CN111711900A - Display panel, manufacturing method thereof and display device - Google Patents
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- CN111711900A CN111711900A CN202010659348.7A CN202010659348A CN111711900A CN 111711900 A CN111711900 A CN 111711900A CN 202010659348 A CN202010659348 A CN 202010659348A CN 111711900 A CN111711900 A CN 111711900A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- Acoustics & Sound (AREA)
- Signal Processing (AREA)
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Abstract
The application discloses a display panel, a manufacturing method thereof and a display device, and relates to the technical field of display. At least one piezoelectric sound generating unit included by the display panel is located in the display area of the flexible film layer, so that the display panel does not occupy the peripheral area of the display panel, the area of the peripheral area of the display panel can be smaller, and the screen occupation ratio of the display panel is higher. Moreover, because a gap is formed between each piezoelectric sound generating unit and any sub-pixel, when the piezoelectric sound generating units vibrate in the cavity, the vibration waves generated by the piezoelectric sound generating units are prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is ensured.
Description
Technical Field
The present disclosure relates to the field of display technologies, and in particular, to a display panel, a manufacturing method thereof, and a display device.
Background
The display device may include: a display panel, and speakers, and the speakers are generally disposed in a peripheral region of the display panel. The speaker may include: the driver and the vibrating diaphragm are arranged on the light-emitting side of the driver, which is close to the display panel. When the exciter is electrified, the vibrating diaphragm can vibrate, and then sound is produced.
However, since the speaker needs to be provided in the peripheral area of the display panel, the area of the peripheral area is large, and the screen occupation ratio of the display panel is low.
Disclosure of Invention
The application provides a display panel, a manufacturing method thereof and a display device, which can solve the problem that the screen occupation ratio of the display panel is low in the related art. The technical scheme is as follows:
in one aspect, there is provided a display panel including:
a base substrate having a cavity;
a flexible film layer located on one side of the substrate base plate, the flexible film layer having a display area;
and the plurality of sub-pixels and at least one piezoelectric sound generating unit are positioned in the display area, each piezoelectric sound generating unit is provided with a gap between the sub-pixels, and each piezoelectric sound generating unit is in the orthographic projection on the flexible film layer, and the cavity is in the orthographic projection on the flexible film layer at least partially overlapped.
Optionally, each of the piezoelectric sound generating units includes: the flexible film layer is arranged on the substrate and comprises at least one first electrode block, a piezoelectric film layer and at least one second electrode block which are sequentially stacked along the direction far away from the flexible film layer;
the orthographic projection of the piezoelectric film layer on the flexible film layer covers the orthographic projection of the at least one first electrode block on the flexible film layer, and covers the orthographic projection of the at least one second electrode block on the flexible film layer.
Optionally, each of the piezoelectric sound generating units further includes: a third electrode block and a connecting electrode;
the third electrode block and the first electrode block are arranged on the same layer and at intervals, one end of the connecting electrode is connected with the third electrode block, the other end of the connecting electrode is connected with the second electrode block, and the third electrode block is used for providing audio driving signals from an audio driving circuit for the second electrode block.
Optionally, the display panel includes: the piezoelectric sounding units are uniformly distributed on one side, far away from the substrate base plate, of the flexible film layer.
Optionally, the cavity is a groove located on one side of the substrate close to the flexible film layer;
or, the cavity is a through hole.
Optionally, the display panel further includes: a reflective layer;
the reflecting layer is located on one side, far away from the flexible film layer, of the substrate base plate and used for reflecting sound waves generated by the piezoelectric sound generating unit.
Optionally, the display panel further includes: a plurality of data lines, each of the data lines being connected to a column of the sub-pixels;
the orthographic projection of at least one data line in the data lines on the flexible film layer is at least partially overlapped with the orthographic projection of the piezoelectric sound generating unit on the flexible film layer.
In another aspect, there is provided a method of manufacturing a display panel, the method including:
forming a plurality of sub-pixels and at least one piezoelectric sound generating unit on one side of a flexible film layer, wherein the sub-pixels and the at least one piezoelectric sound generating unit are located in a display area of the flexible film layer, and a gap is formed between each piezoelectric sound generating unit and any one sub-pixel;
providing a substrate base plate, wherein the substrate base plate is provided with a cavity;
and bonding one side, far away from the plurality of sub-pixels, of the flexible film layer with one side, provided with a cavity, of the substrate base plate, wherein the orthographic projection of each piezoelectric sound generating unit on the flexible film layer is at least partially overlapped with the orthographic projection of the cavity on the flexible film layer.
Optionally, before forming the plurality of sub-pixels and the at least one piezoelectric sound generating unit on one side of the flexible film layer, the method further includes:
providing a support substrate;
forming the flexible film layer on one side of the support substrate;
after forming the plurality of sub-pixels on one side of the flexible film layer, and the at least one piezoelectric sound generating unit, the method further comprises:
and peeling the support substrate from the flexible film layer.
In still another aspect, there is provided a display device including: an audio driving circuit, and a display panel as described in the above aspect;
the audio driving circuit is connected with the piezoelectric sound production unit in the display panel and used for providing an audio driving signal for the piezoelectric sound production unit.
