CN106181675B - A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness - Google Patents

A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness Download PDF

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Publication number
CN106181675B
CN106181675B CN201610530355.0A CN201610530355A CN106181675B CN 106181675 B CN106181675 B CN 106181675B CN 201610530355 A CN201610530355 A CN 201610530355A CN 106181675 B CN106181675 B CN 106181675B
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China
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concave cone
calcirm
fluoride
rod
magnetic fluid
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CN106181675A (en
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钟显云
李良红
万勇建
吴强
龚艳发
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Institute of Optics and Electronics of CAS
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Institute of Optics and Electronics of CAS
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
    • B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness.The instrument mainly includes right angled flange, motor diverter, straight line rod, Ru-Fe-Mn bar magnet, guide rod, baseline rod, shaping rod.The invention has taken into full account the material property and concave cone face polymorphic structure characteristic of calcium fluoride crystal, Even Grinding is carried out to calcirm-fluoride concave cone using magnetic fluid straight line magnetic bar based on magnetic fluid process technology, the sub-surface for eliminating calcirm-fluoride concave cone face destroys layer and medium-high frequency, the surface roughness in lifting concave cone face.The present invention has stronger controlling to the face shape in calcirm-fluoride concave cone face, cone angle, there is stronger enhancing to the roughness in concave cone face, the technical bottleneck of calcirm-fluoride concave cone abnormal curved surface can not be processed by breaching domestic existing process, and the development for carrying out litho machine projection exposure optical system for China provides technical guarantee.

Description

It is a kind of be applied to lifting calcirm-fluoride concave cone mirror roughness magnetic fluid machining tool and add Work method
Technical field
The present invention relates to the precision machined technical field of nano-precision, more particularly to a kind of efficient suitable for calcirm-fluoride concave cone mirror The magnetic fluid tool design and method of processing.
Background technology
The development of great scale integrated circuit has turned into the foundation stone of electronics and information industry, master of the litho machine as integrated circuit Want etching apparatus, experienced exposure wavelength from 436nm, 365nm, 246nm near ultraviolet enter 193nm deep ultraviolet and 13.2nm extreme ultraviolets.The litho machine development of high-density integrated integrated circuit is significant to national defense safety, scientific and technological progress, directly Connect and have influence on following strategic position in China.
Lithography illuminating system is the core component of litho machine projection exposure optical system, and its function mainly carries for mask plane For Uniform Illumination, control exposure dose and realize off-axis illumination pattern.The ordinary optical imaging system depth of field in the light optics decorum The physical cause of finiteness is due to the diffraction of light, with the difference of defocus position (i.e. beam propagation position), diffraction pattern Size drastically changes, and there is Beams caused by directional light incidence axial cone mirror center spot to keep within the specific limits not The characteristic of change.When spherical wave illumination axial cone mirror, caused diffraction pattern is slowly varying in certain scope.Shone to improve The beam shaping efficiency of bright system, diffraction element and axial cone microscope group need to be used to close, by the coherence factor of adjustment axis axicon lens, to carry The zoom capabilities of high beam shaping unit.Axial cone mirror caused diffracted beam in image distance is approximately zero Bessel function, Only change the phase of system in non-diffracting imaging, its center spot radius is basically unchanged, and is the important device of salt free ligands optical imagery Part, its advantage in lamp optical system mainly have：
(1) when traditional optical is imaged, point spread function changes quickly with defocus, and very big difficulty is caused to image restoration. And the center spot size and shape of Beams caused by axicon lens keeps constant within the specific limits；
(2) applied optics system is conventional reduces relative aperture to increase the depth of field, but can reduce the spatial resolution of system, makes Image detail obscures.Axial cone mirror is because with the burnt characteristic of line, system can be increased by being applied in optical imaging system Depth of focus；
(3) axial cone mirror microscope group can be with the change of spacing between axial cone mirror unit, ring width inside and outside caused ring illumination Also change, the flex point (tip of circular cone) at the center of axial cone mirror element can serve the effect of segmentation light beam.
Therefore, axial cone mirror has very important status, the high accuracy of axial cone mirror in the imaging of whole lithography illuminating system Processing is to ensure that whole illuminator has high resolution, high energy transmission, the important prerequisite of the high imaging system depth of field.
