fourth time length.
The following further describes the method for measuring the extinction coefficient of the aerosol in the embodiment of the present invention, taking the preferred structure of the aerosol extinction meter as an example.
The first step is as follows: power supply for starting aerosol extinction instrument
The active devices such as the first laser 1, the second laser 14, the first photodetector 7, and the second photodetector 8 are powered on, and the gain values on the first photodetector 7 and the second photodetector 8 are adjusted by adjusting the magnitude of the input current, for example, set to 20 dB. At this time, the laser output switches of the first laser 1 and the second laser 14 are not turned on for the moment.
The second step is that: introducing zero gas
The dehumidified and impurity-removed dry clean air is introduced from the air inlet interface of the three-way air path joint 16, the flow rate of the air is controlled to be 5L/min by a mass flow meter, the exhaust air is treated from the exhaust interface of the three-way air path joint 18 through the exhaust system of the aerosol extinction instrument, and the air is released in the air at the far end under the harmless condition. The ventilation process requires a waiting time of about 30s, and zero gas can be uniformly distributed in the ring-down chamber.
The third step: starting laser
The first laser 1 and the second laser 14 are started, and the light intensity of the laser transmitted from the second cavity mirror 4 and the fourth cavity mirror 11 and received by the first photoelectric detector 7 and the second photoelectric detector 8 can be seen to rapidly rise through the data processing display control device.
Please refer to fig. 4 for the laser beams output by the first laser 1 and the second laser 14 during the zero gas filling process.
Please refer to fig. 5 and 6 for the laser intensities detected by the first photodetector 7 and the second photodetector 8 during the zero gas filling process.
The fourth step: switching off a laser
At t01At the moment, the intensity of the laser beam transmitted from the second cavity mirror 4 reaches the first set threshold of the first photodetector 7, and the driving current of the first laser 1 is turned off through feedback control, so that the output of the laser beam is stopped; at the same time t01At this time, the intensity of the laser beam transmitted from the fourth cavity mirror 11 reaches the second set threshold of the optical detector 8, and the driving current of the second laser 14 is controlled to be turned off by feedback, so that the output of the laser beam is stopped. From t01At the moment, the light intensities of the light beams received by the first photodetector 7 and the second photodetector 8 are both attenuated from the maximum value (the first photodetector 7 starts from the first set threshold value, the second photodetector 8 starts from the second set threshold value), and the light intensities are respectively attenuated to 1/e of the maximum value respectively received, namely t11Time t and21the time of day.
The fifth step: repeated measurement of zero gas
In the multiple measurement mode, the light transmittance received in the first photodetector 7 and the second photodetector 8When the light intensity is zero, the first laser 1 and the second laser 14 are automatically started under the action of feedback control. Repeating the third and fourth steps to obtain multiple groups of t01、t11And t21The time of day.
And a sixth step: calculating cavity ring-down time
In the single measurement mode, the cavity ring-down times at the two wavelengths are respectively (t)11-t01) And (t)21-t01) (ii) a Under the multiple measurement mode, the average cavity ring-down time under two wavelengths are respectively multiple groups (t)11-t01) And (t)21-t01) Average value of (a).
The seventh step: introducing an aerosol sample
An aerosol sample is introduced from an air inlet interface of the three-way air path joint 16, the flow rate of the sample is controlled to be 5L/min through a mass flow meter, the discharged sample is treated from an exhaust interface of the three-way air path joint 18 through an exhaust system of an aerosol extinction instrument, the sample is released in the air at the far end under the harmless condition, and the sample is recovered and temporarily stored under the harmful condition. The waiting time of the ventilation process is about 30s, and the sample can be uniformly distributed in the ring-down cavity.
Eighth step: starting laser
The first laser 1 and the second laser 14 are turned on again, and the intensity of the transmitted light received by the first photodetector 7 and the second photodetector 8 rises rapidly.
Fig. 7 is a schematic diagram of laser beams output by the first laser 1 and the second laser 14 during the process of introducing the sample.
Please refer to fig. 8 and fig. 9, which are schematic diagrams of laser intensities respectively detected by the first photodetector 7 and the second photodetector 8 during the process of introducing the sample.
