CN112667101B - Self-driven perspiration electronic skin and preparation method thereof - Google Patents

Self-driven perspiration electronic skin and preparation method thereof Download PDF

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Publication number
CN112667101B
CN112667101B CN202011515511.9A CN202011515511A CN112667101B CN 112667101 B CN112667101 B CN 112667101B CN 202011515511 A CN202011515511 A CN 202011515511A CN 112667101 B CN112667101 B CN 112667101B
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layer
polymer layer
polymer
electronic skin
hydrophilic
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CN112667101A (en
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凌云志
王垚
郑伟
燕英强
胡川
陈志涛
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Institute of Semiconductors of Guangdong Academy of Sciences
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Institute of Semiconductors of Guangdong Academy of Sciences
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Abstract

The application discloses a self-driven perspiration electronic skin and a preparation method thereof, wherein the preparation method of the electronic skin comprises the steps of manufacturing a conductive layer with a preset pattern; providing a first polymer layer on a first side of the conductive layer; disposing a hydrophilic layer on the first polymer layer; disposing a second polymer layer on a second side of the conductive layer, thereby forming a four-layer structure film; wherein the second polymer layer has hydrophobicity; etching to form conical micropores penetrating through the four-layer structural membrane, thereby obtaining the electronic skin; wherein the pore size of the hydrophilic layer is smaller than the pore size of the second polymer layer. When the electronic skin is used, the second polymer layer is close to a human body, the hydrophilic layer is far away from the human body, and sweat at the second polymer layer can be discharged to the hydrophilic layer on the surface through the capillary action of the conical micropores, so that active sweat discharge is realized.

Description

Self-driven perspiration electronic skin and preparation method thereof
Technical Field
The application relates to the technical field of electronic skins, in particular to a self-driven perspiration electronic skin and a preparation method thereof.
Background
The electronic skin is an electronic material which is similar to human skin and has the characteristics of flexibility, stretchability, temperature sensing, pressure sensing and the like of the human skin. Compared with the traditional rigid electronic material, the electronic skin can jointly protect the human tissue structure of the skin, and has higher sensing sensitivity, faster sensing speed and more functions.
The electronic skin material needs to be in contact with the surface of the skin for a long time, and if a human body is in a warm environment or under the condition of severe exercise, sweat cannot be timely discharged, so that the service life, the sensing sensitivity and the wearing comfort of the electronic skin are affected.
Disclosure of Invention
The application provides a self-driven perspiration electronic skin and a preparation method thereof, and aims to solve the problem that sweat cannot be timely discharged in the prior art, and the service life of the electronic skin is affected.
In order to solve the technical problem, the application provides a method for preparing a self-driven perspiration electronic skin, which comprises the steps of manufacturing a conductive layer with a preset pattern; providing a first polymer layer on a first side of the conductive layer; disposing a hydrophilic layer on the first polymer layer; disposing a second polymer layer on a second side of the conductive layer, thereby forming a four-layer structure film; wherein the second polymer layer has hydrophobicity; etching to form conical micropores penetrating through the four-layer structural membrane, thereby obtaining the electronic skin; wherein the pore size of the hydrophilic layer is smaller than the pore size of the second polymer layer.
In order to solve the technical problem, the application provides a self-driven perspiration electronic skin, which comprises a conductive layer, a first side and a second side, wherein the conductive layer comprises a first conductive layer and a second conductive layer; a first polymer layer disposed on a first side of the conductive layer; a hydrophilic layer disposed on the first polymer layer; a second polymer layer disposed on a second side of the conductive layer, wherein the second polymer layer is hydrophobic; and the conical micropores penetrate through the electronic skin and respectively form pore diameters in the hydrophilic layer and the second polymer layer, wherein the pore diameter of the hydrophilic layer is smaller than that of the second polymer layer.
