CN112577643B - Wide-range capacitive flexible sensor for realizing triaxial force measurement - Google Patents
Wide-range capacitive flexible sensor for realizing triaxial force measurement Download PDFInfo
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- CN112577643B CN112577643B CN202011458947.9A CN202011458947A CN112577643B CN 112577643 B CN112577643 B CN 112577643B CN 202011458947 A CN202011458947 A CN 202011458947A CN 112577643 B CN112577643 B CN 112577643B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
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Abstract
The invention provides a large-range capacitive flexible sensor for realizing triaxial force measurement, wherein the bottom of an upper flexible substrate is provided with a plurality of substrate bosses with the same height, an upper electrode is a metal layer covering the bottom of the upper flexible substrate, a lower electrode comprises a plurality of middle electrodes and peripheral electrodes surrounding the middle electrodes, and the middle electrodes correspond to the peripheral electrodes one to one; the capacitance sensor formed between the middle electrode and the upper electrode is used for measuring the forward force, and the capacitance sensor formed between the peripheral electrode and the upper electrode is used for measuring the tangential force. According to the invention, the flexibility of the upper flexible substrate and the substrate boss at the bottom are utilized, so that the upper flexible substrate can still compress a certain stroke after the medium layer is completely compressed, and the measuring range of the sensor is effectively improved; the arrangement of the lower electrode is utilized to measure the positive force and the tangential force respectively.
Description
Technical Field
The invention belongs to the field of capacitive flexible sensors, and particularly relates to a wide-range capacitive flexible sensor for realizing three-axis force measurement.
Background
With the development of the robot technology and the popularization of human intelligent wearable equipment, the modern society puts forward higher and higher requirements on the performance of the flexible sensor. The capacitive sensor is widely applied due to the advantages of good temperature stability, simple structure and the like.
However, the current capacitive flexible sensors still have certain problems. For example, a tactile sensor applied to a robot finger is subjected to a three-axis force when holding an object, and the three-axis force can be decomposed into a positive force generated by pressing and a tangential force generated by friction, and the tangential force comprises two tangential forces perpendicular to each other. Conventional capacitive sensors measure the positive force by a change in the distance between the plates and the tangential force by a change in the facing area between the plates. When the sensor is subjected to the positive force and the two tangential forces, the distance and the positive opposite area of the polar plate can be changed simultaneously, so that the sensor cannot measure the positive force and the two tangential forces simultaneously and respectively. Therefore, it is important to design a capacitive flexible sensor capable of simultaneously and respectively measuring a positive force and two mutually perpendicular tangential forces.
In addition, many researchers have proposed many designs for the structure of the dielectric layer to improve the sensitivity of the sensor. Under the condition of a certain initial capacitance, the larger the proportion of air in the dielectric layer is, the larger the sensitivity of the sensor is, but the smaller the measurement range is. Many dielectric layer designs sacrifice measurement range while increasing sensitivity.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the wide-range capacitive flexible sensor for realizing three-axis force measurement is provided, the forward force and the tangential force are measured simultaneously and respectively, and the measurement range is enlarged.
The technical scheme adopted by the invention for solving the technical problems is as follows: the utility model provides a realize flexible sensor of wide range electric capacity of triaxial dynamometry, this sensor is including the last polar plate, dielectric layer and the bottom plate that connect gradually, its characterized in that:
the upper polar plate comprises an upper flexible substrate and an upper electrode; the bottom of the upper flexible substrate is provided with a plurality of substrate bosses with the same height, and the bottom of the upper flexible substrate is circumferentially provided with a thin wall; the upper electrode is a metal layer covering the bottom of the upper flexible substrate, and is provided with an electrode boss with the shape consistent with that of the substrate boss;
the medium layer is an elastic medium layer with three-dimensional micropores, and the thin wall is fixedly connected with the medium layer; when the sensor is not subjected to external force, the electrode bosses are just in contact with the dielectric layer, and a certain distance is reserved between the adjacent electrode bosses and the dielectric layer, so that a cavity is formed;
the lower polar plate comprises a lower flexible substrate and a lower electrode covered on the top of the lower flexible substrate; the lower electrode comprises a plurality of middle electrodes and peripheral electrodes surrounding the middle electrodes, and the middle electrodes correspond to the peripheral electrodes one to one; the capacitance sensor formed between the middle electrode and the upper electrode is used for measuring the positive force, and the capacitance sensor formed between the peripheral electrode and the upper electrode is used for measuring the tangential force;
the vertical projection of the upper electrode on the lower electrode completely covers the middle electrode and partially covers the peripheral electrode.
