CN112902875B - Aspheric reflector curvature radius detection device and method - Google Patents
Aspheric reflector curvature radius detection device and method Download PDFInfo
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- CN112902875B CN112902875B CN202110350343.0A CN202110350343A CN112902875B CN 112902875 B CN112902875 B CN 112902875B CN 202110350343 A CN202110350343 A CN 202110350343A CN 112902875 B CN112902875 B CN 112902875B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
Abstract
The invention belongs to the technical field of mirror surface detection, and provides a CGH compensator and an aspheric mirror curvature radius detection device based on the CGH compensator, which are used for detecting an aspheric mirror with a hole in the center. The curvature radius error of the mirror to be inspected is obtained by obtaining the shape error and the defocusing amount of the mirror to be inspected, the measured values of all the areas are synthesized by using a curvature error formula, the curvature radius error is obtained, and the curvature radius of the mirror to be inspected is obtained.
Description
Technical Field
The invention belongs to the technical field of mirror surface detection, and particularly relates to a CGH compensator, which is a device and a method for realizing the detection of the curvature radius of an aspheric reflector by using the CGH compensator.
Background
The radius of curvature is one of the important parameters of an optical element, and its accuracy affects the performance of the optical system. The measurement accuracy of the curvature radius directly affects other optical parameters, and further affects the imaging quality of the optical system. Therefore, high-precision measurement of the radius of curvature of an optical element is an extremely important link. However, factors influencing the measurement accuracy of the curvature radius are numerous, so that high-accuracy curvature radius measurement is always a difficult problem in optical detection.
There are many methods for measuring the radius of curvature, and the measurement methods are mainly classified into contact measurement and non-contact measurement. The contact measurement method includes a template method, a Newton ring method, a sphere diameter method, a three-coordinate measurement method, a laser tracker method and the like. Contact measurement methods have a wide measurement range, but these methods need to contact the measured optical element during the measurement process, and are prone to scratching the measured surface, so that the application is limited to a certain extent. The non-contact measurement mainly comprises a knife edge shadow method, an auto-collimation microscope method, a laser interferometry method, a laser differential confocal method and the like. The knife edge shadow method is simple in measurement method, but has high requirements on the environment in the detection process, and requires that the detection environment has small vibration and is slightly dark. The auto-collimation microscopy measures the radius of curvature according to the auto-collimation technique, but the measurement accuracy of the method is limited by the focusing error and length measurement system of human eyes. The laser interferometry is the most widely used curvature radius measurement method at present, but the optical path of the laser interferometry is easily influenced by the detection environment and has weak interference resistance. The laser differential confocal method applies the differential confocal principle to the curvature radius measurement, and compared with other methods, the method has high focusing precision, but the measurement system is complex in device, can only be used for measuring the spherical curvature radius, and is not applicable to the measurement of the curvature radius of the central point of the aspheric surface which is widely used.
Disclosure of Invention
The invention provides a device and a method for detecting the curvature radius of an aspheric reflector, which can detect the curvature radius of a spherical surface, an aspheric surface and an aspheric surface vertex, can accurately realize the surface shape measurement of an optical element and simultaneously consider the detection of the curvature radius, and has the advantages of higher detection precision, simple device and simple and easy operation. In order to achieve the purpose, the invention adopts the following specific technical scheme:
a CGH compensator design method comprises the following steps:
s1, designing an annular main area, inputting parameters of a mirror to be detected in optical design software, setting the surface shape of the annular main area as a Zernike coefficient, and optimizing by changing the Zernike coefficient and distance parameters to enable the wave front to be zero;
s2, designing an alignment area, so that light rays are incident on the alignment area and reflected back by the CGH compensator, thereby judging the position relationship between the interferometer and the CGH compensator, changing the Zernike coefficient of the alignment area, and optimizing to make the wave front zero;
s3, designing a cat eye region, performing double-light-path light ray tracing according to parameters of the to-be-inspected mirror, the annular main region and the alignment region, enabling light passing through the annular cat eye region to be transmitted to the to-be-inspected mirror and then symmetrically returned through the central cat eye region located in the center of the optical axis, changing the Zernike coefficient, and optimally designing to enable the wavefront to be zero.
Preferably, the alignment region is located in the outer annulus for aligning the CGH compensator and the interferometer;
the cat eye region is positioned in the inner annular zone, is divided into an annular cat eye region and a central cat eye region and is used for detecting the distance deviation between the CGH compensator and the mirror to be detected;
the annular main area is located between the annular cat eye area and the central cat eye area and is used for detecting the surface shape error and the defocusing amount of the lens to be detected.