The application provides a self-driven perspiration electronic skin and a preparation method thereof, wherein the preparation method of the self-driven perspiration electronic skin comprises the steps of manufacturing a conductive layer with a preset pattern; providing a first polymer layer on a first side of the conductive layer; disposing a hydrophilic layer on the first polymer layer; disposing a second polymer layer on a second side of the conductive layer, thereby forming a four-layer structure film; wherein the second polymer layer has hydrophobicity; etching to form conical micropores penetrating through the four-layer structural membrane, thereby obtaining the electronic skin; wherein the pore size of the hydrophilic layer is smaller than the pore size of the second polymer layer. When the electronic skin is used, the second polymer layer is close to a human body, the hydrophilic layer is far away from the human body, and sweat at the second polymer layer can be discharged to the hydrophilic layer on the surface through the capillary action of the conical micropores, so that active sweat discharge is realized.
Drawings
In order to more clearly illustrate the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of an electronic skin of the present application;
FIG. 2 is a schematic structural diagram of another embodiment of an electronic skin of the present application;
FIG. 3 is a schematic diagram of an embodiment of electronic skin touch detection of the present application;
FIG. 4 is a schematic flow chart of an embodiment of a method for preparing an electronic skin according to the present application;
FIG. 5 is a schematic structural diagram of a first embodiment of an electronic skin of the present application during a manufacturing process;
FIG. 6 is a schematic structural diagram of a second embodiment of the present invention in the process of manufacturing an electronic skin;
fig. 7 is a schematic structural diagram of a third embodiment of the present invention in the process of preparing an electronic skin.
Detailed Description
In order to enable those skilled in the art to better understand the technical solution of the present application, the self-driven perspiration electronic skin and the preparation method thereof provided by the present application are further described in detail below with reference to the accompanying drawings and the detailed description.
The electronic skin material needs to be in contact with the surface of the skin for a long time, and if a human body is in a warm environment or under the condition of severe exercise, sweat cannot be timely discharged, so that the service life, the sensing sensitivity and the wearing comfort of the electronic skin are affected.
Based on this, this application provides a can be from electronic skin of drive perspire and preparation method, electronic skin includes hydrophilic layer, hydrophobic layer and runs through hydrophilic layer and the conical micropore of hydrophobic layer, and when electronic skin used, the human body is pressed close to the hydrophobic layer, and the human body is kept away from to the hydrophilic layer, because micro-nano structure and conical micropore's capillary action, can in time discharge the hydrophilic layer with sweat from the hydrophobic layer through conical micropore to can in time discharge sweat skin surface.
Referring to fig. 1-3, fig. 1 is a schematic structural diagram of an embodiment of an electronic skin of the present application; FIG. 2 is a schematic structural diagram of another embodiment of an electronic skin of the present application; FIG. 3 is a schematic diagram of an embodiment of electronic skin touch detection according to the present application.
The e-skin 100 may include a conductive layer 110, a first polymer layer 120, a hydrophilic layer 130, a second polymer layer 140, and conical shaped micropores 150.
The conductive layer 110 may include a first side and a second side; wherein the conductive layer 110 comprises gold nanowires. The first polymer layer 120 may be disposed on a first side of the conductive layer. Hydrophilic layer 130 may be disposed on the first polymer layer. A second polymer layer 140 may be disposed on a second side of the conductive layer 110, wherein the second polymer layer 140 has hydrophobicity. Conical micropores 150 may penetrate through e-skin 100 and form pore sizes at hydrophilic layer 130 and second polymer layer 140, respectively, wherein the pore size of hydrophilic layer 130 is smaller than the pore size of second polymer layer 140.
Further, the conductive layer 110 may include one of a gold nanowire layer, a carbon nanotube layer, or a poly 3, 4-ethylenedioxythiophene/polystyrene sulfonate (PEDOT: PSS) layer; the hydrophilic layer 130 may include at least one of nitrocellulose, cellulose acetate, a nano-cellulose film, and ultra-thin filter paper; the materials of the first polymer layer 120 and the second polymer layer 140 may be the same; the material of the first polymer layer 120 and the second polymer layer 140 may include at least one of Polyimide (PI), Polydimethylsiloxane (PDMS), Polyethylene (PE), polyethylene terephthalate (PET), and copolyester (Ecoflex).
