CN108489609B - A kind of wide range bearing calibration of FTIR measurement photodetector response - Google Patents
A kind of wide range bearing calibration of FTIR measurement photodetector response Download PDFInfo
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- CN108489609B CN108489609B CN201810089435.6A CN201810089435A CN108489609B CN 108489609 B CN108489609 B CN 108489609B CN 201810089435 A CN201810089435 A CN 201810089435A CN 108489609 B CN108489609 B CN 108489609B
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- 230000004044 response Effects 0.000 title claims abstract description 63
- 238000005259 measurement Methods 0.000 title claims abstract description 23
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 title claims abstract description 11
- 238000001228 spectrum Methods 0.000 claims abstract description 62
- 230000003595 spectral effect Effects 0.000 claims abstract description 17
- 238000012937 correction Methods 0.000 claims description 16
- 238000004566 IR spectroscopy Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 17
- 238000001157 Fourier transform infrared spectrum Methods 0.000 abstract description 11
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- -1 Tungsten halogen Chemical class 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000005457 Black-body radiation Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
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Abstract
The invention discloses a kind of wide range bearing calibrations of FTIR measurement photodetector response, this method is using based on the pyroelectric detector with wide spectral range flat response as FTIR spectrum instrument standard configuration, it obtains the detector and amplifying circuit and the response under different scanning speed is combined to selected light and beam splitter, extract related data and fit the frequency response characteristic of the detector and amplifying circuit.It is corrected using the original output characteristics that this frequency response characteristic combines specific light source and beam splitter to get its actual output characteristics is arrived.Using this reality output characteristic after correcting as background spectrum, reference operation can be carried out to resulting photodetector original response spectrum is measured, the photodetector real response spectrum after being corrected.It is the standard configuration of FTIR spectrum instrument in view of pyroelectric detector and there is wide range response, thus the method is pervasive and wide range, different light sources and beam splitter combination suitable for various FTIR spectrum instrument.
Description
Technical field
The invention belongs to semiconductor optoelectronic spectral ranges, specially a kind of pervasive to Fourier transform infrared (FTIR) light
The method that spectrometer measurement gained photodetector response carries out broad spectral range correction.
Background technique
Semiconductor photo detector (PD) and its focal plane arrays (FPA) (FPA) device have important application in numerous areas, and
Its response spectrum is all extremely paid close attention in all these applications.Conventional PD or FPA has a continuous response wave length scope,
The size responded within this range can change namely responsiveness has a spatial distribution, this spatial distribution or response spectrum need
Be obtained through actual measurement, and with series of advantages Fourier transform infrared (FTIR) spectrometer have become measurement PD or
The preferred instrument of FPA device, especially in infrared band.
Although the detector optogalvanic spectra directly measured by FTIR spectrum instrument contains its spectral response information, but not
The real response spectrum of detector, and greatly differ from each other in many cases with real response spectrum, this is mainly due to instruments
The output characteristics (including light source and beam splitter and other component) of itself is not perfectly flat smooth, itself also there is a specific spectrum
Caused by distribution.To solve the problems, such as that referred to as computing equipment function correction method, standard detector also has been developed in people in this respect
The correlation-correcteds method such as correction method is transmitted, thus obtains the real response spectrum of detector.These all achieve certain effect,
But also there is also many problems.Such as: for computing equipment function correction method, infrared light supply is simulated using Formula of the blackbody radiation
Output, need to set a blackbody radiation temperature, such one side infrared light supply is not the ideal black-body of single temperature, and this
The setting of temperature is artificial rather than obtains by actual measurement that on the other hand the temperature of practical infrared light supply necessarily has one
Distribution, it is difficult to single temperature simulation；In addition, beam splitter response characteristic nor reality needed for computing equipment function correction method
It surveys, these all inevitably introduce certain error.For another example: the basis of standard detector transmitting correction method is based on the standard by calibration
Detector, therefore correcting range can only limit within the response range of this standard detector, different wave bands needs different
The continuous linking of standard detector, wave band is also had any problem, this makes application in many occasions all be very limited.Quantum type
During photodetector is still evolving, some devices with wide range response have also occurred, such as respond to visible light wave range
The InGaAs detector of expansion.Carrying out spectral response characterization to such broad spectrum device is exactly that must solve the problems, such as.
