CN108489596A - The quick vibration measuring method of continuous scanning laser and its system - Google Patents
The quick vibration measuring method of continuous scanning laser and its system Download PDFInfo
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- CN108489596A CN108489596A CN201810230921.5A CN201810230921A CN108489596A CN 108489596 A CN108489596 A CN 108489596A CN 201810230921 A CN201810230921 A CN 201810230921A CN 108489596 A CN108489596 A CN 108489596A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The invention discloses a kind of quick vibration measuring method of continuous scanning laser and its systems, wherein method, including:Step S1:A pair of of high-velocity scanning eyeglass, guiding measuring laser continuous scanning on testee surface is driven to go out a closed curve using continuation sinusoidal;Step S2:The vibration signal of laser and the lens position signal of the high-velocity scanning eyeglass are measured described in synchronization gain to obtain the vibration frequency of multiple measurement points on the closed curve path.System, including lasing light emitter, guiding measuring laser continuous scanning on testee surface goes out the high speed X Y scan eyeglasses of a closed curve, controller and processor under the driving of continuation sinusoidal.It solves the problems, such as that whole vibratory responses of body surface cannot be measured in a short time in the prior art.
Description
Technical field
The present invention relates to vibration detection technology field more particularly to a kind of combination laser doppler vibrometer and high-velocity scannings
The fast vibration measuring technique of galvanometer.
Background technology
The vibration information of mechanical equipment is commonly used for the operating status of assessment machinery, diagnostic machinery operation troubles or school
The computer simulation model of positive machinery.Therefore, accurately measuring the vibration information of mechanical equipment is particularly important.The measurement of vibration
Contact and contactless can be divided into.Contact measurement method needs vibrating sensor to be attached to object under test surface, but attached
The quality added often destroys the original vibrational state of testee, influences measurement accuracy.Therefore, contact measurement method is uncomfortable
Close the vibration for measuring thin-walled, lightweight object.In addition, the measurement method of contact needs to install when measuring large surface object
Sensor array, hardware cost and installation cost greatly improve.
In contactless vibration measurement, laser doppler vibrometer is to be set in recent years using more non-contact measurement
It is standby, high certainty of measurement, not by limitations such as the size of testee, temperature and vibration frequencies.It is a pair of by controlling signal driving
It is oriented to eyeglass (high-speed response scan mirror, Galvanometer Scanner, Cambridge Technology, model
6240HM40A), it might even be possible to guide laser to carry out scanning successively point by point on testee, realize shaking for whole object surface
It is dynamic to measure, to save the hardware and installation cost of touch sensor, significantly reduce the vibration-testing time.It is especially novel
Infrared laser Doppler vibrometer, there is very high signal-to-noise ratio, the optical characteristics of body surface is required to be greatly reduced.Example
Such as, using Submillineter Wave Technology Doppler vibrometer, wind-powered engine blade vibration that can be static in hundreds of meters of external pelivimetries, substantially
Reduce testing cost.Compared with traditional touch sensor, this point-by-point vibration measurement method scanned successively has very big
Advantage, but still have certain limitation.For example, wind-powered engine blade or collision impact under being encouraged for wind
Under bodywork surface need to measure body surface in a short period of time because the duration of excitation is short and can not repeat
Whole vibratory responses.Therefore there is the shortcomings that whole vibratory responses that cannot measure body surface in a short time.
Invention content
In view of this, a kind of quick vibration measuring method of continuous scanning laser of offer of the embodiment of the present invention and its system, solution is never
The problem of whole vibratory responses of body surface can be measured in a short time.
In a first aspect, an embodiment of the present invention provides a kind of quick vibration measuring methods of continuous scanning laser, including:
Step S1:A pair of of high-velocity scanning eyeglass is driven using continuation sinusoidal, guiding measuring laser is in measured object body surface
Continuous scanning goes out a closed curve on face;
Step S2:The lens position signal of the vibration signal and the high-velocity scanning eyeglass of laser is measured described in synchronization gain
To obtain the vibration frequency of multiple measurement points on the closed curve path.
