CN106695117A - Optical element achieving axial uniform linear focal spots - Google Patents
Optical element achieving axial uniform linear focal spots Download PDFInfo
- Publication number
- CN106695117A CN106695117A CN201710076040.8A CN201710076040A CN106695117A CN 106695117 A CN106695117 A CN 106695117A CN 201710076040 A CN201710076040 A CN 201710076040A CN 106695117 A CN106695117 A CN 106695117A
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- Prior art keywords
- lens
- focal spots
- optical element
- curved surface
- linear focal
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lenses (AREA)
Abstract
The invention relates to an optical element achieving axial uniform linear focal spots. The optical element achieving the axial uniform linear focal spots is a lens or a reflector. At least one face of the lens or the reflector is a curved face. Incident rays which are distributed transversely at will are focused to the optical axis of the optical element through the lens or the reflector and show uniform linear focal spots. The curved face is an aspherical face. The axial uniform linear focal spots generated by the aspherical optical elements are not influenced by processing materials any more. The optical element achieving the axial uniform linear focal spots overcomes the defects that by the adoption of the 'filamentation' effect, the requirement for the processing materials is strict, the processing parameter 'window' is small, and the influence of material surfaces on the focal spots is large; and only one optical element is used for generation of the linear focal spots, processing of the element can be achieved through the prior art, and the complexity generated by a Bessel beam is overcome. The axial length of the linear focal spots is not limited theoretically, and the laser energy loss is the minimum. The optical element achieving the axial uniform linear focal spots overcomes the defects that the focal depth range of the Bessel beam is limited, and the peak power of the Bessel beam is low.
Description
Technical field
The present invention relates to a kind of optics, more particularly to a kind of transmission or anti-for changing laser beam focusing characteristic
Emitter part.
Background technology
Glass, sapphire and wafer etc. are transparent or application field of fragile material is more and more extensive, it is most representational should
It is consumable electronic product with field, such as the panel of smart mobile phone, the protecting window of camera, fingerprint recognition window part be
Through largely having used the transparent materials such as strengthened glass, sapphire.Therefore, have to the effective and rapid processing of these materials important
Realistic meaning.Traditional machining process speed is slow, chipping is serious, consumptive material with it is costly, be increasingly difficult to meet
Increasingly increased transparent or fragile material processing request.With the fast development of laser technology, people are generally recognized
With high-power laser beam as instrument laser processing.Although however, the processing method crudy based on laser ablation
But it is not high far above mechanical means process velocity and equipment cost is expensive, it is difficult to meet the industrial requirement of rapid growth.It is based on
The CO of thermal stress2Laser cutting can only then be used for carrying out straight cuts, be difficult to realize opposite sex cutting, and crudy is difficult to meet
It is required that.
In order to overcome above-mentioned laser cutting transparent or fragile material weakness, in the market occurs in that two kinds of sides of fly-cutting
Method.One kind is recessive patterning method, and the method uses digital aperture camera lens high by Laser Focusing inside transparent material, by producing
Stress decompose material.The advantage of the method is that cutting speed is fast, edge quality is good (almost without chipping), and zero draft,
Have the disadvantage that straight cuts can only be done, need following process such as sliver etc., and need multilayer to cut thick material.Another kind is
" chevilled silk " patterning method, the method produces thread strong stress and micro-crack in the material using the laser of high power density, makes material
Automatic classifying, its most outstanding feature is can the thick material of fly-cutting.Producing the method for thread stress also has two kinds, one kind
It is " filament " effect, it is the self-focusing caused by the nonlinear effect of ultrafast laser and the line with high power density for producing
Shape optical channel, as described in bibliography (1), (2)；Another kind is by laser beam reshaping, being allowed to have the spy for elongating focal spot
Different light beam, such as bessel beam, the document that sees reference (3).The former shortcoming is, machined parameters strict to the material requirements processed
" window " is small, influenceed than larger by material surface；Though the latter is bessel beam can produce similar filament long and narrow light beam and
It is little in the change of focal depth range internal power, but its significant drawback is that focal depth range is limited, peak power is relatively low, and pulse may not
It is enough to destroy material, the optical system for being additionally formed bessel beam is also more complicated.