The beneficial effect that technical scheme that this application provided brought includes at least:
the application provides a display panel, a manufacturing method thereof and a display device, wherein at least one piezoelectric sound generating unit included by the display panel is located in a display area of a flexible film layer, so that the display panel does not occupy a peripheral area of the display panel, the area of the peripheral area of the display panel can be smaller, and the screen occupation ratio of the display panel is higher. Moreover, because a gap is formed between each piezoelectric sound generating unit and any sub-pixel, when the piezoelectric sound generating units vibrate in the cavity, the vibration waves generated by the piezoelectric sound generating units are prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is ensured.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic view of a structure of a speaker in the related art;
fig. 2 is a schematic view of a position where an actuator is disposed in the related art;
FIG. 3 is a schematic view showing a propagation direction of a vibration wave generated by an exciter in the related art;
FIG. 4 is a schematic view showing superposition of vibration waves generated by an exciter in the related art;
fig. 5 is a schematic structural diagram of a display panel according to an embodiment of the present disclosure;
fig. 6 is a schematic structural diagram of another display panel provided in an embodiment of the present application;
fig. 7 is a schematic structural diagram of another display panel provided in the embodiment of the present application;
fig. 8 is a schematic structural diagram of a piezoelectric sound generating unit according to an embodiment of the present application;
FIG. 9 is a top view of a substrate base provided in an embodiment of the present application;
FIG. 10 is a cross-sectional view of a substrate provided in an embodiment of the present application;
fig. 11 is a schematic structural diagram of another display panel provided in an embodiment of the present application;
FIG. 12 is a top view of the display panel shown in FIG. 11;
fig. 13 is a flowchart of a method for manufacturing a display panel according to an embodiment of the present disclosure;
fig. 14 is a flowchart of another method for manufacturing a display panel according to an embodiment of the present disclosure;
FIG. 15 is a schematic diagram of a method of forming a first electrode block according to an embodiment of the present disclosure;
FIG. 16 is a schematic view of a method of forming a blocking film, a buffer film, an active layer, a gate insulating film, a gate layer and an interlayer dielectric film according to an embodiment of the present invention;
FIG. 17 is a schematic view illustrating an etching process of a buffer film, a gate insulating film and an interlayer dielectric film according to an embodiment of the present invention;
FIG. 18 is a schematic diagram illustrating an etching process performed on a shielding film according to an embodiment of the present disclosure;
fig. 19 is a schematic diagram of a piezoelectric film layer formed according to an embodiment of the present disclosure;
FIG. 20 is a schematic diagram of one method of forming a second electrode block provided by an embodiment of the present application;
FIG. 21 is a schematic view of a first flat film formed according to an embodiment of the present disclosure;
FIG. 22 is a schematic view of a via formed in an interlayer dielectric layer and a gate insulating layer according to an embodiment of the present application;
fig. 23 is a schematic diagram of forming a source drain layer and a data line according to an embodiment of the present disclosure;
FIG. 24 is a schematic view of a second flat film formed according to an embodiment of the present application;
FIG. 25 is a schematic illustration of one type of forming an anode layer provided by an embodiment of the present application;
FIG. 26 is a schematic view of a pixel defining layer according to an embodiment of the present disclosure;
fig. 27 is a schematic diagram of forming a first planar layer and a second planar layer according to an embodiment of the present disclosure;
fig. 28 is a schematic view of forming a light-emitting layer and a cathode layer according to an embodiment of the present disclosure;
fig. 29 is a schematic diagram of a method for forming an encapsulation film according to an embodiment of the present disclosure;
fig. 30 is a schematic diagram of a cover plate formed according to an embodiment of the present disclosure.
Detailed Description
To make the objects, technical solutions and advantages of the present application more clear, embodiments of the present application will be described in further detail below with reference to the accompanying drawings.
Sound is formed by the vibration of a medium (e.g., air, solid or liquid) caused by the vibration of a sound source. The sound generating device in a conventional display apparatus is a speaker. Referring to fig. 1, the speaker may include an exciter and a diaphragm. When the exciter is electrified, the vibrating diaphragm can vibrate, and then the display device can make a sound. Referring to (1) and (2) of fig. 2, the actuator may be disposed in a peripheral area of a display panel in the display device (e.g., disposed at an upper side of a middle plate). The region of the display panel in which the exciter is disposed may have an opening, and the diaphragm may be located in the opening and on a light-emitting side of the exciter near the display panel. When the exciter is energized, sound can be emitted through the upper side of the display panel. Referring to fig. 2, the display panel further includes a battery and a cover plate.
However, since the speaker needs to be provided in the peripheral area of the display panel, the area of the peripheral area is large, and the screen occupation ratio of the display panel is low. Therefore, in order to improve the screen occupation ratio of the display panel, the screen sound technology is receiving more and more attention, and meanwhile, screen sound products are gradually entering the lives of people. In the related art, the exciter may be attached to the non-light-emitting side of the display panel, and the display panel may be used instead of the diaphragm of the speaker. When the exciter is electrified, the display panel can vibrate to adjust the density degree of the medium on the light emitting side of the display panel, so that the display device can generate sound. Or, the exciter can be attached to one side of the middle plate, the magnet is attached to the non-light-emitting side of the display panel, and the movement of the magnet is driven through the electromagnetic induction principle so that the display panel vibrates to realize sound production of the display device.
Adopt screen sound production technique and need not to set up the trompil in display panel's light-emitting side for setting up the vibrating diaphragm, not only waterproof dustproof, elegant appearance moreover, the screen accounts for comparatively higher. Meanwhile, the display panel is adopted to replace a traditional vibrating diaphragm of the loudspeaker, the emitted sound can be directly transmitted to a user, and the user experience is better. However, since the driver is attached to the light-emitting side of the display panel, the thickness of the display device is increased.
It should be noted that, referring to fig. 3, since the exciter is directly attached to the non-light-emitting side of the display panel, when the exciter is energized to drive the display panel to vibrate and generate sound, the vibration wave (sound wave) generated by the exciter is also propagated (laterally propagated) in the display panel in addition to the vibration in the direction perpendicular to the display panel (sound-generating vibration).
Referring to fig. 4, if two actuators are attached to the non-light-emitting side of the display panel, two lines of waves are superimposed at the middle position between the two actuators when the vibration waves generated by the two actuators propagate in the display panel. When two trains of waves meet at an intermediate position between two actuators, if the phases of the two trains of waves are the same, a positive superposition effect will be produced when the two trains of waves are superposed at the intermediate position between the two actuators, at which time the amplitude at the intermediate position is the sum of the amplitudes of the two trains of waves, and the vibration energy will be enhanced. Therefore, superposition of the vibration waves at the intermediate position between the two actuators affects the display effect at the intermediate position, and in a serious case, the display panel is broken from the intermediate position.