A kind of specific implementation according to the ... of the embodiment of the present invention, the step S2 are specifically included:
Step S21:The eyeglass position of the laser vibrometer signal and the high-velocity scanning eyeglass of laser is measured described in synchronization gain
Confidence number;
Step S22:Resampling is carried out to the laser vibrometer signal, to ensure within the same laser scanning period,
There is integer measurement point on scan path;Using with to the identical sample frequency of the laser vibrometer signal sampling frequencies to institute
It states lens position signal and carries out resampling, the vibration information to ensure measurement point is consistent with its position, to be measured
The vibration information of point;
Step S23:Fourier transformation is carried out to the vibration information of the measurement point, to obtain the vibration of the measurement point
Amplitude, frequency in information and phase information;
Step S24:To the frequency and phase letter in the vibration information of the measurement point obtained after Fourier transformation
It ceases into line distortion reparation.
A kind of specific implementation according to the ... of the embodiment of the present invention, in the step S22 to the laser vibrometer signal into
Row resampling and resampling is carried out using in the interpolation algorithm or frequency domain in time domain to the lens position signal
zero-padding。
A kind of specific implementation according to the ... of the embodiment of the present invention is believed the vibration of the measurement point in the step S24
Frequency information in breath is specially into line distortion reparation:
Frequency information in the vibration information of the measurement point obtained after being fourier transformed in step S23 is rolled over
Folded process reverse is realized.
A kind of specific implementation according to the ... of the embodiment of the present invention, the folding process are specially:
First:ωnWithFor symmetry axis, folding has obtained ωn1;
Then:Due to ωn1< 0, ωn1It is symmetry axis with 0, folding has obtained ωn2;
Finally:Due toωn2WithFor symmetry axis, folding has obtained ωn3;
Wherein:ωnFor n-th order frequency of natural vibration, ωsTo measure the scan frequency of laser.
A kind of specific implementation according to the ... of the embodiment of the present invention is believed the vibration of the measurement point in the step S24
Phase information in breath is specially into line distortion reparation:
Measure the time delay of two neighboring measurement point, and according to the delay time of measurement by the phase of next measurement point
It is moved along.
A kind of specific implementation according to the ... of the embodiment of the present invention further includes before the step S21:It is surveyed by single point laser
Measure the step of surface of testee is to obtain testee accurate natural frequency range.
A kind of specific implementation according to the ... of the embodiment of the present invention, in the step S1, the high-velocity scanning eyeglass is swept
It retouches frequency and is no more than 200 hertz.
A kind of specific implementation according to the ... of the embodiment of the present invention, the scanning angle of the high-velocity scanning eyeglass ± 5 ° with
Under.
Second aspect, a kind of quick vibration measuring system of continuous scanning laser of the embodiment of the present invention, including:
Lasing light emitter, emission measurement laser to high speed X-Y scan mirrors;
High speed X-Y scan mirrors:Guiding measuring laser connects on testee surface under the driving of continuation sinusoidal
It is continuous to scan a closed curve;
Controller:It sends continuation sinusoidal and drives high speed X-Y scan mirrors, and receive the vibration signal of lasing light emitter, from
And obtain the lens position signal of the vibration signal and the high-velocity scanning eyeglass for measuring laser;
Processor:To the eyeglass position of the vibration signal and the high-velocity scanning eyeglass of the measurement laser of controller acquisition
Confidence number is handled to obtain the vibration frequency of multiple measurement points.
The device of the invention and method have the advantages that as is evident below compared with prior art:
1, using continuous signal, high-velocity scanning eyeglass is driven, high speed continuous scanning, passes through signal on testee surface
Processing can construct hundreds and thousands of virtual vibrating sensors on laser beam scan path, to measure laser scanning road simultaneously
Vibration information on diameter, to meet the time requirement of vibration-testing, the whole vibrations for measuring body surface in a short time are rung
It answers.
2, the scan frequency of high-velocity scanning eyeglass is limited in 200 hertz hereinafter, reducing the nonlinear response of eyeglass to surveying
The influence of accuracy of measurement.
3, the scanning angle of high-velocity scanning eyeglass is controlled at ± 5 ° hereinafter, closed curve is allow to cover testee surface
It is some or all of.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this field
For those of ordinary skill, without creative efforts, other attached drawings are can also be obtained according to these attached drawings.