CaF2Crystalline material can be from ultraviolet wavelength (125nm) to infrared wavelength (12 μm), while also has difference compensation work( Can, there is water white transparency, the optical advantage such as absorption coefficient is low, antibody Monoclonal threshold value height, the high, phenomenon free of birefringence of permeability.CaF2 Axial cone mirror is one of essential Primary Component of deep ultraviolet (DUV), extreme ultraviolet (EUV) lithography illuminating system.
By experiment and research for many years, Chinese Academy of Sciences's photoelectricity has been completed CaF2The technology of convex cone processing is touched Rope, realize CaF2The Ultra-smooth machining of convex cone.And surface figure accuracy and roughness lifting for concave cone, technology method tool There is higher challenge, be mainly reflected in：
(1) concave cone mirror bus is inconsistent in process linear velocity, and central area linear velocity is almost nil, existing process skill When art processes concave cone mirror, bus straight line degree and central area destruction layer are uncontrollable；
(2) concave cone curved surface is polymorphic structure, and curvature mirror change is inconsistent, and concave cone center is flex point, and whole face can not be entered Row uniform smooth；
(3) concave cone central area relative aperture is deeper, and machining locus is limited, meanwhile, existing processing bistrique can not be applied Processed in concave cone minute surface.
Based on above-mentioned consideration, it is not strict to processing required distance non-contact to meet that concave cone mirror processes most basic method Formula flexible fluid bombards technology, such as jet process technology or ion beam fabrication technology.As existing etching system concave cone depth is 20-40mm, processing conditions can be met using bombardment mode of the processing distance more than 40mm.
It is high by the polishing fluid that will be mixed with abrasive material using Zeeko scientific research institutions of Britain as the jet process technology that representative develops Pressure is bombarded in workpiece minute surface, and processing distance is 1mm-80mm.It is 0.1mm-2mm to bombard a fluid stream bore.The small-bore polishing spot can Effective correction of the flank shape is carried out to the 2mm-5mm spatial frequency errors of minute surface, but the grinding granulation uniformity of injection, concentration are difficult to control, Existing technological means can only meet that roughness Rq2nm-4nm is processed, and therefore, the technical method can not realize photo-etching machine illumination system The Ultra-smooth machining requirement of system axial cone mirror.
German IOM scientific research institutions are that the ion beam fabrication technology of representative development is to ionize ar atmo by vacuum to carry out ion Workpiece minute surface is bombarded, processing distance can reach can reach 5mm-100mm for 5mm-50mm, bombardment beam spot.IOM technical staff uses Sacrifice layer process technology realizes the lifting of optical element roughness.However, ion beam processing beam spot is focus on light beam, for concave cone Abnormal curved surface, the pollution of the diffraction and central area minute surface of central area is easily caused, the standard of central area face shape can not be realized Really remove and roughness is lifted.
Although flexible fluid bombardment technology can apply to the processing of concave cone mirror, its technical matters can not solve to be lifted CaF2The technical barrier of crystal roughness.And it is by flexible magnetic fluid with the magnetorheological process technology of U.S.'s QED development of company Flexible polishing mould is formed in externally-applied magnetic field to realize the shear removal of specular material, bombards technology relative to flexible fluid, it is soft Property magnetic fluid can realize the Ultra-smooth machining of optical mirror plane for the polished die of carrier.The nano particle size that at present prepared by QED is magnetorheological Liquid can realize CaF2Material roughness is less than 0.3nm Ultra-smooth machining.But the technological deficiency is bistrique and workpiece minute surface distance Less than 1.2mm.Photoelectric technology research institute of the Chinese Academy of Sciences has completed CaF using the Magnetorheologicai polishing liquid and glossing of independent development2 The Ultra-smooth machining of concave cone mirror, and can not but penetrate with concave cone minute surface for concave cone mirror, existing magneto-rheological grinding head.
