CN106841106A - A kind of bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy - Google Patents
A kind of bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy Download PDFInfo
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- CN106841106A CN106841106A CN201611140479.4A CN201611140479A CN106841106A CN 106841106 A CN106841106 A CN 106841106A CN 201611140479 A CN201611140479 A CN 201611140479A CN 106841106 A CN106841106 A CN 106841106A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/391—Intracavity sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/04—Batch operation; multisample devices
- G01N2201/0407—Batch operation; multisample devices with multiple optical units, e.g. one per sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/068—Optics, miscellaneous
Abstract
The present invention provides a kind of bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy, including the first tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode matching system, resonator, the first condenser lens, the second condenser lens, the first narrow band pass filter, the second narrow band pass filter, the first photodetector, the second photodetector, laser controller and signal processing and analysis control system；By using the mirror of high-fineness four annular stable cavity, while the synchronization on-line measurement of bi-component trace gas concentration is realized, the components such as optoisolator, laser bundling device, optical splitter, compact conformation are saved, and cost is relatively low.
Description
Technical field
It is more particularly to a kind of double based on Research on Cavity Ring Down Spectroscopy the present invention relates to trace gas concentration field of measuring technique
Component trace gas concentration measurement apparatus.
Background technology
Trace gas concentration e measurement technology has in numerous areas such as environmental monitoring, resource exploration, medical diagnosis extensively should
With.Research on Cavity Ring Down Spectroscopy is a kind of direct absorption-type spectroscopy technology, compared to other detection methods, is had the advantage that：1)
The technology directly measured quantities are the time, so as to reduce the measurement error for being risen and fallen by light source intensity and being brought；2) high-fineness is utilized
The effective light path of gas concentration measurement is expanded 10 by stable resonator, the technology3~105Times, compared to traditional directly absorption-type light
Spectral technology, with sensitivity higher, is adapted to trace gas concentration measurement；3) technology is non-immediate compared to fluorescence, acousto-optic etc.
Absorption-type spectroscopy technology, with the advantage for exempting from calibration.
Research on Cavity Ring Down Spectroscopy is typically considered single-wavelength light spectral technology, is measured according to broad spectrum light source, then
Need to use the labyrinths such as grating spectrograph or spectrophotometer.On the other hand, using the common trace of the technology development and production
Amount gas concentration measuring apparatus, it will usually using optoisolator, acousto-optic or electrooptical switching, piezoelectric ceramics displacement controller (PZT)
Deng component.Although the use of these components increases to certainty of measurement and stability, cost increases, structure is multiple
The drawbacks such as miscellaneous, volume increase, power consumption growth are unfavorable for that the technology and its measurement apparatus are used under some specific environments.
The content of the invention
In view of this, it is an object of the invention to propose one kind can synchronous two kinds of trace gas concentrations of on-line measurement, and
Compact conformation, the lower-cost new bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy.
Based on above-mentioned purpose, it is dense that the embodiment of the present invention provides a kind of bi-component trace gas based on Research on Cavity Ring Down Spectroscopy
Degree measurement apparatus, including：
First tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode
Match system, resonator, the first condenser lens, the second condenser lens, the first narrow band pass filter, the second narrow band pass filter, the first light
Electric explorer, the second photodetector, laser controller and signal processing and analysis control system；
The resonator includes the first hysteroscope, the second hysteroscope, the 3rd hysteroscope and the 4th hysteroscope；
The laser that the first tunable continuous wave laser sends enters described humorous after being focused on through first condenser lens
Shake chamber, through after being reflected through second hysteroscope and the 3rd hysteroscope after first hysteroscope successively through the 4th hysteroscope, the
One condenser lens and the first narrow band pass filter, are ultimately incident upon first photodetector；
The laser that the second tunable continuous wave laser sends enters described humorous after being focused on through second condenser lens
Shake chamber, through after being reflected through first hysteroscope and the 4th hysteroscope after second hysteroscope successively through the 3rd hysteroscope, the
Two condenser lenses and the second narrow band pass filter, are ultimately incident upon second photodetector；
First photodetector and second photodetector respectively with the signal processing and analysis control system
Electrical connection, the signal processing and analysis control system is connected with the laser controller, the laser controller respectively with institute
State the first tunable continuous wave laser and the second tunable continuous wave laser electrical connection.
