CN109358462B - Automatic focusing method and system - Google Patents
Automatic focusing method and system Download PDFInfo
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- CN109358462B CN109358462B CN201811307074.4A CN201811307074A CN109358462B CN 109358462 B CN109358462 B CN 109358462B CN 201811307074 A CN201811307074 A CN 201811307074A CN 109358462 B CN109358462 B CN 109358462B
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- 238000000034 method Methods 0.000 title claims abstract description 42
- 230000003287 optical effect Effects 0.000 claims abstract description 45
- 239000013307 optical fiber Substances 0.000 claims abstract description 33
- 230000008569 process Effects 0.000 claims description 11
- 230000009471 action Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 2
- 239000013598 vector Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005457 optimization Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/32—Means for focusing
- G03B13/34—Power focusing
- G03B13/36—Autofocus systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
Abstract
The invention discloses an automatic focusing system, which comprises a low-coherence light source, an optical fiber coupler, a reference arm optical path system, a sample arm optical path system, a computer processing terminal and a photoelectric detector, wherein the reference arm optical path system comprises a first collimating mirror and a reflecting mirror, the first collimating mirror is connected with the reflecting mirror through light, the sample arm optical path system comprises a camera, a second collimating mirror, a half-reflecting mirror and a flat-field focusing mirror, the second collimating mirror is connected with the flat-field focusing mirror through a reflecting surface of the half-reflecting mirror, and the camera is used for receiving the transmitted light of the half-reflecting mirror; the invention designs a quick and accurate automatic focusing method and system based on the Michelson interferometer principle, the focusing spatial resolution can reach micron level, the linear array optical path scanning can be realized quickly and continuously by using a linear motion reference arm optical path system, the influence from the external environment is very small, the method and the system can be normally used in various bright and dark light environments, and the practicability is high.
Description
Technical Field
The invention relates to the technical field of camera focusing, in particular to an automatic focusing method and system.
Background
The existing automatic focusing methods of cameras mainly comprise three types: the first is phase focusing, and by detecting the light quantity information of objects in a scene and comparing the positions of waveforms output by a sensor under the out-of-focus and focusing conditions, automatic focusing is realized. The related patent is CN103852955A, CN105549301A. The method has higher requirements on the light of the environment, and the focusing effect can be greatly reduced in the low-light environment. The second is contrast focus, which is a method based on image processing. Through the movement of the lens group in one-dimensional direction, the pixel sensor can comprehensively detect the longitudinal direction of the whole scene. The position of the focus can be found out by comparing the contrast of each image and finding out the position with the maximum contrast. The working mode of contrast focusing needs to move the camera lens group back and forth once and record all image information to finish one focusing, so that the time is long and the quick focusing can not be realized. The third is laser focusing, the related patent has CN106054495A, the focusing speed of the method is slow, the focusing step is complex, and the quick automatic focusing can not be realized.
Patent CN106054495a proposes a focusing method and device, which determines whether the laser needs to rotate and move by judging whether the focusing target is located in the current detection module of the laser. Although the method can perform automatic focusing, the focusing process is complex, the control system is complex, and quick focusing cannot be realized.
Patent CN103852955a discloses a device for achieving phase focusing. The device comprises a lens group, an image sensor, an image processing unit and a shielding device. When light propagates forwards, part of the light is blocked by the blocking device, part of the light is received by the image sensor, the relative positions of the image and the focusing image are obtained after the processing of the processing unit, so that the moving direction of the lens group is determined, and the focusing device is controlled to complete automatic focusing. The device can realize automatic focusing, but is greatly influenced by environmental factors, and once the external environment is insufficient in light, the signal received by the image sensor is weaker, so that the focusing effect is influenced.
Patent CN105549301a discloses a control method for focusing of an imaging device. According to the method, a focusing motor is controlled to drive a focusing lens to run for corresponding time according to the time corresponding to the left and right waveform phase difference output by a phase detection pixel, and the steps are repeated until the focusing of a camera is completed. The method has certain feasibility, but the focusing time is too long, and the focusing work can not be completed quickly.
