CN110779930A - Device for detecting amount of luminescent material waste in vacuum machine table - Google Patents
Device for detecting amount of luminescent material waste in vacuum machine table Download PDFInfo
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- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
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Abstract
The invention provides a device for detecting the amount of a luminescent material waste in a vacuum machine table, which is arranged in the machine table and comprises a light source and an image receiving device, wherein the light source can excite the luminescent material to emit light, the image receiving device can monitor the luminescent material to emit light, the image receiving device transmits information of the residual luminescent material in the machine table to an image analysis terminal in a picture form, and the image receiving device judges whether cavity opening cleaning is needed or not through gray scale analysis, so that the problem that the utilization rate and the sealing performance of the machine table are influenced by frequent cavity opening is solved.
Description
Technical Field
The invention relates to the field of display panel manufacturing, in particular to a device for detecting the amount of luminescent material waste in a vacuum machine table.
Background
The development of display technology makes the display device continuously develop into liquid crystal display device and flexible display device from cathode ray tube display device, in order to better adapt to market demand and reduce production cost, the ink-jet printing method is used for preparing the orientation layer, the color filter, the luminescent material and the like to replace the existing preparation methods such as vapor deposition and the like, the production cost is reduced, meanwhile, the utilization efficiency of the material can be improved, and the ink-jet printing method has the advantage of simple process, and the ink-jet printing method is applied to the preparation flow of the flexible display device, and is helpful for expanding the yield of the flexible display device.
In the ink-jet printing method, the material is often prepared on the surface of the substrate in the form of a mixed solution, and then a pre-drying process and a post-drying process are carried out to obtain the film to be prepared. However, in this process, the solvent evaporation process is often combined to assist the preparation of the film layer, at this time, a trace amount of solvent is converted into steam and attached to the inside of the cavity in the form of steam, and after subsequent vacuum pumping or heating drying, the solvent attached to the inside of the cavity is continuously accumulated, and the solvent may drip on the surface of the device to be processed in the past, so that the device to be processed is polluted, and the normal process steps are affected.
Therefore, after the solvent is accumulated to a certain degree, the machine is required to be cleaned to ensure the performance of the device. However, if the solvent is measured in the closed chamber and the cleaning amount is accumulated, and the cleaning is performed regularly, the amount of the solvent needs to be determined by frequently opening the chamber, which may affect the utilization rate and the sealing performance of the machine.
Disclosure of Invention
The invention provides a device for detecting the amount of luminescent material waste in a vacuum machine, which can monitor the amount of residual luminescent material in a cavity of the machine, so as to solve the technical problem that the utilization rate and the sealing performance of the machine are influenced because the cavity is frequently opened because the residual amount of the luminescent material cannot be detected in the cavity of the machine in the existing closed manufacturing process.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the invention provides a device for detecting the amount of luminescent material waste in a vacuum machine table, which comprises a closed cavity, wherein the detection device comprises at least one luminous source and at least one image receiving device, wherein the at least one luminous source is arranged in the cavity.
The waste amount refers to the luminescent material at the non-preparation position in the process, namely the residual luminescent material; the light source is used for exciting the residual luminescent material in the cavity to emit light; the image receiving device is arranged opposite to the luminous source and is positioned at a position where the residual luminous material can be monitored to emit light. When the residual luminescent material exists in the cavity, the light emitted by the light emitting source is received by the residual luminescent material and excites the residual luminescent material to emit light. At this time, since the image receiving device is disposed at a position where the luminescence of the residual luminescent material can be monitored, the image receiving device processes the collected optical signal into an image signal, and outputs the image signal to an image analysis terminal outside the cavity, and the image analysis terminal detects the amount of the luminescent material waste through gray scale analysis, that is, calculates and analyzes the distribution area and the accumulation degree of the residual luminescent material.
When the cavity is subjected to the luminescent material process, the solvent containing the luminescent material volatilizes to take away part of the solute, so that the solute is dispersed on the inner wall of the cavity, and at the moment, in order to avoid influencing the luminescent material process, the luminous source and the image receiving device can be both in a closed state.