Fig. 1 is the flow chart of the quick vibration measuring method of continuous scanning laser provided in an embodiment of the present invention;
Fig. 2 is that the quick vibration measuring method of continuous scanning laser provided in an embodiment of the present invention obtains on the closed curve path
The flow chart of the vibration frequency of multiple measurement points;
Fig. 3 is the measurement result schematic diagram provided in an embodiment of the present invention using the quick vibration measuring method of continuous scanning laser;
Fig. 4 is frequency folding schematic diagram during frequency distortion provided in an embodiment of the present invention is repaired;
Fig. 5 is a kind of structural schematic diagram of the quick vibration measuring system of continuous scanning laser provided in an embodiment of the present invention;
Fig. 6 is at a kind of X-Y scan mirrors of the quick vibration measuring system of continuous scanning laser provided in an embodiment of the present invention
Enlarged structure schematic diagram.
Specific implementation mode
The embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.
It will be appreciated that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained without creative efforts it is all its
Its embodiment, shall fall within the protection scope of the present invention.
Referring to Fig. 1, an embodiment of the present invention provides a kind of quick vibration measuring methods of continuous scanning laser, which is characterized in that packet
It includes:
Step S1:A pair of of high-velocity scanning eyeglass is driven using continuation sinusoidal, guiding measuring laser is in measured object body surface
Continuous scanning goes out a closed curve on face;
Step S2:Synchronization gain measures the vibration signal of laser and the lens position signal of high-velocity scanning eyeglass to obtain
The vibration frequency of multiple measurement points on closed curve path.
High speed scan mirror of the present invention uses X-Y scan mirrors, and the frequency of the drive signal of X-Y scan mirrors is than necessary
For integer, to ensure that laser beam scan path is a closed curve, (i.e. laser is per second scans through the frequency of laser scanning at this time
The number of whole closed curve) it is identical with the smaller value of frequency in the drive signal of X-Y scan mirrors.It, can based on this precondition
So that laser is repeated as many times the vibration information on scan path, in conjunction with the output position signal of X-Y scan mirrors, by specific
Signal processing module can get the vibration information of all the points on laser beam scan path.
As an alternative embodiment, as shown in Fig. 2, step S2 is specifically included:
Step S21:Synchronization gain measures the lens position signal of the laser vibrometer signal and high-velocity scanning eyeglass of laser;
Because the frequency ratio of the drive signal of X-Y scan mirrors is integer, therefore the scan path of laser is a closing
Curve (such as ellipse in Fig. 3), at this time laser be necessarily repeated as many times the identical measurement point being scanned through on path and (such as scheme
A points on 3).
Step S22:Resampling is carried out to laser vibrometer signal sweeping to ensure within the same laser scanning period
Retouching on path has integer measurement point;Lens position is believed using with to laser vibrometer signal sampling frequencies identical sample frequency
Number carry out resampling, the vibration information to ensure measurement point is consistent with its position, to obtain the vibration information of measurement point;
Because the ratio of the sample frequency and laser scanning frequency when laser vibrometer signal measurement is not necessarily integral multiple, because
This needs to have laser vibrometer signal progress resampling on scan path to ensure within the same laser scanning period
Integer measurement point (several measurement points on elliptical path as shown in Figure 3), meanwhile, lens position signal should also be used same
The sample frequency of sample carries out resampling, and the vibration information to ensure measurement point is consistent with its position.To lens position signal
The method for carrying out resampling with laser vibrometer signal can be the interpolation in time domain, can also be the zero- in frequency domain
padding.Integer measurement point is can get after sampling within each laser scanning period (to be equivalent to and pacify on laser beam scan path
Several virtual-sensors are filled, each measurement point is a virtual-sensor).Due to laser by these measurement points when
Between known (eyeglass signal time t21, t22, t23 ... in such as Fig. 3), so as to be obtained from continuous laser vibrometer signal
These time points vibration information, that is, the vibration information in the measurement point that measures of virtual-sensor.
