CN109459816B - Silicon-based optical arbitrary waveform generation chip - Google Patents
Silicon-based optical arbitrary waveform generation chip Download PDFInfo
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- CN109459816B CN109459816B CN201811188615.6A CN201811188615A CN109459816B CN 109459816 B CN109459816 B CN 109459816B CN 201811188615 A CN201811188615 A CN 201811188615A CN 109459816 B CN109459816 B CN 109459816B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
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- H—ELECTRICITY
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
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Abstract
A silicon-based optical arbitrary waveform generation chip comprises an optical frequency comb generation module, a filtering module and an amplitude phase adjustment array module, wherein the optical frequency comb generation module is composed of an adjustable micro-ring resonator, the filtering module is composed of a cascade Mach-Zehnder interferometer, and the amplitude phase adjustment array module is composed of a feedback type array waveguide grating, an adjustable optical attenuator and a phase shifter. The invention can realize the generation of any waveform in the optical frequency domain, has the characteristics of small size, low loss, high stability and the like, and can play a key role in optical communication networks and systems.
Description
Technical Field
The invention belongs to the field of optical communication, and particularly relates to a silicon-based optical arbitrary waveform generating chip.
Background
With the rapid increase of modern communication network, computer network and other services, the data volume is increasing explosively, and people have higher requirements for bandwidth. To meet the increasing demand for information capacity, optical communication networks will remain the core of next generation networks. Due to the increasing capacity of optical communication, the next generation of all-optical networks put higher demands on active devices, especially light sources. The ultrashort pulse light source is one of the most active research subjects in the application fields of laser technology and high-speed optical communication at present, and has a huge application prospect. In practical applications, it is not only necessary to generate ultra-short light pulses with high quality, but also desirable that the shape of the pulses can be adjusted. Accordingly, optical arbitrary waveform generation techniques have attracted considerable interest and attention.
The optical arbitrary waveform generation is a technology for realizing the generation of an arbitrary waveform in an optical frequency range by controlling the amplitude and the phase of an optical pulse spectral line based on the Fourier synthesis principle. The technology plays a key role in the aspects of optical ultra-wideband signal generation, multi-channel wireless communication, large-capacity optical transmission, dispersion compensation of optical communication, testing of an optical communication system, laser detection and measurement and the like.
The optical arbitrary waveform generation mainly includes a time domain synthesis method and a spectrum operation method. Due to the lack of practical optical delay devices, time domain synthesis methods that use multiple delay lines to generate optical pulses are not commonly used. In the conventional optical arbitrary waveform generation technology, most frequency domain operation methods use devices such as bulk gratings, arrayed waveguide gratings, fiber bragg gratings and the like to introduce chromatic dispersion, and the chromatic dispersion and the spatial light modulator or the photoelectric modulator act together. The essence of this type of scheme is to control the amplitude and phase of each individual frequency component of the signal spectrum, and to obtain the desired optical arbitrary waveform by spectral synthesis. This requires an optical frequency comb to provide the frequency components of the signal spectrum, and then a pulse shaper is used to independently control the amplitude and phase of each spectral line in the spectrum, thereby achieving pulse shaping and generating arbitrary waveforms.
With the advent of mode-locked lasers, the stability of their spectral lines has then played a critical role in spectral measurement and phase control of the optical envelope. Mode-locked lasers can produce periodic ultrashort pulse sequences that appear in the frequency domain as a series of continuous spectral lines, i.e., an optical frequency comb. In recent years, it has been found that optical frequency combs can be generated by the nonlinear process of the continuous wave parametric oscillation of the micro-resonator, and the micro-resonator has the advantages of high integration and good frequency point alignment, and has attracted much attention in recent years. Nevertheless, there are still many technical problems in speed, power consumption, integration degree, etc. of the current optical arbitrary waveform generating system, and researchers are waiting to overcome the technical problems.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the silicon-based optical arbitrary waveform generation chip which has the characteristics of low loss, good stability, small volume, high integration level and the like, can play a key role in an optical communication system and a network, and has high application value.