After the process of the luminescent material of the cavity is finished, a cavity door of the cavity is opened so as to take out the prepared substrate. And then, the cavity door of the cavity is closed, the light emitting source and the image receiving device are switched to be in an open state, the light emitting source excites the residual luminescent material to emit light, the image receiving device receives optical signals emitted by the residual luminescent material and converts the optical signals into image signals to be output to the image analysis terminal, the image analysis terminal calculates the area and the accumulation degree of the residual luminescent material and judges whether the quantity of the luminescent material waste in the cavity meets the cleaning requirement or not, namely whether the quantity of the luminescent material waste in the cavity is larger than a preset cleaning value or not.
If the area size and the accumulation degree of the residual luminescent material calculated by the image analysis terminal are within a preset range, the quantity of the luminescent material waste is less than a cleaning value, and the cavity does not need to be cleaned by opening the cavity; and if the calculated area size and the accumulated degree of the residual luminescent material exceed the preset range, the quantity of the luminescent material waste is greater than or equal to a cleaning value, and the cavity needs to be opened to clean the residual material. The cleaning value may be different according to the requirements of the manufacturing process.
After the analysis is finished, the light emitting source and the image receiving device can be closed so as to prepare for the film transfer before the next process or prepare for the cavity opening cleaning.
The switching of the on-off states of the light emitting source and the image receiving device can be realized by the existing control method, namely, the control can be realized by a computer; similarly, the image analysis terminal may be controlled by the same device as the image receiving device and the light emitting source.
The irradiation wavelength of the light source is 270nm to 380nm, preferably 300nm to 375 nm. The image receiving device is a camera comprising a charge coupled device, and the signal transmitted to the image analysis terminal by the image receiving device is a picture containing the distribution and accumulation degree of the residual luminescent material area.
Since the light-emitting material is excited to emit light by the light-emitting source, and the irradiation wavelength of the light-emitting source is an ultraviolet wavelength which is smaller than a visible wavelength, when the light-emitting source excites the residual light-emitting material to emit light, the wavelength of the light emitted by the residual material is equal to or greater than the wavelength of the light-emitting source, and at this time, even if a common camera is used as the image receiving device, the light emitted by the residual light-emitting material can be identified.
In addition, the image receiving device also relates to the charge coupled device, the charge coupled device has different response capabilities to light in different wavelength ranges, and the light emitted by the residual luminescent material is in the spectral response range of the charge coupled device, so that the light emitted by the residual luminescent material is easily collected and recorded by the image receiving device, and is converted into a picture reflecting the regional distribution of the luminescent material through subsequent amplification processing, analog-to-digital conversion and the like, and then is transmitted to the image analysis terminal.
The image analysis terminal adopts a correlation algorithm of image processing to realize the calculation and analysis of the distribution area and the accumulation degree of the residual luminescent material, wherein gray scale analysis can be adopted to firstly express each distribution area and each accumulation range of the residual luminescent material, then the edge information of each distribution area is extracted by the correlation algorithm, and finally the size of the area is calculated to analyze the distribution area and the accumulation degree of the residual luminescent material. The description specifically using gray level analysis is as follows:
in the picture, the region where the residual light emitting material is distributed may be different depending on the accumulation amount of the residual light emitting material. In the picture, the distribution area of the residual luminescent material when the amount of luminescent material waste is greater than or equal to the cleaning value is more concentrated in the picture than the distribution area when the amount of luminescent material waste is less than the cleaning value. So when the amount of luminescent material waste is larger than or equal to the clearing value, the residual luminescent material is more densely distributed in the picture, at which time the picture is converted into a grey-scale picture, and the area in which the residual luminescent material is represented is also more apparent.
In addition, in the picture, since the gray values of the luminescent materials are different due to different luminescent wavelengths and accumulation degrees, the image analysis terminal can determine the distribution range of each luminescent material by utilizing gray-scale analysis, and after the range of each distribution region is determined, the related calculation of the distribution region can be realized by utilizing an algorithm related to the area and the circumference in the image processing.
According to a preferred embodiment of the present invention, the light source is disposed at one side or one corner of the cavity.
