CN105674889B - Displacement measurement method based on the interference of light - Google Patents
Displacement measurement method based on the interference of light Download PDFInfo
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- CN105674889B CN105674889B CN201610053503.4A CN201610053503A CN105674889B CN 105674889 B CN105674889 B CN 105674889B CN 201610053503 A CN201610053503 A CN 201610053503A CN 105674889 B CN105674889 B CN 105674889B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
A kind of displacement measurement method based on the interference of light, it is related to a kind of displacement measurement method, this method is the characteristic penetrated using optical resonator to wavelength selectivity, it is long by obtaining chamber to the analysis of transmitted light wavelength, when change of cavity length, transmission peak wavelength generates variation therewith, and photoelectric receiving arrangement, which detects and analyzes transmission peak wavelength, obtains change of cavity length amount, and the long variable quantity of transit chamber calculates measured object displacement.Accurate measurement to displacement can be achieved in the present invention, have the characteristics that high certainty of measurement, range it is big, can from nm grades of leaps to m grades, be greatly improved response time of system, use easy to spread.
Description
Technical field
The present invention relates to a kind of displacement measurement method, particularly a kind of displacement measurement method based on the interference of light.
Background technology
During the analyses such as Precision Machinery Design and material development, displacement, vibration amplitude and the vibration frequency of parts,
Deformation, material the data such as coefficient of thermal expansion acquisition as analysis key.And existing displacement measurement system, typically
Then range is short for precision height, and then precision is low greatly for range, its good precision of Waveform Matching is high but operation time long low-response, response are fast then smart
It spends low, it is impossible to meet the needs of analysis of modernization.
Invention content
The technical problem to be solved by the present invention is to：A kind of can be achieved to the accurate measurement of displacement and precision height, range is provided
Greatly, the fast displacement measurement method based on the interference of light of response.
Solving the technical solution of above-mentioned technical problem is：A kind of displacement measurement method based on the interference of light, this method are profits
The characteristic penetrated with optical resonator to wavelength selectivity, it is long by obtaining chamber to the analysis of transmission peak wavelength, when change of cavity length,
Transmission peak wavelength generates variation therewith, and photoelectric receiving arrangement, which detects and analyzes transmission peak wavelength, obtains change of cavity length amount, and transit chamber length becomes
Change gauge and calculate measured object displacement.
This method is measured using the displacement measuring device based on the interference of light, is included the following steps：
1. when measured piece does not move, the 4th Amici prism group is in contact with measured piece, when system is not opened, the second reflection
Mirror relative to the distance between first speculum, the second right-angle reflecting prism group relative between the first corner reflection prism group away from
From being h；After system is opened, driver starts along optical path direction high frequency telescopic variation, makes the second speculum and the second right angle anti-
The variation that prism group generates △ h relative to the distance between the first speculum and the first right-angle reflecting prism group is penetrated, i.e. distance becomes
For h+ △ h；
After light is separated by laser beam emitting device transmitting by the first Amici prism, it is divided into measuring beam a and scanning light beam
Finally to become the light path that light beam g and light beam j are passed through respectively suitable by a series of propagation by b, measuring beam a, scanning light beam b
When, all spectrum lambdas that laser beam emitting device is sent out0~λnIt is dry that light beam g and light beam j generations are shown as in the second photoelectric receiving arrangement
Light energy most intensity values are related to, i.e. the light energy of all wavelengths is all most strong, records the first photoelectric receiving arrangement provides first at this time
The distance between speculum and the second speculum h 〞；
2. when the 4th Amici prism group with testee along the scanning light beam b directions of propagation moving displacement x when, driver is lasting
High frequency stretches, total energy so that by measuring beam a of the laser that laser beam emitting device is sent out after the first Amici prism separates with sweep
The equivalent optical path that light beam b finally reaches the second photoelectric receiving arrangement is retouched, the second photoelectric receiving arrangement is made to be shown as light beam g and light beam
J generates interference light energy most intensity values, record first penetrating between mirror and the second speculum of providing of the first photoelectric receiving arrangement at this time
Distance h 〞+△ h 〞, at this time 2x=2 ×（2N+1）× △ h 〞, N are the first right-angle reflecting prism group and the second right-angle reflecting prism
The number of respective standard right-angle prism in group calculates measured object displacement x by change of cavity length △ h 〞；The λ0~λnFor
0.1~2um.
The present invention further technical solution be：The measuring beam a and scanning light beam b is propagated most by a series of
The detailed process for becoming light beam g and light beam j respectively afterwards is as follows：
Measuring beam a is divided into light beam c and light beam d after the second Amici prism, and light beam c enters by the first speculum and the
The optical resonator of two-mirror composition, light beam c is transmitted to the first photoelectric receiving arrangement after resonance multiple reflections, obtains the
The distance between one speculum and the second speculum；Light beam d enters the first right-angle reflecting prism group and the second right-angle reflecting prism
Group becomes light beam f after the second Amici prism is returned to after multiple reflections, and light beam f becomes light beam after third Amici prism
g；Scanning light beam b becomes light beam e after the 4th Amici prism group, and light beam e enters back into third light splitting after corner cube mirror
Prism becomes light beam j, and the wavelength for the interference illustration that light beam g and light beam j is generated and center light energy are by the second opto-electronic receiver at this time
Device is received and is handled, and analyzes and draw the variation diagram of light energy.