Further, the normal of first hysteroscope and the 4th hysteroscope overlaps, and points to the center of the resonator, described
The normal of the second hysteroscope and the 3rd hysteroscope overlaps, and points to the center of the resonator.
Further, in first hysteroscope, the second hysteroscope, the 3rd hysteroscope and the 4th hysteroscope normal direction sensing resonator
The minute surface plating high-reflecting film of the heart, another side plating anti-reflection film.
Further, the first mode matching system and the second mode matching system all use Galilean telescope
Structure.
Further, first photodetector and second photodetector have the speed of response high, and spectrum
Response range covers under test gas characteristic absorption wavelength.
Further, the eyeglass in the first mode matching system and second mode matching system, and the first focusing
Lens and the second condenser lens are coated with the anti-reflection film of correspondence under test gas characteristic absorption wavelength.
From the above it can be seen that the bi-component trace gas concentration based on Research on Cavity Ring Down Spectroscopy that the present invention is provided
Measurement apparatus, including the first tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second
Pattern matching system, resonator, the first condenser lens, the second condenser lens, the first narrow band pass filter, the second narrow band pass filter,
First photodetector, the second photodetector, laser controller and signal processing and analysis control system.By using high-precision
The mirror of fineness four annular stable cavity, realize bi-component trace gas concentration synchronization on-line measurement while, save optoisolator,
The components such as laser bundling device, optical splitter, compact conformation, and cost is relatively low.
Brief description of the drawings
Fig. 1 is the knot of the bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy of the embodiment of the present invention
Structure schematic diagram；
Fig. 2 is cavity state and non-cavity state ring-down time instrumentation plan in the single event of swinging that declines；
Fig. 3 swings event ring-down time instrumentation plan for multiple declines.
Specific embodiment
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with the embodiment of the present invention
Accompanying drawing, the technical scheme in the embodiment of the present invention is further carried out it is clear, complete, describe in detail, it is clear that it is described
Embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention, this area
The every other embodiment that those of ordinary skill is obtained, belongs to the scope of protection of the invention.
It should be noted that the statement of all uses " first " and " second " is for differentiation two in the embodiment of the present invention
The entity of individual same names non-equal or the parameter of non-equal, it is seen that " first " " second " should not only for the convenience of statement
The restriction to the embodiment of the present invention is interpreted as, subsequent embodiment is no longer illustrated one by one to this.
The embodiment of the present invention provides a kind of bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy, bag
Include：
First tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode
Match system, resonator, the first condenser lens, the second condenser lens, the first narrow band pass filter, the second narrow band pass filter, the first light
Electric explorer, the second photodetector, laser controller and signal processing and analysis control system；
The resonator includes the first hysteroscope, the second hysteroscope, the 3rd hysteroscope and the 4th hysteroscope；
The laser that the first tunable continuous wave laser sends enters described humorous after being focused on through first condenser lens
Shake chamber, through after being reflected through second hysteroscope and the 3rd hysteroscope after first hysteroscope successively through the 4th hysteroscope, the
One condenser lens and the first narrow band pass filter, are ultimately incident upon first photodetector；
The laser that the second tunable continuous wave laser sends enters described humorous after being focused on through second condenser lens
Shake chamber, through after being reflected through first hysteroscope and the 4th hysteroscope after second hysteroscope successively through the 3rd hysteroscope, the
Two condenser lenses and the second narrow band pass filter, are ultimately incident upon second photodetector；
First photodetector and second photodetector respectively with the signal processing and analysis control system
Electrical connection, the signal processing and analysis control system is connected with the laser controller, the laser controller respectively with institute
State the first tunable continuous wave laser and the second tunable continuous wave laser electrical connection.
The bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy of the embodiment of the present invention, by using
The mirror of high-fineness four annular stable cavity, realize bi-component trace gas concentration synchronization on-line measurement while, save light every
From the components such as device, laser bundling device, optical splitter, compact conformation, and cost is relatively low.