The electronic skin 100 may further include external electrodes 160, as shown in fig. 2, the external electrodes 160 may be respectively disposed at upper and lower ends of the electronic skin 100. The gold nanowires of the conductive layer 110 may extend outward to be connected to the external electrode 170, thereby implementing electrical signal transmission.
A coupling capacitor is formed between a human body electric field and a finger and a conductor layer, and the capacitance is in direct proportion to the area according to a parallel plate capacitance formula, so that a group of triangular electrodes can be designed, as shown in figure 3, and the induction in two-dimensional directions is realized.
Specifically, the e-skin 100 may be divided into a conductive material coated area C and a conductive block gap B in which conical pores 150 exist. When a finger presses the electronic skin 100, a finger contact area a is formed, a minute current is generated between the finger and the electrode, and position information can be located by analyzing the current.
Based on the electronic skin, the application also provides a method for preparing the electronic skin. Referring to fig. 4-7, fig. 4 is a schematic flow chart of an embodiment of a method for preparing an electronic skin according to the present application; FIG. 5 is a schematic structural diagram of a first embodiment of an electronic skin of the present application during a manufacturing process; FIG. 6 is a schematic structural diagram of a second embodiment of the present invention in the process of manufacturing an electronic skin; fig. 7 is a schematic structural diagram of a third embodiment of the present invention in the process of preparing an electronic skin. In this embodiment, the method for preparing the electronic skin may specifically include the following steps:
s11: and manufacturing a conductive layer with a preset pattern.
A conductive layer 110 with a preset pattern is fabricated on the temporary carrier 170, wherein the conductive layer 110 may include gold nanowires. Alternatively, the material of the temporary carrier plate 170 may be glass, silicon, ceramic, or the like. After this step is completed, the electronic skin of the first morphology as shown in fig. 5 can be obtained.
Because of the human body electric field, a coupling capacitor is formed between the finger and the conductor layer, and the capacitance is in direct proportion to the area according to a parallel plate capacitance formula, a group of triangular electrodes can be designed, and the induction in two-dimensional directions is realized. As shown in fig. 1, the predetermined pattern is a triangular pattern, resulting in a plurality of alternating triangular conductive material coating areas.
Specifically, the temporary carrier 170 may be exposed, developed and/or laser etched by a photoresist, so as to obtain a conductive material coating region with a preset pattern; the conductive layer 110 with a preset pattern is obtained by growing a vertical gold nanowire in a conductive material coating region, spin-coating a parallel gold nanowire solution, spin-coating a carbon nanotube solution, or spin-coating a poly 3, 4-ethylenedioxythiophene/polystyrene sulfonate solution (PEDOT: PSS).
It is noted that conductive block gaps may be disposed between the conductive material coated regions, and that conical pores 150 may be disposed in the conductive block gaps, and the etching of the conical pores 150 is described in detail below.
S12: a first polymer layer is disposed on a first side of the conductive layer.
S13: a hydrophilic layer is disposed on the first polymer layer.
After the gold nanowires of the conductive layer 110 are coated, the first polymer solution may be coated in two steps. The first polymer layer 120 can be obtained after the first polymer solution is formed into a film. After this step is completed, the second morphology of the electronic skin as shown in fig. 6 can be obtained. Specifically, the step of applying the first polymer solution includes:
the first step is as follows: a first polymer solution is coated on the conductive layer 110.
The second step is that: continuously coating the first polymer solution after the first polymer solution forms a film; the hydrophilic layer 130 is provided before the first polymer solution is formed into a film.
Wherein the purpose of the first step may be to embed the first polymer solution completely in the conductive layer; the purpose of the second step is to make the first polymer layer 120 have a certain thickness and to make the material of the hydrophilic layer 130 have a good bonding force with the first polymer layer 120, so that the hydrophilic layer 130 and the first polymer layer 120 can be peeled off together from the temporary carrier 170.
Wherein, the first polymer solution can be formed into a film by drying or curing. The material of the first polymer layer 120 may include at least one of Polyimide (PI), Polydimethylsiloxane (PDMS), Polyethylene (PE), polyethylene terephthalate (PET), and copolyester (Ecoflex).
The material of the hydrophilic layer 130 may include at least one of nitrocellulose, cellulose acetate, a nano-cellulose film, and an ultra-thin filter paper.
