CN102207459B - Fourier transform chip spectrometer based on integrated light technique - Google Patents
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Abstract
The invention discloses a Fourier transform chip spectrometer based on integrated light technique, comprising an integrated optical waveguide chip having electro-optic modulation function. Light from a light source enters the integrated optical waveguide chip through a fiber transmission coupler, and waveguide light from the chip enters an optical waveguide interferometer through a sensitive window interval. The interferometer outputs signals to a photoelectric detector. A voltage function generator is used for applying voltages varying with time between two modulated electrodes of the optical waveguide interferometer, the photoelectric detector is used for real-time measuring the change of the signal strength of the interferometer varying with the modulated voltage, and a signal processing chip connected with the photoelectric detector and the voltage function generator at same time is used for rapidly processing Fourier transform on the signals of the interferometer to obtain an incident light spectrum. The Fourier transform chip spectrometer provided by the invention can determine visible-infrared light absorbing spectra of solids, liquid, even monomolecular adsorption layers in the sensitive window, and determine fluorescence spectra of fluorescent substances in the sensitive window, with the advantages of strong anti-interference capability, and is suitable for rapid on-site quantitative determination.
Description
Technical field
The invention belongs to Micro-Opto-Electro-Mechanical Systems (MOEMS) process technology, integrated light guide sensing technology and spectral measurement methods field, relate to a kind of Fourier transform spectrometer, based on the integrated light guide technology, particularly a kind of new matrix polishing wax instrument that disappearance wave surface sensitive element and Fourier transform optical waveguide optical spectrometer is integrated in same chip.
Background technology
Spectrometer is the strong instrument of amalyzing substances composition, structure and content, in various fields extensive application such as atmospheric surveillance, monitoring water environment, food safety detection, product quality detection, chemical defence anti-terrorism, biomedicine, petrochemical complex, space exploration, material development.Be different from the large-scale spectral analysis apparatus in existing laboratory, miniaturization, portable spectrometer, particularly micro chip glazing spectrometer more can satisfy the on-the-spot requirement that detects real-time, therefore has more wide application prospect and great demand and good development trend.
Spectrometer has multiple sorting technique.At first can be divided three classes according to principle of work: prism chromatic dispersion formula spectrometer, grating beam splitting formula spectrometer and modulating transformation formula spectrometer.Prism chromatic dispersion formula and grating beam splitting formula spectrometer are the spectrometers that is based upon the classics on the geometric optical theory, and modulating transformation formula spectrometer is the spectrometric instrument that is based upon on the modulation calculating principle basis.The former need use slit and ccd detector directly to obtain incident light spectrum.The performance of this class spectrometer directly is limited by the CCD device, and spectrographic detection window and spectral resolution are difficult to take into account simultaneously: the spectrographic detection window is more wide, and then spectral resolution is more low; And the latter is based on the instrument that optical modulation is finished the detection of spectrum composition, mainly finishes chromatic dispersion based on interference modulations.Different with the former is that the result that modulating transformation formula spectrometer collects must calculate through corresponding functional transformation more just can obtain actual measure spectrum.Common modulating transformation formula spectrometer comprises Fourier transform spectrometer, and Hadamard transform spectrometer.Modulating transformation formula spectrometer is more classical dispersive spectrometer complexity on system forms, usually comprise moving component, but modulating transformation formula spectrometer is not subjected to the restriction of entrance slit, can obtain the spectral signal that signal to noise ratio (S/N ratio) is big, the high window of resolution is wide by input aperture or the interference modulations of diffusion, be applicable to accurate spectral measurement.
Common modulating transformation formula spectrometer is based on the desktop Fourier transform spectrometer, of index glass Michelson interferometer structure.This commercialization spectrometer is made of separate optical element, each element needs accurately location, need the high-precision index glass drive unit of cover and a good damping environment, the space free light beam of internal system is easy to be subjected to the interference that environment temperature, humidity, air pressure and atmosphere change, volume is big, the price height, and shock resistance is poor, be not suitable for carrying and field quick detection, this has greatly limited the usable range of spectrometer.
