CN108279068A - Laser beam quality dynamic measurement device based on four wave lateral shearing interferences - Google Patents
Laser beam quality dynamic measurement device based on four wave lateral shearing interferences Download PDFInfo
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- CN108279068A CN108279068A CN201810041227.9A CN201810041227A CN108279068A CN 108279068 A CN108279068 A CN 108279068A CN 201810041227 A CN201810041227 A CN 201810041227A CN 108279068 A CN108279068 A CN 108279068A
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- 238000005259 measurement Methods 0.000 title claims abstract description 26
- 238000010008 shearing Methods 0.000 title claims abstract description 17
- 238000012360 testing method Methods 0.000 claims description 14
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
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Abstract
The invention discloses a kind of laser beam quality dynamic measurement devices based on four wave lateral shearing interferences, and spectroscope, first Hartmann's diffraction grating, the first CCD camera, second Hartmann's diffraction grating, the second CCD camera are set gradually along light path.First Hartmann's diffraction grating and the first CCD camera are set on spectroscopical reflected light path, second Hartmann's diffraction grating and the second CCD camera are set on spectroscopical transmitted light path, and first Hartmann's diffraction grating and second Hartmann's diffraction grating with spectroscopical apart from equal, the first CCD camera is equal at a distance from second Hartmann's diffraction grating with the second CCD camera at a distance from first Hartmann's diffraction grating.The measurement of full laser complex amplitude may be implemented in the present invention, and accurately measure the information of interference small signal region, do not increase compared to single four waves lateral shear interferometer measuring beam quality measurement time, measurement accuracy is improved under the premise of ensureing measurement efficiency.
Description
Technical field
The present invention relates to laser measurement fields, and in particular to a kind of laser beam quality based on four wave lateral shearing interferences
Dynamic measurement device.
Background technology
High-power double cladding optical fiber laser is as a kind of novel solid laser, with efficient, good beam quality, easily
In heat dissipation, it is compact-sized the advantages that, it is with the obvious advantage compared with traditional gas and solid state laser, in industry, national defence, space etc.
Field has very important application value.In optical fiber laser design and application field, beam quality is all to weigh laser light
One important parameter of beam quality.Beam quality factor M2Due to covering laser near-field and far-field characteristic simultaneously, it is used as table
The index for levying laser beam quality, in recent years recognized by international light circle, and by International Organization for standardization（ISO）It is pushed away
It recommends.
Since high-capacity optical fiber laser as gain and passes energy medium using doubly clad optical fiber, the light field point of inside of optical fibre
Phenomena such as cloth and optical fiber heat balance mechanism are complex, and the pattern thus caused is unstable and pattern converts can directly result in defeated
Go out the dynamic change of the beam quality of laser.Meanwhile with high power single mode fiber laser developments, power further carries
It rises, the optical fiber of certain core diameters has begun to generate nonlinear effect, and these nonlinear effects also can be to the light beam of output laser
Quality has an impact.In order to analyze the change mechanism that high-capacity optical fiber laser exports laser, how accurate and detection in real time
Its beam quality factor has become the heat subject studied now.
Shear interference measurement is the measuring technique for interfering wavefront to be measured and the small translation of its own.Due to
Shear interference measure without necessarily referring to wavefront, using total light path system, can resist external disturbance influence, be concerned with to lighting source
The features such as stability requirement of property and interference device platform is low, not only can guarantee higher Wave-front measurement precision, but also can obtain higher
Spatial resolution, this method shows unique advantage in many Wave-front measurements.It is multiple using four wave lateral shear interferometers
Former testing laser complex amplitude obtains the wavefront and light intensity point of testing laser mainly by the processing to single interference pattern
Cloth.In past more than 50 years, many scholars conduct in-depth research for the wavefront reconstruction problem of lateral shearing interference, carry
Go out a series of wavefront reconstruction algorithms, can be divided into restructing algorithm before zonal wavefront reconstruction and mode wave by reconstruct thought.Base
In the extraction of existing differential phase and wavefront reconstruction algorithm, can preferably answer in the case that carrier frequency interference fringe acutance is preferable
Original goes out the wavefront information of light to be measured, and poor in interference fringe acutance（It is generally acknowledged that being less than 0.1）When, utilize doing in the region
It is difficult the phase information for restoring in the region to relate to striped.And it is then utilized in a certain position complex amplitude information for measuring laser
The method that diffraction theory seeks beam quality factor, if complex amplitude by edge phase retrieval error it is larger or only take wave front restoration compared with
Good region is calculated, and the beam quality factor that simulation calculation goes out can be made bigger than normal, and then leads to the inaccuracy measured.Cause
This how accuracy complete measurement go out testing laser interference normally with interference small signal region light intensity and phase information be current
One main problem of research.