(1)A.Couairon&A.Mysyrowicz,Femtosecond filamentation in transparent
media,Physics Reports 441(2007)47-189
(2)Abhas S.Hosseini&Peter R.Herman,Method of material processing by
laser filamentation,US patent 9296066
(3)Wu-Jung Tsai et al,Internal modification for cutting transparent
glass using femtosecond Bessel beams,Optical Engineering 53(5),051503(May
2014)
The content of the invention
The invention aims to the problem for overcoming above-mentioned prior art to exist, there is provided a kind of optics, it can make
The laser beam of any specific shape is nondestructively focused into wire focal spot in the direction of the optical axis.The power density of this wire focal spot exists
Can infinite approach constant in the certain distance (such as 0.5mm thick transparent material) of optical axis direction.As it was previously stated, to make
It is bright with fragile material automatically cracking, it is necessary to the material internal fine fisssure for producing light laser high is full of from upper surface to lower surface,
Exactly require the destruction long enough that laser is produced in thickness direction.And in order to ensure cross section quality, the propagation of micro-crack
Need in optical axis direction or the thickness direction of material, it is impossible to any to propagate, this requires the destroyed area that laser is produced in width
It is narrow as far as possible on degree.In sum, for make the high-quality automatic fracture of material, it is necessary to laser narrower width, depth of focus
It is more long, it is completely the same the characteristics of this is with optics of the invention.
Technical scheme of the invention is：
A kind of optics for realizing axial uniform line focal spot, is lens, it is characterised in that：The lens at least one side
It is curved surface, and the incident light of any cross direction profiles is burnt by the way that uniform wire is presented after the lens focus on the optical axis of lens
Spot.
A kind of optics for realizing axial uniform line focal spot, is speculum, it is characterised in that：The speculum is song
Face, and the incident light of any cross direction profiles is burnt by the way that uniform wire is presented after the focusing mirror on the optical axis of speculum
Spot.
Described curved surface is aspherical.This ensure that the formation of uniform line-focus.
The plane of incidence of the lens is plane, and exit facet is curved surface, and curved surface is aspherical.
The plane of incidence of the lens is curved surface, and exit facet is plane, and curved surface is aspherical.
The plane of incidence and exit facet of the lens are curved surface, and curved surface is aspherical.
Principle of the invention is distributed according to the transverse field of incoming laser beam, designs corresponding focusing optics, is made
After the present invention is focused on, laser beam power density keeps not incoming laser beam in the corresponding axial range of normal near focal point
Become.
Machined material is no longer received using the uniform wire focal spot produced by Aspheric optics proposed by the invention
Influence, thus instant invention overcomes " filament " effect it is strict to the material requirements processed, machined parameters " window " are small, by material
Surface influence than it is larger the shortcomings of.In addition, the generation of wire focal spot of the invention only uses single optical element, and the element
Process completely available existing technology to solve, such as diamond tool turning, therefore produced instant invention overcomes bessel beam
Complexity.Finally, the scope of wire focal spot of the invention in theory can be with unrestricted, while the loss to laser energy is also
It is minimum therefore limited with the relatively low deficiency of peak power invention also overcomes bessel beam focal depth range.
Brief description of the drawings
Fig. 1 is light path schematic diagram of the invention.
Fig. 2 is the light path schematic diagram of the plano-aspheric optical lens for realizing line focal spot of the invention.
Fig. 3 is the light path schematic diagram of the aspherical-planar wave lens for realizing line focal spot of the invention.
Fig. 4 is the light path schematic diagram of the sphere-aspherics lens for realizing line focal spot of the invention.
