CN105890758B - Miniature Fourier infrared spectrometer that is a kind of while using MEMS translations and torsion mirror - Google Patents
Miniature Fourier infrared spectrometer that is a kind of while using MEMS translations and torsion mirror Download PDFInfo
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- CN105890758B CN105890758B CN201410850183.6A CN201410850183A CN105890758B CN 105890758 B CN105890758 B CN 105890758B CN 201410850183 A CN201410850183 A CN 201410850183A CN 105890758 B CN105890758 B CN 105890758B
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Abstract
The present invention has merged MEMS translation micro mirrors and the Fourier infrared spectrograph system of torsion mirror technology to be a kind of, and including main interferometer and auxiliary interferometer system two subsystems, main and auxiliary two interferometers share a translation micro mirror.Torsion mirror therein uses torsion girder construction, electrostatic or magnetic induction way driving, can realize that high speed rotation is swung, and for frequency from tens hertz to several kHz, rotational angle reaches up to 50 degree.And translation micro mirror therein can realize the translation of micromirror, translation frequency reaches hundred hertz or more, and translation range can reach hundred microns or more using spring vibration structure.The features such as these micro mirrors are respectively provided with no friction, and height repeats, high stability, since micromirror size is small, quality is small, and inertia and rotary inertia are small, so with fabulous shock resistance, can realize microinterferometer.
Description
Technical field
The present invention is a kind of miniature fourier infrared spectra measuring system using MEMS (MEMS) micro mirror, can be with
Applied to fields such as spectral measurement, spectral instruments.
Technical background
Infrared spectrum can provide the abundant information of the structure of matter since its characteristic is strong, some samples can be carried out
Non-destructive testing, and micro-example can be tested, therefore it is not only powerful tool and the analysis of structure of matter analysis
The effective ways of identification.Infrared spectrum technology is in Food Science and food security, environment pollution detection, life science, agriculture section
Many field extensive applications such as, petroleum geology exploration, material science.Fourier infrared spectrograph and traditional beam splitting type
Infrared spectrometer is very suitable for quickly analyzing measurement compared to there is the advantages that measuring speed is fast, high sensitivity.
Due to various mineral visible, near-infrared, in it is infrared be respectively provided with different spectral signatures, utilize spectrum analysis
Mineral and rock can be identified for method and content analysis.1 μm~5 mu m wavebands are extremely important for mineral detection, especially
It is in space remote sensing field.Since various rock forming minerals have differences on chemical composition and physical property, they visible ray,
The reflectance spectrum of near-infrared and middle infrared wavelength range (0.38~5.0 μm) is distributed different, 0.4~1.3 μ m wavelength range
The spectral signature of interior rock forming mineral is mainly determined by their surface color, roughness and contained transition metal ions element
Fixed.The reflectance spectrum of 1.3~2.5 μm of near infrared bands is by OH-、H2O、CO3 2-The molecular vibration of anion radicals is waited to cause
, as carbonate mineral reflectance spectrum at 2.30~2.35 μm existing characteristics spectral absorbance bands.It is red in 2.5~5 μm
Wave section reflectance spectrum reflects the silicate sturcture of certain rack-like and island, if making full use of the middle infrared spectrum of silicate
Feature will can detect the visible detection target that can not be completed near infrared spectrum：Anorthite, olivine, quartz and alkalinity are grown
Stone etc..Especially silicate is the important foundation data for studying planet Origin and evoluation, and carbonate, sulfate are to study depositing for water body
And develop significant data.For soil surveying, two atmospheric window wave band (1~3 μm and 3~5 μm) no less importants.To sum up
It is described, the spectral measurement of 1~5 mu m waveband is crossed over for rock forming mineral, current instrument will be made up due to detector, structure etc.
Reason is in weak link existing for 2.5~5 mu m wavebands.
