CN105674888B - Displacement measuring device based on the interference of light - Google Patents
Displacement measuring device based on the interference of light Download PDFInfo
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- CN105674888B CN105674888B CN201610052806.4A CN201610052806A CN105674888B CN 105674888 B CN105674888 B CN 105674888B CN 201610052806 A CN201610052806 A CN 201610052806A CN 105674888 B CN105674888 B CN 105674888B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 42
- 230000003287 optical effect Effects 0.000 claims abstract description 84
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- 238000004458 analytical method Methods 0.000 description 6
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- 238000002347 injection Methods 0.000 description 2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract
A kind of displacement measuring device based on the interference of light, it is related to a kind of displacement measuring device, first Amici prism is set in the light path of laser beam emitting device, second Amici prism is set on the light splitting optical path A of the first Amici prism, and the light splitting optical path C of the second Amici prism is equipped with optical resonator, the first photoelectric receiving arrangement；First and second right-angle reflecting prism group is set on light splitting optical path D, one end of the reflecting prism group is connect with first and second speculum, the other end is connect with driver, is reflected light back into the second Amici prism and is formed light splitting optical path F, light splitting optical path F is equipped with third Amici prism；4th Amici prism on light splitting optical path B is set, corner cube mirror is set on the light splitting optical path E of the 4th Amici prism, reflected light enters third Amici prism, the second photoelectric receiving arrangement is set on the light splitting optical path G of third Amici prism.The high certainty of measurement of the present invention, range is big, can be crossed over from nm grades to m grades, but also be greatly improved the response time of system.
Description
Technical field
The present invention relates to a kind of displacement measuring device, particularly a kind of displacement measuring device based on the interference of light.
Background technology
During the analyses such as Precision Machinery Design and material development, displacement, vibration amplitude and the vibration frequency of parts,
Deformation, material the data such as coefficient of thermal expansion acquisition as analysis key.And existing displacement measurement system, typically
Then range is short for precision height, and then precision is low greatly for range, its good precision of Waveform Matching is high but operation time long low-response, response are fast then smart
It spends low, it is impossible to meet the needs of analysis of modernization.
Invention content
The technical problem to be solved by the present invention is to：It provides that a kind of precision is high, range is big and response is fast based on the interference of light
Displacement measuring device.
Solving the technical solution of above-mentioned technical problem is：A kind of displacement measuring device based on the interference of light is sent out including laser
Injection device, the first Amici prism, the second Amici prism, third Amici prism, the 4th Amici prism, the first speculum, second are instead
Penetrate mirror, the first right-angle reflecting prism group, the second right-angle reflecting prism group, the first photoelectric receiving arrangement, the second photoelectric receiving arrangement,
Driver；Wherein：
First Amici prism, point of the first Amici prism are set on the laser optical path that the laser beam emitting device is launched
Light light path includes light splitting optical path A, light splitting optical path B；Second Amici prism, the second Amici prism are set on the light splitting optical path A
Light splitting optical path include light splitting optical path C, light splitting optical path D；The light splitting optical path C is equipped with optical resonator, the optical resonance
Chamber is made of the first speculum, the second speculum；First photoelectric receiving arrangement is provided with after optical resonator；Second
The first right-angle reflecting prism group, the second right-angle reflecting prism group are provided on the light splitting optical path D of Amici prism, first is straight
One end of corner reflection prism group is fixedly connected with the first speculum, and one end and the second speculum of the second right-angle reflecting prism group are consolidated
Fixed connection, the first right-angle reflecting prism group, the second right-angle reflecting prism group the other end connect with driver, the first right angle reflects
The reflected light retroeflection of prism group, the second right-angle reflecting prism group forms light splitting optical path F, the second Amici prism to the second Amici prism
Light splitting optical path F be equipped with the third Amici prism；The 4th point is set on the light splitting optical path B of first Amici prism
Light prism, corner cube mirror is provided on the light splitting optical path E of the 4th Amici prism, and the reflected light of corner cube mirror enters third point
Light prism, the light splitting optical path G of third Amici prism are equipped with second photoelectric receiving arrangement.
The present invention further technical solution be：First Amici prism includes right-angle prism I and right-angle prism II,
The inclined-plane of right-angle prism I and right-angle prism II is bonded together；Second Amici prism includes right-angle prism III and right angle
The inclined-plane of prism IV, right-angle prism III and right-angle prism IV is bonded together, and right-angle prism III and right-angle prism IV are opposite
Right-angle surface is parallel.
The present invention further technical solution be：The right-angle prism III is equipped with light absorption at its right-angle surface and overflows anti-
Layer I is penetrated, right-angle prism IV is equipped with light absorption and diffusing reflection layer II at right-angle surface.
The present invention further technical solution be：First speculum has instead close to the second speculum side plating shoe
Penetrate film；Second speculum is having reflectance coating close to the first speculum side plating shoe.
The present invention further technical solution be：The spectral width of the laser beam emitting device is λ0~λn；Described
First speculum is in spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection be 90~99%；Described
Second speculum is in spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection be 90~99%；Described
λ0~λnFor 0.1~2um, λi~λjFor 0.2~0.4um.
