CN106113895A - A kind of method for bonding substrate, Base Plate Lamination Device, display floater and manufacture method - Google Patents

A kind of method for bonding substrate, Base Plate Lamination Device, display floater and manufacture method Download PDF

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Publication number
CN106113895A
CN106113895A CN201610608149.7A CN201610608149A CN106113895A CN 106113895 A CN106113895 A CN 106113895A CN 201610608149 A CN201610608149 A CN 201610608149A CN 106113895 A CN106113895 A CN 106113895A
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China
Prior art keywords
substrate
display floater
amino
carried out
present
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CN201610608149.7A
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Chinese (zh)
Inventor
黄华
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to CN201610608149.7A priority Critical patent/CN106113895A/en
Publication of CN106113895A publication Critical patent/CN106113895A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/18Handling of layers or the laminate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding

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  • Joining Of Glass To Other Materials (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The open a kind of method for bonding substrate of the present invention, Base Plate Lamination Device, display floater and manufacture method.Applying method includes: processes the first surface of first substrate and the second surface branch amination of second substrate respectively, makes first surface adhere to amino with second surface;To fit, to obtain first substrate and the second substrate of laminating on the second surface of the first surface of amino of attachment and the amino of attachment.Using the applying method of the present invention, can make to be adsorbed by the Hydrogen bonding forces of amino between two substrates, this absorption dynamics is significantly larger than the Hydrogen bonding forces of the hydroxyl used in prior art, therefore has stronger laminating effect.In addition, owing to the applying method of the present invention is more firm, in the making being attached to display floater is applied, underlay substrate can be more solidly fixed on carrier substrate, what therefore underlay substrate can be produced is more slim so that is based ultimately upon the display floater that this underlay substrate produces and has less thickness.

