CN109612758A - A kind of adjustment method of filming equipment and debugging board - Google Patents
A kind of adjustment method of filming equipment and debugging board Download PDFInfo
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- CN109612758A CN109612758A CN201811540663.7A CN201811540663A CN109612758A CN 109612758 A CN109612758 A CN 109612758A CN 201811540663 A CN201811540663 A CN 201811540663A CN 109612758 A CN109612758 A CN 109612758A
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- film
- element glass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M99/00—Subject matter not provided for in other groups of this subclass
- G01M99/008—Subject matter not provided for in other groups of this subclass by doing functionality tests
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
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- Organic Chemistry (AREA)
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Abstract
The invention discloses a kind of adjustment methods of filming equipment and debugging board.Adjustment method step includes: setup test element glass；Test is subjected to plated film with element glass；Test after plated film is detected with element glass, if complying with standard, determines that filming equipment is debugged successfully；If not being inconsistent standardization, determine that filming equipment is debugging failed, execution carries out the step of pulling out film with element glass to the test after plated film, and re-executes the step of test is carried out plated film with element glass.By recycling continuous detection, so that filming equipment is debugged out best parameter, carry out the mass production of product, improve production efficiency.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of adjustment methods of filming equipment and debugging board.
Background technique
With the development of display technology, people are increasing to the demand of display panel.In the production of display panel
Cheng Zhong is needed to element glass through filming equipment, such as vacuum ion membrane plating equipment (Physical Vapor Deposition,
PVD the operation of plated film) is carried out, subsequent production, exposure development etching etc. are carried out after filming equipment plated film, to form display
Panel.
During plated film, because the requirement of coating technique and the environment that forms a film is relatively high, such as film thickness requirement etc.,
After filming equipment is restarted or product specification and film coating environment change, when plated film, which is easy to appear, does not meet preset requirement
The case where, cause product unqualified and the waste of material.
Summary of the invention
The object of the present invention is to provide one kind to prevent filming equipment delay machine, improves a kind of filming equipment of element glass utilization rate
Adjustment method and debugging board.
The invention discloses a kind of adjustment methods of filming equipment, which is characterized in that comprising steps of
A: setup test element glass；
B: test is subjected to plated film with element glass；
C: detecting the test after plated film with element glass, if complying with standard, determines that filming equipment is debugged successfully；If no
It complies with standard, determines that filming equipment is debugging failed, execute step D；
D: the element glass after plated film is carried out to pull out film, after debugging to filming equipment, re-execute the steps B.
Optionally, in the step B, further include the steps that film number M=0 is currently pulled out in initialization；
In the step D, further include the steps that record pulls out film number M=M+1；
It is further comprising the steps of after carrying out the step of pulling out film to the element glass after plated film in the step D:
E: judgement currently pulls out whether film number M meets the preset threshold of condition M >=first, if satisfied, thening follow the steps F；If
It is unsatisfactory for, thens follow the steps G；
F: the element glass after film will be pulled out labeled as product element glass, a piece of new element glass is changed, surveyed as current board
Element glass on probation, re-execute the steps B；
G: with current board test element glass, it re-execute the steps B.
Optionally, first preset threshold is equal to 2.
Optionally, in the step B, include the steps that record pulls out film situation, it is described pull out film situation include pull out film success or
It is unsuccessful that person pulls out film；
Wherein, initialization currently pull out film situation be it is unsuccessful, in step E, currently pull out film number M and meet condition M >=the
One preset threshold, and pulling out film situation is when pulling out film success, to then follow the steps F；Otherwise, G is thened follow the steps.
Optionally, in step F, labeled as the glass of product element glass, after placement is debugged successfully to filming equipment, as
The element glass of product processing.
Optionally, in the step B, further include the steps that film number M=0 is currently pulled out in initialization；
In the step D, further include the steps that record pulls out film number M=M+1；
It is further comprising the steps of after carrying out the step of pulling out film to the element glass after plated film in the step D:
E: judgement currently pulls out whether film number M meets condition M >=2, if satisfied, thening follow the steps F1；If not satisfied, then holding
Row step G；
F1: the test after film will be pulled out and again return to step B with element glass, step F2 is executed after executing the step B；
F2: step C is executed, success is debugged if the detection in step C complies with standard, uses element glass as product test
Use element glass；It is debugging failed if the detection in step C is not inconsistent standardization, directly the element glass after plated film is scrapped, is changed a piece of
New element glass re-execute the steps B as current board test element glass；
G: with current board test element glass, it re-execute the steps B.
