CN110017795B - Relative swing arm type contourgraph for mirror surface inspection and detection method - Google Patents
Relative swing arm type contourgraph for mirror surface inspection and detection method Download PDFInfo
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- CN110017795B CN110017795B CN201910333161.5A CN201910333161A CN110017795B CN 110017795 B CN110017795 B CN 110017795B CN 201910333161 A CN201910333161 A CN 201910333161A CN 110017795 B CN110017795 B CN 110017795B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a relative swing arm type contourgraph for mirror surface inspection and a detection method. The lower part of the swing arm type contourgraph is provided with a contourgraph relative mirror surface posture detection structure, the contourgraph relative mirror surface posture detection structure comprises three posture sensors, the installation points of the three posture sensors form a triangle, the triangle is perpendicular to the rotating shaft of the swing arm type contourgraph, the axis of the rotating shaft passes through the center of the triangle, the swing arm type contourgraph uses a hollow air floatation rotary table provided with a middle hole, and the contourgraph relative mirror surface posture detection structure passes through the middle hole and is connected to the non-rotating part of the swing arm type contourgraph. The opposite swing arm type contourgraph also comprises a probe inclination posture precise adjustment structure. The relative swing arm type contourgraph for mirror surface inspection and the detection method improve the precision of the detection result.
Description
Technical Field
The invention belongs to the field of optical mirror surface shape detection, and particularly relates to a swing arm type contourgraph which is used for detecting an optical mirror surface in a fine grinding stage.
Background
The surface error of the optical mirror surface in the fine grinding stage is more than 2 microns, the surface is rough, optical interference detection cannot be adopted, and point-by-point contour detection is usually adopted. When the caliber reaches more than 1 meter, in order to avoid the risk caused by carrying between the processing equipment and the inspection equipment and shorten the manufacturing period, the inspection mode at the working position is recommended. The swing arm type contourgraph is a common method for mirror surface fine grinding stage inspection, and has the advantages of less freedom, high precision and in-place inspection, but the following defects exist:
(1) the method belongs to absolute measurement, system errors cannot be calibrated, and the precision and the reliability of a detection result are insufficient;
(2) the spatial position of the contourgraph and the detected mirror surface is difficult to determine, so that the posture of the contourgraph is difficult to adjust, and the bounce error (caused by the rotation of the mirror surface) in the detection result is difficult to deduct;
(3) precision measurement sensor adjustment is difficult and conventional horizontal and vertical adjustments do not ensure that the sensor is aligned with the mirror along the normal.
Disclosure of Invention
In order to overcome the defects of the swing arm type contourgraph, a relative swing arm type contourgraph is provided, which specifically comprises the following contents:
the invention provides a relative swing arm type contourgraph for mirror surface inspection, wherein a contourgraph relative mirror surface posture detection structure is arranged below the swing arm type contourgraph, the contourgraph relative mirror surface posture detection structure comprises three posture sensors, the installation points of the three posture sensors form a triangle, the triangle is perpendicular to a rotating shaft of the swing arm type contourgraph, the axis of the rotating shaft passes through the center of the triangle, the swing arm type contourgraph uses a hollow air floatation rotating table provided with a middle hole, and the contourgraph relative mirror surface posture detection structure passes through the middle hole and is connected to a part, which does not rotate, of the swing arm type contourgraph.
Furthermore, the three attitude sensors are distributed in an equilateral triangle, wherein one attitude sensor is positioned on the axis of the swing arm at an angle of 0 degree, the other two attitude sensors are symmetrically distributed on two sides of the axis of the swing arm at an angle of 0 degree, and the length of the side length of the equilateral triangle enables the attitude sensors to be staggered with the swing arm contourgraph.
Furthermore, still including probe slope gesture precision adjustment structure, be equipped with the rigidity measurement arm on the air supporting revolving stage, the one end of rigidity measurement arm is equipped with the counter weight, and the other end passes through probe slope gesture precision adjustment structure is connected with the probe, probe slope gesture precision adjustment structure includes yoke structure, rectangle groove structure, rotary encoder, precision adjustment unit, pivot locking device, a side of rectangle groove structure is connected to rotary encoder through the pivot with a side of yoke structure, another side of rectangle groove structure is connected to pivot locking device through the pivot with another side of yoke structure, the probe is fixed in the center department of rectangle recess, install the precision adjustment unit on the structural up end of yoke.