Mineral prospecting generally requires to complete at the scene, such as：Ground observation looks for ore deposit, space and asteroid detection (such as lunar exploration,
Mars exploration) etc., instrumental working conditions are severe, it is desirable that instrument miniaturization, light weight and while meet portable have very well
Vibration resistance, anti-wide-angle tilt, environment resistant interference.Not only in mineral remote sensing, detection field, food security, environment are protected at present
Many fields such as shield, military, safety are required for carrying out Site Detection to sample.It is accordingly used in the portable fourier infrared light at scene
The development of spectrometer can equally provide for these fields and quickly and effectively analyze survey tool, this quasi-instrument has very wide answer
With basis.
Due to the requirement that infrared spectrum instrument has comparison harsh working environment, at present overwhelming majority infrared spectrum analysis
It is carried out all in laboratory.Early stage infrared spectrometer is based on prism or diffraction grating, simple in structure, and performance is stablized, but detects
The low weakness of sensitivity hinders its development, dependence to highly-sensitive detector and the rigors of optical system is become
The bottleneck of such technology.In infrared spectrum development, there are the two kinds of interference of time-modulation type instrument and spatial modulation type instrument
Spectrometer.Infrared fourier spectrometer based on michelson interferometer is the typical case of time-modulation type instrument, due to narrowless
Seam limitation, capacity usage ratio two orders of magnitude bigger than light splitting type instrument, but to the inclination during micromirror movements or horizontal stroke
The indexs such as shifting propose very high request, substantially reduce system stability.Spatially modulated imaging interferometer has avoided accurate micro mirror system
System stability problem, it is made of several parts such as interferometer component, fourier mirror, cylindrical mirror, detector arrays.Interferometer, Fu
Family name's mirror forms interferometer system with cylindrical mirror, and space interference striped is obtained on detector array, does not need to any moving parts
Spectral signal can be obtained, since its measure spectrum speed is fast, is therefore widely used in imaging spectral instrument.
Although the high-sensitivity characteristic with interference class spectral instrument, spectral resolution are extremely difficult to time-modulation type instrument
The level of device.At present, there is a variety of modified spatial modulation and interference spectrometers and the interference spectroscope of time-modulation mode.
With the development of MEMS technology, the mechanical mechanism of movement micro mirror is replaced in spectral measurement system using MEMS micromirror,
With higher system stability, detectivity and speed of detection, this quasi-instrument will be portable fourier infrared instrument
One important development direction.
Invention content
For background technology there are the problem of the present invention using MEMS (MEMS) translation micro mirror 4 and MEMS reverse microemulsions
The Miniature Fourier infrared spectra measuring system of 3 technological incorporation of mirror.
In order to solve the above technical problems, the present invention adopts the following technical scheme that：
It is a kind of to have merged MEMS translation micro mirrors and the Fourier infrared spectrograph system of torsion mirror technology, including main interference
Instrument and auxiliary interferometer system two subsystems, main and auxiliary two interferometers share a translation micro mirror 4.
Aforementioned main interferometer includes what infrared beam splitter 1, the first fixed mirror 2, torsion mirror 3 and auxiliary interferometer shared
Be translatable micro mirror 4 and infrared first detector 5 of 1.5-3 μm of mercury cadmium telluride, the second detector of mercury cadmium telluride 6 of 3-5 mu m wavebands.
After incident light beam strikes to main interferometer, by distinguishing the first fixed mirror of directive 2 and translation micro mirror after infrared beam splitter 1
4, last infrared light interferes after being reflected by the first fixed mirror 2 and translation micro mirror 4, interference signal directive torsion mirror 3, torsion
Micro mirror 3 is by pendulum motion by one in interfering beam directive the first detector 5 or the second detector 6.First detector, 5 He
Cadmium-telluride-mercury infrared detector of the wave band for 1.5-3 μm and 3-5 mu m waveband is respectively adopted in second detector 6, completes two wave bands
Independent interference pattern acquisition.
Auxiliary interferometer include semiconductor laser light resource 7, laser beam splitter mirror 8, the second fixed mirror 9, translation micro mirror 4 (with it is auxiliary
Interferometer is helped to share), phase retarders 10, speculum 11, third detector 12, the 4th detector 13.