Description

A kind of method for bonding substrate, Base Plate Lamination Device, display floater and manufacture method
Technical field
The present invention relates to the making field of display, particularly relate to a kind of method for bonding substrate, Base Plate Lamination Device, show Show panel and manufacture method.
Background technology
In the manufacturing process of display device, need the underlay substrate of display device to be formed is fitted in the microscope carrier producing line On (such as processing microscope carrier, transmission microscope carrier etc.).At present, the underlay substrate of display device and microscope carrier are all that glass material is formed, because of This glass gluing (glass on glass) is key technology, and this technology is necessary to ensure that ultra-thin large-sized underlay substrate and microscope carrier To have enough adhesions between glass, it is ensured that between sealing and laminating fastness.
Current applying method is, forms hydroxyl on underlay substrate with microscope carrier glass, and by the hydrogen bonded of hydroxyl (typically at 40kj/mol), it is achieved underlay substrate and the laminating of microscope carrier glass.For large-sized underlay substrate, need at microscope carrier Increase some laminating layers by techniques such as sputter on glass, to increase the quantity of hydroxyl, thus improve underlay substrate and microscope carrier Adhesive force between glass.But the laminating of existing method is firm not, and laminating effect is poor.
Summary of the invention
It is an object of the invention to provide a kind of can be by the method for two substrate more secure fit.
For achieving the above object, the present invention provides a kind of applying method, for being pasted with second substrate by first substrate Close, including:
Respectively the first surface of first substrate and the second surface of second substrate are carried out amination process, make described first Amino is adhered to described second surface in surface;
By fitting on the second surface of the first surface of the amino of described attachment and the amino of described attachment, to be fitted First substrate and second substrate.
Alternatively, described first substrate and two substrates are formed by glass material.
Alternatively, the first surface of first substrate and the second surface of second substrate are carried out amination process respectively, bag Include:
Described first surface and described second surface are separately immersed in the Organic substance of the amino group with design temperature In mixed liquor and meet set soak duration.
Alternatively, the Organic substance mixed liquor described in amino group includes:
APTES and dehydrated alcohol, described APTES and dehydrated alcohol Volume ratio is 1:15.
Alternatively, described design temperature is 55 DEG C~65 DEG C, a length of 100Min~120Min during described immersion.
Alternatively, at the Organic substance with amino group that described first surface and described second surface are immersed in heating Before mixed liquor, ethanol is used respectively the surface that first substrate and second substrate are to be fit to be soaked.
Alternatively, before described first surface is fitted in described second surface, use that amination is processed by ethanol the One surface and second surface are cleared up;
After cleaning using ethanol to complete, use deionized water first surface that amination is processed and second surface again Clear up.
Alternatively, described method also includes:
Before the first surface of first substrate and the second surface of second substrate are carried out amination process respectively, pass through hydrogen Described first surface and described second surface are carried out by potassium oxide solution;
After cleaning using potassium hydroxide solution to complete, use deionized water to described first surface and described second table Face is carried out.
Alternatively, described potassium hydroxide solution includes:
0.1~the potassium hydroxide of 4%, 0.1~10% anion surfactant, 0.1~10% non-ionic surface active The additive of agent, 1~10% and 66~the deionized water of 98.7%.
On the other hand, the present invention also provides for the manufacture method of a kind of display floater, and the underlay substrate of described display floater is First substrate, the carrier substrate making described display floater is second substrate, and the thickness of described second substrate is more than described first The thickness of substrate, described manufacture method includes:
Above-mentioned applying method is used to be fit together with described second substrate by described first substrate;
Display device is prepared on the surface of the most described second substrate of described first substrate;
Described first substrate is peeled off from described second substrate, obtains described display floater.
Additionally, the present invention also provides for a kind of display floater by above-mentioned manufacture method.
The such scheme of the present invention has the advantages that
Use the applying method of the present invention, can make to be adsorbed by the Hydrogen bonding forces of amino between two substrates, This absorption dynamics is significantly larger than the Hydrogen bonding forces of the hydroxyl used in prior art, therefore has stronger laminating effect Really, need not be such to prior art, laminating layer is additionally set.Further, owing to the applying method of the present invention is more firm, Being attached in the making application of display floater, underlay substrate can more be securely fixed on carrier substrate, therefore substrate base It is more slim that plate can be produced so that is based ultimately upon the display floater that this underlay substrate produces and has less thickness.
Accompanying drawing explanation
Fig. 1 is the step schematic diagram of the applying method of the present invention;
Fig. 2 is the schematic diagram after first substrate uses the applying method laminating of the present invention with second substrate;
Fig. 3-Fig. 4 is the schematic flow sheet of the manufacture method of the display floater of the present invention.
Detailed description of the invention
For making the technical problem to be solved in the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and tool Body embodiment is described in detail.
The problem being difficult to for underlay substrate in prior art and microscope carrier glass fit, the present invention provides a kind of solution party Case.
On the one hand, the present invention provides a kind of applying method, and for being fitted with second substrate by first substrate, (this is the years old One substrate and second substrate are not limited to underlay substrate and the microscope carrier glass of prior art), as it is shown in figure 1, include:
Step 11, carries out amination process to the first surface of first substrate and the second surface of second substrate respectively, makes Described first surface adheres to amino with described second surface;
Step 12, will fit on the second surface of the first surface of the amino of described attachment and the amino of described attachment, with Obtain first substrate and the second substrate of laminating.
