CN105147241B - Method and system based on double space carrier frequency technique extension OCT image depth - Google Patents
Method and system based on double space carrier frequency technique extension OCT image depth Download PDFInfo
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- CN105147241B CN105147241B CN201510390567.9A CN201510390567A CN105147241B CN 105147241 B CN105147241 B CN 105147241B CN 201510390567 A CN201510390567 A CN 201510390567A CN 105147241 B CN105147241 B CN 105147241B
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Abstract
The invention discloses a kind of method and system based on double space carrier frequency technique extension OCT image depth.Two reference arms with different light paths are set in Fourier OCT systems, and the sample optical signal with different depth position is interfered respectively.A set of scanning galvanometer system is each set in two reference arms, makes incoming position of the light beam in two reference arms on scanning galvanometer that there are different side-play amounts relative to the rotary shaft of scanning galvanometer.Make the scanning galvanometer synchronous scanning in sample arm and two reference arms by synchronization control circuit.Due to the spatial phase modulation effect of scanning galvanometer in two reference arms, the interference spectrum signal for corresponding to two depth locations of sample is set to be loaded into different horizontal space spectrum bands respectively.Treatment is demodulated to the interferometric modulator spectral signal for detecting by computer, the OCT image that two frames correspond to sample different depth position is obtained, is then to be capable of achieving the expansion at double of OCT image depth by simple concatenation.
Description
Technical field
Double space carrier frequency technique extension OCT is based on the present invention relates to Optical Coherence Tomography Imaging Technology, more particularly to one kind
The method and system of imaging depth.
Background technology
Optical coherent chromatographic imaging (Optical Coherence Tomography, abbreviation OCT) is a kind of emerging life
Thing medical optics imaging technique, can realize carrying out noncontact, not damaged, high-resolution with physiological function to the structure of biological tissue
Imaging, has broad application prospects in the early detection of disease and in body biopsy field.OCT is used primarily for human retina
Imaging, has extensive use, especially to some diseases such as sugar material characteristic of disease PVR, glaucoma etc. in Clinical Ophthalmology medical science
The primary prevention of disease, diagnosis have prominent effect.In many OCT medical applications, a big imaging depth is very desirable
's.Such as in endoscopic applications, probe and tissue surface can not be controlled very precisely, and a big imaging depth just becomes very
It is necessary.In whole ophthalmic applications, whole eyes anterior chamber, or even the imaging of whole front and rear section (retina) eyes is all needed
Want extended parallel port scope.And its range of application has been extended to the imaging of various tissues and abiotic tissue at present.
OCT can non-contactly provide the sample structure image under static or motion state, and need not by stimulate regulation come
The respective change of the observed eye of indirect observation, becomes the ideal tools of measurement and analysis tissue and structure, (super with other technologies
Sound wave, magnetic resonance image etc.) compared to there is sizable advantage.The imaging depth of OCT systems is substantially by each in spectrometer
Component parameters are determined, mainly limited by the centre wavelength of light source and spectral resolution, but also some other factor can influence
Imaging depth, such as sensitivity decrease, complex conjugate mirror image aliasing and the limited depth of field etc..Sensitivity can influence imaging depth
It is the pixel geometry size and the spot size of spectrometer due to linear pixel array so that sensitivity declines in areas imaging
It is interior.It is because electronic receiver cannot distinguish between front and negative frequency, frequency domain that complex conjugate mirror image aliasing can influence imaging depth
Wreak havoc and degenerated with depth, usually limit the half that depth bounds is coherence length.The limited depth of field can influence imaging depth
It is because signal intensity can not be while keep enough lateral resolutions from shallow layer tissue and deep tissues.Spectral-domain OCT system exists
To the imaging depth of human eye in 8mm or so in air, thus the depth (12~14mm) of panorama anterior ocular segment can not be measured.
In common spectral-domain OCT system, realizing the method for big Depth Imaging mainly has three kinds：Increased by eliminating mirror image
One times of imaging depth, by switching reference arm imaging joint, be imaged simultaneously using two sets of spectrometers and segmentation spectrum is extended to
Picture, but these methods have its drawback.The method for eliminating mirror image mainly has B-M-mode, is had during using the method because laterally
Sensitivity declines and causes the problem of the decline of image quality, while can easily entrain environmental disturbances.By switch reference arm into
Realized as splicing is generally switched using galvanometer, but handoff procedure can bring the time difference, cause the later stage to be spliced when being different
Section, the imaging of the sample of different conditions, it is impossible to reach the requirement of imaging simultaneously.Being imaged simultaneously using two sets of spectrometers can increase reality
Instrument and expense are tested, while can also increase the complexity of package unit.Segmentation spectrum extended parallel port by set two colors to
Mirror, is divided into light source two parts and is utilized respectively, although can extended parallel port depth and be it is synchronous need not switch during,
But the image resolution ratio of gained can lose half.
