CN108196520A - A kind of device status monitoring method, module and device - Google Patents
A kind of device status monitoring method, module and device Download PDFInfo
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- CN108196520A CN108196520A CN201810042399.8A CN201810042399A CN108196520A CN 108196520 A CN108196520 A CN 108196520A CN 201810042399 A CN201810042399 A CN 201810042399A CN 108196520 A CN108196520 A CN 108196520A
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- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000012544 monitoring process Methods 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 12
- 230000000007 visual effect Effects 0.000 claims description 7
- 238000012806 monitoring device Methods 0.000 claims description 6
- 238000012800 visualization Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 3
- 108010001267 Protein Subunits Proteins 0.000 claims description 2
- 238000012545 processing Methods 0.000 description 12
- 238000007599 discharging Methods 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001965 increasing effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000032696 parturition Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- General Factory Administration (AREA)
Abstract
The invention discloses a kind of device status monitoring method, module and device, wherein the method includes：Obtain the status information of the feed inlet and outlet of each equipment in producing line；Judge whether comprising the preset first information in the status information, if not comprising the first information, information warning is sent to user, wherein：The first information is used to indicate equipment and is in idling state.The present invention, which realizes, automatically warns the monitoring of equipment and risk, so as on the one hand reduce human cost, makes manufacturing process more intelligent, on the other hand can also effectively lifting means mobility and product yield.
Description
Technical field
The present invention relates to a kind of field of semiconductor manufacture more particularly to device status monitoring method, module and devices.
Background technology
Include multiple process procedures on the complete production line of one of semiconductor product, it is complete by the multiple equipment that Each performs its own functions
Into respective process, to realize the manufacture overall process of semiconductor product, process includes but not limited to such as plasma and increases
Strong type chemical vapor deposition, photoetching, etching or film growth etc..
At present for the accurate management and control of feed inlet and outlet (Port) state of each equipment in a producing line and risk alarm also phase
To scarcity, typically judged by operating personnel's beacon light that observation device carries at the scene and simply recorded, beacon light can be with
Different colors represents the different conditions of equipment, such as (Processing), preparation processing in process
(ReadyToProcess), prepare charging (ReadyToLoad), prepare discharging (ReadyToUnload), pre- material containing
(ReservedToLoad), pre- discharging (ReservedToUnload), feed time and discharge time etc..
But by artificial subjective judgement, be easier to mistake and careless mistake occur, and only make simple record and without corresponding wind
Danger warning, for each equipment in producing line, if there is idling conditions (IDLE), not only wastes resources of production, notably
Also there are certain risks to cause equipment fault.
Invention content
The object of the present invention is to provide a kind of device status monitoring method, module and device, to solve the disadvantage manually monitored
End.
The technical solution adopted by the present invention is as follows：
A kind of device status monitoring method, including：
Obtain the status information of the feed inlet and outlet of each equipment in producing line；
Whether judge in the status information comprising the preset first information, if not comprising the first information, to
Family sends information warning, wherein：The first information is used to indicate equipment and is in idling state.
Preferably, the method further includes：
If comprising the first information in the status information, according to the status information, the of each equipment is calculated
Two information, second information are used to indicate the actual process duration of the equipment；
Second information is compared with preset duration upper limit value and duration lower limiting value；
If second information is more than the duration upper limit value or less than the duration lower limiting value, send and warn to user
Show information.
Preferably, the status information for obtaining the feed inlet and outlet of each equipment in producing line includes：By the preset acquisition period,
Obtain the status information of the feed inlet and outlet of each equipment in producing line.
Preferably, it is described to send information warning including following any one or more to user：To user send warning mail,
Visualization alert messages are sent to user, send information warning to the intelligent terminal of user.
A kind of device status monitoring module, including：
Reading unit, the reading unit are used to obtain the status information of the feed inlet and outlet of each equipment in producing line；
Judging unit, the judging unit are used to judge whether include the preset first information in the status information,
In：The first information is used to indicate equipment and is in idling state；
Alarm unit, the alarm unit are used for when judging unit output is described not include in the status information
During the first information, information warning is sent to user.
Preferably, the module further includes：
Computing unit, the computing unit are used for when including the first information in the status information, according to described
Status information, calculates the second information of each equipment, and second information is used to indicate the actual process duration of the equipment；
Comparing unit, the comparing unit are used for second information and preset duration upper limit value and duration lower limiting value
It is compared；
The alarm unit is additionally operable to be more than the duration upper limit value for second information when comparing unit output
Or during less than the duration lower limiting value, information warning is sent to user.
