CN105269412B - A kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing - Google Patents
A kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing Download PDFInfo
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- CN105269412B CN105269412B CN201510595451.9A CN201510595451A CN105269412B CN 105269412 B CN105269412 B CN 105269412B CN 201510595451 A CN201510595451 A CN 201510595451A CN 105269412 B CN105269412 B CN 105269412B
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- fluoride
- calcirm
- convex cone
- cone mirror
- technique
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/16—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by turning
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing, the material property and convex cone face polymorphic structure characteristic of calcium fluoride crystal are taken into full account, work flow is divided into shaping, surface figure accuracy lifting, roughness to lift three links and milling forming technique, three kinds of process integrations of diamond turning techniques and Technique of Magnetorheological Finishing is respectively adopted is processed, the technical bottlenecks such as the coning angle, surface figure accuracy, roughness of calcirm-fluoride convex cone are defeated in detail.The present invention is high in machining efficiency, cone angle precision is accurate, surface figure accuracy and roughness are controllable, stably, and the technical bottleneck of calcirm-fluoride convex cone abnormal curved surface can not be processed by breaching domestic existing process, and the development for carrying out litho machine projection exposure optical system for China provides technical guarantee.
Description
Technical field
The present invention relates to the precision machined technical field of nano-precision, more particularly to a kind of efficient suitable for calcirm-fluoride convex cone mirror
The combined technique of processing.
Background technology
With flourishing for power information industry, showed greatly as the integrated circuit manufacturing industry on electronics and information industry basis
The device included on type, characteristic size miniaturization, the development trend of integrated level highly denseization, electronic chip is by tens development
Till now comprising more than one hundred million.Great scale integrated circuit has become the foundation stone of high-tech sector development.It is used as integrated circuit system
The critical process in industry is made, optical exposure machine exposure wavelength enters 246nm, 193nm depth from 436nm, 365nm near ultraviolet
It is ultraviolet.The companies such as external ASML, Canon, Nikon and the mature technology for having successfully completed the development of 193nm litho machines.With me
The highly denseization growth requirement of state's integrated circuit, research and development 193nm litho machines are significant to national defense safety, scientific and technological progress, directly
Connect and have impact on following strategic position of China.
Lithography illuminating system is the core component of litho machine projection exposure optical system, and its function mainly carries for mask plane
For Uniform Illumination, control exposure dose and realize off-axis illumination pattern.The conventional structure type of lithography illuminating system mainly includes
Expand unit, beam shaping unit, four parts of even light unit and illumination objective lens unit.Wherein, the effect of beam shaping unit
It is mainly reflected in even light, the space for controlling incident beam and angle.There is the ordinary optical imaging system depth of field in the light optics decorum
Sex-limited physical cause is due to the diffraction of light, with the difference of defocus position (i.e. beam propagation position), diffraction pattern it is big
It is small drastically to change, and there is the Beams that the incident axial cone mirror of directional light is produced center spot to keep constant within the specific limits
Characteristic.When spherical wave illumination axial cone mirror, produced diffraction pattern is slowly varying in certain scope.To improve illumination
The beam shaping efficiency of system, need to be closed using diffraction element and axial cone microscope group, by the coherence factor of adjustment axis axicon lens, to improve
The zoom capabilities of beam shaping unit.Axial cone mirror is to produce one of conventional optical component of Beams, and it is in illumination light
Advantage in system mainly has：
(1) when traditional optical is imaged, point spread function changes quickly with defocus, and very big difficulty is caused to image restoration.
And the center spot size and shape for the Beams that axicon lens is produced keeps constant within the specific limits；
(2) applied optics system is conventional reduces relative aperture to increase the depth of field, but can reduce the spatial resolution of system, makes
Image detail is obscured.Axial cone mirror is because with the burnt characteristic of line, system can be increased by being applied in optical imaging system
Depth of focus；
(3) axial cone mirror microscope group can be with the change of spacing between axial cone mirror unit, ring width inside and outside the ring illumination of generation
Also change, the flex point (tip of circular cone) at the center of axial cone mirror element can serve the effect of segmentation light beam.
Therefore, axial cone mirror has very important status, the high accuracy of axial cone mirror in the imaging of whole lithography illuminating system
Processing is to ensure that whole illuminator has high resolution, high energy transmission, the important prerequisite of the high imaging system depth of field.