The present invention further technical solution be：First photoelectric receiving arrangement is used for wavelength Xi~λjLight beam
Energy analyzed, and calculate the distance of the first speculum and the second speculum；Second photoelectric receiving arrangement is used
In to different wave length λ0~λnBeam energy analyzed, and analyze the most strong wavelength of light energy；The λ0~λnFor
0.1~2um, λi~λjFor 0.2~0.4um.
The present invention further technical solution be：The first right-angle reflecting prism group includes one using inclined-plane to light
Generate the right-angle prism V of reflection, multiple standard right-angle prisms VI for generating reflection to light using two right-angle surfaces；Described second
Right-angle reflecting prism group include one using right-angle surface to light generate reflection small right-angle prism, it is multiple using two right-angle surfaces to light
Generate the standard right-angle prism VII of reflection.
The present invention further technical solution be：The right-angle surface area of the small right-angle prism is standard right-angle prism
0.3~0.8 times of VII right-angle surface area.
The present invention further technical solution be：The third Amici prism includes right-angle prism VIII and right-angle prism
Ⅸ, the inclined-plane of right-angle prism VIII and right-angle prism Ⅸ is bonded together, and right-angle surface relative to each other is parallel；The right-angled edge
Light absorption and diffusing reflection layer III are equipped at Ⅸ right-angle surface of mirror；4th Amici prism by four pieces of same right-angle prisms Ⅹ that
This right-angle surface gluing composition square, wherein Ⅹ inclined-plane of right-angle prism be equipped with light absorption and diffusing reflection layer IV, the 4th point
Light prism is moved together with tested linear moving object.
The present invention further technical solution be：The driver include actuator, bonding mobile block, compensation block,
Fixed block, the mobile block and fixed block are bonded in the both ends of actuator respectively, and fixed block is Nian Jie with compensation block, compensation block with
There are gap between actuator, compensation block and mobile block respectively with the first right-angle reflecting prism group, the second right-angle reflecting prism group
It is fixedly connected.
Since using the above structure, the displacement measuring device based on the interference of light of the present invention has compared with prior art
Following advantageous effect：
1. it can realize the accurate measurement to displacement：
Since the present invention includes laser beam emitting device, the first Amici prism, the second Amici prism, third Amici prism, the
Four Amici prisms, the first speculum, the second speculum, the first right-angle reflecting prism group, the second right-angle reflecting prism group, the first light
Electric reception device, the second photoelectric receiving arrangement, driver.When measured piece does not move, Amici prism group is in contact with measured piece,
After system is opened, driver starts, along optical path direction high frequency telescopic variation, to make the first speculum and the first right-angle reflecting prism group
Variation is generated relative to the distance between the second speculum and the second right-angle reflecting prism group.The light that laser beam emitting device is launched
After beam is separated by the first Amici prism, it is divided into measuring beam a and scanning light beam b, measuring beam a and scanning light beam b pass through a system
Biographies are broadcast finally becomes light beam g and light beam j respectively, when light beam g and light beam j finally reaches the light path phase of the second photoelectric receiving arrangement
At that time, the second photoelectric receiving arrangement is made to be shown as light beam g and light beam j and generates interference light energy most intensity values, i.e. laser beam emitting device
All spectrum lambdas sent out0~λnLight energy be all most strong, record at this time the first speculum that the first photoelectric receiving arrangement provides,
The distance of second speculum；When the 4th Amici prism with testee along the scanning light beam b directions of propagation displacement distance x when, driving
Device continuous high frequency stretches, and always has a moment can be so that two beams of the laser that sends out of laser beam emitting device after the first Amici prism separates
Light finally reaches the equivalent optical path of the second photoelectric receiving arrangement, and the second photoelectric receiving arrangement is made to be shown as light beam g and light beam j productions
Raw interference light energy most intensity values, record the distance of the first speculum, the second speculum that the first photoelectric receiving arrangement provides at this time,
Measured object displacement can be calculated by change of cavity length.Therefore, the present invention generates displacement from the first beginning and end and starts to work, until tested
Part straight-line displacement stops, and measures measured piece displacement, so as to realize the accurate measurement of contraposition shifting, can also measure shaking for vibration
Rate variation in width and frequency, displacement process.
2. precision is high：
Present invention utilization detaches light wave amplitude approach and is uniformly divided into two beams to light beam, when two light beams are reaching interference item
During part, and during the equivalent optical path of process, interference energy can reach extreme value, using this principle, work as light beam（Measuring beam a）Light
Journey（It sends out to receiver and receives from light source）During with the relatively slow velocity variations of measured piece, another light beam（Scanning light beam b）
Light path faster alternately change（Frequency is constant）, the equivalent optical path that always there is a moment to make measuring beam a and scanning light beam b.
In the present invention, the light path of measuring beam a is：Light beam is sent out from laser beam emitting device after the first Amici prism,
It is divided into measuring beam a to start through the second Amici prism, the first right-angle reflecting prism group, the second right-angle reflecting prism group, third point
Light prism etc., finally to the light path that the second photoelectric receiving arrangement is passed through.