Step S23:Fourier transformation is carried out to the vibration information of measurement point, to obtain in the vibration information of measurement point
Amplitude, frequency and phase information;Time-domain signal is transformed to frequency-region signal, carries out signal analysis.In each measurement point, because
Laser each scan period is just by primary, therefore the vibration sample frequency of each measurement point is equal to laser scanning frequency.
Step S24:To in the vibration information of the measurement point obtained after Fourier transformation frequency and phase information into
Line distortion reparation.
It is specially into line distortion reparation to the frequency information in the vibration information of measurement point:Obtain each phase in the same time
The vibration information of all measurement points on lower laser beam scan path, and the vibration information of each measurement point includes amplitude, frequency and phase
Three parameters in position, the amplitude of vibration directly can be measured accurately by Fourier transformation, but the vibration sampling frequency of each measurement point
Rate may be unsatisfactory for aromatic theorem condition (i.e. signal sampling frequencies should be more than or equal to testee highest natural frequency twice),
Therefore there may be frequency distortions, it is necessary to be repaired to the vibration frequency distortion of measurement point.Frequency distortion repair process is such as
Under:If laser scanning frequency is ωs, since each measurement point each scan period only measures once, the vibration of each measurement point
Sample frequency is exactly laser scanning frequencies omegas.According to aromatic sampling thheorem, all frequency of natural vibration information of measurand are all
It can be folded within the scope of 1/2 sample frequencyAs shown in figure 4, n-th order frequency of natural vibration ωnIt is folded to
ωn3 Specific folding process is as follows, the first step, ωnWithFor symmetry axis, frequency has been folded to ωn1.The
Two steps, due to ωn1< 0, ωn1It is symmetry axis with 0, has folded into ωn2.Third walks, due toωn2WithFor
Symmetry axis has folded into ωn3.And ωn3It can be obtained by the frequency-region signal in Fourier transformation.Therefore in known testee
Accurate and natural frequency range under the premise of, measured object can be recovered by carrying out reverse to above-mentioned folding process
The indeed vibrations frequency of bulk measurement point completes the reparation of frequency.
Further, since measuring sequence is sequentially measured each measurement point along scan path, two neighboring measurement point it
Between there are fixed time of measuring is poor, therefore to obtain the vibration of all measurement points on laser beam scan path at the same time
Information, it is necessary to which the vibration phase distortion of measurement point is repaired.To the phase in the vibration information of measurement point in step S24
Position information be specially into line distortion reparation:
Known to time interval due to laser Jing Guo two neighboring measurement point and fix (when being laser vibrometer signal measurement
Sampling period), therefore phase reparation can directly use the two neighboring measurement point of laser measurement time delay, will be next
The phase of measurement point is moved along, until the phase adjustment of all measurement points is consistent, is equivalent to virtual-sensor and is measured at the same time
The reparation of phase is completed in the vibration of testee.
After overfrequency and the processing of phase repair module, it can obtain under a large amount of same times and sweep in a short period of time
Retouch the signal of (even more) virtual vibrating sensors hundreds of on path, result and the indeed vibrations sensor measurement of measurement
Result it is consistent, time and the cost of installation is greatly saved.
As an alternative embodiment, further including before step S21:The surface of testee is measured by single point laser
With the step of obtaining testee accurate natural frequency range.After obtaining the accurate prosperous right frequency range of object, then to swashing
Light vibration signal and lens position signal are handled, to obtain the vibration frequency of testee.
As an alternative embodiment, in step S1, the scan frequency of high-velocity scanning eyeglass is no more than 200 hertz.
As an alternative embodiment, the scanning angle of high-velocity scanning eyeglass is at ± 5 ° or less.
Referring to Fig. 5, an embodiment of the present invention provides a kind of quick vibration measuring systems of continuous scanning laser, including:
Lasing light emitter, emission measurement laser to high speed X-Y scan mirrors;
High speed X-Y scan mirrors:Guiding measuring laser connects on testee surface under the driving of continuation sinusoidal
It is continuous to scan a closed curve;
Controller:It sends continuation sinusoidal and drives high speed X-Y scan mirrors, and receive the vibration signal of lasing light emitter, from
And obtain the lens position signal of the vibration signal and the high-velocity scanning eyeglass for measuring laser;
Processor:To the eyeglass position of the vibration signal and the high-velocity scanning eyeglass of the measurement laser of controller acquisition
Confidence number is handled to obtain the vibration frequency of multiple measurement points.Processor uses computer in the technical program, also may be used
With using server or with the chip of computing function.Lasing light emitter:Using laser doppler vibrometer.
