CN109387460A - A kind of observation of pollution particle and test device and analysis method - Google Patents
A kind of observation of pollution particle and test device and analysis method Download PDFInfo
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- CN109387460A CN109387460A CN201710692969.3A CN201710692969A CN109387460A CN 109387460 A CN109387460 A CN 109387460A CN 201710692969 A CN201710692969 A CN 201710692969A CN 109387460 A CN109387460 A CN 109387460A
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- 239000002245 particle Substances 0.000 title claims abstract description 39
- 238000012360 testing method Methods 0.000 title claims abstract description 29
- 238000004458 analytical method Methods 0.000 title claims abstract description 9
- 230000010287 polarization Effects 0.000 claims abstract description 40
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 238000009825 accumulation Methods 0.000 claims abstract description 19
- 238000005286 illumination Methods 0.000 claims abstract description 14
- 230000013011 mating Effects 0.000 claims abstract description 10
- 238000012634 optical imaging Methods 0.000 claims abstract description 9
- 238000012545 processing Methods 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 238000003384 imaging method Methods 0.000 claims description 16
- 239000013528 metallic particle Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000007787 solid Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 8
- 238000011109 contamination Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 abstract description 4
- 239000000243 solution Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
- G01N15/0227—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging using imaging, e.g. a projected image of suspension; using holography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G01N15/075—
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0092—Monitoring flocculation or agglomeration
Abstract
The present invention relates to a kind of observation of pollution particle and test devices and analysis method, device includes: optical imaging apparatus, lighting apparatus, polarization device, positioning device, detection device, processing display equipment, fixed equipment, motive power outputting apparatus, and polarization device includes electronics adjustment equipment.Lighting apparatus illuminates at least part of particle accumulation object; form illumination measured zone; it illuminates and is equipped with filter in measured zone; polarization device includes optical polarization mating plate and optical analyzer; optical analyzer is located at the front end of the lens barrel of reflected light stereoscope; positioning device moves in the illumination measured zone of particle accumulation object according to grid.The present invention can reduce the secondary pollution probability of test process, and entire observation and test process are realized by automation, reduce the testing time, improve the reproducibility of measurement result and reduce artificial contamination's probability.
Description
Technical field
The present invention relates to surface pollution degree the field of test technology in kind more particularly to a kind of observations of pollution particle and test
Device and analysis method.
Background technique
In automobile manufacture, aviation, precision machinery, semiconductors manufacture, food processing, health care or medicine and other fields,
For understanding demand day of the technical cleannes of the component of the susceptible dust in surface, device, product, workpiece or contact surface
Benefit increases, such as in car steering field, more and more needs clearly to understand fuel injection system, brake system, liquid system
Or the particle contamination degree of the individual components and the complex assemblies produced on this basis of micromation and performance reinforcement.Generally
Since the surface of tested sample is too huge or since complex-shaped, surface is rugged and rough leads to not use direct method
It observes and tests, the method that generallys use at this time is the dust for removing surface by adhesive membrane or cleaning solution, in cleaning solution
Or filter residue or test analysis being carried out according to particle size, distribution and chemical attribute on adhesive membrane, the above method can reduce survey
The secondary pollution probability of examination process.In order to reduce the testing time, improving the reproducibility of measurement result and reduce artificial contamination
Probability, entire observation and test process are realized preferably by automation.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of observation of pollution particle and test devices and analysis method, with solution
Deficiency certainly in the prior art.
In order to achieve the above object, the purpose of the present invention is be achieved through the following technical solutions:
On the one hand, a kind of observation of pollution particle and test device are provided, comprising:
The particle accumulation object being distributed in planar structure is imaged in optical imaging apparatus, including reflected light solid is aobvious
Micro mirror and LED annular light source, the reflected light stereoscope are configured with digital CCD camera, the LED annular light source difference
Positioned at the lens barrel two sides of the reflected light stereoscope；
Lighting apparatus illuminates at least part of the particle accumulation object, forms illumination measured zone, the photograph
Filter is equipped in bright measured zone；
Polarization device, including optical polarization mating plate and optical analyzer, it is vertical that the optical analyzer is located at the reflected light
The front end of the microscopical lens barrel of body；
Positioning device moves in the illumination measured zone of the particle accumulation object according to grid；
Detection device is received and is assessed by the imaging of the optical imaging apparatus in illumination measured zone described in each
Data；
Processing display equipment, including PC machine and display, the PC machine are separately connected the digital CCD camera and described
Positioning device；
Fixed equipment, including frame, the frame are the rectangle frame of a side opening, and the LED annular light source is located at described
In rectangle frame, the illuminating bundle that the LED annular light source issues is projected from the opening of the rectangle frame；
Motive power outputting apparatus, including servo motor, the display, the PC machine, the servo motor and the frame
It is sequentially connected；Wherein,
The polarization device includes electronics adjustment equipment, and the optical polarization mating plate and the optical analyzer pass through respectively
Electronics adjustment equipment realizes that the relative position between one first polarization position and one second polarization position adjusts, the optics at
As equipment generates the image of the particle accumulation object on the first polarization position and second polarization position respectively.
