CN111309314B - Configuration generation method and configuration generation system of cleaning equipment - Google Patents
Configuration generation method and configuration generation system of cleaning equipment Download PDFInfo
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- CN111309314B CN111309314B CN202010070324.8A CN202010070324A CN111309314B CN 111309314 B CN111309314 B CN 111309314B CN 202010070324 A CN202010070324 A CN 202010070324A CN 111309314 B CN111309314 B CN 111309314B
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Abstract
The invention provides a configuration generation method of cleaning equipment and a configuration generation system of the cleaning equipment, wherein the method comprises the following steps: acquiring industry category, slot category and total slot number input by a user terminal; determining a specific industry according to the industry category; determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots; determining at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name; acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by a user terminal; and generating a process configuration file based on the plurality of parameter information. The invention improves the universality of the configuration of the cleaning equipment.
Description
Technical Field
The present invention relates to the field of semiconductor manufacturing, and in particular, to a cleaning apparatus configuration method and a cleaning apparatus configuration generation system.
Background
Currently, groove type cleaning equipment is required for cleaning polycrystalline silicon battery pieces in the solar photovoltaic industry, cleaning particles on the surface of a wafer after each process in the semiconductor manufacturing industry and cleaning LED (Light Emitting Diode ) chips in the photoelectric industry. The tank structure of each industry has various types, and the different tank type cleaning devices have different types of tank structures due to different chemical liquid components. Further, because the types or the numbers of the groove structures forming the groove type cleaning equipment are different, the number of the mechanical arms among the groove structures is also different, and aiming at the groove type cleaning equipment in different industries, a software engineer is required to manually configure specific configuration files for different software of different groove type cleaning equipment in the prior art, so that the cost is higher, and the applicability is poor.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides a configuration generation method and a configuration generation system of cleaning equipment, so as to improve configuration efficiency and user experience.
To achieve the object of the present invention, there is provided a configuration generating method of a cleaning apparatus, the method comprising:
acquiring industry types, slot types and total slot numbers input by a user side;
determining a specific industry according to the industry type;
determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots;
determining at least one slot name corresponding to the slot type combination according to the slot type combination;
determining a slot structure file name according to the slot name;
acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by a user terminal;
and generating a process configuration file based on the plurality of parameter information.
Preferably, the industry categories include: solar photovoltaic industry, integrated circuit equipment, and photovoltaic industry.
Preferably, determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots specifically includes:
Determining a slot type combination according to the industry category, the slot type and the total number of slots input by the user terminal;
judging whether the slot type combination is matched with the slot type combination in a slot type combination table in a database;
if the judging result is that the file names are matched, determining the file names corresponding to the specific industry slot type combinations;
if the judgment result is not matched, the new slot type combination is added into a slot type combination table.
Preferably, the determining unit is configured to determine at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name, which specifically comprises:
sending a confirmation request whether to select the existing slot structure file name from a pre-stored slot type combination and name table to a user terminal, and if the feedback result is yes, determining the slot structure file name;
acquiring the corresponding slot name according to the slot structure file name, and acquiring at least one slot structure corresponding to the slot name by the slot name;
and obtaining a groove structure graph corresponding to the groove structure from a preset different groove type graph library according to the groove structure, and displaying the groove structure graph on an interface of the user terminal.
Preferably, the groove structure pattern includes: a slot graphical interface, a slot parameter interface, and a process parameter interface;
the parameter information includes: the groove parameters and the process parameters of each groove structure;
the method for obtaining the groove structure graph corresponding to the groove structure from a preset different groove type gallery according to the groove structure, and displaying the groove structure graph on the interface of the user terminal specifically comprises the following steps:
displaying buttons of each slot structure corresponding to the slot structure file on the interface of the user side;
acquiring first click information of a button of the groove structure;
controlling the user side to form a specific groove graphical interface according to the groove type gallery according to the first click information;
displaying a groove parameter button and a process parameter button on the specific groove graphical interface;
judging whether second click information of the groove parameter button of the motor exists or not; if yes, forming at least one slot parameter interface on the specific slot graphical interface according to the second click information, so that a user inputs the numerical value of the slot parameter through the slot parameter interface;
if not, judging whether third click information for clicking the process parameter button exists; if so, at least one technological parameter interface is formed on the specific groove graphical interface according to the third click information, so that a user inputs the numerical value of the technological parameter through the technological parameter interface.
Preferably, the slot type gallery includes: chemical tank gallery, sink gallery, hand sink gallery, quick drain gallery, slow pull gallery, or spin-dry gallery.
Preferably, the controlling the user side to form a specific slot graphical interface according to the slot type gallery according to the first click information specifically includes:
judging whether the tank structure clicked by the user is one of a chemical tank gallery, a water tank gallery, a hand washing tank gallery, a quick-discharge tank gallery, a slow-lifting tank gallery or a spin-drying tank gallery one by one;
if the judgment result is yes, generating a groove graphic interface related to the groove structure clicked by the user according to the click result of the user and a preset chemical liquid groove table, a water groove table, a hand washing groove table, a quick discharging groove table, a slow pulling groove table and a spin-drying groove table, and displaying the groove graphic interface on the interface of the user side;
and obtaining a groove graphical interface which is input by a user terminal and forms all groove structures clicked by the user according to the sequence of cleaning the silicon wafer.