Summary of the invention
Based on problem mentioned above, innovative the proposing of the present invention provides a kind of pervasive to Fourier transform infrared
(FTIR) method that the response of photodetector obtained by spectrometer measurement carries out broad spectral range correction, can be realized to broadband range
Interior photodetector carries out spectral response correction.
Bearing calibration concrete operation step of the present invention are as follows:
1) selected light and beam splitter are combined in different scanning speed by measurement pyroelectric detector and amplifying circuit
Under response, then extract related data and fit the analytic frequency response characteristic of this detector and amplifying circuit；
2) pyroelectric detector that is obtained according to step 1) and amplifying circuit analytic frequency response characteristic to specific light source and
The original output characteristics of beam splitter combination is corrected, to obtain the FTIR spectrum instrument under this specific light source and beam splitter combination
Reality output characteristic namely real background spectrum；
3) according to step 2) obtain using this spectrometer reality output characteristic after correcting as background spectrum, to measurement institute
The original response spectrum of the photodetector obtained carries out reference operation, the photodetector real response light after correction can be obtained
Spectrum.
It is the standard configuration of FTIR spectrum instrument in view of pyroelectric detector and there is wide range response, thus the method can be applied to respectively
Kind of FTIR spectrum instrument, and be suitable for different light sources and the wide spectral region of beam splitter combined covering, thus be it is pervasive and
Wide range.To be suitble to middle infrared band, the standard configuration pyroelectric detector of FTIR spectrum instrument is existing often to be visited for the DTGS comprising KBr window
Device is surveyed, below with regard to abbreviation DTGS detector.DTGS detector is flat as a kind of thermal detector, the spectral response of itself
, it is unrelated with wavelength, and KBr window is also flat in the transmitance of entire middle infrared band and near-infrared and visible light wave range
Straight, therefore DTGS detector can consider and be in response to the device unrelated with wavelength, but its response is then straight with the frequency of optical signal
Connect correlation.
To further illustrate the present invention, Fig. 1 is shown under different scanning speed using DTGS detector and amplifying circuit
Original background spectrum of the FTIR spectrum instrument measured under specific light source and beam splitter combination, hollow square is subsequent fitting in figure
Selected data point.As seen from Figure 1, with the raising of scanning speed, by DTGS detector/amplifier combination under each wave number
The output measured all be reduce, and reality output should be it is constant, here it is the frequencies by DTGS detector and amplifying circuit
Caused by response.To the measurement result of Fig. 1, to cover wider frequency range, in the 9000cm-1 and 3000cm- of low frequency end
It is extracted relative response data on these wave number points of the 1 and 15000cm-1 of front end for being fitted, chooses this 3 wave numbers
Point has preferable representativeness, also avoids the error that absorption band of water vapor may cause.To the data of extraction using 9000cm-1 as base
Plinth makes itself and 9000cm-1 intermediate frequency model after the data of low frequency end 3000cm-1 and front end 15000cm-1 are carried out whole lifting
Data trend coincidence is enclosed, using Fourier frequency fF, linear relationship fF=2v ν between index glass scanning speed v and wave number ν is obtained
The data for fitting expanded to one group of low-and high-frequency end are as shown in Figure 2.Nonlinear fitting is used to obtain the final product to this group of data
To Analytic solving curve shown in Fig. 2, there can be good effect with better simply second order polynomial fit reciprocal.With Fig. 2 institute
The fitting function obtained can export (such as Fig. 1) to the instrument under a certain invisible scanning speed and be corrected, that is, do reference operation, i.e.,
The reality output characteristic namely real background spectrum of instrument can be obtained.