Above-mentioned pollution particle observation and test device, wherein the optical polarization mating plate is positioned at the LED annular light source
Polarizing coating in the illuminating bundle of sending, the position of the polarizing coating is by electronics adjustment equipment adjustment.
Above-mentioned pollution particle observation and test device, wherein the positioning device is polyaxial controller.
Above-mentioned pollution particle observation and test device, wherein the lighting apparatus includes autofocus system.
Compared with the prior art, the beneficial effects of the present invention are:
The secondary pollution probability of test process can be reduced, entire observation and test process are realized by automation, are reduced and are surveyed
The time is tried, the reproducibility of measurement result is improved and reduces artificial contamination's probability.
Detailed description of the invention
The attached drawing for constituting a part of the invention is used to provide further understanding of the present invention, schematic reality of the invention
It applies example and its explanation is used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 shows the structural schematic diagram of present invention pollution particle observation and test device；
Fig. 2 shows the flow diagrams of pollution grading analysis method of the invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
Refering to what is shown in Fig. 1, the present invention pollute particle observation and test device include optical imaging apparatus, lighting apparatus, partially
Shake equipment, positioning device, detection device, processing display equipment, fixed equipment and motive power outputting apparatus, wherein optical imaging apparatus
The particle accumulation object being distributed in planar structure is imaged, including reflected light stereoscope 1 and LED annular light source 3, it is right
The particle accumulation object being distributed in planar structure is imaged, including reflected light stereoscope and LED annular light source, reflected light
Stereoscope 1 is configured with digital CCD camera 2, and LED annular light source 3 is located at the lens barrel two of reflected light stereoscope 1
Side.Lighting apparatus illuminates at least part of particle accumulation object, forms illumination measured zone 4, illuminates in measured zone 4
Equipped with filter 5.Polarization device includes optical polarization mating plate and optical analyzer 6, and it is aobvious that optical analyzer 6 is located at reflected light solid
The front end of the lens barrel of micro mirror 1.Positioning device moves in the illumination measured zone of particle accumulation object according to grid.Detection device connects
It receives and assesses by the imaging data of the optical imaging apparatus in each illumination measured zone 4.Processing display equipment includes PC machine 7
With display 8, PC machine 7 is separately connected digital CCD camera 2 and positioning device.Fixed equipment includes frame 9, and frame 9 is side
The rectangle frame of opening, LED annular light source 3 are located in rectangle frame, and the illuminating bundle 10 that LED annular light source 3 issues is from rectangle frame
Opening projects.Motive power outputting apparatus includes servo motor 11, and display 8, PC machine 7, servo motor 11 and frame 9 successively connect
It connects.Polarization device includes electronics adjustment equipment, and optical polarization mating plate and optical analyzer adjust equipment by electronics respectively and realize
Relative position between one first polarization position and one second polarization position adjusts, and optical imaging apparatus generates the first polarization position respectively
With the image of the particle accumulation object on the second polarization position.In the technical program, optical polarization mating plate is positioned at LED annular light source 3
Polarizing coating 12 in the illuminating bundle of sending, by electronics adjustment equipment adjustment, positioning device is polyaxial for the position of polarizing coating 12
Controller 13, the arrow 14 in figure have marked the moving direction of polyaxial controller 13, and lighting apparatus includes automatic focuses
System.With continued reference to diagram, filter 5 is placed on micro slide 15, and the field range of reflected light stereoscope 1 is in 1X1mm2
To 5X5mm2Between, filter 5 is that diameter is 26mm or the circle of 50mm.
Referring to shown in Fig. 2, the invention further relates to a kind of pollution grading analysis methods, based on such as the pollution of above-mentioned any one
Grain observation and test device are realized, comprising:
At least part of particle accumulation object is illuminated in a planar substrate；
It is imaged according to be illuminated illumination measured zone of the grid for the particle accumulation object；
The imaging data got from measured zone is assessed based on particle characteristics, and metal is covered in each measured zone
Imaging under the light irradiation of first polarization position of grain reflection forms First Series imaging data, without covering metallic particles reflection
Second polarization position light irradiation under imaging form second series imaging data, First Series imaging data and second series
Imaging data is compared to each other to detect metallic particles, and metallic particles is based on quantity and size is assessed, the first polarization position and the
Two polarization positions are set by using electronics adjustment equipment adjustment polarization device.
From above-described embodiment as can be seen that present invention has an advantage that
The secondary pollution probability of test process can be reduced, entire observation and test process are realized by automation, are reduced and are surveyed
The time is tried, the reproducibility of measurement result is improved and reduces artificial contamination's probability.