Preferably, the method further comprises:
acquiring manipulator type information which is input or selected by a user side and corresponds to the groove structure;
displaying a slot teaching position parameter and performance parameter interface corresponding to the slot structure on the interface of the user side according to the manipulator type information;
And acquiring a groove structure covered by the manipulator, a numerical value of a position parameter of the manipulator and a numerical value of a performance parameter of the manipulator, which are input or selected by a user through the groove teaching position parameter and performance parameter interface, so as to generate a process configuration file based on the plurality of parameter information, the groove structure covered by the manipulator, the numerical value of the position parameter of the manipulator and the numerical value of the performance parameter of the manipulator.
Preferably, after the obtaining the slot structure covered by the manipulator, the numerical value of the manipulator position parameter, and the numerical value of the manipulator performance parameter, which are input or selected by the user through the slot teaching position parameter and performance parameter interface, the method further includes:
acquiring shared slot and adjacent slot isolation door information covered by a manipulator input or selected by a user;
and generating a process configuration file based on the plurality of parameter information, the groove structure covered by the manipulator, the numerical value of the manipulator position parameter, the numerical value of the manipulator performance parameter, the shared groove covered by the manipulator and the adjacent groove isolation door information.
A configuration generation system of a cleaning apparatus, the configuration generation system comprising:
the first acquisition module is used for acquiring industry types, slot types and total slot numbers input by the user side;
The first determining module is used for determining a specific industry according to the industry category;
the second determining module is used for determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots;
a third determining module, configured to determine at least one slot name corresponding to the slot type combination according to the slot type combination;
a fourth determining module, configured to determine a slot structure file name according to the slot name;
the second acquisition module is used for acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by a user terminal;
and the generating module is used for generating a process configuration file based on the plurality of parameter information.
The invention has the following beneficial effects:
the configuration generation method and the configuration generation system of the cleaning equipment provided by the invention acquire the industry category, the groove type and the total number of grooves input by a user side; determining a specific industry according to the industry category; determining a slot type combination related to a specific industry according to the industry category, the slot type and the total number of slots; determining at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name; acquiring a plurality of parameter information corresponding to a slot name and a slot structure file name input by a user terminal; based on the plurality of parameter information, a process configuration file is generated, so that the process configuration file of the cleaning equipment can be automatically generated by the industry category, the groove type, the total number of the grooves and the plurality of parameter information corresponding to the names of the grooves and the file names of the groove structure, which are input by the user side, thereby saving equipment configuration time and cost; because the process configuration file can be aimed at different industry types, the invention can be applied to cleaning equipment in various industries, and the configuration universality of the cleaning equipment is improved.
Drawings
Fig. 1 is a flowchart of a configuration generating method of a cleaning apparatus according to an embodiment of the present invention;
FIG. 2 is a flow chart of determining a slot type combination associated with a particular industry based on industry category, slot type, and total number of slots in accordance with one embodiment of the present invention;
FIG. 3 is a diagram of determining at least one slot name corresponding to a slot type combination based on the slot type combination in one embodiment of the invention; determining a flow chart of a file name of a slot structure according to the slot name;
fig. 4 is a flowchart of obtaining a slot structure pattern corresponding to a slot structure from a preset library of different slot types according to the slot structure, and displaying the slot structure pattern on an interface of a user terminal according to an embodiment of the present invention.
FIG. 5 is a flowchart of a method for generating a configuration of a cleaning apparatus according to another embodiment of the present invention;
FIG. 6 is a flowchart of a configuration generation method of a cleaning apparatus according to still another embodiment of the present invention;
fig. 7 is a schematic structural diagram of a configuration generating system of a cleaning apparatus according to an embodiment of the present invention.
Detailed Description
In order to enable those skilled in the art to better understand the technical scheme of the present invention, the configuration generating method of the cleaning device and the configuration generating system of the cleaning device provided by the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 1, a flowchart of a configuration generating method of a cleaning device according to an embodiment of the present invention is provided, where in the embodiment of the present invention, the configuration generating method of the cleaning device includes:
step 101: and acquiring industry types, slot types and total slot numbers input by the user side.
Step 102: and determining a specific industry according to the industry category.
Specifically, industry categories include: the solar photovoltaic industry, integrated circuit equipment, and the photovoltaic industry, with a particular industry being one of the industry categories.
Step 103: and determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots.
Step 104: and determining at least one slot name corresponding to the slot type combination according to the slot type combination.
Step 105: and determining a file name of the slot structure according to the slot name.
Step 106: and acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by the user terminal.
Step 107: a process profile is generated based on the plurality of parameter information.
The configuration generation method of the cleaning equipment provided by the embodiment of the invention obtains the industry category, the groove type and the total number of grooves which are input by a user side; determining a specific industry according to the industry category; determining a slot type combination related to a specific industry according to the industry category, the slot type and the total number of slots; determining at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name; acquiring a plurality of parameter information corresponding to a slot name and a slot structure file name input by a user terminal; a process profile is generated based on the plurality of parameter information. Therefore, the process configuration file of the cleaning equipment can be automatically generated by the industry category, the groove type, the total number of the grooves and a plurality of parameters corresponding to the names of the grooves and the file names of the groove structures, which are input by the user side, so that the equipment configuration time and the cost are saved; because the process configuration file can be aimed at different industry types, the invention can be applied to cleaning equipment in various industries, and the configuration universality of the cleaning equipment is improved.