S14: disposing a second polymer layer on a second side of the conductive layer, thereby forming a four-layer structure film; wherein the second polymer layer has hydrophobic properties.
The temporary carrier 170 is peeled off from the conductive layer 110, and the first polymer layer 120 is disposed on the first side of the conductive layer 110, and the hydrophilic layer 130 is disposed on the first polymer layer 120. The second polymer layer 140 is disposed on the second side of the conductive layer 110, thereby forming a four-layer structure film of the hydrophilic layer 130, the first polymer layer 120, the conductive layer 110, and the second polymer layer 140, respectively, from top to bottom. After this step is completed, an electronic skin of a third morphology as shown in fig. 7 can be obtained.
In this embodiment, the second polymer may have hydrophobicity, i.e., the second polymer layer 140 may serve as a hydrophobic layer. Specifically, the material of the first polymer layer 120 and the material of the second polymer layer 140 may be the same. The material of the first polymer layer 120 may include at least one of Polyimide (PI), Polydimethylsiloxane (PDMS), Polyethylene (PE), polyethylene terephthalate (PET), and copolyester (Ecoflex).
S15: etching to form conical micropores penetrating through the four-layer structural membrane, thereby obtaining the electronic skin; wherein the pore size of the hydrophilic layer is smaller than the pore size of the second polymer layer.
Conical micropores 150 are formed in the four-layer structure film by laser etching, thereby obtaining an electronic skin. In which conical pores 150 penetrate the four-layer structure film, laser light may be incident from the second polymer layer 140 of the four-layer structure film, and pore diameters are formed at both the second polymer layer 140 and the hydrophilic layer 130. Due to the nature of laser etching, the micro-pores formed by laser etching are conical, i.e., the pore diameter of the hydrophilic layer 130 is smaller than that of the second polymer layer 140. The conical pores 150 and the double-sided electronic skin can realize self-driven perspiration. The double-sided property means that the hydrophilic layer 130 and the second polymer layer 140 with hydrophobicity are respectively arranged on two sides of the electronic skin, and sweat on the second polymer layer 140 can be discharged to the hydrophilic layer 130 through the conical micropores 150 by combining the capillary action of the conical micropores 150, so that self-driven perspiration of the electronic skin is realized. After this step, an electronic skin as shown in fig. 1 can be obtained.
In the embodiment, the spot size of the laser etching can be 0.01-0.05mm, and preferably, the spot size can be 0.035 mm.
In other embodiments, mechanical hole-rotating method can be used to form conical micro-holes in the four-layer structure film, wherein the hole-rotating rotor can be inverted cone-shaped with the size of 0.1-0.5 mm.
Alternatively, the conical pores may be formed in the four-layer structure film by plasma dry etching or wet etching.
S16: external electrodes are arranged at the upper end and the lower end of the electronic skin.
Optionally, external electrodes 160 may be disposed at the upper and lower ends of the electronic skin, or four external electrodes 160 may be connected to four corners of the electronic skin, and the gold nanowires of the conductive layer 110 extend outward to connect the external electrodes 160. The external electrodes 160 may be connected to an IC processor to implement electrical signal processing. When a finger presses the electronic skin 100, a tiny current is generated between the finger and the electrode, and position information can be located by analyzing the intensity of the current passing through the four corners. After this step is completed, an electronic skin as shown in fig. 2 can be obtained.
By the preparation method, the electronic skin touch screen capable of actively perspiring can be obtained, and a plurality of interface problems of the electronic skin and the human skin caused by sweat accumulation can be solved: the electronic skin touch screen is of a flexible structure and can be attached to the skin, so that a human-body-like skin electronic touch device is realized; the two-sided film and the conical micropores can self-drive to perspire, so that a plurality of interface problems of electronic skin and human skin caused by sweat accumulation, such as interface impedance rise, skin breathing difficulty after long-time wearing and the like, are solved; the electronic skin touch screen can achieve the touch function realized by combining the double-layer films only by the single-layer conducting layer, so that the consumption of conducting materials can be reduced, and the cost is reduced.