Optionally, in the step C, determine also to execute step after filming equipment is debugged successfully:
H: test is cleaned with element glass；
I: it carries out the element glass after cleaning in step h to pull out film, as product element glass.
The invention also discloses a kind of adjustment methods of filming equipment, which is characterized in that comprising steps of
A: setup test element glass；
B: test is subjected to plated film with element glass, film number M=0 is currently pulled out in initialization；Initialization currently pulls out film situation
It is unsuccessful to pull out film；
C: detecting the test after plated film with element glass, if complying with standard, determines that board is debugged successfully, and execute step
Rapid i；If not being inconsistent standardization, judgement is current debugging failed, thens follow the steps d；
D: test is cleaned with element glass；
E: the test after cleaning is carried out to pull out film with element glass；Record currently pulls out film situation, and records and currently pull out film number M
=M+1；
F: judgement currently pulls out whether film number M meets condition M >=2, if satisfied, thening follow the steps g；If not satisfied, then holding
Row step h；
G: the test after film will be pulled out with element glass labeled as product element glass, a piece of new element glass is changed, as current
Board test element glass, re-execute the steps b；
H: with current board test element glass, it re-execute the steps b；
I: test is cleaned with element glass；
J: it carries out the element glass after cleaning in step h to pull out film, as product element glass.
The invention also discloses a kind of debugging boards of filming equipment, comprising:
Detection device detects the test after filming equipment plated film with element glass；
Judgment means obtain the testing result of detection device, judge according to preset standard testing result；
Film device is pulled out, to being judged as that the test for not meeting preset standard carries out pulling out film with element glass in judgment means；It is described
The film device that pulls out the test after pulling out film is sent to filming equipment with element glass to carry out plated film again.
Optionally, the debugging board further includes managing and control system, and the managing and control system pulls out film number to pulling out in film device
Or pull out film situation and recorded, the managing and control system includes at least one field, and record pulls out film number or pulls out film situation.
For by the scheme of the direct plated film of the vacuum ion membrane plating equipment that do not debug, the application be filming equipment into
Row debugging, by setup test element glass, detects the element glass after plated film, if detection complies with standard, debugs
Success, if not meeting, judgement is current debugging failed, is carried out pulling out film with element glass to the test detected after plated film, clearly
Except plated film before, in order to avoid influencing detection, after debugging to filming equipment, and filming equipment is made to carry out plated film again；Later,
It is detected again, this process can continue to carry out, and comply with standard, debugged successfully until detecting.The examination criteria is by this
Field technical staff is arranged according to specific circumstances.
Detailed description of the invention
Included attached drawing is used to provide that a further understanding of the embodiments of the present application, and which constitute one of specification
Point, for illustrating presently filed embodiment, and with verbal description come together to illustrate the principle of the application.Under it should be evident that
Attached drawing in the description of face is only some embodiments of the present application, for those of ordinary skill in the art, is not paying wound
Under the premise of the property made is laborious, it is also possible to obtain other drawings based on these drawings.In the accompanying drawings:
Fig. 1 is a kind of schematic diagram of adjustment method process of one embodiment of the invention；
Fig. 2 is the schematic diagram of the adjustment method process comprising pulling out film record of one embodiment of the invention；
Fig. 3 is the schematic diagram of the adjustment method process of the product of changing the line of production of one embodiment of the invention；
Fig. 4 is the schematic diagram of the adjustment method process of the debugging successful transition to production product of one embodiment of the invention；
Fig. 5 is the schematic diagram of the adjustment method process of the product of changing the line of production of another embodiment of the present invention；
Fig. 6 is the debugging board of another embodiment of the present invention and the schematic diagram of filming equipment cooperation.
Wherein, 100, debugging board；110, detection device；120, judgment means；130, film device is pulled out；140, control system
System；200, filming equipment.
Specific embodiment
It is to be appreciated that term used herein above, disclosed specific structure and function details, it is only for description
Specific embodiment is representative, but the application can be implemented by many alternative forms, be not construed as only
It is limited to the embodiments set forth herein.