The content of the invention
The present invention provides the spectral coverage OCT imaging system and method based on double space carrier frequency, and it can be by obtaining without aliasing
Realize panoramic imagery of the spectral coverage OCT to anterior ocular segment corresponding to the sample OCT image at two depth locations.
It is of the invention to be achieved through the following technical solutions：A kind of spectral coverage OCT imaging system based on double space carrier frequency of the present invention
System, including wideband light source.Optoisolator, broadband optical fiber coupler, the first Polarization Controller, the second Polarization Controller, sample arm,
Reference arm, feeler arm；Described sample arm is by the first Polarization Controller, the first fiber optic collimator mirror, the first scanning galvanometer and first
Focusing objective len is constituted；Described reference arm is shaken by the second Polarization Controller, the second fiber optic collimator mirror, Amici prism, the second scanning
Mirror, the second focusing objective len, the first plane mirror, the 3rd scanning galvanometer, tertiary focusing object lens and the second plane mirror composition.
Described wideband light source is connected through fibre optic isolater with the first input port of broadband optical fiber coupler, band optical fiber
Second output port of coupler is connected through the first Polarization Controller with the first fiber optic collimator mirror, after the first fiber optic collimator mirror
Alignment places the first scanning galvanometer, is aligned after the first scanning galvanometer and places the first focusing objective len, in the first focusing objective len
Focal plane alignment places the sample being observed；3rd output port of broadband optical fiber coupler is through the second Polarization Controller and
Two fiber optic collimator mirrors are connected, and are aligned after the second fiber optic collimator mirror and are placed Amici prism, after the transmission plane of Amici prism
The second scanning galvanometer is placed, and the rotary shaft of incident beam center line and the second scanning galvanometer sets side-play amount d1, swept second
Alignment places the second focusing objective len after retouching galvanometer, and it is anti-that the focal plane alignment after the second focusing objective len places the first plane
Penetrate mirror；Place the 3rd scanning galvanometer after the reflecting surface of Amici prism, and incident beam center line and the 3rd scanning galvanometer
Rotary shaft sets side-play amount d2, it is aligned after the 3rd scanning galvanometer and places tertiary focusing object lens, after tertiary focusing object lens
Focal plane alignment place the second plane mirror.4th output port of broadband optical fiber coupler is connected with spectrometer, light
Spectrometer connects computer.
After the broad band laser sent from wideband light source is through optoisolator and broadband optical fiber coupler, it is divided into two parts；Its
A middle part enters sample arm by the first Polarization Controller, and another part enters reference arm by the second Polarization Controller；Enter
Entering this part light of sample arm, to pass sequentially through the first Polarization Controller, the first fiber optic collimator mirror, the first scanning galvanometer and first poly-
Focus objective lens are radiated on sample, and the light for returning is reflected and scattered from sample along backtracking broadband optical fiber coupler；Into
This part light of reference arm passes sequentially through the second Polarization Controller, the second fiber optic collimator mirror and reaches Amici prism, and Amici prism will
This part light is divided into transmitted light and reflected light this two parts；Wherein transmitted light sequentially passes through the second scanning galvanometer, the second conglomeration
Mirror is focused on the first plane mirror, and the light from the reflection of the first plane mirror is along backtracking to broadband optical fiber coupler；
The light reflected from Amici prism sequentially passes through the 3rd scanning galvanometer, tertiary focusing object lens and focuses on the second plane mirror,
Light from the reflection of the second plane mirror is along backtracking to broadband optical fiber coupler；Now, at broadband optical fiber coupler this
Three part return light mixing are interfered, wherein the first depth of the light returned from the reflection of the first plane mirror and sample
Section produces effective interference signal, and the light returned from the reflection of the second plane mirror produces effective with the second depth segment of sample
Interference signal；The effective interference signal of this two parts produces the spectrum corresponding to the effective interference signal of two above through spectrometer detection
Signal, then incoming computer carries out data processing, image and shows.