At present, MOEMS technology, detecting technique and precision processing technology are ripe, and this provides increasing chance for research and development microminiature modulation system Fourier transform spectrometer.A typical example is Switzerland in 1999
People such as the Omar Manzardo of microtechnology research institute of university adopt the MOEMS technology to develop a kind of Miniature Fourier transform spectrometer [O.Manzardo, H.P.Herzig, C.R.Marxer, and N.F.de Rooij, Opt.Lett.24 (1999) 1705-1707.].This spectrometer uses miniature silicon catoptron as the interferometric scanning index glass of Michelson, uses electrostatic actuator to drive miniature silicon catoptron, can realize the accurate scanning to micromirror systems.Maximum drive voltage is 10V, and maximum displacement can reach 39 μ m, and repetitive error is ± 13nm, can obtain the spectrally resolved power of 10nm at visible light wave range, this spectrometer architecture compactness simultaneously, and size only is 5mm * 4mm.But this micro spectrometer still adopts the space free light beam to carry out interference modulations, therefore is subjected to the interference that external environment changes equally easily.With the whole process using guided wave, therefore can effectively improve the interference resistance of instrument based on the microminiature Fourier transform spectrometer, that adopts the integrated light guide technology.
Except the enhancing of antijamming capability, can also be integrated in disappearance wave surface sensitive element based on the Fourier transform spectrometer, of integrated smooth technology and to form the sheet glazing spectrometer with sensitive function on the same chip.Utilize this glazing spectrometer can directly carry out highly sensitive attenuated total reflection (ATR) spectral measurement.Compare with existing various spectrometers, this glazing spectrometer has four clear superiorities: one of advantage is the modulation system difference.The Fourier transform spectrometer, that adopts index glass Michelson interferometer structure is that relative position by changing index glass and horizontal glass is to the linear modulation of carrying out mutually of space free light beam.And spectrometer involved in the present invention is based on the electrooptical modulation effect, changes the guided wave effective refractive index and realizes linear modulation by apply ramp voltage between the chip modulator electrode.Therefore, compare with the Fourier transform spectrometer, of index glass Michelson interferometer structure, the advantage based on the Fourier transform chip spectrometer of integrated smooth technology that the present invention proposes is not exist moving component, and the use of guided wave has simultaneously overcome the shortcoming that the space free light beam is subject to disturb.Two of advantage is that this glazing spectrometer possesses sensitive function simultaneously.Existing Fourier transform spectrometer, is not all realized the integrated of sample cell and spectrometer unit no matter adopt the transmission measurement mode still to adopt the ATR metering system, so equipment volume is big, be subject to interference in the test process.And it is integrated on the sheet of core component-light guide interference meter of having realized sample analysis window and spectrometer based on the Fourier transform chip spectrometer of integrated smooth technology involved in the present invention, be a kind of typical chip spectrometer, so this spectrometer have the advantage that volume is little, quality is light, antijamming capability is strong.Three of advantage is spectrum sensitivity height.Existing Fourier transform spectrometer, is carrying out the ATR absorption spectra when measuring, because the ATR wafer thickness is big, makes the effect number of times of evanescent field and sample all below surplus in the of ten times, thus ATR compose absorption peak strength a little less than, signal to noise ratio (S/N ratio) is relatively poor, sensitivity is lower.And the responsive waveguide of Fourier transform chip spectrometer utilization on same chip based on integrated smooth technology that the present invention the proposes ripple absorption spectra that disappears is measured, the total reflection number of times of guided wave will be far longer than the total reflection number of times in the ATR wafer, thereby make that this glazing spectrometer absorption peak strength is higher, signal to noise ratio (S/N ratio) is bigger, and sensitivity is higher; Four of advantage is to adopt the MOEMS technology to be easy to make multi-channel spectrometer based at same chip, realizes sheet glazing spectrometer array.
From present disclosed document, find as yet with the present invention propose based on the similar method and apparatus of the Fourier transform chip spectrometer of integrated smooth technology.
Summary of the invention
The objective of the invention is to disclose a kind of Fourier transform chip spectrometer based on integrated smooth technology, with the Fourier transform spectrometer, that overcomes existing index glass Michelson interferometer structure and the deficiency in the ATR spectral measurement method, be a kind of high speed, high sensitivity, simple in structure, anti-environmental interference, need not the full guided wave chip spectrometer of moving component.
For achieving the above object, technical solution of the present invention is:
A kind of Fourier transform chip spectrometer based on integrated smooth technology comprises an integrated light guide chip, a light source, a photodetector, a function of voltage generator, two Transmission Fibers, a signal processing chip; Its integrated light guide chip comprises optical fiber input coupling port, optical fiber output coupling port, responsive window, responsive optical waveguide, light guide interference meter, electrooptical modulation electrode, and low-refraction inert media protective seam; One end of responsive optical waveguide connects optical fiber input coupling port, and centre portion is positioned at responsive window, and the other end connects the light guide interference meter, and the output terminal of light guide interference meter is connected with optical fiber output coupling port; Modulator electrode is positioned at light guide interference meter interval; Except responsive window, all the other light guide surface are covered by low-refraction inert media layer;
A Transmission Fibers connects light source and integrated light guide chip input coupling port, and another root Transmission Fibers connects integrated light guide chip output coupling port and photodetector; The function of voltage generator links to each other with electrode on the integrated light guide chip, is used for the guided wave position phase in the integrated chip of light waveguide of modulation; Signal processing chip is electrically connected with photodetector, function of voltage generator respectively, and the electric signal that detector is produced carries out the Fourier transform processing.