In an embodiment of the present invention, the normal of first hysteroscope and the 4th hysteroscope overlaps, and points to the resonator
Center, the normal of second hysteroscope and the 3rd hysteroscope overlaps, and points to the center of the resonator.Further, it is described
First hysteroscope, the second hysteroscope, the 3rd hysteroscope and the 4th hysteroscope normal direction point to the minute surface plating high-reflecting film at resonator center, another
Plate anti-reflection film in face.Further, the first mode matching system and the second mode matching system are all hoped using Galileo
Remote mirror structure.Further, first photodetector and second photodetector have the speed of response high, and spectrum
Response range covers under test gas characteristic absorption wavelength.Further, the first mode matching system and second mode are matched
Eyeglass in system, and the first condenser lens and the second condenser lens are coated with the anti-reflection of correspondence under test gas characteristic absorption wavelength
Film.
As shown in figure 1, being the measurement of the bi-component trace gas concentration based on Research on Cavity Ring Down Spectroscopy of the embodiment of the present invention
The structural representation of device.It can be seen that the bi-component trace gas based on Research on Cavity Ring Down Spectroscopy of the present embodiment
Apparatus for measuring concentration, including：First tunable continuous wave laser 1, the second tunable continuous wave laser 2, first mode matching system
System 3, second mode matching system 4, resonator 5, the first condenser lens 7, the second condenser lens 6, the first narrow band pass filter 9, the
Two narrow band pass filters 8, the first photodetector 11, the second photodetector 10, laser controller 12 and signal processing and analysis
Control system 13；
The resonator includes the first hysteroscope 501, the second hysteroscope 502, the 3rd hysteroscope 503 and the 4th hysteroscope 504；
The laser that the first tunable continuous wave laser 1 sends enters described after being focused on through first condenser lens 7
Resonator 5, it is described through being passed through successively after being reflected through second hysteroscope 502 and the 3rd hysteroscope 503 after first hysteroscope 501
4th hysteroscope 504, the first condenser lens 7 and the first narrow band pass filter 9, are ultimately incident upon first photodetector 11；
The laser that the second tunable continuous wave laser 2 sends enters described after being focused on through second condenser lens 4
Resonator 5, it is described through being passed through successively after being reflected through first hysteroscope 501 and the 4th hysteroscope 504 after second hysteroscope 502
3rd hysteroscope 503, the second condenser lens 6 and the second narrow band pass filter 8, are ultimately incident upon second photodetector 10；
First photodetector 11 and second photodetector 10 are controlled with the signal processing and analysis respectively
System 13 is electrically connected, and the signal processing and analysis control system 13 is connected with the laser controller 12, the laser control
Device 12 is electrically connected with the described first tunable continuous wave laser 1 and the second tunable continuous wave laser 2 respectively.
In the present embodiment, the described first tunable continuous wave laser 1 and the second tunable continuous wave laser 2 are preferably
There is output wavelength easily to adjust for DFB-LD (distributed feedback type semiconductor laser), DFB-LD (can be adjusted by automatically controlled or temperature control
Section), line width (representative value be several MHz), small volume, the features such as low cost.It is near majority of gas can be provided using the light source
Infrared signature absorbing wavelength, and narrow linewidth can improve the spectral resolution of measurement.
Pattern matching system uses Galilean telescope structure, while incident light is ensured with resonator spatial match,
Reduce structure length as far as possible.