According to the scheme, the substrate boss is in a trapezoidal shape.
According to the scheme, the substrate boss is provided with a bottom and a top, the bottom is a square with the size of 600 microns multiplied by 600 microns, the top is a square with the size of 300 microns multiplied by 300 microns, the centers of the two squares are overlapped in the vertical direction, and the two squares form the substrate boss through lofting and stretching.
According to the scheme, the substrate bosses with the same height are arranged in an array form.
According to the scheme, the upper flexible substrate is provided with the miniature elastic small balls.
According to the scheme, the number of the middle electrodes is 4, the shapes of the middle electrodes are the same, and the number of the peripheral electrodes is 4, the shapes of the peripheral electrodes are the same; the capacitance sensors formed between the 4 middle electrodes and the upper electrode are used for measuring the positive force; two pairs of differential capacitors are formed between the 4 peripheral electrodes and the upper electrode and are used for measuring two mutually perpendicular tangential forces.
According to the scheme, each middle electrode is an isosceles right triangle electrode, 4 isosceles right triangle electrodes are arranged into a square structure, and a certain distance is reserved between every two adjacent isosceles right triangle electrodes; the peripheral electrodes are rectangular electrodes which correspond to the middle electrodes one by one, the 4 rectangular electrodes are arranged on the periphery of a square structure formed by the isosceles right triangle electrodes, a perpendicular bisector of a long edge of each rectangular electrode passes through the center of the lower flexible substrate, and a certain distance is reserved between the long edge of each rectangular electrode and the bottom edge of the corresponding isosceles right triangle electrode.
According to the scheme, each middle electrode is formed by splicing a trapezoid positioned on the inner side and a rectangle positioned on the outer side, the bottom edge of the trapezoid is connected with the length of the rectangle, and the outer side of the rectangle is of a comb-shaped structure; the peripheral electrodes are rectangles with comb-shaped structures on the inner sides, each peripheral electrode is crossed with the corresponding middle electrode through the comb-shaped structures, and a certain distance is reserved at the crossed position.
According to the scheme, the lower flexible substrate is made of the PI material, and the top of the lower flexible substrate covers the lower electrode through the photoetching or electroplating technology.
According to the scheme, the upper flexible substrate is made of PI materials and comprises a 5500-micron-10-micron square thin plate.
The invention has the beneficial effects that:
1. the flexibility of the upper flexible substrate and the substrate boss at the bottom are utilized, so that the upper flexible substrate can still compress a certain stroke after the medium layer is completely compressed, and the measuring range of the sensor is effectively improved; the arrangement of the lower electrode is utilized to measure the positive force and the tangential force respectively.
2. Because the number of the middle electrodes is more than 1, the distribution characteristics of the forward force can be obtained through a plurality of measurement results, so that the measurement results are more accurate; two pairs of differential capacitors can be formed by 4 peripheral electrodes and the upper electrode, so that two mutually vertical tangential forces can be measured; and finally, measuring the three-axis force by combining the positive force measured by the intermediate capacitor. Besides, the specific directions of the two tangential forces can be determined according to the magnitude change conditions of four surrounding capacitors.
Drawings
Fig. 1 is a structural sectional view of a first embodiment of the present invention.
Fig. 2 is an exploded view of a structure according to a first embodiment of the present invention.
Figure 3 is an isometric view of an upper flexible substrate.
Fig. 4 is a cross-sectional view AA of fig. 2.
FIG. 5 is a schematic diagram of an upper electrode structure.
FIG. 6 is a schematic diagram illustrating deformation when a positive force is applied according to an embodiment of the present invention.