In the description of the present application, term " first ", " second " are used for description purposes only, and it is opposite to should not be understood as instruction
Importance, or implicitly indicate the quantity of indicated technical characteristic.As a result, unless otherwise indicated, " first ", " are defined
Two " feature can explicitly or implicitly include one or more of the features；The meaning of " plurality " is two or two
More than.Term " includes " and its any deformation, mean and non-exclusive include, it is understood that there may be or addition is one or more that other are special
Sign, integer, step, operation, unit, component and/or combination thereof.
In addition, "center", " transverse direction ", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner",
The term of the orientation or positional relationship of the instructions such as "outside" is that orientation or relative positional relationship based on the figure describe, only
Be that the application simplifies description for ease of description, rather than indicate signified device or element must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
Furthermore unless specifically defined or limited otherwise, term " installation ", " connected ", " connection " shall be understood in a broad sense, example
Such as it may be fixed connection or may be dismantle connection, or integral connection；It can be mechanical connection, be also possible to be electrically connected
It connects；It can be directly connected, it can also indirectly connected through an intermediary or the connection inside two elements.For ability
For the those of ordinary skill in domain, the concrete meaning of above-mentioned term in this application can be understood as the case may be.Join below
Examining attached drawing and optional embodiment, the invention will be further described.
As shown in Figure 1, the embodiment of the invention discloses a kind of adjustment methods of filming equipment, comprising steps of
A: setup test element glass；
B: test is subjected to plated film with element glass；
C: detecting the test after plated film with element glass, if complying with standard, determines that filming equipment is debugged successfully；If no
It complies with standard, determines that filming equipment is debugging failed, execute step D；
D: the element glass after plated film is carried out to pull out film, after debugging to filming equipment, re-execute the steps B.
It is debugged for filming equipment, by setup test element glass, the element glass after plated film is detected, examined
If survey complies with standard, success is debugged, then filming equipment no longer needs to be debugged, if not meeting, determines that current debugging is lost
It loses, the test detected after plated film is carried out pulling out film with element glass, the plated film before removing, in order to avoid detection is influenced, to plating
After film device is debugged, and filming equipment is made to carry out plated film with element glass to pulling out the test after film again；And then secondary progress
Detection, this process can continue to carry out, comply with standard, debugged successfully until detecting.The examination criteria is by art technology
Personnel are arranged according to specific circumstances, and only when filming equipment meets examination criteria, just calculation is debugged successfully, if not meeting detection
Standard, then debugging is unsuccessful, it will continue to debug, until complying with standard.
As shown in Fig. 2, in one embodiment, in stepb, include the steps that initialization currently pulls out film number M=0,
In step D, includes the steps that recording and pull out film number M=M+1, in the step D, the element glass after plated film is being carried out to pull out film
It is further comprising the steps of after step:
E: judgement currently pulls out whether film number M meets the preset threshold of condition M >=first, if satisfied, thening follow the steps F；If
It is unsatisfactory for, thens follow the steps G；
F: the element glass after film will be pulled out labeled as product element glass, a piece of new element glass is changed, surveyed as current board
Element glass on probation, re-execute the steps B；
G: with current board test element glass, it re-execute the steps B.
For test element glass with the increase for pulling out film number, test can be thinning with element glass, after element glass is thinning, Ke Neng
There is fragmentation during pulling out film in plated film, once and fragmentation will cause delay machine, very big, this programme is influenced on filming equipment
It introduces and pulls out film number, record pulls out film number, when pulling out film number and meeting preset condition, it would be possible to cause the test of delay machine
It is withdrawn from time with element glass, it is therefore prevented that the occurrence of delay machine, and the test after withdrawing from is changed into the plain glass of product with element glass
Glass further increases the utilization rate of element glass.
In one embodiment, the first preset threshold is equal to 2.In the present solution, when pulling out film each time, in addition to film is removed, element
Glass also can be thinning by solvent effect, by actual test and verifying, after pulling out film three times, that is, pulls out film number M equal to 3
When, test is very thin with element glass, at this time if continued to use, it is likely to result in very much delay machine greatly, therefore by the first preset threshold
2 are set equal to, as long as then the case where M not equal to 3, is not easy delay machine.Certainly, as the promotion of board performance, first is pre-
If the value of threshold value can also be greater than 2, such as 3,4 or 5 etc..
In one embodiment, in step B, include the steps that record pulls out film situation, the film situation of pulling out includes pulling out film success
Or to pull out film unsuccessful；Wherein, initialization currently pull out film situation be it is unsuccessful, in step E, currently pull out film number M meet it is pre-
If the preset threshold of condition M >=first, and pulling out film situation is when pulling out film success, to then follow the steps F；Otherwise, G is thened follow the steps.