The light path of scanning light beam b is：Light beam is sent out from laser beam emitting device after the first Amici prism, is divided into scanning light
Beam b starts, through the 4th Amici prism group, corner cube mirror, third Amici prism, finally to the second photoelectric receiving arrangement to be passed through
Light path.
When measured piece is in position O1, the light path of measuring beam a is h1, the light path of scanning light beam b is in h1±△h1Variation,
When measuring beam and scanning light beam light path are all h, two-beam generation interference energy is most strong, is detected by the second photoelectric receiving arrangement
And it analyzes, the light path of writing scan light beam, the position of record driving scanning light beam component.
When measured piece is in position O2, measuring beam light path becomes h1+△h1, scanning light beam light path continuation change repeatedly, when
When the light path of scanning light beam and the light path of measuring beam equal again, two-beam generates interference energy and reaches most strong again, is connect
Device reception and the again light path of writing scan light beam are received, can be obtained by the front and rear light beam of writing scan twice retardation values tested
The change in displacement of part.If utilize wide spectrum（λ0~λn）, then each wavelength energy is all the light for two-beam when interfering maximum value
Journey is equal.Therefore, wavelength of the invention is shorter（λ0It is smaller）, spectrum is wider（λ0~λnRange is bigger）, then measurement accuracy get over
It is high.
In addition, the present invention is insensitive to light polarization, reception optical band wavelength is most short, and precision is more stable, so as to further
Improve measurement accuracy.
3. range is big：
The present invention is to utilize optical resonator（Fabry Perot chamber）To the characteristic that wavelength selectivity penetrates, by transmission
It is long can to obtain chamber for the analysis of optical wavelength.When change of cavity length, transmission peak wavelength generates variation therewith, and receiver is detected and analyzed
Transmission peak wavelength can obtain change of cavity length amount.
Spectral region can be received in resonator（λi~λj）Narrower, wavelength is longer（λjIt is bigger）, the long h ' of minimum cavity is longer,
The alterable range △ h of chamber length（△h≤5 h’）It is bigger, so as to which measurement range is bigger, in addition increase by the first right-angle reflecting prism group
It can increase measurement range with the standard right-angle prism quantity in the second right-angle reflecting prism group.Therefore, measurement model of the invention
Enclosing can be according to requiring to formulate, and measurement range L is：0~10 (2N+1) h ', N is the first right-angle reflecting prism group and second in formula
The number of respective standard right-angle prism, measurement accuracy δ in right-angle reflecting prism group：0.1*λ0, range is big, big across magnitude,
It can be from nm grades across to m grades.
4. response is fast：
The present invention makes its compact-sized using light path method is folded, not by only needing analysing energy to light wave spectral pattern analysis
Maximum wavelength value, therefore the error occurred during Software match waveform is avoided, while reduce operand, it is greatly improved system
Response time.
In the following, the technical characteristic of the displacement measuring device based on the interference of light of the present invention is made in conjunction with the accompanying drawings and embodiments into
The explanation of one step.
Description of the drawings
Fig. 1：The structure principle chart of the displacement measuring device based on the interference of light of the present invention,
Fig. 2：The structure diagram of first Amici prism,
Fig. 3：The structure diagram of second Amici prism,
Fig. 4：The structure diagram of first speculum,
Fig. 5：The structure diagram of second speculum,
Fig. 6：The structure diagram of first right-angle reflecting prism group,
Fig. 7：The structure diagram of second right-angle reflecting prism group,
Fig. 8：The structure diagram of third Amici prism,
Fig. 9：The structure diagram of 4th Amici prism,
Figure 10：The structure diagram of driver,
Figure 11：Energy-wavelength graph of initial measurement,
Figure 12：Loss-wavelength graph of initial measurement,
Figure 13：Measured piece generates energy-wavelength graph of displacement,
Figure 14：Measured piece generates loss-wavelength graph of displacement,
Figure 15：Resonator transmitted light energy-wavelength graph,
Figure 16：Chamber length increases the front and rear comparison Local map of 1um transmitted lights wavelength,
Figure 17：Chamber length increases 1um transmitted light wavelength previous peaks and captures datagram,
Figure 18：Chamber length increases 1um transmitted light wavelength postpeaks value and captures datagram,
Figure 19：Transmitted light energy-Wavelength distribution figure during resonator a length of 6 h '=46.8um.
In above-mentioned attached drawing, each description of symbols is as follows：
1- laser beam emitting devices,
The first Amici prisms of 2-, 201- right-angle prisms I, 202- right-angle prisms II,
The second Amici prisms of 3-, 301- right-angle prisms III, 302- right-angle prisms IV,
303- light absorptions and diffusing reflection layer II, 304- light absorptions and diffusing reflection layer I,
The first speculums of 4-, the second speculums of 5-, the first photoelectric receiving arrangements of 6-,
7- the first right-angle reflecting prism groups, 701- right-angle prisms V, 702- right-angle prisms VI,
8- the second right-angle reflecting prism groups, 801- right-angle prisms VII, the small right-angle prisms of 802-,
9- third Amici prisms, 901- right-angle prisms VIII, 902- right-angle prisms Ⅸ, 903- light absorptions and diffusing reflection layer III,
The 4th Amici prisms of 10-, 1001- right-angle prisms Ⅹ, 1002- light absorptions and diffusing reflection layer IV,
11- corner cube mirrors, the second photoelectric receiving arrangements of 12-,
13- drivers, 1301- actuators, 1302- bonding mobile blocks, 1303- compensation blocks, 1304- fixed blocks.