Important problems that cannot be solved by the above method are: the camera needs long time for focusing, has specific requirements on environmental factors, and can not meet the higher shooting requirements of various occasions on focusing precision and focusing speed. Thus, there are significant shortcomings in the art, and improvements are needed.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a rapid and accurate automatic focusing system which is not influenced by shooting ambient light.
The invention solves the technical problems as follows:
the system comprises a low-coherence light source, an optical fiber coupler, a reference arm optical path system, a sample arm optical path system, a computer processing terminal and a photoelectric detector, wherein the reference arm optical path system comprises a first collimating mirror and a reflecting mirror, the first collimating mirror is connected with the reflecting mirror through light, the sample arm optical path system comprises a camera, a second collimating mirror, a half-reflecting semi-transparent mirror and a flat-field focusing mirror, the second collimating mirror is connected with the flat-field focusing mirror through a reflecting surface of the half-reflecting semi-transparent mirror, the half-reflecting semi-transparent mirror reflects emergent light of the second collimating mirror at an incident angle of 45 degrees and reflects the emergent light into the flat-field focusing mirror, the camera is used for receiving transmitted light of the half-reflecting semi-transparent mirror, the optical fiber coupler is connected with the low-coherence light source, the first collimating mirror, the second collimating mirror and the photoelectric detector through optical fibers, and the photoelectric detector is connected with the computer processing terminal;
the method comprises the steps that a light beam emitted by a low-coherence light source enters an optical fiber coupler, the light beam is divided into a first light beam and a second light beam according to a light splitting ratio of 10:90, the first light beam enters a first collimating mirror, and the second light beam enters a second collimating mirror;
the photoelectric detector is used for capturing interference signal peaks generated in the optical fiber coupler, converting the interference signal peaks into electric signals and transmitting the electric signals to the computer processing terminal;
the computer processing terminal processes the electric signals according to the Michelson interferometer interference principle, and adjusts the focal length of the camera according to the processing result.
Further, an acquisition card is arranged between the photoelectric detector and the computer processing terminal, and the acquisition card is used for converting the electric signal output by the photoelectric detector into a digital signal and transmitting the digital signal to the computer processing terminal.
Further, the model of the acquisition card is NI-PCI5122.
A method of auto-focusing comprising the steps of:
initializing an automatic focusing system, and placing a sample on an object side of a flat field focusing lens;
the light beam emitted by the low-coherence light source is transmitted through the optical fiber coupler according to the following ratio of 10: a split ratio of 90 into a first beam and a second beam;
the first light beam is collimated and parallel by the first collimating mirror, then is emitted to the reflecting mirror, the reflecting mirror moves linearly to enable the propagation optical path of the first light beam to change linearly, and the first light beam is reflected by the reflecting mirror and returns to the optical fiber coupler with the optical path reference information primary path;
the second light beam is collimated and parallel by the second collimating lens and then is emitted to the half-reflecting half-lens, the half-reflecting half-lens reflects the second light beam to the flat field focusing lens for focusing, the focused second light beam contacts with the sample and is reflected on the surface of the sample, part of the reflected light returns to the optical fiber coupler along the original path, and the other part of the reflected light enters the CCD photosensitive device of the camera;
the first light beam and the second light beam returned to the optical fiber coupler interfere to generate interference signal peaks;
the photoelectric detector captures interference signal peaks and converts the interference signal peaks into electric signals to be transmitted to the computer processing terminal;
the computer processing terminal processes the electric signal according to the interference principle of the Michelson interferometer to obtain the distance between the sample and the flat field focusing lens;
and adjusting the focal length of the camera lens according to the distance between the sample and the flat field focusing lens, so that the image plane coincides with the position of the CCD photosensitive device.
Further, the method for linearly changing the propagation optical path of the first light beam includes: the distance between the mirror and the first collimating mirror is linearly varied.
The beneficial effects of the invention are as follows: the invention designs a quick and accurate automatic focusing method and system based on the Michelson interferometer principle, the focusing spatial resolution can reach micron level, the linear array optical path scanning can be realized quickly and continuously by using a linear motion reference arm optical path system, the influence from the external environment is very small, the method and the system can be normally used in various bright and dark light environments, and the practicability is high.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that are required to be used in the description of the embodiments will be briefly described below. It is evident that the drawings described are only some embodiments of the invention, but not all embodiments, and that other designs and drawings can be obtained from these drawings by a person skilled in the art without inventive effort.
