CN207457499U - A kind of MEMS galvanometers synchronizing signal feedback device and laser radar - Google Patents
A kind of MEMS galvanometers synchronizing signal feedback device and laser radar Download PDFInfo
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Abstract
The utility model provides a kind of MEMS galvanometers synchronizing signal feedback device and laser radar, laser emission element emits laser and after beam shaping unit carries out beam shaping, and visual field scanning is carried out to object plane to be measured after inciding into the MEMS transmitter unit tuned reflections driven by MEMS driving units；Photodetector is used to feed back electric signal with processing unit to signal control when detecting that MEMS transmitter units are in maximum deflection angle, so that signal control controls the laser drive unit according to the electric signal with processing unit, realize that MEMS transmitter units are synchronous with laser emission element.MEMS galvanometers synchronizing signal feedback device provided by the utility model introduces feedback signal and realizes synchronization for laser emission element to be controlled to shine and form closed-loop control, and device integrally has flexible stability, it can be achieved that uniform or non-homogeneous multi-thread scanning.And compared to currently used mechanical rotary laser radar installations technology, there is the features such as size is small, simple in structure, easy of integration.
Description
Technical field
The utility model is related to laser radar technique fields, and in particular to a kind of MEMS galvanometers synchronizing signal feedback device and
Laser radar.
Background technology
Laser radar detects the information such as target bearing, speed by emitting laser beam, high with range accuracy, side
Tropism is strong, and response is fast, from advantages such as ground clutter influences, has been widely used social every field.And laser radar can
Be up to the other steric environment map datum of Centimeter Level to form precision, thus advanced driving assistance system (ADAS) and nobody drive
Sailing has important application in system.
The technical solution applied to scanning laser radar system is based primarily upon mechanical gyro unit realization, electric machine structure at present
Complexity, size is larger, not easy of integration；Light path is changed using the resonance of MEMS galvanometers in addition with technical solution, completes multi-thread beam
Scanning, the program improve the stability of total system, and have the features such as size is small, simple in structure, at low cost.But due to
MEMS galvanometers vibration processes real-time position information and laser emission element control signal Synchronization Control relatively difficult to achieve, to being
System design and debugging bring larger difficulty.
Utility model content
For in the prior art the defects of, the utility model provides a kind of MEMS galvanometers synchronizing signal feedback device and laser
Radar, the utility model can realize Laser emission and the Synchronization Control of MEMS galvanometers vibration, and have the advantages of simple structure and easy realization,
Of low cost, stability is good.
To achieve the above object, the utility model provides following technical scheme：
In a first aspect, the utility model provides a kind of MEMS galvanometers synchronizing signal feedback device, including：Laser Driven list
Member, laser emission element, beam shaping unit, MEMS driving units, MEMS transmitter units, photodetector and signal control
With processing unit, the signal control connects with processing unit with the laser drive unit and the photodetector respectively
It connects；
The laser emission element emits laser under the driving of the laser drive unit and passes through the beam shaping
After unit carries out beam shaping, incide into the MEMS transmitter units by MEMS driving units driving and emitted by the MEMS
Unit carries out visual field scanning after carrying out tuned reflection to object plane to be measured；Wherein, the MEMS driving units drive the MEMS
Transmitter unit is vibrated according to default resonant frequency, to ensure the reality of the laser after MEMS transmitter unit tuned reflections
Scanning field of view scope w1More than the field range w of object plane to be measured2；
The photodetector is located within the actual scanning field range and positioned at the visual field of the object plane to be measured
Outside scope, the photodetector is detecting for whether detecting the MEMS transmitter units in maximum deflection angle
When being in maximum deflection angle to the MEMS transmitter units electric signal is sent with processing unit to signal control；
The signal control controls the laser drive unit when receiving the electric signal with processing unit,
Realize that the MEMS transmitter units are synchronous with the laser emission element.
Further, the number of the photodetector is one, which emits for detecting the MEMS
The positive maximum deflection angle of unit or negative sense maximum deflection angle, wherein, which, which is placed on, can only receive just
The light beam of other deflection angles reflection is not received to the light beam that maximum deflection angle or negative sense maximum deflection angle reflect
Position.