Auxiliary interferometer by the use of semiconductor laser as light source, laser expanded after by semi-transparent semi-reflecting lens, wherein directive
The light beam all the way of translation micro mirror 4 has a semi-gloss by phase delay device, postpones 1/2 π of phase, in addition half light beam is emitted directly toward flat
Dynamic micro mirror 4, two " half beam " light generate interference with the light that the second fixed mirror 9 returns, and " half beam " interference light is by the 4th detector 13
It receives, in addition " half beam " (there are 1/2 π phase delays) interference light is received by third detector 12, the 4th detector 13 and third
The interference fringe phase of detector 12 differs 1/2 π, thus two interferometric fringe signals, measures the direction of motion of micro mirror, and obtain
To the travel of micro mirror, have this and interference pattern that main interferometer obtains is calibrated, finally obtained using Fourier transformation method
Wide spectrum spectroscopic data (only draw main interferometer and auxiliary interferometer simplified pinciple in Fig. 1, it is also more in practical light path
Other optical elements such as a phase compensation piece).
Torsion mirror 3 therein uses torsion girder construction, electrostatic or magnetic induction way driving, can realize that high speed rotation is put
Dynamic, for frequency from tens hertz to several kHz, rotational angle reaches up to 50 degree.And translation micro mirror 4 therein uses spring
Vibrational structure, can realize the translation of micromirror, and translation frequency reaches hundred hertz or more, translation range can reach hundred microns with
On.The features such as these micro mirrors are respectively provided with no friction, and height repeats, high stability, since micromirror size is small, quality is small, inertia and turns
Dynamic inertia is small, so with fabulous shock resistance, can realize microinterferometer.
Description of the drawings
Fig. 1 is master-auxiliary interferometer schematic diagram of instrument；
In figure：1st, infrared beam splitter；2nd, the first fixed mirror；3rd, torsion mirror；4th, be translatable micro mirror；5th, the first detector；6、
Second detector；7th, semiconductor laser light resource；8th, laser beam splitter mirror；9th, the second fixed mirror；10th, phase retarders；11st, it reflects
Mirror；12nd, third detector；13rd, the 4th detector.
Specific embodiment
Technical solution to further illustrate the present invention below in conjunction with the accompanying drawings.
The present invention forms miniature double Michelson interferometer structures using the pico- mirror 4 of MEMS translations as shown in Figure 1, uses
MEMS torsion mirrors realize that detector is converted, and integrated other optical elements form microminiature spectrometers.
As shown in Figure 1, being main interferometer part on the left of figure, it is responsible for signal optical interferometry.Right side is auxiliary interferometer
Part is measured using the standard interference of semiconductor laser as reference.The tow sides of translation micro mirror 4 are coated with infrared external reflection
Film, main and auxiliary two interferometers share a micro mirror.As a result of MEMS translation micro mirrors 4 so that instrument has high scanning
Speed, considerably beyond the fourier spectrometer of conventional mechanical micro mirror.
As shown in Figure 1, in main interferometer, detector is switched over using a MEMS torsion mirror 3.MEMS is reversed
Micro mirror 3 uses magnetic induction type of drive, and there is miniature small size, high speed (hunting frequency can reach hundreds of hertz), nothing to rub
The advantages of wiping, high duplication and stability, long-life.
In order to meet the measurement of near-infrared-middle infrared part wave band (1.5-5 mu m wavebands), using the tellurium of 2 independent wave bands
Cadmium mercury infrared detector, the second detector 6 combination of the first detector 5 and 3-5 mu m wavebands of 1.5-3 mu m wavebands are completed.It is red
External signal light, by distinguishing the first fixed mirror of directive 2 and translation micro mirror 4 after infrared beam splitter 1, finally interferes letter from left side incidence
Number directive torsion mirror 3, torsion mirror 3 will be in interfering beam directive the first detector 5 or the second detector 6 by pendulum motion
One.It is red that the mercury cadmium telluride that wave band is 1.5-3 μm and 3-5 mu m waveband is respectively adopted in first detector 5 and the second detector 6
External detector completes the independent interferogram sampling of two wave bands.
