CN111830485A - Infrared emission module for wide-angle flight time optical ranging and module thereof - Google Patents

Infrared emission module for wide-angle flight time optical ranging and module thereof Download PDF

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CN111830485A
CN111830485A CN202010638142.6A CN202010638142A CN111830485A CN 111830485 A CN111830485 A CN 111830485A CN 202010638142 A CN202010638142 A CN 202010638142A CN 111830485 A CN111830485 A CN 111830485A
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lens
angle
wide
concave
concave surface
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郎欢标
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Dongguan Mikolta Optoelectronic Technology Co ltd
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Dongguan Mikolta Optoelectronic Technology Co ltd
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Priority to PCT/CN2020/102181 priority patent/WO2022000575A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/10Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483Details of pulse systems
    • G01S7/484Transmitters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/041Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Lenses (AREA)

Abstract

The invention discloses an infrared emission module for wide-angle flight time optical ranging, which comprises a base, a substrate, a vertical cavity surface emitting laser VCSEL chip and a wide-angle beam expanding lens system, wherein the wide-angle beam expanding lens system is composed of at least one lens, at least one lens in the wide-angle beam expanding lens system is a concave lens with a concave middle part, one curved surface profile of the concave lens is concave middle part and gradually extends outwards in an arc slope shape and is positioned on the other side of the corresponding surface of the light emitting surface of the vertical cavity surface emitting laser VCSEL chip, and the light beam expansion total angle of the wide-angle beam expanding lens system is between 60 and 150 degrees. 3D images with large field angles can be obtained through the wide-angle receiver assembly.

Description

Infrared emission module for wide-angle flight time optical ranging and module thereof
Technical Field
The invention relates to the technical field of time of flight (TOF) sensing, in particular to an infrared emission module for wide-angle time of flight optical ranging and a module thereof.
Background
Time of flight sensing (TOF) is a currently important image sensing technique that obtains the distance to an object by continuously transmitting light pulses to the object, receiving the light returning from the object with a sensor, and detecting the round-trip Time of these transmitted and received light pulses. TOF sensing technology has driven the application of 3D cameras in new generation mobile devices and will drive the rapid growth of the 3D image sensing application market in the coming years. Time-of-flight sensing techniques employ infrared light sources to directly measure depth and amplitude information in each pixel, transmit modulated infrared light to the entire scene, and capture the reflected light of objects by TOF imagers. By calculating the measured difference between the transmitted light pulse and the received light pulse, or the phase difference and amplitude value of the optical signal, highly reliable distance information and 3D images of the complete scene can be obtained.
The flight time sensing technology has wide application in many fields, such as proximity sensors of smart phones, face recognition, gesture recognition, vehicle-mounted approach warning sensors, Lidar, ground approach radar of unmanned aerial vehicles, proximity radar of indoor large flowers of unmanned aerial vehicles, AT depth sensors for robots in general, wall side cleaning and obstacle avoidance sensors of robot vacuum cleaners, intelligent goods shelves and the like.
Early TOF sensors were essentially single light sources, with infrared laser diodes at wavelengths of 940nm or 850 nm. The disadvantage is that the power is relatively low, and the detection angle is usually relatively small, typically twenty-three degrees. In recent years, with the maturity of VCSEL vertical cavity surface emitting laser array technology and the further improvement of emission power, the illumination light source of the TOF sensor gradually changes into a VCSEL array light source, the detection distance further increases, and the detection angle further expands. Such as TOF technology of US20150229912a1 published in 2015 by microsoft corporation.
The emitting assembly in this patent has adopted a slice of diffusion piece (diffuser 421) to carry out even illumination and expand the beam, and it forms the less infrared laser of angle of VCSEL vertical cavity surface emitting laser array transmission after the diffusion relatively even, the great transmission light of angle, shines on the testee. However, since the emergent light of the infrared ray after passing through the diffusion sheet is disordered, the loss is large, the transmittance is generally low and can only reach 60% -70%, and the radiance of the infrared ray irradiating the measured object is low.
The receiver assembly of the patent additionally detects 3D depth information of the object to be measured via a convex lens 424, band pass filter BPF, and depth image sensor. Since the field angle of a single convex lens is generally small, a relatively sharp 3D image can be formed only within forty degrees. Therefore, the sensor module of the type described in patent US20150229912a1 has the problems of small angle of view and low optical efficiency.
The existing and future new generation smart phones generally adopt three-shot or multi-shot, wherein one camera is a TOF 3D camera which is matched with two other visible light cameras for use. Because a development trend of the smart phone camera is wide angle and fisheye lens, the field angle of the camera exceeds 90 degrees, and the field angle shot by some fisheye cameras is even more than 140 degrees, for the development trend of the smart phone, the TOF 3D camera with smaller field angle can not meet the requirement due to the fact that the camera is not matched with the shooting range of other wide angle visible light cameras. Development of TOF 3D cameras with larger field angles is imminent.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, provides an infrared emission module for wide-angle flight time optical ranging, has a simple structure, realizes large-angle uniform light distribution, enlarges the light beam angle to 60-150 degrees, and greatly improves the optical efficiency.
In order to achieve the purpose, the invention provides an infrared emission module for wide-angle flight time optical ranging, which comprises a base, wherein the base is provided with a substrate, a vertical cavity surface emitting laser VCSEL chip arranged on the substrate, and a wide-angle beam expanding lens system which is arranged in the base and expands the angle of a light beam emitted by the vertical cavity surface emitting laser VCSEL chip, the wide-angle beam expanding lens system is composed of at least one lens, at least one lens in the wide-angle beam expanding lens system is a concave lens with a concave middle, one curved surface profile of the concave lens is concave in the middle and gradually extends outwards in an arc-shaped slope shape and is positioned on the other side of the corresponding surface of the light emitting surface of the vertical cavity surface emitting laser VCSEL chip, and the full angle of light beam expansion of the wide-angle beam expanding lens system is between 60 degrees and 150 degrees.
Preferably, the maximum light spread angle at the edge of the concave lens is more than 1.25 times the angle of the light beam incident on the lens.
Preferably, the VCSEL chip is a multi-chip VCSEL array laser emitting tube or a single-chip laser emitting tube, and the wavelength of light emitted by the VCSEL chip is 700nm to 5000nm or a visible light band.
Preferably, the bottom surface conductive electrode of the VCSEL chip is attached to and conducted with the conductive electrode on the substrate through a conductive adhesive, the surface conductive electrode of the VCSEL chip is welded and conducted with the other conductive electrode on the substrate through a conductive lead, and the VCSEL chip supplies power through the two conductive electrodes on the substrate when being lighted.
Preferably, the lens of the wide-angle beam expanding lens system is an optically transparent resin material member, an optically transparent silica gel material member, a glass material member or a photosensitive shadowless adhesive material member;
the optical refractive index of the lens material of the wide-angle beam expanding lens system is between 1.30 and 1.75 in the wavelength band of 940 nm.
Preferably, the base is a polyphthalamide (PPA) material component or a polyimide resin (PI) material component, one lens and the base of the wide-angle beam expanding lens system are integrally molded or the lens and the base of the wide-angle beam expanding lens system are fixedly connected through an adhesive.
Preferably, one lens of the wide-angle beam expanding lens system and the base are of an integral structure made of the same material, the lens material is transparent liquid silica gel or high-temperature-resistant transparent resin, the glass transition temperature of the high-temperature-resistant transparent resin is between 200 ℃ and 300 ℃, and the optical refractive index is between 1.30 and 1.75 in a wavelength band of 940 nm.
Preferably, the lens surface of the wide-angle beam expanding lens system is plated with an optical antireflection film or a near-infrared band-pass filtering optical film or the lens material is doped with an infrared band-pass dyeing material.
Preferably, the VCSEL chip is formed by arranging a plurality of dot-shaped surface emitting VCSELs in a staggered arrangement, a 6-sided polygon arrangement, a 4-sided polygon arrangement, or a random scattered arrangement.
Preferably, the emission angle of the VCSEL chip is between 15 and 90.
As preferred, wide angle beam expanding lens system is the first wide angle beam expanding lens system that makes up by two concave lens, first wide angle beam expanding lens system includes first lens, installs the second lens in first lens top, first lens has first concave surface of first lens and first lens second concave surface, the second lens has first concave surface of second lens and second concave surface of second lens, the second lens second concave surface is middle under the concavity and makes the curved surface that the arcuation slope shape extends to the outside gradually.
Preferably, the beam emitted by the VCSEL chip is expanded for the first time by the first lens, the maximum beam angle full angle after the first expansion is 2 β max, the 2 β max is not less than 30 ° and not more than 75 °, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 2 θ max is not less than 60 ° and not more than 150 °.
Preferably, the first concave surface of the first lens is a spherical surface, the VCSEL chip of the VCSEL has an arbitrary emitting point, and the light ray CC is emitted from the VCSEL chipIIAngle of gamma to the optical axis OZ, ray CCIIAfter passing through the first concave surface of the first lens, the first lens refracts the light CIICIIIThe included angle between the optical axis OZ and the optical axis OZ is kept constant and is gamma, and after the light is refracted again by the second concave surface of the first lens, the emergent light C is emittedIIICIVHas a light distribution angle of beta and an edge light ray EIIEIIIAfter being refracted by the second concave surface of the first lens, the emergent ray EIIIEIVThe light distribution angle of the first lens is the maximum light distribution angle β max of the first lens, the maximum light distribution angle β max of the first lens is 15 °, and the second concave surface of the first lens meets the light distribution condition:
Figure BDA0002565853800000041
preferably, the second concave marginal ray E of the second lensIVEVAfter being refracted by the second concave surface of the second concave lens, the emergent ray forms an included angle theta with the optical axis OZmaxOther arbitrary light CIVCVAfter being refracted by the second concave surface of the second lens, the included angle between the emergent ray and the OZ is theta, and the second concave surface of the second lens meets the light distribution condition:
Figure BDA0002565853800000051
as preferred, wide angle beam expanding lens system is by two concave lens and wherein the one side second wide angle beam expanding lens system that makes up for fresnel lens, second wide angle beam expanding lens system has installed the second silica gel with between the vertical cavity surface emitting laser VCSEL chip, second wide angle beam expanding lens system includes third lens, installs the fourth lens in the third lens top, third lens has the first concave surface of third lens and third lens second concave surface, fourth lens has the first concave surface of fourth lens and fourth lens second concave surface, fourth lens second concave surface is segmented and is tiled on same plane with the inclined plane of each subsection, forms the fresnel surface of cockscomb structure, the curved surface that the arc slope shape extends is just done to the outside gradually to the third lens second concave surface under the middle concavity.