Further, the number of the photodetector is two, wherein the first photodetector is described for detecting
The positive maximum deflection angle of MEMS transmitter units, the second photodetector are used to detect the negative senses of the MEMS transmitter units most
Large deflection angle degree；Wherein, first photodetector be placed on the light beam that can only receive the reflection of positive maximum deflection angle and
The position of the light beam of other deflection angles reflection is not received；Second photodetector, which is placed on, can only receive reversed maximum
Deflection angle reflection light beam and do not receive other deflection angles reflection light beam position.
Further, described device further includes：Beam reception unit, the beam reception unit are used to put down from determinand
The laser echo signal of face reflection is converged on the photodetector.
Further, the beam reception unit is made of 2 or more lens or field lens.
Further, the lens or field lens use the material for having high transmittance to near-infrared to be made.
Further, the type of drive of the MEMS driving units includes Piezoelectric Driving, electrothermal drive, electrostatic drive and electricity
One or more in Magnetic driving.
Further, the beam shaping unit is by 2 or more aspherical or free form surface lens or by 2 or more
Ordinary lens form, and the laser beam for emitting the laser emission element carries out shaping.
Second aspect, the utility model additionally provide a kind of laser radar, synchronous including MEMS galvanometers as described above
Signal feedback device.
As shown from the above technical solution, MEMS galvanometers synchronizing signal feedback device provided by the utility model, utilizes photoelectricity
Detector obtains MEMS transmitter units real-time position information (maximum deflection angle) in vibration processes in real time, and MEMS is emitted
The location information of unit feeds back to laser drive unit so that laser drive unit is according to the location informations pair of MEMS transmitter units
Laser emission element is driven, and then realizes the Synchronization Control that laser emission element shines with the vibration of MEMS transmitter units.Into
One step, MEMS galvanometers synchronizing signal feedback device provided by the utility model, compared to currently used mechanical rotary laser thunder
Up to device, have that size is small, has the advantages of simple structure and easy realization, at low cost, stability is good, the advantages such as easy of integration.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is this
Some embodiments of utility model, for those of ordinary skill in the art, without creative efforts, also
Other attached drawings can be obtained according to these attached drawings.
Fig. 1 is the structure diagram for the MEMS galvanometer synchronizing signal feedback devices that one embodiment of the utility model provides；
Fig. 2 is the operation principle signal for the MEMS galvanometer synchronizing signal feedback devices that one embodiment of the utility model provides
Figure；
Fig. 3 is that laser-driven signal, MEMS galvanometers drive signal and the MEMS that one embodiment of the utility model provides vibrate
Relation schematic diagram between signal；
Wherein, the label meaning above in each figure is as follows：
101 represent laser drive unit；102 represent laser emission element；103 represent beam shaping unit；104 represent
MEMS driving units；105 represent MEMS transmitter units；106 represent scanning area object plane；107 represent the first photodetector；
108 represent the second photodetector；109 represent signal control and processing unit；201 represent primary optical axis ray position；1061 tables
Show object plane to be measured；1062 represent that first refers to object plane；1063 represent that second refers to object plane.
Specific embodiment
It is new below in conjunction with this practicality to make the purpose, technical scheme and advantage of the utility model embodiment clearer
Attached drawing in type embodiment carries out the technical scheme in the embodiment of the utility model clear, complete description, it is clear that retouched
The embodiment stated is the utility model part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, those of ordinary skill in the art's all other embodiments obtained without creative efforts, belongs to
The scope of the utility model protection.
Realize that technical barrier present in the laser radar of multi-thread beam scanning is using MEMS galvanometers existing, it is more difficult to realize
Laser emission is vibrated synchronous with MEMS galvanometers.To solve the problems, such as this, one embodiment of the utility model provides a kind of MEMS and shakes
Mirror synchronizing signal feedback device, referring to Fig. 1 and Fig. 2, which includes：Laser drive unit 101, laser emission element
102nd, beam shaping unit 103, MEMS driving units 104, MEMS transmitter units 105, photodetector 107 and 108, Yi Jixin
Number control and processing unit 109, signal control and processing unit 109 respectively with the laser drive unit 101 and institute
State the connection of photodetector 107 and 108；It is understood that MEMS transmitter units 105 are realized using MEMS galvanometers；The light
Beam shaping unit 103 is formed by 2 or more aspherical or free form surface lens or by 2 or more ordinary lens, for pair
The laser beam that the laser emission element 102 emits carries out shaping；The laser emission element 102 and MEMS transmitter units
Primary optical axis between 105 and the microscope group of beam shaping unit 103 keeps overlapping；
The laser emission element 102 emits laser under the driving of the laser drive unit 101 and passes through the light
After beam shaping unit 103 carries out beam shaping, the MEMS transmitter units 105 driven by the MEMS driving units 104 are incided into
And it is carried out carrying out visual field scanning to object plane to be measured after tuned reflection by the MEMS transmitter units 105；Wherein, the MEMS drives
Moving cell 104 drives the MEMS transmitter units 105 to be vibrated according to default resonant frequency, single to ensure to emit through MEMS
The actual scanning field range w of laser after first 105 tuned reflections1More than the field range w of object plane to be measured2；It is appreciated that
It is that the MEMS driving units 104 can change the MEMS transmitter units 105 by way of adjusting driving circuit frequency
Resonant frequency, and then change the actual scanning field range of the MEMS transmitter units 105；It is it is understood that described
The type of drive of MEMS driving units 104 can include one kind in Piezoelectric Driving, electrothermal drive, electrostatic drive and electromagnetic drive
It is or a variety of.