FIG. 1 is an overall block diagram of the present invention;
fig. 2 is a flow chart of the operation of the present invention.
Detailed Description
The conception, specific structure, and technical effects produced by the present invention will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present invention. It is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments, and that other embodiments obtained by those skilled in the art without inventive effort are within the scope of the present invention based on the embodiments of the present invention. In addition, all connection relationships mentioned herein do not refer to direct connection of the components, but rather, refer to a connection structure that may be better formed by adding or subtracting connection aids depending on the particular implementation. The technical features in the invention can be interactively combined on the premise of no contradiction and conflict.
Embodiment 1, referring to fig. 1, an automatic focusing system comprises a low coherence light source 1, an optical fiber coupler 2, a reference arm optical path system 3, a sample arm optical path system 7, a computer processing terminal 12 and a photoelectric detector 13, wherein the reference arm optical path system 3 comprises a first collimating mirror 4 and a reflecting mirror 5, the first collimating mirror 4 and the reflecting mirror 5 are connected through light rays, the sample arm optical path system 7 comprises a camera 11, a second collimating mirror 8, a half-reflecting half-mirror 9 and a flat-field focusing mirror 10, the second collimating mirror 8 is connected with the flat-field focusing mirror 10 through the reflecting surface of the half-reflecting half-mirror 9, the half-reflecting half-mirror 9 reflects the emergent light of the second collimating mirror 8 at an incident angle of 45 DEG and reflects the emergent light into the flat-field focusing mirror 10, the camera 11 is used for receiving the transmitted light of the half-reflecting half-mirror 9, the optical fiber coupler 2 is respectively connected with the low coherence light source 1, the first collimating mirror 4, the second collimating mirror 8 and the photoelectric detector 13 through optical fibers, and the photoelectric detector 13 is connected with the computer processing terminal 12;
the light beam emitted by the low-coherence light source 1 enters the optical fiber coupler 2 and is divided into a first light beam and a second light beam according to the light splitting ratio of 10:90, wherein the first light beam enters the first collimating mirror 4, and the second light beam enters the second collimating mirror 8;
the photoelectric detector 13 is used for capturing interference signal peaks generated in the optical fiber coupler 2, converting the interference signal peaks into electric signals and transmitting the electric signals to the computer processing terminal 12;
the computer processing terminal 12 processes the electrical signals according to the michelson interferometer interference principle, and adjusts the focal length of the camera 11 according to the processing result.
As an optimization, an acquisition card is arranged between the photodetector 13 and the computer processing terminal 12, and the acquisition card is used for converting the electric signal output by the photodetector 13 into a digital signal and transmitting the digital signal to the computer processing terminal 12.
As optimization, the model of the acquisition card is NI-PCI5122.
The invention is based on the principle of Michelson interferometer:
let the electric field intensity of two light waves with the same frequency be respectively:
Y 1 ＝A 1 sin(ωt+Φ 1 )
Y 2 ＝A 2 sin(ωt+Φ 2 )
wherein A is 1 、A 2 Is of amplitude phi 1 、Φ 2 Is the phase.
The light intensity after superposition of the two beams of light is as follows:
wherein I is 1 、I 2 Is the light intensity of the two beams of light,namely, the interference term. When the phases of the two beams are the same, i.e. the phase difference ΔΦ=Φ 2 -Φ 1 Interference intensity is maximum when=0.
Because the detection light source is the low coherence light source 1, two beams of light from the reference arm light path system 3 and the sample arm light path system 7 interfere in the optical fiber coupler 2, the light intensity after interference is as follows:
wherein, a is 0 Is a direct current term, k i For wave vectors corresponding to different wavelengths of the light source, deltaz j A is the optical path difference between the light reflected back for different depths of the sample arm optical path system 7 and the light reflected back by the reference arm optical path system 3 ij Is k i 、△z j Corresponding intensity amplitude. It can be seen that only at zero optical path difference, an interference signal peak is generated, and then the signal intensity is rapidly attenuated toward both positive and negative sides.