Referring to fig. 2, in an embodiment of the present invention, a flowchart of determining a slot type combination related to a specific industry according to an industry category, a slot type and a total number of slots is shown, where determining a slot type combination related to a specific industry according to an industry category, a slot type and a total number of slots includes:
step 1031: and determining a slot type combination according to the industry category, the slot category and the total number of slots input by the user terminal.
Step 1032: judging whether the slot type combination is matched with the slot type combination in the slot type combination table in the database; if the judging result is matching, executing step 1033; if the determination is not matched, step 1034 is performed.
Specifically, the slot type combination is embodied in a database connected with the server as a slot type combination table, and the slot type combination table in the database is at least used for representing the association relationship among the file name, industry category, slot structure file name, slot type and number of slot types corresponding to the slot type combination, and the slot type combination table is shown in the following table 1.
TABLE 1
Six types of the tank types in the tank type combination in the table 1 are respectively a chemical tank, a water tank, a hand washing tank, a quick discharging tank, a slow lifting tank and a spin-drying tank. Determining a slot type combination according to the industry category, the slot type and the total number of slots, as in table 1, the integrated circuit equipment industry, wherein the slot type combination comprises: chemistry cistern, basin, quick row's groove and spin-drying groove, the total number of groove is 5, then obtains that the file name that the combination of groove type corresponds is semi2tank type xml, and the groove structure file name is: semiprstrip strand struct. For example, the industry type of a tank-type cleaning equipment process is the photoelectric industry, the tank type combination is a chemical tank, a quick-discharge tank, a spin-drying tank and a hand-washing tank, and the number of the tank types is 2 chemical tanks, 1 hand-washing tank, 2 quick-discharge tanks and 1 spin-drying tank respectively.
Step 1033: and determining the file name corresponding to the specific industry slot combination.
Specifically, the file corresponding to the slot combinations in the specific industry is the file name of the slot type combination in table 1.
Step 1034: the new slot type combination is added to the slot type combination table.
Specifically, the new slot type combination refers to a slot type combination which is not recorded in the slot type combination table and is determined according to industry types, slot types and total number of slots input by a user side.
It should be noted that, when adding a slot type combination in the slot type combination table, a file name corresponding to the slot type combination may also be added in the slot type combination table, where one slot type combination in the slot type combination table corresponds to one slot type combination file name, and one slot type combination corresponds to a plurality of slot structure file names, and after obtaining the slot type combination file name, the association relationship between the slot type combination and the slot name may be obtained correspondingly from the slot type combination and the name table.
In the method for determining the slot type combination according to the industry category, the slot type and the total number of the slots in the embodiment of the invention, whether the slot type combination is matched with the slot type combination in the slot type combination table in the data is judged, the file name corresponding to the slot type combination in the specific industry is obtained, and when the file name is not matched, the new slot type combination is added into the slot type combination table.
Referring to FIG. 3, in one embodiment of the present invention, at least one slot name corresponding to a slot type combination is determined according to the slot type combination; determining a flow chart of a file name of a slot structure according to the slot names, in this embodiment, determining at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name includes:
step 1041: and sending a confirmation request for judging whether the existing slot structure file name is selected from the pre-stored slot type combination and name table to the user side.
Specifically, the slot type combination and name table is embodied in a database connected to the server as a relationship among a slot type combination file name, a slot type combination, a slot name, and a slot structure file name.
Specifically, after the file names corresponding to the groove type combinations in the specific industry are obtained through the table 1, the existing groove structure file names are determined.
Step 1042: after receiving feedback from the user terminal, judging whether the feedback result is yes; if yes, go to step 1043.
Step 1043: the slot structure file name is determined.
Step 1044: and obtaining a corresponding slot name according to the slot structure file name, and obtaining at least one slot structure corresponding to the slot name by the slot name.
Specifically, a slot name corresponding to a slot structure file name may be obtained from a slot type combination and name table, where each slot name corresponds to at least one slot structure. The slot type combinations and name tables are shown in table 2.
TABLE 2
In table 2, corresponding file names semi2tanktype. Xml are combined by slot types to obtain corresponding slot structure file names semiprstriptanktruct. Xml, and slot names SC2, SC2 are determined according to the slot structure file names; DIW1; QDR1; a DRYER; the slot names correspond to 5 slot structures, which are respectively: SC2, DIW1, QDR1, DRYER. The tank structures of the different tank types are different, wherein the tank structure of the chemical tank is identified as T, cu, si, BC, ACE, SC, HFM, BOE due to the different chemical liquids in the chemical tank; the tank structure of the water tank is marked as DIW; the groove structure of the hand washing groove is marked as CCW; the groove structure of the quick-drain groove is marked as QDR; the groove structure of the slow pulling groove is marked as SLF; the trough structure of the spin-drying trough is identified as DRY or DRYER. The tank structure with the same structural parameters is named the same, for example, a cleaning device comprises three copper chemical tanks, and when the structural parameters of the three copper chemical tanks are the same, the three copper chemical tanks can be marked as Cu1, cu1 and Cu1; when the three copper chemistry baths differ in structural parameters, they can be identified as Cu1, cu2, cu3. Further, the structural parameters are the contents of the header shown in the chemical tank table, and as shown in table 3, the structural parameters of the chemical tank include: chemical liquid 1 name, chemical liquid 2 name, ratio between various chemical liquids, number of tank for replenishing, tank for replenishing name, whether there is a tank for preparation, whether there is temperature control, whether there is ultrasound, whether there is megasonic, whether there is a tank cover, whether there is automatic replenishing, chemical liquid ratio constraint check, number of tank levels, whether there is an auxiliary tank, etc.