The device for detecting the curvature radius of the aspheric reflector is characterized by comprising a standard mirror and the CGH compensator designed by the method.
Preferably, the standard mirror is placed between the interferometer and the CGH compensator, and the mirror to be detected is placed on the other side of the CGH compensator;
the light emitted by the interferometer is emergent after passing through the standard mirror, the filter is placed at the focus position of the emergent light beam, the light passing through the filter is incident on the CGH compensator, according to different areas of the CGH compensator, the light beam is reflected back to the interferometer or is incident on the mirror to be detected after being transmitted by the CGH compensator, the shape of the mirror to be detected and the curvature radius error are detected through the annular main area, and the shape of the mirror to be detected and the curvature radius are obtained through analysis.
Preferably, the interferometer adjusting mechanism, the CGH adjusting mechanism and the to-be-detected mirror adjusting mechanism are used for respectively adjusting and enabling the interferometer, the CGH compensator and the to-be-detected mirror to be coaxial.
A method for detecting the curvature radius of an aspheric mirror is characterized by comprising the following steps:
s1, aligning the CGH compensator and the interferometer: installing a standard mirror of the interferometer, adjusting the standard mirror and a light source of the interferometer to a common light path, and placing an aperture filter at the position of a light beam focus of the interferometer; the CGH compensator is designed according to the method, and the position of the CGH compensator relative to the interferometer is adjusted to enable an interference pattern in an alignment area to be zero stripe;
s2, aligning the CGH compensator and the mirror to be detected: keeping the relative position of the interferometer and the CGH compensator unchanged, and adjusting the position of the lens to be detected to ensure that the light beam passing through the annular cat eye region reaches the lens to be detected and symmetrically returns through the central cat eye region;
and S3, calculating and acquiring the curvature radius of the to-be-examined mirror.
Preferably, the detection can be performed on an aspherical inspection mirror having a convex aspherical surface or a concave aspherical surface.
The invention can obtain the following technical effects:
1. the method effectively integrates the optical interference technology, the CGH compensator compensation optical path and the curvature radius detection principle together, and effectively realizes the detection of the aspheric surface shape and the curvature radius at the same time.
2. The method is not only suitable for measuring the curvature radius of the large-caliber aspheric telescope, but also can control the position error of the to-be-detected mirror, and realizes the measurement of the curvature consistency of the sub-mirror of the spliced telescope.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for detecting a curvature radius of an aspherical mirror according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a CGH compensator in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of the cat-eye region optical path of a CGH according to one embodiment of the present invention;
FIG. 4 is a schematic diagram of a conventional cat-eye region optical path;
FIG. 5 is a flow chart of a detection method according to an embodiment of the invention.
Reference numerals:
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention aims to provide a CGH compensator, and a device and a method for detecting the curvature radius of an aspheric reflector by using the CGH compensator, which can detect the curvature radius of a spherical surface, an aspheric surface and an aspheric surface vertex. The following describes an apparatus and a method for detecting a curvature radius of an aspherical mirror according to the present invention in detail by using specific embodiments.
The device for measuring the curvature radius of the optical element mainly comprises an interferometer 1, a CGH compensator 3, a corresponding adjusting mechanism and the like. Firstly, a CGH compensator 3 is designed and manufactured according to parameters of a lens 4 to be inspected, then a detection light path is built through the CGH compensator 3, the interferometer 1 and the CGH compensator 3 are adjusted to be aligned through interference fringes, then the relative position relation between the CGH compensator 3 and the lens 4 to be inspected is adjusted, after the adjustment is completed, the surface shape and curvature radius error of the lens 4 to be inspected can be detected through the annular main area 9 of the CGH compensator 3, and the surface shape error and the defocusing amount of the lens 4 to be inspected can be obtained through analysis.
The CGH compensator 3 as shown in fig. 2, comprising an alignment region 8, an annular main region 9 and a cat eye region 10, wherein the alignment region 8 is located in the outer annulus for aligning the CGH compensator 3 with the interferometer 1;
the cat eye region 10 is positioned in an inner annular zone and is divided into two parts, namely an annular cat eye region 102 and a central cat eye region 101, and the annular cat eye region 102 and the central cat eye region are used for detecting the distance deviation between the CGH compensator 3 and the mirror 4 to be detected;
the annular main region 9 is located between the annular cat eye region 102 and the central cat eye region 101, and is used for detecting the surface shape error and the curvature radius of the lens 4 to be detected.