The present invention further technical solution be：The displacement measuring device based on the interference of light swashs including described
Light emitting devices, the first Amici prism, the first speculum, the second speculum, the first right-angle reflecting prism group, the reflection of the second right angle
Prism group, the 4th Amici prism, the first photoelectric receiving arrangement, the second photoelectric receiving arrangement, driver and the second Amici prism,
Third Amici prism；Wherein：
First Amici prism, point of the first Amici prism are set on the laser optical path that the laser beam emitting device is launched
Light light path includes light splitting optical path A, light splitting optical path B；Second Amici prism, the second Amici prism are set on the light splitting optical path A
Light splitting optical path include light splitting optical path C, light splitting optical path D；The light splitting optical path C is equipped with optical resonator, the optical resonance
Chamber is made of the first speculum, the second speculum；First photoelectric receiving arrangement is provided with after optical resonator；Second
The first right-angle reflecting prism group, the second right-angle reflecting prism group are provided on the light splitting optical path D of Amici prism, first is straight
Corner reflection prism group, the second right-angle reflecting prism group one end be fixedly connected with the first speculum, the second speculum, the first right angle
Reflecting prism group, the second right-angle reflecting prism group the other end connect with driver, the first right-angle reflecting prism group, the second right angle
The reflected light retroeflection of reflecting prism group forms light splitting optical path F to the second Amici prism, is set on the light splitting optical path F of the second Amici prism
There is the third Amici prism；4th Amici prism, the 4th light splitting are set on the light splitting optical path B of first Amici prism
Corner cube mirror is provided on the light splitting optical path E of prism, the reflected light of corner cube mirror enters third Amici prism, third light splitting
The light splitting optical path G of prism is equipped with second photoelectric receiving arrangement.
The present invention further technical solution be：First Amici prism includes right-angle prism I and right-angle prism
II, the inclined-plane of right-angle prism and right-angle prism is bonded together；Second Amici prism includes right-angle prism III and right angle
The inclined-plane of prism IV, right-angle prism III and right-angle prism IV is bonded together, and right-angle prism III and right-angle prism IV are opposite
Right-angle surface is parallel；The right-angle prism III is equipped with light absorption and diffusing reflection layer I at its right-angle surface, and right-angle prism IV is at right angle
Light absorption and diffusing reflection layer II are equipped at face.
The present invention further technical solution be：First speculum has close to the second speculum side plating shoe
Reflectance coating；Second speculum is having reflectance coating close to the first speculum side plating shoe.
The present invention further technical solution be：The spectral width of the laser beam emitting device is λ0~λn；Described
First speculum is in spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection be 90~99%；Second is anti-
Mirror is penetrated in spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection be 90~99%；The λ0~λn
For 0.1~2um, λi~λjFor 0.2~0.4um.
The present invention further technical solution be：First photoelectric receiving arrangement is used for wavelength Xi~λjLight beam
Energy analyzed, and calculate the distance of the first speculum and the second speculum；Second photoelectric receiving arrangement is used
In to different wave length λ0~λnBeam energy analyzed, and analyze the most strong wavelength of light energy；The λ0~λnFor
0.1~2um, λi~λjFor 0.2~0.4um.
The present invention further technical solution be：The first right-angle reflecting prism group includes one using inclined-plane to light
Generate the right-angle prism V of reflection, N number of standard right-angle prism VI for generating reflection to light using two right-angle surfaces；Described second is straight
Corner reflection prism group include one using right-angle surface to light generate reflection small right-angle prism, it is N number of using two right-angle surfaces to light produce
The standard right-angle prism VII of raw reflection；The right-angle surface area of the small right-angle prism is VII right-angle surface area of standard right-angle prism
0.3~0.8 times, N >=1；The third Amici prism includes right-angle prism VIII and right-angle prism Ⅸ, right-angle prism VIII and straight
The inclined-plane of angle prism Ⅸ is bonded together, and right-angle surface relative to each other is parallel；It is equipped at Ⅸ right-angle surface of right-angle prism
Light absorption and diffusing reflection layer III；By four pieces of same right-angle prisms Ⅹ, right-angle surface gluing forms 4th Amici prism each other
Square, wherein Ⅹ inclined-plane of right-angle prism be equipped with light absorption and diffusing reflection layer IV, the 4th Amici prism is with tested straight line
Mobile object moves together.
The present invention further technical solution be：The driver includes actuator, bonding mobile block, compensation block, consolidates
Determine block, the mobile block and fixed block are bonded in the both ends of actuator respectively, and fixed block is Nian Jie with compensation block, and compensation block is with driving
There are gaps, compensation block between moving part to consolidate with mobile block with the first right-angle reflecting prism group, the second right-angle reflecting prism group respectively
Fixed connection.
Since using the above structure, the displacement measurement method based on the interference of light of the present invention has compared with prior art
Following advantageous effect：
1. it can realize the accurate measurement to displacement：
Since the present invention is the characteristic that is penetrated to wavelength selectivity using optical resonator, pass through the analysis to transmission peak wavelength
It is long to obtain chamber, when change of cavity length, transmission peak wavelength generates variation therewith, and photoelectric receiving arrangement detects and analyzes transmission peak wavelength and obtains
Change of cavity length amount, the long variable quantity of transit chamber calculate measured object displacement.Its specific method is when measured piece does not move, is divided rib
Microscope group is in contact with measured piece, system open after, driver starts along optical path direction high frequency telescopic variation, make the first speculum and
First right-angle reflecting prism group generates variation relative to the distance between the second speculum and the second right-angle reflecting prism group.Laser
After the light beam that emitter is launched is separated by the first Amici prism, be divided into measuring beam a and scanning light beam b, measuring beam a and
Scanning light beam b finally becomes light beam g and light beam j respectively by a series of propagation, when light beam g and light beam j finally reaches the second light
When the light path of electric reception device is suitable, the second photoelectric receiving arrangement is made to be shown as light beam g and light beam j generation interference light energies most strong
Value, i.e., all spectrum lambdas that laser beam emitting device is sent out0~λnLight energy be all most strong, record the first photoelectric receiving arrangement at this time
The first speculum for providing, the distance of the second speculum；When the 4th Amici prism with testee along the scanning light beam b directions of propagation
During displacement distance x, driver continuous high frequency stretches, and always has a moment can be so that the laser that laser beam emitting device is sent out is divided through first
Two-beam line after prism is separated finally reaches the equivalent optical path of the second photoelectric receiving arrangement, shows the second photoelectric receiving arrangement
It is generated for light beam g and light beam j and interferes light energy most intensity values, record the first speculum that the first photoelectric receiving arrangement provides at this time,
The distance of second speculum can calculate measured object displacement by change of cavity length.Therefore, the present invention generates displacement from the first beginning and end
It starts to work, until measured piece straight-line displacement stops, measuring measured piece displacement, so as to realize the accurate measurement for aligning and moving,
The rate variation in the amplitude and frequency, displacement process of vibration can also be measured.