It should be noted that, in the present embodiment, the conductive layer may be manufactured by using a temporary carrier, and in other embodiments, the conductive layer may also be directly grown without using a temporary carrier.
The application provides a self-driven perspiration electronic skin and a preparation method thereof, wherein the preparation method of the electronic skin comprises the steps of manufacturing a conductive layer with a preset pattern; providing a first polymer layer on a first side of the conductive layer; disposing a hydrophilic layer on the first polymer layer; disposing a second polymer layer on a second side of the conductive layer, thereby forming a four-layer structure film; wherein the second polymer layer has hydrophobicity; etching to form conical micropores penetrating through the four-layer structural membrane, thereby obtaining the electronic skin; wherein the pore size of the hydrophilic layer is smaller than the pore size of the second polymer layer. When the electronic skin is used, the second polymer layer is close to a human body, the hydrophilic layer is far away from the human body, and sweat at the second polymer layer can be discharged to the hydrophilic layer on the surface through the capillary action of the conical micropores, so that active sweat discharge is realized.
It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. In addition, for convenience of description, only a part of structures related to the present application, not all of the structures, are shown in the drawings. The step numbers used herein are also for convenience of description only and are not intended as limitations on the order in which the steps are performed. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms "first", "second", etc. in this application are used to distinguish between different objects and not to describe a particular order. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
The above description is only for the purpose of illustrating embodiments of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings of the present application or are directly or indirectly applied to other related technical fields, are also included in the scope of the present application.

Claims (7)

1. A method for preparing electronic skin by self-driven perspiration is characterized by comprising the following steps:
manufacturing a conductive layer with a preset pattern;
providing a first polymer layer on a first side of the conductive layer;
disposing a hydrophilic layer on the first polymer layer;
disposing a second polymer layer on a second side of the conductive layer, thereby forming a four-layer structure film; wherein the second polymer layer has hydrophobicity;
etching to form conical micropores penetrating through the four-layer structure film, thereby obtaining the electronic skin; wherein the pore size of the hydrophilic layer is smaller than the pore size of the second polymer layer;
wherein, the conducting layer of the pattern is predetermine in the preparation includes:
exposing and developing and/or laser etching on the temporary carrier plate through photoresist to obtain a conductive material coating area of the preset pattern;
growing a vertical gold nanowire, a spin-coating parallel gold nanowire solution, a spin-coating carbon nanotube solution or a spin-coating poly 3, 4-ethylenedioxythiophene/polystyrene sulfonate solution in the conductive material coating area to obtain a conductive layer with a preset pattern;
wherein said disposing a first polymer layer on a first side of said conductive layer and disposing a hydrophilic layer on said first polymer layer comprises:
coating a first polymer solution on the conductive layer;
after the first polymer solution is formed into a film, coating the first polymer solution;
the hydrophilic layer is provided before the first polymer solution is formed into a film.
2. The method of claim 1, wherein the etching forms conical pores through the four-layer structure film, comprising:
forming conical micropores in the four-layer structural film by utilizing laser etching, wherein the spot size of the laser is 0.01-0.05 mm; alternatively, the first and second electrodes may be,
forming conical micropores in the four-layer structure film by using a mechanical hole rotating mode, wherein a hole rotating rotor is in an inverted cone shape, and the size of the hole rotating rotor is 0.1-0.5 mm; alternatively, the first and second electrodes may be,
and forming conical micropores in the four-layer structural film by using a plasma dry etching or wet etching mode.
3. The method of claim 1, wherein after obtaining the electronic skin, further comprising:
and external electrodes are arranged at the upper end and the lower end of the electronic skin.
4. The method of claim 1, wherein the hydrophilic layer comprises at least one of nitrocellulose, cellulose acetate, a nanocellulose membrane, and ultra-thin filter paper; the first polymer layer and the second polymer layer are the same; the first polymer layer and the second polymer layer comprise at least one of polyimide, polydimethylsiloxane, polyethylene terephthalate and copolyester.