The ninth step: switching off a laser
At t02At the moment, the intensity of the laser beam transmitted from the second cavity mirror 4 reaches the first set threshold of the first photodetector 7, and the driving current of the first laser 1 is turned off through feedback control, so that the output of the laser beam is stopped; at the same time t02Time of day, laser transmitted from the fourth cavity mirror 11When the light intensity reaches the second set threshold of the light detector 8, the driving current of the second laser 14 is controlled by feedback to be turned off, and the output of the laser beam is stopped. From t02At the moment, the light intensities of the light beams received by the first photodetector 7 and the second photodetector 8 are both attenuated from the maximum value (the first photodetector 7 starts from the first set threshold value, the second photodetector 8 starts from the second set threshold value), and the light intensities are respectively attenuated to 1/e of the maximum value respectively received, namely t12Time t and22the time of day.
The tenth step: repeated measurement of aerosol samples
In the multiple measurement mode, when the intensities of the transmitted light received by the first photodetector 7 and the second photodetector 8 are both zero, the first laser 1 and the second laser 14 are automatically turned on under the action of feedback control. Repeating the eighth step and the ninth step to obtain multiple groups of t02、t12And t22The time of day.
The eleventh step: calculating aerosol sample ring-down time
In the single measurement mode, the sample ring-down times at the two wavelengths are respectively (t)12-t02) And (t)22-t02) (ii) a Under the multiple measurement mode, the average sample ring-down time under two wavelengths are respectively multiple groups (t)12-t02) And (t)22-t02) Average value of (a).
The twelfth step: calculating extinction coefficient of aerosol
Extinction coefficient A of the aerosol sample for the first wavelength1Expressed as:
A1＝[(t12-t02)-1-(t11-t01)-1]·c-1
extinction coefficient A of the aerosol sample for the second wavelength2Expressed as:
A2＝[(t22-t02)-1-(t21-t01)-1]·c-1
where c is the speed of light.
It is to be understood that the illustrated structure of the embodiments of the present invention does not constitute a specific limitation on the aerosol extinction instrument. In other embodiments of the invention, the aerosol extinction instrument may include more or fewer components than shown, or some components may be combined, some components may be separated, or a different arrangement of components. The illustrated components may be implemented in hardware, software, or a combination of software and hardware.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a" does not exclude the presence of other similar elements in a process, method, article, or apparatus that comprises the element.
Those of ordinary skill in the art will understand that: all or part of the steps for realizing the method embodiments can be completed by hardware related to program instructions, the program can be stored in a computer readable storage medium, and the program executes the steps comprising the method embodiments when executed; and the aforementioned storage medium includes: various media that can store program codes, such as ROM, RAM, magnetic or optical disks.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. An aerosol extinction instrument, comprising: the device comprises a first light beam output module, a first light beam receiving module, a second light beam output module, a second light beam receiving module and a butterfly-shaped ring-down cavity;
the butterfly-shaped ring-down cavity is internally provided with a first inclined cavity mirror, a second inclined cavity mirror, a third inclined cavity mirror and a fourth inclined cavity mirror; the first light beam output module is used for outputting a light beam with a first wavelength and outputting the light beam to the first cavity mirror; the second light beam output module is used for outputting a light beam with a second wavelength and outputting the light beam to the third cavity mirror;
the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror are sequentially connected to form a quadrangle, and the quadrangle is used for transmitting the light beam with the first wavelength to be output to the first light beam receiving module and reflecting the light beam with the first wavelength to the first cavity mirror, and an included angle between the direction of the light beam with the first wavelength reflected to the first cavity mirror and the direction of the light beam output to the first cavity mirror by the first light beam output module is not equal to 180 degrees; and the second light beam receiving module is used for transmitting the light beam with the second wavelength to output the light beam to the second light beam receiving module, reflecting the light beam with the second wavelength to the third cavity mirror, wherein an included angle between the direction of the light beam with the second wavelength reflected to the third cavity mirror and the direction of the light beam output by the second light beam output module to the third cavity mirror is not equal to 180 degrees.