2. precision is high：
Present invention utilization detaches light wave amplitude approach and is uniformly divided into two beams to light beam, when two light beams are reaching interference item
During part, and during the equivalent optical path of process, interference energy can reach extreme value, using this principle, work as light beam（Measuring beam a）Light
Journey（It sends out to receiver and receives from light source）During with the relatively slow velocity variations of measured piece, another light beam（Scanning light beam b）
Light path faster alternately change（Frequency is constant）, the equivalent optical path that always there is a moment to make measuring beam a and scanning light beam b.
In the present invention, the light path of measuring beam a is：Light beam is sent out from laser beam emitting device after the first Amici prism,
It is divided into measuring beam a to start through the second Amici prism, the first right-angle reflecting prism group, the second right-angle reflecting prism group, third point
Light prism etc., finally to the light path that the second photoelectric receiving arrangement is passed through.
The light path of scanning light beam b is：Light beam is sent out from laser beam emitting device after the first Amici prism, is divided into scanning light
Beam b starts, through the 4th Amici prism group, corner cube mirror, third Amici prism, finally to the second photoelectric receiving arrangement to be passed through
Light path.
When measured piece is in position O1, the light path of measuring beam a is h1, the light path of scanning light beam b is in h1±△h1Variation,
When measuring beam and scanning light beam light path are all h, two-beam generation interference energy is most strong, is detected by the second photoelectric receiving arrangement
And it analyzes, the light path of writing scan light beam, the position of record driving scanning light beam component.
When measured piece is in position O2, measuring beam light path becomes h1+△h1, scanning light beam light path continuation change repeatedly, when
When the light path of scanning light beam and the light path of measuring beam equal again, two-beam generates interference energy and reaches most strong again, is connect
Device reception and the again light path of writing scan light beam are received, can be obtained by the front and rear light beam of writing scan twice retardation values tested
The change in displacement of part.If utilize wide spectrum（λ0~λn）, then each wavelength energy is all the light for two-beam when interfering maximum value
Journey is equal.Therefore, wavelength of the invention is shorter（λ0It is smaller）, spectrum is wider（λ0Range is bigger）, then measurement accuracy is higher.
In addition, the present invention is insensitive to light polarization, reception optical band wavelength is most short, and precision is more stable, so as to further
Technology measurement accuracy.
3. range is big：
The present invention is to utilize optical resonator（Fabry Perot chamber）To the characteristic that wavelength selectivity penetrates, by transmission
It is long can to obtain chamber for the analysis of optical wavelength.When change of cavity length, transmission peak wavelength generates variation therewith, and receiver is detected and analyzed
Transmission peak wavelength can obtain change of cavity length amount.
Spectral region can be received in resonator（λi~λj）Narrower, wavelength is longer（λiIt is bigger）, the long h ' of minimum cavity is longer,
The alterable range △ h of chamber length（△h≤5 h’）It is bigger, so as to which measurement range is bigger, in addition increase by the first right-angle reflecting prism group
It can increase measurement range with the standard right-angle prism quantity in the second right-angle reflecting prism group.Therefore, measurement model of the invention
Enclosing can be according to requiring to formulate, and measurement range L is：0~10 (2N+1) h ', N is the first right-angle reflecting prism group and second in formula
The number of respective standard right-angle prism, measurement accuracy δ in right-angle reflecting prism group：0.1*λ0, range is big, big across magnitude,
It can be from nm grades across to m grades.
4. response is fast：
The present invention makes its compact-sized using light path method is folded, not by only needing analysing energy to light wave spectral pattern analysis
Maximum wavelength value, therefore the error occurred during Software match waveform is avoided, while reduce operand, it is greatly improved system
Response time.
In the following, the technical characteristic of the displacement measurement method based on the interference of light of the present invention is made in conjunction with the accompanying drawings and embodiments into
The explanation of one step.
Description of the drawings
Fig. 1：The structure principle chart of the displacement measuring device based on the interference of light that the present invention uses,
Fig. 2：The structure diagram of first Amici prism,
Fig. 3：The structure diagram of second Amici prism,
Fig. 4：The structure diagram of first speculum,
Fig. 5：The structure diagram of second speculum,
Fig. 6：The structure diagram of first right-angle reflecting prism group,
Fig. 7：The structure diagram of second right-angle reflecting prism group,
Fig. 8：The structure diagram of third Amici prism,
Fig. 9：The structure diagram of 4th Amici prism,
Figure 10：The structure diagram of driver,
Figure 11：Energy-wavelength graph of initial measurement,
Figure 12：Loss-wavelength graph of initial measurement,
Figure 13：Measured piece generates energy-wavelength graph of displacement,
Figure 14：Measured piece generates loss-wavelength graph of displacement,
Figure 15：Resonator transmitted light energy-wavelength graph,
Figure 16：Chamber length increases the front and rear comparison Local map of 1um transmitted lights wavelength,
Figure 17：Chamber length increases 1um transmitted light wavelength previous peaks and captures datagram,
Figure 18：Chamber length increases 1um transmitted light wavelength postpeaks value and captures datagram,
Figure 19：Transmitted light energy-Wavelength distribution figure during resonator a length of 6 h '=46.8um.