Step 1045: and obtaining groove structure graphs corresponding to the groove structures from a preset different groove type drawing library according to the groove structures, and displaying the groove structure graphs on an interface of a user side.
Specifically, the slot type gallery includes: chemical tank gallery, sink gallery, hand sink gallery, quick drain gallery, slow pull gallery, or spin-dry gallery. The groove structure patterns in the different groove type drawing libraries can be extracted for different groove types and groove structures. Further, the chemical liquid tank diagram library is provided with five pipeline diagrams, a liquid supplementing tank diagram, a pre-preparation tank diagram and 1 or 3 or 5 liquid diagrams. The water tank gallery is provided with a water tank pattern, an upper water injection pipeline, a lower water injection pipeline, an overflow pipeline and 1, 3 or 5 liquid level maps. The hand sink diagram warehouse is provided with a hand sink diagram, an upper water injection pipeline, an overflow pipeline and a hand sink diagram with a trough cover. The fast-drainage tank diagram library is provided with a fast-drainage tank diagram, an upper water injection pipeline, a nitrogen pipeline, an upper spray pipeline, a circulating pipeline, a lower water injection pipeline, a temperature controller diagram and a tank cover rectangle diagram. The slow-pulling trough chart library is provided with a lower water injection pipeline, a nitrogen blowing pipeline, an overflow pipeline and a trough cover rectangle chart. The spin-drying groove chart library is provided with an IAP (Iso-Propyl Alcohol) pipeline chart, a nitrogen pipeline chart, a temperature controller chart, a circulating pipeline chart and a groove cover rectangular chart, and a silicon wafer size character chart.
Specifically, the groove structure pattern includes: a slot graphical interface, a slot parameter interface, and a process parameter interface.
Specifically, the parameter information includes: the slot parameters and process parameters of each slot structure.
As shown in fig. 4, in an embodiment of the present invention, a flowchart of a slot structure diagram corresponding to a slot structure is obtained from a preset library of different slot types according to the slot structure, and is displayed on an interface of a user side, that is, step 1044 may further include the following substeps:
step 10441: and displaying buttons of each groove structure corresponding to the groove structure file on the interface of the user side.
Step 10442: first click information for a button of a slot structure is acquired.
Step 10443: and controlling the user side to form a specific slot graphical interface according to the slot type gallery according to the first click information.
Further, step 10443 specifically includes:
judging whether the tank structure clicked by the user is one of a chemical tank gallery, a water tank gallery, a hand washing tank gallery, a quick-drain tank gallery, a slow-lifting tank gallery or a spin-drying tank gallery one by one; if the judgment result is yes, generating a groove graphical interface associated with the groove structure clicked by the user according to the click result of the user and a preset chemical liquid groove table, a water groove table, a hand washing groove table, a quick discharging groove table, a slow pulling groove table and a spin drying groove table, and displaying the groove graphical interface on the interface of the user side; and acquiring the related groove graphic interfaces which are input by the user terminal and form all the groove structures clicked by the user according to the cleaning silicon wafer sequence.
It should be noted that, the buttons of the slot structure clicked by the user correspond to the slot structure and the slot type gallery respectively, and when the user clicks the buttons of different slot structures, the server can determine the slot structure clicked by the current user, and further, can also determine the slot type gallery corresponding to the current slot structure. For example, when the user clicks a button of the chemical tank structure, the server obtains a tank structure pattern corresponding to the chemical tank table from the chemical tank gallery according to the chemical tank table. Further, having different kinds of slot structures in a slot type combination of the cleaning apparatus, in order to form a slot profile of the cleaning apparatus, it is necessary to form an associated slot graphical interface of all slot structures of the cleaning apparatus to visualize the display of the cleaning apparatus.