The method using the present embodiment, as in figure 2 it is shown, amino N H of first substrate 21 attachment3Adhere to second substrate 22 Amino N ' H '3By hydrogen bonded together.The Hydrogen bonding forces of amino typically at 100kj/mol, the most existing skill The Hydrogen bonding forces of the hydroxyl used in art, therefore the applying method of the present embodiment is compared to prior art, has more firm Laminating effect.
Below in conjunction with an implementation, the applying method bright to this is described in detail.
In actual application, for the making of the Glass on glass corresponding product of this technology, owing to glass pastes Conjunction is crucial, therefore, to assure that ultra-thin glass one of (can as in above-mentioned first substrate and second substrate) in technical process And the enough adhesion between carrier glass (can be as another in above-mentioned first substrate and second substrate), it is ensured that do not occur Sepage and separate problem.
Ultra-thin glass carries out hydrogen bonded (about at 40KJ/MOL) with the hydroxyl of carrier glass itself, it is impossible to realize well Laminating, needs to increase some laminating layers by techniques such as sputterings (sputter) on carrier glass, increases the quantity of hydroxyl, Thus adjust the adhesive force between ultra-thin glass and carrier glass.
The present invention is by being converted into amino by the group of hydrogen bonded by hydroxyl, and the Hydrogen bonding forces between amino (typically exists 100KJ/MOL) more than hydroxyl, between ultra-thin glass and carrier, it is increased without new laminating layer, after directly passing through cleaning, Carry out fitting between ultra-thin glass and carrier glass, just can reach the laminating intensity of technological requirement very well.
The applying method that first substrate is corresponding with second substrate specifically includes following steps:
Step S1, is carried out with the second surface of second substrate the first surface of first substrate, to remove residual Impurity.
As exemplary introduction, in the actual application of this step, can first use potassium hydroxide solution to first surface And second surface carries out cleaning for the first time, with remove first surface and second surface residual such as impurity such as fingerprint traces, it After re-use deionized water first surface and second surface are carried out second time clean, to remove first surface and second surface The potassium hydroxide solution of residual.Wherein, the potassium hydroxide solution of this step includes: 0.1~the potassium hydroxide of 4%, 0.1~10% Anion surfactant, 0.1~10% nonionic surfactant, 1~the additive of 10% and 66~98.7% go Ionized water.Additionally, be ultrasonic cleaning for improving further cleaning performance, this step to be cleaned for the first time and cleans for the second time.
Step S2, uses ethanol to soak the surface that first substrate and second substrate are to be fit respectively, makes the first base The first surface of plate and the second surface of second substrate can be easier to adhere to amino.
As exemplary introduction, in step s 2, it is possible to use the table that ethanol is to be fit to first substrate and second substrate 12-20min (preferably 15 minutes) is soaked in face, can reuse water or deionized water afterwards to first substrate and second substrate Carry out ultrasonic cleaning and air-dry, with remove first substrate and second substrate residual ethanol solution in impurity.
Step S3, what the first surface of first substrate and the second surface of second substrate were separately immersed in heating has ammonia In the Organic substance mixed liquor of base group, so that first surface and second surface fully adhere to amino.
As exemplary introduction, the Organic substance mixed liquor in this step includes: APTES and nothing Water-ethanol, wherein APTES and dehydrated alcohol volume ratio are 1:15, corresponding heating temperature is set Being 55 DEG C~65 DEG C be advisable (preferably 60 degree), during immersion, a length of 100Min~120Min is advisable (preferably 120Min).
Step S4, the first surface and the second surface that use ethanol to process amination are cleared up, and make to be attached to The unnecessary amino of first surface and second surface is cleaned out, thus improves follow-up laminating effect.
Step S5, fits the second surface of the first surface of first substrate with second substrate so that first substrate Can fit fixing according to the mode shown in Fig. 2 with second substrate.After laminating, between first substrate and second substrate, pass through hydrogen The amino that bond is closed has saturability and directivity, therefore fits the most firm.
As exemplary introduction, in this step, it is only necessary to first substrate and second substrate are fitted naturally, afterwards can be The centre position of first substrate and second substrate carries out suitable pressing to periphery and can complete whole laminating process.
It is above the concrete application flow of the present embodiment, by being compared with the prior art it can be seen that due to the present embodiment Applying method more firm, therefore need not prior art such, for improving the carboxyl quantity of attachment, more additionally increase laminating Layer, it is seen then that the scheme of the present embodiment is simplified in processing technology compared to prior art, and then reduces the product of product Generate this.
Based on such scheme, the present invention also provides for the manufacture method of a kind of display floater, wherein the substrate base of display floater Plate is first substrate illustrated above, and the carrier substrate making this display floater is second substrate the most illustrated above.
In the manufacture method of the display floater of the present embodiment, as it is shown on figure 3, initially with the laminating side of a upper embodiment Underlay substrate 31 is fitted on carrier substrate 32 by method.
The most as shown in Figure 4, prepare display device 33 on the surface of underlay substrate 31 carrier substrate 32 dorsad, and in display After device 33 completes, use existing debonding technique (one loosen technique) by underlay substrate 31 from carrier substrate 32 Peel off, thus finally give display floater (display floater includes underlay substrate 31 and display device 33).
Obviously, in the processing technology of the present embodiment, what underlay substrate relied on is the intensity of carrier substrate, therefore underlay substrate More slim (generally less than or equal to 0.1mm, much smaller than the thickness of carrier substrate) can be made so that be finally completed Display floater has less thickness.
Additionally, due to laminating is more firm so that be provided with better seal performance between underlay substrate and microscope carrier glass, Therefore can avoid in follow-up cleaning link, moisture immerses between underlay substrate and microscope carrier glass, affects some and needs requirement The processing technology implemented in dry environments.
Accordingly, embodiments of the invention also by a kind of based on the display floater obtained by above-mentioned manufacture method, it is clear that The display floater of the present embodiment, compared to prior art, has less thickness, meets current development trend.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art For, on the premise of without departing from principle of the present invention, it is also possible to make some improvements and modifications, these improvements and modifications are also Should be regarded as protection scope of the present invention.