In above-mentioned attached drawing, each description of symbols is as follows：
1- laser beam emitting devices,
The first Amici prisms of 2-, 201- right-angle prisms I, 202- right-angle prisms II,
The second Amici prisms of 3-, 301- right-angle prisms III, 302- right-angle prisms IV,
303- light absorptions and diffusing reflection layer II, 304- light absorptions and diffusing reflection layer I,
The first speculums of 4-, the second speculums of 5-, the first photoelectric receiving arrangements of 6-,
7- the first right-angle reflecting prism groups, 701- right-angle prisms V, 702- right-angle prisms VI,
8- the second right-angle reflecting prism groups, 801- right-angle prisms VII, the small right-angle prisms of 802-,
9- third Amici prisms, 901- right-angle prisms VIII, 902- right-angle prisms Ⅸ, 903- light absorptions and diffusing reflection layer III,
The 4th Amici prisms of 10-, 1001- right-angle prisms Ⅹ, 1002- light absorptions and diffusing reflection layer IV,
11- corner cube mirrors, the second photoelectric receiving arrangements of 12-,
13- drivers, 1301- actuators, 1302- bonding mobile blocks, 1303- compensation blocks, 1304- fixed blocks.
Specific embodiment
Embodiment one：
A kind of displacement measurement method based on the interference of light, this method penetrate wavelength selectivity using optical resonator
Characteristic, long by obtaining chamber to the analysis of transmission peak wavelength, when change of cavity length, transmission peak wavelength generates variation, opto-electronic receiver therewith
Device, which detects and analyzes transmission peak wavelength, obtains change of cavity length amount, and the long variable quantity of transit chamber calculates measured object displacement.
This method is measured using the displacement measuring device based on the interference of light, is included the following steps：
1. when measured piece does not move, the 4th Amici prism group 10 is in contact with measured piece, and when system is not opened, second is anti-
It is h that 5 and second right-angle reflecting prism group 8 of mirror, which is penetrated, relative to the distance between the first speculum 4 and the first corner reflection prism group 7.
After system is opened, driver 13 starts, along optical path direction high frequency telescopic variation, to make the second speculum 5 and the second right-angle reflecting prism
Group 8 generates the variation of △ h relative to the distance between the first speculum 4 and the first right-angle reflecting prism group 7, i.e. distance becomes h+
△h。
After light is emitted by laser beam emitting device 1 to be separated by the first Amici prism 2, it is divided into measuring beam a and scanning light
Beam b, measuring beam a, scanning light beam b finally become the light path phase that light beam g and light beam j are passed through respectively by a series of propagation
At that time, all spectrum lambdas that laser beam emitting device 1 is sent out0~λnLight beam g and light beam j productions are shown as in the second photoelectric receiving arrangement 12
Raw interference light energy most intensity values, the i.e. light energy of all wavelengths are all most strong, record what the first photoelectric receiving arrangement 6 provided at this time
The distance h 〞 of first speculum 4 and the second speculum 5.
2. when the 4th Amici prism group 10 with testee along the scanning light beam b directions of propagation displacement distance x when, driver 13
Continuous high frequency stretches, and total energy causes the measuring beam by the laser that laser beam emitting device 1 is sent out after the first Amici prism 2 separates
A and scanning light beam b finally reaches the equivalent optical path of the second photoelectric receiving arrangement 12, and the second photoelectric receiving arrangement 12 is made to be shown as light
Beam g and light beam j generate interference light energy most intensity values, record at this time the first photoelectric receiving arrangement 6 provide first penetrate mirror 4 and second
The distance h 〞+△ h 〞 of speculum 5, at this time 2x=2 ×（2N+1）× △ h 〞, N are anti-for the first right-angle reflecting prism group and the second right angle
Penetrate the number of respective standard right-angle prism in prism group；Measured object displacement x is calculated by change of cavity length △ h 〞.
Above-mentioned measuring beam a and scanning light beam b finally becomes the tool of light beam g and light beam j by a series of propagation respectively
Body process is as follows：
Measuring beam a is divided into light beam c and light beam d after the second Amici prism 3, and light beam c enters by 4 He of the first speculum
The optical resonator of second speculum 5 composition, light beam c are transmitted to the first photoelectric receiving arrangement 6 after resonance multiple reflections, obtain
Go out the distance between the first speculum 4 and the second speculum 5.Light beam d enters the first right-angle reflecting prism group 7 and the second right angle is anti-
Prism group 8 is penetrated, becomes light beam f after the second Amici prism 3 is returned to after multiple reflections, light beam f is after third Amici prism 9
Become light beam g.Scanning light beam b becomes light beam e after the 4th Amici prism group 10, light beam e after corner cube mirror 11 again
Become light beam j into third Amici prism 9, at this time the wavelength for the interference illustration that light beam g and light beam j are generated and center light energy by
Second photoelectric receiving arrangement 12 is received and is handled, and analyzes and draw the variation diagram of light energy.
The displacement measuring device based on the interference of light used in the present invention includes 1, first point of the laser beam emitting device
Light prism 2, the first speculum 4, the second speculum 5, the first right-angle reflecting prism group 7, the second right-angle reflecting prism group the 8, the 4th
Amici prism 10, the first photoelectric receiving arrangement 6, the second photoelectric receiving arrangement 12,13 and second Amici prism 3 of driver,
Three Amici prisms 9；Wherein：
First Amici prism 2, the first Amici prism 2 are set on the laser optical path that the laser beam emitting device 1 is launched
Light splitting optical path include light splitting optical path A, light splitting optical path B；Second Amici prism 3, the second light splitting are set on the light splitting optical path A
The light splitting optical path of prism 3 includes light splitting optical path C, light splitting optical path D；The light splitting optical path C is equipped with optical resonator, the optics
Resonator is made of the first speculum 4, the second speculum 5；The first opto-electronic receiver dress is provided with after optical resonator
Put 6；The first right-angle reflecting prism group 7, the second right angle reflection rib are provided on the light splitting optical path D of second Amici prism 3
Microscope group 8, the first right-angle reflecting prism group 7, one end of the second right-angle reflecting prism group 8 and the first speculum 4, the second speculum 5
Be fixedly connected, the first right-angle reflecting prism group 7, the second right-angle reflecting prism group 8 the other end connect with driver 13, first is straight
The reflected light retroeflection of corner reflection prism group 7, the second right-angle reflecting prism group 8 forms light splitting optical path F to the second Amici prism 3, the
The light splitting optical path F of two Amici prisms 3 is equipped with the third Amici prism 9；The light splitting optical path of first Amici prism 2
4th Amici prism 10 on B is set, corner cube mirror 11, right angle reflection are provided on the light splitting optical path E of the 4th Amici prism 10
The reflected light of mirror 11 enters third Amici prism 9, and the light splitting optical path G of third Amici prism 9 connects equipped with second photoelectricity
Receiving apparatus 12.