Specifically, the preset chemical liquid tank table, the water tank table, the hand washing tank table, the quick discharging tank table, the slow lifting tank table and the spin-drying tank table are respectively shown in tables 3 to 8. Tables 3 to 8 are used to show the relationship between the structure and the structural parameters, for example, in table 3, there are two chemical tanks ACE1 and SC1, and the structural parameters of the chemical tanks include: chemical liquid 1 name, chemical liquid 2 name, ratio between various chemical liquids, number of tank for replenishing, tank for replenishing name, whether there is a tank for preparation, whether there is temperature control, whether there is ultrasound, whether there is megasonic, whether there is a tank cover, whether there is automatic replenishing, chemical liquid ratio constraint check, number of tank levels, whether there is an auxiliary tank, etc. In table 4, there are three water tanks DIW1, DIW2, DIW3, and the structural parameters of the water tanks include: whether to fill water up, whether to fill water down, whether to overflow, the number of tank levels, and whether to have a tank cover. In Table 5, there are three hand sink CCW1, CCW2, CCW3, and the structural parameters of the hand sink include: whether water is injected, whether overflow is carried out and whether a groove cover is arranged. In table 6, there are two quick drain grooves QDR1, QDR2, and the structural parameters of the quick drain grooves include: whether water is added, whether nitrogen is added, whether spraying is performed, whether circulation is performed, whether water is injected downwards, whether temperature control is performed, and whether a groove cover is provided. In table 7, there are three slow pull grooves SLF1, SLF2, SLF3, and the structural parameters of the slow pull grooves include: whether to inject water, whether to drum nitrogen, whether to overflow, and whether to have a trough cover. In table 8, there are three spin-drying tanks DRY1, DRY2, DRY3, and the structural parameters of the spin-drying tanks include: whether IPA was added, whether nitrogen was added, whether there was temperature control, whether there was circulation, wafer size, and whether there was a slot cover.
TABLE 3 Table 3
TABLE 4 Table 4
TABLE 5
TABLE 6
TABLE 7
TABLE 8
Step 10444: a slot parameter button and a process parameter button are displayed on a particular slot graphical interface.
Step 10445: judging whether second click information for clicking the groove parameter button exists or not; if yes, go to step 10446; if not, go to step 10447.
Step 10446: and forming at least one slot parameter interface on the specific slot graphical interface according to the second click information, so that the user inputs the numerical value of the slot parameter through the slot parameter interface, and executing step 10447.
Specifically, the tank parameters refer to physical parameter values represented by tank structures belonging to different tank type combinations, for example, the tank parameters of the chemical tank comprise three types of chemical, temperature and mechanical parameters. Chemical parameters, temperature parameters and mechanical parameters can be formed according to the structural properties and technical characteristics of each tank of a specific cleaning device. The temperature chemical parameters comprise characteristic parameters of the tank chemical liquid, control signal parameters of a tank temperature controller, upper and lower limit parameters of temperature alarm and the like, such as life cycle values of the tank chemical liquid and maximum and minimum overtemperature alarm values. Further, the chemical parameters are set according to chemical properties of the chemical liquid in the tank, such as life cycle value of the chemical liquid in the tank, validity period of the chemical liquid and PH value of the chemical liquid; the temperature parameters are as follows: and the control signal parameter of the groove temperature controller, such as the control signal parameter value of the temperature controller, and the maximum and minimum overtemperature alarm value. The mechanical parameters include time associated with the mechanical action of the slot cover, such as slot cover opening and closing times.
Step 10447: judging whether third click information for clicking the process parameter button exists or not; if yes, go to step 10448; if not, go to step 10449.
Step 10448: according to the third click information, at least one process parameter interface is formed on the specific slot graphical interface, so that the user inputs the numerical value of the process parameter through the process parameter interface, and step 10449 is performed.
In particular, the same type of tank may have different process parameters due to different specific process requirements, including parameter items, types, units, maxima, minima, defaults, associated control information. Each slot type has the parameters, steps and time required to complete the slot process according to the equipment process specifications.
Step 10449: and (5) ending.
In the method for acquiring the slot structure graph and displaying the slot structure graph on the interface of the user side provided by the embodiment, firstly, the buttons of the slot structure are displayed, and after the user clicks the buttons of the slot structure, a specific slot graphical interface is formed, so that the user can combine the slot structures in different slot type combinations on the specific slot graphical interface; secondly, displaying a groove parameter button and a process parameter button on a specific groove graphical interface, and after a user clicks the groove parameter button, forming a groove parameter interface, so that the user can conveniently input the numerical value of the groove parameter corresponding to the groove structure aiming at the current groove structure; after clicking the technological parameter button, a technological parameter interface is formed, so that the user can input the numerical value of the technological parameter corresponding to the current groove structure.
Fig. 5 is a flowchart of a configuration generating method of a cleaning device according to another embodiment of the present invention, where in the embodiment of the present invention, the configuration generating method of the cleaning device includes:
step 201: and acquiring industry types, slot types and total slot numbers input by the user side.
Step 202: and determining a specific industry according to the industry category.
Step 203: and determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots.
Step 204: and sending a confirmation request whether to select the existing slot structure file name from a pre-stored slot type combination and name table to the user terminal, and if the feedback result is yes, determining the slot structure file name.
Step 205: and acquiring the corresponding slot name according to the slot structure file name, and acquiring at least one slot structure corresponding to the slot name by the slot name.
Step 206: and obtaining a groove structure graph corresponding to the groove structure from a preset different groove type graph library according to the groove structure, and displaying the groove structure graph on an interface of the user terminal.
Step 207: and acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by the user terminal.
Step 208: and acquiring manipulator type information which is input or selected by a user end and corresponds to the groove structure.
Specifically, according to the specific structural characteristic manipulator type information of the manipulator of the specific cleaning equipment, the manipulator is divided into a single manipulator and a double manipulator, and the double manipulator is divided into a manipulator for grabbing and cleaning a silicon wafer basket and a manipulator for grabbing and cleaning the silicon wafer basket to be cleaned.
