CN106959175B - A kind of sliding touch sensor of the Grazing condition condenser type based on pyramid structure - Google Patents
A kind of sliding touch sensor of the Grazing condition condenser type based on pyramid structure Download PDFInfo
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- CN106959175B CN106959175B CN201710170984.1A CN201710170984A CN106959175B CN 106959175 B CN106959175 B CN 106959175B CN 201710170984 A CN201710170984 A CN 201710170984A CN 106959175 B CN106959175 B CN 106959175B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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Abstract
The invention discloses a kind of, and the Grazing condition condenser type based on pyramid structure slides touch sensor, it is to be printed with upper layer public electrode, lower layer's central electrode and four rectangle induction electrodes positioned at each side periphery of lower layer's central electrode respectively on upper and lower two flexible printed circuit board, common electrode layer and lower layer's central electrode are for perceiving tactile data, upper layer public electrode and 4 induction electrodes for perceiving tangential information and sliding feel information at the middle and upper levels；It is provided with dielectric layer between two flexible printed circuit boards, the upper surface integrated molding of the dielectric layer has pyramid structure；PDMS hemispherical contact is fixed on upper flexible printed circuit board.The sliding touch sensor of Grazing condition condenser type of the invention, can differentiate lesser haptic force, while being able to achieve the measurement to all directions shearing force again, substantially increase the mechanical sensitivity of sensor, realize sensor in the sliding of shear direction and feel detection function.
Description
Technical field
The invention belongs to field of sensing technologies, and in particular to a kind of Grazing condition condenser type applied to artificial intelligence skin is sliding
Touch sensor.
Background technique
Effective means of the sliding touch sensor as intelligent robot sensing external environment, is grabbed for realizing to object
Take detection, during close to contact and the differentiation of sliding mode etc., it is light to play act foot in electronic skin research field
The effect of weight.With the development of the times, electronic skin has been applied to robot, touch detection, monitoring temperature, health medical treatment etc.
Field.
In the various applications of electronic skin, induction tactile and sliding feel detection occupy extremely important status.Wiping, which is felt, to be passed
Sensor imitates the perceptional functions such as manpower is felt with contacting feeling, sliding, heat is felt, it is required to be that machine human and environment directly acts on
Medium.Such as sliding touch sensor can control chucking power by the three-dimensional force information between inspecting manipuator and contact interface to prevent
Opposite sliding only occurs between target object and manipulator, final assist people completes crawl and operation task.Wherein slide
Signal is the feedback information for realizing the control of manipulator clamping power, is the key that robot completes high-precision crawl and operation task institute
?.
Domestic and foreign scholars measure in touch sensor three-dimensional force and sliding feel context of detection achieves important advance, but remain one
Fixed deficiency.Bao Zhenan of Stanford Univ USA et al. fills dielectric layer using hemispherical micro-structure, can delicately examine very much
Ambient pressure is surveyed, but not can be carried out sliding feel detection.South Korea Seoul national university Choong et al. is proposed and a kind of is used pyramid
Resistance-type touch sensor of the micro-structure as dielectric layer, the sensor all have very high sensitivity in biaxial stretch-formed direction,
However range is smaller, and preparation process is complex.And usually this kind of sensor bionics skin when mostly use rigid matrix,
Lack due flexibility, is not suitable in the biggish place application of joint of robot iso-curvature.
Summary of the invention
It is an object of the invention to overcome shortcoming present in above-mentioned existing all multisensors, propose a kind of based on gold
The sliding touch sensor of the Grazing condition condenser type of word tower structure, with solve existing sensor cannot high-precision, wide range while inspection
Survey three-dimensional force and sliding the problem of feeling.