The laser beam emitting device 1 can send out the wide spectrum laser of certain light energy, spectral width λ0~λn,
λ0=0.1um, λn=2um。
First Amici prism 2 includes right-angle prism I 201 and right-angle prism II 202, right-angle prism 201 and right angle
The inclined-plane of prism 202 is bonded together, and ensures that right-angle surface relative to each other is parallel.First Amici prism 2 is to Laser emission
The wide spectrum laser that device 1 is sent out is divided into two light beams --- measuring beam a and scanning light beam b, and the energy phase of two light beams
Deng.
Second Amici prism 3 includes right-angle prism III 301 and right-angle prism IV 302, right-angle prism III 301 and straight
The inclined-plane of angle prism IV 302 is bonded together, and right-angle prism III 301 it is opposite with right-angle prism IV 302 right-angle surface it is parallel.It should
Second Amici prism 3 is divided into measuring beam a light beam c and light beam d, and the energy of light beam c and light beam d are equal.
The right-angle prism III 301 is equipped with light absorption and diffusing reflection layer I 304 at its right-angle surface, light absorption and unrestrained anti-
Layer I 304 is penetrated to absorb light beam c ' under the premise of light beam f is not blocked and diffusing reflection（Light beam c ' is by the first speculum 4 and
The optical resonator that two-mirror 5 forms generates, what is occurred after the separation of the second Amici prism 3）, right-angle prism IV 302
Light absorption and diffusing reflection layer II 303 are posted at right-angle surface, light absorption and diffusing reflection layer II 303 are not blocking measuring beam a's
Under the premise of light beam f ' is absorbed and diffusing reflection（Light beam f ' is detached by light beam d after multiple reflections by the second Amici prism 3
Occur afterwards）.
First speculum 4 is having reflectance coating close to 5 side of the second speculum plating shoe；First speculum 4 is in light
Spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection be 90~99%.
Second speculum 5 is having reflectance coating close to 4 side of the first speculum plating shoe, and second speculum 5 is in light
Spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection for 90~99%, the λi~λjFor 0.2~
0.4um。
First photoelectric receiving arrangement 6 is used for wavelength Xi~λjThe energy of light beam is analyzed, and calculates first
The distance of 4 and second speculum 5 of speculum, to wavelength Xi~λjWith outer light beam without analyzing and calculating；
The first right-angle reflecting prism group 7 include one using inclined-plane to light generate reflection right-angle prism V 701,
N number of standard right-angle prism VI 702 for generating reflection to light using two right-angle surfaces, the first right-angle reflecting prism group 7 are anti-with right angle
It penetrates prism group 8 and multiple reflections is carried out to light beam d simultaneously, and light beam d is reflected back the second Amici prism 3 in different positions.
The second right-angle reflecting prism group 8 includes a small right-angle prism for generating reflection to light using right-angle surface
802nd, N number of standard right-angle prism VII 801 for generating reflection to light using two right-angle surfaces.The right angle of the small right-angle prism 802
Face area is 0.5 times of VII 801 right-angle surface area of standard right-angle prism.The second right-angle reflecting prism group 8 reflects rib with right angle
Microscope group 7 carries out multiple reflections to light beam d simultaneously, and light beam d is reflected back the second Amici prism 3 in different positions.Above-mentioned N
≥1。
The third Amici prism 9 includes right-angle prism VIII 901 and right-angle prism Ⅸ 902, right-angle prism VIII 901 and straight
The inclined-plane of angle prism Ⅸ 902 is bonded together, and right-angle surface relative to each other is parallel；Ⅸ 902 right-angle surface of right-angle prism
Post light absorption and diffusing reflection layer III 903 in place.Third Amici prism 9 into the light beam f in it and light beam e ' to being divided into two weights
The light beam g and light beam j stacked, and the energy of light beam g and light beam j are equal；III 903 couples of light beam e ' of light absorption and diffusing reflection layer
It is absorbed and diffusing reflection（Light beam e ' is detached by light beam e after the reflection of 11 right-angle surface of corner cube mirror into third Amici prism 9
Occur afterwards）；
By four pieces of same right-angle prisms Ⅹ 1001, right-angle surface gluing forms just 4th Amici prism 10 each other
Cube, wherein Ⅹ 1001 inclined-plane of right-angle prism are equipped with light absorption and diffusing reflection layer IV 1002, absorb scanning light beam b respectively and pass through
The transmission and the reflected beams that interface inside Amici prism group 10 generates, the 4th Amici prism 10 is with tested linear movement object
Body uniform movement.
The corner cube mirror 11, can be totally reflected light beam at inclined-plane.
Second photoelectric receiving arrangement 12, for different wave length λ0~λnBeam energy analyzed, and analyze
Go out the most strong wavelength of light energy.
The driver 13 includes actuator 1301, bonding mobile block 1302, compensation block 1303, fixed block 1304, institute
The mobile block 1302 and fixed block 1304 stated are bonded in the both ends of actuator 1301 respectively, and fixed block 1304 is viscous with compensation block 1303
It connects, there are gap between compensation block 1303 and actuator 1301, compensation block 1303 is anti-with the first right angle respectively with mobile block 1302
Penetrate prism group 7, the second right-angle reflecting prism group 8 is fixedly connected.