A pair of high speed X-Y scan mirrors (high-speed response scan mirror, Galvanometer are utilized in the present invention
Scanner, Cambridge Technology, model 6240HM40A), guiding laser on testee continuous scanning it is same
When, measure the vibration information on laser beam scan path.Laser doppler vibrometer can be that the single-point of any model and wavelength is more
General Le vialog, such as visible laser, OFV-505 or the non-visible laser such as RSV-150 of German polytec.Lens set is installed
When, the spacing for reducing lasing light emitter and X-Y scan mirror groups to the greatest extent is needed, ensures that (X is scanned with first group of eyeglass in laser light incident direction
Eyeglass) rotation axis is vertical, and laser point is on the rotation axis of first group of eyeglass, while first group of eyeglass rotation axis and
Two groups of eyeglass (Y scan eyeglass) rotation axis are spatially vertical.Adjust the incident direction of laser, it is ensured that laser is through first group of mirror
After piece reflection, laser point is fallen on the rotation axis of second group of eyeglass, as shown in Figure 6.The purpose installed in this way is to reduce laser
The surface vibration of the high-velocity scanning eyeglass measured.Because of the eyeglass speed letter that laser point closer to rotation axis, measures
Number just it is smaller.
Eyeglass and rotary shaft are connected, and drive rotary shaft and the eyeglass being connected with rotary shaft to complete to rotate by drive signal
Movement, drive signal must be sinusoidal signal (DC direct current signals are considered as the special case of sinusoidal signal, at this time the frequency of signal be 0),
The amplitude of sinusoidal signal determines the angle limit value of the reciprocally swinging of rotary shaft, and the angle limit value of the bigger swing of amplitude is also more
Greatly, the frequency of sinusoidal signal determines the frequency of rotary shaft reciprocally swinging, and the frequency of the higher swing of frequency is also higher, works as drive signal
Frequency when being 0 (be direct current signal) eyeglass do not rotate (i.e. remains stationary), the position of eyeglass is depending on drive signal at this time
Amplitude.Such as, if it is desired to the image of scanning is straight line, then the drive signal of first group of eyeglass is sinusoidal signal (frequency
It is not that 0), the drive signal of second group of eyeglass is the sinusoidal signal (DC direct current signals) that frequency is 0, by adjusting first group of eyeglass
The frequency and amplitude of drive signal can adjust the length and reciprocating frequence of scanned straight lines, be driven by adjusting second group of eyeglass
The amplitude of signal can adjust position of the straight line on testee.If the image for wanting scanning is an ellipse, two groups of mirrors
The frequency of piece drive signal is identical but amplitude is different, by adjusting the amplitude and phase of drive signal, can adjust elliptical big
Small and direction, to cover body surface as possible.Similarly, it by adjusting the ratio of the driving signal frequency of eyeglass, can obtain more
Add complicated figure.For example, if the frequency of X scan mirrors is three times of Y scan eyeglass, clover leaf pattern can be obtained.If
It is a closed curve to make laser beam scan path, then must assure that the frequency ratio of the drive signal of two eyeglasses is integer
(as shown in figure 3, X scan mirrors are identical as the frequency of Y scan eyeglass at this time, but amplitude is different, and closed figure is ellipse at this time).
To within same sweep time, more pendulous frequencies are obtained on scan path, two eyeglasses can be adjusted simultaneously
The frequency of drive signal, but maintain constant rate.But general control scan frequency is no more than 200Hz, to reduce measurement laser
The influence to measurement accuracy of random noise and eyeglass nonlinear response.
Content in the method for the present invention embodiment is corresponding with the content in above-mentioned apparatus embodiment, and details are not described herein.
Device and method using the present invention has the advantages that as is evident below compared with prior art:
1, since the purpose that high-speed camera captures the realtime graphic of blade in work is only used for acquiring the position of blade
It sets, thus the requirement to take pictures frequency and picture resolution is greatly reduced.