The present invention adopts the following technical scheme that in order to solve the technical problem
The present invention is based on the sliding touch sensors of the Grazing condition condenser type of pyramid structure, it is characterized in that:
Including upper flexible printed circuit board and lower flexible printed circuit board；
There is upper layer public electrode in the surface printing of the upper flexible printed circuit board；
There are square lower layer's central electrode and equidistant position in the surface printing of the lower flexible printed circuit board
Four identical rectangle induction electrodes in each side periphery of lower layer's central electrode；Each induction electrode is with lower layer's central electrode
Center is that symmetric points are symmetrical two-by-two；
Dielectric layer is provided between the upper flexible printed circuit board and lower flexible printed circuit board, the dielectric layer
Upper surface integrated molding has pyramid structure；The upper layer public electrode is contacted with the tower top of the pyramid structure, described
The following table face contact of lower layer's central electrode and the dielectric layer；
PDMS hemispherical contact is fixed with by flexible cover sheet on the upper flexible printed circuit board.
The length of long sides of each induction electrode be equal to lower layer's central electrode side length, the long side of each induction electrode with and its
The side of adjacent lower layer's central electrode is parallel.
The lower surface of the dielectric layer is by lower layer's central electrode and four induction electrode all standings；The upper layer public electrode
Positioned at the surface of lower layer's central electrode, and the upper layer public electrode is on lower flexible printed circuit board (6) surface
Orthographic projection by lower layer's central electrode all standing, by each induction electrode half mulching.
The dielectric layer is using PDMS as material.The upper flexible printed circuit board and the lower flexible printed circuit board it is soft
Property substrate is using polyimides as material.The flexible cover sheet uses silicone rubber material.
The upper layer public electrode pad of well format was provided in the flexible substrates of upper flexible printed circuit board, upper layer is public
After common electrode leads to upper layer public electrode pad by enameled wire, then pass through signal wire extraction；In lower flexible printed circuit board
Be provided with the pad of lower layer the central electrode pad and each induction electrode of well format in flexible substrates, lower layer's central electrode and
Each induction electrode passes through respectively after enameled wire leads to respective pad, then passes through signal wire and draw.This via hole mode can be with
Make to be routed more flexible, is easy to array.
Upper layer common electrode layer and lower layer's central electrode are for perceiving tactile data, 4 senses of upper layer public electrode and lower layer
Answer electrode for perceiving tangential information and sliding feel information.
Compared with the prior art, the beneficial effects of the present invention are embodied in:
1, the present invention is based on the sliding touch sensors of the Grazing condition condenser type of pyramid structure, with common touch sensor and pressure
Force snesor is compared, and can be perceived haptic force and the measurement to all directions shearing force, be improved the machinery of sensor
Sensitivity, while the detection to sliding tactile data is realized, improve the applicability of sensor；
2, the present invention is based on the sliding touch sensors of the Grazing condition condenser type of pyramid structure, using FPCB (its flexible substrates
For polyimides) it is electrode layer, it uses PDMS for dielectric layer, is flexible material, compared with traditional sensors, it is very good to have
Flexibility, make sensor can placing range it is wider；
3, the present invention is based on the sliding touch sensors of the Grazing condition condenser type of pyramid structure, with general multilayer up-down structure power
Dependent sensor is compared, and by using the dielectric layer of pyramid structure, greatly improves the normal direction sensitivity and tangential spirit of sensor
Sensitivity；And the present invention by change dielectric layer proportion, adjust pyramid structure inclination angle, thus it is possible to vary the sensor it is sensitive
Degree and range, have further expanded its application range；
4, the present invention is based on the sliding touch sensor preparation process of the Grazing condition of pyramid structure is simple, easy to spread.
