CN113125055A - Piezoresistive and capacitive fused three-dimensional flexible touch sensor - Google Patents
Piezoresistive and capacitive fused three-dimensional flexible touch sensor Download PDFInfo
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- CN113125055A CN113125055A CN202110235580.2A CN202110235580A CN113125055A CN 113125055 A CN113125055 A CN 113125055A CN 202110235580 A CN202110235580 A CN 202110235580A CN 113125055 A CN113125055 A CN 113125055A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
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Abstract
The invention discloses a piezoresistive and capacitive fused three-dimensional flexible touch sensor, and belongs to the technical field of sensors. The sensor consists of a plurality of piezoresistive sensing units, a plurality of capacitance sensing units, a flexible insulating layer coating each sensing unit and a thin wire connected with each sensing unit; the piezoresistive sensing unit consists of an upper electrode plate layer, a lower electrode plate layer and a middle piezoresistive material layer and is used for measuring normal force; the capacitance sensing unit consists of an upper electrode plate, a lower electrode plate and a middle dielectric layer and is used for measuring tangential force; the flexible three-dimensional touch sensor can measure normal force and tangential force simultaneously, is simple in structure, thin in thickness, good in flexibility, capable of being well attached to the surface of the skin of a hand without influencing hand movement, high in measurement sensitivity, capable of achieving a dot matrix function, and easy to collect a large amount of touch data so as to analyze hand touch characteristics. The flexible three-dimensional touch sensor has low cost, is suitable for batch production, and can be applied to the fields of robots, medical treatment, biomechanics and the like.
Description
Technical Field
The invention relates to a piezoresistive and capacitive fused three-dimensional flexible touch sensor, and belongs to the technical field of sensors.
Background
With the rapid development of artificial intelligence, robotics and intelligent perception identification technologies, the touch perception function of the robot cannot meet the requirements yet, and touch information acquired by a touch sensor is required. The touch sensor has a great application prospect in the aspects of artificial limbs, machine skins, touch screens, wearable electronic devices and the like.
The touch sense in a broad sense includes a touch sense, a pressure sense, a force sense, a slip sense, a cold and heat sense, and the like, and in a narrow sense, it is a force sense on a contact surface between a human hand and a subject. Compared with a visual sensor, the touch sensor has the advantages of high resolution, low cost, capability of acquiring object information (such as vibration characteristics, heat transfer characteristics and mechanical characteristics) which cannot be acquired visually, and the like.
The normal force between the human hand and the contact surface is very important for sensing the hardness and shape properties of the contact object and acquiring the pressing characteristics when the human hand contacts the object, while the tangential force between the human hand and the contact surface is very important for sensing the surface roughness and material properties of the contact object and acquiring the characteristics of the rubbing action of the human hand, so that a three-dimensional touch sensor capable of simultaneously acquiring the normal force information and the tangential force information when the human hand contacts the object is required.
Compared with the traditional tactile sensor, the three-dimensional tactile sensor can simultaneously sense the tangential force and the normal force, and can better realize three-dimensional force sensing; compared with the traditional rigid touch sense, the flexible touch sense sensor has better adhesion to the skin, and can effectively reduce the influence of the sensor on the hand action. Therefore, the flexible touch sensor with the functions of flexibility and three-dimensional force detection has wide application prospect in the fields of medical treatment, biomechanics and the like.
The existing three-dimensional flexible touch sensor has the defects of complex structure, high cost, large volume and the like, is difficult to attach to the surface of hand skin, and needs to innovate the structure of the three-dimensional flexible touch sensor.