Resonator is using the annular stable cavity design of the mirror of high-fineness four.Eyeglass one side is coated with test gas characteristic absorption wavelength
Anti-reflection film, another side is coated with the high-reflecting film of its wavelength, and reflectivity should be higher than that 99.9%, and reflectivity is higher, and measurement sensitivity is got over
It is high.The characteristic absorption wavelength of various ingredients should have high reflectance in the reflection characteristic of high reflective mirror plated film spectrum.In non-resonance
In the case of, high reflective mirror can prevent incident light from entering resonator, and make it along backtracking laser.In CRDS, this light
Feed back influences larger for the light characteristic that goes out of laser, especially the laser higher to this efficiency of DFB-LD.Compared to line
Shape chamber, annular chamber can effectively reduce light feedback, reflected light is deviateed incident direction, therefore can save optoisolator；The opposing party
Face, because annular chamber will not form standing wave in chamber, eliminate because peak power density at node may bring it is non-linear
Effect.Compared to three common on the market at present eyeglass annular chambers, because four mirror chambers can make hysteroscope placed angle more flexible, allow
There is incident, reflection with low-angle (such as 2 ° or 3 °) in light, in hysteroscope so as to reduce hysteroscope plated film requirement.In the present invention,
Two light sources can be incident from different hysteroscopes, and it declines and swings signal and can receive two beams by the photodetector of two different hysteroscopes
Optical propagation direction is easy to the detection of detector conversely, do not cause unnecessary influence each other.Exist realizing that bi-component is synchronous
While line is measured, the components such as laser bundling device, optical splitter are saved.
Photodetector uses the InGaAs detectors of the speed of response high, and spectral response range can cover under test gas feature
Absorbing wavelength, and narrow band pass filter is placed in detector porch, detectable signal is swung signal for declining for one-component.Due to height
The detector of the speed of response generally has less photosurface, it is necessary to be focused to transmitted light.
Pattern matching system and condenser lens are coated with the anti-reflection film to gas characteristic absorbing wavelength to be measured, so as to reduce device
Interior optical interference effect.
As shown in Fig. 2 being cavity state and non-cavity state ring-down time instrumentation plan in the single event of swinging that declines.
DFB-LD controllers are adjusted by temperature adjustment and electric current, make DFB-LD1 and DFB-LD2 output same laser ripples
It is long.Output of laser wavelength should deviate the characteristic absorption wavelength of two kinds of under test gas (it is assumed that gas A and gas B), and output laser
Wavelength should be located in the high reflectance spectrum of high reflective mirror in resonator 5, and wherein gaseous spectrum data can be by HITRAN databases
Inquired about.
DFB-LD1 and DFB-LD2 output laser enters respectively through first mode matching system and second mode matching system
Enter in resonator, now complete the spatial match of incident light and resonator.DFB-LD controllers are scanned by fast current, are made
DFB-LD1 and DFB-LD2 Output of laser wavelength can carry out longitudinal mode and match in scanning process with resonator.
Resonance endovenous laser is exported by hysteroscope, is focused on through the first condenser lens and the second condenser lens and is focused on the respectively
At the photosurface of one photodetector and the second photodetector.When the laser of input resonator does not realize longitudinal mode with resonator
The optical signal that timing, the first photodetector and the second photodetector are detected is extremely faint, even below test limit.When defeated
When the laser and resonator for entering resonator realize that longitudinal mode is matched, the light that the first photodetector and the second photodetector are detected
Signal moment strengthens.Feedback regulation is realized to DFB-LD controllers by signal processing and analysis control system, realize DFB-LD1 and
DFB-LD2 exports rapidly switching off for laser.Ring-down time T1=t1-t0.
DFB-LD controllers, by temperature adjustment, make the characteristic absorption ripple of DFB-LD1 output gas A on the basis of before
It is long, make the characteristic absorption wavelength of DFB-LD2 output gas B.Realize longitudinal mode match when, the first photodetector collect via
The event of swinging that declines of the gas A that the second narrow band pass filter is obtained, shown in such as Fig. 2 (B), ring-down time T2=t2-t0.First smooth electrical resistivity survey
The event of swinging that declines that device collects the gas B obtained via the first narrow band pass filter is surveyed, shown in such as Fig. 2 (C), ring-down time T3=t3-
t0。
Afterwards, continuously adjusting by DFB-LD controllers, repeats said process, obtains multiple and declines the event of swinging,
As shown in Figure 3.The multiple that Fig. 3 show declines and swings event ring-down time instrumentation plan.It is right in signal processing and analysis control system
Ring-down time carries out error analysis and carries out data processing, obtains the average ring-down time T of gas A2' and the average of gas B decline
Swing time T3’。
Finally, using langbobier law, the concentration N of gas A is obtainedAWith the concentration N of gas BBIt is expressed as
Wherein c is the light velocity；σ(λA) and σ (λB) absorption cross-section size under gases used characteristic absorption wavelength is measured respectively,
Time quantum measured amount for before.