Detailed description of the invention
Fig. 1 is that the present invention is based on the vertical section structure charts of the sliding touch sensor of the Grazing condition of pyramid structure；
Fig. 2 is that the present invention is based on the fractionation perspective views of the sliding touch sensor of the Grazing condition of pyramid structure；
Fig. 3 is that the present invention is based on the three-dimensional system of coordinate figures of the sliding touch sensor of the Grazing condition of pyramid structure；
Fig. 4 is that the present invention is based on the sliding touch sensor of the Grazing condition of pyramid structure and planar dielectric layer structure sensors
Capacitor-normal force curve relation figure；
Fig. 5 is that the present invention is based on the sliding touch sensors of the Grazing condition of pyramid structure, and small dynamic response song is acted in pressure
Line；
Fig. 6 is that the present invention is based on the sliding touch sensor of the Grazing condition of pyramid structure and planar dielectric layer structure sensors
Capacitor-tangential force curve relation figure；
Fig. 7 is the sliding feel signal of acquisition the present invention is based on the sliding touch sensor of the Grazing condition of pyramid structure；
Figure label: 1PDMS hemispherical contact；2 flexible cover sheets；Flexible printed circuit board on 3；4 upper layer public electrodes；
5 dielectric layers；6 lower flexible printed circuit boards；7 lower layer's central electrodes；8 first induction electrodes；9 second induction electrodes；10 third senses
Answer electrode；11 the 4th induction electrodes；The upper layer 4A public electrode pad；7A lower layer central electrode pad；The weldering of the first induction electrode of 8A
Disk；9A the second induction electrode pad；10A third induction electrode pad；The 4th induction electrode pad of 11A；12 enameled wires.
Specific embodiment
Embodiment 1
As shown in Figure 1 and Figure 2, the sliding touch sensor of Grazing condition of the present embodiment based on pyramid structure includes upper flexible print
Printed circuit board 3 and lower flexible printed circuit board 6；
There is upper layer public electrode 4 in the surface printing of upper flexible printed circuit board 3；
There is square lower layer's central electrode 7 in the surface printing of lower flexible printed circuit board 6 and is equidistantly located at
Four identical rectangle induction electrode (the first induction electrodes 8 of each side periphery of lower layer's central electrode；Second induction electrode 9；Third
Induction electrode 10；4th induction electrode 11)；Each induction electrode is symmetrical two-by-two as symmetric points using the center of lower layer's central electrode 7；
Dielectric layer 5, the upper table of dielectric layer 5 are provided between upper flexible printed circuit board 3 and lower flexible printed circuit board 6
Face integrated molding has pyramid structure；Upper layer public electrode 4 is contacted with the tower top of pyramid structure, lower layer's central electrode 7 with
The following table face contact of the dielectric layer 5；In other words dielectric layer is by a plane layer and the pyramid structure on plane layer
Dimerous, increasing pyramid structure layer can be improved the resolving power of sensor, detects small tactile data, put down simultaneously
The presence of surface layer increases the normal direction range of sensor.
PDMS hemispherical contact is fixed with by flexible cover sheet 2 on upper flexible printed circuit board 3.
Specifically, the length of long sides of each induction electrode be equal to lower layer's central electrode side length, the long side of each induction electrode with
It is parallel with its adjacent side of lower layer's central electrode.Lower layer's central electrode and four induction electrodes are covered the lower surface of dielectric layer entirely
Lid；Upper layer public electrode 4 is located at the surface of lower layer's central electrode 7, and upper layer public electrode 4 is in lower flexible printed circuit board 6
The orthographic projection on surface is by 7 all standing of lower layer's central electrode, by each induction electrode along long side middle line half mulching.
Specifically, the long 8mm of the bottom plane of dielectric layer 5, width 8mm, with a thickness of 1mm, pyramid structure disposed thereon
Bottom surface side length 2mm, a height of 1mm of layer, inclination angle are 45 °.The thickness of upper layer public electrode 4, lower layer's central electrode 7 and each induction electrode
It is 0.25mm, the thickness of the flexible substrates of flexible cover sheet and two flexible printed circuit boards is 0.25mm, PDMS hemispherical
Contact radius is 4mm, and entire sensor height is 7.25mm.Lower layer's central electrode 7 is having a size of 5mm × 5mm, each induction electrode ruler
Very little is 5mm × 1.5mm, and the spacing of each induction electrode and lower layer's central electrode adjacent edge is 0.5mm, the ruler of upper layer public electrode 4
Very little is 7.5mm × 7.5mm.