Invention content
The purpose of the present invention is to provide a kind of, and the laser beam quality dynamic based on four wave lateral shearing interferences measures dress
It sets, which can not only measure the light intensity and phase information of interference signal normal region, while can also be effective and accurate
The light intensity and phase information for restoring interference small signal region, and then realize beam quality factor M2Accurate measurement.
Realize that the technical solution of the object of the invention is：A kind of laser beam quality based on four wave lateral shearing interferences
Dynamic measurement device, including spectroscope, first Hartmann's diffraction grating, the first charge coupled cell camera, the second Hartmann spread out
Penetrate grating and the second charge coupled cell camera；Spectroscope, second Hartmann's diffraction grating and the second electricity are set gradually along light path
Lotus coupling element camera；First Hartmann's diffraction grating and the first charge coupled cell camera are set in turn in spectroscopical reflection
In light path, second Hartmann's diffraction grating and the second charge coupled cell camera are set in turn on spectroscopical transmitted light path；
Testing laser is divided into two beams by spectroscope, and reflected light becomes four beams after first Hartmann's diffraction grating diffraction to be had
The beamlet of certain angle, this four beamlets form interference fringe on the first charge coupled cell camera；Transmitted light is passed through
Becoming four beams after second Hartmann's diffraction grating diffraction has the beamlet of certain angle, this four beamlets are in the second charge coupling
It closes and forms interference fringe on element camera.
Compared with prior art, the present invention its remarkable advantage is：
（1）The complete recovery of testing laser complex amplitude information may be implemented, both accurately can restore interference normal region
Light intensity and phase information accurately can also restore the light intensity and phase information of interference small signal region, improve laser beam
The precision of mass measurement.
（2）It can be dynamically to the beam quality factor M of testing laser2It is analyzed and is measured.
（3）Interference normal region is obtained simultaneously and interferes the information of small signal region, but time of measuring does not increase.
Description of the drawings
Fig. 1 is that the present invention is based on the overall structures of the laser beam quality dynamic measurement device of four wave lateral shearing interferences to show
It is intended to.
Fig. 2 is that the present invention is based on Hartmann's diffraction of the laser beam quality dynamic measurement device of four wave lateral shearing interferences
Grating beam splitting schematic diagram.
Fig. 3 is that the present invention is based on the spellings of the interference fringe of the laser beam quality dynamic measurement device of four wave lateral shearing interferences
Schematic diagram is connect, wherein（a）The interference pattern acquired by CCD camera 3-1,（b）The interference pattern acquired by CCD camera 3-2,（c）
For interference pattern（a）Sub-aperture stitching region,（d）For interference pattern（b）Sub-aperture stitching region,（e）For stitching interferometer figure.
Specific implementation mode
Present invention is further described in detail below in conjunction with the accompanying drawings.
In conjunction with Fig. 1 to Fig. 2, a kind of laser beam quality dynamic measurement device based on four wave lateral shearing interferences, including
Spectroscope 1, first Hartmann's diffraction grating 2-1, the first charge coupled cell（CCD）Camera 3-1, second Hartmann's diffraction grating
2-2 and the second charge coupled cell camera 3-2.Spectroscope 1, second Hartmann's diffraction grating 2-2 and are set gradually along light path
Two charge coupled cell camera 3-2.First Hartmann's diffraction grating 2-1 is set gradually with the first charge coupled cell camera 3-1
In on the reflected light path of spectroscope 1, second Hartmann's diffraction grating 2-2 is set gradually with the second charge coupled cell camera 3-2
In on the transmitted light path of spectroscope 1.
Testing laser is divided into two beams by spectroscope 1, and the light of spectroscope reflection spreads out by first Hartmann's diffraction grating 2-1
Becoming four beams after penetrating, there is the beamlet of certain angle, this four beamlets to be formed on the first charge coupled cell camera 3-1
Interference fringe；The light of spectroscope transmission becomes four beams after second Hartmann's diffraction grating 2-2 diffraction has certain angle
Beamlet, this four beamlets form interference fringe on the second charge coupled cell camera 3-2.
The splitting ratio of above-mentioned spectroscope 1 is 1：1, it is equal with the light energy of transmission through spectroscope reflection.