Described Fourier transform chip spectrometer based on integrated smooth technology, its described integrated light guide chip, for lithium niobate base chip of light waveguide, lithium tantalite based chip of light waveguide, GaAs based chip of light waveguide, indium phosphide chip of light waveguide one of them; Or the interferometer interval of integrated light guide chip is deposited with the film with electrooptical effect of zinc paste or barium titanate.
Described Fourier transform chip spectrometer based on integrated smooth technology, its described light guide interference meter has the electrooptical modulation function, for optical waveguide Mach-Zehnder (Mach-Zehnder) interferometer, optical waveguide Young (Young) interferometer, optical waveguide polarization polarization interference meter, optical waveguide Michelson (Michelson) interferometer, optical waveguide Fabry-Perot (Fabry-Perot) interferometer one of them, or the distressed structure of above-mentioned interference meter.
Described Fourier transform chip spectrometer based on integrated smooth technology, its described low-refraction inert media layer is silicon dioxide film, di-aluminium trioxide film, poly tetrafluoroethylene, or the magnesium fluoride film one of them.
Described Fourier transform chip spectrometer based on integrated smooth technology, it utilizes the function of voltage generator to apply the voltage of linear change in time between two modulator electrodes of light guide interference meter, utilize photodetector to measure the interferometer signal intensity in real time with the variation of modulation voltage simultaneously, utilize signal processing chip that the interferometer signal that records is carried out Fast Fourier Transform (FFT) (FFT) then and handle, obtain from responsive optical waveguide conduction and enter interferometric guided wave spectrum.
Described Fourier transform chip spectrometer based on integrated smooth technology, it places the responsive window surface of chip with a small amount of solid to be measured or fluid sample, by the interaction of disappearance ripple and surface mass, the chip spectrometer is the absorption spectrum of working sample rapidly and sensitively.
Described Fourier transform chip spectrometer based on integrated smooth technology, it utilizes this chip spectrometer that the disappearance ripple absorption spectrum of the monomolecular adsorption layer that forms in the responsive window surface of chip is measured in real time, further by the distinctive spectral fingerprint of molecule, realize the property the distinguished detection to gas to be measured and biochemical substances.
Described Fourier transform chip spectrometer based on integrated smooth technology, it utilizes the disappearance ripple to excite and places the interior fluorescent material of the responsive window of chip, the responsive optical waveguide of recycling is collected fluorescence, utilizes this chip spectrometer that the emission spectrum of fluorescent material is carried out Measurement and analysis then.
Described Fourier transform chip spectrometer based on integrated smooth technology, the biochemical reagents that utilization has the molecular recognition ability carry out finishing to the responsive window of chip, strengthen the surface to the selective adsorption of target molecules in the solution example to be measured, utilize this chip spectrometer that the monomolecular adsorption layer that forms in the responsive window surface of chip is carried out spectral analysis then, realize the property the distinguished trace of biochemical substances is surveyed.
Described Fourier transform chip spectrometer based on integrated smooth technology, it is at a plurality of responsive windows of same integrated light guide chip preparation, a plurality of responsive optical waveguides, a plurality of light guide interference meters, many group modulator electrodes and a plurality of optical fiber I/O coupling port, use many to Transmission Fibers, the light source of a plurality of emission different spectrals, the different photodetector of a plurality of detection spectral ranges, one or more function of voltage generators, one or more signal processing chips, constitute the multi-channel chip spectrometer thus, the spectral range difference of each channel measurement, thereby expand the spectral measurement ranges of whole glazing spectrometer, improve spectral resolution.
A kind of Fourier transform chip spectrometer based on integrated smooth technology of the present invention, can be determined at the visible-infrared absorption spectrum of solid, liquid even monomolecular adsorption layer in the responsive window of disappearance ripple delicately, also can be used for measuring the fluorescence spectrum that places the material in the responsive window.This chip spectrometer architecture is simply novel, makes easily, and cost is low, and volume is little, and is in light weight, be easy to carry, easy to use, spectral range is wide, the resolution height, and Measuring Time is short, highly sensitive, antijamming capability is strong, and is of many uses, and the scene that is particularly suitable for is distinguished fast and surveyed and quantitatively detect.