In addition to the above-mentioned fixed arrangement of the light source and the image receiving device, the light source and the image receiving device may also be disposed in the cavity in an unfixed manner, that is, the detection device further includes a first movable device, and the first movable device carries the light source to move in the cavity, so as to excite the residual luminescent material at different positions in the cavity to emit light. The detection device further comprises a second movable device, wherein the second movable device carries the image receiving device to move in the cavity and is matched with the light emitting source to realize the positioning detection of the amount of the luminescent material waste at different positions. Specifically, the first movable device and the second movable device may be in the form of a guide rail and a sliding block which are cooperatively moved, and may also be in the form of gear engagement or the like.
The cavity also comprises a glass carrying platform, and the glass carrying platform is used for carrying a glass substrate in the process of manufacturing the luminescent material so as to prepare the luminescent material on the glass substrate. After the luminescent material process is completed, the glass substrate on which the luminescent material has been prepared is taken out.
The detection device provided by the invention is not limited to a vacuum machine, but also can be used in a luminescent material processing machine such as a heating machine.
The invention has the beneficial effects that: compared with the existing detection method relating to the luminous material processing machine, the luminous material waste amount detection device in the vacuum machine is characterized in that at least one luminous source and at least one image receiving device are arranged in the machine, the luminous source excites the residual luminous material in the machine to emit light, the image receiving device is used for collecting the light emitted by the residual luminous material, the light is processed and converted into pictures to be transmitted to the image analysis terminal, and the detection of the luminous material waste amount in the cavity is realized through the image analysis terminal so as to judge whether the machine is subjected to open cavity cleaning; the technical problem that the utilization rate and the sealing performance of the machine are affected due to frequent cavity opening of the existing machine due to the fact that the quantity of the luminescent material waste in the cavity cannot be automatically detected is solved.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1A is a schematic structural diagram of a device for detecting the amount of luminescent material waste in a vacuum machine according to the present invention.
FIG. 1B is a schematic structural diagram of a device for detecting the amount of luminescent material waste in a vacuum machine during detection of residual luminescent material according to the present invention;
FIG. 2 is a flow chart of the apparatus for detecting the amount of luminescent material waste in a vacuum machine according to the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The invention aims at the technical problem that after the luminescent material is prepared in the existing vacuum machine station related to the luminescent material preparation process, the residual and accumulation phenomena of the luminescent material can occur on the inner wall of the cavity of the vacuum machine station, so that the machine station needs to be frequently confirmed by opening the cavity to judge whether the residual luminescent material needs to be cleaned, and the utilization rate and the sealing performance of the machine station are influenced.
Referring to fig. 1A to 1B, which are schematic structural diagrams of a device for detecting the amount of waste luminescent material in a vacuum machine according to the present invention, the machine includes a sealed chamber 100, a glass carrier 101 disposed in the chamber 100, a light source 102, and an image receiving device 103.
The light source 102 is disposed on one sidewall of the cavity 100, and the image receiving device 103 is disposed opposite to the light source 102 and located at a position capable of monitoring the light emission of the residual luminescent material 104 in the cavity 100.
When the residual luminescent material 104 exists in the cavity 100, the light emitted by the light emitting source 102 excites the residual luminescent material 104 to emit light, then the image receiving device 103 collects the light emitted by the residual luminescent material 104, the image receiving device 103 converts a light signal into an image signal including the regional distribution and accumulation degree of the residual luminescent material 104, the image signal is sent to an image analysis terminal (not shown in the figure) outside the cavity 100, and the image analysis terminal further processes and analyzes the image, so that the size and accumulation degree of the distribution region of the residual luminescent material 104 in the cavity are obtained, and further, whether the cavity 100 needs to be cleaned by opening the cavity is judged.
Fig. 1A is a schematic structural diagram of a luminescent material waste amount detection device in a vacuum machine during a luminescent material process, at this time, a glass substrate 105 is placed on the glass carrier 101, and the light source 102 and the image receiving device 103 are both in a closed state to avoid affecting the process. The solution containing the light emitting material is volatilized in the process and prepared on the side of the glass substrate 105 away from the glass carrier 101. However, the luminescent material is not completely prepared on the glass substrate 105, and since the solvent may take away a portion of the solute when the solvent is volatilized, a portion of the luminescent material may remain on the inner wall of the cavity 100 during the volatilization process, which forms the residual luminescent material 104.