Specific embodiment
Embodiment one：
A kind of displacement measuring device based on the interference of light is divided including laser beam emitting device 1, the first Amici prism 2, second
Prism 3, third Amici prism 9, the 4th Amici prism 10, the first speculum 4, the second speculum 5, the first right-angle reflecting prism group
7th, the second right-angle reflecting prism group 8, the first photoelectric receiving arrangement 6, the second photoelectric receiving arrangement 12, driver 13；
First Amici prism 2, the first Amici prism 2 are set on the laser optical path that the laser beam emitting device 1 is launched
Light splitting optical path include light splitting optical path A, light splitting optical path B；Second Amici prism 3, the second light splitting are set on the light splitting optical path A
The light splitting optical path of prism 3 includes light splitting optical path C, light splitting optical path D；The light splitting optical path C is equipped with optical resonator, the optics
Resonator is made of the first speculum 4, the second speculum 5；The first opto-electronic receiver dress is provided with after optical resonator
Put 6；The first right-angle reflecting prism group 7, the second right angle reflection rib are provided on the light splitting optical path D of second Amici prism 3
Microscope group 8, one end of the first right-angle reflecting prism group 7 are fixedly connected with the first speculum 4, and the one of the second right-angle reflecting prism group 8
End is fixedly connected with the second speculum 5, the first right-angle reflecting prism group 7, the other end of the second right-angle reflecting prism group 8 and driving
Device 13 connects, and the reflected light retroeflection of the first right-angle reflecting prism group 7, the second right-angle reflecting prism group 8 is to 3 shape of the second Amici prism
Into light splitting optical path F, the light splitting optical path F of the second Amici prism 3 is equipped with the third Amici prism 9；First light splitting
4th Amici prism 10 is set on the light splitting optical path B of prism 2, and it is anti-to be provided with right angle on the light splitting optical path E of the 4th Amici prism 10
Mirror 11 is penetrated, the reflected light of corner cube mirror 11 enters third Amici prism 9, and the light splitting optical path G of third Amici prism 9 is equipped with institute
The second photoelectric receiving arrangement 12 stated.
The laser beam emitting device 1 can send out the wide spectrum laser of certain light energy, spectral width λ0~λn,
λ0=0.1um, λn=2um。
First Amici prism 2 includes right-angle prism I 201 and right-angle prism II 202, right-angle prism I 201 and right angle
The inclined-plane of prism II 202 is bonded together, and ensures that right-angle surface relative to each other is parallel.First Amici prism 2 sends out laser
The wide spectrum laser that injection device 1 is sent out is divided into two light beams --- measuring beam a and scanning light beam b, and the energy of two light beams
It is equal.
Second Amici prism 3 includes right-angle prism III 301 and right-angle prism IV 302, right-angle prism III 301 and straight
The inclined-plane of angle prism IV 302 is bonded together, and right-angle prism III 301 it is opposite with right-angle prism IV 302 right-angle surface it is parallel.It should
Second Amici prism 3 is divided into measuring beam a light beam c and light beam d, and the energy of light beam c and light beam d are equal.
The right-angle prism III 301 is equipped with light absorption and diffusing reflection layer I 304 at its right-angle surface, light absorption and unrestrained anti-
Layer I 304 is penetrated to absorb light beam c ' under the premise of light beam f is not blocked and diffusing reflection（Light beam c ' is by the first speculum 4 and
The optical resonator that two-mirror 5 forms generates, what is occurred after the separation of the second Amici prism 3）, right-angle prism IV 302
Light absorption and diffusing reflection layer II 303 are posted at right-angle surface, light absorption and diffusing reflection layer II 303 are not blocking measuring beam a's
Under the premise of light beam f ' is absorbed and diffusing reflection（Light beam f ' is detached by light beam d after multiple reflections by the second Amici prism 3
Occur afterwards）.
First speculum 4 is having reflectance coating close to 5 side of the second speculum plating shoe；First speculum 4 is in light
Spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection be 90~99%.
Second speculum 5 is having reflectance coating close to 4 side of the first speculum plating shoe, and second speculum 5 is in light
Spectral width λ0~λnLight beam in spectral width λi~λjWavelength reflection for 90~99%, the λi~λjFor 0.2~
0.4um。
First photoelectric receiving arrangement 6 is used for wavelength Xi~λjThe energy of light beam is analyzed, and calculates first
The distance of 4 and second speculum 5 of speculum, to wavelength Xi~λjWith outer light beam without analyzing and calculating；
The first right-angle reflecting prism group 7 include one using inclined-plane to light generate reflection right-angle prism V 701,
N number of standard right-angle prism VI 702 for generating reflection to light using two right-angle surfaces, the first right-angle reflecting prism group 7 are anti-with right angle
It penetrates prism group 8 and multiple reflections is carried out to light beam d simultaneously, and light beam d is reflected back the second Amici prism 3 in different positions.
