CN104315985A - Interference measuring method for thickness of center of lens - Google Patents
Interference measuring method for thickness of center of lens Download PDFInfo
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- CN104315985A CN104315985A CN201410586538.5A CN201410586538A CN104315985A CN 104315985 A CN104315985 A CN 104315985A CN 201410586538 A CN201410586538 A CN 201410586538A CN 104315985 A CN104315985 A CN 104315985A
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Abstract
The invention discloses an interference measuring method for the thickness of the center of a lens. The method includes the steps that first, the measured lens is moved, and parallel beams emitted from an interferometer can be converged on the surface of the measured lens after passing through a standard lens; afterwards, double circuits of ranging interferometers are used for conducting distance measurement and surface shape error compensation, the position coordinates which are positioned twice at the vertex of the front surface and the vertex of the rear surface of the measured lens are acquired, and then a ray tracing formula is used for calculating the thickness of the center of the lens. The measuring device used in the method comprises the interferometer, the standard objective lens, a laser range finder, a five-dimensional adjusting rack and a moving guide rail. The standard objective lens and the measured lens are sequentially placed in the emergent ray direction of a light source of the interferometer. The measured lens is fixed on the five-dimensional adjusting rack and can move on the guide rail. According to the interference measuring method for the thickness of the center of the lens, the interference method is used for conducting surface positioning and position compensation on the lens, and thus non-contact measurement of the thickness of the center of the lens can be achieved.
Description
Technical field
The invention belongs to field of optical measuring technologies, what be specifically related to is a kind of lens center thickness interferometric method.
Background technology
In optical field, the measurement of lens center thickness is significant.Lens center thickness is one of important parameter for optical element, and the quality of its crudy can produce considerable influence to the image quality of optical system.Current lens center thickness measuring technique can be divided into contact type measurement and non-contact measurement.
Contact type measurement, the gage measurings such as usual use clock gauge, milscale, altitude gauge, during measurement, checker needs the measured lens that moves around, to find the position of lens center point, therefore measuring speed is slow, add the impact of the factor such as ergometry and lens own wt, very easily cause the defects such as measured lens surface scratch, especially optical elements of large caliber.
Non-contact measurement, mainly contains coplanar capacitance method, image measurement method, polarized light interference method and laser differential confocal method at present.
In " optical lens center thickness automatic tester " literary composition delivered in " Chinese journal of scientific instrument " for 1994, coplanar capacitance method is adopted to measure lens center thickness, but the method needs accurately to test coplanar capacitance gauge head, obtain authentic data as detection foundation; In " the fit-up gap Research on on-line-measuring based on the image measurement technology " literary composition delivered on " sensor technology " for 2005, describe a kind of online test method based on image measurement technology to measure lens thickness, but this method affects by CCD resolution, camera imaging system, calibration system precision and clear picture degree etc., and measuring error is larger; (patent No.: 93238743.8), utilizes polarized light interference method to measure lens thickness to Chinese patent " a kind of measurement mechanism of micro-optical space ", is subject to measurement environment impact, at present only for measuring glass plate thickness during the method actual measurement.In Chinese patent " differential confocal lens center thickness measuring method and device " (publication number: 101793500A), utilize differential confocal light cone to position lens surface summit, the contactless high-precision that can realize lens center thickness is measured.
The present invention utilizes the parallel beam of interferometer outgoing to converge to measured lens front surface and rear surface respectively, positioned by observation interference fringe and face shape error out of focus item, and the position coordinates that distance measuring interferometer measurement obtains is revised, calculate measured lens center thickness.The inventive method can be measured the center thickness of planar lens, spherical lens, have easy and simple to handle, efficiently, do not damage measured lens surface etc. advantage.
Summary of the invention
The contactless high-precision that the object of the invention is to solve lens center thickness measures problem, a kind of lens center thickness interferometric method is proposed, the present invention is based on ray tracing formulas, interference fringe and face shape error out of focus item is utilized to determine and revise the intersection point of measured lens front surface and optical axis, rear surface and optical axes crosspoint position, then the position of measured lens and the measured lens front surface radius-of-curvature recorded in advance, the focal length of standard object lens and clear aperture is utilized, ray tracing is carried out to measured lens, then realizes the measurement of measured lens center thickness.
