CN104614558B - A kind of, line CCD combine atomic force probe scanning measurement system and measuring method - Google Patents
A kind of, line CCD combine atomic force probe scanning measurement system and measuring method Download PDFInfo
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- CN104614558B CN104614558B CN201510061415.4A CN201510061415A CN104614558B CN 104614558 B CN104614558 B CN 104614558B CN 201510061415 A CN201510061415 A CN 201510061415A CN 104614558 B CN104614558 B CN 104614558B
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Abstract
The invention discloses a kind of, line CCD combine white light interference atomic force probe flying-spot microscope measuring system and measuring method, this measuring system comprises face, line CCD measuring system, atomic force probe flying-spot microscope assembly, interference light origin system, adjustment System and data handling system; Interference light origin system is transmitted in atomic force probe flying-spot microscope assembly for generation of the white light source of test, and it produces the interference fringe comprising sample message; Data handling system connects described, line CCD measuring system, analyzes described interference fringe, realizes the measurement interfering zero order fringe thus, thus obtains sample surface information.The white light interference atomic force probe flying-spot microscope measuring system that the face realized according to the present invention, line CCD combine and measuring method thereof, structure can be realized simple, high speed, high precision and high resolving power and intuitively measure, solve atomic force probe focusing difficulty thus, and the problem of the detection of atomic force probe micro-cantilever distortion.
Description
Technical field
The invention belongs to ultra-precision surface topography field, more specifically, relate to white light interference atomic force probe scanister and the measuring method thereof of a kind of application surface CCD and line CCD combination.
Background technology
In process technology constantly progress, interdisciplinary fusion is constantly deepened, new material development, the new material with ultra-precision surface also gets more and more, and the surface measurement of these new materials is also corresponding will mate corresponding surveying instrument, in such cases, atomic force probe flying-spot microscope has very high horizontal and vertical resolution because of it, low to environmental requirement, the many advantages little to the injury of sample surfaces, obtains applying more and more widely.
Adopt laser beam deflecting method to measure the distortion of the micro-cantilever in atomic force probe microscope in currently available technology, the result measured not only follows the distortion of atomic force probe about also following the distance dependent system between atomic force probe cantilever and receiver, therefore the scope of its measurement is little, light path not easily regulates, and measurement result needs to demarcate.
And another equipment measuring the distortion of the micro-cantilever in atomic force probe microscope of the prior art is white light interference atomic force probe flying-spot microscope, its zero order fringe in conjunction with white light interference measures the distortion of atomic force probe micro-cantilever, white light interference zero order fringe is formed when zero in optical path difference, therefore it is obvious relative to other fringe contrasts, and zero order fringe only has one, with it the distortion of atomic force probe micro-cantilever calculated and there is very strong theoretical foundation, and can not impact the location of zero order fringe due to the change of the entirety of white light light intensity, so this kind of method overcomes the defect of laser beam deflecting method, achieve large-range measuring.
And for utilizing the measuring method of white-light fringe, no matter be in the process of in earlier stage focusing or late time data processing procedure, to the accurate sampling of zero order fringe with locate most important, for the device of the sampling existed in currently available technology and location, all respectively there are its relative merits, how to accomplish to obtain large sampled data output in the measurements, wide measurement range, many quantity of information, and accomplish fast in the measurements, high-resolution collection, in real time display and fast response and accurately sampled measurements are problem demanding prompt solutions.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of, line CCD combine white light interference atomic force probe flying-spot microscope and measuring method, its object is to structure simple, high speed, high precision and high resolving power and intuitively measure, solve atomic force probe focusing difficulty thus, and the problem of the detection of atomic force probe micro-cantilever distortion.
For achieving the above object, according to one aspect of the present invention, provide a kind of, line CCD combine white light interference atomic force probe flying-spot microscope measuring system, it is characterized in that, this measuring system comprises face, line CCD measuring system, atomic force probe flying-spot microscope assembly, light-source system, adjustment System and data handling system;
Wherein face, line CCD measuring system, light-source system and atomic force probe flying-spot microscope assembly are fixed in adjustment System, and realize coarse adjustment and accurate adjustment by described adjustment System;
Light-source system is transmitted in atomic force probe flying-spot microscope assembly for generation of the white light source of test, and it produces the interference fringe comprising sample message; Described, line CCD measuring system receive described in comprise the interference fringe of sample message, data handling system connects described, line CCD measuring system, analyzes described interference fringe, realizes the measurement interfering zero order fringe thus, thus obtains sample surface information;
Face CCD wherein in face, line CCD measuring system and line CCD is in orthogonal light path by spectroscope, receive the identical interference fringe scanning micro-assembly from described atomic force probe, described CCD is used for the interference fringe of carrying described sample information of the described atomic force probe flying-spot microscope assembly generation of process in real time, described line CCD for the treatment of the zero order fringe in described interference fringe, thus realizes the measurement to described sample surfaces.