Furthermore, a fine adjustment unit is respectively arranged at the front edge and the rear edge of the upper end face of the fork arm structure.
Further, the rotary encoder is a rotation angle encoder.
Further, the probe is a contact micro-displacement sensor or a non-contact optical displacement sensor.
The invention also provides a detection method of the opposite swing arm type contourgraph for mirror surface inspection, which comprises the following steps: the method comprises the following steps:
s1: calibrating a contourgraph;
s1-1: installing the contourgraph on a contourgraph fixing device above the standard surface for calibration;
s1-2: the contourgraph finishes one-time scanning on a calibration plane, and if the reading of the probe is not constant, the spatial attitude of the contourgraph is deviated;
s1-3: adjusting the space posture of the contourgraph to ensure that the reading of the probe on the probe inclination posture precision adjustment structure is constant; simultaneously recording readings on three attitude sensors on the contourgraph relative mirror surface attitude detection structure
And length of probe L1;
s1-4: calculating the inclination angle theta of the measuring sensor when measuring the mirror surface, and then calculating the curvature radius R of the measured mirror surface closest to the spherical surfacebfsThe length L of the swing arm of the contourgraph, the length L1 of the probe and the inclination angle theta are used for deducing the length L2 of the probe when the sphere is formed, and the reading of the probe is set as a reference zero position;
s2: determining the relative posture of the contourgraph and the mirror surface;
s2-1: installing a swing arm type contourgraph on a machine tool inclined shaft, and enabling a rotating shaft of an air floatation rotary table to coincide with the central line of the machine tool inclined shaft;
s2-2: according to the inclination angle theta, the inclination posture of the probe is precisely adjusted through a probe inclination posture precise adjustment structure, then the probe is perpendicular to the aspheric surface through the linear and inclined motion of a machine tool, the aspheric surface is placed on the mirror surface rotary table and passes through the lowest point O of the mirror surface;
s2-3: reading readings (D ') on three attitude sensors'1,D'2,D'3) And display on a standard plane
Comparing, and if the difference exists, indicating that the profile instrument has deviation relative to the mirror surface posture;
s2-4: adjusting the spatial posture of the contourgraph to enable the adjusted reading to be the same as the reading on the standard plane, and determining the posture of the contourgraph relative to the mirror surface;
s2-5: the mirror surface rotary table rotates once, and the three attitude sensors record the distance from the mirror surface rotary table to the plane once; deducing the coordinate change closest to the spherical curvature center Q caused by the mirror bounce according to the recorded data; then calculating the difference value between the distance from the sampling point to the ideal curvature center and the distance from the shifted curvature center, namely the introduced error caused by mirror bounce;
s3: precisely adjusting the inclination attitude of the measuring sensor;
s3-1: before adjustment, reading the reading of the angle encoder when the probe is vertical to the mirror surface;
s3-2: the probe is horizontally finely adjusted through the precision adjusting unit, and whether the sensor is adjusted to a preset position or not is judged according to the rotating angle of the rotating shaft obtained by the rotating angle encoder;
s3-3: after the adjustment is finished, the rotating shaft is locked through the locking device.
Further, the standard surface for calibration is a plane or a spherical surface.
Furthermore, the standard surface for calibration is made of a low-thermal expansion material.
By adopting the technical scheme, the invention can obtain the following technical effects:
the invention further improves the relative swing arm type contourgraph for mirror surface inspection on the basis of the traditional contourgraph, improves the precision of a detection result, and specifically shows the following three aspects:
(1) the contourgraph adopts a relative detection mode, the systematic error of the contourgraph is calibrated before mirror surface detection is finished, and the precision and the reliability of a detection result are improved;
(2) by means of the three attitude sensors, the attitude of the contourgraph relative to the surface to be detected can be determined and adjusted, and the influence of installation and adjustment errors such as inclination and offset of the contourgraph on the detection result is eliminated; according to the reading of the sensor, the introduced error caused by mirror bounce can be calculated and deducted during data processing, so that the accuracy of the detection result is improved;
(3) the inclination posture precision adjustment of the measuring sensor can be realized, and the sensor can still be vertical to the mirror surface during aspheric surface detection. The high-precision rotary encoder and the locking device can eliminate introduced errors caused by the inclination of the sensor.