5. An electronic skin that self-drives perspiration, comprising:
a conductive layer comprising a first side and a second side; the conductive layer comprises one of a gold nanowire layer, a carbon nanotube layer or a poly (3, 4-ethylenedioxythiophene)/polystyrene sulfonate layer;
a first polymer layer disposed on a first side of the conductive layer;
a hydrophilic layer disposed on the first polymer layer;
a second polymer layer disposed on a second side of the conductive layer, wherein the second polymer layer is hydrophobic;
and conical micropores penetrating through the electronic skin and respectively forming pore diameters in the hydrophilic layer and the second polymer layer, wherein the pore diameter of the hydrophilic layer is smaller than that of the second polymer layer.
6. The electronic skin of claim 5, wherein the hydrophilic layer comprises at least one of nitrocellulose, cellulose acetate, a nanocellulose membrane, and ultra-thin filter paper; the first polymer layer and the second polymer layer are the same; the first polymer layer and the second polymer layer comprise at least one of polyimide, polydimethylsiloxane, polyethylene terephthalate and copolyester.
7. The electronic skin of claim 5, further comprising:
and the external electrodes are respectively arranged at the upper end and the lower end of the electronic skin.
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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114496399A (en) * 2022-01-20 2022-05-13 复旦大学 Preparation method of breathable sweat-removing flexible electrode

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4873033A (en) * 1981-02-27 1989-10-10 Klaus Heckmann Process for the production of hyperfiltration membranes
CN107632053A (en) * 2017-09-07 2018-01-26 中国人民解放军第三军医大学 A kind of detection method of quick detection sweat intermediate ion concentration

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9585977B2 (en) * 2006-02-24 2017-03-07 Nanovibronix, Inc System and method for surface acoustic wave treatment of skin
CN102048245B (en) * 2009-11-10 2013-07-31 福懋兴业股份有限公司 Single-way moisture guide rapid-dry comfortable fabric and manufacture method thereof
TWI425213B (en) * 2010-12-24 2014-02-01 Taiwan Textile Res Inst Simulate skin heat plate and fabric drying measure device using the same
CN104555883A (en) * 2013-10-24 2015-04-29 中国科学院苏州纳米技术与纳米仿生研究所 Electronic skin and production method thereof
WO2015165534A1 (en) * 2014-04-30 2015-11-05 Galvanic Limited An electrodermal activity sensor
CN105326495A (en) * 2015-10-19 2016-02-17 杨军 Method for manufacturing and using wearable flexible skin electrode
CN205648950U (en) * 2016-03-31 2016-10-19 杭州简赛电子商务有限公司 Clothes with magnetotherapy and perspire function
CN106813811B (en) * 2017-01-20 2019-04-05 南京大学 A kind of capacitive pliable pressure sensor of high sensitivity
CN109384194A (en) * 2017-08-07 2019-02-26 张家港祥成医用材料科技有限公司 A kind of preparation method of the non-solid phase biological pressure sensor of electronic skin
CN107941246B (en) * 2017-11-10 2019-11-22 北京大学 It is a kind of contactless from driving electronic skin and preparation method thereof
CN109520645A (en) * 2018-11-22 2019-03-26 南方科技大学 A kind of integral type capacitance type sensor and its preparation method and application
CN109770866B (en) * 2018-12-11 2020-08-07 东北大学 Preparation method of high-sensitivity electronic skin
CN109801739B (en) * 2019-01-30 2020-09-11 东北师范大学 High-precision patterned stretchable electrode and preparation method thereof
GB2584826B (en) * 2019-05-08 2022-12-21 Wootzano Ltd Substrates comprising nanowires
CN110823968A (en) * 2019-11-27 2020-02-21 浙江清华柔性电子技术研究院 Sweat sensor and preparation method thereof
CN211656513U (en) * 2020-01-17 2020-10-09 上海科谷纳新材料科技有限公司 Surface waterproof composite film of gravity IC chip and peripheral circuit board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4873033A (en) * 1981-02-27 1989-10-10 Klaus Heckmann Process for the production of hyperfiltration membranes
CN107632053A (en) * 2017-09-07 2018-01-26 中国人民解放军第三军医大学 A kind of detection method of quick detection sweat intermediate ion concentration

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