Preferably, the beam emitted by the VCSEL chip is expanded for the first time by the third lens, the maximum beam angle full angle after the first expansion is 2 β max, the 2 β max is not less than 30 ° and not more than 75 °, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 2 θ max is not less than 60 ° and not more than 150 °.
As preferred, wide-angle beam expanding lens system is the third wide-angle beam expanding lens system that is made up by a slice concave lens and free-form surface concave lens, third wide-angle beam expanding lens system includes fifth lens, installs the sixth lens in fifth lens top, fifth lens has the first concave surface of fifth lens and fifth lens second concave surface, sixth lens has the first concave surface of sixth lens and sixth lens second concave surface, sixth lens second concave surface is the asymmetric free-form surface grading lens that distributes of X axle horizontal and Y axle longitudinal direction, free-form surface grading lens is great along the horizontal grading angle of X axle, and thickness ratio is thicker, and is less along the vertical grading angle of Y axle, and thickness ratio is thinner, the curved surface that the arc slope shape extends is just done to the outside gradually to the fifth lens second concave surface in the middle of being concave.
Preferably, the beam emitted by the VCSEL chip is expanded for the first time through a fifth lens, the maximum full angle of the beam after the first expansion is 2 beta max, the maximum full angle of the beam is not less than 30 degrees and not more than 2 beta max is not less than 75 degrees, the beam is expanded for the second time through a sixth lens, the full angle of the beam output along the X-axis direction after the second expansion is 2 theta max, the full angle of the beam output along the Y-axis direction is not less than 60 degrees and not more than 2 theta max is not less than 150 degrees, and the full angle of the beam output along the X-axis direction is 2 theta 'max and not more than 60 degrees and not more than 2 theta' max is not more than.
As preferred, wide angle beam expanding lens system is for being set up into the fourth wide angle beam expanding lens system that local dull polish or whole face frosting make up by two concave lens wherein at least one mirror surface, fourth wide angle beam expanding lens system includes seventh lens, installs the eighth lens in seventh lens top, seventh lens has the first concave surface of seventh lens and seventh lens second concave surface, eighth lens has the first concave surface of eighth lens and eighth lens second concave surface, wherein at least one mirror surface of seventh lens and eighth lens sets up to local dull polish or whole face frosting, eighth lens second concave surface is middle under the concavity and gradually makes the curved surface that the arcuation slope shape extends to the outside.
Preferably, the beam emitted by the VCSEL chip is expanded for the first time by the seventh lens, the maximum beam angle full angle after the first expansion is 2 β max, the 2 β max is not less than 30 ° and not more than 75 °, the beam is expanded for the second time by the eighth lens, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 2 θ max is not less than 60 ° and not more than 150 °.
As preferred, the wide angle beam expanding lens system is the fifth wide angle beam expanding lens system that is made up by three lens groups, the fifth wide angle beam expanding lens system includes the ninth lens, installs the tenth lens in ninth lens top, installs the eleventh lens in tenth lens top, the ninth lens is two-sided concave lens, has negative diopter, the tenth lens is meniscus lens, the tenth lens has the first concave surface of tenth lens and the second convex surface of tenth lens, has diopter, the eleventh lens is concave lens, the eleventh lens has the first concave surface of eleventh lens and the second concave surface of eleventh lens, has negative diopter, the second concave surface of eleventh lens is middle concave down and makes the curved surface that the arcuation slope extends to the outside gradually, the light beam of vertical cavity emitting laser VCSEL chip transmission expands through the fifth wide angle beam expanding lens system, the full beam angle of the expanded output beam is 2 theta max, and the 2 theta max is more than or equal to 60 degrees and less than or equal to 150 degrees.
Preferably, the wide-angle beam expanding lens system is a sixth wide-angle beam expanding lens system formed by combining four lenses, the sixth wide-angle beam expanding lens system includes a twelfth lens, a thirteenth lens disposed above the twelfth lens, a fourteenth lens disposed above the thirteenth lens, and a fifteenth lens disposed above the fourteenth lens, the twelfth lens is a biconcave lens having a negative refractive power, the thirteenth lens is a meniscus lens, the thirteenth lens has a thirteenth lens first concave surface and a thirteenth lens second convex surface having a refractive power, the fourteenth lens is a meniscus lens, the fourteenth lens has a fourteenth lens first concave surface and a fourteenth lens second convex surface having a refractive power, the fifteenth lens is a concave lens, the fifteenth lens has a fifth lens first concave surface and a fifteenth lens second concave surface, the second concave surface of the fifteenth lens is a curved surface which is concave in the middle and gradually extends outwards in an arc-shaped slope shape, light beams emitted by the VCSEL chip of the vertical cavity surface emitting laser are expanded by the sixth wide-angle beam expanding lens system, the full beam angle of the expanded output light beams is 2 theta max, and the 2 theta max is larger than or equal to 60 degrees and smaller than or equal to 150 degrees.
Preferably, the wide-angle beam expanding lens system is a seventh wide-angle beam expanding lens system composed of a single lens, the seventh wide-angle beam expanding lens system includes a sixteenth lens, the sixteenth lens is a double-sided concave lens and has a negative diopter, the sixteenth lens has a sixteenth lens first concave surface and a sixteenth lens second concave surface, the sixteenth lens second concave surface is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope towards the outside, the light beam emitted by the VCSEL chip is expanded by the seventh wide-angle beam expanding lens system, the beam angle total angle of the expanded output light beam is 2 θ max, and 2 θ max is greater than or equal to 60 ° and less than or equal to 150 °.
Preferably, the lens surface of the wide-angle beam expanding lens system is a mirror surface, a scale surface with light mixing effect or a microstructure texture surface.
The invention also provides an infrared emission module for wide-angle flight time optical ranging, which comprises an infrared emission module for wide-angle flight time optical ranging, wherein one side of the base is provided with a wide-angle receiver assembly, the wide-angle receiver assembly comprises an optical imaging system and a flight time imager arranged below the optical imaging system and used for receiving optical signals, and the flight time imager outputs image information after being processed.
Preferably, the time of flight imager is mounted on the substrate or on a separate further substrate.
Preferably, the optical imaging system is a first optical imaging system formed by combining two optical lenses, the first optical imaging system comprises a first wide-angle concave lens, a first space ring, a first aperture stop, a second space ring and a first convex lens which are arranged in sequence from the object side to the image side, the first wide-angle concave lens is made of a low-refractive-index and high-dispersion-coefficient material, the refractive index nd of the first wide-angle concave lens is less than 1.58, the abbe coefficient vd of the first wide-angle concave lens is greater than 50, the first convex lens is made of a high-refractive-index and low-dispersion-coefficient material, the refractive index nd of the first wide-angle concave lens is greater than 1.6, the abbe coefficient vd of the first convex lens is less than 30, and the receiving angle of the.
Preferably, the optical imaging system is a second optical imaging system formed by combining three optical lenses, the second optical imaging system includes a second wide-angle concave lens, a third space ring, a second aperture diaphragm, a second convex lens and a half meniscus lens, which are sequentially arranged from the object side to the image side, the second wide-angle concave lens is a high-refractive-index and low-dispersion-coefficient material, the refractive index nd is greater than 1.6, and the abbe coefficient vd is less than 30, the second convex lens is a low-refractive-index and high-dispersion-coefficient material, the refractive index nd is less than 1.58, and the abbe coefficient vd is greater than 50, the half meniscus lens is a high-refractive-index and low-dispersion-coefficient material, the refractive index nd is greater than 1.6, and the abbe coefficient vd is less than 30, and the receiving angle of the second optical imaging system is 2 ψ max.
Preferably, one surface of one of the lenses of the first optical imaging system and the second optical imaging system is plated with an infrared band-pass filter film for infrared passing and visible light blocking, or a single lower lens is adopted as the infrared band-pass filter film for infrared passing and visible light blocking, or the module protective glass is plated with the infrared band-pass filter film for infrared passing and visible light blocking.