After obtaining the real background spectrum under a certain scanning speed, with this to the photoelectricity measured under this same scanning speed
Detector original spectrum does reference operation to get the photodetector real response spectrum after correction has been arrived, as shown in Figure 3.It is right
Routinely to be measured under wave number coordinate and operation for FTIR spectrum measurement, wave number coordinate be converted into wavelength coordinate still by
It is conventional to carry out.Sampling other methods are also shown in Fig. 3 and demarcate the i.e. so-called standard spectral data of detector response spectrum obtained
As a means of comparing.
The present invention has the advantages that
A. bearing calibration of the invention is all based on measured data, and unique assumed condition thinks pyroelectric detector
Response is unrelated with wavelength, this is also consistent with actual conditions, therefore can obtain good calibration result.
B. bearing calibration of the invention need to only carry out one group of survey to same spectrometer (the DTGS detector including its configuration)
Amount fitting is convenient to obtain the frequency response characteristic of required DTGS detector and amplifying circuit, instrumental correction step thereafter
Suddenly it is all based on the background spectrum that thus characteristic obtains, thus it is easy to operate.
C. the background spectrum after correcting also includes the interference such as water vapor absorption, therefore carries out reference with this and can substantially eliminate finally
Corresponding interference in response spectrum.
D. bearing calibration of the invention is applicable since its principle combines different light sources and beam splitter, is
Pervasive, wide wave-length coverage can be covered；
Detailed description of the invention
Fig. 1 is to be existed under different scanning speed using the FTIR spectrum instrument that DTGS detector and its mating amplifying circuit measure
Tungsten halogen lamp (white light) light source and the lower original background spectrum of quartzy beam splitter combination, hollow square is selected by subsequent fitting in figure
Data point.
Fig. 2 is the frequency using extracted data point is fitted from Fig. 1 DTGS detector and amplifying circuit
Rate response characteristic.
Fig. 3 is that the primary photoelectric current for the Si and InGaAs detector that measurement obtains composes (fine line) and uses present invention side
Detector real response spectrum (heavy line) after method correction；Figure orbicular spot thus the nominal data of two detectors namely for than
Compared with normal data, data have been carried out normalized in figure.
Specific embodiment
A specific embodiment of the invention is described in detail with reference to the accompanying drawing.
Embodiment 1: Wave scalable InGaAs detector
As shown in the lower part of Figure 3, the Wave scalable InGaAs detector of standard spectral data existing for one has carried out original
Optogalvanic spectra test, has carried out response spectrum correction using bearing calibration of the invention.The long wave cut-off wavelength of this device is about
2.5 μm, be positive entering light detector, and the response of shortwave end is expanded to visible light wave range, therefore it is (white that tungsten halogen lamp is used in measurement
Light) light source is combined with quartzy beam splitter, so that spectrometer has stronger shortwave to export, so that therefrom infrared shortwave end extremely may be used for covering
Light-exposed wide spectral range.Changing scanning speed first under fixed aperture, gain parameter, (such as 0.1581cm/s is extremely
Totally 7 grades of 1.8988cm/s) measure one group of original background spectrum (as shown in Figure 1), when measurement for guarantee the quality of data can be used compared with
More scanning times (such as 64 times)；Due to not containing fine spectral information generally for detector measurement, can be used lower
Resolution ratio (such as 16cm-1) to shorten time of measuring；Again with scanning constant speed (such as 0.4747cm/s, reality under identical conditions
Border can be selected as needed) measure this Wave scalable InGaAs device primary photoelectric current spectrum, then from this group of original background
Data needed for extracting in spectrum test data carry out the frequency characteristic fitting of DTGS detector and amplifying circuit, obtain its frequency spy
The analytic parameter of property.Reference operation is done to the original background spectrum under 0.4747cm/s scanning speed with this frequency characteristic and obtains reality
Border background spectrum, then do reference operation with the original response spectrum of this real background spectrum versus wavelength extension InGaAs device, i.e.,
The real response spectrum of device is obtained, is finally converted into wavelength coordinate to by the spectrum under wave number coordinate to get thick to the lower part Fig. 3
Real response spectrum after correction shown in line, filament is measurement gained original spectrum in figure, the standard spectrum of dot device thus,
For comparing.It should be noted the quality of data in the process so that operation can carry out and result is reliable, to front end (and low frequency end)
As instrument output it is too low caused by (such as 15770- near He-Ne laser wavelength inside low quality data and spectrometer
The section 15820cm-1) on bounce data can be truncated or be deleted.Since this spectrum test all pertains only to the opposite of response
Value, there is no need to the absolute figure of focused data, multiplication and division and normalization operation can be carried out at any time to facilitate data processing.
