CN104965105B - The AFM probe array of integrated ultrasonic transducer - Google Patents
The AFM probe array of integrated ultrasonic transducer Download PDFInfo
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- CN104965105B CN104965105B CN201510388664.4A CN201510388664A CN104965105B CN 104965105 B CN104965105 B CN 104965105B CN 201510388664 A CN201510388664 A CN 201510388664A CN 104965105 B CN104965105 B CN 104965105B
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Abstract
A kind of AFM probe array of integrated ultrasonic transducer, including：One pedestal, the pedestal are rectangle；Multiple micro-cantilevers, it is connected with a side of pedestal respectively, and being made on each micro-cantilever has needle point；Multiple ultrasonic transducers, its be produced in the back side of multiple micro-cantilevers and or pedestal the back side；Plurality of micro-cantilever and multiple ultrasonic transducers composition probe array.The present invention is to integrate ultrasonic transducer on probe to solve the problems, such as the internal imaging of sample, and the probe structure of array improves image taking speed.
Description
Technical field
The present invention relates to AFM and ultrasound detection field, more particularly to a kind of integrated ultrasonic transducer
AFM probe array.
Background technology
1986, G.Binnig and C.F.Quate succeed in developing AFM (Atom Force Microscope,
AFM), AFM detects sample surface morphology using interatomic interaction force, can realize to conductor, semiconductor and insulation
The observation of body material surface atom level.But traditional AFM technologies can not detect the structural information of sample interior, table can only be carried out
Face imaging analysis, therefore need to seek other means during detection sample interior structural information.In addition, AFM image taking speeds are also very
Important, single AFM probe, which scans, causes image taking speed to be restricted.
Ultrasonic imaging technique is reflected when being propagated using ultrasonic signal in different medium, by entering to reflected signal
Row receives, processing, is important sample interior imaging means so as to detect sample interior pattern.It is real in ultrasonic imaging technique
The transmitting of existing ultrasonic wave is ultrasonic transducer with the device received, is generally made by piezoelectric, can produce and receive ultrasound
Ripple signal.
Can not be to internal imaging and the slow-footed problem of single probe scanning for AFM, the present invention proposes a kind of integrated
The AFM probe array of ultrasonic transducer.Compared with single AFM probe, array type probe structure can realize that the quick of sample is swept
Imaging is retouched, while ultrasonic transducer can realize the detection to sample interior structure.Using this probe array, with reference to respective peripheral
Circuit, can be achieved atomic force imaging or ultrasonic imaging independent detection, can also both simultaneously carry out image checking.
The content of the invention
It is an object of the invention to propose a kind of AFM probe array structure of integrated ultrasonic transducer, integrated on probe
Ultrasonic transducer solves the problems, such as the internal imaging of sample, and the probe structure of array improves image taking speed.
To achieve these goals, the present invention provides a kind of AFM probe array of integrated ultrasonic transducer, including：
One pedestal, the pedestal are rectangle；
Multiple micro-cantilevers, it is connected with a side of pedestal respectively, and being made on each micro-cantilever has needle point；
Multiple ultrasonic transducers, its be produced in the back side of multiple micro-cantilevers and or pedestal the back side；
Plurality of micro-cantilever and multiple ultrasonic transducers composition probe array.
It can be seen from the above technical proposal that the beneficial effects of the invention are as follows：
1st, the present invention proposes to integrate ultrasonic transducer on AFM probe, with ultrasound detection principle, can realize to sample
Internal imaging analysis.
2nd, the present invention proposes the AFM probe structure of array, expands scanning range, solves single probe scanning image taking speed
The problem of slow.
3rd, interdigitated electrode structure or circular ring type array architecture proposed by the present invention, in addition to accelerating scanning imagery speed, in ultrasound
Context of detection can improve the resolution ratio of ultrasonic imaging.
Brief description of the drawings
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail, wherein：
Fig. 1 is the interdigitated electrode structure AFM probe array that first embodiment of the invention integrates ultrasonic transducer；
Fig. 2 is the circular ring type AFM probe array that second embodiment of the invention integrates ultrasonic transducer；
Fig. 3 is the position of the pinpoint array distribution schematic diagram of Fig. 2 circular ring type AFM probes, display opening and needle point；
Fig. 4 is the side structure schematic view of ultrasonic transducer.