Specifically, being provided with the upper layer public electrode pad of well format in the flexible substrates of upper flexible printed circuit board
4A after upper layer public electrode 4 leads to upper layer public electrode pad 4A by enameled wire, then passes through signal wire extraction；In lower flexibility
The pad of lower layer the central electrode pad 7A and each induction electrode of well format were provided in the flexible substrates of printed circuit board
(the first induction electrode pad 8A；Second induction electrode pad 9A；Third induction electrode pad 10A；4th induction electrode pad
11A), lower layer's central electrode and each induction electrode pass through respectively after enameled wire leads to respective pad, then are drawn by signal wire
Out.This via hole mode can make to be routed more flexible, be easy to array.And it is based on FPCB technology, each electrode and each pad system
Make on a flexible substrate, to enable each electrode and any bending deformation of pad, there is good flexibility.
Specifically, flexible cover sheet 2 is a thin layer silicon rubber being spun on flexible printed circuit board 3, for protecting
Upper flexible printed circuit board, conductive contact active force.Flexible cover sheet 2 selects Zhong Hao Chenguang Research Institute of Chemical Industry Co., Ltd
GD401 type silicon rubber is material, the silicon rubber can voluntarily curing molding at room temperature, and have after curing molding soft well
Toughness.
Specifically, PDMS hemispherical contact is that the hemispherical that a radius is 8mm is printed using 3D printing technique, it will
Suitable PDMS is poured into the mold, to its curing molding, is removed from the molds molded contact layer.
Specifically, being based on flexible printed circuit board (FPCB) technology, upper flexible printed circuit board 3 and lower flexible print circuit
For the flexible substrates of plate 6 using polyimides as material, respective electrode layer is one layer of copper foil for being plated in flexible substrates polyimide surface.
Specifically, dielectric layer 5 is with PDMS (10:1) for sensitive material.Inverted pyramid shape mould is printed using 3D printing technique
Tool after two kinds of components of PDMS are mixed evenly, deaerates for the sensitivity and stability for guaranteeing sensor in vacuum chamber,
It is then injected into mold.The mold is placed on the lower layer's central electrode and induction electrode of lower flexible printed circuit board, mould is made
Tool is aligned with each electrode, and solution to be mixed forms at room temperature, solidifies after sixty minutes under the conditions of 90 DEG C, removes mold
Obtain the dielectric layer 5 of the pyramid structure of ideal form.
Dielectric layer, two flexible printed circuit boards, flexible cover sheet and PDMS hemispherical contact are passed through into plasma
Processing is bonded together after 90 seconds.Guarantee that filler distribution is uniform, form stable mechanical structure, guarantees mechanical performance.
Embodiment 2
As shown in figure 3, the three-dimensional system of coordinate figure of the sliding touch sensor of Grazing condition of the building based on pyramid structure, wherein with
The center of lower layer's central electrode is origin, and for Z axis along the short transverse of sensor, X-axis edge is parallel to the first induction electrode and third
The direction of induction electrode long side, Y-axis is along the direction for being parallel to the second induction electrode and the 4th induction electrode long side.
The capacitor of the present embodiment, which extracts to select, has I2Environment self-calibration function in C compatible type serial line interface and piece, up to
The AD7147-1 that 16 CDC precision, 13 appearances of a street input, cooperates single-pole double-throw switch (SPDT) ADG734, can easily realize to multichannel
The acquisition of capacitance signal.
The mechanism of the sliding touch sensor detection tactile of the present embodiment Grazing condition condenser type is as follows: when hemispherical contact is by outer
When boundary's normal force (along the power of Z-direction), between the upper layer public electrode 4 and lower layer's central electrode 7 of 5 upper and lower ends of dielectric layer
Spacing becomes smaller, while pyramid structure shape PDMS replaces partial air and effective dielectric constant is caused to increase, so as to cause capacitor
The increase of value.When sensor is squeezed by different size of external force, between upper layer public electrode and lower layer's central electrode between
Different away from variation, dielectric layer is also influenced to different extents, to keep the variation of capacitance also different.It is adopted by AD7147-1
Collect the capacitance signal between upper layer public electrode 4 and lower layer's central electrode 7, and be converted to digital signal and be sent into microprocessor, i.e.,
The size of the normal force of effect on a sensor can be calculated.