Description of drawings
Fig. 1 is first kind of Fourier transform chip spectrometer architecture synoptic diagram based on integrated smooth technology of the present invention, is single channel chip spectrometer, and among the figure: 1 is light source, 2 is Transmission Fibers, and 3 is the integrated light guide chip, and 4 are the responsive window of disappearance ripple, 5 is responsive optical waveguide, 6 is the light guide interference meter, and 7 is the electrooptical modulation electrode, and 8 is low-refraction inert media protective seam, 9 is the function of voltage generator, 10 is the spun gold lead, and 11 is photodetector, and 12 is signal processing chip;
Fig. 2 is second kind of Fourier transform chip spectrometer architecture synoptic diagram based on integrated smooth technology of the present invention, is single channel chip spectrometer, and among the figure: 1 is light source, 2 is Transmission Fibers, and 3 is the integrated light guide chip, and 4 are the responsive window of disappearance ripple, 5 is responsive optical waveguide, 6 is the light guide interference meter, and 7 is the electrooptical modulation electrode, and 8 is low-refraction inert media protective seam, 9 is the function of voltage generator, 10 is the spun gold lead, and 11 is photodetector, and 12 is signal processing chip;
Fig. 3 is the third Fourier transform chip spectrometer architecture synoptic diagram based on integrated smooth technology of the present invention, be the multi-channel chip spectrometer, has the wide and high advantage of wavelength resolution of detectable wavelength coverage, among the figure 1: be light source, 2 is Transmission Fibers, 3 is the integrated light guide chip, 4 are the responsive window of disappearance ripple, and 5 is responsive optical waveguide, and 6 is light guide interference meter array, 7 is the electrooptical modulation electrode, 8 is low-refraction inert media protective seam, and 9 is the function of voltage generator, and 10 is the spun gold lead, 11 is photodetector, and 12 is signal processing chip;
Fig. 4 is the 4th kind of Fourier transform chip spectrometer architecture synoptic diagram based on integrated smooth technology of the present invention, be single channel chip spectrometer, comprise curved waveguide, has the high advantage of wavelength resolution, among the figure: 1 is light source, 2 is Transmission Fibers, and 3 is the integrated light guide chip, and 4 are the responsive window of disappearance ripple, 5 is responsive optical waveguide, 6 is the light guide interference meter, and 7 is the electrooptical modulation electrode, and 8 is low-refraction inert media protective seam, 9 is the function of voltage generator, 10 is the spun gold lead, and 11 is photodetector, and 12 is signal processing chip;
In the embodiment that Fig. 5 provides for the present invention, the structural representation of employed integrated light guide chip, shown in the figure, this chip manufacturing is at the LiNbO of x cutting
3On the wafer, comprise the responsive window of 5 disappearance ripples, 5 responsive optical waveguides, 5 optical waveguide Mach-Zehnder interferometers are recommended modulator electrode for 5 pairs, and low-refraction inert media protective seam SiO
2Film;
In the embodiment that Fig. 6 provides for the present invention, the output light intensity of the actual integrated light guide chip that records and the variation relation figure of modulation voltage;
Fig. 7 a is the variation relation figure at first voltage modulated chip output light intensity and modulation voltage in the cycle;
Fig. 7 b is at the variation relation figure of second voltage modulated chip output light intensity and modulation voltage in the cycle;
The spectrogram about sampled point and luminous power of Fig. 8 a for the interference pattern shown in Fig. 7 a being carried out obtain after the discrete Fourier transformation;
The spectrogram about sampled point and luminous power of Fig. 8 b for the interference pattern shown in Fig. 7 b being carried out obtain after the discrete Fourier transformation;
Fig. 9 a is for the light source light spectrogram of Fig. 8 a transverse axis from obtaining after number of sampling is converted to wavelength, and it is the spectrogram about wavelength and luminous power;
Fig. 9 b is for the light source light spectrogram of Fig. 8 b transverse axis from obtaining after number of sampling is converted to wavelength, and it is the spectrogram about wavelength and luminous power.