Under the condition of low requirement on the manufacturing process, the light source 102 and the image receiving device 103 may also be in an open state during the manufacturing process, and at this time, may be used to monitor the manufacturing process.
Fig. 1B is a schematic structural diagram of a luminescent material waste amount detection device in a vacuum machine after a luminescent material process, that is, a schematic structural diagram when detecting residual luminescent material.
At this time, the glass substrate 105 on which the light emitting material has been prepared is taken out, the door of the chamber 100 is closed, and the light emitting source 102 and the image receiving device 103 are switched to an open state. The light source 102 emits light to excite the residual luminescent material 104 in the cavity 100 to emit light, the image receiving device 103 collects the light emitted by the residual luminescent material 104, converts the received light signal into an electrical signal, the electrical signal is further processed by amplification, analog-to-digital conversion and the like to form a picture containing the distribution area of the residual luminescent material 104, the picture is transmitted to the image analysis terminal, and the image analysis terminal performs subsequent processing and analysis to judge whether the residual luminescent material 104 meets the cleaning requirement, that is, whether the waste amount of the luminescent material is greater than a preset cleaning value is judged, and the cleaning value can be different according to the requirements of the manufacturing process.
If the result (i.e. the amount of the waste material of the luminescent material) obtained by the analysis of the image analysis terminal is smaller than the cleaning value, the cavity 100 does not need to be opened for cleaning, and preparation is started for the next process.
If the result (i.e., the amount of the waste material of the luminescent material) obtained by the analysis of the image analysis terminal is greater than or equal to the cleaning value, the cavity 100 needs to be opened to clean the residual luminescent material 104. The light source 102 and the image receiving device 103 are switched to the off state after the analysis of the image analysis terminal is completed.
The image analysis terminal and the cavity 100 can use the same control device, or can be provided with one control device independently, the invention does not further limit the control device, only needs to meet the control requirements, and related technicians in the field can select different types or different numbers of control devices according to actual conditions.
The light source 102 is an ultraviolet lamp, which emits light with a wavelength of ultraviolet light, and the ultraviolet light is a high-frequency short-wave electromagnetic wave, so that the ultraviolet lamp has high energy to promote the residual luminescent material 104 to emit light, even if the residual luminescent material 104 is made of electroluminescent material, the residual luminescent material can emit light under the irradiation of the ultraviolet lamp.
The irradiation wavelength of the light emitting source 102 is 270nm to 380nm, preferably 300nm to 375 nm. At present, the wavelength of the existing ultraviolet lamp is mostly 300 nm-375 nm, so in order to save the manufacturing cost and simplify the manufacturing process, the ultraviolet lamp with 300 nm-375 nm is preferably used as the light emitting source, but this is not limited to the invention, and persons skilled in the art can select ultraviolet lamps with other wavelengths as the light emitting source according to the actual situation.
The light source 102 and the image receiving device 103 may use the same control device as the image analysis terminal, or may be provided with a single control device to switch the on/off states. The control mode of the light emitting source 102 can be controlled by an electric control solenoid valve, and the switching state is switched in a signal instruction mode; it is also possible to set the overall mechanically controlled power switching mode. In addition, the control mode of the light source 102 can be set to other control modes according to the needs, the present invention is not limited thereto, and those skilled in the art can set different control modes according to the circumstances.
The image receiving device 103 is a camera including a charge coupled device, the signal transmitted by the image receiving device 103 to the image analysis terminal is a picture including the area distribution of the residual luminescent material 104, and the picture may be a color picture or a black and white picture, which is not limited in the present invention.
Since the irradiation wavelength of the light source 102 is an ultraviolet wavelength and smaller than a visible wavelength, when the light source 102 excites the residual luminescent material 104 to emit light, the wavelength of the light emitted by the residual luminescent material 104 is equal to or greater than the wavelength of the light emitted by the light source 102, and at this time, even if a common camera is used as the image receiving device 103, the light emitted by the residual luminescent material 104 can be identified, and the recording of the distribution area of the residual luminescent material 104 is realized.