Fig. 7 is a top view of the upper electrode and the lower electrode according to the first embodiment of the invention.
Fig. 8 is a top view of the upper electrode and the lower electrode according to the second embodiment of the invention.
In the figure: 1-upper flexible substrate, 1-1-substrate boss, 1-2-thin wall, 2-upper electrode, 2-1-electrode boss, 3-dielectric layer, 4-lower electrode, 4-1-isosceles right triangle electrode, 4-2-rectangular electrode, 5-lower flexible substrate, 6-micro elastic ball, 7-cavity, 8-upper polar plate and 9-lower polar plate.
Detailed Description
The invention is further illustrated by the following specific examples and figures.
The first embodiment is as follows:
referring to fig. 1 to 7, the present embodiment mainly includes an upper flexible substrate 1, an upper electrode 2, a dielectric layer 3, a lower electrode 4, and a lower flexible substrate 5. The upper flexible substrate 1 and the upper electrode 2 together form an upper electrode plate 8, and the lower flexible substrate 5 and the lower electrode 4 together form a lower electrode plate 9. These several components are packaged as one piece by various processes.
As shown in fig. 2 and 3, the upper flexible substrate 1 has a square thin plate as a main body, and a plurality of substrate bosses 1-1 with the same height are arranged at the bottom of the square thin plate, the vertical cross-sections of the substrate bosses 1-1 are trapezoidal in this embodiment and are arranged in an array, a circle of thin wall 1-2 is arranged on the periphery of the upper flexible substrate 1, and the height of the thin wall 1-2 is 15 μm in this embodiment.
The upper flexible substrate 1 described in this embodiment is made of PI material, and includes a 5500 μm × 5500 μm × 10 μm square thin plate, and the substrate boss 1-1 is disposed at the bottom of the square thin plate. The substrate boss 1-1 is provided with a bottom and a top, the bottom is a square with the size of 600 microns multiplied by 600 microns, the top is a square with the size of 300 microns multiplied by 300 microns, the centers of the two squares are overlapped in the vertical direction, and the two squares form the substrate boss 1-1 through lofting and stretching.
The upper electrode 2 is shown in fig. 5, and is a layer of metal film covered on the bottom of the upper flexible substrate 1, and has an electrode boss 2-1 with a shape consistent with that of the substrate boss 1-1.
The medium layer 3 is an elastic medium layer with three-dimensional micropores, and the thin wall 1-2 is fixedly connected with the medium layer 3; when the sensor is not subjected to external force, the electrode bosses 2-1 are just in contact with the dielectric layer 3, and a certain distance is reserved between the adjacent electrode bosses 2-1 and the dielectric layer 3, so that a cavity 7 is formed.
The lower electrode 4 includes a plurality of intermediate electrodes and peripheral electrodes surrounding the intermediate electrodes, and the intermediate electrodes correspond to the peripheral electrodes one to one. The lower flexible substrate 5 is a square thin plate structure, and the top of the lower flexible substrate is covered with a layer of the lower electrode through the processes of photoetching, electroplating and the like. And the side length of the lower flexible substrate is larger than that of the whole lower electrode. The capacitance sensor formed between the middle electrode and the upper electrode is used for measuring the forward force, and the capacitance sensor formed between the peripheral electrode and the upper electrode is used for measuring the tangential force. The vertical projection of the upper electrode 2 on the lower electrode 4 completely covers the middle electrode and partially covers the peripheral electrode.
In the embodiment, the number of the middle electrodes is 4, the shapes of the middle electrodes are the same, the number of the peripheral electrodes is 4, the shapes of the peripheral electrodes are the same, and the peripheral electrodes are connected with the outside through wires; the capacitance sensors formed between the 4 middle electrodes and the upper electrode are used for measuring the positive force; two pairs of differential capacitors are formed between the 4 peripheral electrodes and the upper electrode and are used for measuring two mutually perpendicular tangential forces.