The second right-angle reflecting prism group 8 includes a small right-angle prism for generating reflection to light using right-angle surface
802nd, N number of standard right-angle prism VII 801 for generating reflection to light using two right-angle surfaces.The right angle of the small right-angle prism 802
Face area is 0.5 times of VII 801 right-angle surface area of standard right-angle prism.The second right-angle reflecting prism group 8 reflects rib with right angle
Microscope group 7 carries out multiple reflections to light beam d simultaneously, and light beam d is reflected back the second Amici prism 3 in different positions；Above-mentioned N
≥1。
The third Amici prism 9 includes right-angle prism VIII 901 and right-angle prism Ⅸ 902, right-angle prism VIII 901 and straight
The inclined-plane of angle prism Ⅸ 902 is bonded together, and right-angle surface relative to each other is parallel；Ⅸ 902 right-angle surface of right-angle prism
Post light absorption and diffusing reflection layer III 903 in place.Third Amici prism 9 into the light beam f in it and light beam e ' to being divided into two weights
The light beam g and light beam j stacked, and the energy of light beam g and light beam j are equal；III 903 couples of light beam e ' of light absorption and diffusing reflection layer
It is absorbed and diffusing reflection（Light beam e ' is detached by light beam e after the reflection of 11 right-angle surface of corner cube mirror into third Amici prism 9
Occur afterwards）；
By four pieces of same right-angle prisms Ⅹ 1001, right-angle surface gluing forms just 4th Amici prism 10 each other
Cube, wherein Ⅹ 1001 inclined-plane of right-angle prism are equipped with light absorption and diffusing reflection layer IV 1002, absorb scanning light beam b respectively and pass through
The transmission and the reflected beams that interface inside Amici prism group 10 generates, the 4th Amici prism 10 is with tested linear movement object
Body uniform movement.
The corner cube mirror 11, can be totally reflected light beam at inclined-plane.
Second photoelectric receiving arrangement 12, for different wave length λ0~λnBeam energy analyzed, and analyze
Go out the most strong wavelength of light energy.
The driver 13 includes actuator 1301, bonding mobile block 1302, compensation block 1303, fixed block 1304, institute
The mobile block 1302 and fixed block 1304 stated are bonded in the both ends of actuator 1301 respectively, and fixed block 1304 is viscous with compensation block 1303
It connects, there are gap between compensation block 1303 and actuator 1301, compensation block 1303 is anti-with the first right angle respectively with mobile block 1302
Penetrate prism group 7, the second right-angle reflecting prism group 8 is fixedly connected.
This driver 13 is extending when being powered, and when electric discharge can return to original length, and when contraction can not make the first speculum 4
Contact or collide with the second speculum 5, can not make the first right-angle reflecting prism group 7 and the second right-angle reflecting prism group 8 contact or
Collision, the left end of driver 13 fixes, and when 1301 high frequency of actuator is flexible, rocker piece 1302 drives the second speculum 5 and the
Two right-angle reflecting prism groups, 8 continuous high frequency along light beam c direction of propagation side-to-side movements, the stroke △ h of actuator 1301 do not surpass
Cross the long h ' of minimum cavity 5 times, i.e. △ h≤5h ', the distance between the first speculum 4 and the second speculum 5 are reflected with the first right angle
The distance between 7 and second right-angle reflecting prism group 8 of prism group is equal, referred to as the long h of chamber, and h has to be larger than the long h ' of minimum cavity.And the
One speculum 4 is not moved with the first right-angle reflecting prism group 7 for fixed group, the second speculum 5 and the second right-angle reflecting prism group 8
It is moved left and right for synchronizing moving group along light beam c directions.
The long h ' of minimum cavity：The broad-spectrum beam difference wave emitted to ensure the first electric reception device 6 laser beam emitting device 1
It is long（λ0~λn）In the range of, when scanning, can measure at least two wavelength light intensity as maximum value, pass through the length of this 2 wavelength and it
Between spectral line apart from inverse to go out chamber at this time long, therefore the distance h only between the first speculum 4 and the second speculum 5 is more than
It can be measured during the long h ' of minimum cavity.。
The long h of optical resonator chamber to ensure that measurement optical resonator chamber is long, and ensures the first photoelectric receiving arrangement 6 to light
The scanning recognition of beam, the h ' of the long h of chamber ranging from h '≤h≤1.5.
The present invention is to utilize optical resonator（Fabry Perot chamber）To the characteristic that wavelength selectivity penetrates, by transmission
It is long can to obtain chamber for the analysis of optical wavelength.When change of cavity length, transmission peak wavelength generates variation therewith, and receiver is detected and analyzed
Transmission peak wavelength can obtain change of cavity length amount.