A kind of spectral coverage OCT imaging method based on double space carrier frequency, the method specifically includes following steps：
1) is on the basis of traditional spectral-domain OCT system, it is ensured that sample arm and feeler arm are constant, in the emergent light of reference arm
Place's addition one Amici prism, two scanning galvanometers, two condenser lenses and two plane mirrors；
2) by broadband optical fiber coupler after the outgoing of light sources, into reference arm and sample arm, the light into reference arm passes through
It is changed into Space Collimation collimated light beam after collimating mirror, is radiated on 50/50 Amici prism, can be divided into for incident light by this Amici prism
Identical two parts a, part passes through Amici prism outgoing, and another part reflects outgoing through Amici prism；
3) this part of light that is transmitted in reference arm through Amici prism is referred to as the first reference light, and the first reference light is through the
Two scanning galvanometer reflected illuminations are on the first level crossing；Reference arm reflects this part of light and is referred to as the second reference through Amici prism
Light, the second reference light is through the 3rd scanning galvanometer reflected illumination on the second level crossing.The second reference path is covered, adjustment first is flat
The position of face speculum so that it is corresponding with sample interior first object position, and recalls interference signal；
4) ensures that miscellaneous part is motionless, makes the second reference path thang-kng, adjusts the position of the second plane mirror so that
It is corresponding with the second place in sample, and recalls reflected signal；
5) spectrum that is entered in feeler arm simultaneously by two groups of interference signals that two plane mirrors and sample interference are produced
Instrument, detection obtains interference spectrum signal, and detector C CD can record parallel two parts corresponding to two depth locations in sample at
Interference spectrum signal；The last incoming computer of detected signal, by Fourier transformation reconstruction image.
Because two sides plane mirror is different relative to the light path of broadband optical fiber coupler in reference arm, then corresponding to sample
Arm will produce two zero light path positions, and by the position of adjustment amount plane mirror, just can correspond to is needed in the sample
The information of the target depth position to be detected.It is corresponding with regard to only due to only existing a reference arm in traditional spectral coverage OCT device
There can be a zero light path position, and system sensitivity increases in the presence of a downward trend with depth, i.e., away from zero light path position,
Then can preferably tackle the problem in the presence of legacy system.Meanwhile, the light for coming is returned through dry from sample arm and two reference arms
After relating to, two parts interference signal is simultaneously by spectrometer detection.Thus system is in the absence of the imaging speed caused because of factors such as switchings
Degree is restricted, and is advantageously caught in the OCT detection imagings or dynamic of the motion sample such as such as anterior ocular segment, realizes base
In the detection of the spectral coverage OCT imaging system of double space carrier frequency.
Compared with background technology, the present invention has the following technical effect that：
1) system architectures of the invention are relatively easy, it is only necessary to done slightly for reference arm on traditional spectral-domain OCT system
Micromodification is moved：Amici prism and scanning galvanometer device are added on reference arm, the OCT image that can be achieved with big depth is visited
Survey.
2) system architectures of the invention can realize the expansion depth imaging of segmentation, and the light into reference arm passes through light splitting
Prism devices, get on scanning galvanometer respectively, and then reflected light is got on the plane mirror of two sides by collimating mirror.Two facial planes
Speculum corresponds to two zero different light path positions in sample, so as to realize being segmented into the effect of picture.So can be to individual
Target location repeats imaging and improves picture quality, two target locations can be simultaneously imaged again and realize great deep exploration.
3) reference arms of the invention have used two dynamic scanning galvanometers, and synchronous sweeping is realized by synchronization control circuit
Retouch, two different horizontal carrier frequency are synchronously loaded by reference to the scanning galvanometer in arm respectively, held high additional complexity is not introduced
While your device, big depth spectral coverage OCT imaging that real-time synchronization can be realized and that mirror image is eliminated automatically, in the absence of as light
The method such as switch or galvanometer switching introduces the problem of extra time difference.
4) reference light in light path has been done relatively special utilization by the present invention, and this conception of species is particularly suitable for multiple reference lights
Light path device.It is better simply a reference light to be divided into two parts and is used respectively by apparatus of the present invention, realize base
In the big depth spectral-domain OCT system of double reference arms.This concept can also be used in other system designs.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is the schematic diagram of double reference arms；
In figure：1st, wideband light source, 2, optoisolator, 3, broadband optical fiber coupler, the 4, first Polarization Controller, the 5, first light
Fine collimating mirror, the 6, first scanning galvanometer, the 7, first focusing objective len, 8, sample, the 9, second Polarization Controller, the 10, second optical fiber is accurate
Straight device, 11, Amici prism, the 12, the 3rd scanning galvanometer, 13, tertiary focusing object lens, the 14, second plane mirror, 15, second sweeps
Retouch galvanometer, the 16, second focusing objective len, the 17, first plane transmitting mirror, 18, sample arm, 19, reference arm, 20, feeler arm, 21, light
Spectrometer, 22, computer.