By means of above-mentioned technical proposal of the invention, by using the mirror of high-fineness four annular stable cavity, double groups are being realized
While dividing trace gas concentration synchronization on-line measurement, the components such as optoisolator, laser bundling device, optical splitter are saved, made
Structure is simplified, and volume is reduced.
Those of ordinary skill in the art should be understood：The discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under thinking of the invention, above example
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other changes of upper described different aspect of the invention, for simplicity, they are provided not in details.
In addition, to simplify explanation and discussing, and in order to obscure the invention, can in the accompanying drawing for being provided
To show or can not show to be connected with the known power ground of integrated circuit (IC) chip and other parts.Furthermore, it is possible to
Device is shown in block diagram form, to avoid obscuring the invention, and this have also contemplated that following facts, i.e., on this
The details of the implementation method of a little block diagram arrangements is to depend highly on to implement platform of the invention (that is, these details should
It is completely in the range of the understanding of those skilled in the art).Elaborating that detail (for example, circuit) is of the invention to describe
In the case of exemplary embodiment, it will be apparent to those skilled in the art that can be without these details
In the case of or implement the present invention in the case that these details are changed.Therefore, these descriptions are considered as explanation
Property rather than restricted.
Although invention has been described to have been incorporated with specific embodiment of the invention, according to retouching above
State, many replacements of these embodiments, modification and modification will be apparent for those of ordinary skills.Example
Such as, other memory architectures (for example, dynamic ram (DRAM)) can use discussed embodiment.
Embodiments of the invention be intended to fall within the broad range of appended claims it is all such replace,
Modification and modification.Therefore, all any omission, modification, equivalent, improvement within the spirit and principles in the present invention, made
Deng should be included within the scope of the present invention.
Claims (6)
1. a kind of bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy, it is characterised in that including：
First tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode matching system
System, resonator, the first condenser lens, the second condenser lens, the first narrow band pass filter, the second narrow band pass filter, the first smooth electrical resistivity survey
Survey device, the second photodetector, laser controller and signal processing and analysis control system；
The resonator includes the first hysteroscope, the second hysteroscope, the 3rd hysteroscope and the 4th hysteroscope；
The laser that the first tunable continuous wave laser sends enters the resonator after being focused on through first condenser lens,
Focused on through the 4th hysteroscope, first successively through after being reflected through second hysteroscope and the 3rd hysteroscope after first hysteroscope
Lens and the first narrow band pass filter, are ultimately incident upon first photodetector；
The laser that the second tunable continuous wave laser sends enters the resonator after being focused on through second condenser lens,
Focused on through the 3rd hysteroscope, second successively through after being reflected through first hysteroscope and the 4th hysteroscope after second hysteroscope
Lens and the second narrow band pass filter, are ultimately incident upon second photodetector；
First photodetector and second photodetector are electrically connected with the signal processing and analysis control system respectively
Connect, the signal processing and analysis control system is connected with the laser controller, the laser controller is respectively with described
One tunable continuous wave laser and the second tunable continuous wave laser electrical connection.
2. bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy according to claim 1, it is special
Levy and be, the normal of first hysteroscope and the 4th hysteroscope overlaps, and point to the center of the resonator, second hysteroscope and
The normal of the 3rd hysteroscope overlaps, and points to the center of the resonator.
3. bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy according to claim 2, it is special
Levy and be, first hysteroscope, the second hysteroscope, the 3rd hysteroscope and the 4th hysteroscope normal direction point to the minute surface plating at resonator center
High-reflecting film, another side plating anti-reflection film.
4. bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy according to claim 1, it is special
Levy and be, the first mode matching system and the second mode matching system all use Galilean telescope structure.
5. bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy according to claim 1, it is special
Levy and be, first photodetector and second photodetector have the speed of response high, and spectral response range is covered
Lid under test gas characteristic absorption wavelength.
6. bi-component trace gas concentration measurement apparatus based on Research on Cavity Ring Down Spectroscopy according to claim 1, it is special
Levy and be, the eyeglass in the first mode matching system and second mode matching system, and the first condenser lens and second
Condenser lens is coated with the anti-reflection film of correspondence under test gas characteristic absorption wavelength.
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| CN114018869A (en) * | 2021-10-27 | 2022-02-08 | 山西大学 | Optical feedback cavity enhanced absorption spectrum device based on optical fiber coupling device |
| CN114199822A (en) * | 2021-12-10 | 2022-03-18 | 北京环境特性研究所 | Gas detection device and method |
| CN114235699A (en) * | 2021-12-21 | 2022-03-25 | 长春理工大学 | Trace gas concentration detection device |
| US11441944B2 (en) * | 2017-05-16 | 2022-09-13 | Li-Cor, Inc. | Mode matching method for absorption spectroscopy systems |
| CN115598089A (en) * | 2022-12-01 | 2023-01-13 | 哈尔滨翰奥科技有限公司（Cn） | Toxic gas concentration measuring method |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504367A (en) * | 2009-03-10 | 2009-08-12 | 哈尔滨工业大学 | Apparatus for simultaneously monitoring concentration of carbon monoxide and carbon dioxide |
| CN201811920U (en) * | 2010-10-12 | 2011-04-27 | 深圳市世纪天源环保技术有限公司 | Gas measuring device |
| CN102445423A (en) * | 2010-10-08 | 2012-05-09 | 龙兴武 | Optical feedback-type continuous wave cavity ring down spectroscopic technology |
| CN103674891A (en) * | 2013-12-02 | 2014-03-26 | 中国科学院安徽光学精密机械研究所 | Atmospheric NO3 free radical concentration measurement system based on double-cavity type cavity ring-down technology |
| CN103884679A (en) * | 2014-04-18 | 2014-06-25 | 山西大学 | Gas concentration monitoring method based on cavity ring-down spectroscopy technology of kalman filter |
| US20150131094A1 (en) * | 2013-11-13 | 2015-05-14 | King Abdullah University Of Science And Technology | Cavity ring-down spectroscopic system and method |
| CN104897610A (en) * | 2015-05-26 | 2015-09-09 | 中国科学院长春光学精密机械与物理研究所 | Rotary prism type multi-component trace gas concentration measuring device |
| CN104914058A (en) * | 2015-05-26 | 2015-09-16 | 中国科学院长春光学精密机械与物理研究所 | Multi-component trace gas concentration measuring apparatus |
| CN105300889A (en) * | 2015-11-10 | 2016-02-03 | 哈尔滨工业大学 | Method and device for measuring trace gas concentration with diffuse reflection integral cavity as photoacoustic cell |
| CN105911020A (en) * | 2016-04-15 | 2016-08-31 | 中国科学院光电技术研究所 | Method for simultaneously measuring multicomponent gas based on cavity ring-down spectroscopy |
-
2016
- 2016-12-12 CN CN201611140479.4A patent/CN106841106B/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101504367A (en) * | 2009-03-10 | 2009-08-12 | 哈尔滨工业大学 | Apparatus for simultaneously monitoring concentration of carbon monoxide and carbon dioxide |
| CN102445423A (en) * | 2010-10-08 | 2012-05-09 | 龙兴武 | Optical feedback-type continuous wave cavity ring down spectroscopic technology |
| CN201811920U (en) * | 2010-10-12 | 2011-04-27 | 深圳市世纪天源环保技术有限公司 | Gas measuring device |
| US20150131094A1 (en) * | 2013-11-13 | 2015-05-14 | King Abdullah University Of Science And Technology | Cavity ring-down spectroscopic system and method |