According to the architectural characteristic of concave cone abnormal curved surface and the CaF of early stage2The processing experience of concave cone mirror, the present invention is referred from soft The Ultra-smooth machining ability of property magnetic fluid has carried out magnetic fluid tool design and process research, CaF2Concave cone roughness passes through Process within nearly 70 hours, surface roughness is promoted to 0.5nm from 25nm, and surface figure accuracy is promoted to from PV (peak-to-valley value) from 1.3 microns 0.4 micron, frustoconical bevel angle error is 5 rads.It is demonstrated experimentally that the magnetic fluid magnetic bar and process of the present invention can realize fluorination The surface figure accuracy lifting of calcium concave cone and Ultra-smooth machining.Ground in the lithography machine illumination system axial cone mirror of great scale integrated circuit There is important value in system.
The content of the invention
The technical problems to be solved by the invention are to overcome existing technical matters processing can not be applied to CaF2Concave cone mirror The technological deficiency of processing, there is provided one kind can be applied to CaF2Concave cone mirror high efficiency, high accuracy improve the technical matters of roughness, from And provide technical guarantee for the high accuracy development of lithographic objective illuminator.The invention has taken into full account calcium fluoride crystal material The characteristic such as material property and concave cone face polymorphic structure, calcirm-fluoride concave cone is entered using straight line magnetic bar based on magnetic fluid process technology Row Even Grinding, the sub-surface for eliminating calcirm-fluoride concave cone face destroy layer and surface medium-high frequency, the surface roughness in lifting concave cone face. The present invention has stronger controlling to the face shape in calcirm-fluoride concave cone face, cone angle, to the surface roughness tool in calcirm-fluoride concave cone face There is stronger enhancing, the technical bottleneck of concave cone abnormal curved surface can not be processed by breaching domestic existing process, carry out light for China The quarter development of machine projection exposure optical system provides technical guarantee.
To solve the above problems, the present invention is realized using following technical scheme：
A kind of magnetic fluid machining tool for being applied to lifting calcirm-fluoride concave cone mirror roughness：Magnetic fluid machining tool includes straight Angle flange disk, motor diverter, straight line rod, Ru-Fe-Mn bar magnet, guide rod, baseline rod and shaping rod；Wherein,
Described right angled flange upper end is fixed on lathe milling axle pedestal, meanwhile, motor diverter is fixed on right angle Ring flange bottom, the rotating shaft of motor diverter and lathe milling axis connection, i.e., the vertical duction of lathe milling axle is formed into horizontal turn To；
Described straight line rod is external diameter 12mm, internal diameter 8mm straight tube, and material is austenitic stainless steel material, and it is installed on electricity Machine diverter endoporus；
The permeability magnetic material of described magnetic fluid instrument is Ru-Fe-Mn bar magnet, and magnetic field intensity is 1.25-1.28 teslas, magnetic pole For the both ends of bar magnet, Ru-Fe-Mn bar magnet is embedded in straight line rod, and combination forms straight line magnetic bar；
Described guide rod surface has concave slide groove, and is installed on motor diverter side by bolt；
Described baseline rod is fixed on guide rod concave slide groove, can adjust shaping rod and straight line rod by moving reference bar Distance；
Described shaping rod is mounted on baseline rod centre bore, and is fixed by bolt from side.
Wherein, described shaping rod is tungsten carbide material, for moulding to magnetic flow liquid.
The present invention also provides a kind of magnetic fluid processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness, and utilization is above-mentioned The magnetic fluid machining tool for being applied to lifting calcirm-fluoride concave cone mirror roughness, described a whole set of magnetic fluid machining tool needs to install Yu Yitai possesses to be carried out on the Digit Control Machine Tool of X, Z, A, C universal driving shaft, and X-axis is trunnion axis, Z axis is vertical axis, is rotated around X-axis Be A axles, about the z axis rotation be C axles, calcirm-fluoride concave cone mirror to be processed is installed on turntable C axles, calcirm-fluoride concave cone mirror to be processed (10) axis and C overlapping of axles, need that turntable is carried out into A axle inclinations according to coning angle before calcirm-fluoride concave cone mirror to be processed processing, really Protect the concave cone bus and straight line rod horizontal parallel of calcirm-fluoride concave cone mirror to be processed；
Wherein, described calcirm-fluoride concave cone mirror working process parameter is：C axle autobiographies speed is 5-10RPM, straight line rod rotating speed For 4000-6000RPM, X-axis feed speed is 800-1000mm/min, and Z axis feed speed is 30-50mm/min, magnetic flow liquid Thickness is 3mm, and crush-cutting depth is 1mm, and magnetic flow liquid replacing construction is 30min-50min.