In addition, since the image receiving device 103 further includes a charge coupled device (not shown in the figure), the charge coupled device has different response capabilities to light with different wavelength ranges, and the charge coupled device can also recognize and sense infrared rays, so that the light emitted by the residual luminescent material 104 is within the spectral response range of the charge coupled device, and the image receiving device 103 can well collect the light emitted by the residual luminescent material 104 and convert the light into a picture reflecting the regional distribution of the luminescent material 104 to be transmitted to the image analysis terminal.
In the figure, the distribution of the residual luminescent material 104 varies according to the accumulation degree. When the amount of luminescent material waste is larger than or equal to the cleaning value, the distribution area of the residual luminescent material 104 within the cavity is denser than when the amount of luminescent material waste is smaller than the cleaning value. At this time, as the number of times and the amount of accumulation are continuously increased, the distribution areas of the residual luminescent material 104 are more and more, and even a situation that small distribution areas of the residual luminescent material 104 are connected into a large distribution area may occur, and the representation of the situation in a picture is more concentrated, at this time, the picture is converted into a gray scale image at the image analysis terminal, and the range in which the distribution areas are represented is more obvious, which is beneficial to determining the edge profile information of each distribution area.
In addition, because the gray values of the luminescent materials are different when the picture is converted into a gray map due to different luminescent wavelengths and accumulation degrees, the image analysis terminal can determine the distribution ranges of the residual luminescent materials 104 by utilizing gray scale analysis; after the range of each distribution region is determined, the related calculation of each distribution region can be realized by utilizing an algorithm related to the area and the perimeter in the picture processing, and the detection of the waste amount of the luminescent material is completed.
The determination of the edge profile information of each distribution area can be realized by adopting different algorithms in image processing, for example, after a gray level image is selected to be binarized by selecting a proper threshold value, the determination of the edge information is carried out; and the gray-scale image can also be directly analyzed by processing methods such as a SOBEL operator, a log operator and the like.
The present invention only provides an exemplary description of implementing edge information determination after binarization by selecting a suitable threshold for a gray scale image, and those skilled in the art can also implement edge contour information determination by using other algorithms. The description is as follows:
to determine the distribution range of the residual luminescent material 104, a threshold is set, which provides a measure for the presence and accumulation of the residual luminescent material in the cavity 100. The threshold is set by an analysis value of a picture obtained by the image receiving device 103 when the cavity 100 is in a clean state, that is, when the cavity 100 has no residual luminescent material, the image receiving device 103 transmits the picture to the image analysis terminal, and performs graying processing on the picture to obtain a gray value representing the cavity 100 in the clean state, where the gray value can be used as the threshold.
When the residual luminescent material 104 exists in the cavity 100, the image receiving device 103 transmits the image to the image analysis terminal, and after graying processing, the gray value represented by the image is different from the gray value represented by the clean cavity, that is, different from the threshold, at this time, the gray value greater than the threshold is set to be 1, and the gray value less than the threshold is set to be 0, so that the edge profile information representing the residual luminescent material 104 can be obtained, and then, the distribution area and the accumulation degree of the residual luminescent material 104 can be obtained by using a related algorithm in image processing, so as to complete analysis of the residual luminescent material in the cavity 100.
In addition to the structural form shown in fig. 1A to 1B that the light source is disposed on one side of the cavity, the light source 102 may be disposed on one corner of the cavity 100, or a movable device may be disposed in the cavity 100, and the movable device drives the light source 102 or the image receiving device 103 to move, and the image analysis terminal realizes positioning detection in the cavity 100, so as to realize panoramic scanning.
The number of the light emitting sources 102 and the image receiving devices 103 is not limited to one, and a plurality of light emitting sources and image receiving devices can be arranged as required to realize multi-directional detection of the residual luminescent material 104 in the cavity 100.
The cavity provided by the invention is not limited to a vacuum machine, but also can be used for machines related to luminescent material preparation, such as a heating machine; the process environment related to the cavity provided by the invention is not limited to a dry clean air environment and a nitrogen environment, and can also be other process environments; those skilled in the art can apply the method to other machines and process environments related to the preparation of luminescent materials according to the actual application.