Further, described line CCD and face CCD is 90 degree relative to spectroscope, its center line CCD and be also respectively arranged with line CCD light cylinder and face CCD light cylinder between face CCD and described spectroscope, and by after condenser and the first reflective mirror with the light path UNICOM of described atomic force probe flying-spot microscope assembly, realize interference fringe reception measure.
Further, described adjustment System is divided into two-stage from top to bottom in vertical direction, and one-level is coarse adjustment mechanism, and secondary is fine adjustment mechanism; Described coarse adjustment mechanism comprises vertical coarse adjustment motor and pillar of marble, described coarse adjustment mechanism connects fine tuning structure by vertical coarse adjustment screw mandrel, fine tuning structure comprises vertical micromotion mechanism and vertical micro-displacement mechanism in vertical direction from top to bottom, arranges atomic force probe flying-spot microscope assembly under it.
Further, described atomic force probe flying-spot microscope assembly also comprises atomic force probe assembly, interference microscope head, described atomic force probe assembly is arranged at below described vertical micro-displacement mechanism, owing to realizing the accurate adjustment of atomic force probe and described sample distance.
Further, described light-source system comprises condenser successively, aperture diaphragm and field stop, illumination objective lens, optical filter, spectroscope, compensating plate, by the optical transport after described compensating plate to described interference microscope head.
Further, described tested sample is positioned on two-dimentional work bench, and it comprises X-direction motor and the Y-direction motor that can drive described sample movement along two-dimensional directional, realizes the scanning survey of described sample surface topography thus.
Present invention also offers and a kind ofly utilize above-mentioned, the method for white light interference atomic force probe flying-spot microscope measuring workpieces surface topography that combines of line CCD, it is characterized in that, the method comprises the steps:
(1) the atomic force probe micro-cantilever adjusted in atomic force probe assembly makes it immediately below interference microscope head, finds described atomic force probe micro-cantilever, make it be in the central authorities of face CCD by face CCD;
(2) regulate atomic force probe assembly by vertical direction, the white-light fringe that light-source system is produced can be received by described CCD, and is revised;
(3) sample is positioned on two-dimentional work bench, makes it be in immediately below atomic force scan-probe;
(4) atomic force probe focusing: regulate described atomic force scan-probe close to described sample by coarse tuning system, sampled by face CCD simultaneously, the light intensity difference of the light intensity on more described atomic force probe micro-cantilever and described sample background, until reach the threshold value of setting, then stop coarse adjustment and use described fine-tuned system instead carrying out accurate adjustment, now whether reach according to the amount of movement of the sampled result calculating zero order fringe of line CCD another threshold value chosen, then focused until reach the threshold value chosen;
(5) two-dimentional work bench is driven, described sample is driven to move on two dimensional surface, surface topography due to described sample can cause the distortion of described atomic force probe micro-cantilever, thus cause the movement of zero order fringe, now line CCD draws the amount of movement of zero order fringe by high speed acquisition data, and the deflection of probe cantilevers is calculated according to the amount of movement of zero order fringe, obtain the shape characteristic on sample surface thus, complete measurement.
In general, the above technical scheme conceived by the present invention compared with prior art, owing to have employed the combination measurement of face, line CCD, can obtain following beneficial effect:
(1) take full advantage of the high precision of white light interference and the characteristic of zero order fringe unchangeability, propose a kind of for zero order fringe detect more accurate, the method for real-time monitored and detection faster;
(2) propose employing face, line CCD combination measure mode, and corresponding this combination proposes the light path design of face, line CCD, make full use of and combine face CCD big data quantity sampling advantage, and the advantage of quick, the accurate and high resolving power sampling of line CCD, achieve the automatic measurement of atomic force probe flying-spot microscope.