Disclosure of Invention
The invention provides a piezoresistive and capacitive fused three-dimensional flexible touch sensor, which is a three-dimensional flexible sensor capable of simultaneously measuring normal force and tangential force by fusing a piezoresistive sensor and a capacitive sensor.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
a piezoresistive and capacitive fused three-dimensional flexible touch sensor comprises a plurality of piezoresistive sensing units, a plurality of capacitive sensing units, a flexible insulating layer for coating each sensing unit and a thin lead for connecting each sensing unit; the piezoresistive sensing unit consists of an upper electrode plate, a lower electrode plate and a middle piezoresistive material layer, the electrode plates of the piezoresistive sensing unit are circular, the piezoresistive material is made of a flexible compressible material, the electrode plates of the piezoresistive sensing unit are connected with the piezoresistive material through glue, and the piezoresistive sensing unit is used for measuring normal force; the capacitance sensing unit is composed of an upper electrode plate, a lower electrode plate and a middle dielectric layer, the upper electrode plate and the lower electrode plate of the capacitance sensing unit are both rectangular, the area of an upper electrode of the capacitance sensing unit is smaller than that of a lower electrode of the capacitance sensing unit, one side of a rectangular plate of the upper electrode of the capacitance sensing unit is aligned with one side of a rectangular plate of the lower electrode of the capacitance sensing unit, the other three sides of the rectangular plate of the lower electrode are spaced from the other three sides of the rectangular plate of the lower electrode, the dielectric is made of a material with a large dielectric constant and is incompressible, the dielectric is the same as the upper electrode of the capacitance sensing unit in shape and size and is fixedly connected with the upper electrode by glue and is not fixedly connected with the lower electrode of the capacitance sensing unit, and the capacitance sensing; the piezoresistive sensing units are connected with the capacitance sensing units through thin flexible insulating layers, so that normal relative displacement is generated between the piezoresistive sensing units and the capacitance sensing units conveniently, and the influence of the capacitance sensing units on normal force measurement of the piezoresistive sensing units is reduced; the flexible insulating layer is provided with groove positions corresponding to the shapes of the piezoresistance and the capacitance sensing units so as to place the sensing units, and is fixedly connected with the two sensing units by utilizing the viscosity of the flexible insulating layer; the thin wire is also attached to the piezoresistive material, dielectric by glue and held in place by the adhesive of the flexible insulating layer itself.
Preferably, the three-dimensional flexible tactile sensor is made of the following materials: the flexible insulating material is made of polyimide material with the thickness not more than 0.05 mm; the thin wire is a copper wire with the outer diameter not more than 0.5 mm; brass gaskets with the thickness not more than 0.03mm are selected as the materials of the upper electrode plate of the piezoresistive sensing unit, the lower electrode plate of the piezoresistive sensing unit, the upper electrode of the capacitance sensing unit and the lower electrode of the capacitance sensing unit; the piezoresistive material in the middle of the piezoresistive sensing unit is velostat; the dielectric layer material in the middle of the capacitance sensing unit is an aluminum oxide ceramic sheet which is difficult to compress.
Preferably, the flexible insulating layer has a groove for tightly wrapping the piezoresistive sensing unit, and a certain gap is left between the groove and the direction of change of the overlapping area of the electrode plate of the piezoresistive sensing unit and the electrode plate of the capacitive sensing unit.
Preferably, the upper electrode of the capacitive sensing unit is fixedly connected with the dielectric, and the dielectric is not fixedly connected with the lower electrode of the capacitive sensing unit, so as to ensure that the upper electrode of the capacitive sensing unit moves together with the dielectric when the capacitive sensing unit is subjected to a tangential force; the dielectric medium is not fixedly connected with the lower electrode of the capacitance sensing unit so as to ensure that the overlapping area between the electrode plates of the capacitance sensing unit can be changed to output a voltage signal.
Preferably, the number of the piezoresistive sensing units can be increased or decreased according to the range of the tactile information to be acquired; the number of capacitive sensing elements is at least 4 and are arranged in a cross shape to detect X, Y tangential force information in both positive and negative directions of the axis.
Preferably, the plurality of piezoresistive and capacitive sensing units can realize a planar array function, the shape and the density of the array can be changed according to application conditions, and a large amount of normal force and tangential force information can be measured, so that the hand behavior characteristics of a person can be conveniently analyzed.
Compared with the prior art, the invention has the following obvious prominent substantive characteristics and obvious advantages:
1. the device has simple structure and low cost, and the three-dimensional flexible touch sensor for simultaneously measuring the normal force and the tangential force is prepared by utilizing the simple piezoresistive effect and the capacitance principle;
2. the device has the advantages that the sensor is thin in thickness and good in flexibility, and compared with other three-dimensional flexible touch sensors, the sensor is thin in thickness, is convenient to attach to the skin surface of a human hand and does not influence the hand action of the human;
3. the device has high measurement sensitivity, can realize the dot matrix function, can measure a large amount of normal force and tangential force information by utilizing a plurality of piezoresistive and capacitive sensing units, and is convenient for analyzing the hand behavior characteristics of people.