Step 209: and displaying a slot teaching position parameter and performance parameter interface corresponding to the slot structure on the interface of the user side according to the manipulator type information.
Specifically, according to the hardware layout of the cleaning equipment and the number of the manipulators, the size and the size of the basket grabbed by the manipulator are set, and the teaching position parameters of the manipulator are dynamically generated from each manipulator to the position right above each groove, the bottom, the center, the left-right offset and the origin of the specific cleaning equipment. And setting the manipulator performance parameters according to the capacity requirement of the specific cleaning equipment, and determining the speed, acceleration and deceleration dynamic configuration of the travel of each manipulator to the served groove to generate the manipulator performance parameters.
As shown in table 9, the teaching parameters of the Robot1 corresponding to the chemical tank ACE1 include: the manipulator is arranged at a position right above the tank (horizontal), the manipulator descends to a lowest position at the bottom of the tank (vertical), the manipulator grabs a flower basket to be immersed in the liquid level of the tank (vertical), the manipulator grabs a maximum-size bearing silicon wafer flower basket to descend to the lowest position at the bottom of the tank (vertical), the manipulator flower basket enters a center point position of the tank (vertical), the manipulator flower basket enters a maximum left-right offset position in the tank (vertical), the manipulator grabs a highest position of the flower basket in the tank in an up-down operation manner, the manipulator grabs the flower basket in the lowest position in the up-down operation manner in the tank (vertical), an X-axis origin position of the manipulator and an Y-axis origin position of the manipulator; the corresponding values of the teaching parameters are respectively: 7000. 4000000, 3000000, 5000000, 7000000, 6500000, 2500000, 0.
TABLE 9
Table 10
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As shown in table 10, the performance parameters of the Robot1 include: the method comprises the steps that a manipulator horizontally moves from other tanks to a target tank travel speed right above the tank, the manipulator horizontally moves from a source tank to other tank travels right above the tank, an empty manipulator vertically descends from right above the tank to a tank bottom travel, a horizontal travel of the empty manipulator from a tank bottom center position to an offset position, a travel of a carrying manipulator from a tank bottom to a tank liquid level position, a travel of the carrying manipulator from the tank liquid level position to right above the tank, a travel of the carrying manipulator vertically descends from right above the tank to the tank liquid level position, a travel of the carrying manipulator from the tank liquid level to the tank bottom position, a travel of the empty manipulator from the tank bottom position to right above the tank, a travel of the manipulator from a bottom stirring position to a top stirring position, a travel of the manipulator from a top stirring position to a bottom stirring position, and a travel of the manipulator from a tank bottom cleaning position to right above the tank; the corresponding values of the performance parameters are respectively: 1000. 500, 300, 100, 120, 200, 120, 100, 250, 190, 200.
Step 210: and acquiring a groove structure covered by the manipulator, a numerical value of the manipulator position parameter and a numerical value of the manipulator performance parameter which are input or selected by a user through a groove teaching position parameter and performance parameter interface.
Step 211: and generating a process configuration file based on the plurality of parameter information, the groove structure covered by the manipulator, the numerical value of the manipulator position parameter and the numerical value of the manipulator performance parameter.
According to the configuration generation method of the cleaning equipment, after the plurality of parameter information corresponding to the groove names and the groove structure file names and input by the user side are obtained, the manipulator type information corresponding to the groove structures and input or selected by the user side is obtained, the groove teaching position parameter and performance parameter interface is displayed on the interface of the user side according to the manipulator type information, the groove structures covered by the manipulator, the numerical value of the manipulator position parameter and the numerical value of the manipulator performance parameter and input or selected by the user through the groove teaching position parameter and performance parameter interface are obtained, and the process configuration file is generated.
Fig. 6 is a flowchart of a configuration generating method of a cleaning device according to still another embodiment of the present invention, where in the embodiment of the present invention, the configuration generating method of the cleaning device includes:
Step 301: and acquiring industry types, slot types and total slot numbers input by the user side.
Step 302: and determining a specific industry according to the industry category.
Step 303: and determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots.
Step 304: and sending a confirmation request whether to select the existing slot structure file name from a pre-stored slot type combination and name table to the user terminal, and if the feedback result is yes, determining the slot structure file name.
Step 305: and acquiring the corresponding slot name according to the slot structure file name, and acquiring at least one slot structure corresponding to the slot name by the slot name.
Step 306: and obtaining a groove structure graph corresponding to the groove structure from a preset different groove type graph library according to the groove structure, and displaying the groove structure graph on an interface of the user terminal.
Step 307: and acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by the user terminal.
Step 308: and acquiring manipulator type information which is input or selected by a user end and corresponds to the groove structure.
Step 309: and displaying a slot teaching position parameter and performance parameter interface corresponding to the slot structure on the interface of the user side according to the manipulator type information.
Step 310: and acquiring a groove structure covered by the manipulator, a numerical value of the manipulator position parameter and a numerical value of the manipulator performance parameter which are input or selected by a user through a groove teaching position parameter and performance parameter interface.
Step 311: and acquiring the shared slot and adjacent slot isolation door information covered by the manipulator input or selected by the user side.
Specifically, before generating the process configuration file, the manipulator names and the slot structure names are organized in sequence to form a shared slot covered by the manipulator. And adding isolation gate names according to the sequential slot structure names to form adjacent slot isolation gate information.