Embodiment
A kind of Fourier transform chip spectrometer based on integrated smooth technology of the present invention, operating wavelength range are by the optical clarity of integrated light guide chip and the detectable wavelength coverage of photodetector is common determines.General better (the LiNbO for example of the optical clarity of integrated light guide chip that wherein has an electrooptical modulation effect
3The transmission peak wavelength scope of crystal is 0.4 μ m～5 μ m, LiTaO
3The transmission peak wavelength scope of crystal is 0.45 μ m～5 μ m), therefore the kind of photodetector has determined the operating wavelength range of this chip spectrometer, as being 0.4 μ m～1.1 μ m between the sensitive volume of Si photodetector, be 0.8 μ m～1.7 μ m etc. between the sensitive volume of InGaAs photodetector.In order to widen the detection interval of spectrometer, as shown in Figure 3, we have prepared a plurality of responsive windows at same integrated light guide chip, a plurality of responsive optical waveguides, a plurality of light guide interference meters and many group modulator electrodes use many to Transmission Fibers, the light source of a plurality of emission different spectrals, the different photodetector of a plurality of detection spectral ranges has constituted the multi-channel chip spectrometer, and this spectrometer has surveys wavelength wide ranges, advantage that wavelength resolution is high.
A kind of Fourier transform chip spectrometer based on integrated smooth technology of the present invention, it is a kind of full guided wave Fourier transform spectrometer,, its modulation system is based on the electrooptical modulation effect, realizes the linear modulation of interferometer optical path difference by the effective refractive index that applies ramp voltage change guided wave between the modulator electrode of light guide interference meter.Though this modulation system is different with the modulation system of the Fourier transform spectrometer, of index glass Michelson interferometer structure, both have similar conversion principle.For the guided wave of setted wavelength, after it successively passed through the responsive window of disappearance ripple and light guide interference meter of chip, the output light intensity of chip can be expressed as
I
out＝I
in[1+cos(Δφ)]＝I
in[1+cos(2πvl)] (1)
Wherein, I
InBe the input light intensity, Δ φ is that the integrate phase of the guided mode propagated in the interferometer is poor,
Be wave number, l is optical path difference.
When the guided wave in the chip was polychromatic light, the output light intensity of chip can be expressed as follows:
Following formula comprises two parts: first and optical path difference l are irrelevant, represent the direct current composition of interference signal; Second portion is relevant with optical path difference, represents the Alternating Component of interference light signal.In the practical application, can extract AC portion analysis separately, so have
Definition according to Fourier transform has
Accordingly
By formula (4) and formula (5) as can be known, heterogeneous light interference light intensity distribute and its wave number power spectrum between Fourier transform each other.The intensity distributions that needs only the interference pattern that photodetector is monitored is carried out the luminous power spectrum that one-dimensional Fourier transform just can obtain light source.
With the other types Fourier transform spectrometer,, especially the difference with the Fourier transform spectrometer, of index glass Michelson interferometer structure is, the Fourier transform chip spectrometer based on integrated smooth technology that the present invention is mentioned, not comprising moving component, is the change that realizes the interference light optical path difference by the voltage between change light guide interference meter modulator electrode.Lithium niobate base optical waveguide with x cutting is example, and when modulator electrode adopts push-pull configuration, and when applying the voltage of linear change in time between electrode, the refraction index changing amount of optical waveguide ducting layer can be expressed as:
Wherein, Δ n
eBe the variation of the unusual optical index of ducting layer, electro-optic constant γ
33=30.8 * 10
-12M/V, n
eBe the unusual optical index of ducting layer, Γ is the overlapping degree that guided wave Electric Field Distribution and modulated electric fields distribute, and its size distribution is between 0.24～0.32, and E is modulated electric fields intensity.The refraction index changing of optical waveguide ducting layer causes light guide interference meter interference light phase differential to change, and the interference light phase differential can be write as:
Wherein, L is modulator electrode length, and U is modulation voltage, and d is the modulator electrode spacing, and C is that (unit: V/s), the intensity of variation of representation unit time internal modulation voltage, t are the time to constant.From formula (7) as can be seen the interference light path difference be a linear function about the time.