Claims (11)

1. a method for bonding substrate, it is characterised in that including:
Respectively the first surface of first substrate and the second surface of second substrate are carried out amination process, make described first surface Amino is adhered to described second surface;
To fit on the second surface of the first surface of the amino of described attachment and the amino of described attachment, to obtain the of laminating One substrate and second substrate.
Method the most according to claim 1, it is characterised in that
Described first substrate and two substrates are formed by glass material.
Method the most according to claim 1, it is characterised in that
The first surface of first substrate and the second surface of second substrate are carried out amination process respectively, including:
Described first surface and described second surface are separately immersed in the Organic substance mixing of the amino group with design temperature In liquid and meet set soak duration.
Method the most according to claim 3, it is characterised in that
The described Organic substance mixed liquor with amino group includes:
APTES and dehydrated alcohol, described APTES and dehydrated alcohol volume Ratio is 1:15.
Method the most according to claim 4, it is characterised in that
Described design temperature is 55 DEG C~65 DEG C, a length of 100Min~120Min during described immersion.
6. according to the method described in any one of claim 2-5, it is characterised in that
Before the Organic substance mixed liquor with amino group that described first surface and described second surface are immersed in heating, make Respectively the surface that first substrate and second substrate are to be fit is soaked with ethanol.
7. according to the method described in any one of claim 2-5, it is characterised in that also include:
Before described first surface is fitted in described second surface, use the first surface and second that amination is processed by ethanol Surface is cleared up;
After cleaning using ethanol to complete, first surface and second surface that amination is processed by use deionized water are carried out clearly Reason.
8. according to the method described in any one of claim 2-5, it is characterised in that also include:
Before the first surface of first substrate and the second surface of second substrate are carried out amination process respectively, pass through hydroxide Described first surface and described second surface are carried out by potassium solution;
After cleaning using potassium hydroxide solution to complete, use deionized water to described first surface and described second surface again Secondary it is carried out.
Method the most according to claim 8, it is characterised in that
Described potassium hydroxide solution includes:
0.1~the potassium hydroxide of 4%, 0.1~10% anion surfactant, 0.1~10% nonionic surfactant, 1 ~the additive of 10% and 66~the deionized water of 98.7%.
10. the manufacture method of a display floater, it is characterised in that the underlay substrate of described display floater is first substrate, system The carrier substrate making described display floater is second substrate, and the thickness of described second substrate is more than the thickness of described first substrate, Described manufacture method includes:
Applying method as claimed in any one of claims 1-9 wherein is used to be fitted in described second substrate by described first substrate Together;
Display device is prepared on the surface of the most described second substrate of described first substrate;
Described first substrate is peeled off from described second substrate, obtains described display floater.
11. 1 kinds of display floaters, it is characterised in that described display floater is obtained by manufacture method as claimed in claim 10.
CN201610608149.7A 2016-07-28 2016-07-28 A kind of method for bonding substrate, Base Plate Lamination Device, display floater and manufacture method Pending CN106113895A (en)