Wherein, the photodetector is located within the actual scanning field range and positioned at the object plane to be measured
Outside field range.For example, the photodetector is located at what the MEMS transmitter units 105 reflected under maximum deflection angle
The laser that laser beam can pass through the photodetector and be reflected under other deflection angles cannot pass through the photodetection
The position of device, so as to which the photodetector can be with according to whether receiving MEMS transmitter units 105 described in optical signal detecting be
It is no to be in maximum deflection angle, and when detecting that the MEMS transmitter units 105 are in maximum deflection angle to the signal
Control sends electric signal with processing unit 109；
Signal control and processing unit 109 when receiving the electric signal to the laser drive unit 101 into
Row control, realizes that the MEMS transmitter units 105 are synchronous with the laser emission element 102.
As it can be seen that the MEMS galvanometer synchronizing signal feedback devices that the utility model embodiment provides realize the synchronous control of closed loop
System.
It is understood that since the laser of the laser emission element 102 transmitting is cyclic pulse signal, and it is described
When MEMS transmitter units 105 are in resonant condition, deflection angle and time into SIN function relation, in a harmonic period
In, there are one the MEMS transmitter units positive maximum deflection angle and a negative sense maximum deflection angle, therefore can basis
Positive maximum deflection angle or negative sense maximum deflection angle the control laser emission element of the MEMS transmitter units detected are synchronous
It shines, it is synchronous with the MEMS transmitter units so as to fulfill laser emission element.Fig. 3 is that the utility model embodiment provides
Relation schematic diagram between laser-driven signal, MEMS galvanometers drive signal and MEMS oscillator signals.From figure 3, it can be seen that work as
When MEMS galvanometers are in resonant condition, deflection angle and time into SIN function relation, in a cycle change procedure,
MEMS drive voltage signals realize triggering using square-wave signal, and the edge of rising edge corresponds to the maximum deflection of MEMS galvanometers deflection
Angle, and laser-driven signal is cyclic pulse signal.
It is understood that the number of the photodetector can be one, when the number of photodetector can be
At one, which is used to detect the positive maximum deflection angle of the MEMS transmitter units or negative sense maximum deflection angle
Degree；Wherein, the photodetector be placed on can only receive positive maximum deflection angle or negative sense maximum deflection angle reflection
Light beam and do not receive other deflection angles reflection light beam position.
It is understood that the number of the photodetector can also be two, when the number of photodetector can be with
For two when, the first photodetector is used to detect the positive maximum deflection angles of the MEMS transmitter units, and the second photoelectricity is visited
Survey the negative sense maximum deflection angle that device is used to detect the MEMS transmitter units；Wherein, first photodetector is placed on only
The position for the light beam that the light beam of positive maximum deflection angle reflection can be received and do not receive the reflection of other deflection angles；Second
A photodetector is placed on the light beam that can only receive reversed maximum deflection angle reflection and does not receive other deflection angles
The position of the light beam of reflection.