2, the location information arrived using cameras capture, the blade in guiding laser traces movement, the position of laser scanning point
It is accurate to set, and does not need lasing light emitter and be placed on the axis of blade rotation center, considerably increases the operability of measurement method
(for being measured especially for highly very high blade of wind-driven generator).
3, by comparing the blade edge position in high-speed camera two continuous frames picture, blade can be calculated and rotated
Swing speed in plane can control signal to eyeglass and compensate, be existed with offsetting blade using the swing speed of this blade
Influence of the swing to tracking precision in Plane of rotation, further increases the measurement accuracy of vibration.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, without necessarily requiring or implying these.
There are any actual relationship or orders between entity or operation.Moreover, the terms "include", "comprise" or
Any other variant thereof is intended to cover non-exclusive inclusion by person, so that process, method including a series of elements, article
Or equipment includes not only those elements, but also include other elements that are not explicitly listed, or it is this to further include
The intrinsic element of process, method, article or equipment.In the absence of more restrictions, by sentence " including one
It is a ... " limit element, it is not excluded that there is also in addition in the process, method, article or apparatus that includes the element
Identical element.
Each embodiment in this specification is all made of relevant mode and describes, identical similar portion between each embodiment
Point just to refer each other, and each embodiment focuses on the differences from other embodiments.
Expression or logic and/or step described otherwise above herein in flow charts, for example, being considered use
In the order list for the executable instruction for realizing logic function, may be embodied in any computer-readable medium, for
Instruction execution system, device or equipment (system of such as computer based system including processor or other can be held from instruction
The instruction fetch of row system, device or equipment and the system executed instruction) it uses, or combine these instruction execution systems, device or set
It is standby and use.For the purpose of this specification, " computer-readable medium " can any can be included, store, communicating, propagating or passing
Defeated program is for instruction execution system, device or equipment or the dress used in conjunction with these instruction execution systems, device or equipment
It sets.The more specific example (non-exhaustive list) of computer-readable medium includes following:Electricity with one or more wiring
Interconnecting piece (electronic device), portable computer diskette box (magnetic device), random access memory (RAM), read-only memory
(ROM), erasable edit read-only storage (EPROM or flash memory), fiber device and portable optic disk is read-only deposits
Reservoir (CDROM).In addition, computer-readable medium can even is that the paper that can print described program on it or other are suitable
Medium, because can be for example by carrying out optical scanner to paper or other media, then into edlin, interpretation or when necessary with it
His suitable method is handled electronically to obtain described program, is then stored in computer storage.
It should be appreciated that each section of the present invention can be realized with hardware, software, firmware or combination thereof.
In the above-described embodiment, multiple steps or method can use storage in memory and by suitable instruction execution
The software or firmware that system executes are realized.For example, if realized with hardware, in another embodiment, can use
Any one of following technology well known in the art or their combination are realized:With for realizing logic work(to data-signal
The discrete logic of the logic gates of energy, the application-specific integrated circuit with suitable combinational logic gate circuit, programmable gate
Array (PGA), field programmable gate array (FPGA) etc..
It is understood that term " one " is interpreted as " at least one " or " one or more ", i.e., in one embodiment,
The quantity of one element can be one, and in a further embodiment, the quantity of the element can be multiple, and term " one " is no
It can be interpreted as the limitation to quantity.
Although for example the ordinal number of " first ", " second " etc. will be used to describe various assemblies, not limit those herein
Component.The term is only used for distinguishing a component and another component.For example, first assembly can be referred to as the second component, and it is same
Sample, the second component can also be referred to as first assembly, without departing from the introduction of inventive concept.Term as used herein " and/
Or " project listed any for including one or more associations and all combinations.
Term used herein is only used for describing the purpose of various embodiments and is not intended to limit.As used herein,
Singulative is intended to also include plural form, makes an exception unless the context clearly dictates.Will further be understood that term " comprising " and/or
" having " specifies depositing for the feature, number, step, operation, component, element or combinations thereof when being used in this specification
, and it is not excluded for the presence or additional of one or more of the other feature, number, step, operation, component, element or its group.