Step 312: and generating a process configuration file based on the plurality of parameter information, the groove structure covered by the manipulator, the numerical value of the manipulator position parameter, the numerical value of the manipulator performance parameter, the shared groove covered by the manipulator and the adjacent groove isolation door information.
The configuration generation method of the cleaning equipment provided by the invention can generate each type of groove structure process parameter configuration item aiming at groove parameter configuration and groove structure file content generated by groove cleaning equipment in different industries. The corresponding slot structure of each slot type has a slot process parameter configuration. All six types of groove structure process parameter configuration items are combined to generate all groove structure process parameter configurations of six types of grooves, and constraint checking can be performed before the file is formed. And (3) selecting one or more process parameter configuration items to set corresponding values according to the process requirements of specific equipment, and generating process parameter files of different process cleaning equipment tanks in different industries. Simultaneously, different process steps and different parameters and parameter values are set for each groove cleaning process, so that the purposes of different cleaning processes are achieved. Is suitable for equipment of various cleaning processes in different industries.
The configuration generation method of the cleaning equipment further comprises the steps of obtaining the shared slot and adjacent slot isolation door information covered by the manipulator and input or selected by a user, and generating a process configuration file based on the shared slot and the adjacent slot isolation door information, so that comprehensive information support is provided for the configuration of the cleaning equipment, and the comprehensiveness of the information configuration of the cleaning equipment is guaranteed.
In view of the foregoing configuration generation method of the cleaning device, the present invention further provides a configuration generation system of the cleaning device, as shown in fig. 7, which is a schematic structural diagram of the configuration generation system of the cleaning device provided in the embodiment of the present invention, where in the embodiment of the present invention, the configuration generation system of the cleaning device includes: a first acquisition module 1, a first determination module 2, a second determination module 3, a third determination module 4, a fourth determination module 5, a second acquisition module 6, and a generation module 7, wherein,
the first obtaining module 1 is used for obtaining industry types, slot types and total slot numbers input by a user side.
The first determining module 2 is configured to determine a specific industry according to the industry category.
The second determining module 3 is configured to determine a slot type combination related to a specific industry according to the industry category, the slot type and the total number of slots.
The third determining module 4 is configured to determine at least one slot name corresponding to the slot type combination according to the slot type combination.
The fourth determining module 5 is configured to determine a slot structure file name according to the slot name.
The second obtaining module 6 is configured to obtain a plurality of parameter information corresponding to the slot name and the slot structure file name, which are input by the user terminal.
The generating module 7 is configured to generate a process configuration file based on the plurality of parameter information.
The configuration generation system of the cleaning equipment acquires industry types, groove types and total groove numbers input by a user side; determining a specific industry according to the industry category; determining a slot type combination related to a specific industry according to the industry category, the slot category and the total number of slots; determining at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name; acquiring a plurality of parameter information corresponding to a slot name and a slot structure file name input by a user terminal; a process profile is generated based on the plurality of parameter information. Therefore, the process configuration file of the cleaning equipment can be automatically generated by the industry category, the groove type, the total number of the grooves and a plurality of parameter information corresponding to the names of the grooves and the file names of the groove structures, which are input by the user side, so that the equipment configuration time and the cost are saved; because the process configuration file can be aimed at different industry types, the invention can be applied to cleaning equipment in various industries, and the configuration universality of the cleaning equipment is improved.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (8)
1. A method of generating a configuration of a cleaning apparatus, the method comprising:
acquiring industry types, slot types and total slot numbers input by a user side;
determining a specific industry according to the industry category;
determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots;
determining at least one slot name corresponding to the slot type combination according to the slot type combination;
determining a slot structure file name according to the slot name;
acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by a user terminal;
generating a process configuration file based on the plurality of parameter information;
wherein, according to the industry category, the groove type and the total number of the grooves, determining a groove type combination related to the specific industry specifically comprises:
Determining a slot type combination according to the industry category, the slot type and the total number of slots input by the user terminal;
judging whether the slot type combination is matched with the slot type combination in a slot type combination table in a database;
if the judging result is that the file names are matched, determining the file names corresponding to the specific industry slot type combinations;
if the judgment result is that the combination is not matched, the combination of the groove types is used as a new combination of the groove types to be added into a combination table of the groove types;
determining at least one slot name corresponding to the slot type combination according to the slot type combination; determining a slot structure file name according to the slot name, which specifically comprises:
sending a confirmation request whether to select the existing slot structure file name from a pre-stored slot type combination and name table to a user terminal, and if the feedback result is yes, determining the slot structure file name;
acquiring the corresponding slot name according to the slot structure file name, and acquiring at least one slot structure corresponding to the slot name by the slot name;
and obtaining a groove structure graph corresponding to the groove structure from a preset different groove type graph library according to the groove structure, and displaying the groove structure graph on an interface of the user terminal.
2. The method of generating a configuration of a cleaning apparatus of claim 1, wherein the industry category comprises: solar photovoltaic industry, integrated circuit equipment, and photovoltaic industry.