Auxiliary interferometer by the use of semiconductor laser as light source, laser expanded after " thick " light beam by semi-transparent half
The light beam all the way of anti-mirror, wherein directive micro mirror has a semi-gloss by phase delay device, postpones 1/2 π of phase, in addition half light beam is straight
Directive micro mirror is connect, the two " half beam " light generate interference with the light that fixed mirror returns, and " half beam " interference light is by the 4th detector 13
It receives, in addition " half beam " (there are 1/2 π phase delays) interference light is received by third detector 12, the 4th detector 13 and third
The interference fringe phase of detector 12 differs 1/2 π, and thus two interferometric fringe signals, according to the advanced judgement of phase, can survey
The direction of motion of micro mirror is measured, while the travel of micro mirror can be obtained, i.e., to two interference fringe countings using counter
" absolute " calibration is carried out relative to the displacement of initial position to translation micro mirror 4；Phase demodulation and subdivision are utilized while " absolute " calibration
Technology obtains suitable sampling trigger signal, and sampling control is carried out to the first detector 5 in main interferometer or the second detector 6
System, obtains enough sampling numbers, obtains interference pattern.(main interferometer and auxiliary interferometer simplified pinciple are only drawn in Fig. 1,
In practical light path, other optical elements such as also multiple phase compensation pieces.)
It, can be in translation micro mirror 4 by positive maximum displacement to negative sense dominant bit due to there is the absolute calibration of auxiliary interferometer
Interference pattern is measured using the first detector 5 during shifting, after the micro mirror 4 that is translatable reaches negative sense maximum displacement, torsion mirror 3 is transported
It is dynamic, interfering beam is switched to the second detector 6, and in subsequent translation micro mirror 4 by negative sense maximum displacement to positive dominant bit
Interference pattern is measured using the second detector 6 during shifting, in this way within an entire motion period of translation micro mirror 4, acquisition
The interference pattern of 2 independent wave bands, by Fourier transform obtains the spectrogram of 2 independent wave bands.
Spectral intensity calibration is carried out, and calculate corresponding normalized parameter to spectral instrument using standard blackbody source.Have
Normalized parameter can realize that 2 the smooth of independent band spectrum connect spectrum in work is actually measured.
Since the intrinsic frequency range of galvanometer is about tens of to hundreds of hertz, in order to obtain stable vibrational state, use
Sinusoidal or square-wave voltage will be done simple harmonic quantity with its intrinsic frequency and be shaken with the intrinsic frequency driving translation micro mirror 4 of micro mirror, translation micro mirror 4
It is dynamic.In the motion process of a cycle, movement velocity is changed micro mirror by sinusoidal rule, and largest motion rate is higher than average fortune
Dynamic rate.Adopting for thousands of secondary interference light signals is completed within the micromirror movements period in order to obtain distortionless interference signal needs
Sample.
For make the sampling process of interference light signal and infrared detector response time (i.e. explorer response bandwidth, use
The cadmium-telluride-mercury infrared detector response time is about 2 μ s) it matches, the governing equation of micromirror movements is established, it is then dry by assisting
The calibration output signal of interferometer determines what subsequent time applied translation micro mirror 4 as Real-time Feedback signal by high-speed dsp
Driving voltage, so as to fulfill the approximate at the uniform velocity drive control, and speed is controlled in suitable range to translation micro mirror 4.
Since interferometer is small-sized, bottom plate deformation caused by thermal expansion influences seriously, so using low-heat interferometer
The metal of the coefficient of expansion designs the optical flat of a uniformity of temperature profile as interferometer pedestal, and all optical elements are fixed
On it, fixed form uses the soldering of heat conduction or heat conduction glue sticking, while welds thermoelectric cooling module in optical flat bottom, leads to
Constant temperature control circuit is crossed, thermostatic control is carried out to bottom plate, is reduced to the maximum extent due to influence of the temperature change to spectrometer precision.