Embodiment
Referring to shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the present invention provides a kind of AFM probe array of integrated ultrasonic transducer,
Including：
One pedestal 10, the pedestal 10 are rectangle, and the thickness of the pedestal 10 is 300-500um；
Multiple micro-cantilevers 20, it is connected with a side of pedestal 10 respectively, and being made on each micro-cantilever 20,20 ' has
Needle point 21, the thickness of the 21 ' micro-cantilevers 20,20 ' are 1-10um, width 30-50um；
Multiple ultrasonic transducers 30,30 ', it is produced in the back side of multiple micro-cantilevers 20,20 ' and or pedestal 10
The back side, the ultrasonic transducer 30,30 ' include a Top electrode 31, and the piezoelectric membrane 32 and a bottom electrode 33 being sequentially connected,
The material of upper and lower electrode 31,33 is gold, platinum, aluminium or copper, and the material of piezoelectric membrane 32 is AlN, PZT, LiNbO3Or ZnO, institute
The thickness for stating ultrasonic transducer 30,30 ' is 3-300um；
Plurality of micro-cantilever 20,20 ' and multiple ultrasonic transducers 30,30 ' composition probe array, the probe array
It is to be made using MEMS micro fabrications on silicon chip, probe array is shaped as interdigitated electrode structure or circular ring type, the probe battle array
When being shaped as circular ring type of row, the annulus of most inner side is closed circle, and other each circular ring types are provided with an opening 22, the opening
22 are located at the front of pedestal 10, and the half of the circular ring type is located at the back side of pedestal 10, needle point 21 on the probe array,
21 ' according to scanning array point aligned transfer.
In interdigitated electrode structure probe array, micro-cantilever 20 long 100-300um, array pitch 30-50um.
Circular ring type probe array above has opening 22, width 1-5um, made micro- outstanding in ultrasonic transducer 30, and micro-cantilever 20
Arm beam 20, independent adhesion, in 1/4 circular arc, annular radii is incremented to hundreds of from some tens of pm respectively according to certain rule
Micron, two needle points 21 on same circular arc, in separate micro-cantilever 20, on, it is not interfere with each other when AFM is detected.
Ultrasonic transducer 30, in circular ring type, half in micro-cantilever 20, under, half is extended under pedestal 10, is formed several independent same
Heart annulus, annular radii are incremented to hundreds of microns from some tens of pm respectively with micro-cantilever 20 ' according to certain rule.Due to
It is open 22 small-sized, therefore ultrasound beamformer characteristic will not compared with complete circle as caused by circular ring type ultrasonic transducer 30 '
It is affected.
Ultrasonic transducer 30,30 ' is used as producing and received ultrasonic signal, caused by each piezoelectric membrane 32 of array
Ultrasonic signal phase (time delay) is different, using phased-array technique to realize the fast scan imaging of ultrasonic wave.
When scanning sample, by the cooperation with peripheral circuit, AFM imagings and ultrasonic imaging can be carried out simultaneously.AFM's
Detection is contacted using contact or tapping-mode, needle point 21,21 ' with sample surfaces, due to needle point 21,21 ' sophisticated atomics and sample
Repulsive force effect between surface atom, micro-cantilever 20,20 ' can produce Bending Deformation, and different surface undulation situations is corresponding
Different degree of crook, so that light detecting signal changes, surface appearance feature is obtained by peripheral processes circuit counting.
During AFM scan, ultrasonic imaging is carried out simultaneously.High frequency electrical signal is loaded by electrode 31,33 and changed to ultrasound
Energy device 30,30 ', the ultrasonic wave of specific frequency is exported by ultrasonic transducer 30,30 ', ultrasonic wave penetrates sample surfaces, into sample
Inside, return in different reflected at interfaces.By Control peripheral circuit, ultrasonic transducer 30,30 ' switchs to reception state, passes through
Peripheral processes circuit is analyzed and processed to obtain internal structure pattern.It is using phased-array technique, i.e., high when carrying out ultrasonic imaging
Frequency electric signal is loaded to ultrasonic transducer 30,30 ' with the different delays time by electrode 31,33, is prolonged by certain rule control
The slow time can change the acoustic beam shape synthesized by each array element transmitting sound wave, produce focusing and deflection effect, pass through this electric scanning
Complete quick, high resolution ultrasonic imaging.