This driver 13 is extending when being powered, and when electric discharge can return to original length, and when contraction can not make the first speculum 4
Contact or collide with the second speculum 5, can not make the first right-angle reflecting prism group 7 and the second right-angle reflecting prism group 8 contact or
Collision, the left end of driver 13 fixes, and when 1301 high frequency of actuator is flexible, rocker piece 1302 drives the second speculum 5 and the
Two right-angle reflecting prism groups, 8 continuous high frequency along light beam c direction of propagation side-to-side movements, the stroke △ h of actuator 1301 do not surpass
Cross the long h ' of minimum cavity 5 times, i.e. △ h≤5h ', the distance between the first speculum 4 and the second speculum 5 are reflected with the first right angle
The distance between 7 and second right-angle reflecting prism group 8 of prism group is equal, referred to as the long h of chamber, and h has to be larger than the long h ' of minimum cavity.And the
One speculum 4 is not moved with the first right-angle reflecting prism group 7 for fixed group, the second speculum 5 and the second right-angle reflecting prism group 8
It is moved left and right for synchronizing moving group along light beam c directions.
The long h ' of minimum cavity：The broad-spectrum beam difference wave emitted to ensure the first electric reception device 6 laser beam emitting device 1
It is long（λi~λj）In the range of, when scanning, can measure at least two wavelength light intensity as maximum value, pass through the length of this 2 wavelength and it
Between spectral line apart from inverse to go out chamber at this time long, therefore the distance h only between the first speculum 4 and the second speculum 5 is more than
It can be measured during the long h ' of minimum cavity,。
The long h of optical resonator chamber to ensure that measurement optical resonator chamber is long, and ensures the first photoelectric receiving arrangement 6 to light
The scanning recognition of beam, the h ' of the long h of chamber ranging from h '≤h≤1.5.
Spectral region can be received in resonator（λi~λj）Narrower, wavelength is longer（λiIt is bigger）, the long h ' of minimum cavity is longer,
The alterable range △ h of chamber length（△h≤5 h’）It is bigger, so as to which measurement range is bigger, in addition increase by the first right-angle reflecting prism group 7
It can increase measurement range with the standard right-angle prism quantity in the second right-angle reflecting prism group 8（But it can excessively influence to measure essence
Degree, i.e. resonator displacement accuracy and the product of standard right-angle prism quantity are more than 0.1 times of minimum wavelength λ0）.Measurement range L is：0
~10 (2N+1) h ', N is respective standard right-angle prism in the first right-angle reflecting prism group and the second right-angle reflecting prism group in formula
Number, measurement accuracy δ：0.1*λ0, range is big, big across magnitude, can be from nm grades across to m grades.Its principle is as follows：
Assuming that light source uses ultraviolet band（100nm~400nm, λ0=100nm, λn=400nm）Spectral region, measured piece
Relatively slow speed generates straight line position time shift and measures, therefore have light energy functional expression:
--- the energy relative value of interference light, normalization.（Measuring beam a and the superposition of scanning light beam b two-beams
Attainable most intense light energy is maximum value after interference, and most dim light energy is 0）
N- medium refraction indexs, vacuum or gas intermediate value are about 1；
h1Optical path difference between scanning light beam A and measuring beam B, um；
△h1The equation of light that measured object displacement generates, um；
λ-wavelength, um；
When the optical path difference between scanning light beam a and measuring beam b is equal, i.e. h1=0, energy-wavelength image is Figure 11
It is shown.It can be seen from fig. 11 that when measured piece does not generate displacement, when the optical path difference phase between scanning light beam a and measuring beam b
Whens waiting, the light energy between wavelength 100nm~400nm is all the maximum value of interference energy.
If tested after being zeroed using light power meter, its pad value is seen after light energy normalization（Loss value）
--- the energy loss value of interference light, dB；
Loss-wavelength image is shown in Figure 12.
Measuring beam b light paths is made to generate small light path variable △ h when measured piece generates displacement x1During=0.01um=10nm
（By systemic presupposition △ h1=0.1λ0）, at this time when scanning light beam a is again with initial light path come when interfering, energy-wavelength image is figure
Shown in 13.It can be observed from fig. 13 that shortwave strong point, especially in wavelength 0.1um（=100nm）Place, interference light energy is not up to most
Big value, only 90% or so.
If tested using light power meter, loss-wavelength image is obtained as shown in Figure 14.
Common power meter precision is apparent that the light path of measuring beam a and scanning light beam b not in -0.1dB
Together, therefore displacement accuracy is measured higher than 0.1 λ0.And 0 smaller measurement accuracy of λ is higher.
As measuring beam a and the equivalent optical path of scanning light beam b, during such as Figure 11 and Figure 12 situations, the second photoelectric receiving arrangement
12 send out signal, record chamber length and the time of optical resonator by the first photoelectric receiving arrangement 6 at this time.When object moves, make
Measuring beam b light paths generate minor change, and the driver 13 comparatively fast moved back and forth make again measuring beam a light path be equal to sweep
The light path of light beam b is retouched, chamber length and the time of optical resonator at this time is re-recorded, by cross-reference, can obtain the displacement of object
And situation about changing over time.
As light beam c（If wavelength is 100nm~400nm）Into the optics being made of the first speculum 4 and the second speculum 5
In resonator, and optical resonator selectively penetrates more narrow wave-length coverage（350~400nm）.
Light wave measurement precision 0.04pm now, system take measurement accuracy 1pm, i.e., maximum pumping energy wavelengths, which generate, is more than 1pm
The first photoelectric receiving arrangement 6 can be measured and be analyzed during variation.
Optical resonator transmitted light energy functional expression：
- resonator transmitted light energy；
H-resonator long value, um；
△ h-long the changing value of resonator, um；
L-optical wavelength, um；
R-resonator reflectivity；
N-medium refraction index, vacuum or gas intermediate value are about 1.
Due to having the requirement of the long h ' of minimum cavity, the wave-length coverage of selective transmission light wave（λi~λj）After can obtain：
Assuming that it is 380nm~400nm that resonator, which is selected through wavelength,（λi=380nm, λj=400）, then h '=7.8um, if adopting
It is long with a length of resonator of minimum cavity（h’=h）, transmitted light energy-wavelength image is shown in Figure 15.