In order to achieve the above object, the technical solution of the present invention is as follows:
a silicon-based optical arbitrary waveform generation chip is characterized by comprising an optical frequency comb generation module, a filtering module and an amplitude phase adjustment array module, wherein the optical frequency comb generation module comprises a silicon nitride adjustable micro-ring resonator, the filtering module comprises a broadband rectangular filter formed by a cascade Mach-Zehnder interferometer, the amplitude phase adjustment array module comprises a feedback type array waveguide grating, N groups of adjustable optical attenuators (VOA) and Phase Shifters (PS), and N is a positive integer more than 1.
The adjustable micro-ring filter of the optical frequency comb generation module is manufactured on the basis of a silicon nitride material, generates an optical frequency comb by utilizing the nonlinear Kerr effect of the silicon nitride, and realizes the tuning of the wavelength of the optical frequency comb by thermo-optic modulation according to the thermo-optic effect of the silicon nitride material.
The filtering module adopts a broadband rectangular filter based on a cascade Mach-Zehnder structure, and the filter selects N wavelengths at equal intervals from an optical frequency comb, wherein N is a positive integer more than 1.
The amplitude phase adjusting array module comprises a feedback type array waveguide grating and N groups of variable optical attenuators and phase shifters, wherein the feedback type array waveguide grating is a multi-wavelength splitter and a multi-wavelength multiplexer. Each group of the variable optical attenuators and the phase shifters are connected with a corresponding feedback delay line of the feedback type array waveguide grating and used for realizing the adjustment of the amplitude and the phase of the optical signals with N different wavelengths.
The optical signal input/output of the optical frequency comb generation module and the amplitude phase adjustment array module adopts a horizontal coupling or vertical coupling mode to realize the connection between an external signal and the planar optical waveguide. The horizontal coupling is realized by a lens and an inverted cone-shaped spot size converter on a chip, and the vertical coupling is realized by a planar optical fiber and a grating coupler on the chip.
Compared with the prior art, the invention has the following beneficial effects:
1. all the devices corresponding to different functional modules can be respectively integrated on one chip, the chip has small size, high integration level, low power consumption and high stability, is compatible with a CMOS (complementary metal oxide semiconductor) process, and is beneficial to reducing the cost and carrying out large-scale production.
2. The invention uses the cascade Mach-Zehnder structure to form the broadband rectangular filter to realize the filtering function. The structure has the advantages of large bandwidth, flat pass band, low loss and the like.
3. The invention uses feedback array waveguide grating, variable optical attenuator and phase shifter to form amplitude phase adjusting array module, in which, the optical signals with different wavelengths are corresponding to a group of variable optical attenuator and phase shifter respectively to realize independent control of amplitude and phase of optical signals with different wavelengths. In addition, the feedback type array waveguide grating is simultaneously used as a multi-wavelength separator and a multi-wavelength multiplexer, and errors caused by wavelength shift in the wavelength separation process are eliminated.
Drawings
Fig. 1 is an overall schematic diagram of a silicon-based optical arbitrary waveform generation chip of the present invention.
Fig. 2 is a structure of a broadband rectangular filter of the silicon-based optical arbitrary waveform generation chip of the present invention.
Fig. 3 is a schematic structural diagram of each submodule of the broadband rectangular filter of the silicon-based optical arbitrary waveform generation chip of the present invention.
Fig. 4 is a schematic structural diagram of an amplitude phase adjustment array module of the silicon-based optical arbitrary waveform generation chip of the present invention.
Detailed Description
To further clarify the objects, technical solutions and core advantages of the present invention, the following detailed description of the present invention is provided with reference to the accompanying drawings. The present embodiment is implemented on the premise of the technical solution of the present invention, and a detailed implementation manner and operation procedure are given, but the scope of the present invention is not limited to the following embodiments.
Fig. 1 is an overall schematic diagram of a silicon-based optical arbitrary waveform generation chip of the present invention. As shown in fig. 1, the silicon-based optical arbitrary waveform generating chip of the present invention is divided into three parts according to functional characteristics: an optical frequency comb generation module 101, a filtering module 102 and an amplitude phase adjustment array module 103.