It concurrently sets and pulls out film situation and pull out two conditions of film number, first have to determination and pull out whether film succeeds, if it is successful, that
According to pulling out whether film number reaches the step of requirement is to determine next step, if pull out film it is unsuccessful if continue to pull out film, can also be with
Some element glass having already passed through after repeatedly pulling out film are miscarried into continuing to test before preventing.
In one embodiment, it in step F, labeled as the glass of product element glass, places to filming equipment and debugs successfully
Afterwards, the element glass as product processing.
In the present solution, it is excessive to pull out film number in order to prevent, test element glass is labeled as product element glass, as production
The element glass of product processing so can not only prevent from causing test element glass thinning because pulling out film number excessively and causing to delay
The case where machine, occurs, and above-mentioned element glass product process when be also will not fragmentation, can so reduce element glass original
The entrance of material reduces loss.
In step D, metal when pulling out film using sour solvent, sour solvent and plated film can generate chemical reaction, can be with
Make to pull out film uniform and complete, as long as in order to avoid leaving doping to influence to detect other solvents that can reach this effect certainly is also that can pull out
It is used when film.
As shown in figure 3, in one embodiment, in the step B, including the steps that film number M=0 is currently pulled out in initialization；
In the step D, further include the steps that record pulls out film number M=M+1；
It is further comprising the steps of after carrying out the step of pulling out film to the element glass after plated film in the step D:
E: judgement currently pulls out whether film number M meets condition M >=2, if satisfied, thening follow the steps F1；If not satisfied, then holding
Row step G；
F1: the test after film will be pulled out and execute step B again with element glass, step F2 is executed after executing the step B；
F2: step C is executed, success is debugged if the detection in step C complies with standard, uses element glass as product test
Use element glass；It is debugging failed if the detection in step C is not inconsistent standardization, directly the element glass after plated film is scrapped, is changed a piece of
New element glass re-execute the steps B as current board test element glass；
G: with current board test element glass, it re-execute the steps B.
In the present solution, we when meeting preset condition, that is, pull out film number equal to 2 times, then again after plated film detection, directly
Connect the occurrence of test is scrapped with element glass, prevents delay machine after inciting somebody to action plated film three times.
In addition it after debugging failed, is additionally added whether step M is more than or equal to 2, if meeting M >=2, is then scrapped, such as
Fruit does not meet, and cleans subsequent step.
In one embodiment, in the step C, determine also to execute step after filming equipment is debugging failed:
H: test is cleaned with element glass；
The operation that test after plated film is cleaned before pulling out film with element glass can first wash off dust above, can
So that it is more thorough to pull out film.
As shown in figure 4, in one embodiment, in the step C, determining also to execute step after filming equipment is debugged successfully:
H: test is cleaned with element glass；
I: it carries out the element glass after cleaning in step H to pull out film, as product element glass；
Further, we, which may determine that, pulls out whether film number M meets condition M >=2, if so, after cleaning in step H
Element glass carry out pulling out film, as product element glass, if not then directly scrapping.
It, can be by the plain glass of test if the result that test is debugged for the first time with element glass is meeting examination criteria
Glass is cleaned, and film is pulled out, and directly as product element glass, can be continued to use next time.
As shown in figure 5, disclosing a kind of adjustment method of filming equipment as another embodiment of the present invention, comprising:
A: setup test element glass；
B: test is subjected to plated film with element glass, film number M=0 is currently pulled out in initialization；Initialization currently pulls out film situation
It is unsuccessful to pull out film；
C: detecting the test after plated film with element glass, if complying with standard, determines that board is debugged successfully, and execute step
Rapid i；If not being inconsistent standardization, judgement is current debugging failed, thens follow the steps d；
D: test is cleaned with element glass；
E: the test after cleaning is carried out to pull out film with element glass；Record currently pulls out film situation, and records and currently pull out film number M
=M+1；
F: judgement currently pulls out whether film number M meets condition M >=2, if satisfied, thening follow the steps g；If not satisfied, then holding
Row step h；
G: the test after film will be pulled out with element glass labeled as product element glass, a piece of new element glass is changed, as current
Board test element glass, re-execute the steps b；
H: with current board test element glass, it re-execute the steps b；
I: test is cleaned with element glass；
J: it carries out the element glass after cleaning in step i to pull out film, as product element glass.