Embodiment 2:Si detector
As shown in the top Fig. 3, a Si detector of standard spectral data existing for one has carried out primary photoelectric current spectrum and has surveyed
Examination, has carried out response spectrum correction using bearing calibration of the invention.The long wave cut-off wavelength of this detector is about 1 μm of front
Entering light device, the response of shortwave end are expanded to visible light wave range, therefore still using tungsten halogen lamp (white light) light source and quartz point in measurement
Beam device combination, so that spectrometer has stronger shortwave to export.Change scanning speed first (such as under fixed aperture, gain parameter
0.1581cm/s to 1.8988cm/s7 grades) measure one group of original background spectrum (as shown in Figure 1), guarantee data matter when measurement
More scanning times (such as 64 times) can be used in amount；Due to not containing fine spectral information generally for detector measurement, because
This can be used lower resolution ratio (such as 16cm-1) to shorten time of measuring；Again under identical conditions with scanning constant speed (such as
0.4747cm/s actually can be selected as needed) the primary photoelectric current spectrum that measures this Si detector, then original back is organized from this
Data needed for extracting in scape spectrum test data carry out the frequency characteristic fitting of DTGS detector and amplifying circuit, obtain its frequency
The analytic parameter of characteristic (is noticed that this process is identical with embodiment 1, therefore need to only be carried out to same instrument primary such
Operation).Reference operation is done to the original background spectrum under 0.4747cm/s scanning speed with this frequency characteristic and obtains real background
Spectrum, then reference operation is done with original response spectrum of this real background spectrum to Si detector to get the reality of detector is arrived
Response spectrum is finally converted into wavelength coordinate to by the spectrum under wave number coordinate to get to after correcting shown in the thick line of the top Fig. 3
Real response spectrum, filament is measurement gained original spectrum in figure, the standard spectrum of dot device thus, for comparing.Herein
It should be noted the quality of data in the process so that operation can carry out and result is reliable, to front end (and low frequency end) since instrument exported
Inside low quality data caused by low and spectrometer near He-Ne laser wavelength on (such as section 15770-15820cm-1)
Bounce data can be truncated or be deleted.Since this spectrum test all pertains only to the relative value of response, there is no need to attention numbers
According to absolute figure, multiplication and division and normalization operation can carry out at any time to facilitate data processing.
Claims (1)
1. a kind of wide range bearing calibration of FTIR measurement photodetector response, the wide range bearing calibration is using as Fourier
Based on the pyroelectric detector with wide spectral range flat response of transform infrared spectroscopy instrument standard configuration, pass through practical survey
Then amount and the Fitting Calculation are obtained to be measured come background spectrum needed for obtaining tuning detector response spectrum using the background spectrum
The real response spectrum of photodetector；It is characterized in that the bearing calibration the following steps are included:
1) right under different scanning speed to selected light and beam splitter combination by measurement pyroelectric detector and amplifying circuit
Then the analytic frequency response spy that related data fits this detector and amplifying circuit is extracted in the response of spectral wavelength frequency
Property；
2) pyroelectric detector and amplifying circuit analytic frequency response characteristic obtained according to step 1) is to specific light source and beam splitting
The original output characteristics of device combination is corrected, to obtain the Fourier transform infrared under this specific light source and beam splitter combination
The reality output characteristic of spectrometer；
3) according to step 2) obtain using this spectrometer reality output characteristic after correcting as background spectrum, it is resulting to measuring
The original response spectrum of photodetector carries out reference operation, the photodetector real response spectrum after correction can be obtained.
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| CN109781259B (en) * | 2018-12-29 | 2020-05-19 | 华中科技大学 | Method for accurately measuring infrared spectrum of small aerial moving target through spectrum correlation |
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