Compared with the prior art, the invention has the beneficial effects that:
the invention is provided with a base, the base is provided with a substrate, a VCSEL chip of a vertical cavity surface emitting laser arranged on the substrate, and a wide-angle beam expanding lens system which is arranged in the base and expands the angle of a light beam emitted by the VCSEL chip of the vertical cavity surface emitting laser, the wide-angle beam expanding lens system is composed of at least one lens, at least one lens in the wide-angle beam expanding lens system is a concave lens with a concave middle part, one curved surface profile of the concave lens is concave in the middle part, gradually extends outwards in an arc slope shape and is positioned on the other side of the corresponding surface of the light emitting surface of the VCSEL chip of the vertical cavity surface emitting laser, the light beam expansion total angle of the wide-angle beam expanding lens system is between 60 degrees and 150 degrees, the infrared emitting module for wide-angle flight time optical ranging is provided, the structure is simple, large-angle uniform light distribution is realized, and the light beam angle, the invention also provides an infrared emission module for wide-angle flight time optical ranging, and 3D images with large field angles can be obtained through the wide-angle receiver component.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic representation of a solution of the TOF sensor technology of patent US20150229912a 1;
FIG. 2 is a cross-sectional view of an infrared emission module for wide-angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of a transmitting and receiving structure of a wide-angle time-of-flight sensor module according to an embodiment of the present invention;
FIG. 4 is an arrangement diagram of VCSEL chips of an IR emitting module for wide angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 5 is a schematic optical path diagram of a first wide-angle beam expanding lens system of an infrared emitting module for wide-angle time-of-flight optical ranging according to an embodiment of the present invention;
FIG. 6 is a diagram illustrating a relationship between a light distribution angle and an emission angle of an infrared emission module for wide-angle time-of-flight optical ranging according to an embodiment of the present invention;
FIG. 7 is a simulated view of VCSEL chips of VCSELs of an IR emitter module for wide angle time-of-flight optical ranging at 0.6 meters away in accordance with an embodiment of the present invention;
FIG. 8 is a computer simulation of a first wide angle beam expanding lens system of an infrared emitting module for wide angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 9 is a radiance profile of a first wide-angle beam expanding lens system of an infrared emitting module for wide-angle time-of-flight optical ranging at 0.6 meters distance in accordance with an embodiment of the present invention;
FIG. 10 is a far field angle distribution plot of the optical intensity of a first wide angle beam expanding lens system of an infrared emitting module for wide angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 11 is an optical path diagram of a first optical imaging system of a wide-angle receiver assembly of an infrared transmit module for wide-angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 12 is a Modulation Transfer Function (MTF) curve of a first optical imaging system of a wide-angle receiver assembly of an infrared transmit module for wide-angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 13 is a dot-column diagram of a first optical imaging system of a wide-angle receiver assembly of an infrared transmit module for wide-angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
FIG. 14 illustrates field curvature and distortion of a first optical imaging system of a wide-angle receiver assembly of an IR-transmit module for wide-angle time-of-flight optical ranging, in accordance with an embodiment of the present invention;
FIG. 15 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with a second embodiment of the present invention;
FIG. 16 is a schematic diagram of a transmitting and receiving structure of an infrared transmitting module for wide-angle time-of-flight optical ranging according to a second embodiment of the present invention;
FIG. 17 is a three-dimensional view of a second concave surface of a sixth lens of an IR-emitting module for wide-angle time-of-flight optical ranging in accordance with three embodiments of the present invention;
FIG. 18 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with a third embodiment of the present invention;
FIG. 19 is a longitudinal cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with a third embodiment of the present invention;
FIG. 20 is a schematic diagram of a lateral transmitting and receiving structure of an infrared transmitting module for wide-angle time-of-flight optical ranging according to a third embodiment of the present invention;
FIG. 21 is a schematic diagram of a longitudinal transmitting and receiving structure of an infrared transmitting module for wide-angle time-of-flight optical ranging according to a third embodiment of the present invention;
FIG. 22 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with four embodiments of the present invention;
FIG. 23 is a schematic diagram of an emitting and receiving structure of an infrared emitting module for wide-angle time-of-flight optical ranging according to a fourth embodiment of the present invention;
FIG. 24 is an optical path diagram of a second optical imaging system of a wide-angle receiver assembly of an infrared transmitting module for wide-angle time-of-flight optical ranging according to four embodiments of the present invention;
FIG. 25 is a Modulation Transfer Function (MTF) curve of a second optical imaging system of a wide-angle receiver assembly of an infrared transmit module for wide-angle time-of-flight optical ranging in accordance with a fourth embodiment of the present invention;
FIG. 26 is a schematic diagram of a second optical imaging system of a wide-angle receiver assembly of an infrared transmitter module for wide-angle time-of-flight optical ranging in accordance with four embodiments of the present invention;
FIG. 27 illustrates field curvature and distortion of a second optical imaging system of a wide-angle receiver assembly of an IR-transmit module for wide-angle time-of-flight optical ranging in accordance with four embodiments of the present invention;
FIG. 28 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with one embodiment of the present invention;
FIG. 29 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with six embodiments of the present invention;
FIG. 30 is an optical path diagram of a seventh wide-angle beam expanding lens system of an infrared emitting module for wide-angle time-of-flight optical ranging according to six embodiments of the present invention;
FIG. 31 is a diagram illustrating a relationship between a light distribution angle and an emission angle of a seventh wide-angle beam expanding lens system of an infrared emission module for wide-angle time-of-flight optical ranging according to six embodiments of the present invention;
FIG. 32 is a far field angle distribution diagram of the light intensity of a seventh wide-angle beam expanding lens system of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with six embodiments of the present invention;
FIG. 33 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging in accordance with an embodiment of the present invention;
fig. 34 is a cross-sectional view of an infrared emitting module for wide-angle time-of-flight optical ranging according to eight embodiments of the present invention.
The figure includes:
10-base, 1-substrate, 2-VCSEL chip, 6-wide angle beam expanding lens system, 9-conductive lead, 61-first wide angle beam expanding lens system, 611-first lens, 612-second lens, 6111-first lens first concave surface, 6112-first lens second concave surface, 6121-second lens first concave surface, 6122-second lens second concave surface, 62-second wide angle beam expanding lens system, 621-third lens, 622-fourth lens, 6211-third lens first concave surface, 6212-third lens second concave surface, 6221-fourth lens first concave surface, 6222-fourth lens second concave surface, 63-third wide angle beam expanding lens system, 631-fifth lens, 632-sixth lens, 6311-fifth lens first concave surface, 6312-fifth lens second concave surface, 6321-sixth lens first concave surface, 6322-sixth lens second concave surface, 64-fourth wide-angle beam expander lens system, 641-seventh lens, 642-eighth lens, 6411-seventh lens first concave surface, 6412-seventh lens second concave surface, 6421-eighth lens first concave surface, 6422-eighth lens second concave surface, 65-fifth wide-angle beam expander lens system, 651-ninth lens, 652-tenth lens, 653-eleventh lens, 6521-tenth lens first concave surface, 6522-tenth lens second convex surface, 6531-eleventh lens first concave surface, 6532-eleventh lens second concave surface, 66-sixth wide-angle beam expander lens system, 661-twelfth lens, 662-thirteenth lens, 663-fourteenth lens, and, 664-a fifteenth lens, 6621-a thirteenth lens first concave surface, 6622-a thirteenth lens second convex surface, 6631-a fourteenth lens first concave surface, 6632-a fourteenth lens second convex surface, 6641-a fifteenth lens first concave surface, 6642-a fifteenth lens second concave surface, 67-a seventh wide angle beam expanding lens system, 671-a sixteenth lens, 6711-a sixteenth lens first concave surface, 6712-a sixteenth lens second concave surface, 4-a wide angle receiver assembly, 7-an optical imaging system, 8-time-of-flight imager, 71-a first optical imaging system, 711-a first wide angle concave lens, 712-a first spacer, 713-a first aperture stop 714, 715-a second spacer, 715-a first convex lens, 72-a second optical imaging system, 721-a second wide-angle concave lens, 722-a third space ring, 723-a second aperture stop, 724-a second convex lens, 725-a half meniscus lens.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are one embodiment of the present invention, and not all embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without any creative work shall fall within the scope of the present invention.
Example one
Referring to fig. 2, a first embodiment of the present invention provides an infrared emitting module for wide-angle time-of-flight optical ranging, including a base 10, the base 10 is provided with a substrate 1, a vertical cavity surface emitting laser VCSEL chip 2 mounted on the substrate 1, and a wide-angle beam expanding lens system 6 mounted inside the base 10 and expanding an angle of a light beam emitted from the vertical cavity surface emitting laser VCSEL chip 2, the wide-angle beam expanding lens system 6 is composed of at least one lens, at least one lens of the wide-angle beam expanding lens system 6 is a concave lens with a concave middle portion, one of curved surface profiles of the concave lens is concave in the middle portion and gradually extends outward in an arc-shaped slope and is located on the other side of a corresponding surface of a light emitting surface of the vertical cavity surface emitting laser VCSEL chip 2, a full angle of the light beam expanding lens system 6 is between 60 ° and 150 °, the maximum light spreading angle at the edge of the concave lens is more than 1.25 times of the angle of the light beam incident to the lens.
Referring to fig. 3, the bottom conductive electrode of the VCSEL chip 2 is bonded and conducted with the conductive electrode on the substrate 1 through a conductive adhesive, the surface conductive electrode of the VCSEL chip 2 is welded and conducted with another conductive electrode on the substrate 1 through a conductive lead 9, and the VCSEL chip 2 supplies power through two conductive electrodes on the substrate 1 when being turned on.
Referring to fig. 3, the lens of the wide-angle beam expanding lens system 6 is an optically transparent resin material member, an optically transparent silicone material member, a glass material member or a photosensitive shadowless adhesive material member;
the optical refractive index of the lens material of the wide-angle beam expanding lens system 6 is between 1.30 and 1.75 in the wavelength band of 940 nm.
Referring to fig. 3, the base 10 is a polyphthalamide PPA material member or a polyimide resin PI material member, one of the lenses of the wide-angle beam expanding lens system 6 and the base 10 are formed integrally by two materials, or the lenses of the wide-angle beam expanding lens system 6 and the base 10 are fixedly connected by an adhesive.
Referring to fig. 3, one of the lenses of the wide-angle beam expanding lens system 6 and the base 10 are of an integral structure made of the same material, the lens material is transparent liquid silica gel or high temperature resistant transparent resin, the glass transition temperature of the high temperature resistant transparent resin is between 200 ℃ and 300 ℃, and the optical refractive index is between 1.30-1.75 at a wavelength band of 940 nm.
Referring to fig. 3, the lens surface of the wide-angle beam expanding lens system 6 is coated with an optical antireflection film or a near-infrared band pass filter optical film or the lens material is doped with an infrared band pass dye material.
Referring to fig. 3, the lens surface of the wide-angle beam expanding lens system 6 is a mirror surface, a scale surface with light mixing effect, or a microstructure texture surface.
Referring to fig. 4, the VCSEL chip 2 is a multi-chip VCSEL array laser emitting tube or a single-chip laser emitting tube, and the wavelength of light emitted from the VCSEL chip 2 is 700nm to 5000nm or a visible light band.
Referring to fig. 4, the VCSEL chip 2 is formed by arranging a plurality of dot-shaped surface emitting VCSELs in a staggered arrangement, a 6-sided arrangement, a 4-sided arrangement, or a random scattering arrangement.
Referring to table one, the VCSEL array 5 has a length L: 972 μm, width W: 680 μm, effective emitting surface length a: 479 μm, effective emission face width B: 575 μm, emission point lateral spacing Px: 52 μm, emission point longitudinal spacing Py: 30.5 μm, emission point diameter φ: 11 μm, number of emission points: 361, full angle of emission: 24 ° × 18 °.
Table one: parameters of VCSEL array 5
VCSEL length: l is 972μm
VCSEL width: w 680μm
Effective emitting surface length a: 479μm
effective emission area width B: 575μm
emission point lateral spacing Px: 52μm
emission point longitudinal spacing Py: 30.5μm
emission point diameter: phi is a 11μm
Number of transmission points: 361
emission angle full angle: 24°×18°
referring to fig. 2, the wide-angle beam expanding lens system 6 is a first wide-angle beam expanding lens system 61 formed by combining two concave lenses, the first wide-angle beam expanding lens system 61 includes a first lens 611 and a second lens 612 mounted above the first lens 611, the first lens 611 has a first lens first concave surface 6111 and a first lens second concave surface 6112, the second lens 612 has a second lens first concave surface 6121 and a second lens second concave surface 6122, the second lens second concave surface 6122 is a curved surface which is concave in the middle and gradually extends in an outward arc-shaped slope, in this embodiment, the first lens second concave surface 6112 is a curved surface which is concave in the middle and gradually extends in an outward arc-shaped slope, in this embodiment, the first wide-angle beam expanding lens system 61 has two curved surfaces.