Since the light source 102 and the image receiving device 103 are disposed inside the cavity 100, when the residual luminescent material 104 volatilizes, the residual luminescent material 104 may adhere to the light source 102 and the image receiving device 103, which affects the monitoring result, so that the light source 102 and the image receiving device 103 can be cleaned regularly to ensure the accuracy of the monitoring result.
Fig. 2 is a flow chart of the luminescent material waste amount detection device in the vacuum machine for detecting the luminescent material waste amount, and the following contents are included if the cavity is cleaned to a clean state before the process is started:
preparation before starting the process;
starting a manufacturing process;
and judging whether the luminescent material is in the luminescent material process. If yes, turning off the light-emitting source and the image receiving device; if not, turning on the light source and the image receiving device; the light-emitting source emits light and excites the residual luminescent material in the cavity to emit light, and the image receiving device collects the light emitted by the residual luminescent material, converts the light into a picture and transmits the picture to the image analysis terminal.
The image analysis terminal detects the distribution area and the cumulant of the residual luminescent material in the picture by utilizing gray scale analysis, and the luminescent source and the image receiving device are closed after a relevant analysis value is obtained; the related analysis value represents the waste amount of the luminescent material;
comparing the analysis value with a preset cleaning value, and if the analysis value is greater than or equal to the cleaning value, performing open cavity treatment on the cavity; if the cleaning value is less than the cleaning value, preparing before the manufacturing process is carried out, and starting the manufacturing process.
The image analysis terminal relates to different image processing algorithms when analyzing the distribution area and the cumulant of the residual luminescent material in the picture, and related technicians in the field can select different algorithms to determine the edge information of the residual luminescent material according to requirements of the related technicians, and the invention is not further limited.
In addition, the method for analyzing the picture by the image analysis terminal is not limited to a method of determining the edge information first and then calculating the size of the distribution area by using the edge information, and different calculation modes can be provided according to different algorithms.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (10)
1. The device for detecting the amount of the luminescent material waste in the vacuum machine is characterized in that the machine comprises a closed cavity, and the detection device comprises at least one luminescent source and at least one image receiving device which are arranged in the cavity;
the light source is used for exciting the residual luminescent material in the cavity to emit light;
the image receiving device is used for collecting optical signals emitted by the residual luminescent material, converting the optical signals into image signals and transmitting the image signals to the image analysis terminal outside the cavity;
the image analysis terminal analyzes the gray scale information of the collected image and detects the waste amount of the luminescent material.
2. The detecting device for detecting the rotation of a motor rotor as claimed in claim 1, wherein the image receiving device is disposed opposite to the light emitting source and at a position where the light emission of the residual luminescent material can be monitored.
3. The detection apparatus according to claim 1, wherein the light source is an ultraviolet lamp, and the irradiation wavelength of the ultraviolet lamp is 270nm to 380 nm.
4. The detection apparatus according to claim 3, wherein the irradiation wavelength of the ultraviolet lamp is 300nm to 375 nm.
5. The inspection device of claim 1, wherein the image receiving device is a camera comprising a charge coupled device.
6. The detecting device for detecting the rotation of a motor rotor according to claim 1, wherein the light-emitting source is arranged at one side or one corner in the cavity.
7. The detection device according to claim 1, further comprising a first movable device carrying the light source for movement within the cavity to excite residual luminescent material at different positions within the cavity to emit light.
8. The detecting device according to claim 1, wherein the detecting device further comprises a second movable device, the second movable device carries the image receiving device to move in the cavity and cooperates with the light source to perform positioning detection of the amount of the luminescent material waste at different positions.
9. The detecting device according to claim 1, wherein the light emitting source and the image receiving device are turned off after the image analyzing terminal finishes analyzing.
10. The detection apparatus according to claim 1, wherein after the image analysis terminal finishes analyzing, an amount of the luminescent material waste is obtained, and when the amount of the luminescent material waste is greater than or equal to a preset cleaning value, the cavity needs to be opened to clean the residual luminescent material.
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