An optical signal with a single frequency is input from a silicon nitride waveguide, and first passes through an optical frequency comb generation module 101 composed of a silicon nitride tunable micro-ring resonator and a straight waveguide. After an optical signal with a single frequency passes through the micro-ring resonator, when the input optical power is higher than the nonlinear kerr effect threshold power, a series of resonance peaks with certain wavelength intervals, namely an optical frequency comb, are generated at the output end. It should be noted here that in order to obtain an optical frequency comb satisfying the conditions, the microring resonator is required to have a high Q value, which has high requirements on loss control of the microring, coupling pitch design, and the like. In the process of generating the optical frequency comb, the effective refractive index of the silicon nitride waveguide can be changed by utilizing the thermo-optic effect of the silicon nitride material and adjusting the applied voltage of the micro heater in the silicon nitride waveguide, so that the resonance wavelength of the micro-ring resonator is changed, and the wavelength of the optical frequency comb is adjusted.
Then, the optical frequency comb generated by the micro-ring resonator enters the filtering module 102 for filtering. In this module, a wide-band rectangular filter composed of a cascade of mach-zehnder interferometers selects N wavelengths at equal intervals from an optical frequency comb, and outputs optical signals of the N wavelengths as input signals to the next module. Here, in order to accurately select the optical frequency comb of N wavelengths and minimize the influence of the filtering process on the optical signal, the filter needs to have a flat passband, a sufficiently wide bandwidth, and an insertion loss as small as possible, and the sufficiently wide passband bandwidth is obtained by adjusting the arm length difference of the mach-zehnder interferometer. The smaller the difference in arm length between the two arms, the greater the bandwidth obtained.
Then, the optical signal with N wavelengths selected by the filtering module enters the amplitude and phase adjustment array module 103 and first enters the array waveguide grating for the first transmission. The optical signals of different wavelengths will then be split into N paths, each path being connected to a set of adjustable optical attenuators and phase shifters. The variable optical attenuator can adjust the amplitude of the optical signal and the phase shifter can adjust the phase of the optical signal. By adjusting the applied voltage of each group of variable optical attenuators and phase shifters, the amplitude and phase of each optical signal can be independently adjusted, so that the optical signals with different wavelengths respectively reach the required states. After passing through the variable optical attenuator and the phase shifter, the optical signals with different wavelengths enter the arrayed waveguide grating again for transmission, and are finally synthesized into a path of signal, and the path of signal is output from the output end of the module to obtain the optical frequency comb with the amplitude and the phase adjusted. And finally, observing through a photoelectric detector and an oscilloscope to realize the generation of optical arbitrary waveforms.
The amplitude-frequency response diagram above the device structure shown in fig. 1 may more intuitively reflect the function of each module. First, a single-frequency optical signal having a wavelength λ 0 is input from an input terminal, and passes through the optical frequency comb generation module 101 to become an optical frequency comb having a plurality of wavelengths. Then, the filtering module 102 selects N wavelengths from the optical frequency comb and inputs them to the amplitude phase adjustment array module 103. In the amplitude and phase adjustment array module 103, the amplitudes and phases of the optical signals with different wavelengths can be independently adjusted, so as to realize the generation of optical arbitrary waveforms.