In 193nm lithographic objective systems, CaF2Crystalline material penetration range can be from ultraviolet wavelength (125nm) to infrared
Wavelength (12 μm), while there is difference compensation function, with water white transparency, absorption coefficient is low, antibody Monoclonal threshold value high, permeability
The optical advantages such as phenomenon high, free of birefringence, are widely used in deep-UV lithography objective system, are that lithographic exposure systems are saturating
The optimal optical material of mirror.However, calcium fluoride crystal is typical fragile material, fracture toughness is low, thermal coefficient of expansion is high, lead
The hot low characteristic of coefficient, larger challenge is proposed to existing process technology level.
Sum it up, CaF2Axial cone mirror is the core parts of illuminator, determines the performance of whole illuminator.So
And, with regard to the roughness requirements of its special crystalline material, polymorphic structure and harshness, process technology means are very limited, specific table
It is now：
(1)CaF2Axial cone mirror is soft crystalline material, and the material opposite sex, roughness and finish control are more difficult；
(2)CaF2Axial cone mirror bus is inconsistent in process linear velocity, and central area linear velocity is almost nil, causes to pass
After system technology processing axial cone mirror, the problems such as layer is uncontrollable is destroyed in bus straight line degree difference and central area；
(3)CaF2Axial cone mirror mirror normal is incorgruous, and curvature mirror change is inconsistent, and circular cone center is flex point, machining locus
It is limited, meanwhile, process can not ensure the uniformity and the convergent validity of face shape of removal efficiency；
(4) it is the scattered power of the reduction conical surface, CaF2The surface roughness requirements of axial cone mirror are within 0.5nm, to be limited to CaF2Axle
The polymorphic structure of axicon lens, traditional means can not be used directly, and the country has no ripe, reliable process technology method.
Current foreign countries can ripe processed and applied CaF in 193nm lithographic objective illuminators2The unit of axial cone mirror mainly has
German Zeiss companies, Japan Canon companies and Nikon companies etc. develop the process unit of litho machine.Because China is in the field
Research start late and CaF2Axial cone mirror is limited to specific use, and the country is without referential CaF2Axial cone mirror processes experience.Cause
This, CaF2Production of the high-precision process technology development of axial cone mirror to ensureing lithographic objective illuminator is significant.
The content of the invention
The technical problems to be solved by the invention are：Overcome existing technical matters processing CaF2The technological deficiency of convex cone,
One kind is provided and can be applied to CaF2Convex cone high efficiency, the processing technology of high-precision requirement, so as to be lithographic objective illuminator
High accuracy, which is developed, provides technical guarantee.
To solve the above problems, the present invention uses following technical scheme：
A kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing, it is characterised in that：It is convex according to calcirm-fluoride
The shaping of cone, surface figure accuracy lifting, roughness lift three road technological processes, and milling forming technique, diamond turning is respectively adopted
Three kinds of technical methods of technology and Technique of Magnetorheological Finishing carry out joint processing；
Described milling forming technique is by closest to the quick milling in calcirm-fluoride convex surface of the radius of a ball using numerical-control milling and grinding lathe
Grind as calcirm-fluoride convex cone mirror, cone angle error θ≤0.1 °, conical surface straightness error≤2 micron；
Described diamond turning techniques main lift calcirm-fluoride convex cone mirror surface figure accuracy and coning angle, the fluorination after processing
Calcium convex cone mirror surface figure accuracy peak-to-valley value PV≤λ/8 (λ=632.8nm), cone angle error θ≤0.003 °, roughness Rq≤25nm；
The surface roughness of described Technique of Magnetorheological Finishing main lift calcirm-fluoride convex cone mirror and the face for controlling convex cone mirror
Shape precision, calcirm-fluoride convex cone mirror surface figure accuracy peak-to-valley value PV≤λ/6 (λ=632.8nm), cone angle error θ after processing≤
0.003 °, roughness Rq≤0.5nm；
Described is applied to CaF2The magnetic fluid polishing fluid of material processing mainly includes carbonyl iron dust, two-phase base load liquid, added
Plus agent, Ph additives and abrasive material, the mass ratio of combination is respectively 83%-87%, 10%-15%, 1%-1.5%,
1.2%-2%, 0.01%-0.0.05%；
Described carbonyl iron dust is the soft iron powder of surface area average grain diameter≤3 micron, and two-phase base load liquid is by mass ratio
About 5：1 deionized water and dimethylformamide combination, additive is that benzoic acid receives antioxidant and glycerine NMF, and ph is adjusted
Section agent is sodium hydroxide, and abrasive material is the diamond grinding liquid of 50nm particles；
The technological parameter of described magnetorheological processing is：Polishing fluid penetraction depth 0.1mm-0.2mm, polishes flow quantity：
110L/min-120L/min, grinding speed 1m/min-1.5m/min, polishing field supply are 0.3A-0.4A；
Described Technique of Magnetorheological Finishing is uniformly gone using the flexible removal behavior of magnetic fluid to calcirm-fluoride surfacing
Remove, machining locus is that fixed spiral spacer is 0.05-0.10mm；The calcirm-fluoride convex cone surfacing depth that MRF is removed
For 300 nanometers -500 nanometers.