Referring to fig. 3, the beam emitted from the VCSEL chip 2 is expanded by the first lens 611 for the first time, the maximum beam angle full angle after the first expansion is 2 β max, the 2 β max is greater than or equal to 30 ° and less than or equal to 75 °, the beam is expanded by the second lens 612 for the second time, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 2 θ max is greater than or equal to 60 ° and less than or equal to 150 °.
Referring to fig. 5, the first concave surface 6111 of the first lens is a spherical surface, and the VCSEL chip 2 of the VCSEL device has an arbitrary emitting point, light CCIIAngle of gamma to the optical axis OZ, ray CCIIAfter passing through the first concave surface 6111 of the first lens, it refracts the light CIICIIIThe included angle between the optical axis OZ and the optical axis OZ is kept constant, and is gamma, and the emergent ray C of the ray is refracted again by the second concave surface 6112 of the first lensIIICIVHas a light distribution angle of beta and an edge light ray EIIEIIIAfter being refracted by the second concave surface 6112 of the first lens, the emergent light EIIIEIVThe light distribution angle of (1) is a maximum light distribution angle β max of the first lens 611, the maximum light distribution angle β max of the first lens 611 is 15 °, and the second concave surface 6112 of the first lens meets the light distribution condition:
Figure BDA0002565853800000161
referring to fig. 5, the edge ray E of the second concave surface 6122 of the second lens elementIVEVAfter being refracted by the second concave surface 6122 of the second lens, the angle between the emergent ray and the optical axis OZ is thetamaxOther arbitrary light GIVCVAfter being refracted by the second concave surface 6122 of the second lens, the included angle between the emergent light and OZ is θ, and the second concave surface 6122 of the second lens meets the light distribution condition:
Figure BDA0002565853800000162
specifically, as shown in fig. 5, O is a central point of the VCSEL chip 2, E is an emission point located at the edge of the VCSEL chip 2, and the included angle between the maximum emission angle and the optical axis OZ is γ max, and the maximum emission angle of the emission point (the emission ray EE) is preferably selected in the embodiment of the present embodimentIIAngle with the optical axis OZ) γ max is 9 °, which is the divergence angle half-angle in the minor axis direction of the light beam. Edge ray EEIIThe light is extended in the reverse direction, and intersects below the optical axis OZ at a point 0 ', and the point 0' is set as an equivalent light-emitting point of the first wide-angle beam-expanding lens system 61.
In this embodiment, the first concave surface 6111 of the first lens is a spherical surface, the radius of curvature R of the first concave surface is 0' point, and the center of the first concave surface is the center of the circle, so the light ray EEIIAfter passing through the first concave surface 6111 of the first lens, it refracts the light EIIEIIIThe angle to the optical axis OZ remains constant, which is γ max. In a specific embodiment of this embodiment, the radius of curvature of the first concave surface 6111 of the first lens is preferably 1.7621435 mm.
The light distribution manner of the first lens second concave surface 6112 is to perform light distribution according to the following tangent condition. The wig C is any emission point in the active area of the VCSEL chip 2 of the vertical cavity surface emitting laser, and the light ray CCIIAngle of gamma to the optical axis OZ, ray CCIIAfter passing through the first concave surface 6111 of the first lens, it refracts the light CIICIIIThe included angle between the optical axis OZ and the optical axis OZ is kept constant, and is gamma, and the emergent ray C of the ray is refracted again by the second concave surface 6112 of the first lensIIICIVThe light distribution angle of (b) is beta. Marginal ray EIIEIIIAfter being refracted by the second concave surface 6112 of the first lens, the emergent light EIIIEIVThe light distribution angle of (1) is the maximum light distribution angle β max of the first lens 611, and the maximum light distribution angle β max of the first lens 611 is 15 °. In this embodiment, it is preferable that the light emitted from the VCSEL chip 2 of the VCSEL passes through the first lens 611 for the first beam expansionThen, the light distribution angle beta of any emergent ray meets the following tangent condition:
Figure BDA0002565853800000171
the surface profile of the first lens 611, the second concave surface 6112 of the first lens, is calculated point by the numerical calculation method according to the above formula 2.
In the second lens element 612, the second concave surface 6121 of the second lens element, it is preferable that the tangent line of each point is perpendicular to the incident light direction at the point, and after being refracted by the second concave surface 6121, all the refracted light rays proceed along the original direction, i.e. EIVEVAnd EIIIEIVAre in line with the optical axis OZ and have an angle beta max, C with the optical axis OZIVCVAnd CIIICIVThe directions are consistent, and the included angles between the directions and the optical axis OZ are beta. The first concave surface 6121 of the second lens can be corresponding to each incident ray CIIICIVAre calculated by connecting the tangential directions of the two.
The second lens 612 has a second concave surface 6122 whose light distribution pattern is such that light distribution is performed under the following tangent condition. Marginal ray EIVEVAfter being refracted by the second concave surface 6122 of the second lens, the angle between the emergent ray and the optical axis OZ is thetamax. Other arbitrary light CIVCVAfter being refracted by the second concave surface 6122 of the second lens, the angle between the emergent ray and OZ is θ. In a specific embodiment of this embodiment, after the light emitted from the VCSEL chip 2 of the vertical cavity surface emitting laser passes through the second lens 612 for the 2 nd beam expansion, the light distribution angle θ of any one of the emergent light satisfies the following tangent condition:
Figure BDA0002565853800000172
the surface profile of the second concave surface 6122 of the second lens element 612 is calculated point by the numerical calculation method according to the above formula 3.
The relationship between the light distribution angle β of the 1 st light distribution by the first lens 611 and the light distribution angle θ of the 2 nd light distribution by the second lens 612 and the emission angle γ of the VCSEL chip 2 is shown in table 2, and the relationship diagram is shown in fig. 6. After the light emitted from the VCSEL chip 2 of the vertical cavity surface emitting laser passes through the first lens 611 for the first light distribution, the maximum light distribution angle full angle is not less than 30 degrees and not more than 2 beta max and not more than 75 degrees, the light passes through the second lens 612 for the 2 nd light distribution, and finally the maximum light distribution full angle of the output light beam is not less than 60 degrees and not more than 2 theta max and not more than 150 degrees.
In the first embodiment of the infrared emission module for wide-angle time-of-flight optical ranging, the beam angle of the output beam after the light emitted from the VCSEL chip 2 passes through the first lens 611 for the first light distribution and the beam angle of the output beam after the light passes through the second lens 612 for the second light distribution are increased by two times.
Table 1 shows the relationship between the light distribution angle β of the first light distribution by the first lens 611 and the light distribution angle θ of the second light distribution by the second lens 612, and the emission angle γ of the VCSEL chip 2:
Figure BDA0002565853800000181
Figure BDA0002565853800000191
in the infrared emitting module for wide-angle time-of-flight optical ranging described in this embodiment, the VCSEL chip 2 has a simulated light spot with a distance of 0.6 m as shown in fig. 7, which is an elliptical light spot, and the beam angle in the X direction is 24 ° and the beam angle in the Y direction is 18 °.
A computer simulation of an ir-emitting module for wide-angle time-of-flight optical ranging as described in the first embodiment is shown in fig. 8. The irradiance distribution at 0.6 meter is shown in fig. 9. Because the vertical cavity surface emitting laser VCSEL chip 2 emits laser light in an elliptical gaussian beam, after the light beam is expanded twice by the first lens 611 and the second lens 612, the irradiation light spot of the light beam at a distance of 0.6 meter is close to a square light spot, and the coverage range is close to 2 meters. The far-field angular distribution (light distribution curve) of the light intensity is shown in fig. 10, and the simulation result shows that the beam angle width at the half position of the peak light intensity is 154.1553505207763000 ° × 146.1346931901400100 °, and the irradiation angle can satisfy the detection range of the wide-angle receiver assembly 4.
As shown in fig. 3, the present invention further provides an infrared emission module for wide-angle time-of-flight optical ranging, including the above infrared emission module for wide-angle time-of-flight optical ranging, one side of the base 10 is provided with the wide-angle receiver assembly 4, the wide-angle receiver assembly 4 includes an optical imaging system 7, a time-of-flight imager 8 mounted below the optical imaging system 7 and receiving optical signals, and the time-of-flight imager 8 outputs image information after being processed.
As shown in fig. 3, the time-of-flight imager 8 is mounted on the substrate 1 or on a separate further substrate.
As shown in fig. 10, the wide-angle receiving assembly 4 includes an imaging optical system 7, the optical imaging system 7 is a first optical imaging system 71 formed by combining two optical lenses, the first optical imaging system 71 includes a first wide-angle concave lens 711, a first spacer 712, a first L-diameter diaphragm 713, a second spacer 714 and a first convex lens 715, which are sequentially arranged from an object side to an image side, the first wide-angle concave lens 711 is a low-refractive-index and high-dispersion-coefficient material, the refractive index nd of which is less than 1.58, the abbe number vd of which is greater than 50, the first convex lens 715 is a high-refractive-index and low-dispersion-coefficient material, the refractive index nd of which is greater than 1.6, and the abbe number vd of which is less than 30, the receiving angle of the first optical imaging system 71 is 2 ψ max, the receiving angle 2 ψ max of the first optical imaging system (71) is greater than or equal to 90 °, and the optical path diagram is shown in fig. 11. The field angle is greater than 90 °, and the full field angle of the first optical imaging system 71 is preferably 120 ° in this embodiment.
In the first optical imaging system 71 of the wide-angle receiving assembly 4 of the first embodiment, a Modulation Transfer Function (MTF) curve is shown in fig. 12, and a resolution of 80 lines to a central field of view may be higher than 0.8, and a resolution of an edge field of view may also be higher than 0.5.
The first optical imaging system 71 of the wide-angle receiving assembly 4 according to the first embodiment has a dot diagram as shown in fig. 13, and the root mean square value of the dot diagram of each field of view is about 2-3 μm.
The field curvature and distortion diagram of the first optical imaging system 71 of the wide-angle receiving assembly 4 in the first embodiment are shown in fig. 14, and the distortion of the full field of view is controlled within 2%.
The optical parameters of the first optical imaging system 71 of the wide-angle receiving assembly 4 in this embodiment are shown in table 3, the first wide-angle concave lens 711, which is a concave lens made of a low refractive index and high dispersion coefficient material and has a refractive index nd of less than 1.58 and an abbe number vd of greater than 50, and the first convex lens 715, which is a convex lens made of a high refractive index and low dispersion coefficient material and has a refractive index nd of greater than 1.6 and an abbe number vd of less than 30.