Specific embodiments of the present invention are described in detail above, but the present invention is not restricted to tool described above
Body embodiment, it is merely an example.To those skilled in the art, any equivalent modifications and substitution are also all in the present invention
Scope among.Therefore, made equal transformation and modification without departing from the spirit and scope of the invention, should all cover
In the scope of the present invention.
Claims (5)
1. a kind of pollution particle observation and test device characterized by comprising
The particle accumulation object being distributed in planar structure is imaged in optical imaging apparatus, including reflected light stereoscope
With LED annular light source, the reflected light stereoscope is configured with digital CCD camera, and the LED annular light source is located at
The lens barrel two sides of the reflected light stereoscope；
Lighting apparatus illuminates at least part of the particle accumulation object, forms illumination measured zone, and the illumination is surveyed
It measures and is equipped with filter in region；
Polarization device, including optical polarization mating plate and optical analyzer, it is aobvious that the optical analyzer is located at the reflected light solid
The front end of the lens barrel of micro mirror；
Positioning device moves in the illumination measured zone of the particle accumulation object according to grid；
Detection device is received and is assessed by the imaging number of the optical imaging apparatus in illumination measured zone described in each
According to；
Processing display equipment, including PC machine and display, the PC machine are separately connected the digital CCD camera and the positioning
Equipment；
Fixed equipment, including frame, the frame are the rectangle frame of a side opening, and the LED annular light source is located at the rectangle
In frame, the illuminating bundle that the LED annular light source issues is projected from the opening of the rectangle frame；
Motive power outputting apparatus, including servo motor, the display, the PC machine, the servo motor and the frame are successively
Connection；Wherein,
The polarization device includes electronics adjustment equipment, and the optical polarization mating plate and the optical analyzer pass through described respectively
Electronics adjusts equipment and realizes that the relative position between one first polarization position and one second polarization position adjusts, and the optical imagery is set
Back-up does not generate the image of the first polarization position and the particle accumulation object on second polarization position.
2. the observation of pollution particle and test device according to claim 1, which is characterized in that the optical polarization mating plate is position
The position of polarizing coating in the illuminating bundle that the LED annular light source issues, the polarizing coating adjusts equipment by the electronics
Adjustment.
3. the observation of pollution particle and test device according to claim 2, which is characterized in that the positioning device is polyaxial
Controller.
4. the observation of pollution particle and test device according to claim 1, which is characterized in that the lighting apparatus includes automatic
Focusing system.
5. a kind of pollution grading analysis method, which is characterized in that based on the pollution as described in any one of Claims 1-4
Particle observation and test device are realized, comprising:
At least part of particle accumulation object is illuminated in a planar substrate；
It is imaged according to be illuminated illumination measured zone of the grid for the particle accumulation object；
The imaging data got from measured zone is assessed based on particle characteristics, and it is anti-that metallic particles is covered in each measured zone
The imaging that the light irradiation for the first polarization position penetrated is lower forms First Series imaging data, without cover that metallic particles reflects the
Imaging under the light irradiation of two polarization positions forms second series imaging data, and First Series imaging data and second series are imaged
Data are compared to each other to detect metallic particles, and metallic particles is based on quantity and size is assessed, and the first polarization position and second is partially
Vibration position is set by using electronics adjustment equipment adjustment polarization device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710692969.3A CN109387460A (en) | 2017-08-14 | 2017-08-14 | A kind of observation of pollution particle and test device and analysis method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710692969.3A CN109387460A (en) | 2017-08-14 | 2017-08-14 | A kind of observation of pollution particle and test device and analysis method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109387460A true CN109387460A (en) | 2019-02-26 |
Family
ID=65416847
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710692969.3A Pending CN109387460A (en) | 2017-08-14 | 2017-08-14 | A kind of observation of pollution particle and test device and analysis method |
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| Country | Link |
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| CN (1) | CN109387460A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110744213A (en) * | 2019-10-30 | 2020-02-04 | 中国航空制造技术研究院 | In-situ monitoring device and method for pollution of welding laser head protective lens |
| CN112578245A (en) * | 2020-12-09 | 2021-03-30 | 广西电网有限责任公司电力科学研究院 | GIS disconnecting link air chamber fault diagnosis method and device based on optical technology |
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| CN112578245A (en) * | 2020-12-09 | 2021-03-30 | 广西电网有限责任公司电力科学研究院 | GIS disconnecting link air chamber fault diagnosis method and device based on optical technology |
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Effective date of registration: 20221221 Address after: No. 9, Lianxin Road, Taicang City, Suzhou City, Jiangsu Province 215488 Applicant after: Yuemei Measurement System (China) Co.,Ltd. Address before: 201807 Room 1011, 1013, 1015, Building A, No. 1355, Chengbei Road, Industrial Zone, Jiading District, Shanghai Applicant before: JOMESA MEASUREMENT SYSTEM (SHANGHAI) CO.,LTD. |