Furthermore, each middle electrode is an isosceles right triangle electrode 4-1, 4 isosceles right triangle electrodes 4-1 are arranged into a square structure, and a certain distance is formed between every two adjacent isosceles right triangle electrodes 4-1; the peripheral electrode is a rectangular electrode 4-2 which is in one-to-one correspondence with the middle electrode, the 4 rectangular electrodes are arranged on the periphery of a square structure formed by the isosceles right triangle electrodes 4-1, a perpendicular bisector of a long side of each rectangular electrode 4-2 passes through the center of the lower flexible substrate, and a certain distance is reserved between the long side of the rectangular electrode 4-2 and the bottom side of the corresponding isosceles right triangle electrode 4-1. The upper electrode 2 and the eight lower electrodes jointly form eight capacitors. As shown in fig. 7, the dotted line is a vertical projection of the frame of the upper electrode 2, and eight capacitive sensors are formed between the eight lower electrodes and the upper electrode, which are respectively denoted as C11, C12, C13, C14, and C21, C22, C23, and C24. Wherein C11, C12, C13 and C14 represent the four middle capacitors and are mainly used for measuring the positive force. C21, C22, C23, C24 represent four-sided capacitances, primarily for measuring tangential forces and determining tangential force direction. C21 and C22 form a pair of differential capacitors, and C23 and C24 form a pair of differential capacitors.
In this embodiment, the isosceles right triangle electrode 4-1 has a base of 3000 μm and a height of 1500 μm. The rectangular electrode 4-2 has a length of 2500 μm and a width of 1000. mu.m. The distance between the long side of the rectangular electrode 4-2 and the bottom side of the isosceles right triangle electrode 4-1 is 100 mu m.
On one hand, the upper flexible substrate 1 is fixedly connected with the dielectric layer 3 through the thin wall 1-2; on the other hand, the thin wall 1-2 is mainly formed to facilitate displacement of the upper flexible substrate 1 when subjected to a tangential force. The main function of the upper flexible substrate 1 designed in the above-described structure is to improve the measurement range of the sensor. As shown in fig. 6, when the sensor is subjected to a positive force, the dielectric layer 3 of the sensor is compressed, so that the distance between the upper and lower plates 8 and 9 changes, and finally the capacitance changes. However, when the dielectric layer 3 is fully compressed, the upper flexible substrate 1 can still be further compressed and the distance between the upper and lower plates 8 and 9 can still be changed due to the presence of the substrate boss 1-1 of the upper flexible substrate 1 filled with the micro elastic beads 6. This results in an improved measurement range of the sensor.
Further, when the sensor is subjected to only a positive force, the four capacitances in the middle increase as the distance between the plates decreases. In practical application, the positive force applied to each position of the sensor is not consistent, so that the capacitance variation of the four capacitors in the middle is different. Thus, the positive force of four different positions in a certain range can be measured. Compared with the traditional capacitance sensor which can only measure a positive force value in a plane range, the capacitance sensor designed by the invention has more outstanding advantages in the positive force detection aspect, and equipment equipped with the sensor can identify the positive force and determine the positive force and distribution characteristics, so that the performance of the equipment is improved.
Further, when the sensor is subjected to a three-dimensional force, the three-dimensional force can be decomposed into a positive force and two mutually perpendicular tangential forces. By the design of the upper electrode structure and the lower electrode structure, the magnitude of the positive force and the magnitude of the two tangential forces can be respectively measured.Since the tangential force has no influence on the change of the middle four capacitances, the magnitude and distribution characteristics of the positive force can be measured through the middle four capacitances under the condition that the positive force and the tangential force are applied simultaneously. And the four peripheral capacitance changes mainly come from four aspects: the distance between the polar plates is changed when the medium layer is compressed by positive force, the distance between the polar plates is changed when the upper polar plates are compressed by positive force, the facing area between the polar plates is changed when the upper polar plates are compressed by positive force and expanded outwards, and the facing area between the polar plates is changed when the upper polar plates are displaced by tangential force. Let the tangential force of the sensor in the + x direction and the capacitance change of C24 be recorded as Δ C 24 The capacitance variations due to these four factors are respectively referred to as Δ C 1 、 Δ C 2 、 Δ C 3 、 Δ C 4 (ii) a The capacitance change of C23 is recorded as Δ C 23 The capacitance variations due to these four factors are respectively referred to as Δ C 1 、 Δ C 2 、 Δ C 3 、- Δ C 4 . Finally, the capacitance change Δ C due to the tangential force can be obtained 4 ＝(ΔC 24 -ΔC 23 ) A/2, and wherein Δ C 24 And Δ C 23 the value of (b) can be directly read. According to the formula
Knowing the variation of the capacitance, the variation of the area opposite to the upper electrode and the lower electrode can be calculated according to other conditions, so that the displacement variation of the upper electrode plate is obtained, and finally the tangential force is determined according to the relationship between the displacement variation of the upper electrode plate and the tangential force. Similarly, the capacitance variation generated when the sensor is subjected to tangential forces in three directions of-x, + y and-y can be obtained, and the magnitude of the tangential force can be calculated.