Accompanying drawing explanation
Fig. 1 be according to the present invention realize face, line CCD combine white light interference atomic force probe flying-spot microscope one-piece construction schematic diagram;
Fig. 2 be according to the present invention realize face, line CCD combine white light interference atomic force probe flying-spot microscope in interference microscope head produce interfere schematic diagram;
Fig. 3 be according to the present invention realize face, line CCD combine white light interference atomic force probe flying-spot microscope in optical path structural drawing.
In all of the figs, identical Reference numeral is used for representing identical element or structure, wherein:
The motor 4-atomic force probe assembly 5-interference microscope head 6-first catoptron 7-condenser 8-spectroscope 9-line CCD light cylinder 10-line CCD 11-face CCD light cylinder 12-face CCD 13-vertical coarse adjustment motor 14-pillar of marble 15-white light source 16-vertical coarse adjustment screw mandrel 17-light source light cylinder in the motor 3-X direction in 1-two-dimentional work bench 2-Y direction and optical module 18-vertical micromotion mechanism 19-second catoptron 20-vertical direction micro-displacement mechanism 21-atomic force scan-probe 22-main control system 23-interference microscope lens 24-interference microscope spectroscope 25-atomic force probe micro-cantilever surface 26-interference microscope reflective 27-condenser 28-aperture diaphragm and field stop 29-scintilloscope 30-illumination objective lens 31-prism of corner cube 32-spectroscope 33-compensating plate.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Face involved in the present invention, line CCD combination metering system comprise 5 parts: be specially face, line CCD measuring system, atomic force probe flying-spot microscope assembly, interference light origin system, adjustment System and data handling system.
As shown in Figure 1, the parts that wherein each major part comprises are specially:
Face, line CCD measuring system: face CCD12, face CCD light cylinder 11, line CCD10, line CCD light cylinder 9, spectroscope 8, condenser 7, first catoptron 6;
Atomic force probe flying-spot microscope assembly: microlens 5, atomic force probe assembly 4, wherein atomic force probe assembly comprises atomic force scan-probe 21;
Light-source system: white light source 15, light source light cylinder and optical module 17, second catoptron 19;
Adjustment System: adjustment System is divided into coarse tuning system and fine-tuned system, wherein coarse tuning system comprises stepper motor 13, pillar of marble 14, vertical coarse adjustment screw mandrel 16, wherein vertical coarse adjustment screw mandrel 16 connects fine-tuned system, and wherein fine-tuned system comprises vertical micromotion mechanism 18, vertical direction micro-displacement mechanism 20.
Data handling system: comprise the main control system 22 interference fringe being carried out to Treatment Analysis.
Whole adjustment System is driven by stepper motor 13, realize the coarse adjustment campaign in vertical direction, wherein vertical coarse adjustment motor 13 is connected with vertical coarse adjustment screw mandrel 16 by pillar of marble 14, the below of vertical coarse adjustment screw mandrel 16 arranges fine-tuning mechanism, fine-tuning mechanism comprises vertical micromotion mechanism 18, vertical micro-displacement mechanism 20 is also included below it, microcobjective 5 is interfered to be fixed on vertical micro-displacement mechanism 20 with atomic force probe assembly 4, by realizing nano level motion under the acting in conjunction of the piezoelectric ceramics in vertical micro-displacement mechanism 20 and flexible hinge, thus drive the associated movement thus the accurate adjustment realized in vertical direction of interfering microcobjective 5 and atomic force probe assembly 4.
Face CCD 12 is fixed on face CCD light cylinder 11, line CCD 10 fixes on online CCD light cylinder 9, they are jointly connected to inside and are equipped with on the workpiece of spectroscope 8, and it is fixed in adjustment System, can move up and down in vertical direction under the drive of vertical coarse adjustment motor 13.
In order to use face, line CCD camera in same measuring system simultaneously, and play two cameras advantage separately simultaneously, face CCD is vertically placed, line CCD and face CCD become the angle of 90 degree counterclockwise in XOZ plane, and by spectroscope 8, the interference light that interference microscope 5 produces is divided into two identical bundles, and be sent to face respectively, line CCD analyzes.
Wherein interfere the concrete structure of microcobjective 5 as shown in Figure 2, the pointolite that its role is to interference light origin system to produce forms interference fringe, and realize the measurement to sample surface according to the change of interference fringe on atomic force probe micro-cantilever surface 25, face CCD12 then interferes the whole interference fringe that produces of microcobjective 5 for showing, and line CCD10 is then for realizing the sampling of interference fringe to realize the quick position of zero order fringe and thus to realize the measurement of sample to the measurement of zero order fringe.