In the first optical imaging system 71 of the wide-angle receiving assembly 4 of this embodiment, the first wide-angle concave lens 711 and the first convex lens 715 are aspheric, and aspheric coefficients thereof are shown in table 4.
Table 2 optical parameters of the first optical imaging system 71 of the wide-angle receiving assembly 4 according to the first embodiment
Figure BDA0002565853800000201
Figure BDA0002565853800000211
Table 3 aspheric coefficients of each surface of the first optical imaging system 71 of the wide-angle receiving module 4 according to the first embodiment:
Figure BDA0002565853800000212
one surface of one lens of the first optical imaging system 71 is plated with an infrared band-pass filter film for infrared passing and visible light blocking, or a single plane lens is adopted as an infrared band-pass filter film for infrared passing and visible light blocking, or a module protective glass is plated with an infrared band-pass filter film for infrared passing and visible light blocking.
Example two
The difference between the second embodiment and the first embodiment is that the structure of the wide-angle beam expanding lens system 6 is changed, the operation and effect are the same as those of the first embodiment, and other structural features are not changed.
Referring to fig. 15, the wide-angle beam expanding lens system 6 is a second wide-angle beam expanding lens system 62 formed by combining two concave lenses and one surface of the two concave lenses is a fresnel lens, the second wide-angle beam expanding lens system 62 includes a third lens 621 and a fourth lens 622 mounted above the third lens 621, the third lens 621 includes a third lens first concave surface 6211 and a third lens second concave surface 6212, the fourth lens 622 includes a fourth lens first concave surface 6221 and a fourth lens second concave surface 6222, the fourth lens second concave surface 6222 is segmented and the slopes of each segment are tiled on the same plane to form a saw-toothed fresnel surface, and the third lens second concave surface 6212 is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope to the outside.
Referring to fig. 16, the beam emitted from the VCSEL chip 2 is expanded by the third lens 621 for the first time, the maximum beam angle full angle after the first expansion is 2 β max, the 2 β max is greater than or equal to 30 ° and less than or equal to 75 °, the beam is expanded by the fourth lens 622 for the second time, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 2 θ max is greater than or equal to 60 ° and less than or equal to 150 °.
EXAMPLE III
The difference between the third embodiment and the first embodiment is that the structure of the wide-angle beam expanding lens system 6 is changed, the operation and effect are the same as those of the first embodiment, and other structural features are not changed.
Referring to fig. 17 and 18, the wide-angle beam expanding lens system 6 is a third wide-angle beam expanding lens system 63 formed by combining a concave lens and a free-form concave lens, the third wide-angle beam expanding lens system 63 includes a fifth lens 631, a sixth lens 632 disposed above the fifth lens 631, the fifth lens 631 has a fifth lens first concave surface 6311 and a fifth lens second concave surface 6312, the sixth lens 632 has a sixth lens first concave surface 6321 and a sixth lens second concave surface 6322, the second concave surface 6322 of the sixth lens is a free-form light distribution lens asymmetrically distributed in the X-axis transverse direction and the Y-axis longitudinal direction, the free-form surface light distribution lens has a larger light distribution angle along the X-axis in the transverse direction and a thicker thickness, and has a smaller light distribution angle along the Y-axis in the longitudinal direction and a thinner thickness, the second concave surface 6312 of the fifth lens is a curved surface which is concave in the middle and gradually extends outward in an arc-shaped slope.
Referring to fig. 19, the beam emitted from the VCSEL chip 2 is expanded by the fifth lens 631 for the first time, the maximum total angle of the beam angle after the first expansion is 2 β max, the maximum total angle of the beam angle is greater than or equal to 30 ° and less than or equal to 2 β max and less than or equal to 75 °, and expanded by the sixth lens 632 for the second time, the total angle of the beam angle output along the X-axis direction after the second expansion is 2 θ max, the total angle of the beam angle is greater than or equal to 60 ° and less than or equal to 2 θ max and less than or equal to 150 °, and the total angle of the beam angle output along the Y-axis direction is 2 θ' max, and the total angle of the beam angle is.
Specifically, the fifth lens 631 has a fifth lens first concave surface 6311 and a fifth lens second concave surface 6312, and the fifth lens 631 expands the beam emitted by the VCSEL chip 2 for the first time, and the maximum beam angle after expansion is greater than or equal to 30 ° and less than or equal to 2 β max and less than or equal to 75 °.
The sixth lens 632 has a sixth lens first concave surface 6321 and a sixth lens second concave surface 6322, the sixth lens first concave surface 6321 is a symmetric aspheric surface, the sixth lens second concave surface 6322 is an XY-direction asymmetric free-form surface, the sixth lens 632 performs secondary beam expansion on the light beam incident from the fifth lens 631, the expanded light beam finally irradiates the object to be measured with a full beam angle 60 ° or more and 2 θ max or less in the X-transverse direction and 60 ° or more and 2 θ 'max or less in the Y-longitudinal direction and the full beam angle 60 ° or more and 2 θ' max or less in the X-transverse direction and the Y-longitudinal direction can reach 160 °.
Fig. 20 shows an infrared emitting module for wide-angle time-of-flight optical ranging according to the third embodiment of the present invention, which emits and receives along the X-transverse direction. In the X-lateral direction, the emitting angle of the third wide-angle beam expanding lens system 63 is 2 θ max, and the receiving angle of the wide-angle receiving assembly 4 is 2 ψ max.
An infrared emitting module for wide-angle time-of-flight optical ranging according to the third embodiment of the present invention emits and receives along the Y longitudinal direction as shown in fig. 21. In the Y longitudinal direction, the emitting angle of the third wide-angle beam expanding lens system 63 is 2 θ 'max, and the receiving angle of the wide-angle receiving assembly 4 is 2 ψ' max.
For the time-of-flight imagers with different aspect ratios, for example, with an aspect ratio of 2: 1 or 16: 9, free-form surface lenses with different light distribution angles can be designed according to the actual field angles in the X-transverse direction and the Y-longitudinal direction, and in this embodiment, the light distribution angle in the X-transverse direction of the sixth lens 632 is preferably 150 °, and the light distribution angle in the Y-longitudinal direction is preferably 150 °.
Example four
The difference between the fourth embodiment and the first embodiment is that the structure of the optical imaging system 7 is changed, the structure, the action and the effect of the wide-angle beam expanding lens system 6 are the same as those of the first embodiment, the receiving effect of the optical imaging system 7 of the wide-angle receiving assembly 4 is better, and other structural features are not changed.
The optical imaging system 7 is a second optical imaging system 72 formed by combining three optical lenses, and the optical path structure is as follows: the first convex lens 715 behind the first aperture stop 713 of the embodiment is split into two, a positive lens and a negative lens, which can better correct spherical aberration and off-axis aberration.
Referring to fig. 22 and 23, the second optical imaging system 72 includes a second wide-angle concave lens 721, a third spacer 722, a second aperture stop 723, a second convex lens 724, and a half meniscus lens 725, which are sequentially disposed from the object side to the image side, wherein the second wide-angle concave lens 721 is a high-refractive-index, low-dispersion-coefficient material having a refractive index nd > 1.6 and an abbe number vd < 30, the second convex lens 724 is a low-refractive-index, high-dispersion-coefficient material having a refractive index nd < 1.58 and an abbe number vd > 50, the half meniscus lens 725 is a high-refractive-index, low-dispersion-coefficient material having a refractive index nd > 1.6 and an abbe number vd < 30, and the receiving angle of the second optical imaging system 72 is 2 ψ max.
One surface of one lens of the second optical imaging system 72 is plated with an infrared band-pass filter film for infrared passing and visible light blocking, or a single plane lens is adopted as an infrared band-pass filter film for infrared passing and visible light blocking, or a module protective glass is plated with an infrared band-pass filter film for infrared passing and visible light blocking.
The optical imaging system 7 is a second optical imaging system 72 formed by combining three optical lenses, and the optical path diagram is shown in fig. 24. The field angle of the optical imaging system 7 is greater than 90 °, and the fourth specific embodiment of the present embodiment preferably has a full field angle of 120 ° for the second optical imaging system 72.
In the second optical imaging system 72 of the wide-angle receiving assembly 4 according to the fourth embodiment of the present invention, a Modulation Transfer Function (MTF) curve is shown in fig. 25, and the total resolution of the central field of view at 80 lines can reach above 0.82. Due to the use of an extra lens, the modulation transfer function is much higher than that of the first optical imaging system 71 of the wide-angle receiving assembly 4 according to the first embodiment.
In the fourth embodiment of the present invention, the second optical imaging system 72 of the wide-angle receiving assembly 4 has a dot diagram as shown in fig. 26, wherein the root mean square value of the dot diagram of each field of view is substantially distributed within 2 μm, and preferably the root mean square value of the dot diagram of the position is less than 1 μm.
The field curvature and distortion diagram of the second optical imaging system 72 of the wide-angle receiving assembly 4 in the fourth embodiment are shown in fig. 27, and the distortion of the full field of view is controlled within 1%.
The optical parameters of the second optical imaging system 72 of the wide-angle receiving assembly 4 of the fourth embodiment include the type of curved surface, the radius of curvature, the thickness, the refractive index, the abbe number, the clear aperture, and the conic coefficient as shown in table 5, and the second wide-angle concave lens 721, which is a concave lens, is a high refractive index, low abbe number material, and has a refractive index nd > 1.6 and an abbe number vd < 30. The second convex lens 724 is a convex lens, is made of a material with low refractive index and high dispersion coefficient, and has the refractive index nd less than 1.58 and the Abbe coefficient vd more than 50. The half meniscus lens 725 is a half meniscus lens which is a high refractive index, low dispersion coefficient material, and has a refractive index nd greater than 1.6 and an Abbe's number vd less than 30.
In the second optical imaging system 72 of the wide-angle receiving assembly 4 according to the fourth embodiment of the present invention, the second wide-angle concave lens 721, the second convex lens 724 and the half meniscus lens 725 are all aspheric, and aspheric coefficients thereof are shown in table 6.