The object of the invention is to be achieved through the following technical solutions:
A kind of lens center thickness interferometric method of the present invention, its concrete steps are as follows:
Step one, measured lens to be arranged on five dimension adjustment racks, then five dimension adjustment racks are arranged on guide rail, simultaneously symmetrical between five dimension adjustment racks and interferometer two-way distance measuring interferometer is installed, adjust distance measuring interferometer measuring beam and guide rail parallel;
Step 2, open interferometer, produce horizontal survey light beam; Adjustment measured lens is coaxial with standard object lens, and adjusts standard object lens and measured lens perpendicular to parallel beam;
Step 3, measuring beam is made to focus on measured lens front surface; Detailed process is:
On the basis of step one, two operations, measuring beam is assembled by standard object lens, arrives measured lens front surface, after the reflection of measured lens front surface, to return along symmetrical light path position, reflection ray, through standard object lens, forms interference fringe with the reference beam in interferometer; Move measured lens in the direction of the optical axis, the face shape error out of focus item that interferometer is detected is approximately zero, and now measuring beam focuses on measured lens front surface, records now face shape error out of focus item p
1, and by the position z of distance measuring interferometer record now measured lens
1;
Step 4, time measuring beam focus on measured lens rear surface; Detailed process is:
On the basis of step one, two operations, measuring beam is assembled by standard object lens, arrives measured lens rear surface, after the reflection of measured lens rear surface, to return along symmetrical light path position, reflection ray, through standard object lens, forms interference fringe with the reference beam in interferometer; Move measured lens in the direction of the optical axis, the face shape error out of focus item that interferometer is detected is approximately zero, and now measuring beam focuses on measured lens rear surface, records now face shape error out of focus item p
2, and by the position z of distance measuring interferometer record now measured lens
2;
Step 5, obtain the center thickness d of measured lens;
The position z of the measured lens obtained by step 3, four
1and z
2, and measured lens front surface and rear surface face shape error out of focus item p
1and p
2, in conjunction with radius-of-curvature r, the air refraction n of measured lens front surface
0, measured lens refractive index n
1, the focal distance f ' of standard object lens and clear aperture D, use the method for ray tracing to obtain the center thickness of measured lens.
Further, a kind of lens center thickness interferometric method of the present invention, the concrete steps that described use ray tracing method accurately obtains the center thickness d of measured lens are:
U＝arctan(D/2f′) (1)
Wherein, U is the angle (numerical aperture angle) of measured lens front surface incident ray and optical axis; The clear aperture of parallel beam when D is measurement;
L＝|z
2-z
1+8×(f′/D)
2×(p
2-p
1)| (2)
Wherein, L is the distance of intersection point to measured lens front surface and optical axes crosspoint of measured lens front surface incident ray and optical axis;
When measured lens is spherical lens,
Wherein, r is the radius-of-curvature of measured lens front surface; n
0for air refraction, n
1for the refractive index of measured lens; The angle that U ' is measured lens front surface emergent ray and optical axis; The focus that L ' is measured lens front surface emergent ray and optical axis is to the distance of measured lens front surface and optical axes crosspoint, that is: measured lens front surface and optical axes crosspoint are to the distance of measured lens rear surface and optical axes crosspoint, also the center thickness d of i.e. measured lens;
By bringing formula 1 and formula 2 into formula 3 and formula 4, the center thickness of tested spherical lens can be obtained.
When measured lens is planar lens,
Wherein, n
0for air refraction, n
1for the refractive index of measured lens; U is the angle of measured lens front surface incident ray and optical axis; The focus that L ' is measured lens front surface emergent ray and optical axis is to the distance of measured lens front surface and optical axes crosspoint, that is: measured lens front surface and optical axes crosspoint are to the distance of measured lens rear surface and optical axes crosspoint, also the center thickness d of i.e. measured lens;
By bringing formula 1 and formula 2 into formula 5, the center thickness of tested planar lens can be obtained.
Further, a kind of lens center thickness interferometric method of the present invention, the face shape error out of focus item location of the measured lens front surface obtained by interferometer measurement and rear surface, and utilize the position coordinates that the measurement of face shape error out of focus item correction distance measuring interferometer obtains;
Further, a kind of lens center thickness interferometric method of the present invention, can measure the center thickness of concavees lens, convex lens and planar lens;
Further, a kind of lens center thickness interferometric method of the present invention, described symmetrical two-path DME interferometer can also be replaced with single channel distance measuring interferometer, and this single channel distance measuring interferometer directly can be installed on the five dimension adjustment rack back sides along optical axis;
Further, a kind of lens center thickness interferometric method of the present invention, comprise interferometer, standard object lens, measured lens, distance measuring interferometer, five dimension adjustment rack and guide rails, wherein standard object lens and measured lens are successively placed on interferometer emergent ray direction, and standard object lens and measured lens are perpendicular to interferometer emergent ray direction; The measuring beam of distance measuring interferometer, guide rail are all parallel to interferometer emergent ray direction.