Drawings
FIG. 1 is a schematic view of a profilometer calibrated on a standard plane.
Fig. 2 is a top view of the profiler calibrated on a standard plane.
FIG. 3 is a schematic diagram of the profile instrument relative mirror attitude detection structure.
Fig. 4 is a schematic diagram of a fine adjustment structure of the tilt posture of the probe.
Fig. 5 is a schematic diagram of aspheric surface detection by a profiler.
The labels in the figures represent:
1-a contourgraph relative mirror surface attitude detection structure, 2-a probe inclined attitude precise adjustment structure, 3-a balance weight, 4-an air flotation rotary table, 5-a rigid measurement arm, 6-a calibration standard surface, 7-a fixed cross arm beam, 8-a machine tool inclined shaft, 9-an aspheric surface to be measured, 10-a mirror surface rotary table, 1-1 a attitude sensor clamp, 1-2 a connecting rod piece, 2-1 a rotary encoder, 2-2 a fork arm structure, 2-3 probes, 2-4 a precise adjustment unit, 2-5 a rotating shaft, 2-6 a rectangular groove structure, 2-7 a probe fixing bolt and 2-8 a rotating shaft locking device.
Detailed Description
The invention is further explained below with reference to the figures and examples.
The present embodiment provides a contra-swing-arm profiler for mirror inspection, as shown in fig. 1 and 2. The contourgraph posture detection structure 1 relative to the mirror surface is installed below the swing arm type contourgraph, the contourgraph posture detection structure 1 relative to the mirror surface comprises three posture sensors A, B, C and connecting rods 1-2, and as shown in fig. 2 and 3, the three posture sensors are fixed through posture sensor clamps 1-1. The installation points of the three attitude sensors form a triangle, the triangle is perpendicular to a rotating shaft of the swing arm type contourgraph, the axis of the rotating shaft passes through the center of the triangle, the swing arm type contourgraph uses a hollow air floatation rotary table 4 provided with a middle hole, and the contourgraph passes through the middle hole relative to the mirror surface attitude detection structure and is connected to a part, which does not rotate, of the swing arm type contourgraph.
Preferably, the three attitude sensors are distributed in an equilateral triangle, wherein one attitude sensor is positioned on the axis of the swing arm at an angle of 0 degree, the other two attitude sensors are symmetrically distributed on two sides of the axis of the swing arm at an angle of 0 degree, and the length of the side length of the equilateral triangle enables the attitude sensors to be staggered with the swing arm contourgraph.
In this embodiment, the attitude of the profiler relative to the mirror surface is determined by additionally providing three precise attitude sensors. Three precise displacement sensors are arranged below the swing arm type contourgraph, the mounting points of the sensors form a triangle, the triangle is perpendicular to a rotating shaft of the contourgraph, and the axis of the rotating shaft passes through the center of the triangle. An equilateral triangular distribution is preferred: one is located the axis at the angle of 0 degree of swing arm, and the axis both sides and the symmetrical arrangement at the angle of 0 degree of other two branches. As shown in fig. 1, the side length L of an equilateral triangle is determined, so that the attitude sensor and the swing arm contourgraph are staggered, and the installation is convenient; the swing arm profiler uses a hollow air-floating turntable with the attitude determining device connected through a central hole to the non-rotating part of the profiler.
The embodiment provides a relative swing arm type contourgraph for mirror surface inspection, which further comprises a probe inclined posture precise adjustment structure 2, a rigid measuring arm 5 is arranged on the air-floatation rotary table, one end of the rigid measuring arm is provided with a balance weight 3, the other end of the rigid measuring arm is connected with a probe through the probe inclined posture precise adjustment structure, the probe inclination posture precise adjustment structure comprises a fork arm structure, a rectangular groove structure, a rotary encoder, a precise adjustment unit and a rotating shaft locking device, one side surface of the rectangular groove structure and one side surface of the fork arm structure are connected to the rotary encoder through a rotating shaft, the other side surface of the rectangular groove structure and the other side surface of the fork arm structure are connected to the rotating shaft locking device through a rotating shaft, the probe is fixed at the center of the rectangular groove, and the upper end face of the fork arm structure is provided with a precision adjusting unit.