When the time for exposure of above-mentioned first charge coupled cell camera 3-1 is the second charge coupled cell camera 3-2 exposures
Between half, and the time for exposure of two charge coupled cell cameras is adjustable.
Above-mentioned apparatus is in the beam quality factor M to testing laser2When being calculated, the intensity signal of laser is by the first electricity
The interference fringe that lotus coupling element camera 3-1 is acquired is after Fourier transformation takes zero-frequency information using inverse Fourier transform
It obtains.
In interference fringe and the second charge coupled cell camera 3-2 on above-mentioned first charge coupled cell camera 3-1
Interference fringe is spliced, and the recovery to laser phase is realized using spliced interference fringe.In splicing, should ensure that
One charge coupled cell camera 3-1 and the interference fringe in the region to be spliced on the second charge coupled cell 3-2 are not satisfied
With.
After the light intensity and phase information for obtaining laser according to above-mentioned steps, beam quality factor M2Using angular spectra theory into
Row calculates, and calculating process is in strict accordance with ISO11146 international standards.
Embodiment 1
A kind of laser beam quality dynamic measurement device based on four wave lateral shearing interferences, testing laser divide by spectroscope 1
At two beams, the light of spectroscope reflection becomes four beams after first Hartmann's diffraction grating 2-1 diffraction has the son of certain angle
Light beam, this four beamlets form interference fringe on the first charge coupled cell camera 3-1；The light of spectroscope transmission is by the
Becoming four beams after two Hartmann's diffraction grating 2-2 diffraction has the beamlet of certain angle, this four beamlets are in the second charge
Interference fringe is formed on coupling element camera 3-2.
Spectroscopical splitting ratio is 1：The time for exposure of 1, the first charge coupled cell 3-1 are the second charge coupled cell 3-
The half of 2 time for exposure, the intensity signal of testing laser is directly by the interference fringe of the first charge coupled cell 3-1 through in Fu
Leaf transformation takes zero-frequency information to obtain after inverse Fourier transform again, and the phase information of testing laser is by the first charge coupled cell 3-1
It is obtained with after the interference fringe splicing of the second charge coupled cell 3-2.Beam quality factor M2Restored by device it is to be measured swash
The light intensity and phase of light are calculated based on angular spectra theory, and calculating process is strictly carried out according to 11146 standards of ISO.
Fig. 3 by the first charge coupled cell camera 3-1 and the second charge coupled cell camera 3-2 interference pattern acquired and
Its splicing.Its sub-aperture stitching region is chosen respectively to two width interference patterns first, the selection in sub-aperture region should be one
Circle, and ensure that the light in sub-aperture region to be spliced cannot be saturated simultaneously.After choosing sub-aperture stitching region, to two sub-aperture
Interference pattern in diameter region is spliced, and Fig. 3 is obtained（e）In interference pattern, and utilize Fig. 3（e）In interference pattern realize phase
The recovery of information.
Claims (5)
1. a kind of laser beam quality dynamic measurement device based on four wave lateral shearing interferences, it is characterised in that：Including light splitting
Mirror（1）, first Hartmann's diffraction grating（2-1）, the first charge coupled cell camera（3-1）, second Hartmann's diffraction grating（2-
2）With the second charge coupled cell camera（3-2）；Spectroscope is set gradually along light path（1）, second Hartmann's diffraction grating（2-2）
With the second charge coupled cell camera（3-2）；First Hartmann's diffraction grating（2-1）With the first charge coupled cell camera（3-
1）It is set in turn in spectroscope（1）Reflected light path on, second Hartmann's diffraction grating（2-2）With the second charge coupled cell phase
Machine（3-2）It is set in turn in spectroscope（1）Transmitted light path on；
Testing laser passes through spectroscope（1）It is divided into two beams, reflected light passes through first Hartmann's diffraction grating（2-1）Become after diffraction
Four beams have the beamlet of certain angle, this four beamlets are in the first charge coupled cell camera（3-1）Item is interfered in upper formation
Line；Transmitted light passes through second Hartmann's diffraction grating（2-2）Become after diffraction four beams have certain angle beamlet, this four
Beamlet is in the second charge coupled cell camera（3-2）Upper formation interference fringe.
2. the laser beam quality dynamic measurement device according to claim 1 based on four wave lateral shearing interferences, special
Sign is：The spectroscope（1）Splitting ratio be 1：1, through spectroscope（1）It reflects equal with the light energy of transmission.