Note：If chamber is grown in the h ' of h '≤h≤1.5, adjacent transmissive optical wavelength can be passed through（λ1, λ2）Obtain chamber long value.
When chamber is with changing value（△h）When, transmitted light wavelength generates variation, it is assumed that chamber length increases 1nm, then front and rear comparison is saturating
It is as shown in figure 16 to penetrate wave length shift image.The peak of the spectral line P2 after spectral line P1 and variation before capturing to change to its image peak value
Value wavelength is respectively image graph 17, shown in Figure 18.
It can be obtained by Figure 17, Figure 18 when Resonant Intake System increases 1um, transmission center wavelength of light drift 0.00005um=
0.05nm=50pm, much larger than the measurement accuracy 1pm that system is taken, system is enough to measure.
As △ h=5 h ', at this time for the chamber set by system grow h '=6 of maximum h=h '+△ h=6 × 7.8um=
46.8um, energy-wavelength image through resonator are shown in Figure 19.
0.001um=1nm=1000pm ＞ 1pm are described as by distance between adjacent peaks centre wavelength at this time,
Note：Theoretically Resonant Intake System can still continue to expand, but be difficult to ensure that two planes since resonator is long in practice
Mirror reflection surface is parallel, therefore system goes bail for and keeps value（△h=5 h’）.
Change of cavity length value is the h ' of △ h=5, therefore 13 stretch value of driver should be equal to 5 h ', driver synchronous drive second
Right-angle reflecting prism group 8, which moves opposite first right-angle reflecting prism group 7, the change in displacement of 5 h ', therefore range L is：
The total quantity of 2N-standard right-angle prism VI 702 and standard right-angle prism VII 801, h '-resonator minimum cavity is long,
It is obtained by range formula, when the quantity increase of N, systematic survey range L equal proportion increases, and minimum cavity long value h ' is bigger
Then measurement range L is bigger.
Claims (9)
1. a kind of displacement measurement method based on the interference of light, it is characterised in that：This method is that wavelength is selected using optical resonator
The characteristic that selecting property penetrates, long by obtaining chamber to the analysis of transmission peak wavelength, when change of cavity length, transmission peak wavelength generates change therewith
Change, photoelectric receiving arrangement, which detects and analyzes transmission peak wavelength, obtains change of cavity length amount, and the long variable quantity of transit chamber calculates tested level
It moves；This method is measured using the displacement measuring device based on the interference of light, the displacement measurement dress based on the interference of light
It puts including laser beam emitting device（1）, the first Amici prism（2）, the first speculum（4）, the second speculum（5）, the first right angle it is anti-
Penetrate prism group（7）, the second right-angle reflecting prism group（8）, the 4th Amici prism（10）, the first photoelectric receiving arrangement（6）, the second light
Electric reception device（12）, driver（13）And second Amici prism（3）, third Amici prism（9）；It is described based on the interference of light
Displacement measurement method include the following steps：
1. when measured piece does not move, the 4th Amici prism group（10）It is in contact with measured piece, the displacement measurement based on the interference of light
When device is not opened, the second speculum（5）Relative to the first speculum（4）The distance between, the second right-angle reflecting prism group（8）
Relative to the first corner reflection prism group（7）The distance between be h；After displacement measuring device based on the interference of light is opened, driving
Device（13）Start along optical path direction high frequency telescopic variation, make the second speculum（5）With the second right-angle reflecting prism group（8）Relative to
First speculum（4）With the first right-angle reflecting prism group（7）The distance between generate the variation of △ h, i.e. distance becomes h+ △ h；
When light is by laser beam emitting device（1）Transmitting is by the first Amici prism（2）After separating, it is divided into measuring beam a and scanning light
Beam b, measuring beam a, scanning light beam b finally become the light path phase that light beam g and light beam j are passed through respectively by a series of propagation
At that time, laser beam emitting device（1）All spectrum lambdas sent out0~λnIn the second photoelectric receiving arrangement（12）It is shown as light beam g and light
Beam j generates interference light energy most intensity values, i.e. the light energy of all wavelengths is all most strong, records the first photoelectric receiving arrangement at this time
（6）The first speculum provided（4）With the second speculum（5）The distance between h 〞；
2. when the 4th Amici prism group（10）During with testee along scanning light beam b directions of propagation moving displacement x, driver（13）
Continuous high frequency stretches, and total energy is so that by laser beam emitting device（1）The laser sent out is through the first Amici prism（2）Measurement after separating
Light beam a and scanning light beam b finally reaches the second photoelectric receiving arrangement（12）Equivalent optical path, make the second photoelectric receiving arrangement（12）
It is shown as light beam g and light beam j and generates interference light energy most intensity values, record the first photoelectric receiving arrangement at this time（6）First provided
Penetrate mirror（4）With the second speculum（5）The distance between h 〞+△ h 〞, at this time 2x=2 ×（2N+1）× △ h 〞, N are anti-for the first right angle
Penetrate the number of respective standard right-angle prism in prism group and the second right-angle reflecting prism group, by change of cavity length △ h 〞 calculate by
Survey object displacement x；The λ0~λnFor 0.1~2um.
2. the displacement measurement method according to claim 1 based on the interference of light, it is characterised in that：The measuring beam a
A series of detailed process for finally becoming light beam g and light beam j respectively by propagation with scanning light beam b is as follows：
Measuring beam a passes through the second Amici prism（3）After be divided into light beam c and light beam d, light beam c enters by the first speculum（4）With
Second speculum（5）The optical resonator of composition, light beam c are transmitted to the first photoelectric receiving arrangement after resonance multiple reflections
（6）, obtain the first speculum（4）With the second speculum（5）The distance between；Light beam d enters the first right-angle reflecting prism group（7）
With the second right-angle reflecting prism group（8）, the second Amici prism is returned to after multiple reflections（3）After become light beam f, light beam f warps
Cross third Amici prism（9）After become light beam g；Scanning light beam b passes through the 4th Amici prism group（10）After become light beam e, light beam e
By corner cube mirror（11）After enter back into third Amici prism（9）Become light beam j, the interference that light beam g and light beam j is generated at this time
The wavelength and center light energy of collection of illustrative plates are by the second photoelectric receiving arrangement（12）It is received and is handled, and analyze and draw light energy
Variation diagram.