Fig. 5 is a schematic structural diagram of a display panel according to an embodiment of the present application. The display panel can solve the problem that the screen occupation ratio of the display panel in the related art is low. As can be seen with reference to fig. 5, the display panel 10 may include: the sound generating device comprises a substrate base plate 101, a flexible film layer 102, a plurality of sub-pixels 103 and at least one piezoelectric sound generating unit 104. In fig. 5, one sub-pixel 103 and two piezoelectric sound emitting units 104 are shown.
In the embodiment of the present application, the flexible film layer 102 may be located on one side of the substrate base plate 101, and the flexible film layer 102 may have a display area. The plurality of sub-pixels 103 and the at least one piezoelectric sound generating unit 104 are both located on the side of the flexible film layer 102 away from the substrate base plate 101, and are located in the display area of the flexible film layer 102. Wherein each piezoelectric sound generating unit 104 is capable of vibrating upon receiving an audio driving signal provided by an audio driving circuit, thereby causing the display panel 10 to vibrate, and further, causing the display device to generate sound.
Since the at least one piezoelectric sound generating unit 104 is located in the display area of the flexible film layer 102, the peripheral area of the display panel is not occupied, the area of the peripheral area can be small, and the screen occupation ratio of the display panel is high.
Moreover, a gap (hollow) is formed between each piezoelectric sound generating unit 104 and any sub-pixel 103, so that when the piezoelectric sound generating unit 104 vibrates, the vibration waves generated by the piezoelectric sound generating unit 104 are prevented from being transmitted to the sub-pixels 103 in the display panel 10, and the display effect of the display device is ensured. Therefore, even if the display panel 10 includes two piezoelectric sound units 104, the vibration waves generated by the two piezoelectric sound units 104 are not superposed in the area where the sub-pixels are located, so that damage to the display panel 10 due to superposition of the vibration waves is avoided, and the display effect of the display device is ensured.
Optionally, the substrate base plate 101 is provided with a cavity 101a, and an orthographic projection of each piezoelectric sound generating unit 104 on the flexible film layer 102 at least partially overlaps with the orthographic projection of the cavity 101a on the flexible film layer 102. The piezoelectric sound generating unit 104 can vibrate in the cavity 101a, and the problem that the display device cannot generate sound due to the small vibration space of the piezoelectric sound generating unit 104 is avoided.
Illustratively, two piezoelectric sound-generating units 104 (104 a and 104b, respectively) are shown in fig. 5, and then the substrate base plate 101 has two cavities 101a corresponding to the two piezoelectric sound-generating units 104 one by one, and an orthographic projection of each piezoelectric sound-generating unit 104 on the flexible film layer 102 at least partially overlaps with an orthographic projection of a corresponding one of the cavities 101a on the flexible film layer 102.
In the embodiment of the application, because the display panel provided by the embodiment of the application can realize display and sound production simultaneously, and the piezoelectric sound production unit and the sub-pixel are positioned on the same side of the substrate, the thickness of the display panel cannot be influenced by the piezoelectric sound production unit. In addition, since the substrate base substrate has a thickness smaller than that of the exciter, the thickness of the display panel provided in the embodiment of the present application is smaller than that of the exciter attached to the light emitting side of the display panel in the related art.
To sum up, the embodiment of the present application provides a display panel, at least one piezoelectric sound generating unit that this display panel includes is located the display area of flexible rete, consequently can not occupy the peripheral region of display panel, and the area of the peripheral region of this display panel can be less, and display panel's screen accounts for than higher. Moreover, because a gap is formed between each piezoelectric sound generating unit and any sub-pixel, when the piezoelectric sound generating units vibrate in the cavity, the vibration waves generated by the piezoelectric sound generating units are prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is ensured.
Alternatively, the flexible material of the flexible film 102 may be Polyimide (PI). Referring to fig. 6, an Optical Clear Adhesive (OCA) layer 105 may be disposed between the flexible film layer 102 and the substrate base plate 101, and the OCA layer 105 may be used to bond the flexible film layer 102 and the substrate base plate 101.
Fig. 7 is a schematic structural diagram of another display panel provided in the embodiment of the present application. As can be seen with reference to fig. 7, each piezoelectric sound emitting unit 104 may include: at least one first electrode block 1041, a piezoelectric film layer 1042, and at least one second electrode block 1043, which are sequentially stacked in a direction away from the flexible film layer 102. The orthographic projection of the piezoelectric film 1042 on the flexible film 102 may cover the orthographic projection of the at least one first electrode block 1041 on the flexible film 102, and cover the orthographic projection of the at least one second electrode block 1043 on the flexible film 102. Also, referring to fig. 7, an orthographic projection of each second electrode block 1043 on the flexible film layer 102 overlaps with an orthographic projection of one first electrode block 1041 on the flexible film layer 102.
The first electrode block 1041 may also be referred to as a transmit (Tx) electrode, and the second electrode block 1043 may also be referred to as a receive (Rx) electrode.
Alternatively, the first electrode block 1041 and the second electrode block 1043 may be made of a metal material. The piezoelectric film 1042 may be made of an organic piezoelectric material. For example, it may be made of polyvinylidene fluoride (PVDF), or a binary or ternary polymer of PVDF. Of course, the piezoelectric film 1042 may also be made of a composite piezoelectric material composed of an organic piezoelectric material and an inorganic piezoelectric material, such as a piezoelectric ceramic.
In the embodiment of the present application, the audio driving circuit in the display device can transmit the audio driving signal to the first electrode block 1041 and the second electrode block 1043. The piezoelectric film 1042 can convert the audio driving signal (electrical signal) received by the first electrode block 1041 and the second electrode block 1043 into a vibration signal based on the piezoelectric effect of the piezoelectric material, and the piezoelectric film 1042 can start to vibrate under the action of the vibration signal, so that the display panel vibrates, and the display device makes a sound.