Compared with prior art, advantages of the present invention is：
(1) present invention process has taken into full account the characteristics such as the hardness and convex cone face polymorphic structure of calcium fluoride crystal material, will
Work flow is divided into shaping, surface figure accuracy lifting, roughness three links of lifting and milling forming technique, diamond is respectively adopted
Three kinds of process integrations of turning technology and Technique of Magnetorheological Finishing are processed, to the coning angle of calcirm-fluoride convex cone, surface figure accuracy, thick
The technical bottlenecks such as rugosity are defeated in detail, with high in machining efficiency, and cone angle precision is accurate, surface figure accuracy and roughness it is controllable,
Stable, the technical bottleneck of calcirm-fluoride convex cone abnormal curved surface can not be processed by breaching domestic existing process, be that China carries out litho machine
The development of projection exposure optical system provides technical guarantee.
(2) present invention be according to calcirm-fluoride convex cone shaping, surface figure accuracy lifting, roughness lifted three road work flows and
Three kinds of milling forming technique, diamond turning techniques and the Technique of Magnetorheological Finishing carried out respectively combine processing technologys, flow letter
Single, technology is compact, highly reliable, to technical bottlenecks such as cone angle, surface figure accuracy, the roughness of lithographic objective illuminator axial cone mirror
There is stronger technological break-through.
(3) involved magnetic fluid polishing fluid of the invention is two-phase base load polishing fluid, and shear yield stress is strong, to crystal
The roughness lifting of material and Ultra-smooth machining have larger breakthrough and stability.
Brief description of the drawings
Fig. 1 is the CaF before and after diamond turning2Convex cone bus straight line degree changes, and linearity is promoted to 0.08 by 1.6 microns
Micron；
Fig. 2 is magnetic converting technique uniform polish CaF2Relation between the liquid penetraction depth and roughness of convex cone process；
Fig. 3 is magnetic converting technique uniform polish CaF2Relation between the fluid flow and roughness of convex cone process；
Fig. 4 is magnetic converting technique uniform polish CaF2Relation between the grinding speed and roughness of convex cone process；
Fig. 5 is magnetic converting technique uniform polish CaF2Relation between the magnetic field intensity and roughness of convex cone；
Fig. 6 is 193nm illuminators CaF2The formal part of convex cone is drilled by the roughness after diamond turning, MRF
Become.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention will be further explained.
A kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing of the invention, according to calcirm-fluoride convex cone into
Type, surface figure accuracy lifting, roughness lifted three road work flows, be respectively adopted milling forming technique, diamond turning techniques and
Three kinds of techniques of Technique of Magnetorheological Finishing carry out joint processing；
Milling forming technique be use numerical-control milling and grinding lathe by closest to the calcirm-fluoride convex spherical speed mill of the radius of a ball for
Calcirm-fluoride convex cone mirror.By the way that calcirm-fluoride convex spherical is coaxially installed on into turntable, simultaneously revolving-turret to axicon lens bus is level angle,
Cup emery wheel is used to process calcirm-fluoride convex spherical for calcirm-fluoride convex cone face.As shown in figure 1, after being processed using milling forming technique
Convex cone straightness error is 1.6 microns, cone angle error θ≤0.1 °；
Diamond turning techniques main lift calcirm-fluoride convex cone mirror surface figure accuracy and coning angle.By by calcirm-fluoride convex spherical
Turntable is coaxially installed on, preferable surface figure accuracy and coning angle can be obtained by walking axicon lens bus track using diamond bit.As schemed
1st, shown in 6, the convex cone straightness error after diamond turning is used for 0.08 micron, and roughness Rq≤25nm, cone angle is missed
Poor θ≤0.003 °；
The surface roughness of Technique of Magnetorheological Finishing main lift calcirm-fluoride convex cone mirror and the surface figure accuracy for controlling convex cone mirror.