Specific embodiment
Below in conjunction with the accompanying drawings with implementation example to further instruction of the present invention：
As shown in Figure 1 and Figure 2, a kind of system based on double space carrier frequency technique extension OCT image depth of the present invention, including
Wideband light source 1, optoisolator 2, broadband optical fiber coupler 3, sample arm 18, reference arm 19, spectrometer 21, computer 22；It is described
Sample arm 18 include the first Polarization Controller 4, the first fiber optic collimator mirror 5, the first scanning galvanometer 6 and the first focusing objective len 7；Institute
The reference arm 19 stated includes the second Polarization Controller 9, the second fiber optic collimator mirror 10, Amici prism 11, the second scanning galvanometer 15, the
Two focusing objective lens 16, the first plane mirror 17, the 3rd scanning galvanometer 12, the plane mirror of tertiary focusing object lens 13 and second
14。
Described wideband light source 1 connects a port of broadband optical fiber coupler 3, and band optical fiber by optoisolator 2
The two-port of coupler 3 is connected to sample arm 18 and reference arm respectively through the first Polarization Controller 4 and the second Polarization Controller 9
19；The first collimator objective 5 wherein in the connection of the first Polarization Controller 4 sample arm 18, is then passed through after scanning galvanometer 6 by the
One focusing objective len 7, is directed at sample 8：And the second Polarization Controller 9 connects the second collimator objective 10, the second collimator objective 10 is aligned
Amici prism 11, and place the 3rd scanning galvanometer 12 and the second scanning galvanometer 15, the 3rd on two outgoing sides of Amici prism 11
The light that scanning galvanometer 12 is reflected reaches tertiary focusing object lens 13, is directed at the second plane mirror 14, and the second scanning galvanometer 15 is anti-
The light of injection reaches the second focusing objective len 16, and the 4th port for being directed at the broadband optical fiber coupler 3 of the first plane mirror 17. connects
Feeler arm 20 is connect, computer is connected, to carry out data processing.
After wideband light source 1 sends detection light beam through broadband optical fiber coupler 3, a part of light passes through the first Polarization Controller 4
Into sample arm 18, another part light enters reference arm 19 by the second Polarization Controller 9；Into sample arm section light successively
Enter on sample by after the first fiber optic collimator mirror 5, the focusing objective len 7 of scanning galvanometer 6 and first, the rear orientation light of sample is through original
Road is back to broadband optical fiber coupler；It is accurate that light into the part of reference arm 19 sequentially passes through the second Polarization Controller 9, the second optical fiber
Straight mirror 10 reaches Amici prism 11, and according to different refractive indexes, incident light is divided into the first reference light and the second reference light, it
Afterwards, two parts light is got on the second scanning galvanometer 15 and the 3rd scanning galvanometer 12 respectively, is reflected by the second scanning galvanometer 15
Light by getting to the first plane mirror 14 after the second focusing objective len 16, the light reflected by the 3rd scanning galvanometer 12 is by the
The second plane mirror 14 is got to after three focusing objective lens 136, by two light of plane mirror according to backtracking to broadband
Fiber coupler 3, and then interfered with the light of the return of sample arm 18；It is dry feeler arm 20 to be entered into from broadband optical fiber coupler 3
Signal is related to while including the letter that corresponding first reference path of the first plane mirror 17 is produced with the interference of sample internal information
Number, and the signal that corresponding second reference path of the second plane mirror 14 is produced with the interference of sample internal information, two parts
Signal corresponds to the sample structure information of different depth section respectively.In feeler arm 20, two parts interference signal enters spectrum simultaneously
In instrument, detection obtains interference spectrum signal, and detector C CD can parallel record two parts corresponding to two depth locations in sample
The interference spectrum signal at place, then incoming computer obtains sample depth information by Fast Fourier Transform (FFT).