Illustratively, two piezoelectric sound generating units 104 are shown in fig. 7, wherein the first piezoelectric sound generating unit 104a includes two first electrode blocks 1041 and two second electrode blocks 1043 corresponding to the two first electrode blocks 1041 one to one. The second piezoelectric sound generating unit 104b includes a first electrode block 1041 and a second electrode block 1043. Of course, each piezoelectric sound generating unit 104 may further include more first electrode blocks 1041 and more second electrode blocks 1043, and the number of the first electrode blocks 1041 and the number of the second electrode blocks 1043 included in each piezoelectric sound generating unit 104 are not limited in this embodiment of the application.
Fig. 8 is a schematic structural diagram of a piezoelectric sound generating unit according to an embodiment of the present application. As can be seen with reference to fig. 8, each piezoelectric sound emitting unit 104 may further include: a third electrode block 1044 and a connection electrode 1045. The third electrode block 1044 may be disposed at the same layer as the first electrode block 1041 and at an interval. One end of the connection electrode 1045 may be connected to the third electrode block 1044, and the other end of the connection electrode 1045 may be connected to the second electrode block 1043. The third electrode block 1044 may be used to provide the second electrode block 1043 with audio drive signals from the audio drive circuit.
That is, the audio driving circuit may be connected to the first electrode block 1041 and the third electrode block 1044, respectively. Since the third electrode block 1044 is on the same layer as the first electrode block 1041, it can be avoided that the audio driving circuit is connected to the first electrode block 1041 and the second electrode block 1043 on different layers, which affects the accuracy of the audio driving signal provided by the audio driving circuit, thereby ensuring the reliability of the sound emitted by the display device.
Optionally, the material of the third electrode block 1044 may be the same as that of the first electrode block 1041, and is prepared by using the same patterning process. The connection electrode 1045 may be made of silver (Ag).
Since the piezoelectric film 1042 may damage the first electrode block 1041 on one side of the piezoelectric film 1042 when manufacturing, referring to fig. 8, the piezoelectric sound generating unit 104 may further include: a first protective layer 1046. The first protection layer 1046 may be disposed on a side of the piezoelectric film 1042 near the first electrode block 1041 for protecting the first electrode block 1041. Alternatively, the first protection layer 1046 may be made of a silicon nitride (SiN) material.
In the embodiment of the present application, the display panel 10 may include: a plurality of piezoelectric sound generating units 104, wherein the plurality of piezoelectric sound generating units 104 can be uniformly distributed on the side of the flexible film layer 102 far away from the substrate base plate 101. Therefore, the vibration degrees of all areas of the display panel are close, full-screen sound production of the display device can be achieved, and the display effect of the display device can be guaranteed.
As can be seen by referring to fig. 5 and 6, the cavity 101a of the substrate base plate 101 may be a groove located on a side of the substrate base plate 101 close to the flexible film layer 102. Alternatively, if the sound pressure of the sound wave generated by the piezoelectric sound generating unit 104 is large, referring to fig. 7 and 8, the cavity 101a of the substrate base 101 may be a through hole to ensure that the piezoelectric sound generating unit 104 has sufficient spatial vibration.
In the embodiment of the present application, referring to fig. 9, an orthographic projection of the cavity 101a in the substrate base plate 101 in the flexible film layer 102 may be a trapezoid, a circle, or a triangle. Of course, the orthographic projection of the cavity 101a in the substrate base plate 101 in the flexible film layer 102 may also be in other shapes, which is not limited in this application.
Referring to fig. 10, the shape of the longitudinal section of the cavity 101a in the base substrate 101 may be trapezoidal or rectangular. Wherein the longitudinal section is perpendicular to the carrying surface of the substrate base plate 101. The trapezoid can be a regular trapezoid or an inverted trapezoid. If the longitudinal section of the cavity 101a is a trapezoid, the area of the orthographic projection of the side of the cavity 101a close to the flexible film 102 on the flexible film 102 is smaller than the area of the orthographic projection of the side of the cavity 101a far from the flexible film 102 on the flexible film 102. If the longitudinal section of the cavity 101a is an inverted trapezoid, an area of an orthogonal projection of a side of the cavity 101a close to the flexible film 102 on the flexible film 102 is larger than an area of an orthogonal projection of a side of the cavity 101a far from the flexible film 102 on the flexible film 102.
Fig. 11 is a schematic structural diagram of another display panel provided in the embodiment of the present application. As can be seen with reference to fig. 11, the display panel may further include: a reflective layer 106, wherein the reflective layer 106 may be located on a side of the substrate base plate 101 away from the flexible film layer 102, and the reflective layer 106 may be used for reflecting the sound waves generated by the piezoelectric sound generating unit 104.
Optionally, one side of the reflective layer 106 may be attached to one side of the substrate base plate 101 away from the flexible film layer 102 by OCA glue, so that the reliability of connection between the reflective layer 106 and the substrate base plate 101 can be improved. That is, referring to fig. 11, the reflective layer 106 and the base substrate 101 may have an OCA layer 105 therebetween.
Referring to fig. 11, the display panel 10 may further include: a plurality of data lines 107, each data line 107 being connectable to a column of subpixels 103. An orthographic projection of at least one data line 107 of the plurality of data lines 107 on the flexible film layer 102 at least partially overlaps with an orthographic projection of the piezoelectric sound generating unit 104 on the flexible film layer 102. The data lines 107 may be in the same layer as the source/drain layers 1037 in the sub-pixels 107.
Also, referring to fig. 11, the display panel 10 may further include: a first planar layer 108. The first planarization layer 108 may be positioned between the second electrode block 1043 and the plurality of data lines 107. The orthographic projection of the first flat layer 108 on the flexible film layer 102 is not overlapped with the orthographic projection of any sub-pixel 103 on the flexible film layer 102, and is not overlapped with the gap between the piezoelectric sound generating unit 104 and the sub-pixel 103.
As can also be seen with reference to fig. 11, the sub-pixel 103 may include: a barrier layer 1031, a buffer layer 1032, an active layer 1033, a gate insulating layer (GI) 1034, a gate (G) layer 1035, an interlayer dielectric (ILD) 1036, a source/drain layer 1037, a second planarization layer (PNL) 1038, a Pixel Definition Layer (PDL) 1039, an Anode layer 10310, a cathode layer (EML) 10311, AND a cathode layer (cathodo layer)10312, which are sequentially stacked along a side away from the flexible film layer 102. The source and drain layers 1037 may include a source (S) 10371 and a drain (D) 10372, and the source 10371 and the drain 10372 are connected to the active layer 1033 through vias. Wherein, the side of the data lines 107 away from the flexible film layer 102 also has a second planarization layer 1038.