Test is then carried out plated film with element glass, while initializing and currently pulling out film by setup test element glass first
Film situation is counted and pulls out, it is M=0 that film number is currently pulled out in initialization, and it is unsuccessful (N) to pull out film to pull out film situation, judgement board setting
The standard of good detection parameters carries out detection judgement with element glass to the test after plated film, determines that result meets, debug success, that
Test element glass at this time, can be cleaned, product element glass of then directly changing the line of production；If debugging failed, will survey
Film is pulled out in element glass cleaning on probation, and judges to pull out whether film number is more than or equal to 2, executes above-mentioned different step according to Different Results
Suddenly, successfully terminate to debugging.
As shown in fig. 6, a kind of debugging board 100 of filming equipment 200 is disclosed as another embodiment of the present invention,
Include:
Detection device 110 detects the test after 200 plated film of filming equipment with element glass；
Judgment means 120 obtain the testing result of detection device 110, judge according to preset standard testing result；
Film device 130 is pulled out, to being judged as that the test for not meeting preset standard carries out pulling out film with element glass in judgment means；Institute
Test after pulling out film is sent to filming equipment 200 with element glass to carry out plated film again by the film device 130 that pulls out stated.
It debugs and detection device 110 is set on board, mainly the test after filming equipment 200 is detected with element glass,
One is obtained after detection as a result, so being judged by obtained result with the preset standard in judgment means 120, after judgement
It will appear and meet or incongruent situation, then, when meeting, then our film device that pulls out does not need to carry out pulling out film again yet,
If not meeting, pull out film, it is described pull out film device 130 by the test after pulling out film with element glass be sent to filming equipment with into
Capable plated film again, repeatedly, it is known that test complies with standard.
In one embodiment, the debugging board further includes managing and control system 140, and the managing and control system 140 includes at least one
A field, record pull out film number or pull out film situation.Certain staff goes to check that report turns,
The element glass product of changing the line of production are that staff turns, and staff can go to check report, determine that it is some can turn,
Managing and control system 140 is in order to prevent personnel from occurring turning wrong situation and occur, and managing and control system 140 is operated by computer, no
A field is arranged in the case where will appear omission, this field, which can recorde, pulls out film number, also can recorde and pulls out film situation, all
It can be used as comparison reference.
Certainly, managing and control system 140 also may include two fields, and a record pulls out film situation, another record pulls out film
Number.
It should be noted that the restriction for each step being related in this programme, in the premise for not influencing concrete scheme implementation
Under, it does not regard as being can be the step of making restriction to step sequencing, write on front what is first carried out, be also possible to
It executes, is possibly even performed simultaneously afterwards, as long as this programme can be implemented, all shall be regarded as belonging to protection model of the invention
It encloses.
Technical solution of the present invention can be widely applied to various display panels, such as twisted nematic (Twisted
Nematic, TN) display panel, plane conversion type (In-Plane Switching, IPS) display panel, vertical orientation type
(Vertical Alignment, VA) display panel, more quadrant vertical orientation type (Multi-Domain Vertical
Alignment, MVA) display panel, it is of course also possible to be other kinds of display panel, such as Organic Light Emitting Diode
(Organic Light-Emitting Diode, OLED) display panel, applicable above scheme.
The above content is specific optional embodiment is combined, further detailed description of the invention, cannot recognize
Fixed specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
Without departing from the inventive concept of the premise, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to the present invention
Protection scope.
Claims (10)
1. a kind of adjustment method of filming equipment, which is characterized in that comprising steps of
A: setup test element glass；
B: test is subjected to plated film with element glass；
C: detecting the test after plated film with element glass, if complying with standard, determines that filming equipment is debugged successfully；If not meeting
Standard determines that filming equipment is debugging failed, executes step D；
D: the element glass after plated film is carried out to pull out film, filming equipment is debugged, B is re-execute the steps.
2. a kind of adjustment method of filming equipment as described in claim 1, which is characterized in that further include just in the step B
The step of beginningization currently pulls out film number M=0；
In the step D, further include the steps that record pulls out film number M=M+1；
It is further comprising the steps of after carrying out the step of pulling out film to the element glass after plated film in the step D:
E: judgement currently pulls out whether film number M meets the preset threshold of condition M >=first, if satisfied, thening follow the steps F；If discontented
Foot, thens follow the steps G；
F: the element glass after film will be pulled out labeled as product element glass, a piece of new element glass is changed, test and use as current board
Element glass re-execute the steps B；
G: with the test element glass of current filming equipment, it re-execute the steps B.