3. the displacement measurement method according to claim 1 based on the interference of light, it is characterised in that：The Laser emission dress
It puts（1）First Amici prism is set on the laser optical path launched（2）, the first Amici prism（2）Light splitting optical path include light splitting
Light path A, light splitting optical path B；The second Amici prism is set on the light splitting optical path A（3）, the second Amici prism（3）Light splitting light
Road includes light splitting optical path C, light splitting optical path D；The light splitting optical path C is equipped with optical resonator, and the optical resonator is by first
Speculum（4）, the second speculum（5）It forms；First photoelectric receiving arrangement is provided with after optical resonator（6）；The
Two Amici prisms（3）Light splitting optical path D on be provided with the first right-angle reflecting prism group（7）, the second right-angle reflecting prism
Group（8）, the first right-angle reflecting prism group（7）, the second right-angle reflecting prism group（8）One end and the first speculum（4）, it is second anti-
Penetrate mirror（5）It is fixedly connected, the first right-angle reflecting prism group（7）, the second right-angle reflecting prism group（8）The other end and driver
（13）Connection, the first right-angle reflecting prism group（7）, the second right-angle reflecting prism group（8）Reflected light retroeflection to second light splitting rib
Mirror（3）Form light splitting optical path F, the second Amici prism（3）Light splitting optical path F be equipped with the third Amici prism（9）；It is described
The first Amici prism（2）Light splitting optical path B on set the 4th Amici prism（10）, the 4th Amici prism（10）Light splitting optical path
Corner cube mirror is provided on E（11）, corner cube mirror（11）Reflected light enter third Amici prism（9）, third light splitting rib
Mirror（9）Light splitting optical path G be equipped with second photoelectric receiving arrangement（12）.
4. the displacement measurement method according to claim 3 based on the interference of light, it is characterised in that：The first light splitting rib
Mirror（2）Including right-angle prism I（201）With right-angle prism II（202）, right-angle prism（201）And right-angle prism（202）Inclined-plane glue
It is combined；Second Amici prism（3）Including right-angle prism III（301）With right-angle prism IV（302）, right-angle prism III
（301）With right-angle prism IV（302）Inclined-plane be bonded together, and right-angle prism III（301）With right-angle prism IV（302）Relatively
Right-angle surface it is parallel；The right-angle prism III（301）Light absorption and diffusing reflection layer I are equipped at its right-angle surface（304）, right angle
Prism IV（302）Light absorption and diffusing reflection layer II are equipped at right-angle surface（303）.
5. the displacement measurement method according to claim 3 based on the interference of light, it is characterised in that：First speculum
（4）Close to the second speculum（5）Side plating, which is carried out, reflectance coating；Second speculum（5）Close to the first speculum（4）
Side plating, which is carried out, reflectance coating.
6. the displacement measurement method according to claim 5 based on the interference of light, it is characterised in that：The Laser emission dress
It puts（1）Spectral width be λ0~λn；First speculum（4）In spectral width λ0~λnLight beam in spectral width λi
~λjWavelength reflection be 90~99%；Second speculum（5）In spectral width λ0~λnLight beam in spectral width λi~λj
Wavelength reflection be 90~99%；The λ0~λnFor 0.1~2um, λi~λjFor 0.2~0.4um.
7. the displacement measurement method according to claim 6 based on the interference of light, it is characterised in that：First photoelectricity connects
Receiving apparatus（6）For to wavelength Xi~λjThe energy of light beam is analyzed, and calculates the first speculum（4）With the second speculum
（5）Distance；Second photoelectric receiving arrangement, for different wave length λ0~λnBeam energy analyzed, and analyze
Go out the most strong wavelength of light energy；The λ0~λnFor 0.1~2um, λi~λjFor 0.2~0.4um.
8. the displacement measurement method according to claim 3 based on the interference of light, it is characterised in that：First right angle is anti-
Penetrate prism group（7）Generate the right-angle prism V of reflection to light using inclined-plane including one（701）, it is N number of to utilize two right-angle surfaces to light
Generate the standard right-angle prism VI of reflection（702）；The second right-angle reflecting prism group（8）Right-angle surface pair is utilized including one
Light generates the small right-angle prism of reflection（802）, it is N number of using two right-angle surfaces to light generate reflection standard right-angle prism VII（801）；
The small right-angle prism（802）Right-angle surface area be standard right-angle prism VII（801）0.3~0.8 times of right-angle surface area,
N≥1；The third Amici prism（9）Including right-angle prism VIII（901）With right-angle prism Ⅸ（902）, right-angle prism VIII
（901）With right-angle prism Ⅸ（902）Inclined-plane be bonded together, and right-angle surface relative to each other is parallel；The right-angle prism
Ⅸ（902）Light absorption and diffusing reflection layer III are equipped at right-angle surface（903）；4th Amici prism（10）It is same by four pieces
Right-angle prism Ⅹ（1001）The square of right-angle surface gluing composition, wherein right-angle prism Ⅹ each other（1001）It is inhaled equipped with light on inclined-plane
Receipts and diffusing reflection layer IV（1002）, the 4th Amici prism（10）It is moved together with tested linear moving object.
9. the displacement measurement method based on the interference of light according to claim 3 to 8 any claim, it is characterised in that：
The driver includes actuator（1301）, bonding mobile block（1302）, compensation block（1303）, fixed block（1304）, it is described
Mobile block（1302）And fixed block（1304）It is bonded in actuator respectively（1301）Both ends, fixed block（1304）With compensation block
（1303）Bonding, compensation block（1303）With actuator（1301）Between there are gap, compensation blocks（1303）With mobile block（1302）
Respectively with the first right-angle reflecting prism group（7）, the second right-angle reflecting prism group（8）It is fixedly connected.
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