Since the PI for preparing the flexible film layer 102 is a hydrophilic material, in order to prevent water and oxygen in the flexible film layer 102 from affecting other film layers on the flexible film layer 102, a barrier layer 1031 and a buffer layer 1032 may be formed in the display panel 10. Water and oxygen in the flexible film layer 102 can be prevented from infiltrating into other film layers, and the characteristics of the film layers are ensured. For example, water and oxygen in the flexible film layer 102 do not enter the gate layer 1035, the source and drain layers 1037, and the light emitting layer 10311 of the sub-pixel 103.
Referring to fig. 11, the display panel 10 may further include: a packaging film layer (TFE) 109, and a Cover Glass (CG) 110, where the packaging film layer 109 may be located on a side of the second flat layer 1038 away from the flexible film layer 102, and the cover glass 110 may be located on a side of the packaging film layer 109 away from the flexible film layer 102. The orthographic projection of the encapsulation film 109 on the flexible film 102 does not overlap the gap between the piezoelectric sound generating unit 104 and the sub-pixel 103.
Optionally, the encapsulation film layer 109 and the cover plate 110 may be bonded by OCA glue, so that the reliability of connection between the encapsulation film layer 109 and the cover plate 110 can be improved. That is, referring to fig. 11, the OCA layer 105 may be between the encapsulation film layer 109 and the cover plate 110.
Referring to fig. 11, the display panel 10 may further include a second protective layer 111, and the second protective layer 111 may be located between a side of the substrate base plate 101 close to the flexible film layer 102 and the OCA layer 105 for protecting the substrate base plate 101. The second protective layer 111 may be made of polypropylene (PP) material.
Fig. 12 is a plan view of the display panel shown in fig. 11. As can be seen with reference to fig. 12, the display area 102a of the flexible film layer 102 may include a plurality of display sub-areas 102a1, and there may be a gap between each adjacent two display sub-areas 102a 1. Wherein each display sub-region 102a1 may have at least one sub-pixel 103. The piezoelectric sound-generating unit 104 may be located between two adjacent display sub-regions 102a1, and the orthographic projection of the piezoelectric sound-generating unit on the flexible film layer 102 does not overlap with any of the display sub-regions 102a 1. The sub-pixels 103 in the display sub-regions 102a1 are connected by the data lines 107, so that the overall display effect of the display device can be ensured.
Wherein, the piezoelectric sound generating unit 104 may be located at a side of the data line 107 close to the flexible film layer 102. Also, since the gap between every adjacent two of the display sub-regions 102a1 is small, normally, the piezoelectric sound emitting unit 104 is not disposed in the gap between the adjacent two of the display sub-regions 102a1, but disposed below the data line 107. That is, in fig. 12, the piezoelectric sound generating unit 104 is located below the data line 107 and is shielded by the data line 107.
To sum up, the embodiment of the present application provides a display panel, at least one piezoelectric sound generating unit that this display panel includes is located the display area of flexible rete, consequently can not occupy the peripheral region of display panel, and the area of the peripheral region of this display panel can be less, and display panel's screen accounts for than higher. Moreover, because a gap is formed between each piezoelectric sound generating unit and any sub-pixel, when the piezoelectric sound generating units vibrate in the cavity, the vibration waves generated by the piezoelectric sound generating units are prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is ensured.
Fig. 13 is a flowchart of a method for manufacturing a display panel according to an embodiment of the present application. As can be seen with reference to fig. 13, the method may include:
In the embodiment of the present application, the plurality of sub-pixels 103 and the at least one piezoelectric sound generating unit 104 may be both located in the display area of the flexible film layer 102, and each piezoelectric sound generating unit 104 may have a gap with any one of the sub-pixels. Therefore, when the piezoelectric sound generating unit 104 vibrates, the vibration waves generated by the piezoelectric sound generating unit 104 can be prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is good.
Alternatively, the substrate base plate 101 may have a cavity 101a, and the substrate base plate 101 may be a glass base plate.
And step 203, bonding one side of the flexible film layer, which is far away from the plurality of sub-pixels, with one side of the substrate base plate, which is provided with the cavity.
Wherein, the orthographic projection of each piezoelectric sound generating unit 104 on the flexible film layer 102 may at least partially overlap with the orthographic projection of the cavity 101a on the flexible film layer 102. Thus, the piezoelectric sound generating unit 104 can vibrate in the cavity 101a of the base substrate 101, and the problem that the display device cannot generate sound due to a small vibration space of the piezoelectric sound generating unit 104 is avoided.
In summary, the embodiments of the present application provide a method for manufacturing a display panel, where at least one piezoelectric sound generating unit in the display panel manufactured by the method is located in a display area of a flexible film layer, so that the display panel does not occupy a peripheral area of the display panel, the peripheral area of the display panel may be smaller, and a screen occupation ratio of the display panel is higher. Moreover, because a gap is formed between each piezoelectric sound generating unit and any sub-pixel, when the piezoelectric sound generating units vibrate in the cavity, the vibration waves generated by the piezoelectric sound generating units are prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is ensured.
Fig. 14 is a flowchart of another method for manufacturing a display panel according to an embodiment of the present disclosure. As can be seen with reference to fig. 14, the method may include:
Alternatively, the support substrate may be a glass substrate.
Alternatively, a coater (coater) may be used to apply a layer of flexible material on one side of the support substrate, resulting in the flexible membrane layer 102. Wherein, the flexible material of the flexible film 102 may be PI.
In the embodiment of the present application, referring to fig. 15, a magnetron sputtering (sputter) device may be used to form a metal layer on a layer of the flexible film layer 102 away from the support substrate a, and perform a patterning process on the metal layer to obtain at least one first electrode block 1041. Wherein the patterning process may include: photoresist coating, exposure, development, etching, photoresist stripping and the like.