Preferably, a precision adjusting unit is respectively arranged at the front edge and the rear edge of the upper end face of the fork arm structure; the encoder is a rotation angle encoder; the probe is a contact micro-displacement sensor or a non-contact optical displacement sensor.
In this embodiment, a probe tilt posture precision adjustment structure 2 is designed. The structure takes a fork arm structure as a main body, and rotating shafts on two side surfaces of a rectangular groove structure penetrate through middle holes on two side surfaces of the fork arm structure; the probe is fixed at the center of the rectangular groove and is locked by the probe fixing bolts 2-7; the front edge and the rear edge of the upper end surface of the fork arm structure are respectively provided with a precision adjusting unit; the left side surface center position of the fork arm structure is provided with a high-precision rotary encoder, and the right side surface is provided with a locking structure. The rotary encoder preferentially selects an absolute value type rotary encoder with high resolution; the probe can select a contact micro-displacement sensor or a non-contact optical displacement sensor.
The embodiment designs a standard surface for detecting calibration based on a relative formula. The standard can be processed into a plane or a spherical surface, and the calibration method of the spherical surface is the same as that of the plane; a low thermal expansion material (such as microcrystalline glass) is selected for processing, so that the thermal stability of the shape of the glass is ensured; the thickness of the standard surface 6 for calibration is smaller as much as possible under the condition of small deformation, so that the standard surface is convenient to carry; the standard surface for calibration is detected by methods such as optical interference and the like, so that the surface shape precision of the standard surface is higher than that of the surface to be measured by one order of magnitude.
The invention discloses a detection method of a relative swing arm type contourgraph for mirror surface inspection, which comprises the following steps:
1. calibrating the contourgraph:
1) as shown in fig. 1, the profiler is mounted on a fixing beam 7 above a calibration plane 6 via a flange on the profiler;
2) as shown in fig. 2, the profiler completes one scan on the calibration plane 6, and if the reading of the probe E is not constant, it indicates that there is a deviation in the spatial attitude of the profiler;
3) adjusting the space attitude of the contourgraph to ensure that the reading of the probe 2-3 on the probe inclination attitude precision adjustment structure 2 is constant; simultaneously recording readings from three attitude sensors A, B, C on the contourgraph relative mirror attitude detection structure 1
And the length L1 of the probe 2-3, the profiler is shown in FIG. 2 relative to the mirror pose detection structure 1;
4) calculating the inclination angle theta of the measuring sensor when measuring the mirror surface, and then calculating the curvature radius R of the measured mirror surface closest to the spherical surfacebfsThe length L of the swing arm of the contourgraph, the length L1 of the probe and the inclination angle theta, the length L2 of the probe when the sphere is measured is deduced, and the reading of the probe 2-3 is set as a reference zero position.
2. Determining the relative posture of the contourgraph and the mirror surface:
1) as shown in fig. 3, the swing arm type contourgraph is installed on a machine tool inclined shaft 8 through a flange, and a rotating shaft of the air floatation rotary table (4) is superposed with the central line of the machine tool inclined shaft;
2) according to the inclination angle theta, the probe inclination posture fine adjustment structure 2 is used for fine adjustment of the inclination posture of the probe 2-3, and then the probe 2-3 is perpendicular to the aspheric surface 9 to be detected through linear and inclined movement of a machine tool and passes through the lowest point O of the mirror surface;
3) readings (D ') on three attitude sensors A, B, C were taken'1,D'2,D'3) And display on a standard plane
Comparing, and if the difference exists, indicating that the profile instrument has deviation relative to the mirror surface posture;
4) and adjusting the spatial posture of the contourgraph to enable the adjusted reading to be the same as the reading on the standard plane, and determining the posture of the contourgraph relative to the mirror surface.
5) When the mirror surface rotary table 10 rotates once, the three attitude sensors A, B and C can record the distance from the mirror surface rotary table to the plane once; the coordinate change closest to the spherical curvature center Q caused by the mirror bounce can be deduced according to the recorded data; and then calculating the difference between the distance from the sampling point to the ideal curvature center and the distance from the shifted curvature center, namely the introduced error caused by the mirror bounce.