Further, as shown in the table, when the sensor is subjected to a tangential force in the x direction, C23 and C24 will change, while C21 and C22 will not change; when the sensor is subjected to a tangential force in the y direction, C21 and C22 will change, while C23 and C24 will not change. I.e. the sensor does not interfere with the measurement of tangential forces in the x-direction and the y-direction. This ensures that the sensor can simultaneously measure the magnitude of the normal force and the two tangential forces perpendicular to each other.
Further, as shown in the table, when the sensor is subjected to tangential forces in four directions of + x, -x, + y and-y, the four capacitances at the four sides change differently. Therefore, the specific directions of the two mutually perpendicular tangential forces can be finally determined according to the change conditions of the four surrounding capacitors.
| +x | -x | +y | -y | |
| C21 | Is not changed | Is not changed | Increase of | Reduce |
| C22 | Is not changed | Is not changed | Reduce | Increase of |
| C23 | Reduce | Increase of | Is not changed | Is not changed |
| C24 | Increase of | Reduce | Is not changed | Is not changed |
Example two:
the structure and principle of the present embodiment are the same as or similar to those of the first embodiment, and the differences are as follows: as shown in fig. 8, each intermediate electrode is formed by splicing a trapezoid positioned at the inner side and a rectangle positioned at the outer side, the bottom edge of the trapezoid is connected with the length of the rectangle, and the outer side of the rectangle is in a comb-shaped structure; the peripheral electrodes are rectangles with comb-shaped structures on the inner sides, each peripheral electrode is crossed with the corresponding middle electrode through the comb-shaped structures, and a certain distance is reserved at the crossed position.
All the lower electrodes are made into a comb-shaped structure, so that the C23 and the C24 are close to each other as much as possible, the difference of the positive force applied to the two capacitors is as small as possible, and the measurement accuracy is further improved.
According to the invention, the substrate boss 1-1 of the upper flexible substrate 1 and the micro elastic small ball 6 in the substrate boss are utilized, so that the upper flexible substrate 1 can still compress a certain stroke after the dielectric layer 3 is completely compressed, and the measuring range of the capacitive flexible sensor is effectively improved.
The four middle capacitors of the sensor are used for measuring the forward force, and the distribution characteristics of the forward force can be obtained through the four measurement results, so that the measurement results are more accurate.
Two pairs of differential capacitors can be formed by the four peripheral electrodes and the upper electrode, so that two mutually perpendicular tangential forces can be measured. And finally, measuring the three-axis force by combining the positive force measured by the intermediate capacitor. Besides, the specific directions of the two tangential forces can be determined according to the magnitude change conditions of four surrounding capacitors.
The above embodiments are only used for illustrating the design idea and features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the content of the present invention and implement the present invention accordingly, and the protection scope of the present invention is not limited to the above embodiments. Therefore, all equivalent changes and modifications made in accordance with the principles and concepts disclosed herein are intended to be included within the scope of the present invention.