Spectral region can be received in resonator（λi~λj）Narrower, wavelength is longer（λiIt is bigger）, the long h ' of minimum cavity is longer,
The alterable range △ h of chamber length（△h≤5 h’）It is bigger, so as to which measurement range is bigger, in addition increase by the first right-angle reflecting prism group 7
It can increase measurement range with the standard right-angle prism quantity in the second right-angle reflecting prism group 8（But it can excessively influence to measure essence
Degree, i.e. resonator displacement accuracy and the product of standard right-angle prism quantity are more than 0.1 times of minimum wavelength λ0）.Measurement range L is：0
~10 (2N+1) h ', N is respective standard right-angle prism in the first right-angle reflecting prism group and the second right-angle reflecting prism group in formula
Number, measurement accuracy δ：0.1*λ0 , range is big, big across magnitude, can be from nm grades across to m grades.Its principle is as follows：
Assuming that light source uses ultraviolet band（100nm~400nm, λ0=100nm, λn=400nm）Spectral region, measured piece
Relatively slow speed generates straight line position time shift and measures, therefore have light energy functional expression:
--- the energy relative value of interference light, normalization.（Measuring beam a and scanning light beam b two-beams are folded
Attainable most intense light energy is maximum value after adding interference, and most dim light energy is 0）
N- medium refraction indexs, vacuum or gas intermediate value are about 1；
h1Optical path difference between scanning light beam A and measuring beam B, um；
△h1The equation of light that measured object displacement generates, um；
λ-wavelength, um；
When the optical path difference between scanning light beam a and measuring beam b is equal, i.e. h1=0, energy-wavelength image is Figure 11
It is shown.It can be seen from fig. 11 that when measured piece does not generate displacement, when the optical path difference phase between scanning light beam a and measuring beam b
Whens waiting, the light energy between wavelength 100nm~400nm is all the maximum value of interference energy.
If tested after being zeroed using light power meter, its pad value is seen after light energy normalization（Loss value）
--- the energy loss value of interference light, DB；
Loss-wavelength image is shown in Figure 12.
Measuring beam b light paths is made to generate small light path variable △ h when measured piece generates displacement x1During=0.01um=10nm
（By systemic presupposition △ h1=0.1λ0）, at this time when scanning light beam a is again with initial light path come when interfering, energy-wavelength image is figure
Shown in 13.It can be observed from fig. 13 that shortwave strong point, especially in wavelength 0.1um（=100nm）Place, interference light energy is not up to most
Big value, only 90% or so.
If tested using light power meter, loss-wavelength image is obtained as shown in Figure 14.
Common power meter precision is apparent that the light path of measuring beam a and scanning light beam b not in -0.1DB
Together, therefore displacement accuracy is measured higher than 0.1 λ0.And λ0Smaller measurement accuracy is higher.
As measuring beam a and the equivalent optical path of scanning light beam b, during such as Figure 11 and Figure 12 situations, the second photoelectric receiving arrangement
12 send out signal, record chamber length and the time of optical resonator by the first photoelectric receiving arrangement 6 at this time.When object moves, make
Measuring beam b light paths generate minor change, and the driver 13 comparatively fast moved back and forth make again measuring beam a light path be equal to sweep
The light path of light beam b is retouched, chamber length and the time of optical resonator at this time is re-recorded, by cross-reference, can obtain the displacement of object
And situation about changing over time.
As light beam c（If wavelength is 100nm~400nm）Into the optics being made of the first speculum 4 and the second speculum 5
In resonator, and optical resonator selectively penetrates more narrow wave-length coverage（350~400nm）.
Light wave measurement precision 0.04pm now, system take measurement accuracy 1pm, i.e., maximum pumping energy wavelengths, which generate, is more than 1pm
The first photoelectric receiving arrangement 6 can be measured and be analyzed during variation.
Optical resonator transmitted light energy functional expression：
- resonator transmitted light energy；
H-resonator long value, um；
△ h-long the changing value of resonator, um；
L-optical wavelength, um；
R-resonator reflectivity；
N-medium refraction index, vacuum or gas intermediate value are about 1.
Due to having the requirement of the long h ' of minimum cavity, the wave-length coverage of selective transmission light wave（λi~λj）After can obtain：
Assuming that it is 380nm~400nm that resonator, which is selected through wavelength,（λi=380nm, λj=400）, then h '=7.8um, if adopting
It is long with a length of resonator of minimum cavity（h’=h）, transmitted light energy-wavelength image is shown in Figure 15.
Note：If chamber is grown in the h ' of h '≤h≤1.5, adjacent transmissive optical wavelength can be passed through（λ1, λ2）Obtain chamber long value.
When chamber is with changing value（△h）When, transmitted light wavelength generates variation, it is assumed that chamber length increases 1nm, then front and rear comparison is saturating
It is as shown in figure 16 to penetrate wave length shift image.The peak of the spectral line P2 after spectral line P1 and variation before capturing to change to its image peak value
Value wavelength is respectively image graph 17, shown in Figure 18.
It can be obtained by Figure 17, Figure 18 when Resonant Intake System increases 1um, transmission center wavelength of light drift 0.00005um=
0.05nm=50pm, much larger than the measurement accuracy 1pm that system is taken, system is enough to measure.