Thermoelectric cooling module is welded on heat-conducting metal bottom plate, and heat-conducting metal bottom plate is also responsible for leading heat other than being responsible for vacuum sealing
Go out, and the electrode of photoelectric cell is exported into vacuum chamber.
Claims (3)
1. a kind of merged MEMS translation micro mirrors and the Fourier infrared spectrograph system of torsion mirror technology, spectrometer system packet
Main interferometer and auxiliary interferometer are included, the main interferometer includes infrared beam splitter (1), the first fixed mirror (2), MEMS reverse microemulsions
Mirror (3), MEMS translation micro mirrors (4) and infrared first detector (5) of 1.5-3 μm of mercury cadmium telluride, the mercury cadmium telluride the of 3-5 mu m wavebands
Two detectors (6)；The auxiliary interferometer include semiconductor laser light resource (7), laser beam splitter mirror (8), the second fixed mirror (9),
MEMS translation micro mirrors (4), phase retarders (10), speculum (11), third detector (12), the 4th detector (13)；And main,
Auxiliary two interferometers share a MEMS translation micro mirror (4)；
It is characterized in that：Simultaneously using MEMS translation micro mirrors and MEMS torsion mirrors in Fourier infrared spectrograph system.
2. a kind of FTIR spectrum for having merged MEMS translation micro mirrors and torsion mirror technology according to claim 1
Instrument system after incident light beam strikes to main interferometer, distinguishes the first fixed mirror of directive (2) and MEMS afterwards by infrared beam splitter (1)
Be translatable micro mirror (4), and last infrared light interferes after being reflected by the first fixed mirror (2) and MEMS translation micro mirrors (4), interference signal
Directive MEMS torsion mirrors (3), MEMS torsion mirrors (3) by pendulum motion by the first detector of interfering beam directive (5) or
One in second detector (6)；First detector (5) and the second detector (6) be respectively adopted wave band for 1.5-3 μm and
The cadmium-telluride-mercury infrared detector of 3-5 mu m wavebands completes the independent interference pattern acquisition of two wave bands；
Double detector is provided in main interferometer, the first detector (5) and the second detector (6), interference light signal are to pass through
MEMS torsion mirrors detect conversion to realize.
3. a kind of Fu for having merged MEMS translation micro mirrors and torsion mirror technology according to claim 1 or claim 2
In leaf infrared spectroscopy system, for auxiliary interferometer by the use of semiconductor laser as light source, laser passes through laser beam splitter after being expanded
The light beam all the way of mirror (8), wherein directive MEMS translation micro mirror (4) has a semi-gloss by phase delay device, postpones 1/2 π of phase, separately
Outer half light beam is emitted directly toward MEMS translation micro mirrors (4), and two and half beam light generate interference with the light that the second fixed mirror (9) returns,
Half beam interferometer light is received by the 4th detector (13), in addition half beam there are the interference light of 1/2 π phase delays by third detector
(12) it receives, the 4th detector (13) differs 1/2 π with the interference fringe phase of third detector (12), thus two interference items
Line signal, measures the direction of motion of MEMS translation micro mirrors (4), and obtains the travel of MEMS translation micro mirrors (4), and it is right to have this
The interference pattern calibration that main interferometer obtains, the final spectroscopic data that wide spectrum is obtained using Fourier transformation method；
It is realized respectively after light beam is separated in half by auxiliary interferometer and interferes and detect, it is micro- to the MEMS translations in main interferometer
Realize absolute calibration in the position of mirror.
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| CN106442396A (en) * | 2016-08-26 | 2017-02-22 | 广西壮族自治区产品质量检验研究院 | Rapidly detecting method for bagasse saccharose content based on near infrared technology |
| JP6480091B1 (en) | 2017-07-06 | 2019-03-06 | 浜松ホトニクス株式会社 | Mirror unit and optical module |
| CN110456366B (en) * | 2019-07-19 | 2022-01-14 | 华为技术有限公司 | Position detection device and terminal |
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