A kind of spectral coverage OCT imaging method based on double space carrier frequency, it is characterised in that the method specifically includes following step
Suddenly：
1) is on the basis of traditional spectral-domain OCT system, it is ensured that sample arm and feeler arm are constant, in the emergent light of reference arm
Place's addition one Amici prism, two scanning galvanometers, two condenser lenses and two plane mirrors；
2) by broadband optical fiber coupler after the outgoing of light sources, into reference arm and sample arm, the light into reference arm passes through
It is changed into Space Collimation collimated light beam after collimating mirror, is radiated on 50/50 Amici prism, can be divided into for incident light by this Amici prism
Identical two parts a, part passes through Amici prism outgoing, and another part reflects outgoing through Amici prism；
3) this part of light that is transmitted in reference arm through Amici prism is referred to as the first reference light, and the first reference light is through the
Two scanning galvanometer reflected illuminations are on the first level crossing；Reference arm reflects this part of light and is referred to as the second reference through Amici prism
Light, the second reference light is through the 3rd scanning galvanometer reflected illumination on the second level crossing.The second reference path is covered, adjustment first is flat
The position of face speculum so that it is corresponding with sample interior first object position, and recalls interference signal；
4) ensures that miscellaneous part is motionless, makes the second reference path thang-kng, adjusts the position of the second plane mirror so that
It is corresponding with the second place in sample, and recalls reflected signal；
5) spectrum that is entered in feeler arm simultaneously by two groups of interference signals that two plane mirrors and sample interference are produced
Instrument, detection obtains interference spectrum signal, and detector C CD can record parallel two parts corresponding to two depth locations in sample at
Interference spectrum signal；The last incoming computer of detected signal, by Fourier transformation reconstruction image.
Because two sides plane mirror is different relative to the light path of broadband optical fiber coupler in reference arm, then corresponding to sample
Arm will produce two zero light path positions, and by the position of adjustment amount plane mirror, just can correspond to is needed in the sample
The information of the target depth position to be detected.It is corresponding with regard to only due to only existing a reference arm in traditional spectral coverage OCT device
There can be a zero light path position, and system sensitivity increases in the presence of a downward trend with depth, i.e., away from zero light path position,
Then can preferably tackle the problem in the presence of legacy system.Meanwhile, the light for coming is returned through dry from sample arm and two reference arms
After relating to, two parts interference signal is simultaneously by spectrometer detection.Thus system is in the absence of the imaging speed caused because of factors such as switchings
Degree is restricted, and is advantageously caught in the OCT detection imagings or dynamic of the motion sample such as such as anterior ocular segment, realizes base
In the detection of the spectral coverage OCT expansion depth imaging system of double space carrier frequency.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, some improvement can also be made under the premise without departing from the principles of the invention, these improvement also should be regarded as of the invention
Protection domain.
Claims (4)
1. the system based on double space carrier frequency technique extension OCT image depth, including wideband light source (1), optoisolator (2), width
Band fiber coupler (3), sample arm (18), reference arm (19), spectrometer (21), computer (22)；It is characterized in that：Described
Sample arm (18) includes the first Polarization Controller (4), the first fiber optic collimator mirror (5), the first scanning galvanometer (6) and the first conglomeration
Mirror (7)；Described reference arm (19) including the second Polarization Controller (9), the second fiber optic collimator mirror (10), Amici prism (11),
Second scanning galvanometer (15), the second focusing objective len (16), the first plane mirror (17), the 3rd scanning galvanometer (12), trimerization
Focus objective lens (13) and the second plane mirror (14)；3rd output port of broadband optical fiber coupler (3) is through the second Polarization Control
Device (9) is connected with the second fiber optic collimator mirror (10), is aligned after the second fiber optic collimator mirror (10) and places Amici prism (11),
The second scanning galvanometer (15), and incident beam center line and the second scanning galvanometer are placed after the light splitting surface of Amici prism (11)
(15) rotary shaft sets side-play amount d1, it is aligned after the second scanning galvanometer (15) and places the second focusing objective len (16), the
Focal plane alignment after two focusing objective lens (16) places the first plane mirror (17)；In the reflecting surface of Amici prism (11)
The 3rd scanning galvanometer (12) is placed afterwards, and the rotary shaft of incident beam center line and the 3rd scanning galvanometer (12) sets side-play amount
d2, it is aligned after the 3rd scanning galvanometer (12) and places tertiary focusing object lens (13), Jiao after tertiary focusing object lens (13)
It is aligned at plane and places the second plane mirror (14)；4th output port of broadband optical fiber coupler (3) is connected with spectrometer,
Spectrometer connects computer.