In addition to the above description, the filter module 102 has the structure shown in fig. 2 and 3. In this structure, there are three different types of filtering sub-modules, 102_1, 102_2, and 102_3, and these three types of sub-modules constitute a binary tree type filter structure, as shown in fig. 2. The whole filtering module 102 has 8 output terminals, and one of the output terminals is selected as the output terminal of the module 102. The different types of submodules have different functions and different specific structures. Fig. 3 shows the specific structure of different types of sub-modules. Suppose that the optical frequency combs generated by the optical frequency comb generation module have 8 × N wavelengths in common. The first-stage filter submodule 102_1 is used to reduce the number of wavelengths of the input optical frequency comb by half, that is, each path of output of the first-stage filter submodule 102_1 is an optical frequency comb with 4 × N wavelengths. Then, the second-stage filtering submodule 102_2 halves the number of wavelengths in the optical frequency comb output by the first-stage filtering submodule 102_1 to 2 × N. Then, the third-stage filtering submodule 102_3 halves the number of optical frequency comb wavelengths output by the second-stage filtering submodule 102_2 to N, and finally outputs the N, where N is a positive integer. The specific structure of each different sub-module is shown in fig. 3, a first-stage filtering sub-module 102_1 is formed by cascading 3 unequal-arm MZIs, the filtering curve has a flat passband, the intervals between passbands are small, and a stop band has strong suppression on signals, so that the first-stage filtering sub-module is obtained; the second-stage filtering submodule 102_2 is formed by cascading 2 unequal-arm MZIs, the interval of filter curve passbands of the second-stage filtering submodule is twice as large as that of the first-stage filtering submodule 102_1, the passbands are still relatively flat, and the second-stage filtering submodule is used as a second-stage filtering submodule; the third-stage filter submodule 102_3 only includes 1 unequal arm MZI. After the optical frequency comb is processed by the first two stages of filtering sub-modules, the interval between the wavelengths becomes relatively large, and the third stage of filtering sub-module 102_3 with the shape of the filtering curve being a periodic trigonometric function is used for filtering, which is enough to separate the optical signals of the adjacent wavelengths. In order to make the output of the filtering module 102 capable of accommodating N wavelengths, we require that the filtering module 102 have a sufficiently wide passband bandwidth. This can be achieved by adjusting the arm length difference of the mach-zehnder interferometer, the smaller the arm length difference of the two arms, the larger the resulting bandwidth.
On the basis of the above description, the amplitude and phase adjustment array module 103 adopts the specific structure shown in fig. 4, and the amplitude and phase adjustment array module 103 includes a feedback type arrayed waveguide grating, N sets of variable optical attenuators VOA and a phase shifter PS, where a dashed frame part is the feedback type arrayed waveguide grating, and an optical frequency comb containing N wavelengths is transmitted in the arrayed waveguide grating first after entering the amplitude and phase adjustment array module 103. Then, the optical signals with different wavelengths are divided into N paths, each path is connected with a group of adjustable optical attenuators VOA and phase shifters PS, and the amplitude and the phase of the optical signals with different wavelengths are independently adjusted. After passing through the variable optical attenuator and the phase shifter, the optical signals enter the array waveguide grating again for transmission, and are finally synthesized into a path of signal for output, so that an optical frequency comb with the amplitude and the phase of each wavelength point adjusted is obtained, and the generation of optical arbitrary waveforms is realized. In the case of fig. 4, the optical frequency comb first enters the arrayed waveguide grating from the input end on the left side for transmission. When an optical signal reaches the 2 nd slab waveguide from the 1 st slab waveguide for the first time, the optical signals with different wavelengths enter different feedback delay lines for transmission, and each feedback delay line is connected with a group of adjustable optical attenuators and phase shifters and used for independently adjusting the amplitude and the phase of each optical signal. After the amplitude and phase of the optical signals with different wavelengths are adjusted, the N optical signals enter the arrayed waveguide grating again for transmission, and are combined into one path of light when reaching the 2 nd slab waveguide from the 1 st slab waveguide for the second time, and the one path of light is output from the output end.
In summary, the silicon-based optical arbitrary waveform generation chip realized according to the invention can realize the generation of arbitrary waveforms in the optical frequency domain, has the characteristics of small size, high integration level, low loss, good stability and the like, and can play a key role in optical communication networks and systems.