Atomic force scan-probe 21 is arranged on atomic force probe assembly 4, and atomic force probe assembly 4 and interference microscope 5 are all be fixed on vertical direction micro-displacement mechanism 20, and in order to prevent Abbe error, the axis between them arranges coincidence.
Atomic force scan-probe 21 a kind ofly utilizes the Van der Waals force between its nano level needle point and atom of sample surfaces to realize the distortion of atomic force probe micro-cantilever, thus the movement realizing white light interference zero order fringe is to reach high-precision measurement.
And the realization of white-light fringe, mainly measure after light gets on atomic force probe micro-cantilever, reflect back into interfere in microcobjective and go, form interference fringe with wherein reference light.The focal length of microcobjective is interfered to produce interference fringe as long as atomic force probe micro-cantilever reaches, the distance between atomic force probe micro-cantilever and interference microscope is regulated before measuring mainly through adjustment atomic force probe assembly 4, reach its focal range, thus realize the generation of interference fringe.
Wherein tested sample is positioned on two-dimentional work bench 1, and the two dimensional motion realized by the smart driving mechanism on two-dimentional work bench 1 in X, Y-direction, two dimensional motion in this both direction is realized by the motor 2 on the motor 3 of X-direction and Y-direction, and when the whole scannings realizing workpiece, not all-moving surface, line CCD, but move by the mobile sample that drives of two-dimentional work bench thus realize the scanning of sample.
Fig. 2 interferes microcobjective 5 to produce the schematic diagram of interference fringe in Fig. 1, through the pointolite that a series of optical element becomes, by interfering the lens 23 of microcobjective, arrive the spectroscope 24 of interfering microcobjective 5, be divided into two-way light, wherein a road light arrives the surface 25 of atomic force probe micro-cantilever, and another road reaches catoptron 26, the light reflected by atomic force probe micro-cantilever surface 25 and the light formation interference fringe reflected through catoptron 26.
As shown in Figure 3, for the light channel structure schematic diagram of measuring system realized according to the present invention, wherein white light source 15 forms pointolite through lens 27 and aperture diaphragm and field stop 28, pointolite again through catoptron 29 and illumination objective lens 30 angle of arrival cone prism 31 thus make light turn to 90 degree arrive spectroscopes 32, reach after compensating plate 33 in interference microscope 5 and form interference fringe.Interference fringe arrives spectroscope 8, and be divided into two-way light one road quilt cover CCD to receive, a road is received by line CCD.Thus reach the requirement of measurement.
The method utilizing interference atomic force probe flying-spot microscope measuring system of the present invention to realize measuring is:
First, regulate atomic force probe assembly 4, make atomic force scan-probe 21 reach the focal range of interfering microcobjective 5, form stable interference fringe clearly in place.Then, adjustment System is adjusted to suitable scope, now use auto-focusing, atomic force scan-probe 21 will according to description process above, realize auto-focusing, probe is made to reach the position suitable with workpiece to measure, wherein the first step of atomic force probe flying-spot microscope focusing is whether the light intensity comparing atomic force probe micro-cantilever surface by face CCD sampling reaches with the difference of the surperficial light intensity of sample the threshold value chosen and judge whether atomic force probe arrives the distance predetermined with sample, second step judges whether the amount of movement of zero order fringe reaches the threshold value chosen by line CCD sampling again.
Finally, horizontal two-dimension worktable essence displacement parameter is set.After starting to measure, now face CCD can the change of interference fringe in display measurement process in real time, and line CCD then passes through the change of the zero order fringe of interference fringe, calculates the height of sample.Shown by the pattern of computer system by surface of the work finally by measured data, complete measurement, above lift adjustment System.Separately it should be noted that, need before measuring to demarcate atomic force scan-probe 21, calibrate the deflection of zero order fringe diverse location representative.