To compare, by the dielectric layer in embodiment 1 by the structure of " bottom plane+pyramid ", it is changed to 8mm × 8mm
The planar structure of × 2mm, remaining structure is identical, constitutes the sensor based on planar dielectric layer structure.
Sensor (pyramid) based on pyramid structure and the sensor (plane) based on planar dielectric layer structure
Capacitor-normal force relation curve (wherein C as shown in Figure 40Original electricity between upper layer public electrode and lower layer's central electrode
Capacitance, Δ C are the variable quantity of capacitor after applied force).As can be seen that when pressure is less than 3.6N, the biography based on pyramid structure
The sensitivity of sensor is 0.01kpa-1, and be 0.0005kpa based on the transducer sensitivity of planar dielectric layer structure-1, therefore base
There is higher sensitivity at small-range section (0~3.6N) in the sensor of pyramid structure, preferably can differentiate and detect
Haptic force.It is suitable in the sensitivity of wide range section, the two.When pressure is more than 3.6N, the sensor based on pyramid structure
Capacitance change tends to mitigate, and is since pyramid structure is squeezed completely, sensitivity drops to 0.0005kpa at this time-1, still
The range of sensor increases.In order to have both the function of small haptic force detection and larger pressure detecting, sensor of the invention knot
Structure combines highly sensitive and two kinds of advantages of wide range.
Feel that sensor distance applies and release normal force, dynamic response and recovery are special to the Grazing condition wiping of the present embodiment
Property it is as shown in Figure 5, it can be seen that sensor energy quick sensing effect and has good repeatability at force information.
Embodiment 3
The sliding sliding mechanism felt of touch sensor detection of the present embodiment Grazing condition condenser type is as follows: when hemispherical contact is by outer
When boundary's tangential force (three-dimensional force), upper layer public electrode and lower layer's central electrode can generate strictly according to the facts due to the power along Z-direction first
Apply capacitance variations described in example 2；Secondly, can be because along X-axis and Y direction between upper layer public electrode and 4 induction electrodes
Power and occur it is opposite slide, relative area and relative dielectric constant change, and lead to capacitance variations.It is public by detection upper layer
Capacitance variations between electrode and 4 induction electrodes can be obtained the tangential information of sensor.
Normal force in embodiment 2 is converted into tangential force (certain along the normal force of Z-direction at this time), remaining and implementation
Example 2 keeps identical, and studying static normal force is under 2N state, and the capacitor between each induction electrode of upper layer public electrode and lower layer exists
Responsive state under different tangential forces, as a result (Fig. 6 show tangential force along the y axis, at this time X-direction as shown in Figure 6
0) power is.In Fig. 6, C10、C20、C30、C40Respectively upper layer public electrode and the first induction electrode, the second induction electrode, third sense
Answer the original capacitance between electrode, the 4th induction electrode, Δ C1、ΔC2、ΔC3、ΔC4Corresponding capacitor respectively after applied force
Variable quantity.
In the case where static normal force is 2N state, apply tangential force, the mobile induction pyramid structure hair of upper layer public electrode
Tangential deformation is given birth to so as to cause the variation of inductance capacitance.When applying along the tangential force of X-axis forward direction, in range section (0~4N),
Relative area between upper layer public electrode and the 4th induction electrode increases, and spacing becomes smaller, and relative dielectric constant increases, and leads to two
Capacitor C between person4Increase；And the relative area between upper layer public electrode and the second induction electrode reduces, spacing becomes smaller, phase
Dielectric constant is increased, C2Reduce；Hereafter change more slowly.C1、C3It is basically unchanged.Similarly, the cutting along Y-axis forward direction when application
When to power, in range section (0~4N), C1Increase, C3Reduce, hereafter changes more slowly；C2、C4It is basically unchanged.
As can be seen from Figure 6, static normal force be 2N state under, when apply along the tangential force of Y-axis forward direction when, C2And C4Variation
It measures very small.C1And C3In range section (0~4N), C1Increase, C3Reduce, the sensor based on pyramid structure it is sensitive
Degree is 0.0625kpa-1, hereafter change more slowly, sensitivity decline；And the sensor based on planar dielectric layer structure is sensitive
Degree is 0.025kpa-1, comparison is it is found that under equal conditions, based on the sensor of pyramid structure compared with being based on planar dielectric layer
The sensor of structure is more sensitive.