As △ h=5 h ', at this time for the chamber set by system grow h '=6 of maximum h=h '+△ h=6 × 7.8um=
46.8um, energy-wavelength image through resonator are shown in Figure 19.
0.001um=1nm=1000pm ＞ 1pm are described as by distance between adjacent peaks centre wavelength at this time,
Note：Theoretically Resonant Intake System can still continue to expand, but be difficult to ensure that two planes since resonator is long in practice
Mirror reflection surface is parallel, therefore system goes bail for and keeps value（△h=5 h’）.
Change of cavity length value is the h ' of △ h=5, therefore 13 stretch value of driver should be equal to 5 h ', driver synchronous drive second
Right-angle reflecting prism group 8, which moves opposite first right-angle reflecting prism group 7, the change in displacement of 5 h ', therefore range L is：
The total quantity of 2N-standard right-angle prism VI 702 and standard right-angle prism VII 801,
H '-resonator minimum cavity is long,
It is obtained by range formula, when the quantity increase of N, systematic survey range L equal proportion increases, and minimum cavity long value h ' is bigger
Then measurement range L is bigger.
The measuring principle of the present invention：
After light is emitted by laser beam emitting device 1 to be separated by the first Amici prism 2, it is divided into measuring beam a and scanning light
Beam b, wherein measuring beam a are divided into light beam c and light beam d after the second Amici prism 3, and light beam c enters by 4 He of the first speculum
The optical resonator of second speculum 5 composition, light beam c are transmitted to the first photoelectric receiving arrangement 6 after resonance multiple reflections, obtain
Go out the distance between the first speculum 4 and the second speculum 5.Light beam d enters the first right-angle reflecting prism group 7 and the second right angle is anti-
Prism group 8 is penetrated, becomes light beam f after the second Amici prism 3 is returned to after multiple reflections, light beam f is after third Amici prism 9
Become light beam g.Scanning light beam b becomes light beam e after the 4th Amici prism group 10, light beam e after corner cube mirror 11 again
Become light beam j into third Amici prism 9, at this time the wavelength for the interference illustration that light beam g and light beam j are generated and center light energy by
Second photoelectric receiving arrangement 12 is received and is handled, and analyzes and draw the variation diagram of light energy.
1. when measured piece does not move, the 4th Amici prism group 10 is in contact with measured piece, and when system is not opened, second is anti-
It is h that 5 and second right-angle reflecting prism group 8 of mirror, which is penetrated, relative to the distance between the first speculum 4 and the first corner reflection prism group 7.
After system is opened, driver 13 starts, along optical path direction high frequency telescopic variation, to make the second speculum 5 and the second right-angle reflecting prism
Group 8 generates the variation of △ h relative to the distance between the first speculum 4 and the first right-angle reflecting prism group 7, i.e. distance becomes h+
△h。
After light is emitted by laser beam emitting device 1 to be separated by the first Amici prism 2, it is divided into measuring beam a and scanning light
A series of light path that beam b, measuring beam a, scanning light beam b finally become light beam g and light beam j processes by propagation respectively is suitable
When, all spectrum lambdas that laser beam emitting device 1 is sent out0~λnLight beam g and light beam j is shown as in the second photoelectric receiving arrangement 12 to generate
Interfere light energy most intensity values, i.e. the light energy of all wavelengths is all most strong, record that the first photoelectric receiving arrangement 6 provides at this time the
The distance h 〞 of one speculum 4 and the second speculum 5.
2. when the 4th Amici prism group 10 with testee along the scanning light beam b directions of propagation displacement distance x when, driver 13
Continuous high frequency stretches, and total energy causes the 2 beam light by the laser that laser beam emitting device 1 is sent out after the first Amici prism 2 separates
The equivalent optical path of the second photoelectric receiving arrangement 12 is finally reached, the second photoelectric receiving arrangement 12 is made to be shown as light beam g and light beam j productions
Raw interference light energy most intensity values, record at this time the first photoelectric receiving arrangement 6 provide first penetrate 4 and second speculum 5 of mirror away from
From h 〞+△ h 〞, at this time 2x=2 ×（2N+1）× △ h 〞, N are in the first right-angle reflecting prism group and the second right-angle reflecting prism group
The number of respective standard right-angle prism.Measured object displacement x is calculated by change of cavity length △ h 〞.