According to embodiment of the present invention, from the problem not good enough to the accurate sampling of zero order fringe in the middle of prior art, propose a kind of means of novel this problem of solution, namely face is used, line CCD combinationally uses, and for both with the use of, utilize spectroscopic design light path, take full advantage of face, line CCD advantage separately, the sample rate of line CCD is fast, resolution is high, therefore the main amount of movement calculating white light interference zero order fringe with it, and in the process of test, metrical information is more fully expressed by the visualization measurement of face CCD, can the whole measuring process of real-time monitored, and can be verified result by face CCD.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. the white light interference atomic force probe flying-spot microscope measuring system that combines of a face, line CCD, it is characterized in that, this measuring system comprises face, line CCD measuring system, atomic force probe flying-spot microscope assembly, light-source system, adjustment System and data handling system;
Wherein face, line CCD measuring system, light-source system and atomic force probe flying-spot microscope assembly are fixed in adjustment System, and realize coarse adjustment and accurate adjustment by described adjustment System;
Light-source system is transmitted in atomic force probe flying-spot microscope assembly for generation of the white light source of test, and it produces the interference fringe comprising sample message; Described, line CCD measuring system receive described in comprise the interference fringe of sample message, data handling system connects described, line CCD measuring system, analyzes described interference fringe, realizes the measurement interfering zero order fringe thus, thus obtains sample surface information;
Face CCD wherein in face, line CCD measuring system and line CCD is in orthogonal light path by spectroscope (8), receive the identical interference fringe scanning micro-assembly from described atomic force probe, the interference fringe of carrying described sample information that described CCD (11) produces for processing described atomic force probe flying-spot microscope assembly in real time, described line CCD (12) for the treatment of the zero order fringe in described interference fringe, thus realizes the measurement to described sample surfaces.
2. face as claimed in claim 1, the white light interference atomic force probe flying-spot microscope measuring system that line CCD combines, it is characterized in that, described line CCD (11) and face CCD (12) relative to spectroscope (8) in 90 degree, its center line CCD (11) and be also respectively arranged with line CCD light cylinder (9) and face CCD light cylinder (11) between face CCD (12) and described spectroscope (8), and by condenser (7) and the first reflective mirror (6) afterwards with the light path UNICOM of described atomic force probe flying-spot microscope assembly (2), the reception realizing interference fringe is measured.
3. the white light interference atomic force probe flying-spot microscope measuring system of face as claimed in claim 1 or 2, line CCD combination, it is characterized in that, described adjustment System is divided into two-stage from top to bottom in vertical direction, and one-level is coarse adjustment mechanism, and secondary is fine adjustment mechanism; Described coarse adjustment mechanism comprises vertical coarse adjustment motor (13) and pillar of marble (14), described coarse adjustment mechanism connects fine adjustment mechanism by vertical coarse adjustment screw mandrel (16), fine adjustment mechanism comprises vertical micromotion mechanism (18) and vertical micro-displacement mechanism (20) in vertical direction from top to bottom, arranges atomic force probe flying-spot microscope assembly under it.
4. the white light interference atomic force probe flying-spot microscope measuring system of face as claimed in claim 3, line CCD combination, it is characterized in that, described atomic force probe flying-spot microscope assembly also comprises atomic force probe assembly (4), interference microscope head (5), described atomic force probe assembly (4) is arranged at described vertical micro-displacement mechanism (20) below, owing to realizing the accurate adjustment of atomic force probe and described sample distance.
5. the white light interference atomic force probe flying-spot microscope measuring system of face as claimed in claim 4, line CCD combination, it is characterized in that, described light-source system comprises condenser (27) successively, aperture diaphragm and field stop (28), illumination objective lens (30), optical filter, spectroscope (32), compensating plate (33), by the optical transport after described compensating plate (33) to described interference microscope head (5).
6. the white light interference atomic force probe flying-spot microscope measuring system of face as claimed in claim 5, line CCD combination, it is characterized in that, described tested sample is positioned on two-dimentional work bench, it comprises X-direction motor (3) and the Y-direction motor (2) that can drive described sample movement along two-dimensional directional, realizes the scanning survey of described sample surface topography thus.