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Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10292175A (en) * 1997-01-24 1998-11-04 Sony Corp Guest-host liquid crystal display device, and guest host liquid crystal composition
CN1591108A (en) * 2003-09-04 2005-03-09 精工爱普生株式会社 Film forming method,distributing pattern forming method,semiconductor device mfg method
CN1641425A (en) * 2004-01-15 2005-07-20 夏普株式会社 Display element and display
CN1684562A (en) * 2004-04-13 2005-10-19 精工爱普生株式会社 Method of manufacturing display device and substrate bonding apparatus
CN1967323A (en) * 2005-11-18 2007-05-23 Lg.菲利浦Lcd株式会社 Liquid crystal display device and method of fabricating the same
CN101281268A (en) * 2007-04-05 2008-10-08 达信科技股份有限公司 Method for manufacturing polarized light plate and applying method thereof
CN101356558A (en) * 2006-10-25 2009-01-28 日东电工株式会社 Substrate for display device and method for producing the same
CN101980868A (en) * 2008-04-14 2011-02-23 昭和电工株式会社 Cured film and method for production thereof
CN102576106A (en) * 2009-10-20 2012-07-11 旭硝子株式会社 Glass laminate, glass laminate manufacturing method, display panel manufacturing method, and display panel obtained by means of display panel manufacturing method
CN102844802A (en) * 2010-06-28 2012-12-26 夏普株式会社 Process for production of display device
CN103553353A (en) * 2013-11-08 2014-02-05 东莞南玻太阳能玻璃有限公司 Method for pretreating glass substrate and method for manufacturing solar cell packaging glass by using glass substrate
CN103687725A (en) * 2011-07-15 2014-03-26 电气化学工业株式会社 Method for producing translucent rigid substrate laminate and device for pasting together translucent rigid substrates
US20150000823A1 (en) * 2009-09-18 2015-01-01 Tovis Co., Ltd. Curved display panel manufacturing method
CN104297971A (en) * 2013-07-15 2015-01-21 睿志达光电(深圳)有限公司 Method for processing substrates of display panel
CN104317074A (en) * 2014-09-17 2015-01-28 京东方科技集团股份有限公司 Stripping method of ultrathin glass and carrier base plate for carrying ultrathin glass
CN105137639A (en) * 2015-10-20 2015-12-09 京东方科技集团股份有限公司 Thinning method of display panel and display device

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10292175A (en) * 1997-01-24 1998-11-04 Sony Corp Guest-host liquid crystal display device, and guest host liquid crystal composition
CN1591108A (en) * 2003-09-04 2005-03-09 精工爱普生株式会社 Film forming method,distributing pattern forming method,semiconductor device mfg method
CN1641425A (en) * 2004-01-15 2005-07-20 夏普株式会社 Display element and display
CN1684562A (en) * 2004-04-13 2005-10-19 精工爱普生株式会社 Method of manufacturing display device and substrate bonding apparatus
CN1967323A (en) * 2005-11-18 2007-05-23 Lg.菲利浦Lcd株式会社 Liquid crystal display device and method of fabricating the same
CN101356558A (en) * 2006-10-25 2009-01-28 日东电工株式会社 Substrate for display device and method for producing the same
CN101281268A (en) * 2007-04-05 2008-10-08 达信科技股份有限公司 Method for manufacturing polarized light plate and applying method thereof
CN101980868A (en) * 2008-04-14 2011-02-23 昭和电工株式会社 Cured film and method for production thereof
US20150000823A1 (en) * 2009-09-18 2015-01-01 Tovis Co., Ltd. Curved display panel manufacturing method
CN102576106A (en) * 2009-10-20 2012-07-11 旭硝子株式会社 Glass laminate, glass laminate manufacturing method, display panel manufacturing method, and display panel obtained by means of display panel manufacturing method
CN102844802A (en) * 2010-06-28 2012-12-26 夏普株式会社 Process for production of display device
CN103687725A (en) * 2011-07-15 2014-03-26 电气化学工业株式会社 Method for producing translucent rigid substrate laminate and device for pasting together translucent rigid substrates
CN104297971A (en) * 2013-07-15 2015-01-21 睿志达光电(深圳)有限公司 Method for processing substrates of display panel
CN103553353A (en) * 2013-11-08 2014-02-05 东莞南玻太阳能玻璃有限公司 Method for pretreating glass substrate and method for manufacturing solar cell packaging glass by using glass substrate
CN104317074A (en) * 2014-09-17 2015-01-28 京东方科技集团股份有限公司 Stripping method of ultrathin glass and carrier base plate for carrying ultrathin glass
CN105137639A (en) * 2015-10-20 2015-12-09 京东方科技集团股份有限公司 Thinning method of display panel and display device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
秦浩正: "《中学生学习辞典 化学卷》", 30 September 2012 *

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Application publication date: 20161116