And 304, sequentially forming a shielding film, a buffer film, an active layer, a gate insulating film, a gate layer and an interlayer dielectric film on one side of the flexible film layer away from the substrate.
In the embodiment of the present application, referring to fig. 16, the shielding film 1031a and the buffer film 1032a may be formed on the side of the flexible film layer 102 away from the substrate base plate 101 by using a Plasma Enhanced Chemical Vapor Deposition (PECVD) apparatus. Then, an active film may be formed on the side of the buffer film 1032a away from the flexible film layer 102 by using a PECVD apparatus, and the active film may be patterned to obtain the active layer 1033. Also, a gate insulating film 1034a may be formed on the side of the active layer 1033 away from the flexible film layer 102 using a PECVD apparatus. Then, a gate thin film may be formed on the side of the gate insulating film 1034a away from the flexible film layer 102 by using a sputter apparatus, and the gate thin film is patterned to obtain the gate layer 1035. Finally, an interlayer dielectric film 1036a may be formed in the gate layer 1035 on the side away from the flexible film layer 102 using PECVD equipment.
The shielding film 1031a, the buffer film 1032a, the gate insulating film 1034a and the interlayer dielectric film 1036a may be made of inorganic materials, and the gate layer 1035 may be made of metal materials.
It should be noted that the shielding film 1031a may be used to form a shielding layer 1031 in the sub-pixel 103, the buffer film 1032a may be used to form a buffer layer 1032 in the sub-pixel 103, the gate insulating film 1034a may be used to form a gate insulating layer 1034 in the sub-pixel 103, and the interlayer dielectric film 1036a may be used to form an interlayer dielectric layer 1036 in the sub-pixel 103.
In the embodiment of the present application, referring to fig. 17, an etchant may be used to etch the interlayer dielectric film 1036a, the gate insulating film 1034a, and the buffer film 1032a, so as to obtain the interlayer dielectric layer 1036, the gate insulating film 1034a, and the buffer layer 1032. Moreover, an orthographic projection of the interlayer dielectric layer 1036 on the flexible film layer 102 does not overlap with the orthographic projection of the at least one first electrode block 1041 formed in the step 303 on the flexible film layer 102. An orthographic projection of the gate insulating layer 1034 on the flexible film layer 102 does not overlap with the orthographic projection of the at least one first electrode block 1041 formed in the step 303 on the flexible film layer 102. The orthographic projection of the buffer layer 1032 on the flexible film layer 102 is not overlapped with the orthographic projection of the at least one first electrode block 1041 formed in the step 303 on the flexible film layer 102.
It should be noted that the interlayer dielectric layer 1036, the gate insulating layer 1034, and the buffer layer 1032 may be formed by the same etching process. Since the process of etching the film layer may affect other film layers, in order to ensure the quality of the first electrode block 1041, the shielding film 1031a on the side of the first electrode block 1041 away from the flexible film layer 102 may be retained. And the blocking film 1031a may be etched after the etching of the interlayer dielectric film 1036a, the gate insulating film 1034a, and the buffer film 1032a is completed.
And step 306, etching the shielding film to obtain a shielding layer.
In the embodiment of the present application, referring to fig. 18, the shielding film 1031a may be etched by using an etchant to obtain the shielding layer 1031. Moreover, the orthographic projection of the shielding layer 1031 on the flexible film layer 102 does not overlap with the orthographic projection of the at least one first electrode block 1041 formed in the step 303 on the flexible film layer 102. That is, after the shielding film 1031a is etched to obtain the shielding layer 1031, the first electrode block 1041 may be exposed.
And 307, forming a piezoelectric film layer on one side of the at least one first electrode block, which is far away from the flexible film layer.
Optionally, as an alternative implementation manner, a spin coating (spin coating) manner may be adopted to coat the piezoelectric material on the side of the at least one first electrode block 1041 away from the flexible film layer 102. Typically, the piezoelectric material may be in a liquid state, and may be, for example, PVDF and binary or ternary polymers thereof. Thereafter, in order to make the piezoelectric material solid, the piezoelectric material may be subjected to a curing process. Then, the piezoelectric material is crystallized (high-temperature treated), and is polarized under a high-voltage electric field, so that the piezoelectric material has certain piezoelectric performance. Finally, referring to fig. 19, the piezoelectric material on one side of the interlayer dielectric 1036 is etched away, resulting in a piezoelectric film layer 1042. A gap is formed between the obtained piezoelectric film 1042 and the interlayer dielectric 1036.
Alternatively, as another alternative implementation, a slit die coater (slit die coater) may be used to coat the piezoelectric material on the side of the at least one first electrode block 1041 away from the flexible film layer 102, and not coat the piezoelectric material in other areas. Thereafter, in order to make the piezoelectric material solid, the piezoelectric material may be subjected to a curing process. Then, the piezoelectric material is crystallized (high-temperature treated), and is polarized in a high-voltage electric field, so that the piezoelectric material has a certain piezoelectric property, and a piezoelectric film 1042 is obtained.
And 308, forming at least one second electrode block on one side of the piezoelectric film layer far away from the flexible film layer.
In this embodiment, referring to fig. 20, a sputter device may be used to form a metal layer on a side of the piezoelectric film 1042 away from the flexible film 102, and perform a patterning process on the metal layer to obtain at least one second electrode block 1043. The number of the obtained second electrode blocks 1043 may be the same as the number of the first electrode blocks 1041 obtained in step 303. And an orthographic projection of each second electrode block 1043 on the flexible film layer 102 may overlap with an orthographic projection of one first electrode block 1041 on the flexible film layer 102.
When the first electrode block 1041 and the second electrode block 1043 receive an audio driving signal (electrical signal) sent by an audio driving circuit, the piezoelectric film 1042 may convert the audio driving signal into a vibration signal based on a piezoelectric effect of a piezoelectric material, and the piezoelectric film 1042 may start to vibrate under the action of the vibration signal, so that the display panel vibrates, and the display device makes a sound.