7. a method for the white light interference atomic force probe flying-spot microscope measuring workpieces surface topography of the face of utilization as described in claim 1-6, line CCD combination, it is characterized in that, the method comprises the steps:
(1) the atomic force probe micro-cantilever adjusted in atomic force probe assembly (4) makes it immediately below interference microscope head (5), find described atomic force probe micro-cantilever by face CCD (11), make it be in the central authorities of face CCD;
(2) regulate atomic force probe assembly (4) by vertical direction, the white-light fringe that light-source system is produced can be received by described CCD (11), and is revised;
(3) sample is positioned on two-dimentional work bench (1), makes it be in immediately below atomic force scan-probe (21);
(4) atomic force probe focusing: regulate described atomic force scan-probe (21) close to described sample by coarse adjustment mechanism, sampled by face CCD simultaneously, the light intensity difference of the light intensity on more described atomic force probe micro-cantilever and described sample background, until reach the threshold value of setting, then stop coarse adjustment and use described fine adjustment mechanism instead carrying out accurate adjustment, now whether reach according to the amount of movement of the sampled result calculating zero order fringe of line CCD another threshold value chosen, then focused until reach the threshold value chosen;
(5) two-dimentional work bench (1) is driven, described sample is driven to move on two dimensional surface, surface topography due to described sample can cause the distortion of described atomic force probe micro-cantilever, thus cause the movement of zero order fringe, now line CCD draws the amount of movement of zero order fringe by high speed acquisition data, and the deflection of probe cantilevers is calculated according to the amount of movement of zero order fringe, obtain the shape characteristic on sample surface thus, complete measurement.
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105242074B (en) * | 2015-10-26 | 2016-06-22 | 华中科技大学 | One white light interference atomic force probe of can tracing to the source is automatically positioned workpiece method |
| CN106680151A (en) * | 2015-11-05 | 2017-05-17 | 无锡鼎立光测科技有限公司 | Solar battery oxidation membrane hydrophilic angle determinator |
| CN105674911A (en) * | 2016-01-27 | 2016-06-15 | 淮安普瑞精仪科技有限公司 | Non-contact type micro-nano 3D measuring method and device |
| CN105699704B (en) * | 2016-03-15 | 2016-12-14 | 华中科技大学 | The imaging automatic regulating apparatus of a kind of white light interference atomic force probe system and control method thereof |
| CN106199079B (en) * | 2016-09-05 | 2018-05-18 | 华中科技大学 | A kind of white light interference atomic force microscope automatic calibration system and automatic calibration method |
| EP3324194B1 (en) * | 2016-11-22 | 2019-06-26 | Anton Paar GmbH | Imaging a gap between sample and probe of a scanning probe microscope in substantially horizontal side view |
| US10838191B2 (en) * | 2016-12-21 | 2020-11-17 | Carl Zeiss Microscopy Gmbh | Method of operating a microscope |
| CN106767521B (en) * | 2017-03-17 | 2023-04-07 | 洛阳理工学院 | Vertical scanning measurement white light interference measuring head |
| CN106842534B (en) * | 2017-03-22 | 2019-12-24 | 上海理工大学 | Automatic focusing microscope based on double CCD and measuring method |
| CN111077347B (en) * | 2019-12-25 | 2022-05-03 | 北京航空航天大学 | Atomic force microscopy probe clamping device |
| CN111854638B (en) * | 2020-07-23 | 2021-06-04 | 华中科技大学 | Cross-scale micro-nano structure three-dimensional measurement device and measurement method |
| CN115046474B (en) * | 2022-05-20 | 2023-03-10 | 浙江大学 | System and method for measuring inner and outer surfaces of tubular part |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1587982A (en) * | 2004-09-07 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Modular atomic force microscope |
| CN103674977A (en) * | 2013-12-24 | 2014-03-26 | 中国科学院自动化研究所 | Detection device for detecting surface damage of large-diameter optical element and corresponding detection method thereof |
| JP2014081228A (en) * | 2012-10-15 | 2014-05-08 | Mitsutoyo Corp | Shape measurement device |
| CN203643473U (en) * | 2013-10-28 | 2014-06-11 | 天津大学 | Atomic force microscope probe with two dimension scan function |
| CN103983205A (en) * | 2014-04-30 | 2014-08-13 | 天津大学 | Composite measurement system and measurement method for micro-array complex surface optical element |
-
2015
- 2015-02-05 CN CN201510061415.4A patent/CN104614558B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1587982A (en) * | 2004-09-07 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Modular atomic force microscope |
| JP2014081228A (en) * | 2012-10-15 | 2014-05-08 | Mitsutoyo Corp | Shape measurement device |
| CN203643473U (en) * | 2013-10-28 | 2014-06-11 | 天津大学 | Atomic force microscope probe with two dimension scan function |
| CN103674977A (en) * | 2013-12-24 | 2014-03-26 | 中国科学院自动化研究所 | Detection device for detecting surface damage of large-diameter optical element and corresponding detection method thereof |
| CN103983205A (en) * | 2014-04-30 | 2014-08-13 | 天津大学 | Composite measurement system and measurement method for micro-array complex surface optical element |
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