3. And (3) precise adjustment of the inclination attitude of the measuring sensor:
1) as shown in figure 4, two rotating shafts 2-5 are respectively arranged on two side surfaces of the rectangular groove structures 2-6, and the rotating shafts penetrate through middle holes on two sides of the yoke arm structures 2-2 and are respectively connected with a rotary encoder 2-1 and a rotating shaft locking device 2-8. The precise adjustment units 2-4 are fixed on the front and rear sides of the upper surface of the yoke structure 2-2 and used for precisely adjusting the inclined posture of the measurement sensor.
2) Before adjustment, reading the reading of the rotary angle encoder 2-1 when the probe 2-3 is perpendicular to the mirror surface;
3) the probe 2-3 is horizontally finely adjusted through the precision adjusting unit 2-4, and whether the sensor is adjusted to a preset position or not is judged according to the rotating angle of the rotating shaft obtained by the rotating angle encoder 2-1;
4) after the adjustment is finished, the rotating shaft is locked through the locking devices 2-8, and random errors caused by shaking of the detector in the detection process are prevented.
The technical features of the above embodiments may be combined with each other as long as they do not conflict with each other. The present invention is not limited to the above-described embodiments, and all technical solutions formed by using equivalents or equivalent substitutes are within the scope of the present invention as claimed.
Claims (9)
1. The utility model provides a relative formula swing arm formula contourgraph for mirror surface inspection which characterized in that: the lower part of the swing arm type contourgraph is provided with a contourgraph relative mirror surface posture detection structure, the contourgraph relative mirror surface posture detection structure comprises three posture sensors, the installation points of the three posture sensors form a triangle, the triangle is perpendicular to the rotating shaft of the swing arm type contourgraph, the axis of the rotating shaft passes through the center of the triangle, the swing arm type contourgraph uses a hollow air floatation rotary table provided with a middle hole, and the contourgraph relative mirror surface posture detection structure passes through the middle hole and is connected to the non-rotating part of the swing arm type contourgraph.
2. The opposed swing arm profiler for mirror inspection according to claim 1, wherein: the three attitude sensors are distributed in an equilateral triangle shape, one of the three attitude sensors is positioned on the axis of the swing arm at an angle of 0 degree, the other two attitude sensors are positioned on two sides of the axis of the swing arm at an angle of 0 degree and are symmetrically arranged, and the length of the side length of the equilateral triangle makes the attitude sensors staggered with the swing arm contourgraph.
3. The opposed swing arm profiler for mirror inspection according to claim 1, wherein: still include probe slope gesture precision adjustment structure, be equipped with the rigidity measurement arm on the air supporting revolving stage, the one end of rigidity measurement arm is equipped with the counter weight, and the other end passes through probe slope gesture precision adjustment structure is connected with the probe, probe slope gesture precision adjustment structure includes yoke structure, rectangle groove structure, rotary encoder, precision adjustment unit, pivot locking device, a side of rectangle groove structure is connected to rotary encoder through the pivot with a side of yoke structure, another side of rectangle groove structure is connected to pivot locking device through the pivot with another side of yoke structure, the probe is fixed in the center department of rectangle recess, install the precision adjustment unit on the structural up end of yoke.
4. The opposed swing arm profiler for mirror inspection according to claim 3, wherein: and the front edge and the rear edge of the upper end surface of the fork arm structure are respectively provided with a precision adjusting unit.
5. The opposed swing arm profiler for mirror inspection according to claim 3, wherein: the encoder is a rotation angle encoder.
6. The opposed swing arm profiler for mirror inspection according to claim 3, wherein: the probe is a contact micro-displacement sensor or a non-contact optical displacement sensor.