Preferably, the module further includes：
Timing unit, the timing unit obtain the period for pre-setting；
The reading unit is additionally operable to obtain the state of the feed inlet and outlet of each equipment in producing line by the preset acquisition period
Information.
Preferably, the alarm unit includes following any one or more subelements：
Email transmission sub-unit, the Email transmission sub-unit are used to send warning mail to user；
Visual cue subelement, the visual cue subelement are used to send visualization alert messages to user；
Subelement is wirelessly communicated, the wireless communication subelement is used to send information warning to the intelligent terminal of user.
A kind of device status monitoring device, including：
Data transmission module, data memory module and above equipment monitoring module；
The status information of respective feed inlet and outlet is stored in institute by each equipment in producing line by the data transmission module
State data memory module；
The device status monitoring module obtains the status information from the data memory module.
Preferably, the device status monitoring module is integrated in manufacturing execution system.
The present invention and its preferred embodiment carry out the status information of the feed inlet and outlet of each equipment in the producing line that gets specific
Whether the detection that information whether there is accurately judges equipment in idling conditions to realize, and if it is determined that be idling conditions, also to
Family sends out risk alarm.
Further, in the preferred embodiment of the present invention, actual process duration is also calculated by status information, to sentence
It is fixed whether to process the unit exceptions state such as time-out or processing deficiency, and issue the user with information warning when appearance is abnormal.
To sum up, the present invention, which realizes, automatically warns the monitoring of equipment and risk, so as on the one hand reduce manpower
Cost makes manufacturing process more intelligent, on the other hand can also effectively lifting means mobility and product yield.
Description of the drawings
To make the object, technical solutions and advantages of the present invention clearer, the present invention is made into one below in conjunction with attached drawing
Step description, wherein：
Fig. 1 is the flow chart of the embodiment of device status monitoring method provided by the invention；
Fig. 2 is the flow chart of the preferred embodiment of device status monitoring method provided by the invention；
Fig. 3 is the schematic diagram of the embodiment of device status monitoring module provided by the invention；
Fig. 4 is the schematic diagram of the preferred embodiment of device status monitoring module provided by the invention；
Fig. 5 is the schematic diagram of device status monitoring device provided by the invention.
Specific embodiment
The embodiment of the present invention is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment of figure description is exemplary, and is only used for explaining the present invention, and is not construed as limiting the claims.
The present invention provides a kind of embodiment of device status monitoring method, as shown in Figure 1, this method includes following step
Suddenly：
Step S100, the status information of the feed inlet and outlet (Port) of each equipment in producing line is obtained.
Step S201, judge, if not comprising the first information, to perform whether comprising the preset first information in status information
Step S300.
Step S300, information warning is sent to user.
As mentioned in the background, the status information of the Port got by above-mentioned steps can include giving birth to technique
Relevant all information are produced, such as including technological process information, such as (Processing), preparation processing in process
(ReadyToProcess), prepare charging (ReadyToLoad), prepare discharging (ReadyToUnload), pre- material containing
(ReservedToLoad), pre- discharging (ReservedToUnload) etc.；Usually by workpiece (such as glass base in producing line operation
Plate) it is placed on the carrying transport mechanism of each equipment, it is gradually processed through equipment one by one by the process order of technological requirement, with this reality
Existing quantity-produced purpose, and in the acquisition producing line referred in step S100 the Port of each equipment status information, can be by
Processing flow order obtains each equipment Port status informations in the producing line or simultaneously by all devices in producing line
Port status informations grab, and it should be noted that more preferably acquisition modes can also be according to the acquisition week of preset in advance
Phase, timing acquisition Port status informations.
Furthermore in producing line operational process, for individual equipment, Port states can then occur in the following order
Variation：Prepare in charging, pre- material containing, preparation processing, process, prepare discharging, pre- discharging；Wherein, if the carrying of the Port
There is workpiece processing on transport mechanism, then the state of this Port is (Processing) in process, then the shape
The previous state of state then handles (ReadyToProcess) for preparation, since the first purpose of the present embodiment is ensured in producing line
Equipment is in continuous strip machining state, thus for prevention apparatus free-runing operation, can make a reservation in above-mentioned status information
One for characterizing the specific information of equipment idling state, the i.e. first information referred in step S201, as detection, judgement
The identification feature that equipment dallies is whether there is in producing line；Using above-mentioned each status information as reference example, those skilled in the art can be with
Understand, the equipment has been believed that when occurring " preparation handles (ReadyToProcess) " in equipment Port status informations
Normal feeding is completed via preamble material containing action, so be not in idling conditions, thus " preparation is handled in reference example
(ReadyToProcess) " it is the first information described in this method, certainly, the Port states letter of each equipment in other producing lines
The statement of breath can be different, and according to actual conditions, the default specific information (first information) as identification feature can also
It is adaptively adjusted.