Drawings
Fig. 1 is an exploded view of the overall structure of a three-dimensional flexible tactile sensor according to the present invention.
Fig. 2 is a top view of the overall structure of the three-dimensional flexible tactile sensor of the present invention.
Fig. 3 is a cross-sectional view taken along a-a of fig. 2.
FIG. 4 is a three-dimensional block diagram of a capacitive sensing cell for measuring shear force information.
FIG. 5 is a cross-sectional block diagram of a piezoresistive sensing unit for measuring normal force information.
FIG. 6 is a cross-sectional block diagram of a capacitive sensing cell for measuring shear force information.
FIG. 7 is a top view of the top and bottom electrodes of a capacitive sensing cell for measuring shear force information.
Detailed Description
The invention will be further elucidated with reference to the drawings and a preferred embodiment.
The first embodiment is as follows:
referring to fig. 1, a piezoresistive and capacitive fused three-dimensional flexible touch sensor includes a plurality of piezoresistive sensing units, a plurality of capacitive sensing units, a flexible insulating layer 1 covering each sensing unit, and a thin wire 10 connecting each sensing unit; the piezoresistive sensing unit consists of upper and lower electrode plates 2 and 4 and a middle layer of piezoresistive material 3, the electrode plates 2 and 4 of the piezoresistive sensing unit are circular, the piezoresistive material 3 is made of a flexible compressible material, the electrode plates 2 and 4 of the piezoresistive sensing unit are connected with the piezoresistive material 3 through glue, and the piezoresistive sensing unit is used for measuring normal force; the capacitance sensing unit is composed of an upper electrode plate 6 and a lower electrode plate 8 and a middle dielectric layer 7, the upper electrode plate 6 and the lower electrode plate 8 of the capacitance sensing unit are both rectangular, the area of an upper electrode 6 of the capacitance sensing unit is smaller than that of a lower electrode 8 of the capacitance sensing unit, one side of a rectangular sheet of the upper electrode 6 of the capacitance sensing unit is aligned with one side of the rectangular sheet of the lower electrode 8 of the capacitance sensing unit, the rest three sides of the rectangular sheet of the lower electrode are spaced from the rest three sides of the rectangular sheet of the lower electrode, the dielectric 7 is made of an incompressible material with a large dielectric constant, the dielectric 7 is the same as the upper electrode 6 of the capacitance sensing unit in shape and size and is fixedly connected with the dielectric 7 by glue and is not fixedly connected with the lower electrode 8 of the capacitance sensing unit, and the capacitance sensing unit is used for; the piezoresistive sensing units are connected with the capacitance sensing units through the thin flexible insulating layers 1, so that normal relative displacement is generated between the piezoresistive sensing units and the capacitance sensing units conveniently, and the influence of the capacitance sensing units on the normal force measurement of the piezoresistive sensing units is reduced; the flexible insulating layer 1 is provided with groove positions corresponding to the shapes of the piezoresistance and the capacitance sensing units for placing the sensing units, and is fixedly connected with the two sensing units by utilizing the viscosity of the flexible insulating layer; the thin wire 10 is also attached to the piezoresistive material 3, the dielectric 7 by glue and held in place by the adhesive properties of the flexible insulating layer 1 itself.
The piezoresistive and capacitive three-dimensional flexible touch sensor has high measurement sensitivity, can realize a dot matrix function, can measure a large amount of normal force and tangential force information by utilizing a plurality of piezoresistive and capacitive sensing units, and is convenient for analyzing the hand behavior characteristics of a person.