Step 309 forms vias in the interlayer dielectric layer and the gate insulating layer.
In an embodiment of the present application, referring to fig. 21, an etching process may be used to form vias B in the interlayer dielectric layer 1036 and the gate insulating layer 1034, which may be used to connect the source 10371 and the drain 10372 of the sub-pixel 103 with the active layer 1033.
In the embodiment, referring to fig. 22, a coater may be used to form the first flat film 108a on the side of the at least one second electrode layer away from the flexible film layer 102. The orthographic projection of the first flat film 108a on the flexible film layer 102 is not overlapped with the orthographic projection of the interlayer dielectric layer 1036 on the flexible film layer 102.
Alternatively, the first flat film 108a may be made of a resin (resin) material.
And 311, forming a plurality of data lines on one side of the first flat film, which is far away from the flexible film layer, and forming a source electrode and a drain electrode on one side of the interlayer dielectric layer, which is far away from the flexible film layer.
In the embodiment of the present application, referring to fig. 23, a sputter apparatus may be used to form a metal layer on a side of the first flat film 108a away from the flexible film layer 102, and perform a patterning process on the metal layer, so as to obtain a plurality of data lines 107, a source electrode 10371, and a drain electrode 10372. That is, the data lines 107, the source electrode 10371, and the drain electrode 10372 can be formed by the same patterning process.
The orthographic projection of at least one data line 107 of the plurality of data lines 107 on the flexible film layer 102 may at least partially overlap with the orthographic projection of the piezoelectric film layer 1042 on the flexible film layer 102. Also, the source 10371 and the drain 10372 may be connected to the active layer 1033 through the via B formed in step 309.
And step 312, forming a second flat film on the sides of the plurality of data lines, the source electrodes and the drain electrodes, which are far away from the flexible film layer.
In the embodiment of the present application, referring to fig. 24, a second flat film 1038a may be formed on the side of the plurality of data lines 107, the source electrode 10371 and the drain electrode 10372 away from the flexible film layer 102 by using a coater. Here, the second flat film 1038a may be prepared from a resin material.
And 313, forming an anode layer on one side of the second flat film far away from the flexible film layer.
In the embodiment of the present application, referring to fig. 25, a Sputter apparatus may be used to form a metal layer on a side of the second flat film 1038a away from the flexible film layer 102, and perform a patterning process on the metal layer to obtain the anode layer 10310. The orthographic projection of the anode layer 10310 on the flexible film 102 is not overlapped with the orthographic projection of the piezoelectric film 1042 on the flexible film 102.
Alternatively, before the anode layer 10310 is formed, a via hole may be formed in the second flat film 1038a, and the anode layer 10310 may be connected to the source electrode 10371 through the via hole.
In the embodiment of the present application, referring to fig. 26, a Coating apparatus may be used to form a pixel defining film on a side of the anode layer 10310 away from the flexible film layer 102, and perform a patterning process on the pixel defining film to obtain a pixel defining layer 1039. Wherein, in the process of patterning the pixel defining film, an opening for defining a light emitting region may be formed in the pixel defining film. The opening may expose the anode layer 10310 formed in step 313.
In the embodiment of the present application, referring to fig. 27, the first and second planarization films 108a and 1038a may be etched by an ashing (ashing) process to obtain the first and second planarization layers 108 and 1038. Wherein, a gap is formed between an orthographic projection of the first flat layer 108 on the flexible film layer 102 and an orthographic projection of the interlayer dielectric layer 1036 on the flexible film layer 102. The obtained orthographic projection of the second flat layer 1038 on the flexible film layer 102 does not overlap with the gap between the piezoelectric film layer 1042 and the interlayer dielectric layer 1036.
And step 316, sequentially forming a light emitting layer and a cathode layer on one side of the anode layer far away from the flexible film layer.
In the embodiment of the present application, referring to fig. 28, an evaporation apparatus may be used to form a light emitting layer 10311 on a side of the anode layer 10310 away from the flexible film layer 102, and form a cathode layer 10312 on a side of the light emitting layer 10311 away from the anode layer 10310.
And 317, forming a packaging film layer on one side of the cathode layer far away from the flexible film layer.
Optionally, referring to fig. 29, a packaging film may be formed on the side of the cathode layer 10312 away from the flexible film layer 102 by using a Chemical Vapor Deposition (CVD) apparatus for a packaging film, and then the packaging film is subjected to a patterning process to obtain the packaging film 109. The orthographic projection of the encapsulation film 109 on the flexible film 102 does not overlap the gap between the piezoelectric film 1042 and the interlayer dielectric 1036.
In the embodiment of the present application, referring to fig. 30, the supporting substrate may be peeled off from the flexible film layer 102 by using a laser lift-off (LLO) method.
Alternatively, referring to fig. 30, OCA glue may be used to bond one side of the cover plate 110 to one side of the encapsulation film layer 109 away from the flexible film layer 102. That is, the optical glue layer 105 may be disposed between the cover plate 110 and the encapsulation film layer 109.
Alternatively, the base substrate may have a cavity, and the base substrate may be a glass substrate.
In the embodiment of the present application, an original substrate, which may be an original glass substrate (bareglass), may be obtained first, and a cavity 101a is formed on the original substrate by using a machining process, so as to obtain the substrate 101. Alternatively, the third protective layer may be formed at a partial region of one side of the original substrate after the original substrate is obtained. Then, an etchant is used to etch a region of the original substrate where the third protective layer is not formed to obtain a cavity 101 a. Finally, the third protective layer is peeled off from one surface of the original substrate, thereby obtaining the base substrate 101. Wherein the etchant may be hydrofluoric acid (HF).
And 321, bonding one side of the flexible film layer far away from the cover plate with one side of the substrate base plate with the cavity.
Wherein, referring to fig. 11, the orthographic projection of each piezoelectric sound generating unit 104 on the flexible film layer 102 may at least partially overlap with the orthographic projection of the cavity 101a on the flexible film layer 102. Thus, the piezoelectric sound generating unit 104 can vibrate in the cavity 101a of the base substrate 101, and the problem that the display device cannot generate sound due to a small vibration space of the piezoelectric sound generating unit 104 is avoided.