Referring to Fig. 1 and Fig. 2, the present embodiment definition is located within the actual scanning field range and positioned at the determinand
Object plane outside the field range of plane is known as with reference to object plane (1062 and 1063), object plane (1061) to be measured and reference
Object plane (1062 and 1063) has collectively constituted the scanning area object plane 106 in Fig. 1.Wherein, include with reference to object plane in Fig. 2
Shown first refers to object plane 1063 with reference to object plane 1062 and second, and the present embodiment defines scanning to the reference substance simultaneously
Optical signal in plane is known as reference optical signal, and reference optical signal includes scanning to first with reference to the first ginseng on object plane 1062
Optical signal and scanning are examined to second with reference to the second reference optical signal on object plane 1063.First photodetection shown in Fig. 2
107 and second photodetector 108 of device is respectively used to the edge optical signal and the in the first reference optical signal field range of detection
Edge optical signal in two reference optical signal field ranges.It is regarded when the first photodetector 107 detects the first reference optical signal
In the range of edge optical signal when, represent that the MEMS transmitter units 105 are now in positive maximum deflection angle, when second
When photodetector 108 detects the edge optical signal in the second reference optical signal field range, the MEMS hairs at this time are represented
It penetrates unit 105 and is in negative sense maximum deflection angle.As it can be seen that the utility model embodiment utilizes the photoelectric effect of photodetector will
Optical signal is converted into electric signal, and electric signal is transferred to signal control and processing unit 109, so by signal control with
Reason unit 109 controls the laser drive unit 101, realizes the MEMS transmitter units 105 and the Laser emission
The synchronization of unit 102.
If the it is understood that MEMS transmitter units 105 corresponding actual scanning visual field under maximum deflection angle
Range size w1=35 °, the corresponding field range w of object plane to be measured2=30 °, then the first photodetector, which is placed on, to receive
In the physical location of θ=+ 17.5 °；Second photodetector, which is placed on, to be received in the physical location of θ=- 17.5 °.
It is understood that when using signal feedback is carried out based on two photodetectors shown in Fig. 2, described in expression
MEMS galvanometer synchronizing signal feedback devices have carried out synchronous calibration twice in a harmonic period, so as to more precisely
Realize that the MEMS transmitter units are synchronous with the laser emission element.
In addition, in order to reduce equipment cost and complexity, the number of the photodetector or one, one
Photodetector can be used for detecting the positive maximum deflection angle of the MEMS transmitter units or negative sense maximum deflection angle, when
When the number of the photodetector is one, it is equivalent to a harmonic period and carries out a synchronous calibration.
Furthermore, it is necessary to illustrate, the number of photodetector and specific installation position are not limited in the present embodiment
It is fixed, as long as can meet photodetector can detect whether the MEMS transmitter units are in maximum deflection angle and can't detect
The other deflection angles of MEMS transmitter units.
The content shown in Fig. 1 and Fig. 2, the MEMS galvanometers synchronizing signal feedback dress that the utility model embodiment provides
It puts, using the resonant vibration of the micro- galvanometers of MEMS, the beam emissions being emitted on the micro- galvanometer minute surfaces of MEMS is reflected into certain visual field
With the object of distance range, while introduce reference optical signal in the out-of-plane peripheral field of determinand and form signal feedback control
System.Compared to the device that laser scanning is realized using mechanical scanning or motor drive mode, MEMS galvanometers improve scanning laser thunder
The stability and angular resolution and scan frequency reached, and being easily integrated is conducive to promote laser radar technique to small-sized
Change, lightness and integrated direction develop.
In a kind of optional embodiment, the MEMS galvanometers synchronizing signal feedback device further includes：Beam reception unit,
The beam reception unit is used to that the photodetector will to be converged to from the laser echo signal of determinand plane reflection.It is excellent
Selection of land, the beam reception unit are made of 2 or more lens or field lens, and the lens or field lens are high saturating using having to near-infrared
The material for crossing rate is made.
Further, since the laser emission element can emit the laser beam of optional frequency, if according to described
The Signals in Laser beam frequencies of photodetector feedback and delay are controlled, then can realize that the angle under multi-thread beam is equal
Even scanning or the uneven scanning of density, for example, the significant points in detection improve glow frequency, data volume increase more can be accurate
The really time of day of identification testee；Make system entire scan more reasonable, application prospect is also more extensive.
As seen from the above description, the MEMS galvanometer synchronizing signal feedback devices that the utility model embodiment provides, utilize light
Electric explorer obtains MEMS transmitter units real-time position information (maximum deflection angle) in vibration processes in real time, and MEMS is sent out
The location information for penetrating unit feeds back to laser drive unit so that laser drive unit is according to the location informations of MEMS transmitter units
Laser emission element is driven, and then realizes the Synchronization Control that laser emission element shines with the vibration of MEMS transmitter units.