Example two:
as shown in fig. 1, the overall structure of the three-dimensional flexible tactile sensor according to this embodiment is an exploded view, and the numbers in the drawing are respectively: the piezoresistive high-voltage sensing element comprises a flexible insulating layer 1, a piezoresistive sensing unit upper electrode 2, a piezoresistive material 3, a piezoresistive sensing unit lower electrode 4, a capacitance sensor unit upper electrode 6, a dielectric 7, a capacitance sensor unit lower electrode 8 and a thin wire 10. The upper electrode plate 2 and the lower electrode plate 4 of the piezoresistive sensing unit are both circular and have the same area, the shape and the size of the piezoresistive material 3 are the same as those of the upper electrode plate and the lower electrode plate, the piezoresistive sensing unit is fixedly connected with the upper electrode plate and the lower electrode plate through glue, and the piezoresistive sensing unit is used for measuring normal force; the upper electrode plate 6 and the lower electrode plate 8 of the capacitance sensing unit are both rectangular, the area of the upper electrode 6 of the capacitance sensing unit is smaller than that of the lower electrode 8 of the capacitance sensing unit, one side of the rectangular sheet of the upper electrode 6 of the capacitance sensing unit is aligned with one side of the rectangular sheet of the lower electrode 8 of the capacitance sensing unit, the rest three sides are all spaced from the rest three sides of the rectangular sheet of the lower electrode 8 of the capacitance sensing unit, the shape and the size of the dielectric 7 are the same as those of the upper electrode 6 of the capacitance sensing unit, the dielectric is fixedly connected with the upper electrode 6 of the capacitance sensing unit by glue and is not fixedly connected with the lower electrode 8 of the capacitance sensing unit, and the capacitance sensing unit is used for measuring tangential force; the flexible insulating layer 1 is provided with groove positions corresponding to the shapes of the piezoresistance and the capacitance sensing units for placing the sensing units, and is fixedly connected with the two sensing units by utilizing the viscosity of the flexible insulating layer; the thin wire 10 is also attached with glue to the piezoresistive material, dielectric and fixed in the shape of figure 2 by the adhesive properties of the flexible insulating layer itself.
In this embodiment, the three-dimensional flexible tactile sensor is made of the following materials: the flexible insulating layer 1 is made of polyimide material with the thickness of 0.05mm, and the polyimide material has good mechanical property, insulating property, biocompatibility and flexibility and is low in price. The upper and lower electrodes of the piezoelectric sensing unit and the capacitance sensing unit are brass gaskets with the thickness of 0.03mm, and the brass material also has certain flexibility, can be made thinner and has low cost. The electrode shape of the piezoresistive sensing unit is circular, the diameter is 5mm, the electrode shape on the capacitance sensing unit is rectangular, the length is 5mm, the width is 2.5mm, and the electrode shape under the capacitance sensing unit is also rectangular, the length is 7mm, and the width is 4 mm. The piezoresistive material 3 of the piezoresistive sensing unit is made of Velostat material developed by Custom Materials, and the thickness of the material is 1 mm. The dielectric 7 in the capacitance sensing unit is made of an aluminum oxide ceramic plate which is 1mm thick and the same as a piezoresistive material, the aluminum oxide ceramic plate is high in hardness and not easy to deform, so that the distance between the upper electrode and the lower electrode of the capacitance sensing unit is kept unchanged when the capacitance sensing unit is subjected to normal force, and the tangential force measurement can be influenced if the distance between the upper electrode and the lower electrode of the capacitance sensing unit is changed according to a capacitance calculation formula C ∈ S/D. In addition, the dielectric constant epsilon of the alumina ceramic plate is higher and is 9.4, the capacitance value between the corresponding upper and lower polar plates is also larger, the output voltage signal is also larger, and therefore the sensitivity of the sensor is improved.
As shown in fig. 2 and fig. 3, the piezoresistive and capacitive three-dimensional flexible touch sensor of the present embodiment has a top view and a cross-sectional view, where the numbers are: the flexible sensor comprises a flexible insulating layer 1, a piezoresistive sensing unit upper electrode 2, a piezoresistive material 3, a piezoresistive sensing unit lower electrode 4, a capacitive sensor unit upper electrode 6, a dielectric 7, a capacitive sensor unit lower electrode 8 and a lead 10 for connecting an external circuit.
When the sensor receives a tangential force in the direction 11, the overlapping area between the upper and lower electrodes 601, 801 of the capacitance sensing unit corresponding to the upper electrode 601 in the four capacitance sensing units for detecting shear force information changes. Because the area of the lower electrode of the capacitive sensing unit is larger than that of the upper electrode, the overlapping area of the upper electrode and the lower electrode of the capacitive sensing unit corresponding to the upper electrodes 602, 603 and 604 is not changed. Only the capacitance of the capacitive sensing unit corresponding to the upper electrode 601 changes, the corresponding electrical signal also changes, and the capacitance values of the other three capacitive sensing units and the corresponding electrical signal remain unchanged. Therefore, the tangential force direction can be judged according to the voltage signals output by the four capacitance sensing units. The direction of the tangential force can be judged when the tangential force is in the other three directions along the X, Y axis.