For the Fourier transform spectrometer, of voltage modulated, the semi-wave modulated voltage of light guide interference meter is determining the resolution of spectrometer, is an important parameters.Semi-wave modulated voltage is more low, and the resolution of spectrometer is more high under identical modulation voltage.Wherein semi-wave modulated voltage can be write as:
It is to be noted, Fourier transform chip spectrometer based on integrated smooth technology proposed by the invention, as the light guide interference meter in the integrated light guide chip of core component multiple structure can be arranged, comprise optical waveguide Mach-Zehnder interferometer structure [R.G.Heideman, P.V.Lambeck, Sensors and Actuators B 61 (1999) 100-127.], optical waveguide Young interferometer structure [K.Schmitt, etal., Biosens.Bioelectron.22 (2007) 2591-2597; Graham H.Cross, et al., J.Phys.D:Appl.Phys.37 (2004) 74-80.], optical waveguide polarization polarization interference meter structure [Zhi-mei Qi, et al., J.Ligthwave Techn.18 (8) (2000) 1106-1110.], optical waveguide Michelson interferometer structure [Shyh-LinTsao, and Shin-Ge Lee, Opt.﹠amp; Quantum Electron.36 (2004) 309-320.], optical waveguide Fabry-Perot interferometer structure [Kinrot Noam, Nathan Menachem, J.Ligthwave Techn.24 (5) (2006) 2139-2145.], optical waveguide bimodulus interferometer structure [Sergey S.Sarkisov, et al., Appl.Opt.40 (3) (2001) 349-359.] etc.
A kind of Fourier transform chip spectrometer based on integrated smooth technology of the present invention, not only can carry out test analysis to the emission spectrum of unknown light source, and can be used for detecting and quantitative detection of following four aspects: if 1. a small amount of solid to be measured or fluid sample are placed the responsive window surface of chip, by the interaction of disappearance ripple and surface mass, the absorption spectrum that this chip spectrometer can working sample; 2. this chip spectrometer can also be measured in real time to the disappearance ripple absorption spectrum of the monomolecular adsorption layer that forms in the responsive window surface of chip, further by every kind of distinctive spectral fingerprint of molecule, can realize the property the distinguished detection to gas to be measured and biochemical substances; 3. if utilize the biochemical reagents with molecular recognition ability that the responsive window of chip is carried out suitable finishing, strengthen the surface to the selective adsorption of target molecules in the solution example to be measured, utilize this chip spectrometer that the monomolecular adsorption layer that forms in the responsive window surface of chip is carried out spectral analysis then, can realize the property distinguished trace is surveyed; 4. the fluorescent material that is opposite in the responsive window carries out fluorescence excitation, and the responsive optical waveguide of recycling is collected fluorescence, and this chip spectrometer can carry out Measurement and analysis on the sheet to the emission spectrum of fluorescent material.
In the practical operation, Fourier transform chip spectrometer based on integrated smooth technology of the present invention, can adopt first kind of structure as shown in Figure 1, wherein, the light guide interference meter is made up of 3dB beam splitter and bundling device, and the integrated light guide chip has adopted the LiNbO with the modulating electrode structure of recommending as shown in Figure 5
3Optical waveguide.Earlier at x cutting LiNbO
3Upper surface of substrate is made one deck by the method for Ti thermal diffusion or proton exchange or ion injection and is compared LiNbO
3The ducting layer that refractive index is slightly high forms three-dimensional LiNbO with this
3Monomode optical waveguide, this optical waveguide have Mach-Zehnder interferometer structure, then at LiNbO
3Upper surface of substrate sputter one deck gold film is as recommending modulator electrode, in the present embodiment, the electrode length L=12mm of making, electrode separation d=20 μ m when wavelength X=633nm, gets Γ simultaneously
/Be the intermediate value 0.28 in empirical value interval, ne
=2.2 in these value substitution formulas (8), the semi-wave modulated voltage that obtains under this electrode structure size is
After electrode is made and is finished; then using plasma enhancing chemical vapor deposition or sputtering technology (also can be di-aluminium trioxide film, poly tetrafluoroethylene at modulator electrode and light guide surface making layer of silicon dioxide diaphragm; or magnesium fluoride film); import the straight wave guide place in part then and have the responsive window of disappearance ripple that length is 4mm, this window is used for surveying sample.
At first use wavelength as the ruddiness of 633nm as light source, the light that light source sends is coupled into three-dimensional LiNbO through Optical Fiber Transmission
3Monomode optical waveguide chip, the guided wave in the chip pass between the responsive window region of disappearance ripple and enter optical waveguide Mach-Zehnder interferometer, no any sample in the responsive window of disappearance ripple, the interferometer output signal through another root Optical Fiber Transmission to photodetector.Utilize the function of voltage generator to apply the voltage of linear change in time between interferometric two modulator electrodes of Mach-Zehnder, the change in voltage scope is 0V～90V.Utilize photodetector to measure the interferometer signal intensity in real time with the variation of modulation voltage simultaneously, the gained result as shown in Figure 6.As can be seen from the figure, the output light intensity of light guide interference meter chip is along with the variation of modulation voltage forms periodically even variation, and the variation of the preceding half period interference light intensity in each voltage modulated cycle is symmetrical with the variation of back half period interference light intensity.These variation relations are able to show more clearly in Fig. 7 a and Fig. 7 b.Fig. 7 a, Fig. 7 b are the cyclical variation of output light intensity in forward and backward half voltage modulated cycle.In the modulation period voltage successively taken place+90V ,-variation of 90V, this variation causes the output interference light intensity probably to change 15 cycles, the interference light phase place has probably changed 30 π, and forward and backward half voltage modulated is in the cycle, interference light phase place even variation.By Fig. 7 a, Fig. 7 b as can be known, the semi-wave modulated voltage V of light guide interference meter chip
π=90/15=6V, the theoretical design load that this and formula (9) are described is quite approaching.Can also learn that from interference pattern the output intensity contrast of light guide interference meter chip has reached 5.96dB.