The sequence of the steps of the method for manufacturing a display panel provided in the embodiment of the present application may be appropriately adjusted, and the steps may be increased or decreased according to the circumstances. For example, step 319 may be performed before step 318, and step 312, step 317 and step 319 may be deleted as the case may be. Any method that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application is covered by the protection scope of the present application, and thus the detailed description thereof is omitted.
In summary, the embodiments of the present application provide a method for manufacturing a display panel, where at least one piezoelectric sound generating unit in the display panel manufactured by the method is located in a display area of a flexible film layer, so that the display panel does not occupy a peripheral area of the display panel, the peripheral area of the display panel may be smaller, and a screen occupation ratio of the display panel is higher. Moreover, because a gap is formed between each piezoelectric sound generating unit and any sub-pixel, when the piezoelectric sound generating units vibrate in the cavity, the vibration waves generated by the piezoelectric sound generating units are prevented from being transmitted to the sub-pixels in the display panel, and the display effect of the display device is ensured.
The embodiment of the present application further provides a display device, which can be an audio driving circuit, and the display panel 10 provided in the above embodiment. The audio driving circuit may be connected to the piezoelectric sound generating unit 104 in the display panel 10 for providing an audio driving signal to the piezoelectric sound generating unit 104. Wherein the audio driving signal may be an electrical signal. The piezoelectric sound generating unit 104 may vibrate when receiving the electrical signal sent by the audio driving circuit, thereby causing the display panel to vibrate, and further causing the display device to generate sound.
Optionally, the display device may further include: an audio conversion circuit. The audio conversion circuit may be connected to the audio driving circuit and the piezoelectric sound generating unit 104, respectively. Since the signal provided by the audio driving circuit is usually an audio signal, and the signal received by the piezoelectric sound generating unit 104 is an electrical signal, the audio converting circuit needs to be configured to convert the audio signal provided by the audio driving circuit into an electrical signal and send the electrical signal to the piezoelectric sound generating unit 104.
In the embodiment of the present application, the display device may be: liquid crystal panels, electronic paper, organic light-emitting diode (OLED) display devices, mobile phones, tablet computers, Televisions (TVs), monitors, notebook computers, digital photo frames, navigators and other products or components with display functions.
The above description is only exemplary of the present application and should not be taken as limiting, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. A display panel, comprising:
a base substrate having a cavity;
a flexible film layer located on one side of the substrate base plate, the flexible film layer having a display area;
and the plurality of sub-pixels and at least one piezoelectric sound generating unit are positioned in the display area, each piezoelectric sound generating unit is provided with a gap between the sub-pixels, and each piezoelectric sound generating unit is in the orthographic projection on the flexible film layer, and the cavity is in the orthographic projection on the flexible film layer at least partially overlapped.
2. The display panel according to claim 1, wherein each of the piezoelectric sound emitting units comprises: the flexible film layer is arranged on the substrate and comprises at least one first electrode block, a piezoelectric film layer and at least one second electrode block which are sequentially stacked along the direction far away from the flexible film layer;
the orthographic projection of the piezoelectric film layer on the flexible film layer covers the orthographic projection of the at least one first electrode block on the flexible film layer, and covers the orthographic projection of the at least one second electrode block on the flexible film layer.
3. The display panel according to claim 2, wherein each of the piezoelectric sound emitting units further comprises: a third electrode block and a connecting electrode;
the third electrode block and the first electrode block are arranged on the same layer and at intervals, one end of the connecting electrode is connected with the third electrode block, the other end of the connecting electrode is connected with the second electrode block, and the third electrode block is used for providing audio driving signals from an audio driving circuit for the second electrode block.
4. The display panel according to claim 1, characterized in that the display panel comprises: the piezoelectric sounding units are uniformly distributed on one side, far away from the substrate base plate, of the flexible film layer.
5. The display panel according to any one of claims 1 to 4, wherein the cavity is a groove located on a side of the substrate adjacent to the flexible film layer;
or, the cavity is a through hole.
6. The display panel according to any one of claims 1 to 4, characterized by further comprising: a reflective layer;
the reflecting layer is located on one side, far away from the flexible film layer, of the substrate base plate and used for reflecting sound waves generated by the piezoelectric sound generating unit.
7. The display panel according to any one of claims 1 to 4, characterized by further comprising: a plurality of data lines, each of the data lines being connected to a column of the sub-pixels;
the orthographic projection of at least one data line in the data lines on the flexible film layer is at least partially overlapped with the orthographic projection of the piezoelectric sound generating unit on the flexible film layer.
8. A method of manufacturing a display panel, the method comprising:
forming a plurality of sub-pixels and at least one piezoelectric sound generating unit on one side of a flexible film layer, wherein the sub-pixels and the at least one piezoelectric sound generating unit are located in a display area of the flexible film layer, and a gap is formed between each piezoelectric sound generating unit and any one sub-pixel;
providing a substrate base plate, wherein the substrate base plate is provided with a cavity;
and bonding one side, far away from the plurality of sub-pixels, of the flexible film layer with one side, provided with a cavity, of the substrate base plate, wherein the orthographic projection of each piezoelectric sound generating unit on the flexible film layer is at least partially overlapped with the orthographic projection of the cavity on the flexible film layer.
9. The manufacturing method according to claim 8, wherein before forming the plurality of sub-pixels on one side of the flexible film layer, and the at least one piezoelectric sound emitting unit, the method further comprises:
providing a support substrate;
forming the flexible film layer on one side of the support substrate;
after forming the plurality of sub-pixels on one side of the flexible film layer, and the at least one piezoelectric sound generating unit, the method further comprises:
and peeling the support substrate from the flexible film layer.
10. A display device, characterized in that the display device comprises: an audio driving circuit, and the display panel according to any one of claims 1 to 7;
the audio driving circuit is connected with the piezoelectric sound production unit in the display panel and used for providing an audio driving signal for the piezoelectric sound production unit.
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