The working process of the invention comprises the following steps:
the sample 14 is placed on the object side of the flat field focusing lens 10, the low coherence light source 1 emits laser to enter the optical fiber coupler 2, the light beam is divided into a first light beam and a second light beam according to the light splitting ratio of 10:90, the first light beam is collimated and parallel by the first collimating lens 4 and then is emitted to the reflecting lens 5, the reflecting lens 5 makes quick continuous linear motion along the incident direction of the light beam under the action of the motor 6, when the light beam is emitted to the reflecting lens 5, the transmitted optical path is changed linearly and reflected, and the light beam is reflected back to the optical fiber coupler 2 with the optical path reference information. The second light beam is collimated and parallel by the second collimating lens 8, then reflected by the half reflecting and half transmitting lens 9 to the flat field focusing lens 10 for focusing, the focused light beam is reflected by the surface of the sample 14, and part of the second light beam with the position information of the sample 14 returns to the light coupler along the original path, and the other part of the second light beam enters the CCD photosensitive device of the camera 11.
When the optical path of the first light beam with the optical path reference information is equal to the optical path of the second light beam with the position information of the sample 14, an interference signal is generated, the optical fiber coupler 2 sends the interference signal to the photoelectric detector 13, the photoelectric detector 13 amplifies and converts the interference light signal gain into a corresponding electric signal, the corresponding electric signal is transmitted to the computer processing terminal 12 through the acquisition card, the computer processing terminal 12 processes and calculates the electric signal by adopting the LabVIEW software to obtain the position information of the sample 14 in space, the direction and the distance of the position of the image surface relative to the position of the CCD photosensitive device are obtained, the focal length of the lens of the camera 11 is adjusted according to the obtained direction and distance, the position of the image surface and the CCD photosensitive device are overlapped, the automatic focusing action is completed, the sample 14 is shot by the camera 11, and if the next sample 14 needs to be shot, the sample 14 needs to be placed at the object side of the flat-field focusing lens 10, and the focusing action is repeated. If the shooting is completed, the computer processing terminal 12 saves the data and turns off the system, ending the focusing operation.
The invention designs a quick and accurate automatic focusing method and system based on the Michelson interferometer principle, the focusing spatial resolution can reach micron level, the linear array optical path scanning can be realized quickly and continuously by using the linear motion reference arm optical path system 3, the influence from the external environment is very small, the method and system can be normally used in various bright and dark light environments, and the practicability is high.
Referring to fig. 2, a method of auto-focusing includes the steps of:
initializing an automatic focusing system, and placing a sample 14 on the object side of the flat field focusing lens 10;
the light beam emitted by the low-coherence light source 1 passes through the optical fiber coupler 2 according to the following ratio of 10: a split ratio of 90 into a first beam and a second beam;
the first light beam is collimated and parallel by the first collimating mirror 4 and then is emitted to the reflecting mirror 5, the reflecting mirror 5 moves linearly to enable the propagation optical path of the first light beam to change linearly, and the first light beam is reflected by the reflecting mirror 5 and then returns to the optical fiber coupler 2 along with the optical path reference information original path;
the second light beam is collimated and parallel by the second collimating lens 8 and then is emitted to the half-reflecting and half-reflecting lens 9, the half-reflecting and half-reflecting lens 9 reflects the second light beam to the flat field focusing lens 10 for focusing, the focused second light beam contacts with the sample 14 and is reflected on the surface of the sample 14, part of the reflected light returns to the optical fiber coupler 2 along the original path, and the other part of the reflected light enters the CCD photosensitive device of the camera 11;
the first light beam and the second light beam returned to the optical fiber coupler 2 interfere to generate interference signal peaks;
the photoelectric detector 13 captures interference signal peaks and converts the interference signal peaks into electric signals to be transmitted to the computer processing terminal 12;
the computer processing terminal 12 processes the electric signal according to the interference principle of the Michelson interferometer to obtain the distance between the sample 14 and the flat field focusing lens 10;
and adjusting the focal length of the lens of the camera 11 according to the distance between the sample 14 and the flat field focusing lens 10 so that the image plane coincides with the position of the CCD photosensitive device.