3. the laser beam quality dynamic measurement device according to claim 1 based on four wave lateral shearing interferences, special
Sign is：The first charge coupled cell camera（3-1）Time for exposure be the second charge coupled cell camera（3-2）Exposure
The half of time, and the time for exposure of two charge coupled cell cameras is adjustable.
4. the laser beam quality dynamic measurement device according to claim 1 based on four wave lateral shearing interferences, special
Sign is：In the beam quality factor M to testing laser2When being calculated, the intensity signal of laser is by the first Charged Couple member
Part camera（3-1）The interference fringe acquired obtains after Fourier transformation takes zero-frequency information using inverse Fourier transform；
The first charge coupled cell camera（3-1）On interference fringe and the second charge coupled cell camera（3-2）On
Interference fringe is spliced, and the recovery to laser phase is realized using spliced interference fringe；In splicing, should ensure that
One charge coupled cell camera（3-1）With the second charge coupled cell（3-2）On the interference fringe in region to be spliced do not go out
Now it is saturated.
5. the laser beam quality dynamic measurement device according to claim 4 based on four wave lateral shearing interferences, special
Sign is：After the intensity signal of above-mentioned laser is combined into the complex amplitude information of testing laser with phase information, beam quality factor
M2It is calculated using angular spectra theory, and calculating process is in strict accordance with ISO11146 international standards.
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| CN201810041227.9A CN108279068B (en) | 2018-01-16 | 2018-01-16 | Laser beam quality dynamic measuring device based on four-wave transverse shear interference |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109060149A (en) * | 2018-08-28 | 2018-12-21 | 中国科学院光电技术研究所 | A kind of three wave radial-shear interferometers based on Gabor zone plate |
| CN110196105A (en) * | 2019-05-09 | 2019-09-03 | 南京理工大学紫金学院 | Collimation wavefront measuring method based on retroeflector shear interference |
| CN110261066A (en) * | 2019-03-21 | 2019-09-20 | 复旦大学 | The micro- detection light beam spotting device near field based on shear interference |
| CN114235354A (en) * | 2021-12-21 | 2022-03-25 | 苏州众烁云辉科技有限公司 | Laser beam quality comprehensive detection device and method |
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| US20090051928A1 (en) * | 2006-02-16 | 2009-02-26 | Jerome Primot | Method for analyzing a wavefront through frequency difference multilateral interferometry |
| CN101701847A (en) * | 2009-11-27 | 2010-05-05 | 中国科学院光电技术研究所 | Imaging system for wide dynamic range based on optical grating and CCD imaging detector |
| CN106767391A (en) * | 2016-12-23 | 2017-05-31 | 浙江大学 | The sensitivity intensifier and method of four wavefront lateral shearing interference Wavefront sensors |
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2018
- 2018-01-16 CN CN201810041227.9A patent/CN108279068B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090051928A1 (en) * | 2006-02-16 | 2009-02-26 | Jerome Primot | Method for analyzing a wavefront through frequency difference multilateral interferometry |
| CN101701847A (en) * | 2009-11-27 | 2010-05-05 | 中国科学院光电技术研究所 | Imaging system for wide dynamic range based on optical grating and CCD imaging detector |
| CN106767391A (en) * | 2016-12-23 | 2017-05-31 | 浙江大学 | The sensitivity intensifier and method of four wavefront lateral shearing interference Wavefront sensors |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109060149A (en) * | 2018-08-28 | 2018-12-21 | 中国科学院光电技术研究所 | A kind of three wave radial-shear interferometers based on Gabor zone plate |
| CN109060149B (en) * | 2018-08-28 | 2020-07-17 | 中国科学院光电技术研究所 | Three-wave radial shearing interferometer based on Gabor wave zone plate |
| CN110261066A (en) * | 2019-03-21 | 2019-09-20 | 复旦大学 | The micro- detection light beam spotting device near field based on shear interference |
| CN110196105A (en) * | 2019-05-09 | 2019-09-03 | 南京理工大学紫金学院 | Collimation wavefront measuring method based on retroeflector shear interference |
| CN110196105B (en) * | 2019-05-09 | 2021-04-02 | 南京理工大学紫金学院 | Collimating wavefront measuring method based on shear interference of retroreflector |
| CN114235354A (en) * | 2021-12-21 | 2022-03-25 | 苏州众烁云辉科技有限公司 | Laser beam quality comprehensive detection device and method |
| CN114235354B (en) * | 2021-12-21 | 2024-05-14 | 苏州众烁云辉科技有限公司 | Comprehensive detection device and method for laser beam quality |
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