Table 4 optical parameters of the second optical imaging system 72 of the wide-angle receiving assembly 4 according to the fourth embodiment of the present invention
Surface of Type (B) Radius of curvature Thickness of Refractive index nd Abbe coefficient vd Clear aperture Coefficient of cone
Article surface Standard of merit Infinite number of elements 600 1477.756 0
7211 Even aspheric surface 0.803986 0.23 1.661319 20.374576 1.041205 0
7212 Even aspheric surface -0.31755 0.295349 0.460024 -6.307674
723 (diaphragm) Standard of merit Infinite number of elements 0.02 0.329464 0
7241 Even aspheric surface 0.675875 0.395694 1.544919 55.929938 0.452339 2.844554
7242 Even aspheric surface -0.40198 0.02 0.568379 -6.246033
7251 Even aspheric surface -0.96726 0.294 1.661319 20.374576 0.572334 0
7252 Even aspheric surface -0.6514 0.550757 0.747947 0
8 (image plane) Standard of merit Infinite number of elements 0.823459 0
Table 5 second optical imaging system 72 of wide-angle receiving module 4 according to the fourth embodiment of the present invention, the aspheric coefficient of each surface
Figure BDA0002565853800000251
Figure BDA0002565853800000261
EXAMPLE five
The difference between the fifth embodiment and the first embodiment is that the structure of the wide-angle beam expanding lens system 6 is changed, the wide-angle beam expanding lens system 6 is a fourth optical beam expanding system 64 formed by two concave lenses, wherein at least one mirror surface of each concave lens is set to be a partially frosted surface or a fully frosted surface, the optical imaging system 7 of the wide-angle receiving assembly 4 is the same as that in the first embodiment, and other structural features are not changed.
Referring to fig. 28, the wide-angle beam expanding lens system 6 is a fourth wide-angle beam expanding lens system 64 formed by two concave lenses, wherein at least one of the concave lenses is a partially frosted surface or a fully frosted surface, the fourth wide-angle beam expanding lens system 64 includes a seventh lens 641 and an eighth lens 642 mounted above the seventh lens 641, the seventh lens 641 has a seventh lens first concave surface 6411 and a seventh lens second concave surface 6412, the eighth lens 642 has an eighth lens first concave surface 6421 and an eighth lens second concave surface 6422, at least one of the seventh lens 641 and the eighth lens 642 is a partially frosted surface or a fully frosted surface, and the eighth lens second concave surface 6422 is a curved surface which is concave in the middle and gradually extends outward in an arc-shaped slope.
Referring to fig. 28, the beam emitted from the VCSEL chip 2 is expanded by the seventh lens 641 for the first time, the maximum beam angle full angle after the first expansion is 2 β max, the 2 β max is greater than or equal to 30 ° and less than or equal to 75 °, the beam is expanded by the eighth lens 642 for the second time, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 2 θ max is greater than or equal to 60 ° and less than or equal to 150 °.
Specifically, for some vertical cavity surface emitting laser VCSEL chips 2 with larger output power, the output beam is not necessarily a single-mode laser beam, but a multi-mode laser beam, and the output spot is annularly distributed in a bessel shape, and there is a bright spot in the middle of the spot and a good multi-aperture around the spot. In this case, the two concave lenses that are completely transparent are used for light distribution, and the distribution of the irradiation spots cannot be made uniform. One surface of the two concave lenses needs to be frosted and atomized, so that the middle bright spot of the irradiation light spot is eliminated.
Referring to fig. 28, the seventh lens 641 has a seventh lens first concave surface 6411 and a seventh lens second concave surface 6412, and the fourth wide-angle beam expanding lens system 64 performs a first beam expansion on the multimode laser beam emitted by the VCSEL chip 2, wherein a maximum beam angle after beam expansion is greater than 30 °. In the case that the output light spot of the multi-mode laser beam emitted by the VCSEL chip 2 is annularly distributed in a bessel shape, and there is a bright spot in the middle of the light spot and there are good multiple apertures around the light spot, in this embodiment, a part of the middle of the first concave surface 6411 of the seventh lens 641 is frosted and atomized to eliminate the middle bright spot of the light spot to be irradiated.
Referring to fig. 28, the eighth lens 642 has an eighth lens first concave surface 6421 and an eighth lens second concave surface 6422, and performs a second beam expansion on the light incident from the seventh lens 641, and the expanded light is finally output at a beam angle greater than 60 ° to irradiate the object to be measured, so that the maximum total beam angle can reach 150 °.
EXAMPLE six
The difference between the sixth embodiment and the first embodiment is that the structure of the wide-angle beam expanding lens system 6 is changed, the wide-angle beam expanding lens system 6 is a seventh wide-angle beam expanding lens system 67 formed by combining a lens, and the optical imaging system 7 of the wide-angle receiving assembly 4 is the same as that in the first embodiment.
The seventh wide angle expander lens system 67 differs from the first wide angle expander lens system 61 in that: the sixteenth lens 671 of the seventh wide-angle beam expanding lens system 67 assumes the optical power of the first lens 611 and the second lens 612, i.e. the focal length of the sixteenth lens 671 is equivalent to the combined focal length of the first lens 611 and the second lens 612, and the surface shape of the two mirror surfaces of the sixteenth lens is more concave.
Referring to fig. 29, the wide-angle beam expanding lens system 6 is a seventh wide-angle beam expanding lens system 67 composed of a single lens, the seventh wide-angle beam expanding lens system 67 includes a sixteenth lens 671, the sixteenth lens 671 is a double-sided concave lens with negative refractive power, the sixteenth lens 671 has a sixteenth lens first concave surface 6711 and a sixteenth lens second concave surface 6712, the sixteenth lens second concave surface 6712 is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope towards the outside, the light beam emitted from the VCSEL chip 2 of the vertical cavity surface emitting laser is expanded by the seventh wide-angle beam expanding lens system 67, the total beam angle of the expanded output light beam is 2 θ max, and the 2 θ max is greater than or equal to 60 ° and less than or equal to 150 °.
Referring to fig. 30, in the light distribution manner of this embodiment, a beam emitted by the VCSEL chip 2 of the VCSEL device is expanded for the first time by the first concave surface 6711 of the sixteenth lens, a maximum beam angle full angle after the first expansion is 2 β max, where 2 β max is greater than or equal to 30 °, the beam is expanded for the second time by the second concave surface 6712 of the sixteenth lens, a beam angle full angle of an output beam after the second expansion is 2 θ max, where 2 θ max is greater than or equal to 60 °, and a maximum beam full angle can reach 150 °.
Referring to fig. 31, the first concave surface 6711 of the sixteenth lens is an aspheric surface, and the VCSEL chip 2 of the VCSEL device has an arbitrary emitting point, a light ray CCIIAngle of gamma to the optical axis OZ, ray CCIIAfter passing through the first concave surface 6711 of the sixteenth lens element, it refracts the light ray CIICIIIHas a light distribution angle of beta and an edge ray EEIIAfter being refracted by the first concave surface 6711 of the sixteenth lens, the light ray E is refractedIIEIIIThe light distribution angle of the first concave surface 6711 of the sixteenth lens is the maximum light distribution angle beta max of the first concave surface 6711 of the sixteenth lens, the maximum light distribution angle beta max of the first concave surface 6711 of the sixteenth lens is more than or equal to 15 degrees, and the surface-shaped contour of the first concave surface 6711 of the sixteenth lens is formed by
Figure BDA0002565853800000281
The calculation is carried out point by a numerical calculation method.
Referring to fig. 31, the edge ray E of the second concave surface 6712 of the sixteenth lensIIIEIVAfter being refracted by the second concave surface 6712 of the sixteenth lens, the angle between the emergent ray and the optical axis OZ is thetamaxOther arbitrary light CIIICIVAfter being refracted by the second concave surface 6712 of the sixteenth lens, the angle between the emergent ray and OZ is theta, and the surface profile of the second concave surface 6712 of the sixteenth lens is formed by
Figure BDA0002565853800000282
The calculation is carried out point by a numerical calculation method.
The maximum light distribution angle beta max of the light distribution angle beta is not less than 15 degrees, the full angle 2 beta max of the light distribution angle beta is not less than 30 degrees, the light distribution angle theta is not less than 30 degrees, the maximum light distribution angle theta max of the output light beam is not less than 30 degrees, the full angle 2 theta max of the light distribution angle beta is not less than 60 degrees, and the maximum light beam full angle can reach 150 degrees.
Specifically, as shown in FIG. 31O is the center point of the VCSEL chip 2, E is an emission point at the edge of the VCSEL chip 2, the included angle between the maximum emission angle and the optical axis OZ is γ max, and the maximum emission angle of the emission point (emission ray EE) is preferably selected by the specific embodiment of the embodimentIIAngle with the optical axis OZ) γ max is 9 °, which is the divergence angle half-angle in the minor axis direction of the light beam. Edge ray EEIIAnd extended in the reverse direction, intersecting below the optical axis OZ at a point O' set as an equivalent light emitting point of the seventh wide-angle beam expanding lens system 67.
As shown in fig. 32, the far-field angle distribution diagram of the light intensity of the seventh wide-angle beam expander lens system 67.
The effect of adopting monolithic lens to realize wide-angle grading described in this embodiment, it has the advantage that mould cost of manufacture and lens manufacturing cost are lower, the shortcoming is because upper and lower two faces are all comparatively concave, and is higher to the requirement of machining precision and assembly precision, and is more sensitive to face type error and assembly error, produces parasitic light and facula center zero order diffraction bright spot easily.
EXAMPLE seven
The seventh embodiment is different from the first embodiment in that the structure of the wide-angle beam expanding lens system 6 is changed, the wide-angle beam expanding lens system 6 is a fifth wide-angle beam expanding lens system 65 formed by combining three lenses, and the optical imaging system 7 of the wide-angle receiving assembly 4 is the same as that in the first embodiment.
Referring to fig. 33, the wide-angle beam expanding lens system 6 is a fifth wide-angle beam expanding lens system 65 composed of three lenses, the fifth wide-angle beam expanding lens system 65 includes a ninth lens 651, a tenth lens 652 disposed above the ninth lens 651, and an eleventh lens 653 disposed above the tenth lens 652, the ninth lens 651 is a double-sided concave lens having a negative refractive power, the tenth lens 652 is a meniscus lens, the tenth lens 652 has a tenth lens first concave surface 6521 and a tenth lens second convex surface 6522 having a refractive power, the eleventh lens 653 is a concave lens, the eleventh lens 653 has an eleventh lens first concave surface 6531 and an eleventh lens second concave surface 6532 having a negative refractive power, the eleventh lens second concave surface 6532 is a curved surface which is concave in the middle and gradually extends in an outward slope shape, the light beam emitted from the VCSEL chip 2 is expanded by the fifth wide-angle beam expanding lens system 65, the beam angle full angle of the expanded output beam is 2 theta max, the 2 theta max is not less than 60 degrees, and the maximum beam full angle can reach 170 degrees.