By the way that calcirm-fluoride convex spherical is coaxially installed on into turntable, axicon lens bus track is walked using MRF bistrique, by according to convex
Cone nut line respectively polishes position adjustment turntable speed a little, it is ensured that each point residence time is consistent.As shown in fig. 6, roughness Rq≤
0.5nm, cone angle error θ≤0.003 °, surface figure accuracy peak-to-valley value PV≤λ/6 (λ=632.8nm)；
Suitable for CaF2The magnetic fluid polishing fluid of material processing mainly includes carbonyl iron dust, two-phase base load liquid, additive, Ph
Additive and abrasive material, the mass ratio of combination is respectively 83%-87%, 10%-15%, 1%-1.5%, 1.2%-2%,
0.01%-0.0.05%；
Carbonyl iron dust is the soft iron powder of surface area average grain diameter≤3 micron, and two-phase base load liquid is by mass ratio about 5：1
Deionized water and dimethylformamide combination, additive are that benzoic acid receives antioxidant and glycerine NMF, and ph conditioning agents are
Sodium hydroxide, abrasive material is the diamond grinding liquid of 50nm particles；
As shown in Fig. 2 by analyzing magnetorheological polishing liquid penetraction depth and CaF2Relation between convex cone roughness, can be obtained
The technological parameter for obtaining preferable MRF liquid penetraction depth is 0.1mm-0.2mm.
As shown in figure 3, by analyzing Magnetorheologicai polishing liquid flow and CaF2Relation between convex cone roughness, can obtain ideal
MRF liquid flow technological parameter be 110L/min-120L/min.
As shown in figure 4, by analyzing MRF grinding speed and CaF2Relation between convex cone roughness, can be managed
The technological parameter for the MRF grinding speed thought is 1m/min-1.5m/min.
As shown in figure 5, by analyzing MRF field supply and CaF2Relation between convex cone roughness, can be managed
The technological parameter for the MRF field supply thought is 3A-4A.
As shown in fig. 6, using preferable magnetorheological working process parameter：Polishing fluid penetraction depth 0.1mm-0.2mm, polishing
Flow quantity：110L/min-120L/min, grinding speed 1m/min-1.5m/min, polishing field supply are 3A-4A, to diamond
CaF after turning2Convex cone carries out roughness lifting.By the processing of 3 hours, 6 hours, 9 hours, 12 hours, roughness by
15nm-25nm is promoted to respectively：9nm-13nm、4.8nm-6nm、0.7nm-1.1nm、0.3nm-0.5nm.
Technique of Magnetorheological Finishing is uniformly removed using the flexible removal behavior of magnetic fluid to calcirm-fluoride surfacing, plus
Work track is that fixed spiral spacer is 0.05-0.10mm；The calcirm-fluoride convex cone surfacing that MRF is removed is received for 300
- 500 nanometers of rice.
Claims (5)
1. a kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing, it is characterised in that：According to calcirm-fluoride convex cone
Shaping, surface figure accuracy lifting, roughness lifted three road technological processes, milling forming technique, diamond turning skill is respectively adopted
The three kinds of technical method joint processing of art and Technique of Magnetorheological Finishing are realized；
The milling forming technique：It is by the calcirm-fluoride convex surface speed mill closest to the radius of a ball by using numerical-control milling and grinding lathe
Calcirm-fluoride convex cone mirror, cone angle error θ≤0.1 °, conical surface straightness error≤2 micron；
The diamond turning techniques：Calcirm-fluoride convex cone mirror surface figure accuracy and coning angle are lifted, is made using diamond turning techniques
Calcirm-fluoride convex cone mirror surface figure accuracy peak-to-valley value PV≤λ/8 after processing, cone angle error θ≤0.003 °, roughness Rq≤25nm；
The Technique of Magnetorheological Finishing：Lift the surface roughness of calcirm-fluoride convex cone mirror and control the surface figure accuracy of convex cone mirror, adopt
Make calcirm-fluoride convex cone mirror surface figure accuracy peak-to-valley value PV≤λ/6 after processing with Technique of Magnetorheological Finishing, cone angle error θ≤
0.003 °, roughness Rq≤0.5nm.