Compared with prior art, advantages of the present invention is：
1st, the present invention is the material property and concave cone face polymorphic structure characteristic according to calcium fluoride crystal, flexible according to magnetic fluid Polishing technology can realize the technical advantage of calcirm-fluoride Ultra-smooth machining, and one kind of development is lifted suitable for calcirm-fluoride concave cone roughness Magnetic fluid machining tool；
2nd, involved concave cone of the invention is simple in construction, and technology is stable, and working ability is strong, suitable for any angle Concave cone structure；
3rd, magnetic fluid instrument and method of the invention solve the domestic state of the art that can not process CaF2 concave cones, are China The development of lithographic objective illuminator provides technical guarantee.
Brief description of the drawings
Fig. 1 is applied to CaF2The magnetic fluid machining tool schematic diagram of concave cone mirror processing；
Fig. 2 is right angle flange and motor diverter connection diagram；
Fig. 3 is Ru-Fe-Mn bar magnet in the straight line magnetic bar schematic diagram of straight line magnetic force bar construction；
The connected mode schematic diagram of bar and guide rod on the basis of Fig. 4；
Fig. 5 is magnetic fluid tool processes CaF2The process schematic of mirror；
Fig. 6 is magnetic fluid tool processes CaF2The roughness evolution of experimental piece.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention will be further explained：
As shown in figure 1, the magnetic fluid instrument of the calcirm-fluoride concave cone mirror roughness of the present invention mainly includes：Right angled flange 1, Motor diverter 2, straight line rod 3, Ru-Fe-Mn bar magnet 4, guide rod 5, baseline rod 6, shaping rod 7；
As shown in Fig. 2 the described upper end of right angled flange 1 is fixed on lathe milling axle pedestal 8, meanwhile, motor deflecting Device 2 is fixed on the bottom of right angled flange 1, and the rotating shaft of motor diverter is connected with lathe milling axle 9, i.e. hanging down lathe milling axle 9 Straight steering component is horizontally diverted；
As shown in figure 3, described straight line rod 3 is external diameter 12mm, internal diameter 8mm straight tube, material is austenitic stainless steel material, It is installed on the endoporus of motor diverter 2；
As shown in figure 3, the permeability magnetic material of described magnetic fluid instrument is Ru-Fe-Mn bar magnet 4, magnetic field intensity 1.25-1.28 Tesla.Magnetic pole is the both ends of bar magnet, and Ru-Fe-Mn bar magnet 4 is embedded in straight line rod 3, and combination forms straight line magnetic bar；
The described surface of guide rod 4 has concave slide groove, and is installed on the side of motor diverter 2 by bolt；
As shown in figure 4, described baseline rod 6 is fixed on guide rod concave slide groove, shaping rod 7 and straight line rod 3 can be adjusted up and down Distance；
As shown in figure 4, described shaping rod 7 is mounted on the centre bore of baseline rod 6, and fixed by bolt from side, Shaping rod 7 is tungsten carbide material, is mainly used in moulding to magnetic flow liquid progress；
As shown in figure 5, described a whole set of work magnetic fluid instrument need to be installed on a numerical control machine for possessing X, Z, A, C universal driving shaft Carried out on bed, calcirm-fluoride concave cone mirror 10 is installed on turntable C axles, needs to be turned according to coning angle before the processing of calcirm-fluoride concave cone mirror Platform carries out A axle inclinations, it is ensured that concave cone bus and straight line rod horizontal parallel；
Described calcirm-fluoride concave cone mirror working process parameter is：C axle autobiographies speed is 5-10RPM, and straight line rod rotating speed is 4000-6000RPM, X-axis feed speed are 800-1000mm/min, and Z axis feed speed is 30-50mm/min, and magnetic flow liquid is thick It is 1mm to spend for 3mm, crush-cutting depth, and magnetic flow liquid replacing construction is 30min-50min.By above-mentioned technology method, to one BlockThe concave cone CaF2 materials progress roughness lifting that cone angle is 140 degree, by 6 cycles, the processing of totally 70 hours, Roughness Rq is promoted to 0.5nm by 25nm, and surface figure accuracy PV (peak-to-valley value) is promoted to 0.4 micron from 1.3 microns, and frustoconical bevel angle misses Difference is 5 rads, as shown in Figure 6.