The three lenses are combined to have the effect that the diopter of the two lenses in the first embodiment is shared by the three lenses, and the diopter can be increased by adding one more lens, so that the full angle of the beam expanded light beam is increased. As the surface shape becomes more gentle, the chances of generating stray light and generating bright spots in the central area are smaller, and the light intensity distribution in the central and edge areas is more uniform.
Example eight
The difference between the eighth embodiment and the first embodiment is that the structure of the wide-angle beam expanding lens system 6 is changed, the wide-angle beam expanding lens system 6 is a sixth wide-angle beam expanding lens system 66 formed by combining four lenses, and the optical imaging system 7 of the wide-angle receiving assembly 4 is the same as that in the first embodiment.
Referring to fig. 34, the wide-angle beam expanding lens system 6 is a sixth wide-angle beam expanding lens system 66 formed by combining four lenses, the sixth wide-angle beam expanding lens system 66 includes a twelfth lens 661, a thirteenth lens 662 disposed above the twelfth lens 661, a fourteenth lens 663 disposed above the thirteenth lens 662, a fifteenth lens 664 disposed above the fourteenth lens 663, the twelfth lens 661 is a biconcave lens having a negative refractive power, the thirteenth lens 662 is a meniscus lens, the thirteenth lens 662 has a thirteenth lens first concave surface 6621 and a thirteenth lens second convex surface 6622 having a refractive power, the fourteenth lens 663 is a meniscus lens, the fourteenth lens 663 has a fourteenth lens first concave surface 6631 and a fourteenth lens second convex surface 6632 having a refractive power, the fifteenth lens 664 is a concave lens, the fifteenth lens 664 has a fifteenth lens first concave surface 6641 and a fifteenth lens second concave surface 6642, and has a negative diopter, the fifteenth lens second concave surface 6642 is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope shape towards the outside, the light beam emitted by the VCSEL chip 2 of the vertical cavity surface emitting laser is expanded by the sixth wide-angle beam expanding lens system 66, the beam angle total angle of the expanded output light beam is 2 θ max, the 2 θ max is not less than 60 °, and the maximum beam total angle can reach 170 °.
The four lenses are combined to have the effect that the four lenses are adopted to share the diopters of the two lenses in the first embodiment, and the diopters can be increased by adding more two lenses, so that the full angle of the beam expanded light beam is increased. As the surface shape becomes more gentle, the chances of generating stray light and generating bright spots in the central area are smaller, and the light intensity distribution in the central and edge areas is more uniform.
According to the light distribution principle of four lens combination, five lenses or the light distribution combination structure more than five lenses can be realized on the same rod, and the details are not repeated in the patent.
In conclusion, the beneficial effects of the invention are as follows:
the invention is provided with a base 10, the base 10 is provided with a substrate 1, a VCSEL chip 2 of a vertical cavity surface emitting laser arranged on the substrate 1, and a wide-angle beam expanding lens system 6 which is arranged above the VCSEL chip 2 of the vertical cavity surface emitting laser and is fixedly connected with the base 10 and is used for expanding the angle of a light beam emitted by the VCSEL chip 2 of the vertical cavity surface emitting laser to 60 degrees, the wide-angle beam expanding lens system 6 is composed of at least one lens, at least one lens in the wide-angle beam expanding lens system 6 is a concave lens with a concave middle part, one curved surface contour of the concave lens is concave in the middle part and gradually extends outwards in an arc shape of the cavity surface and is positioned on the other side of the corresponding surface of the light emitting surface of the VCSEL chip 2 of the vertical cavity surface emitting laser, the invention provides an infrared emitting module for wide-angle flight time optical ranging, the single concave lens can actually enlarge the beam angle to 60-150 degrees, the combined structure of the two lenses can actually enlarge the beam angle to the maximum 160 degrees, the combined structure of the more than three lenses can actually enlarge the beam angle to the maximum 170 degrees, and the optical efficiency is greatly improved.

Claims (29)

1. An infrared emission module for wide-angle time-of-flight optical ranging, characterized in that it comprises a base (10), the base (10) is provided with a substrate (1), a VCSEL chip (2) of the vertical cavity surface emitting laser arranged on the substrate (1), a wide-angle beam expanding lens system (6) which is arranged in the base (10) and expands the angle of a light beam emitted by the VCSEL chip (2) of the vertical cavity surface emitting laser, the wide-angle beam expanding lens system (6) is composed of at least one lens, at least one lens in the wide-angle beam expanding lens system (6) is a concave lens with concave middle, one curved surface contour of the concave lens is concave in the middle, gradually extends outwards in an arc-shaped slope shape and is positioned on the other side of the corresponding surface of the light emitting surface of the VCSEL chip (2) of the vertical cavity surface emitting laser, the wide-angle beam expanding lens system (6) has a full beam expansion angle of 60-150 degrees.
2. An ir-emitting module for wide-angle time-of-flight optical ranging as claimed in claim 1, wherein the maximum light spread angle at the edge of the concave lens is more than 1.25 times the angle of the beam incident on the lens.
3. The infrared emitting module for wide angle time-of-flight optical ranging as claimed in claim 1, characterized in that the VCSEL chip (2) is a multi-chip VCSEL array laser emitting tube or a single chip laser emitting tube, and the VCSEL chip (2) emits light with a wavelength between 700nm and 5000nm or in the visible band.
4. The infrared emission module of claim 1, wherein the bottom conductive electrode of the VCSEL chip (2) is electrically connected to the conductive electrode on the substrate (1) through a conductive adhesive, the surface conductive electrode of the VCSEL chip (2) is electrically connected to another conductive electrode on the substrate (1) through a conductive lead (9), and the VCSEL chip (2) is powered by two conductive electrodes on the substrate (1) when the VCSEL chip is turned on.
5. The infrared emission module for wide-angle time-of-flight optical ranging as claimed in claim 1, characterized in that the lens of the wide-angle beam expanding lens system (6) is an optically transparent resin material member, an optically transparent silicone material member, a glass material member or a photosensitive shadowless glue material member;
the optical refractive index of the lens material of the wide-angle beam expanding lens system (6) is between 1.30 and 1.75 in the wavelength band of 940 nm.
6. The IR-emitting module for wide-angle time-of-flight optical ranging as claimed in claim 5, wherein the base (10) is PPA material or PI material, one of the lenses of the wide-angle beam expanding lens system (6) is integrally formed with the base (10) or the lens of the wide-angle beam expanding lens system (6) is fixedly connected with the base (10) by adhesive.
7. The IR-emitting module for wide-angle time-of-flight optical ranging as claimed in claim 6, wherein one of the lenses of the wide-angle beam expanding lens system (6) and the base (10) are of a unitary structure made of the same material, the lens material is transparent liquid silica gel or high temperature-resistant transparent resin, the glass transition temperature of the high temperature-resistant transparent resin is between 200 ℃ and 300 ℃, and the optical refractive index is in the 940nm band between 1.30-1.75.
8. The IR emitter module for wide-angle time-of-flight optical ranging as claimed in claim 5, wherein the lens surface of the wide-angle beam expanding lens system (6) is coated with an optical antireflection film or a near-infrared band pass filter optical film or the lens material is doped with an infrared band pass filter dye material.
9. An infrared emitting module for wide angle time-of-flight optical ranging as claimed in claim 3, characterized in that the VCSEL chips (2) are formed by a plurality of point-like VCSELs arranged in a staggered arrangement, a 6-sided polygon arrangement, a 4-sided polygon arrangement or a random scattered arrangement.
10. Infrared emitting module for wide angle time-of-flight optical ranging according to claim 9, characterized in that the emitting angle of the VCSEL chips (2) is between 15 ° and 90 ° in total.
11. The infrared emission module of claim 1, wherein the wide-angle beam expanding lens system (6) is a first wide-angle beam expanding lens system (61) formed by combining two concave lenses, the first wide-angle beam expanding lens system (61) comprises a first lens (611) and a second lens (612) disposed above the first lens (611), the first lens (611) has a first lens first concave surface (6111) and a first lens second concave surface (6112), the second lens (612) has a second lens first concave surface (6121) and a second lens second concave surface (6122), and the second lens second concave surface (6122) is a curved surface which is concave in the middle and gradually extends in an arc slope shape towards the outside.
12. The infrared transmitter module as claimed in claim 11, wherein the beam emitted from the VCSEL chip (2) is expanded by the first lens (611) for the first time, the maximum beam angle of the first expanded VCSEL chip is 2 β max, the maximum beam angle is 30 ° or more and 2 β max or less 75 ° or less, the beam angle of the second VCSEL chip is expanded by the second lens (612) for the second time, the beam angle of the second VCSEL chip is 2 θ max, and the maximum beam angle is 60 ° or more and 2 θ max or less and 150 °.
13. The IR emitter module for wide-angle TOF optical ranging as claimed in claim 12 wherein the first lens first concave surface (6111) is spherical or aspherical, the VCSEL chip (2) is emitting light at any point, ray CGIIAn included angle gamma with the optical axis OZ, a ray CGIIAfter passing through the first concave surface (6111) of the first lens, it refracts the light CIICIIIThe included angle between the optical axis OZ and the optical axis OZ is kept constant, the included angle is gamma, and the emergent ray C of the ray after being refracted again by the second concave surface (6112) of the first lensIIICIVHas a light distribution angle of beta and an edge light ray EIIEIIIAfter being refracted by the second concave surface (6112) of the first lens, the emergent ray EIIIEIVThe light distribution angle of the first lens (611) is the maximum light distribution angle beta max, the maximum light distribution angle beta max of the first lens (611) is 15 degrees, and the second concave surface (6112) of the first lens meets the light distribution condition:
Figure FDA0002565853790000031
14. the IR emitter module for wide-angle time-of-flight optical ranging as claimed in claim 13, wherein the second lens second concave (6122) edge ray EIVEVAfter being refracted by the second concave surface (6122) of the second concave lens, the included angle between the emergent ray and the optical axis OZ is thetamaxOther arbitrary light GIVCVAfter being refracted by the second concave surface (6122) of the second lens, the included angle between the emergent ray and the OZ is theta, and the second concave surface (6122) of the second lens meets the light distribution condition:
Figure FDA0002565853790000041
15. the infrared emission module of claim 1, wherein the wide-angle beam expanding lens system (6) is a second wide-angle beam expanding lens system (62) composed of two concave lenses and a Fresnel lens on one side, a second silicone gel (12) is disposed between the second wide-angle beam expanding lens system (62) and the VCSEL chip (2), the second wide-angle beam expanding lens system (62) comprises a third lens (621), a fourth lens (622) disposed above the third lens (621), the third lens (621) has a first concave surface (6211) and a second concave surface (6212), the fourth lens (622) has a first concave surface (6221) and a second concave surface (6222), the second concave surface (6222) is segmented and the slope of each segment is tiled on the same plane, a serrated Fresnel surface is formed, and the second concave surface (6212) of the third lens is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope towards the outer side.