When the tangential force direction of the sensor is not along the X, Y axis, the electric signal of more than one capacitive sensing unit changes. For example, when the sensor receives a tangential force in the direction of 12, the overlapping area between the upper electrode and the lower electrode of the capacitive sensing unit corresponding to the upper electrodes 603 and 604 remains unchanged, while the overlapping area between the upper electrode and the lower electrode of the capacitive sensing unit corresponding to the upper electrodes 601 and 602 changes, respectively: delta S1And Δ S2And Δ S1And Δ S2The displacement amount of the upper electrode 601 in the Y-axis direction and the displacement amount of the upper electrode 602 in the X-axis direction are proportional to each other. The displacement of the upper electrode 61 in the Y-axis direction and the displacement of the upper electrode 602 in the X-axis direction will cause the capacitance value of the corresponding capacitance sensing unit to correspondingly generate linear changes, and respectively output corresponding voltage signals V1And V2. The magnitude of the tangential force may be used as the total output voltage
To turn overReflecting the direction of tangential force
Where α is the angle of the tangential force with the X-axis direction. The magnitude and direction of the tangential force can be measured by using the principle.
As shown in fig. 3, a cross-sectional view of the whole structure of the piezoresistive and capacitive three-dimensional flexible tactile sensor along the direction a-a shows the three-dimensional structure of the capacitive sensing unit, as shown in fig. 4, where the reference numbers are: flexible insulating layer 1, piezoresistive sensing cell upper electrodes 202 and 203, piezoresistive materials 302 and 303, piezoresistive sensing cell lower electrodes 402 and 403, capacitive sensing cell upper electrode 603, dielectric 703, and capacitive sensing cell lower electrode 803. As shown in fig. 6, the piezoresistive sensing units are tightly wrapped by a flexible insulating layer without gaps, which is designed to avoid lateral deformation of the piezoresistive sensing units when the sensor is subjected to a tangential force. As shown in fig. 3 and 4, a gap is left between the capacitive sensing unit and the flexible insulating material in the direction of change of the overlapping area of the upper electrode and the lower electrode, so as to facilitate the displacement of the electrodes of the capacitive sensing unit in the tangential plane. The piezoresistive sensing unit and the capacitance sensing unit are connected through the thin flexible insulating layer, normal relative displacement is generated between the piezoresistive sensing unit and the capacitance sensing unit conveniently, the influence of the capacitance sensing unit on the normal force of the piezoresistive sensing unit is reduced, if the normal relative displacement is difficult to generate between the piezoresistive sensing unit and the capacitance sensing unit, the dielectric of the hard material in the capacitance sensing unit can block the deformation of the soft piezoresistive material in the piezoresistive sensing unit when the normal force is measured, and the measurement of the piezoresistive sensing unit on the normal force is influenced.
The capacitive sensing cell upper electrode 603 is fixedly connected to the dielectric 703, and the dielectric 703 is not fixedly connected to the capacitive sensing cell lower electrode 803. The device is used for ensuring that the upper electrode 603 moves together with the dielectric 703 when the capacitive sensing unit is subjected to a tangential force, and if the upper electrode 603 does not move together with the dielectric 703, the dielectric constant between the capacitive electrode plates is changed, and the measurement accuracy is affected. The dielectric 703 is not fixed to the lower electrode 803 of the capacitive sensing unit to ensure that the overlapping area between the upper and lower electrodes 603 and 803 of the capacitive sensing unit can be changed to output a voltage signal.
The working principle of the piezoresistive sensing unit and the capacitive sensing unit of the embodiment is as follows:
as shown in fig. 5, the piezoresistive sensing units are respectively marked as follows: flexible insulating layer 1, piezoresistive sensing cell upper electrode 201, piezoresistive material 301, piezoresistive sensing cell lower electrode 401.
When a normal force in the direction of 5 in the figure is applied to the piezoresistive sensor unit, the piezoresistive material 301 is compressed, and the resistance thereof changes along with the deformation thereof, so that the external bridge generates a corresponding unbalanced output, and the piezoresistive sensor unit reflects the information of the normal force by the change of the voltage signal. The magnitude of the normal force can thus be measured.