As an optimization, the method for linearly changing the propagation optical path of the first light beam includes: the distance between the mirror 5 and the first collimating mirror 4 is linearly changed.
The mirror 5 is linearly and continuously moved in a straight line along the direction of incidence of the first light beam, which is directed to the moving mirror 5, and the optical path of propagation is linearly changed. The linear rectilinear motion of the reflecting mirror 5 is stable, which is beneficial to guaranteeing the stability of optical path scanning.
The method can automatically focus when shooting the sample 14, the detection laser in the focusing process can not influence the shooting quality, and the real-time and rapid focusing is realized by extracting the position information of the sample 14 by utilizing the interference signal, so that the spatial resolution reaches the micron level.
While the preferred embodiments of the present invention have been illustrated and described, the present invention is not limited to the embodiments, and various equivalent modifications and substitutions can be made by one skilled in the art without departing from the spirit of the present invention, and these are intended to be included in the scope of the present invention as defined in the appended claims.
Claims (3)
1. An auto-focusing method applied to an auto-focusing system, the system comprising:
the system comprises a low-coherence light source, an optical fiber coupler, a reference arm optical path system, a sample arm optical path system, a computer processing terminal and a photoelectric detector, wherein the reference arm optical path system comprises a first collimating mirror and a reflecting mirror, the first collimating mirror is connected with the reflecting mirror through light, the sample arm optical path system comprises a camera, a second collimating mirror, a half-reflecting semi-transparent mirror and a flat-field focusing mirror, the second collimating mirror is connected with the flat-field focusing mirror through a reflecting surface of the half-reflecting semi-transparent mirror, the half-reflecting semi-transparent mirror reflects emergent light of the second collimating mirror at an incident angle of 45 degrees and reflects the emergent light into the flat-field focusing mirror, the camera is used for receiving transmitted light of the half-reflecting semi-transparent mirror, the optical fiber coupler is connected with the low-coherence light source, the first collimating mirror, the second collimating mirror and the photoelectric detector through optical fibers, and the photoelectric detector is connected with the computer processing terminal;
the method comprises the steps that a light beam emitted by a low-coherence light source enters an optical fiber coupler, the light beam is divided into a first light beam and a second light beam according to a light splitting ratio of 10:90, the first light beam enters a first collimating mirror, and the second light beam enters a second collimating mirror;
the photoelectric detector is used for capturing interference signal peaks generated in the optical fiber coupler, converting the interference signal peaks into electric signals and transmitting the electric signals to the computer processing terminal;
the computer processing terminal processes the electric signals according to the Michelson interferometer interference principle, and adjusts the focal length of the camera according to the processing result;
the method comprises the following steps:
initializing an automatic focusing system, and placing a sample on an object side of a flat field focusing lens;
the light beam emitted by the low-coherence light source is transmitted through the optical fiber coupler according to the following ratio of 10: a split ratio of 90 into a first beam and a second beam;
the first light beam is collimated and parallel by the first collimating mirror, then is emitted to the reflecting mirror, the reflecting mirror moves linearly to enable the propagation optical path of the first light beam to change linearly, and the first light beam is reflected by the reflecting mirror and returns to the optical fiber coupler with the optical path reference information primary path;
the second light beam is collimated and parallel by the second collimating lens and then is emitted to the half-reflecting half-lens, the half-reflecting half-lens reflects the second light beam to the flat field focusing lens for focusing, the focused second light beam contacts with the sample and is reflected on the surface of the sample, part of the reflected light returns to the optical fiber coupler along the original path, and the other part of the reflected light enters the CCD photosensitive device of the camera;