It continues above, if not including " preparation processing " in judging the status information of the Port of each equipment, then it is believed that
There are idling conditions for producing line, may be because the factors such as material containing failure, fracture or equipment fault cause, at this point, this method
It proposes to send information warning to user, to carry out effective management and control to producing line operating risk.
In addition, with reference to preferred embodiment shown in Fig. 2, the present invention not only can may be used also with the technological process state of monitoring device
To carry out management and control to the time of manufacturing process.As previously mentioned, the status information of the Port got can include and technique
Relevant all information are produced, wherein the process time information of the equipment, therefore, embodiment shown in Fig. 2 can also be included
In further comprise：
If judging to contain the first information in facility information in abovementioned steps S201, that is to say in producing line operating just
Often, it under the premise of the equipment that do not dally, then performs step S202, according to the status information, calculates the second information of each equipment.
Step S203, the second information is compared with preset duration upper limit value and duration lower limiting value.
If the second information is more than duration upper limit value or less than duration lower limiting value, perform step S300, sent to user
Information warning.
Wherein, the effect of the second information is to indicate the actual process duration of the equipment, thus in practical operation, Ke Yikao
Consider by calculating the time difference of feed time point and discharge time point in this, as the second information；The acquisition at time point, Ke Yishi
The status information that the sensing device of equipment feed inlet and outlet setting is provided, can also mention in the status information by aforementioned Port
" prepare charging " or " pre- material containing " and the status informations such as corresponding " preparing discharging " or " pre- discharging " as calculation basis.Separately
Outside, duration needed for its processing of different producing lines and different equipment respectively has a difference, thus alleged preset duration upper limit value and
Duration lower limiting value can specifically be set according to producing line technological requirement and corresponding equipment, and this is not limited by the present invention.May be used also
It, in other embodiments, can be by the product ID (Product ID) that is included in status information to every with supplement
A product or workpiece are tracked and monitor, and using its residence time in producing line or equipment as calculate the second information according to
One of according to.
Information warning is sent to user about previously described, the effect of wherein information warning is to indicate to the user that equipment goes out
Existing unusual condition, it can be various to warn content and warning way, shown referring again to the risk alarm shown in Fig. 2 embodiments
Example, the present invention provides following any one or more warning ways：
One sends warning mail to user, i.e., is sent out by e-mail system to specified with producing relevant user
Send mail reminder；
Secondly, to user send visualization alert messages, you can to pass through visual media any in production system, example
Such as gui interface or the display screen for being arranged on manufacture scene, visual information warning is shown, such as in gui interface to user
In realized by pop-up and either show information warning in the form of rolling or flicker on a display screen；
Thirdly, to user intelligent terminal send information warning, i.e., pass through short message or APP to equipment such as the mobile phones of user
The form of PUSH message sends out indicating risk.
Certainly, in practical operation, send information warning mode be not limited to it is above-mentioned, can also be for example, by alarming horn
Carry out the other forms such as voice broadcast warning user equipment occur it is abnormal, also, can also according to aforementioned different abnormality,
Such as there is idle running risk or processing duration exception etc. in equipment, set targetedly specific information warning, to this present invention not
Give restriction.
Corresponding to the above method, the present invention also provides a kind of embodiment of device status monitoring module, as shown in figure 3,
The module includes：For obtaining the reading unit of the status information of the feed inlet and outlet of each equipment in producing line, for judging that state is believed
Whether the detection unit of the preset first information is included in breath, as it was noted above, the effect of the alleged first information is indicating equipment
Information in idling state and be no for working as judging unit output, i.e., when in status information not comprising the first information,
The alarm unit of information warning is sent to user.