Fig. 5 is the light path schematic diagram of the aspherics speculum for realizing line focal spot of the invention.
Specific embodiment
With reference to accompanying drawing, the invention will be further described.
As shown in figure 1, the present invention is lens 4, it is characterised in that：The plane of incidence and exit facet of the lens are curved surface,
And the incident light of any cross direction profiles on the optical axis of lens by being presented uniform wire focal spot after the lens focus.The present invention
Lens 4 be made up of any optical material for being suitable for high power laser light transmission, its plane of incidence 5 and exit facet 6 are curved surface, and bent
Face is aspherical.The laser beam 1 of any cross direction profiles is converged through lens 4 to optical axis 7, by inner circle light 2 and outward in laser beam 1
The annulus of the circle composition of light 3 forms light line segment 10 by producing refracted light 9 and 8 after optical lens 4.Refracted light 8 and 9 phases
Meet at a little 11.Intersected with optical axis 7 by refracted light 8 and 92 points of the length of light line segment 10 are determined.By change the plane of incidence 5 or
The curvature on exit facet 6 or simultaneously two sides, the length of light line segment 10 can be change, so as to the laser work(on this light line segment can be caused
The change of rate density, that is to say, that the power density on focal point optical axis on each line segment can be by changing the surface of lens 4
Curvature and controlled.If the plane of incidence 5 is proper with the curvature selection of exit facet 6, it is possible to realize that power density distribution is uniform
Wire focal spot.Actual joining 11 should from optical axis it is close and can on any one side of optical axis, but be easy to diagram say
Bright, the distance in figure is exaggerated.
Under normal circumstances, the curvature of the plane of incidence 5 and exit facet 6 is distance with light 2 and 3 and optical axis 7 and changes,
Therefore all it is aspherical.While light distribution, Refractive Index of Material, material thickness of the change of this curvature also with laser beam 1
And the length of required uniform wire focal spot is relevant.The plane of incidence 5 passes through geometric optics, differential with the curvature estimation of exit facet 6
Equation is obtained with numerical computations.
Above-mentioned numerical calculation result can be directly inputted to hyperfine diamond bit cuts and be processed on machine, if
Single-piece, then can be to the direct processing of optical material；If batch, then can first processing mold, then entered with the mode of pressing mold
Row is produced in enormous quantities.
Calculate and reduce manufacturing cost to simplify, the structure of Fig. 1 can do various conversion without influenceing institute of the present invention
The effect and feature of statement.
As shown in Fig. 2 the plane of incidence of lens of the invention is plane, exit facet is curved surface, and curved surface is aspherical.
As shown in figure 3, the plane of incidence of the lens of the invention is curved surface, exit facet is plane, and curved surface is aspherical.
As shown in figure 4, the plane of incidence and exit facet of the lens of the invention are curved surface, and curved surface is aspherical.
As shown in figure 5, the present invention is speculum, it is characterised in that：The speculum is curved surface, and incident light is by described
Speculum reflection is presented uniform wire focal spot after focusing on the optical axis of speculum.
Claims (6)
1. a kind of optics for realizing axial uniform line focal spot, is lens, it is characterised in that：The lens are at least simultaneously
Curved surface, and the arbitrarily incident light of cross direction profiles on the optical axis of lens by being presented uniform wire focal spot after the lens focus.
2. a kind of optics for realizing axial uniform line focal spot, is speculum, it is characterised in that：The speculum is curved surface,
And the incident light of any cross direction profiles on the optical axis of speculum by being presented uniform wire focal spot after the focusing mirror.
3. the optics for realizing axial uniform line focal spot according to claim 1 and 2, it is characterised in that：Described song
Face is aspherical.
4. the optics for realizing axial uniform line focal spot according to claim 1, it is characterised in that：The lens enter
Face is penetrated for plane, exit facet is curved surface, and curved surface is aspherical.
5. the optics for realizing axial uniform line focal spot according to claim 1, it is characterised in that：The lens enter
Face is penetrated for curved surface, exit facet is plane, and curved surface is aspherical.