the first light beam and the second light beam returned to the optical fiber coupler interfere to generate interference signal peaks;
the photoelectric detector captures interference signal peaks and converts the interference signal peaks into electric signals to be transmitted to the computer processing terminal;
the computer processing terminal processes the electric signal according to the interference principle of the Michelson interferometer to obtain the distance between the sample and the flat field focusing lens;
adjusting the focal length of a camera lens according to the distance between the sample and the flat field focusing lens so as to enable the image surface to coincide with the position of the CCD photosensitive device;
the computer processing terminal processes and calculates the electric signals by adopting a software LabVIEW to obtain the position information of the sample in the space, obtain the direction and the distance of the position of the image surface relative to the position of the CCD photosensitive device of the camera, and adjust the focal length of the lens of the camera according to the obtained direction and distance to enable the position of the image surface to coincide with the position of the CCD photosensitive device of the camera so as to complete the automatic focusing action;
based on michelson interferometer principle:
let the electric field intensity of two light waves with the same frequency be respectively:
Y 1 ＝A 1 sin(ωt+Φ 1 )
Y 2 ＝A 2 sin(ωt+Φ 2 )
wherein A1 and A2 are amplitudes, phi 1 and phi 2 are phases;
the light intensity after the superposition of the two beams of light is as follows;
wherein I1 and I2 are the light intensities of two beams of light,namely, an interference term; when the phases of the two beams are the same, i.e. the phase difference ΔΦ=Φ 2 -Φ 1 Interference intensity is maximum when=0;
two beams of light from the reference arm light path system and the sample arm light path system interfere in the optical fiber coupler, and the light intensity after interference is as follows:
wherein a 0 is a direct current item, ki is a wave vector corresponding to different wavelengths of a light source, deltazj is an optical path difference between light reflected back by different depths of a sample arm optical path system and light reflected back by a reference arm optical path system, and a ij is a light intensity amplitude corresponding to ki and Deltazj;
the method for linearly changing the propagation optical path of the first light beam comprises the following steps: the distance between the mirror and the first collimating mirror is linearly varied.
2. An auto-focusing method according to claim 1, characterized in that: and an acquisition card is arranged between the photoelectric detector and the computer processing terminal and is used for converting the electric signal output by the photoelectric detector into a digital signal and transmitting the digital signal to the computer processing terminal.
3. An auto-focusing method according to claim 2, characterized in that: the model of the acquisition card is NI-PCI5122.
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| CN110132897B (en) * | 2019-05-17 | 2022-04-22 | 中国科学院重庆绿色智能技术研究院 | Automatic focusing system and method for parallel optical coherence tomography equipment |
| CN110899988B (en) * | 2019-11-27 | 2021-04-23 | 佛山科学技术学院 | Laser marking focusing control method |
| CN112037753A (en) * | 2020-09-04 | 2020-12-04 | 东南大学 | Method and system for restoring sound in real time by using bulb |
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| CN103344646A (en) * | 2013-06-25 | 2013-10-09 | 中国人民解放军陆军军官学院 | Method for detecting damage of first wall of fusion reactor in real time based on optical coherence tomography |
| CN107728304A (en) * | 2017-10-24 | 2018-02-23 | 佛山科学技术学院 | A kind of multifocal frequency domain OCT self-adapting focusing devices and methods therefors |
| CN209055782U (en) * | 2018-11-05 | 2019-07-02 | 佛山科学技术学院 | A kind of system of auto-focusing |
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| IL148664A0 (en) * | 2002-03-13 | 2002-09-12 | Yeda Res & Dev | Auto-focusing method and device |
| CA2944688C (en) * | 2014-04-10 | 2022-07-26 | Thorlabs, Inc. | Autofocus system |
| JP6523871B2 (en) * | 2015-08-26 | 2019-06-05 | 株式会社日立エルジーデータストレージ | Optical measurement device |
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| CN103344646A (en) * | 2013-06-25 | 2013-10-09 | 中国人民解放军陆军军官学院 | Method for detecting damage of first wall of fusion reactor in real time based on optical coherence tomography |
| CN107728304A (en) * | 2017-10-24 | 2018-02-23 | 佛山科学技术学院 | A kind of multifocal frequency domain OCT self-adapting focusing devices and methods therefors |
| CN209055782U (en) * | 2018-11-05 | 2019-07-02 | 佛山科学技术学院 | A kind of system of auto-focusing |
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