Preferred embodiment based on the above method, the present invention also provides the preferred embodiment of device status monitoring module, such as
Shown in Fig. 4, device status monitoring module further includes：For pre-setting the timing unit for obtaining the period, aforementioned reading unit exists
It is additionally operable to obtain the status information of the feed inlet and outlet of each equipment in producing line in the present embodiment by the preset acquisition period；For working as
When the first information is included in the status information, the computing unit of the second information of each equipment is calculated according to status information,
As it was noted above, the effect of alleged second information is to indicate the actual process duration of the equipment；For by the second information with it is default
Duration upper limit value and the comparing unit that is compared of duration lower limiting value；Also, aforementioned alarm unit is also used in the present embodiment
In when comparing unit is exported as the second information more than duration upper limit value or less than duration lower limiting value, send warning to user and believe
Breath, further, alarm unit can also specifically include following any one or more subelements, in Fig. 4 embodiments, subelement
For three kinds of combinations：For sending the Email transmission sub-unit of warning mail to user；For sending visualization police to user
Show the visual cue subelement of message；And the wireless communication list for sending information warning to the intelligent terminal of user
Member.Certainly, it can be used for the son of warning user single it will be appreciated by persons skilled in the art that alarm unit can also include other
Member, the actual needs that can specifically combine production are increased and decreased or change.
Summary embodiment of the present invention and its preferred embodiment additionally provide a kind of implementation of device status monitoring device
Example, as shown in figure 5, it is specifically included：Data transmission module, data memory module and the aforementioned device status monitoring mould referred to
Block, working method is as follows, and each equipment in producing line (can include common transmission in industrial control field by data transmission module
Agreement and corresponding data cable), the status information of respective feed inlet and outlet (Port) is stored in real time to data and is stored
Module (such as database), device status monitoring module obtain status information from data memory module again, to carry out institute above
The accurate management and control to equipment state stated.
Finally, for above-mentioned module, unit and device it should be noted that, on the one hand, its operation principle and mode can join
The explanation stated about monitoring method is admitted to, details are not described herein；On the other hand, above-mentioned all parts embodiment can be with hardware reality
It is existing either to be realized with the software program run on one or more processor or realized, such as with combination thereof
The module in above-described embodiment or unit are combined into a upper module or upper bit location, it is, of course, also possible to they into
One step splits into multiple the next modules or lower bit location etc., such as in practical operation, it may be considered that will be referred in aforementioned device
Each module be fully integrated among the common manufacturing execution system of industrial circle (MES), with enhance its implement convenience.
Be described in detail based on the embodiments shown in the drawings the present invention structure, feature and effect, but more than
Described is only presently preferred embodiments of the present invention, needs to explain, and the technology involved by above-described embodiment and its preferred embodiment is special
Sign, those skilled in the art can be under the premise of not departing from, not changing mentality of designing and the technique effect of the present invention, rationally
Ground combination collocation is into a variety of equivalent schemes；Therefore, the present invention is every according to the present invention's not to limit practical range shown in drawing
The made change of conception or the equivalent embodiment for being revised as equivalent variations, do not go beyond the spirit of the description and the drawings
When, it should all be within the scope of the present invention.
Claims (10)
- A kind of 1. device status monitoring method, which is characterized in that including：Obtain the status information of the feed inlet and outlet of each equipment in producing line；Judge, whether comprising the preset first information in the status information, if not comprising the first information, to send out to user Information warning is sent, wherein：The first information is used to indicate equipment and is in idling state.
- 2. device status monitoring method according to claim 1, which is characterized in that the method further includes：If, according to the status information, the second letter of each equipment is calculated comprising the first information in the status information Breath, second information are used to indicate the actual process duration of the equipment；Second information is compared with preset duration upper limit value and duration lower limiting value；If second information is more than the duration upper limit value or less than the duration lower limiting value, warning letter is sent to user Breath.
- 3. device status monitoring method according to claim 1, which is characterized in that it is described obtain producing line on each equipment into The status information of discharge port includes：By the preset acquisition period, the status information of the feed inlet and outlet of each equipment in producing line is obtained.
- 4. according to claims 1 to 3 any one of them device status monitoring method, which is characterized in that described to be sent to user Information warning includes following any one or more：Warning mail is sent to user, visualization alert messages, Xiang Yong are sent to user The intelligent terminal at family sends information warning.
- 5. a kind of device status monitoring module, which is characterized in that including：Reading unit, the reading unit are used to obtain the status information of the feed inlet and outlet of each equipment in producing line；Judging unit, the judging unit are used to judge whether include the preset first information in the status information, wherein：Institute It states the first information and is used to indicate equipment and be in idling state；Alarm unit, the alarm unit are used for when judging unit output is does not include described first in the status information During information, information warning is sent to user.