Embodiment one
It is the structural representation of embodiments of the invention one, wherein ultrasonic transducer is interdigitated electrode structure AFM referring again to Fig. 1
Probe array structure, including：
One pedestal 10, the pedestal 10 are rectangle；
Multiple micro-cantilevers 20, it is connected with a side of pedestal 10 respectively, is made below the end of each micro-cantilever 20
Work has needle point 21；
Multiple ultrasonic transducers 30, its be produced in the back side of multiple micro-cantilevers 20 and or pedestal 10 the back side；
Plurality of micro-cantilever 20 and multiple ultrasonic transducers 30 form probe array.
Embodiment two
It is the structural representation of embodiments of the invention two, wherein ultrasonic transducer is annulus referring again to Fig. 2 and Fig. 3
AFM probe array structure during type, including：
One pedestal 10, the pedestal 10 are rectangle；
Multiple circular ring type micro-cantilevers 20 ', it is connected with a side of pedestal 10 respectively, each circular ring type micro-cantilever
Being made below 20 ' has needle point 21 '；
Multiple circular ring type ultrasonic transducers 30 ', it is produced in the back side of multiple circular ring type micro-cantilevers 20 ' and or base
The back side of seat 10；
Plurality of circular ring type micro-cantilever 20 ' and multiple circular ring type ultrasonic transducers 30 ' composition probe array.
Particular embodiments described above, the purpose of the present invention, technical scheme and beneficial effect are carried out further in detail
Describe in detail it is bright, should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., it should be included in the guarantor of the present invention
Within the scope of shield.
Claims (6)
1. a kind of AFM probe array of integrated ultrasonic transducer, including：
One pedestal, the pedestal are rectangle；
Multiple micro-cantilevers, it is connected with a side of pedestal respectively, and being made on each micro-cantilever has needle point；
Multiple ultrasonic transducers, it is produced in the back side of multiple micro-cantilevers and the back side of pedestal；
Plurality of micro-cantilever and multiple ultrasonic transducers composition probe array；
Its probe array is to be made using MEMS micro fabrications on silicon chip, and probe array is shaped as interdigitated electrode structure or circle
It is ring-like；
When being shaped as circular ring type of its probe array, the annulus of most inner side is closed circle, and other each circular ring types are provided with
One opening, the opening are located at the front of pedestal, and the half of the circular ring type is located at the back side of pedestal.
2. the AFM probe array of integrated ultrasonic transducer according to claim 1, needle point on its probe array according to
The aligned transfer of scanning array point.
3. the AFM probe array of integrated ultrasonic transducer according to claim 1, wherein ultrasonic transducer include electricity on one
Pole, and the piezoelectric membrane and a bottom electrode being sequentially connected, the material of upper and lower electrode are gold, platinum, aluminium or copper, piezoelectric membrane
Material be AlN, PZT, LiNbO3Or ZnO.
4. the AFM probe array of integrated ultrasonic transducer according to claim 1, the wherein thickness of pedestal are 300-
500um。
5. the AFM probe array of integrated ultrasonic transducer according to claim 1, the wherein thickness of micro-cantilever are 1-
10um, width 30-50um.
6. the AFM probe array of integrated ultrasonic transducer according to claim 1, the wherein thickness of ultrasonic transducer are 3-
300um。
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021125944A1 (en) * | 2019-12-16 | 2021-06-24 | Nearfield Instruments B.V. | A method and system for performing characterization measurements on an elongated substrate |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106018566B (en) * | 2016-07-05 | 2018-07-13 | 华中科技大学 | A kind of ultrasonic transduction device |
| NL2024467B1 (en) * | 2019-12-16 | 2021-09-10 | Nearfield Instr B V | A method and system for performing sub-surface measurements on a sample |
| NL2024466B1 (en) * | 2019-12-16 | 2021-09-02 | Nearfield Instr B V | A method and system for performing sub-surface measurements on a sample |
| CN112964909B (en) | 2020-09-16 | 2023-12-01 | 中国科学院沈阳自动化研究所 | Method and device for measuring simultaneous independent movement of multiple probes of atomic force microscope |
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| CN104965105A (en) | 2015-10-07 |
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