Further, the MEMS galvanometer synchronizing signal feedback devices that the utility model embodiment provides, compared to currently used machinery rotation
Turn laser radar apparatus, have size is small, has the advantages of simple structure and easy realization, at low cost, stability is good, the advantages such as easy of integration.
Based on identical design, another embodiment of the utility model provides a kind of laser radar, which includes
MEMS galvanometer synchronizing signal feedback devices described in above example.
Laser radar provided in this embodiment feeds back dress due to including the MEMS galvanometers synchronizing signal described in above example
It puts, therefore its principle is similar with technique effect, details are not described herein again.
Above example is merely to illustrate the technical solution of the utility model, rather than its limitations；Although with reference to foregoing reality
Example is applied the utility model is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in each embodiment is stated to modify or carry out equivalent substitution to which part technical characteristic；And these
Modifications or substitutions do not make the essence of appropriate technical solution depart from the spirit and model of various embodiments of the utility model technical solution
It encloses.
Claims (9)
1. a kind of MEMS galvanometers synchronizing signal feedback device, which is characterized in that including：Laser drive unit, laser emission element,
Beam shaping unit, MEMS driving units, MEMS transmitter units, photodetector and signal control and processing unit, it is described
Signal control is connected with processing unit with the laser drive unit and the photodetector respectively；
The laser emission element emits laser under the driving of the laser drive unit and passes through the beam shaping unit
Carry out beam shaping after, incide by the MEMS driving units driving MEMS transmitter units and by the MEMS transmitter units
Visual field scanning is carried out to object plane to be measured after carrying out tuned reflection；Wherein, the MEMS driving units drive the MEMS transmittings
Unit is vibrated according to default resonant frequency, to ensure the actual scanning of the laser after MEMS transmitter unit tuned reflections
Field range w1More than the field range w of object plane to be measured2；
The photodetector is located within the actual scanning field range and positioned at the field range of the object plane to be measured
Outside, whether the photodetector is used to detect the MEMS transmitter units in maximum deflection angle, and detecting
It states and sends electric signal with processing unit to the signal control when MEMS transmitter units are in maximum deflection angle；
The signal control controls the laser drive unit when receiving the electric signal with processing unit, realizes
The MEMS transmitter units are synchronous with the laser emission element.
2. the apparatus according to claim 1, which is characterized in that the number of the photodetector is one, which visits
Device is surveyed for detecting the positive maximum deflection angle of the MEMS transmitter units or negative sense maximum deflection angle；Wherein, the photoelectricity
Detector is placed on the light beam that can only receive positive maximum deflection angle or the reflection of negative sense maximum deflection angle and does not receive
The position of the light beam of other deflection angles reflection.
3. the apparatus according to claim 1, which is characterized in that the number of the photodetector is two, the first photoelectricity
Detector is used to detect the positive maximum deflection angle of the MEMS transmitter units, and the second photodetector is described for detecting
The negative sense maximum deflection angle of MEMS transmitter units；Wherein, first photodetector, which is placed on, can only receive positive maximum
Deflection angle reflection light beam and do not receive other deflection angles reflection light beam position；Second photodetector is placed
In the position for the light beam that can only be received the light beam of reversed maximum deflection angle reflection and not receive the reflection of other deflection angles.
4. the apparatus according to claim 1, which is characterized in that further include：Beam reception unit, the beam reception unit
For the photodetector will to be converged to from the laser echo signal of determinand plane reflection.
5. device according to claim 4, which is characterized in that the beam reception unit is by 2 or more lens or field lens
Composition.
6. device according to claim 5, which is characterized in that the lens or field lens to near-infrared using having high transmittance
Material be made.
7. the apparatus according to claim 1, which is characterized in that the type of drive of the MEMS driving units is driven including piezoelectricity
One or more in dynamic, electrothermal drive, electrostatic drive and electromagnetic drive.
8. the apparatus according to claim 1, which is characterized in that the beam shaping unit by 2 or more it is aspherical or from
Formed by the lens of curved surface or by 2 or more ordinary lens, for the laser beam that the laser emission element emits into
Row shaping.
9. a kind of laser radar, which is characterized in that including such as claim 1~8 any one of them MEMS galvanometer synchronizing signals
Feedback device.
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