What the present invention did not elaborated partly belongs to techniques well known.

Claims (4)

  1. A kind of 1. magnetic fluid machining tool for being applied to lifting calcirm-fluoride concave cone mirror roughness, it is characterised in that：Magnetic fluid is processed Instrument includes right angled flange (1), motor diverter (2), straight line rod (3), Ru-Fe-Mn bar magnet (4), guide rod (5), baseline rod And shaping rod (7) (6)；Wherein：
    Right angled flange (1) upper end is fixed on lathe milling axle pedestal (8), meanwhile, motor diverter (2) is fixed on rectangularity Blue disk (1) bottom, (2) rotating shaft of motor diverter are connected with lathe milling axle (9), i.e., by the vertical duction of lathe milling axle (9) Composition is horizontally diverted；
    Straight line rod (3) is external diameter 12mm, internal diameter 8mm straight tube, and material is austenitic stainless steel material, and it is installed on motor diverter (2) endoporus；
    The magnetic conductive material of magnetic fluid machining tool is Ru-Fe-Mn bar magnet (4), and magnetic field intensity is 1.25-1.28 teslas, magnetic pole For the both ends of bar magnet, Ru-Fe-Mn bar magnet (4) is embedded in straight line rod (3), and combination forms straight line magnetic bar；
    Guide rod (5) surface has concave slide groove, and is installed on motor diverter (2) side by bolt；
    Baseline rod (6) is fixed on guide rod (5) concave slide groove, can adjust shaping rod (7) and straight line rod by moving reference bar (6) (3) distance；
    Shaping rod (7) is mounted on baseline rod (6) centre bore, and is fixed by bolt from side.
  2. 2. a kind of magnetic fluid machining tool for being applied to lifting calcirm-fluoride concave cone mirror roughness according to claim 1, its It is characterised by：Shaping rod (7) is tungsten carbide material, moulding for being carried out to magnetic flow liquid.
  3. 3. a kind of magnetic fluid processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness, utilize fitting described in claim 1 For lifting the magnetic fluid machining tool of calcirm-fluoride concave cone mirror roughness, it is characterised in that：A whole set of magnetic fluid machining tool needs to pacify Loaded on being carried out on a Digit Control Machine Tool for possessing X, Z, A, C universal driving shaft, X-axis is trunnion axis, Z axis is vertical axis, is revolved around X-axis It is A axles to turn, rotation is C axles about the z axis, and calcirm-fluoride concave cone mirror (10) to be processed is installed on C axle turntables, calcirm-fluoride to be processed Concave cone mirror (10) axis and C overlapping of axles, need that turntable progress A axles are inclined according to coning angle before calcirm-fluoride concave cone mirror to be processed processing Tiltedly, it is ensured that the concave cone bus of calcirm-fluoride concave cone mirror (10) to be processed and straight line rod (3) horizontal parallel.
  4. 4. a kind of magnetic fluid processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness according to claim 3, its It is characterised by：Calcirm-fluoride concave cone mirror (10) working process parameter is：C axle autobiographies speed is 5-10RPM, and straight line rod rotating speed is 4000-6000RPM, X-axis feed speed are 800-1000mm/min, and Z axis feed speed is 30-50mm/min, and magnetic flow liquid is thick It is 1mm to spend for 3mm, crush-cutting depth, and magnetic flow liquid replacing construction is 30min-50min.
CN201610530355.0A 2016-07-07 2016-07-07 A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness Expired - Fee Related CN106181675B (en)

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CN114603430B (en) * 2022-05-10 2022-08-19 中国科学院光电技术研究所 Method for inhibiting surface band-breaking errors of deep axicon optical element

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