In a preferred embodiment of the invention, the CGH compensator 3 is designed by:
firstly, designing an annular main area 9, inputting parameters of a mirror 4 to be detected in optical design software, setting the surface shape of the annular main area 9 as a Zernike phase, and optimizing by changing a Zernike coefficient and a distance parameter to enable the wave front to be zero;
secondly, designing an alignment area 8, so that light rays are incident on the alignment area 8 and are reflected back, thereby judging the position relationship between the interferometer 1 and the CGH compensator 3, changing the Zernike coefficient of the alignment area 8, and optimizing to enable the wave front to be zero;
designing a cat eye region 10, and performing double-light-path light ray tracing according to parameters of the to-be-inspected mirror 4, the annular main region 9 and the alignment region 8, so that light rays passing through the annular cat eye region 102 are transmitted to the to-be-inspected mirror 4 and then symmetrically returned through a central cat eye region 101 located in the center of an optical axis, the Zernike coefficient is changed, and the wave front is optimized to be zero.
In another embodiment of the invention, the required CGH compensator 3 is inscribed on a substrate with a diameter of 150mm according to the optical design software design; when optical design software is optimized, the scribing accuracy of the CGH compensator 3 needs to be controlled within 1%.
The optical path diagram of the cat eye region 10 of the conventional cat eye design is shown in fig. 4, and a coaxial aspherical mirror with a hole in the center cannot be measured, so that the CGH compensator 3 with the annular cat eye region 102 shown in fig. 2 is designed by utilizing the rotation symmetry of the to-be-inspected mirror 4, so that a cat eye point (an intersection point of light rays transmitted through the cat eye region 10 on the to-be-inspected mirror 4) is located between the center position and the edge of the to-be-inspected mirror 4 for one circle, and symmetrically returns through the central cat eye region 101 located at the center position of an optical axis, as shown in fig. 3.
Therefore, the invention does not need to strictly depend on the center of the mirror 4 to be detected, and can be suitable for measuring the curvature radius of the mirror with a hole in the center.
Fig. 1 shows a curvature radius detection device of an aspheric reflector according to the present invention, which uses an interferometer 1 to detect an aspheric mirror 4 to be detected, and comprises a standard mirror 2, a CGH compensator 3, and an interferometer adjusting mechanism 5, a CGH adjusting mechanism 6, and a mirror adjusting mechanism 7 for adjusting and making the interferometer 1, the CGH compensator 3, and the mirror 4 to be detected coaxial, respectively.
Light emitted by the interferometer 1 is emitted after passing through the standard mirror 2, a filter is placed at the focus of the emitted light beam, the light passing through the filter is incident on the CGH compensator 3, according to different areas of the CGH compensator 3, the light beam is reflected back to the interferometer 1 or is transmitted on the CGH compensator 3 to be incident on the mirror 4 to be inspected, the surface shape and curvature radius error of the mirror 4 to be inspected are detected through the annular main area 9, and the surface shape error and defocusing amount of the mirror 4 to be inspected can be obtained through analysis.
In a preferred embodiment of the present invention, as shown in the flow of the detection method shown in fig. 5, a suitable standard mirror 2 is selected, and a compensation optical path is built by using a CGH compensator 3:
s1, alignment CGH compensator 3 and interferometer 1: adjusting the standard mirror 2 and the light source of the interferometer 1 to a common light path, and placing an aperture filter at the focus position of the light beam of the interferometer 1; adjusting the position of the CGH compensator 3 relative to the interferometer 1 to make the interferogram of the quasi-region 8 be zero fringe, namely realizing the accurate alignment of the CGH, wherein the RMS of the interferometer 1 is minimum;
s2, aligning the CGH compensator 3 and the mirror to be detected 4: keeping the relative position of the interferometer 1 and the CGH compensator 3 unchanged, adjusting the position of the to-be-inspected mirror 4 to ensure that the light beams passing through the annular cat eye region 102 reach the to-be-inspected mirror 4 and symmetrically return through the central cat eye region 101, wherein the POWER value of the interferometer 1 is the minimum at the moment;
and S3, calculating and acquiring the curvature radius of the to-be-inspected lens 4.
In another embodiment of the invention, taking the mirror 4 to be detected as a concave mirror as an example, the standard mirror 2 with F/number less than or equal to R/number is selected.
In another embodiment of the present invention, after removing errors such as translation, tilt, etc. from the surface type data of the to-be-inspected mirror 4 obtained in step S3, the out-of-focus data of the annular main area 9 is read out on interferometer acquisition software such as Metropro, the curvature radius error of the to-be-inspected mirror 4 is calculated according to the out-of-focus amount, the full aperture position error is decoupled by using the partial error of the cat eye area 10, and then the curvature radius synthesis formula and the ideal curvature radius value are used for synthesis to obtain the curvature radius of the to-be-inspected mirror 4.