3. The configuration generation method of a cleaning apparatus according to claim 1, wherein the groove structure pattern includes: a slot graphical interface, a slot parameter interface, and a process parameter interface;
the parameter information includes: the groove parameters and the process parameters of each groove structure;
the method for obtaining the groove structure graph corresponding to the groove structure from a preset different groove type gallery according to the groove structure, and displaying the groove structure graph on the interface of the user terminal specifically comprises the following steps:
displaying buttons of each slot structure corresponding to the slot structure file on the interface of the user side;
acquiring first click information of a button of the groove structure;
controlling the user side to form a specific groove graphical interface according to the groove type gallery according to the first click information;
displaying a groove parameter button and a process parameter button on the specific groove graphical interface;
judging whether second click information for clicking the groove parameter button exists or not; if yes, forming at least one slot parameter interface on the specific slot graphical interface according to the second click information, so that a user inputs the numerical value of the slot parameter through the slot parameter interface;
If not, judging whether third click information for clicking the process parameter button exists; if so, at least one technological parameter interface is formed on the specific groove graphical interface according to the third click information, so that a user inputs the numerical value of the technological parameter through the technological parameter interface.
4. A configuration generation method of a cleaning apparatus according to claim 3, wherein the tank type gallery includes: chemical tank gallery, sink gallery, hand sink gallery, quick drain gallery, slow pull gallery, or spin-dry gallery.
5. The method for generating configuration of a cleaning device according to claim 4, wherein the controlling the user side to form a specific slot graphical interface according to the slot type gallery according to the first click information specifically includes:
judging whether the tank structure clicked by the user is one of a chemical tank gallery, a water tank gallery, a hand washing tank gallery, a quick-discharge tank gallery, a slow-lifting tank gallery or a spin-drying tank gallery one by one;
if the judgment result is yes, generating a groove graphic interface related to the groove structure clicked by the user according to the click result of the user and a preset chemical liquid groove table, a water groove table, a hand washing groove table, a quick discharging groove table, a slow pulling groove table and a spin-drying groove table, and displaying the groove graphic interface on the interface of the user side;
And acquiring the related groove graphic interfaces which are input by the user terminal and form all the groove structures clicked by the user according to the cleaning silicon wafer sequence.
6. The configuration generation method of a cleaning apparatus according to claim 1, characterized by further comprising:
acquiring manipulator type information which is input or selected by a user side and corresponds to the groove structure;
displaying a slot teaching position parameter and performance parameter interface corresponding to the slot structure on the interface of the user side according to the manipulator type information;
and acquiring a groove structure covered by the manipulator, a numerical value of a position parameter of the manipulator and a numerical value of a performance parameter of the manipulator, which are input or selected by a user through the groove teaching position parameter and performance parameter interface, so as to generate a process configuration file based on the plurality of parameter information, the groove structure covered by the manipulator, the numerical value of the position parameter of the manipulator and the numerical value of the performance parameter of the manipulator.
7. The method for generating a configuration of a cleaning apparatus according to claim 6, wherein after the step of obtaining the slot structure covered by the manipulator, the numerical value of the position parameter of the manipulator, and the numerical value of the performance parameter of the manipulator, which are input or selected by the user through the interface of the slot teaching position parameter and the performance parameter, the method further comprises:
Acquiring shared slot and adjacent slot isolation door information covered by a manipulator input or selected by a user;
and generating a process configuration file based on the plurality of parameter information, the groove structure covered by the manipulator, the numerical value of the manipulator position parameter, the numerical value of the manipulator performance parameter, the shared groove covered by the manipulator and the adjacent groove isolation door information.
8. A configuration generation system of a cleaning apparatus, the configuration generation system comprising:
the first acquisition module is used for acquiring industry types, slot types and total slot numbers input by the user side;
the first determining module is used for determining a specific industry according to the industry category;
the second determining module is used for determining a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots;
a third determining module, configured to determine at least one slot name corresponding to the slot type combination according to the slot type combination;
a fourth determining module, configured to determine a slot structure file name according to the slot name;
the second acquisition module is used for acquiring a plurality of parameter information corresponding to the slot names and the slot structure file names, which are input by a user terminal;
The generating module is used for generating a process configuration file based on the plurality of parameter information;
the second determining module is configured to determine a slot type combination related to the specific industry according to the industry category, the slot type and the total number of slots, and specifically includes:
determining a slot type combination according to the industry category, the slot type and the total number of slots input by the user terminal;
judging whether the slot type combination is matched with the slot type combination in a slot type combination table in a database;
if the judging result is that the file names are matched, determining the file names corresponding to the specific industry slot type combinations;
if the judgment result is that the combination is not matched, the combination of the groove types is used as a new combination of the groove types to be added into a combination table of the groove types;
the third determining module is used for determining at least one slot name corresponding to the slot type combination according to the slot type combination; the fourth determining module is configured to determine a slot structure file name according to the slot name, and specifically includes:
sending a confirmation request whether to select the existing slot structure file name from a pre-stored slot type combination and name table to a user terminal, and if the feedback result is yes, determining the slot structure file name;
Acquiring the corresponding slot name according to the slot structure file name, and acquiring at least one slot structure corresponding to the slot name by the slot name;
and obtaining a groove structure graph corresponding to the groove structure from a preset different groove type graph library according to the groove structure, and displaying the groove structure graph on an interface of the user terminal.
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