As shown in fig. 6 and 7, when a shearing force in the 9 direction is applied to the capacitive sensor unit, the overlapping area D between the upper and lower electrodes 601 and 801 decreases, the external circuit can detect the change of the capacitance value according to the decrease of the overlapping area between the upper and lower electrodes of the sensor unit, and the change of the capacitance value can reflect the change of the tangential force, thereby measuring the magnitude of the tangential force.
The number of the sensor piezoresistive sensing units can be increased or decreased according to the range of the tactile information to be acquired; and the number of the capacitive sensing units is at least 4, and the capacitive sensing units are arranged in a cross shape to detect X, Y tangential force information in the positive and negative directions of the shaft.
The sensor of the above embodiment has the following advantages:
1. the three-dimensional flexible touch sensor capable of simultaneously measuring the normal force and the tangential force is prepared by utilizing the simple piezoresistive effect and the capacitance principle;
2. the sensor is thin and good in flexibility, and compared with other three-dimensional flexible touch sensors, the sensor is very thin, is convenient to attach to the skin surface of a human hand and does not influence the hand action of the human;
3. the measuring sensitivity is high, the dot matrix function can be realized, a large amount of normal force and tangential force information can be measured by utilizing the plurality of piezoresistive and capacitive sensing units, and the analysis on the behavior characteristics of the human hand is facilitated. The piezoresistive and capacitive fused three-dimensional flexible touch sensor disclosed by the invention has the advantages of simple structure, low cost, good flexibility, high sensitivity and rich measurement data, and can be widely applied to the research fields of medical treatment, biomechanics and the like.
In summary, the piezoresistive and capacitive fused three-dimensional flexible touch sensor of the above embodiments belongs to the technical field of sensors. The sensor consists of a plurality of piezoresistive sensing units, a plurality of capacitance sensing units, a flexible insulating layer coating each sensing unit and a thin wire connected with each sensing unit; the piezoresistive sensing unit consists of an upper electrode plate layer, a lower electrode plate layer and a middle piezoresistive material layer and is used for measuring normal force; the capacitance sensing unit consists of an upper electrode plate, a lower electrode plate and a middle dielectric layer and is used for measuring tangential force; the flexible three-dimensional touch sensor can measure the normal force and the tangential force simultaneously, has the remarkable advantages of simple structure, thin thickness, good flexibility, high measurement sensitivity, capability of being well attached to the skin surface of a human hand without influencing the action of the hand, capability of realizing a dot matrix function, easiness in acquiring a large amount of touch data so as to analyze the touch characteristics of the human hand and the like. The flexible three-dimensional touch sensor provided by the invention is low in cost, suitable for batch production, and applicable to the fields of robots, medical treatment, biomechanics and the like.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and various changes in form and detail may be made therein without departing from the spirit of the present invention, and it is intended that all such changes and modifications as fall within the true scope of the present invention be interpreted in accordance with the principles of the present invention.
Claims (6)
1. A piezoresistive and capacitive fused three-dimensional flexible touch sensor comprises a plurality of piezoresistive sensing units, a plurality of capacitive sensing units, a flexible insulating layer (1) coating each sensing unit and a thin lead (10) connected with each sensing unit; the method is characterized in that: the piezoresistive sensing unit is composed of upper and lower electrode plates (2 and 4) and a middle layer of piezoresistive material (3), the electrode plates (2 and 4) of the piezoresistive sensing unit are circular, the piezoresistive material (3) is made of a flexible compressible material, the electrode plates (2 and 4) of the piezoresistive sensing unit are connected with the piezoresistive material (3) through glue, and the piezoresistive sensing unit is used for measuring normal force; the capacitance sensing unit is composed of an upper electrode plate (6) and a lower electrode plate (8) and a middle dielectric layer (7), the upper electrode plate (6) and the lower electrode plate (8) of the capacitance sensing unit are both rectangular, the area of the upper electrode (6) of the capacitance sensing unit is smaller than that of the lower electrode (8) of the capacitance sensing unit, one side of the rectangular sheet of the upper electrode (6) of the capacitance sensing unit is aligned with one side of the rectangular sheet of the lower electrode (8) of the capacitance sensing unit, the rest three sides of the rectangular sheet of the lower electrode are spaced from the rest three sides of the rectangular sheet of the lower electrode, the dielectric medium (7) is made of a material which has a large dielectric constant and is incompressible, the dielectric medium (7) is the same as the upper electrode (6) of the capacitance sensing unit in shape and size and is fixedly connected with the dielectric medium by glue and is not fixedly connected with the lower electrode (8) of the capacitance sensing unit, and; the piezoresistive sensing units are connected with the capacitance sensing units through the thin flexible insulating layer (1), so that normal relative displacement is generated between the piezoresistive sensing units and the capacitance sensing units conveniently, and the influence of the capacitance sensing units on the normal force measurement of the piezoresistive sensing units is reduced; the flexible insulating layer (1) is provided with groove positions corresponding to the shapes of the piezoresistance and the capacitance sensing units so as to place the sensing units, and is fixedly connected with the two sensing units by utilizing the viscosity of the flexible insulating layer; the thin conducting wire (10) is fixedly connected with the piezoresistive material (3) and the dielectric medium (7) through glue, and is fixed in position through the self-adhesive property of the flexible insulating layer (1).