| CN103674891A (en) * | 2013-12-02 | 2014-03-26 | 中国科学院安徽光学精密机械研究所 | Atmospheric NO3 free radical concentration measurement system based on double-cavity type cavity ring-down technology |
| CN103884679A (en) * | 2014-04-18 | 2014-06-25 | 山西大学 | Gas concentration monitoring method based on cavity ring-down spectroscopy technology of kalman filter |
| CN104897610A (en) * | 2015-05-26 | 2015-09-09 | 中国科学院长春光学精密机械与物理研究所 | Rotary prism type multi-component trace gas concentration measuring device |
| CN104914058A (en) * | 2015-05-26 | 2015-09-16 | 中国科学院长春光学精密机械与物理研究所 | Multi-component trace gas concentration measuring apparatus |
| CN105300889A (en) * | 2015-11-10 | 2016-02-03 | 哈尔滨工业大学 | Method and device for measuring trace gas concentration with diffuse reflection integral cavity as photoacoustic cell |
| CN105911020A (en) * | 2016-04-15 | 2016-08-31 | 中国科学院光电技术研究所 | Method for simultaneously measuring multicomponent gas based on cavity ring-down spectroscopy |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11441944B2 (en) * | 2017-05-16 | 2022-09-13 | Li-Cor, Inc. | Mode matching method for absorption spectroscopy systems |
| CN108562551A (en) * | 2018-04-11 | 2018-09-21 | 黑龙江工程学院 | A kind of method that detector accurately measures concentration of SO 2 gas |
| CN108760653A (en) * | 2018-04-11 | 2018-11-06 | 黑龙江工程学院 | A kind of method that spectrometer accurately measures concentration of SO 2 gas |
| CN108760653B (en) * | 2018-04-11 | 2020-11-17 | 黑龙江工程学院 | Method for accurately measuring concentration of sulfur dioxide gas by spectrometer |
| CN108398393A (en) * | 2018-04-17 | 2018-08-14 | 中国计量科学研究院 | A kind of the cavity ring-down spectroscopy instrument and measurement method of quick measurement greenhouse gases content |
| CN109162700B (en) * | 2018-10-16 | 2022-03-04 | 安徽理工大学 | Coal mine gas drilling machine drill rod feeding depth measuring system based on NO2 absorption characteristics |
| CN109162700A (en) * | 2018-10-16 | 2019-01-08 | 安徽理工大学 | A kind of coal mine gas borer drill rod feeding depth measuring system based on NO2 absorption characteristic |
| CN110006610A (en) * | 2019-04-23 | 2019-07-12 | 中国科学院光电研究院 | A kind of natural gas leaking detection method and device |
| CN111562237A (en) * | 2020-05-26 | 2020-08-21 | 中国科学院合肥物质科学研究院 | CO based on double-beam cavity enhanced spectroscopy technology2、N2O stable isotope simultaneous detection device and method |
| CN112710610A (en) * | 2020-12-29 | 2021-04-27 | 深圳市利拓光电有限公司 | Harmful gas monitoring system and harmful gas monitoring laser |
| CN113125368A (en) * | 2021-05-13 | 2021-07-16 | 北京环境特性研究所 | Aerosol extinction instrument and measurement method thereof |
| CN113176220A (en) * | 2021-05-13 | 2021-07-27 | 北京环境特性研究所 | Gas detector and detection method thereof |
| CN114018869A (en) * | 2021-10-27 | 2022-02-08 | 山西大学 | Optical feedback cavity enhanced absorption spectrum device based on optical fiber coupling device |
| CN114199822A (en) * | 2021-12-10 | 2022-03-18 | 北京环境特性研究所 | Gas detection device and method |
| CN114199822B (en) * | 2021-12-10 | 2024-01-19 | 北京环境特性研究所 | Gas detection device and method |
| CN114235699A (en) * | 2021-12-21 | 2022-03-25 | 长春理工大学 | Trace gas concentration detection device |
| CN114235699B (en) * | 2021-12-21 | 2023-10-31 | 长春理工大学 | Trace gas concentration's detection device |
| CN115598089A (en) * | 2022-12-01 | 2023-01-13 | 哈尔滨翰奥科技有限公司（Cn） | Toxic gas concentration measuring method |
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