2. a kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing according to claim 1, its feature
It is：Being applied to the magnetic fluid polishing fluid of calcirm-fluoride convex cone mirror processing in the Technique of Magnetorheological Finishing includes：It is carbonyl iron dust, double
Phase base load liquid, additive, pH adjusting agent and abrasive material, quality hundred ratio respectively 83%-87%, the 10%-15% of each component,
1%-1.5%, 1.2%-2%, 0.01%-0.0.05%.
3. a kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing according to claim 2, its feature
It is：The carbonyl iron dust is the soft iron powder of surface area average grain diameter≤3 micron, and two-phase base load liquid is 5 by mass ratio：1
Deionized water and dimethylformamide combination, additive is that benzoic acid receives antioxidant and glycerine NMF, pH adjusting agent
For sodium hydroxide, abrasive material is the diamond grinding liquid of 50nm particles.
4. a kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing according to claim 1, its feature
It is：The technological parameter of the Technique of Magnetorheological Finishing is：Polishing fluid penetraction depth 0.1mm-0.2mm, polishes flow quantity：
110L/min-120L/min, grinding speed 1m/min-1.5m/min, polishing field supply are 0.3A-0.4A.
5. a kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing according to claim 1, its feature
It is：The Technique of Magnetorheological Finishing is carried out uniform using the flexible removal behavior of magnetic fluid to calcirm-fluoride convex cone mirror surfacing
Remove, machining locus is that fixed spiral spacer is 0.01-0.10mm；The calcirm-fluoride convex cone surfacing that MRF is removed is deep
Spend for 300 nanometers -500 nanometers.
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| CN201510595451.9A CN105269412B (en) | 2015-09-17 | 2015-09-17 | A kind of combined technique suitable for calcirm-fluoride convex cone mirror highly-efficient processing |
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| CN106433478B (en) * | 2016-07-07 | 2019-01-04 | 中国科学院光电技术研究所 | One kind being suitable for CaF2The magnetic fluid polishing fluid and preparation method of material Ultra-smooth machining |
| CN106181675B (en) * | 2016-07-07 | 2018-04-03 | 中国科学院光电技术研究所 | A kind of magnetic fluid machining tool and processing method for being applied to lifting calcirm-fluoride concave cone mirror roughness |
| CN106271901B (en) * | 2016-09-22 | 2018-06-01 | 中国科学院光电技术研究所 | A kind of combined technique suitable for calcirm-fluoride concave cone mirror highly-efficient processing |
| CN106944884B (en) * | 2017-02-09 | 2018-04-13 | 同济大学 | A kind of calcium fluoride crystal method for cleaning surface |
| CN106826409B (en) * | 2017-02-09 | 2018-05-08 | 同济大学 | A kind of calcium fluoride mono crystal polishing method based on aluminium salt complex compound |
| CN107775453A (en) * | 2017-09-05 | 2018-03-09 | 上海现代先进超精密制造中心有限公司 | A kind of high-accuracy processing method of strip speculum |
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| DD262668A1 (en) * | 1987-06-15 | 1988-12-07 | Zeiss Jena Veb Carl | PROCESS FOR THE CHEMICAL-MECHANICAL CLEANER POLLUTION OF CAF LOW 2 SURFACES |
| JPH11188592A (en) * | 1997-12-26 | 1999-07-13 | Canon Inc | Cleaning method of article consisting of potassium fluoride |
| WO2001000907A1 (en) * | 1999-06-25 | 2001-01-04 | Corning Incorporated | Polishing of fluoride crystal optical lenses and preforms using cerium oxide for microlithography |
| JP2004020710A (en) * | 2002-06-13 | 2004-01-22 | Canon Inc | Method for manufacturing optical element |
| JP4391072B2 (en) * | 2002-10-07 | 2009-12-24 | 株式会社トプコン | Optical member polishing method |
| JP4185381B2 (en) * | 2003-02-25 | 2008-11-26 | 株式会社トプコン | Lens polishing method |
| CN102896558A (en) * | 2012-10-17 | 2013-01-30 | 中国人民解放军国防科学技术大学 | Calcium fluoride single crystal ultra-precision machining method based on chemico-mechanical polishing and ion beam polishing combined process |
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