2. The piezoresistive and capacitive three-dimensional flexible tactile sensor according to claim 1, wherein the flexible insulating material (1) is polyimide material with a thickness not greater than 0.05 mm; the thin wire (10) is a copper wire with the outer diameter not more than 0.5 mm; brass gaskets with the thickness not more than 0.03mm are selected as materials of an upper electrode plate (2) of the piezoresistive sensing unit, a lower electrode plate (4) of the piezoresistive sensing unit, an upper electrode (6) of the capacitance sensing unit and a lower electrode (8) of the capacitance sensing unit; the piezoresistive material (3) in the middle of the piezoresistive sensing unit is velostat; the dielectric layer (7) in the middle of the capacitance sensing unit is made of an aluminum oxide ceramic sheet which is difficult to compress.
3. The piezoresistive and capacitive three-dimensional flexible tactile sensor according to claim 1, wherein the flexible insulation layer (1) has a groove to tightly wrap the piezoresistive sensing unit, and the groove has a certain gap from the direction of the change of the overlapping area of the electrode pads (2, 4) of the piezoresistive sensing unit and the electrode pads (6, 8) of the capacitive sensing unit.
4. The piezoresistive and capacitive fused three-dimensional flexible touch sensor according to claim 1, wherein the upper electrode (6) of the capacitive sensing unit is fixedly connected with the dielectric (7), and the dielectric (7) is not fixedly connected with the lower electrode (8) of the capacitive sensing unit, so as to ensure that the upper electrode (6) of the capacitive sensing unit moves together with the dielectric (7) when the capacitive sensing unit is subjected to a tangential force; the dielectric medium (7) is not fixedly connected with the lower electrode (8) of the capacitance sensing unit so as to ensure that the overlapping area between the electrode plates (6, 8) of the capacitance sensing unit can be changed to output a voltage signal.
5. The piezoresistive and capacitive fused three-dimensional flexible touch sensor according to claim 1, wherein the number of piezoresistive sensing units can be increased or decreased according to the range of the touch information to be acquired; the number of capacitive sensing elements is at least 4 and are arranged in a cross shape to detect X, Y tangential force information in both positive and negative directions of the axis.
6. The piezoresistive and capacitive three-dimensional flexible touch sensor according to claim 1, wherein the piezoresistive and capacitive sensing units can perform a planar array function, the shape and density of the array can be changed according to the application, and a large amount of normal force and tangential force information can be measured, so as to facilitate the analysis of the hand behavior characteristics.
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| CN113607307A (en) * | 2021-09-02 | 2021-11-05 | 北京工业大学 | Tactile sensor, preparation method thereof and force and/or moment measuring device |
| CN113654703A (en) * | 2021-09-26 | 2021-11-16 | 太原理工大学 | Flexible sensing array for mechanical arm sensing and preparation and application methods thereof |
| CN113776709A (en) * | 2021-08-09 | 2021-12-10 | 济南大学 | Dual-mode flexible touch sensor and preparation method and application thereof |
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| CN113865754A (en) * | 2021-10-15 | 2021-12-31 | 北方工业大学 | Flexible sensing unit capable of detecting multi-level force and manufacturing method |
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