It extracts in the case where static normal force is 2N state, the capacitor C when the tangential force along X-axis forward direction is gradually increased4Variation,
As shown in Figure 7, before sliding, when tangential force is gradually increased to 4N, capacitor stable increase always.4N is increased in shearing force
When, there is apparent shake in capacitance signal, and frequency increases, but then tends towards stability.After tangential force is greater than 4N, capacitor is substantially not
Become.
The foregoing is merely exemplary embodiment of the present invention, are not intended to limit the invention, all of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within spirit and principle.
Claims (4)
1. a kind of sliding touch sensor of the Grazing condition condenser type based on pyramid structure, it is characterised in that: including upper flexible printing
Circuit board (3) and lower flexible printed circuit board (6)；
There are upper layer public electrode (4) in the surface printing of the upper flexible printed circuit board (3)；
There is square lower layer's central electrode (7) and equidistant in the surface printing of the lower flexible printed circuit board (6)
Four identical rectangle induction electrodes positioned at each side periphery of lower layer's central electrode；Each induction electrode is with lower layer's central electrode
(7) center is that symmetric points are symmetrical two-by-two；The length of long sides of each induction electrode is equal to the side length of lower layer's central electrode, each to feel
Answer the long side of electrode with and its adjacent side of lower layer's central electrode it is parallel；
Dielectric layer (5) are provided between the upper flexible printed circuit board (3) and lower flexible printed circuit board (6), are given an account of
The upper surface integrated molding of matter layer (5) has pyramid structure；The tower of upper layer public electrode (4) and the pyramid structure
Top contact, the following table face contact of lower layer's central electrode (7) and the dielectric layer (5)；
The lower surface of the dielectric layer is by lower layer's central electrode and four induction electrode all standings；The upper layer public electrode (4)
Positioned at the surface of lower layer's central electrode (7), and the upper layer public electrode (4) is in the lower flexible printed circuit board
(6) orthographic projection on surface is by lower layer's central electrode (7) all standing, by each induction electrode half mulching；
PDMS hemispherical contact (1) is fixed with by flexible cover sheet (2) on the upper flexible printed circuit board (3).
2. the sliding touch sensor of Grazing condition condenser type according to claim 1, it is characterised in that: the dielectric layer (5) with
PDMS is material.
3. the sliding touch sensor of Grazing condition condenser type according to claim 1, it is characterised in that: the upper flexible printing electricity
The flexible substrates of road plate (3) and the lower flexible printed circuit board (6) are using polyimides as material.
4. the sliding touch sensor of Grazing condition condenser type according to claim 1, it is characterised in that: the flexible cover sheet
(2) silicone rubber material is used.
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| CN103954382A (en) * | 2014-05-14 | 2014-07-30 | 合肥工业大学 | Dielectric-varied capacitive flexible three-dimensional force tactile sensor |
| CN105784254A (en) * | 2016-04-20 | 2016-07-20 | 南方科技大学 | Flexible pressure sensor and touch screen |
| CN105865667A (en) * | 2016-05-19 | 2016-08-17 | 北京印刷学院 | Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor |
| CN106092384A (en) * | 2016-06-06 | 2016-11-09 | 中国科学院深圳先进技术研究院 | Capacitance type pressure sensor and preparation method thereof |
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2017
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954382A (en) * | 2014-05-14 | 2014-07-30 | 合肥工业大学 | Dielectric-varied capacitive flexible three-dimensional force tactile sensor |
| CN105784254A (en) * | 2016-04-20 | 2016-07-20 | 南方科技大学 | Flexible pressure sensor and touch screen |
| CN105865667A (en) * | 2016-05-19 | 2016-08-17 | 北京印刷学院 | Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor |
| CN106092384A (en) * | 2016-06-06 | 2016-11-09 | 中国科学院深圳先进技术研究院 | Capacitance type pressure sensor and preparation method thereof |
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