Claims (9)
1. a kind of displacement measuring device based on the interference of light, it is characterised in that：Including laser beam emitting device（1）, first light splitting rib
Mirror（2）, the second Amici prism（3）, third Amici prism（9）, the 4th Amici prism（10）, the first speculum（4）, second reflection
Mirror（5）, the first right-angle reflecting prism group（7）, the second right-angle reflecting prism group（8）, the first photoelectric receiving arrangement（6）, the second light
Electric reception device（12）, driver（13）；Wherein：
The laser beam emitting device（1）First Amici prism is set on the laser optical path launched（2）, the first Amici prism
（2）Light splitting optical path include light splitting optical path A, light splitting optical path B；The second Amici prism is set on the light splitting optical path A（3）, the
Two Amici prisms（3）Light splitting optical path include light splitting optical path C, light splitting optical path D；The light splitting optical path C is equipped with optical resonance
Chamber, the optical resonator is by the first speculum（4）, the second speculum（5）It forms；Described the is provided with after optical resonator
One photoelectric receiving arrangement（6）；Second Amici prism（3）Light splitting optical path D on be provided with the first right-angle reflecting prism group
（7）, the second right-angle reflecting prism group（8）, the first right-angle reflecting prism group（7）One end and the first speculum（4）It is fixedly connected,
Second right-angle reflecting prism group（8）One end and the second speculum（5）It is fixedly connected, the first right-angle reflecting prism group (7), second
Right-angle reflecting prism group（8）The other end and driver（13）Connection, the first right-angle reflecting prism group（7）, the second right angle reflection
Prism group（8）Reflected light retroeflection to the second Amici prism（3）Form light splitting optical path F, the second Amici prism（3）Light splitting optical path
F is equipped with the third Amici prism（9）；First Amici prism（2）Light splitting optical path B on setting the 4th light splitting rib
Mirror（10）, the 4th Amici prism（10）Light splitting optical path E on be provided with corner cube mirror（11）, corner cube mirror（11）Reflection
Light enters third Amici prism（9）, third Amici prism（9）Light splitting optical path G be equipped with second photoelectric receiving arrangement
（12）.
2. the displacement measuring device according to claim 1 based on the interference of light, it is characterised in that：The first light splitting rib
Mirror（2）Including right-angle prism I（201）With right-angle prism II（202）, right-angle prism I（201）With right-angle prism II（202）It is oblique
Face is bonded together；Second Amici prism（3）Including right-angle prism III（301）With right-angle prism IV（302）, right-angled edge
Mirror III（301）With right-angle prism IV（302）Inclined-plane be bonded together, and right-angle prism III（301）With right-angle prism IV（302）
Opposite right-angle surface is parallel.
3. the displacement measuring device according to claim 2 based on the interference of light, it is characterised in that：The right-angle prism III
（301）Light absorption and diffusing reflection layer I are equipped at its right-angle surface（304）, right-angle prism IV（302）Light is equipped at right-angle surface to inhale
Receipts and diffusing reflection layer II（303）.
4. the displacement measuring device according to claim 1 based on the interference of light, it is characterised in that：First speculum
（4）Close to the second speculum（5）Side plating, which is carried out, reflectance coating；Second speculum（5）Close to the first speculum（4）
Side plating, which is carried out, reflectance coating.
5. the displacement measuring device according to claim 4 based on the interference of light, it is characterised in that：The Laser emission dress
It puts（1）Spectral width be λ0~λn；First speculum（4）In spectral width λ0~λnLight beam in spectral width λi
~λjWavelength reflection be 90~99%；Second speculum（5）In spectral width λ0~λnLight beam in spectral width
Spend λi~λjWavelength reflection be 90~99%；The λ0~λnFor 0.1~2um, λi~λjFor 0.2~0.4um.
6. the displacement measuring device according to claim 5 based on the interference of light, it is characterised in that：First photoelectricity connects
Receiving apparatus（6）For to wavelength Xi~λjThe energy of light beam is analyzed, and calculates the first speculum（4）With the second speculum
（5）Distance；Second photoelectric receiving arrangement, for different wave length λ0~λnBeam energy analyzed, and analyze
Go out the most strong wavelength of light energy；The λ0~λnFor 0.1~2um, λi~λjFor 0.2~0.4um.
7. the displacement measuring device according to claim 1 based on the interference of light, it is characterised in that：First right angle is anti-
Penetrate prism group（7）Generate the right-angle prism V of reflection to light using inclined-plane including one（701）, it is multiple to utilize two right-angle surfaces to light
Generate the standard right-angle prism VI of reflection（702）；The second right-angle reflecting prism group（8）Right-angle surface pair is utilized including one
Light generates the small right-angle prism of reflection（802）, it is multiple using two right-angle surfaces to light generate reflection standard right-angle prism VII
（801）.
8. the displacement measuring device according to claim 7 based on the interference of light, it is characterised in that：The small right-angle prism
（802）Right-angle surface area be standard right-angle prism VII（801）0.3~0.8 times of right-angle surface area.
9. the displacement measuring device according to claim 1 based on the interference of light, it is characterised in that：The third light splitting rib
Mirror（9）Including right-angle prism VIII（901）With right-angle prism Ⅸ（902）, right-angle prism VIII（901）With right-angle prism Ⅸ（902）'s
Inclined-plane is bonded together, and right-angle surface relative to each other is parallel；The right-angle prism Ⅸ（902）Light absorption is equipped at right-angle surface
And diffusing reflection layer III（903）；4th Amici prism（10）By four pieces of same right-angle prisms Ⅹ（1001）Right angle each other
The square of face gluing composition, wherein right-angle prism Ⅹ（1001）Inclined-plane is equipped with light absorption and diffusing reflection layer IV（1002）, should
4th Amici prism（10）It is moved together with tested linear moving object.
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