3. a kind of adjustment method of filming equipment as claimed in claim 2, which is characterized in that first preset threshold is equal to
2。
4. a kind of adjustment method of filming equipment as claimed in claim 3, which is characterized in that in the step B, including record
The step of pulling out film situation, the film situation of pulling out includes pulling out film success or to pull out film unsuccessful；
Wherein, initialization currently pull out film situation be it is unsuccessful, in step E, currently pulling out film number M, to meet condition M >=the first pre-
If threshold value, and pulling out film situation is when pulling out film success, to then follow the steps F；Otherwise, G is thened follow the steps.
5. a kind of adjustment method of filming equipment as claimed in claim 2, which is characterized in that in step F, used labeled as product
The glass of element glass, after placement is debugged successfully to filming equipment, the element glass as product processing.
6. a kind of adjustment method of filming equipment as described in claim 1, which is characterized in that
In the step B, further include the steps that film number M=0 is currently pulled out in initialization；
In the step D, further include the steps that record pulls out film number M=M+1；
It is further comprising the steps of after carrying out the step of pulling out film to the element glass after plated film in the step D:
E: judgement currently pulls out whether film number M meets condition M >=2, if satisfied, thening follow the steps F1；If not satisfied, then executing step
Rapid G；
F1: the test after film will be pulled out and execute step B again with element glass, step F2 is executed after executing the step B；
F2: executing step C, debug success if the detection in step C complies with standard, and uses element glass as product element test
Glass；It is debugging failed if the detection in step C is not inconsistent standardization, directly the element glass after plated film is scrapped, is changed a piece of new
Element glass re-execute the steps B as current board test element glass；
G: with current board test element glass, it re-execute the steps B.
7. a kind of adjustment method of filming equipment as described in claim 1, which is characterized in that in the step C, determine plated film
Step is also executed after equipment debugging success:
H: test is cleaned with element glass；
I: it carries out the element glass after cleaning in step H to pull out film, as product element glass.
8. a kind of adjustment method of filming equipment, which is characterized in that comprising steps of
A: setup test element glass；
B: test is subjected to plated film with element glass, film number M=0 is currently pulled out in initialization；It is to pull out film that film situation is currently pulled out in initialization
It is unsuccessful；
C: detecting the test after plated film with element glass, if complying with standard, determines that board is debugged successfully, and execute step i；
If not being inconsistent standardization, judgement is current debugging failed, thens follow the steps d；
D: test is cleaned with element glass；
E: the test after cleaning is carried out to pull out film with element glass；Record currently pulls out film situation, and records and currently pull out film number M=M+
1；
F: judgement currently pulls out whether film number M meets condition M >=2, if satisfied, thening follow the steps g；If not satisfied, then executing step
Rapid h；
G: the test after film will be pulled out with element glass labeled as product element glass, change a piece of new element glass, as current test
With element glass, it re-execute the steps b；
H: with current test element glass, it re-execute the steps b；
I: test is cleaned with element glass；
J: it carries out the element glass after cleaning in step h to pull out film, as product element glass.
9. a kind of debugging board of filming equipment characterized by comprising
Detection device detects the test after filming equipment plated film with element glass；
Judgment means obtain the testing result of detection device, judge according to preset standard testing result；
Film device is pulled out, to being judged as that the test for not meeting preset standard carries out pulling out film with element glass in judgment means；Described pulls out
Test after pulling out film is sent to filming equipment with element glass to carry out plated film again by film device.
10. a kind of debugging board of filming equipment as claimed in claim 9, which is characterized in that the debugging board further includes
Managing and control system, the managing and control system are recorded to pulling out film number or pulling out film situation in film device is pulled out, the managing and control system packet
At least one field is included, record pulls out film number or pulls out film situation.
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| CN201811540663.7A CN109612758B (en) | 2018-12-17 | 2018-12-17 | Debugging method and debugging machine platform of coating equipment |
| PCT/CN2019/123578 WO2020125449A1 (en) | 2018-12-17 | 2019-12-06 | Debugging method and debugging machine for coating apparatus |
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| WO2020125449A1 (en) * | 2018-12-17 | 2020-06-25 | 惠科股份有限公司 | Debugging method and debugging machine for coating apparatus |
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