Claims (7)
1. The utility model provides a realize flexible sensor of wide range electric capacity of triaxial dynamometry, this sensor is including the last polar plate, dielectric layer and the bottom plate that connect gradually, its characterized in that:
the upper polar plate comprises an upper flexible substrate and an upper electrode; the bottom of the upper flexible substrate is provided with a plurality of substrate bosses with the same height, and the bottom of the upper flexible substrate is circumferentially provided with a thin wall; the upper electrode is a metal layer covering the bottom of the upper flexible substrate, and is provided with an electrode boss with the shape consistent with that of the substrate boss;
the medium layer is an elastic medium layer with three-dimensional micropores, and the thin wall is fixedly connected with the medium layer; when the sensor is not subjected to external force, the electrode bosses are just in contact with the dielectric layer, and a certain distance is reserved between the adjacent electrode bosses and the dielectric layer, so that a cavity is formed;
the lower polar plate comprises a lower flexible substrate and a lower electrode covered on the top of the lower flexible substrate; the lower electrode comprises a plurality of middle electrodes and peripheral electrodes surrounding the middle electrodes, and the middle electrodes correspond to the peripheral electrodes one to one; the capacitance sensor formed between the middle electrode and the upper electrode is used for measuring the positive force, and the capacitance sensor formed between the peripheral electrode and the upper electrode is used for measuring the tangential force;
the vertical projection of the upper electrode on the lower electrode completely covers the middle electrode and partially covers the peripheral electrode;
the substrate bosses with the same height are arranged in an array form;
the upper flexible substrate is provided with miniature elastic small balls;
the number of the middle electrodes is 4, the shapes of the middle electrodes are the same, and the number of the peripheral electrodes is 4, the shapes of the peripheral electrodes are the same; the capacitance sensors formed between the 4 middle electrodes and the upper electrode are used for measuring the positive force; two pairs of differential capacitors are formed between the 4 peripheral electrodes and the upper electrode and are used for measuring two mutually perpendicular tangential forces.
2. The sensor of claim 1, wherein: the substrate boss is trapezoidal.
3. The sensor of claim 2, wherein: the substrate boss is provided with a bottom and a top, the bottom is a square with the size of 600 microns multiplied by 600 microns, the top is a square with the size of 300 microns multiplied by 300 microns, the centers of the two squares are overlapped in the vertical direction, and the two squares form the substrate boss through lofting and stretching.
4. The sensor of claim 1, wherein: each middle electrode is an isosceles right triangle electrode, 4 isosceles right triangle electrodes are arranged into a square structure, and a certain distance is formed between every two adjacent isosceles right triangle electrodes; the peripheral electrodes are rectangular electrodes which correspond to the middle electrodes one by one, the 4 rectangular electrodes are arranged on the periphery of a square structure formed by the isosceles right triangle electrodes, a perpendicular bisector of a long edge of each rectangular electrode passes through the center of the lower flexible substrate, and a certain distance is reserved between the long edge of each rectangular electrode and the bottom edge of the corresponding isosceles right triangle electrode.
5. The sensor of claim 1, wherein: each middle electrode is formed by splicing a trapezoid positioned on the inner side and a rectangle positioned on the outer side, the bottom edge of the trapezoid is connected with the length of the rectangle, and the outer side of the rectangle is of a comb-shaped structure; the peripheral electrodes are rectangles with comb-shaped structures on the inner sides, each peripheral electrode is crossed with the corresponding middle electrode through the comb-shaped structures, and a certain distance is reserved at the crossed position.
6. The sensor of claim 1, wherein: the lower flexible substrate is made of PI materials, and the top of the lower flexible substrate covers the lower electrode through photoetching or electroplating technology.
7. The sensor of claim 1, wherein: the upper flexible substrate is made of PI materials and comprises a square thin plate with the thickness of 5500 mu m multiplied by 10 mu m.
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| CN113280955B (en) * | 2021-05-11 | 2022-07-05 | 华中科技大学 | Flexible sensor with tangential force anisotropic response and preparation method thereof |
| CN114354026A (en) * | 2021-12-21 | 2022-04-15 | 途见科技(北京)有限公司 | Flexible strain sensing unit, array and sampling system |
| CN114279599A (en) * | 2021-12-27 | 2022-04-05 | 北京京东方技术开发有限公司 | Flexible pressure sensor, flexible pressure strain sensing assembly and pressure detection method |
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