Finally, it should be noted that the above-mentioned embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention, and those skilled in the art should understand that the present invention. Any modification, equivalent replacement or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A silicon-based optical arbitrary waveform generation chip is characterized by comprising an integrated optical frequency comb generation module (101), a filtering module (102) and an amplitude phase adjustment array module (103), wherein the optical frequency comb generation module (101) comprises an input waveguide, a silicon nitride thermo-optic tunable micro-ring resonator and an output waveguide, the filtering module (102) is a broadband rectangular filter formed by cascading Mach-Zehnder interferometers (MZIs), and sequentially comprises a first filtering submodule (102_1), a second filtering submodule (102_2) and a third filtering submodule (102_3), the amplitude phase adjustment array module (103) comprises a feedback type array waveguide grating, N groups of tunable optical attenuators (VOA) and a Phase Shifter (PS), wherein N is a positive integer of more than 1, a single-frequency signal light enters the silicon nitride thermo-optic tunable micro-ring resonator through the input waveguide to generate an optical frequency comb, the optical frequency comb enters the filter module (102) through the output waveguide, N wavelengths are selected from the optical frequency comb sequentially through the first filter submodule (102_1), the second filter submodule (102_2) and the third filter submodule (102_3), and the N wavelengths enter the amplitude combThe phase adjusting array module (103) is firstly transmitted in the array waveguide grating, then optical signals with different wavelengths are divided into N paths, and each path (i) is connected with a group of adjustable optical attenuators (VOA)i) And a Phase Shifter (PS)i) And finally, synthesizing the optical signals into a path of signal output to obtain an optical frequency comb with the amplitude and the phase of each wavelength adjusted, and realizing the output of optical arbitrary waveforms.
2. The silicon-based optical arbitrary waveform generation chip of claim 1, wherein the thermo-optically tunable micro-ring resonator of the optical frequency comb generation module (101) is fabricated based on a silicon nitride material.
3. The silicon-based optical arbitrary waveform generating chip according to claim 1, wherein the filtering module 102 has a passband bandwidth wide enough to be implemented by adjusting an arm length difference of the mach-zehnder interferometer, and the smaller the arm length difference of the two arms is, the larger the obtained bandwidth is.
4. The silicon-based optical arbitrary waveform generation chip according to claim 1, wherein the feedback-type arrayed waveguide grating of the amplitude-phase adjustment array module (103) can perform both a wavelength division function and a wavelength combination function, and each set of the variable optical attenuator and the phase shifter is connected to a corresponding feedback delay line of the feedback-type arrayed waveguide grating for adjusting the amplitude and the phase of the optical signals with N different wavelengths.
5. The silicon-based optical arbitrary waveform generation chip according to claim 1, wherein the optical signal input/output of the optical frequency comb generation module (101) and the amplitude phase adjustment array module (103) is connected between an external signal and the planar optical waveguide by using a horizontal coupling or a vertical coupling, the horizontal coupling is realized by using a lens and an inverted cone-shaped spot-size converter on the chip, and the vertical coupling is realized by using a planar optical fiber and a grating coupler on the chip.
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| CN110277724B (en) * | 2019-06-25 | 2021-01-08 | 中国人民解放军军事科学院国防科技创新研究院 | Adjustable high-repetition-frequency single-cavity double-phase-dry optical frequency comb light source |
| CN110720052A (en) * | 2019-07-19 | 2020-01-21 | 深圳市速腾聚创科技有限公司 | Phased array transmitting device, laser radar and automatic driving equipment |
| CN111313970B (en) * | 2020-02-24 | 2021-03-26 | 中国科学院半导体研究所 | Arbitrary waveform generating device of integrated chip |
| CN114609725B (en) * | 2020-12-08 | 2024-01-05 | 军事科学院系统工程研究院网络信息研究所 | Ultra-narrow band filtering method based on micro-detuning cascade filter |
| CN113093329A (en) * | 2021-04-06 | 2021-07-09 | 联合微电子中心有限责任公司 | Array waveguide grating and calibration system and calibration method thereof |
| CN114397261A (en) * | 2021-12-16 | 2022-04-26 | 光子集成(温州)创新研究院 | Fourier infrared spectrometer and application thereof |
| CN114089475B (en) * | 2022-01-11 | 2022-05-03 | 之江实验室 | Quasi-distributed fiber Bragg grating demodulation chip and bearing equipment |
| CN114895502B (en) * | 2022-04-26 | 2023-03-21 | 东南大学 | Repetition frequency large-range adjustable silicon nitride micro-optical comb array based on optical switch switching network |
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