In another embodiment of the present invention, the aspheric curvature radius detection method is affected by manufacturing errors of the CGH compensator 3, environment, adjustment errors during detection, and the like. The manufacturing error of the CGH compensator 3 is eliminated, and the precision analysis is carried out on the detection result of the invention under the condition of accurately controlling the detection environment, so that the precision of the detected curvature radius is better than 30 mu m, the error measurement range is more than 2mm, and the detection of the curvature radius of the aspheric surface reflector is met.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (6)
1. A CGH compensator design method is characterized in that:
s1, designing a main area, inputting parameters of a mirror to be detected in optical design software, setting the surface shape of the annular main area as a Zernike phase, and optimizing by changing a Zernike coefficient and a distance parameter to enable the wave front to be zero;
s2, designing an alignment area, so that light rays are incident on the alignment area and reflected back by the CGH compensator, thereby judging the position relationship between the interferometer and the CGH compensator, changing the Zernike coefficient of the alignment area, and optimizing to make the wave front zero;
s3, designing a cat eye region, wherein the cat eye region is divided into an annular cat eye region and a central cat eye region, and double-light-path light tracing is carried out according to parameters of the to-be-inspected mirror, the annular main region and the alignment region, so that light passing through the annular cat eye region is transmitted to the to-be-inspected mirror and then symmetrically returned through the central cat eye region located at the center of an optical axis, the Zernike coefficient is changed, and the optimized design is realized so that the wave front is zero;
the alignment region is located in an outer annulus for aligning the CGH compensator and the interferometer;
the cat eye region is positioned in the inner annular zone and used for detecting the distance deviation between the CGH compensator and the to-be-detected mirror;
the annular main area is located the annular cat eye region with between the central cat eye region, be used for detecting wait to examine the shape of face error and the defocus volume of mirror.
2. An aspheric mirror curvature radius detection device for detecting an aspheric mirror to be inspected having a central aperture by using an interferometer, comprising a standard mirror and a CGH compensator designed as in claim 1.
3. The aspheric mirror curvature radius detection device as defined in claim 2, wherein the standard mirror is placed between the interferometer and the CGH compensator, and the mirror to be examined is placed on the other side of the CGH compensator;
the light that the interferometer sent is through emergent behind the standard mirror, and the focus position department of outgoing beam places the wave filter, passes through the light incidence of wave filter is gone up in the CGH compensator, according to the different region of CGH compensator, the light beam reflects back the interferometer or passes through incidenting after the CGH compensator transmission on waiting to examine the mirror, through annular main regional detection wait to examine mirror shape of face and curvature radius error, obtain through the analysis wait to examine the shape of face error and the defocus of mirror.
4. The apparatus for detecting radius of curvature of aspherical mirror as defined in claim 2, further comprising an interferometer adjusting mechanism, a CGH adjusting mechanism and a mirror to be inspected adjusting the interferometer, the CGH compensator and the mirror to be inspected to be coaxial, respectively.
5. A method for detecting the curvature radius of an aspheric mirror is characterized by comprising the following steps:
s1, aligning the CGH compensator and the interferometer: installing a standard mirror of an interferometer, adjusting the standard mirror and a light source of the interferometer to a common light path, and placing an aperture filter at the position of a light beam focus of the interferometer; the CGH compensator is designed according to claim 1, and the position of the CGH compensator relative to the interferometer is adjusted such that the interferogram of the alignment area is zero fringe;
s2, aligning the CGH compensator and the mirror to be detected: keeping the relative position of the interferometer and the CGH compensator unchanged, and adjusting the position of the mirror to be detected to enable the light beams passing through the annular cat eye region to reach the mirror to be detected and symmetrically return through the central cat eye region;
and S3, calculating and acquiring the curvature radius of the to-be-examined mirror.
6. The method for detecting the curvature radius of an aspheric mirror as recited in claim 5, wherein the aspheric mirror to be inspected having a convex aspheric surface or a concave aspheric surface can be detected.
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| CN113820104A (en) * | 2021-09-18 | 2021-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting interference inspection light path of meniscus lens |
| CN116839505A (en) * | 2023-08-31 | 2023-10-03 | 中国科学院长春光学精密机械与物理研究所 | On-orbit real-time detection method and system for primary mirror of spliced space optical telescope |
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