According to formula (4) and formula (5) as can be known, the output light intensity of light guide interference meter chip is as the function of modulation voltage, and Fourier transform each other between the power spectrum of light source.Therefore utilization is carried out the Fast Fourier Transform (FFT) processing with the signal processing chip that photodetector and function of voltage generator link to each other simultaneously to the chip interference signal that records, and can obtain guided wave spectrum.Fig. 8 a, Fig. 8 b are the spectrogram of the interference pattern shown in Fig. 7 a, Fig. 7 b being done gained after the discrete Fourier transformation.With parameter L=12mm, γ
33=30.8 * 10
-12M/V, n
e=2.2, Γ=0.28, d=20 μ m, C=0.85V/s substitution formula (7) is also done the coordinate correspondence to the spectrogram shown in Fig. 8 a and Fig. 8 b, obtains the spectrogram shown in Fig. 9 a, Fig. 9 b, and it is the spectrogram about wavelength-light source power.Spectrum spectrum peak appears at 630.9nm and 628.6nm wavelength respectively as can be seen from Fig. 9 a, Fig. 9 b, though these two values and known input red light wavelength have difference slightly, this spectrogram still can be good at illustrating the power spectrum that can be finally inversed by light source by interference pattern more accurately.Only the spectrum of the spectrum among Fig. 9 a, Fig. 9 b peak is wideer, this number of cycles with the interference pattern that photodetector detects is relevant, namely relevant with the size of semi-wave modulated voltage, if increase the length of modulator electrode, reduce the spacing of modulator electrode, can reduce semi-wave modulated voltage, can increase interference periods under the identical modulation voltage, reduce to compose peak width, improve spectrometer resolution.
In like manner, when light source was expanded to polychromatic light from ruddiness, this method of the Fourier transform inverting light source light spectrum of integrated smooth technology, voltage modulated combination simultaneously of utilizing still was suitable for.
Fig. 2 is second kind of Fourier transform chip spectrometer architecture synoptic diagram based on integrated smooth technology of the present invention, and wherein, the light guide interference meter is to have replaced 3dB beam splitter and the bundling device among Fig. 1 with light wave guide direction coupling mechanism.
Fig. 4 is the 4th kind of Fourier transform chip spectrometer architecture synoptic diagram based on integrated smooth technology of the present invention, wherein, the interference arm of light guide interference meter comprises curved waveguide, make the straight wave guide arm lengths that is used for electrooptical modulation be multiplied, can reduce half-wave voltage, improve the wavelength resolution of spectrometer.
Result based on above embodiment gained can know by inference, this chip spectrometer is except carrying out the emission spectrum of unknown light source the test analysis, transducing is enough to carry out the spectrum test analysis to various materials, and by the distinctive spectral fingerprint of molecule, the realization scene property distinguished is fast quantitatively detected.
Claims (11)
1. the Fourier transform chip spectrometer based on integrated smooth technology comprises an integrated light guide chip, a light source, a photodetector, a function of voltage generator, two Transmission Fibers, a signal processing chip; It is characterized in that,
The integrated light guide chip comprises optical fiber input coupling port, optical fiber output coupling port, responsive window, responsive optical waveguide, light guide interference meter, electrooptical modulation electrode, and low-refraction inert media protective seam; One end of responsive optical waveguide connects optical fiber input coupling port, and centre portion is positioned at responsive window, and the other end connects the light guide interference meter, and the output terminal of light guide interference meter is connected with optical fiber output coupling port; The electrooptical modulation electrode is positioned at light guide interference meter interval; Except responsive window, the remaining surface of integrated light guide is covered by low-refraction inert media protective seam;
A Transmission Fibers connects light source and integrated light guide chip input coupling port, and another root Transmission Fibers connects integrated light guide chip output coupling port and photodetector; The function of voltage generator links to each other with electrooptical modulation electrode on the integrated light guide chip, is used for the interferometric guided wave phasic difference of light modulated waveguide; Signal processing chip is electrically connected with photodetector, function of voltage generator respectively, and the electric signal that detector is produced carries out the Fourier transform processing.
2. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, described integrated light guide chip be lithium niobate base chip of light waveguide, lithium tantalite based chip of light waveguide, GaAs based chip of light waveguide and indium phosphide chip of light waveguide one of them; Perhaps described integrated light guide chip is the film that is deposited with zinc paste or barium titanate in the interferometer interval of the integrated light guide chip that does not possess electrooptical effect.
3. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, described light guide interference meter has the electrooptical modulation function, for optical waveguide Mach-Zehnder interferometer, optical waveguide Young interferometer, optical waveguide polarization polarization interference meter, optical waveguide Michelson interferometer, optical waveguide Fabry-Perot interferometer one of them, or the distressed structure of above-mentioned interference meter.
4. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1 is characterized in that, described low-refraction inert media protective seam is silicon dioxide film, di-aluminium trioxide film, poly tetrafluoroethylene, or the magnesium fluoride film one of them.
5. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, utilize the function of voltage generator between two electrooptical modulation electrodes of light guide interference meter, to apply the voltage of linear change in time, utilize photodetector to measure the interferometer signal intensity in real time with the variation of modulation voltage simultaneously, utilize signal processing chip that the interferometer signal that records is carried out Fast Fourier Transform (FFT) then and handle, obtain from responsive optical waveguide conduction and enter interferometric guided wave spectrum.
6. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, a small amount of solid to be measured or fluid sample are placed the responsive window surface of chip, by the disappearance field wave of responsive waveguide and the interaction of material, the chip spectrometer is the absorption spectrum of working sample rapidly and sensitively.
7. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, utilize this chip spectrometer that the disappearance ripple absorption spectrum of the monomolecular adsorption layer that forms in the responsive window surface of chip is measured in real time, further by the distinctive spectral fingerprint of molecule, realize the property the distinguished detection to gas to be measured and biochemical substances.
8. according to claim 1 or 6 described Fourier transform chip spectrometers based on integrated smooth technology, it is characterized in that, the light beam that utilization is propagated in integrated light guide chip exterior space or responsive optical waveguide evanescent field excitation place the fluorescent material in the responsive window of chip, the responsive optical waveguide of recycling is collected fluorescence, utilizes this chip spectrometer that the emission spectrum of fluorescent material is carried out Measurement and analysis then.
9. according to claim 1 or 7 described Fourier transform chip spectrometers based on integrated smooth technology, it is characterized in that, the biochemical reagents that utilization has the molecular recognition ability carry out finishing to the responsive window of chip, strengthen the surface to the selective adsorption of target molecules in the solution example to be measured, utilize this chip spectrometer that the monomolecular adsorption layer that forms in the responsive window surface of chip is carried out spectral analysis then, realize the property the distinguished trace of biochemical substances is surveyed.
10. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, at a plurality of responsive windows of same integrated light guide chip preparation, a plurality of responsive optical waveguides, a plurality of light guide interference meters, many group electrooptical modulation electrodes and a plurality of optical fiber I/O coupling port, use many to Transmission Fibers, the light source of a plurality of emission different spectrals, the different photodetector of a plurality of detection spectral ranges, one or more function of voltage generators, one or more signal processing chips, constitute the multi-channel chip spectrometer thus, the spectral range difference of each channel measurement, thereby the spectral measurement ranges of expansion entire chip spectrometer improves spectral resolution.
11. the Fourier transform chip spectrometer based on integrated smooth technology according to claim 1, it is characterized in that, the light guide interference meter that comprises the curved waveguide structure in the preparation of integrated light guide chip, utilize curved waveguide to lengthen the interference arm lengths that is used for electrooptical modulation, thereby improve the spectral resolution of single channel Fourier transform spectrometer.
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| US7433044B1 (en) * | 2004-06-04 | 2008-10-07 | University Of Hawaii | Sagnac fourier transform spectrometer having improved resolution |
| CN101251484B (en) * | 2008-04-10 | 2011-08-17 | 中国科学院长春光学精密机械与物理研究所 | Miniature fourier transform spectrometer based on modulation |
| CN100595533C (en) * | 2008-05-19 | 2010-03-24 | 哈尔滨工业大学 | Fourier transform interference spectrometer based on slow ray light velocity controlling technology |
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