2. the system based on double space carrier frequency technique extension OCT image depth according to claim 1, it is characterised in that：
Wideband light source (1) is connected through optoisolator (2) with the first input port of broadband optical fiber coupler (3), broadband optical fiber coupler
(3) the second output port is connected through the first Polarization Controller (4) with the first fiber optic collimator mirror (5), in the first fiber optic collimator mirror
(5) alignment places the first scanning galvanometer (6) after, is aligned after the first scanning galvanometer (6) and places the first focusing objective len (7),
The sample being observed is placed in the focal plane alignment of the first focusing objective len (7).
3. the system based on double space carrier frequency technique extension OCT image depth according to claim 1, it is characterised in that：
After the broad band laser sent from wideband light source (1) is through optoisolator (2) and broadband optical fiber coupler (3), it is divided into two parts；Its
A middle part enters sample arm (18) by the first Polarization Controller (4), and another part enters by the second Polarization Controller (9)
Reference arm (19)；This part light into sample arm (18) passes sequentially through the first Polarization Controller (4), the first fiber optic collimator mirror
(5), the first scanning galvanometer (6) and the first focusing objective len (7) are radiated on sample, reflect and scatter the light for returning from sample
Along backtracking broadband optical fiber coupler (3)；This part light into reference arm (19) passes sequentially through the second Polarization Controller
(9), the second fiber optic collimator mirror (10) reaches Amici prism (11), and this part light is divided into transmitted light and reflection by Amici prism (11)
Light this two parts；Wherein transmitted light sequentially passes through the second scanning galvanometer (15), the second focusing objective len (16) and focuses on the first plane
On speculum (17), the light from the first plane mirror (17) reflection return is along backtracking to broadband optical fiber coupler (3)；From
The light that Amici prism (11) is reflected sequentially passes through the 3rd scanning galvanometer (12), that tertiary focusing object lens (13) focus on second is flat
On face speculum (14), the light from the second plane mirror (14) reflection return is along backtracking to broadband optical fiber coupler (3)；
Now, interfered in return light mixing of this three part of broadband optical fiber coupler (3) place, wherein from the first plane mirror (17)
The first depth segment for reflecting the light and sample for returning produces effective interference signal, is returned from the second plane mirror (14) reflection
The light for returning produces effective interference signal with the second depth segment of sample；The effective interference signal of this two parts is through spectrometer detection
Producing the spectral signal corresponding to the effective interference signal of two above, then incoming computer carries out data processing, image and shows.
4. the method for double space carrier frequency technique extension OCT image depth is based on, it is characterised in that the method specifically includes following step
Suddenly：
1) is on the basis of traditional spectral-domain OCT system, it is ensured that sample arm (18) and feeler arm are constant, in going out for reference arm (19)
Penetrate one Amici prism (11), two scanning galvanometers, two condenser lenses and two plane mirrors of addition at light；
2) by broadband optical fiber coupler (3) after the outgoing of light sources, into reference arm (19) and sample arm (18), into reference arm
(19) light is radiated on 50/50 Amici prism (11) by being changed into Space Collimation collimated light beam after collimating mirror, this light splitting rib
Incident light can be divided into identical two parts by mirror (11), and this part of light through Amici prism (11) outgoing is referred to as first
Reference light, this part of light through Amici prism (11) reflection outgoing is referred to as the second reference light；
3) places the second scanning galvanometer (15), and incident beam center line and second after the light splitting surface of Amici prism (11)
The rotary shaft of scanning galvanometer (15) sets side-play amount d1, it is aligned after the second scanning galvanometer (15) and places the second focusing objective len
(16), the focal plane alignment after the second focusing objective len (16) places the first plane mirror (17)；In Amici prism
(11) after reflecting surface place the 3rd scanning galvanometer (12), and incident beam center line and the 3rd scanning galvanometer (12) rotation
Axle sets side-play amount d2, it is aligned after the 3rd scanning galvanometer (12) and places tertiary focusing object lens (13), in tertiary focusing object lens
(13) the focal plane alignment after places the second plane mirror (14)；Synchronous scanning is realized by synchronization control circuit, point
Not two different horizontal carrier frequency are synchronously loaded by reference to the scanning galvanometer in arm；
4) spectrometer that is entered in feeler arm simultaneously by two groups of interference signals that two plane mirrors and sample interference are produced, visits
Interference spectrum signal is measured, and detector C CD can parallel record two parts corresponding to dry at two depth locations in sample
Relate to spectral signal；The last incoming computer of detected signal, by Fourier transformation reconstruction image.
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