2. The aerosol extinction instrument of claim 1,
the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror form a light path sequence when the light beam with the first wavelength is reflected to the first cavity mirror: the first cavity mirror, the second cavity mirror, the fourth cavity mirror, the third cavity mirror to the first cavity mirror;
the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror form a light path sequence when the light beam with the second wavelength is reflected to the third cavity mirror: the third chamber mirror, the fourth chamber mirror, the second chamber mirror, the first chamber mirror to the third chamber mirror.
3. The aerosol extinction instrument of claim 2,
when the second cavity mirror reflects the light beam with the second wavelength to the first cavity mirror, the light beam with the second wavelength can penetrate through the first cavity mirror to be vertically incident into the first light beam output module;
when the fourth cavity mirror reflects the light beam with the first wavelength to the third cavity mirror, the light beam with the first wavelength can penetrate through the third cavity mirror to vertically enter the second light beam output module.
4. The aerosol extinction instrument of claim 1, wherein the first, second, third and fourth cavity mirrors are identical plano-concave mirrors;
the concave surfaces of the first cavity mirror, the second cavity mirror, the third cavity mirror and the fourth cavity mirror face the interior of the butterfly-shaped ring-down cavity; and the concave surfaces are plated with high reflection films, and the reflectivities of the high reflection films to the light beams with the first wavelength and the light beams with the second wavelength are not less than a set reflection value.
5. The aerosol extinction instrument of claim 1, wherein the quadrilateral is a rectangle.
6. An aerosol extinction device according to claim 4 wherein the distance between two cavity mirrors on the shorter side of the rectangle is no greater than a set distance;
the distance between the two cavity mirrors on the longer side of the rectangle and the distance between the two cavity mirrors on the shorter side of the rectangle satisfy the ABCD matrix theory.
7. The aerosol extinction instrument of claim 1,
further comprising: the first optical filter is positioned between the second cavity mirror and the first light beam receiving module and used for preventing the light beam with the second wavelength from entering the first light beam receiving module;
and/or the presence of a gas in the gas,
further comprising: and the second optical filter is positioned between the fourth cavity mirror and the second light beam receiving module and used for preventing the light beam with the first wavelength from entering the second light beam receiving module.
8. The aerosol extinction instrument of claim 7,
the distance between the first optical filter and the first light beam receiving module is not less than 2 mm;
and/or the presence of a gas in the gas,
the distance between the second optical filter and the second light beam receiving module is not less than 2 mm.
9. An aerosol extinction instrument according to any one of claims 1 to 8, further comprising: one of the three-way gas path interfaces is used for inputting gas into the butterfly-shaped ring-down cavity, and the other three-way gas path interface is used for outputting the gas in the butterfly-shaped ring-down cavity to the outside of the butterfly-shaped ring-down cavity;
the three-way gas path joint is of a Y-shaped structure, two vent holes of the three-way gas path joint extend into the butterfly-shaped ring-down cavity, and the third vent hole is positioned outside the butterfly-shaped ring-down cavity.
10. A method for measuring an extinction coefficient of an aerosol based on the aerosol extinction meter of any one of claims 1-9, comprising:
when zero gas is introduced into the butterfly-shaped ring-down cavity, acquiring a first time length required when the light intensity of the light beam received by the first light beam receiving module is attenuated to 1/e of a first set threshold value from the first set threshold value, and acquiring a second time length required when the light intensity of the light beam received by the second light beam receiving module is attenuated to 1/e of a second set threshold value from the second set threshold value;
when the aerosol is introduced into the butterfly ring-down cavity, acquiring a third time length required when the light intensity of the light beam received by the first light beam receiving module is attenuated to 1/e of the first set threshold value from the first set threshold value, and acquiring a fourth time length required when the light intensity of the light beam received by the second light beam receiving module is attenuated to 1/e of the second set threshold value from the second set threshold value;
calculating the extinction coefficient of the aerosol when the light beam is at the first wavelength according to the first time length and the third time length;
and calculating the extinction coefficient of the aerosol when the light beam has the second wavelength according to the second time length and the fourth time length.
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