16. The infrared transmitter module as claimed in claim 15, wherein the beam emitted from the VCSEL chip (2) is expanded by the third lens (621) for the first time, the maximum beam angle full angle after the first expansion is 2 β max, the 30 ° 2 β max is 75 ° or more, the beam angle full angle of the output beam after the second expansion is 2 θ max, and the 60 ° 2 θ max is 150 ° or less by the fourth lens (622).
17. The infrared emission module as claimed in claim 1, wherein the wide-angle beam expanding lens system (6) is a third wide-angle beam expanding lens system (63) composed of a concave lens and a free-form concave lens, the third wide-angle beam expanding lens system (63) comprises a fifth lens (631), a sixth lens (632) disposed above the fifth lens (631), the fifth lens (631) has a fifth lens first concave surface (6311) and a fifth lens second concave surface (6312), the sixth lens (632) has a sixth lens first concave surface (6321) and a sixth lens second concave surface (6322), the sixth lens second concave surface (6322) is a free-form light distribution lens with asymmetric distribution in the X-axis transverse direction and the Y-axis longitudinal direction, and the free-form light distribution lens has a larger angle in the X-axis transverse direction, the thickness is relatively thick, the light distribution angle is relatively small along the Y-axis longitudinal direction, the thickness is relatively thin, and the second concave surface (6312) of the fifth lens is a curved surface which is concave in the middle and gradually extends outwards in an arc-shaped slope shape.
18. The infrared emission module of claim 17, wherein the beam emitted from the VCSEL chip (2) is expanded by the fifth lens (631) for the first time, the maximum total angular beam angle after the first expansion is 2 β max, the 30 ° 2 β max is equal to or greater than 75 °, the beam is expanded by the sixth lens (632) for the second time, the total angular beam angle output along the X-axis is 2 θ max, the 60 ° 2 θ max is equal to or greater than 150 °, the total angular beam angle output along the Y-axis is 2 θ 'max, and the 60 ° 2 θ' max is equal to or greater than 150 °.
19. The IR-emitting module for wide-angle time-of-flight optical ranging as claimed in claim 1, wherein the wide-angle beam expander lens system (6) is a fourth wide-angle beam expander lens system (64) composed of two concave lenses, at least one of which is configured as a partially frosted or a fully frosted surface, the fourth wide-angle beam expander lens system (64) comprises a seventh lens (641), an eighth lens (642) disposed above the seventh lens (641), the seventh lens (641) having a seventh lens first concave surface (6411) and a seventh lens second concave surface (6412), the eighth lens (642) having an eighth lens first concave surface (6421) and an eighth lens second concave surface (64642), at least one of the seventh lens (641) and the eighth lens (64642) being configured as a partially frosted or a fully frosted surface, the eighth lens second concave surface (6422) being concave in the middle and gradually sloping outward And (5) kneading.
20. The infrared transmitter module as claimed in claim 19, wherein the beam emitted from the VCSEL chip (2) is expanded by the seventh lens (641) for the first time, the maximum beam angle full angle after the first expansion is 2 β max, the maximum beam angle full angle is 30 ° or more and 2 β max or less 75 °, the beam expansion is performed by the eighth lens (642), the beam angle full angle of the output beam after the second expansion is 2 θ max, and the maximum beam angle full angle is 60 ° or more and 2 θ max or less 150 °.
21. The IR-emitting module for wide-angle time-of-flight optical ranging as claimed in claim 1, wherein the wide-angle beam expander lens system (6) is a fifth wide-angle beam expander lens system (65) composed of three lenses, the fifth wide-angle beam expander lens system (65) comprises a ninth lens (651), a tenth lens (652) mounted above the ninth lens (651), an eleventh lens (652) mounted above the tenth lens (652), the ninth lens (651) is a biconcave lens having a negative refractive power, the tenth lens (652) is a meniscus lens, the tenth lens (652) has a tenth lens first concave surface (6521) and a tenth lens second convex surface (6522) having a refractive power, the eleventh lens (653) is a concave lens, the eleventh lens (653) has an eleventh lens first concave surface (6531) and an eleventh lens second concave surface (6532), the eleventh lens second concave surface (6532) is a curved surface which is concave in the middle and gradually extends outwards in an arc-shaped slope shape, light beams emitted by the VCSEL chip (2) of the vertical cavity surface emitting laser are expanded by a fifth wide-angle beam expanding lens system (65), the full beam angle of the expanded output light beams is 2 theta max, and the 2 theta max is more than or equal to 60 degrees and less than or equal to 150 degrees.
22. The IR-emitting module for wide-angle time-of-flight optical ranging as claimed in claim 1, wherein the wide-angle beam expander lens system (6) is a sixth wide-angle beam expander lens system (66) composed of four lenses, the sixth wide-angle beam expander lens system (66) comprises a twelfth lens (661), a thirteenth lens (662) mounted above the twelfth lens (661), a fourteenth lens (663) mounted above the thirteenth lens (662), a fifteenth lens (664) mounted above the fourteenth lens (663), the twelfth lens (661) is a biconcave lens having negative refractive power, the thirteenth lens (662) is a meniscus lens, the thirteenth lens (662) has a thirteenth lens first concave surface (6621) and a thirteenth lens second convex surface (6622) having refractive power, the fourteenth lens (663) is a meniscus lens, the fourteenth lens (663) is provided with a fourteenth lens first concave surface (6631) and a fourteenth lens second convex surface (6632) and has diopters, the fifteenth lens (664) is a concave lens, the fifteenth lens (664) is provided with a fifteenth lens first concave surface (6641) and a fifteenth lens second concave surface (6642) and has negative diopters, the fifteenth lens second concave surface (6642) is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope shape towards the outer side, light beams emitted by the VCSEL chip (2) of the vertical cavity surface emitting laser are expanded by a sixth wide-angle beam expanding lens system (66), the full angle of the light beams of the expanded output light beams is 2 theta max, and the 60-degree 2 theta max is more than or equal to 150 degrees.
23. The infrared emission module as claimed in claim 1, wherein the wide-angle beam expanding lens system (6) is a seventh wide-angle beam expanding lens system (67) composed of a single lens, the seventh wide-angle beam expanding lens system (67) includes a sixteenth lens (671), the sixteenth lens (671) is a double-sided concave lens with negative refractive power, the sixteenth lens (671) has a sixteenth lens first concave surface (6711) and a sixteenth lens second concave surface (6712), the sixteenth lens second concave surface (6712) is a curved surface which is concave in the middle and gradually extends in an arc-shaped slope toward the outside, the beam emitted from the VCSEL chip (2) of the vertical cavity surface emitting laser is expanded by the seventh wide-angle beam expanding lens system (67), and the beam angle of the expanded output beam has a total angle of 2 θ max, the 2 theta max between 60 degrees and 150 degrees.
24. The infrared emission module for wide-angle time-of-flight optical ranging as claimed in claim 1, characterized in that the lens surface of the wide-angle beam expanding lens system (6) is a mirror surface or a scaly surface or a micro-structured texture surface with light mixing effect.
25. The infrared emission module for wide-angle time-of-flight optical ranging is characterized by comprising the infrared emission module for wide-angle time-of-flight optical ranging as claimed in any one of claims 1 to 23, wherein a wide-angle receiver assembly (4) is installed on one side of the base (10), the wide-angle receiver assembly (4) comprises an optical imaging system (7), a time-of-flight imager (8) installed below the optical imaging system (7) and used for receiving optical signals is installed, and the time-of-flight imager (8) outputs image information after being processed.
26. Infrared transmission module for wide-angle time-of-flight optical ranging as claimed in claim 25, characterized in that the time-of-flight imager (8) is mounted on the base plate (1) or on a separate other base plate.
27. The infrared emission module of claim 25, wherein the optical imaging system (7) is a first optical imaging system (71) composed of two optical lenses, the first optical imaging system (71) comprises a first wide-angle concave lens (711), a first spacer ring (712), a first aperture stop (713), a second spacer ring (714) and a first convex lens (715) arranged in sequence from the object side to the image side, the first wide-angle concave lens (711) is a low-refractive-index and high-dispersion-coefficient material with a refractive index nd < 1.58 and an abbe number vd > 50, the first convex lens (715) is a high-refractive-index and low-dispersion-coefficient material with a refractive index nd > 1.6 and an abbe number vd < 30, and the receiving angle of the first optical imaging system (71) is 2 ψ max.
28. The infrared emission module of claim 25, wherein the optical imaging system (7) is a second optical imaging system (72) composed of three optical lenses, the second optical imaging system (72) comprises a second wide-angle concave lens (721), a third spacer ring (722), a second aperture stop (723), a second convex lens (724) and a half meniscus lens (725) arranged from the object side to the image side, the second wide-angle concave lens (721) is made of a high-refractivity and low-dispersion-coefficient material, the refractive index nd is greater than 1.6, the abbe coefficient vd is less than 30, the second convex lens (724) is made of a low-refractivity and high-dispersion-coefficient material, the refractive index nd is less than 1.58, the abbe coefficient vd is greater than 50, and the half meniscus lens (725) is made of a high-refractivity and low-dispersion-coefficient material, the refractive index nd is greater than 1.6, and the refractive index nd is greater than 1.6, The Abbe coefficient vd is less than 30, and the receiving angle of the second optical imaging system (72) is 2 psi max.
29. The infrared emission module for wide-angle time-of-flight optical ranging as claimed in claim 27 or 28, wherein one of the faces of one of the first optical imaging system (71) and the second optical imaging system (72) is coated with an infrared band-pass filter for infrared passing and visible blocking, or a single plane lens is used as an infrared band-pass filter for infrared passing and visible blocking, or an infrared band-pass filter for infrared passing and visible blocking is coated on a module protection glass.
CN202010638142.6A 2020-07-01 2020-07-01 Infrared emission module for wide-angle flight time optical ranging and module thereof Pending CN111830485A (en)

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