- 6. device status monitoring module according to claim 5, which is characterized in that the module further includes：Computing unit, the computing unit are used for when including the first information in the status information, according to the state Information, calculates the second information of each equipment, and second information is used to indicate the actual process duration of the equipment；Comparing unit, the comparing unit are used to carry out second information and preset duration upper limit value and duration lower limiting value It compares；The alarm unit, be additionally operable to when the comparing unit output for second information be more than the duration upper limit value or During less than the duration lower limiting value, information warning is sent to user.
- 7. device status monitoring module according to claim 5, which is characterized in that the module further includes：Timing unit, the timing unit obtain the period for pre-setting；The reading unit is additionally operable to obtain the status information of the feed inlet and outlet of each equipment in producing line by the preset acquisition period.
- 8. according to claim 5~7 any one of them device status monitoring module, which is characterized in that the alarm unit packet Include following any one or more subelements：Email transmission sub-unit, the Email transmission sub-unit are used to send warning mail to user；Visual cue subelement, the visual cue subelement are used to send visualization alert messages to user；Subelement is wirelessly communicated, the wireless communication subelement is used to send information warning to the intelligent terminal of user.
- 9. a kind of device status monitoring device, which is characterized in that including：Data transmission module, data memory module and claim 5~8 any one of them device status monitoring module；The status information of respective feed inlet and outlet is stored in the number by each equipment in producing line by the data transmission module According to memory module；The device status monitoring module obtains the status information from the data memory module.
- 10. device status monitoring device according to claim 9, which is characterized in that the device status monitoring module collection Into in manufacturing execution system.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810042399.8A CN108196520A (en) | 2018-01-16 | 2018-01-16 | A kind of device status monitoring method, module and device |
| PCT/CN2018/102848 WO2019140915A1 (en) | 2018-01-16 | 2018-08-29 | Device status monitoring method, monitor and monitoring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810042399.8A CN108196520A (en) | 2018-01-16 | 2018-01-16 | A kind of device status monitoring method, module and device |
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| Publication Number | Publication Date |
|---|---|
| CN108196520A true CN108196520A (en) | 2018-06-22 |
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|---|---|---|---|
| CN201810042399.8A Pending CN108196520A (en) | 2018-01-16 | 2018-01-16 | A kind of device status monitoring method, module and device |
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| Country | Link |
|---|---|
| CN (1) | CN108196520A (en) |
| WO (1) | WO2019140915A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019140915A1 (en) * | 2018-01-16 | 2019-07-25 | 北京铂阳顶荣光伏科技有限公司 | Device status monitoring method, monitor and monitoring apparatus |
| CN113723315A (en) * | 2021-09-01 | 2021-11-30 | 常熟希那基汽车零件有限公司 | Raspberry pie-based utilization rate monitoring system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117331291B (en) * | 2023-12-01 | 2024-03-19 | 上海红岩临芯半导体科技有限公司 | Scheduling method and system for unit balance flow sheet of glue spreading and developing device |
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| JP2012134260A (en) * | 2010-12-20 | 2012-07-12 | Sharp Corp | Production management system and production management method |
| CN102937802A (en) * | 2012-11-02 | 2013-02-20 | 上海华力微电子有限公司 | System and method for monitoring operating state of device |
| CN105807742A (en) * | 2016-03-10 | 2016-07-27 | 京东方科技集团股份有限公司 | Production equipment monitoring method and system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108196520A (en) * | 2018-01-16 | 2018-06-22 | 北京铂阳顶荣光伏科技有限公司 | A kind of device status monitoring method, module and device |
-
2018
- 2018-01-16 CN CN201810042399.8A patent/CN108196520A/en active Pending
- 2018-08-29 WO PCT/CN2018/102848 patent/WO2019140915A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012134260A (en) * | 2010-12-20 | 2012-07-12 | Sharp Corp | Production management system and production management method |
| CN102937802A (en) * | 2012-11-02 | 2013-02-20 | 上海华力微电子有限公司 | System and method for monitoring operating state of device |
| CN105807742A (en) * | 2016-03-10 | 2016-07-27 | 京东方科技集团股份有限公司 | Production equipment monitoring method and system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019140915A1 (en) * | 2018-01-16 | 2019-07-25 | 北京铂阳顶荣光伏科技有限公司 | Device status monitoring method, monitor and monitoring apparatus |
| CN113723315A (en) * | 2021-09-01 | 2021-11-30 | 常熟希那基汽车零件有限公司 | Raspberry pie-based utilization rate monitoring system |
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| Publication number | Publication date |
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| WO2019140915A1 (en) | 2019-07-25 |
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