6. the optics for realizing axial uniform line focal spot according to claim 1, it is characterised in that：The lens enter
Penetrate face and exit facet is curved surface, and curved surface is aspherical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710076040.8A CN106695117A (en) | 2017-02-13 | 2017-02-13 | Optical element achieving axial uniform linear focal spots |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710076040.8A CN106695117A (en) | 2017-02-13 | 2017-02-13 | Optical element achieving axial uniform linear focal spots |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106695117A true CN106695117A (en) | 2017-05-24 |
Family
ID=58911196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710076040.8A Pending CN106695117A (en) | 2017-02-13 | 2017-02-13 | Optical element achieving axial uniform linear focal spots |
Country Status (1)
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| CN (1) | CN106695117A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110435160A (en) * | 2019-09-09 | 2019-11-12 | 广东利元亨智能装备股份有限公司 | A kind of laser welding head and method for laser welding |
| CN115291386A (en) * | 2022-10-10 | 2022-11-04 | 泉州师范学院 | Method for realizing random pointing of same light focal spot to linear array |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1090649A (en) * | 1993-12-21 | 1994-08-10 | 中国科学院上海光学精密机械研究所 | The continuously adjustable uniform line Focused Optical system of focal line length |
| CN1573364A (en) * | 2003-05-22 | 2005-02-02 | 液体空气乔治洛德方法利用和研究的具有监督和管理委员会的有限公司 | Focusing optic for laser cutting |
| US20050098548A1 (en) * | 2003-11-06 | 2005-05-12 | Satoshi Kobayashi | Processing apparatus using laser beam |
| CN102262282A (en) * | 2010-05-31 | 2011-11-30 | 深圳市大族激光科技股份有限公司 | Ultraviolet laser focusing lens, laser marking machine and laser ruling machine |
| CN104339084A (en) * | 2013-07-29 | 2015-02-11 | Ap系统股份有限公司 | Device for processing brittle substrate using aspherical lens having multi focuses |
| CN105209218A (en) * | 2013-01-15 | 2015-12-30 | 康宁激光技术有限公司 | Method and device for laser-based machining of flat substrates |
-
2017
- 2017-02-13 CN CN201710076040.8A patent/CN106695117A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1090649A (en) * | 1993-12-21 | 1994-08-10 | 中国科学院上海光学精密机械研究所 | The continuously adjustable uniform line Focused Optical system of focal line length |
| CN1573364A (en) * | 2003-05-22 | 2005-02-02 | 液体空气乔治洛德方法利用和研究的具有监督和管理委员会的有限公司 | Focusing optic for laser cutting |
| US20050098548A1 (en) * | 2003-11-06 | 2005-05-12 | Satoshi Kobayashi | Processing apparatus using laser beam |
| CN102262282A (en) * | 2010-05-31 | 2011-11-30 | 深圳市大族激光科技股份有限公司 | Ultraviolet laser focusing lens, laser marking machine and laser ruling machine |
| CN105209218A (en) * | 2013-01-15 | 2015-12-30 | 康宁激光技术有限公司 | Method and device for laser-based machining of flat substrates |
| CN104339084A (en) * | 2013-07-29 | 2015-02-11 | Ap系统股份有限公司 | Device for processing brittle substrate using aspherical lens having multi focuses |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110435160A (en) * | 2019-09-09 | 2019-11-12 | 广东利元亨智能装备股份有限公司 | A kind of laser welding head and method for laser welding |
| CN115291386A (en) * | 2022-10-10 | 2022-11-04 | 泉州师范学院 | Method for realizing random pointing of same light focal spot to linear array |
| CN115291386B (en) * | 2022-10-10 | 2023-02-24 | 泉州师范学院 | Method for realizing random pointing of same light focal spot to linear array |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170524 |
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| WD01 | Invention patent application deemed withdrawn after publication |