Term used herein including technical and scientific term has and the normally understood art of those skilled in the art
The identical meaning of language, only if it were not for being defined differently than the term.It should be understood that the term tool limited in usually used dictionary
There is the meaning consistent with the meaning of term in the prior art.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, all answer by the change or replacement that can be readily occurred in
It is included within the scope of the present invention.Therefore, protection scope of the present invention should be subject to the protection scope in claims.
Claims (10)
1. a kind of quick vibration measuring method of continuous scanning laser, which is characterized in that including:
Step S1:A pair of of high-velocity scanning eyeglass is driven using continuation sinusoidal, guiding measuring laser is on testee surface
Continuous scanning goes out a closed curve;
Step S2:Described in synchronization gain measure laser vibration signal and the high-velocity scanning eyeglass lens position signal to
Obtain the vibration frequency of multiple measurement points on the closed curve path.
2. vibration measuring method according to claim 1, it is characterised in that:
The step S2 is specifically included:
Step S21:The laser vibrometer signal of laser and the lens position letter of the high-velocity scanning eyeglass are measured described in synchronization gain
Number;
Step S22:Resampling is carried out to the laser vibrometer signal sweeping to ensure within the same laser scanning period
Retouching on path has integer measurement point;Using with to the identical sample frequency of the laser vibrometer signal sampling frequencies to the mirror
Piece position signal carries out resampling, and the vibration information to ensure measurement point is consistent with its position, to obtain measurement point
Vibration information;
Step S23:Fourier transformation is carried out to the vibration information of the measurement point, to obtain the vibration information of the measurement point
In amplitude, frequency and phase information;
Step S24:To in the vibration information of the measurement point obtained after Fourier transformation frequency and phase information into
Line distortion reparation.
3. vibration measuring method according to claim 2, it is characterised in that:
Resampling is carried out to the laser vibrometer signal in the step S22 and the lens position signal is adopted again
Sample is using the zero-padding in the interpolation algorithm or frequency domain in time domain.
4. vibration measuring method according to claim 2 or 3, it is characterised in that:
It is specially into line distortion reparation to the frequency information in the vibration information of the measurement point in the step S24:
Frequency information in the vibration information of the measurement point obtained after being fourier transformed in step S23 is folded over
Journey reverse is realized.
5. vibration measuring method according to claim 4, which is characterized in that the folding process is specially:
First:ωnWithFor symmetry axis, folding has obtained ωn1;
Then:Due to ωn1< 0, ωn1It is symmetry axis with 0, folding has obtained ωn2;
Finally:Due toωn2WithFor symmetry axis, folding has obtained ωn3;
Wherein:ωnFor n-th order frequency of natural vibration, ωsTo measure the scan frequency of laser.
6. vibration measuring method according to claim 2 or 3, which is characterized in that
It is specially into line distortion reparation to the phase information in the vibration information of the measurement point in the step S24:
Measure the time delay of two neighboring measurement point, and according to the delay time of measurement by the phase of next measurement point forward
It is mobile.
7. vibration measuring method according to claim 2, it is characterised in that:Further include before the step S21:Pass through single point laser
Measure the step of surface of testee is to obtain testee accurate natural frequency range.
8. vibration measuring method according to claim 2, it is characterised in that:In the step S1, the high-velocity scanning eyeglass
Scan frequency is no more than 200 hertz.
9. the vibration measuring method according to claim 2 or 8, it is characterised in that:The scanning angle of the high-velocity scanning eyeglass exists
± 5 ° or less.
10. a kind of quick vibration measuring system of continuous scanning laser, which is characterized in that including:
Lasing light emitter, emission measurement laser to high speed X-Y scan mirrors;
High speed X-Y scan mirrors:Guiding measuring laser is continuously swept on testee surface under the driving of continuation sinusoidal
Describe a closed curve;
Controller:It sends continuation sinusoidal and drives high speed X-Y scan mirrors, and receive the vibration signal of lasing light emitter, to obtain
Take the lens position signal of the vibration signal and the high-velocity scanning eyeglass for measuring laser;
Processor:The vibration signal of the measurement laser and the lens position of the high-velocity scanning eyeglass obtained to controller is believed
It number is handled to obtain the vibration frequency of multiple measurement points.
Priority Applications (1)
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