7. A relative formula swing arm formula contourgraph's detection method for mirror surface inspection which characterized in that: the method comprises the following steps:
s1: calibrating a contourgraph;
s1-1: installing the contourgraph on a contourgraph fixing device above the standard surface for calibration;
s1-2: the contourgraph finishes one-time scanning on a calibration plane, and if the reading of the probe is not constant, the spatial attitude of the contourgraph is deviated;
s1-3: adjusting the space posture of the contourgraph to ensure that the reading of the probe on the probe inclination posture precision adjustment structure is constant; simultaneously recording readings on three attitude sensors on the contourgraph relative mirror surface attitude detection structure
And length of probe L1;
s1-4: calculating the inclination angle theta of the measuring sensor when measuring the mirror surface, and then calculating the curvature radius R of the measured mirror surface closest to the spherical surfacebfsThe length L of the swing arm of the contourgraph, the length L1 of the probe and the inclination angle theta are used for deducing the length L2 of the probe when the sphere is formed, and the reading of the probe is set as a reference zero position;
s2: determining the relative posture of the contourgraph and the mirror surface;
s2-1: installing a swing arm type contourgraph on a machine tool inclined shaft, and enabling a rotating shaft of an air floatation rotary table to coincide with the central line of the machine tool inclined shaft;
s2-2: according to the inclination angle theta, the inclination posture of the probe is precisely adjusted through a probe inclination posture precise adjustment structure, then the probe is perpendicular to the aspheric surface through the linear and inclined motion of a machine tool, the aspheric surface is placed on the mirror surface rotary table and passes through the lowest point O of the mirror surface;
s2-3: reading readings (D ') on three attitude sensors'1,D'2,D'3) And display on a standard plane
Comparing, and if the difference exists, indicating that the profile instrument has deviation relative to the mirror surface posture;
s2-4: adjusting the spatial posture of the contourgraph to enable the adjusted reading to be the same as the reading on the standard plane, and determining the posture of the contourgraph relative to the mirror surface;
s2-5: the mirror surface rotary table rotates once, and the three attitude sensors record the distance from the mirror surface rotary table to the plane once; deducing the coordinate change closest to the spherical curvature center Q caused by the mirror bounce according to the recorded data; then calculating the difference value between the distance from the sampling point to the ideal curvature center and the distance from the shifted curvature center, namely the introduced error caused by mirror bounce;
s3: precisely adjusting the inclination attitude of the measuring sensor;
s3-1: before adjustment, reading the reading of the angle encoder when the probe is vertical to the mirror surface;
s3-2: the probe is horizontally finely adjusted through the precision adjusting unit, and whether the sensor is adjusted to a preset position or not is judged according to the rotating angle of the rotating shaft obtained by the rotating angle encoder;
s3-3: after the adjustment is finished, the rotating shaft is locked through the locking device.
8. The method of claim 7, wherein the method comprises the steps of: the standard surface for calibration is a plane or a spherical surface.
9. The method of claim 7 or 8, wherein the method comprises the steps of: the standard surface for calibration is made of low thermal expansion material.
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| CN1162684C (en) * | 2002-04-15 | 2004-08-18 | 清华大学 | Semiconductor side pumped solid laser gyroscope and its electrooptical modulation method |
| CN101363706B (en) * | 2007-08-10 | 2011-01-05 | 鸿富锦精密工业（深圳）有限公司 | Lens thickness meter |
| CN101936699B (en) * | 2010-08-24 | 2012-04-18 | 中国科学院光电技术研究所 | Swing arm type three-dimensional contourgraph |
| DE102013105828A1 (en) * | 2012-06-08 | 2013-12-12 | Perceptron, Inc. | Structured light contour sensing system for measuring contour of surface has control module to control micro electro mechanical system (MEMS) mirrors based on focus quality to maintain Scheimpflug tilt condition between lens and image plane |
| CN103344195B (en) * | 2013-07-02 | 2016-03-30 | 中国科学院光电技术研究所 | A kind of swing-arm profilometry gauge head of sensor rotation is to heart calibrating installation |
| EP2977720B1 (en) * | 2014-07-25 | 2019-06-05 | Mitutoyo Corporation | A method for measuring a high accuracy height map of a test surface |
| CN105300270B (en) * | 2015-09-16 | 2019-03-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of swing arm contourgraph and its Method of Adjustment based on capacitive displacement transducer |
| CN106275175B (en) * | 2016-09-30 | 2019-01-15 | 冯军 | Two-wheeled balance car |
| CN108020193B (en) * | 2017-12-20 | 2019-10-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of more gauge head postures of swing arm contour detecting are from correction system and antidote |
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