The present invention contrasts prior art and has following innovative point:
(1) this lens center thickness measuring method utilizes interference fringe to realize contactless high-precision location to measured lens surface, not lens damage surface, the advantages such as measuring speed is fast.
(2) the out of focus item of the measured lens surface face shape error utilizing interferometry to obtain, can revise the lens surface positions that distance measuring interferometer measurement obtains.
(3) the present invention can measure the center thickness of concavees lens, convex lens and planar lens.
Accompanying drawing explanation
Fig. 1 is measurement mechanism schematic diagram of the present invention;
Fig. 2 is concavees lens thickness measure embodiment schematic diagram of the present invention;
Fig. 3 is concavees lens thickness measure embodiment interference pattern of the present invention;
Fig. 4 is planar lens thickness measure embodiment schematic diagram of the present invention;
Fig. 5 is planar lens thickness measure embodiment interference pattern of the present invention;
Wherein: 1-interferometer, 2-standard object lens, 3-measured lens, 4-distance measuring interferometer, 5-five tie up adjustment rack, 6-measured lens front surface, 7-measured lens rear surface, 8-guide rail.
Embodiment
Below in conjunction with drawings and Examples, the present invention is elaborated
Basic thought of the present invention utilizes interference fringe and face shape error accurately to locate lens surface summit, realizes lens center thickness and measure, and utilize face shape error out of focus item to revise measurement result.
Embodiment one
As shown in Figure 1 and Figure 2, concavees lens center thickness interferometric method, its measuring process is:
First, be arranged on by tested concavees lens on five dimension adjustment racks 5, then be arranged on guide rail 8 by five dimension adjustment racks 5, between five dimension adjustment racks 5 and interferometer 1, symmetry installs two-way distance measuring interferometer 4 simultaneously, and adjustment distance measuring interferometer 4 measuring beam is parallel with guide rail 8.Known correlation parameter, it mainly comprises radius-of-curvature r=423.684mm, the air refraction n of tested concavees lens front surface 6
0=1 and tested concavees lens 3 refractive index n
1=1.51466.
Then, interferometer 1 is opened; Adjust tested concavees lens 3 coaxial with standard object lens 2, and adjust standard object lens 2 with tested concavees lens 3 perpendicular to incoming parallel beam; Known standard object lens 2 clear aperture D=100mm, focal distance f '=80mm.Be divided into two parts by the parallel beam of interferometer 1 outgoing, a part of light directly reflects on standard object lens 2 surface, and another part light beam reflects after converging at tested concavees lens 3 surface by standard object lens 2.Two bundle reflected light meet in interferometer 1, produce interference fringe.
In measuring process, tested concavees lens 3 scan movement in the direction of the optical axis along guide rail 8.Overlap with tested concavees lens 3 front and rear surfaces summit by observing interference fringe and the face shape error out of focus item size object lens 2 outgoing beam summit that settles the standard, and be recorded in the position coordinates z of two tested concavees lens 3 in coincide point place with this
1, z
2and face shape error out of focus item p
1, p
2, tested concavees lens upper and lower surface interference pattern as shown in Figure 3.
According to known parameters: the radius-of-curvature r of tested concavees lens front surface 6, air refraction n
0, tested concavees lens 3 refractive index n
1, numerical aperture angle U=arctan (D/2f ') of combined standard object lens 2 measuring beam, twice location amount of movement L=|z
2-z
1+ 8 × (f '/D)
2× (p
2-p
1) |, use following formula:
Calculate the center thickness d of tested concavees lens 3.
The present embodiment gained position coordinates is respectively z
1=-249.8066mm, z
2=-268.8087mm, face shape error out of focus item is respectively p
1=0.5nm, p
2=3461.1nm.Substitute into computing formula, lens center thickness d=30.6275mm can be obtained.
Embodiment two
As Figure 1 and Figure 4, planar lens center thickness interferometric method, its measuring process is:
First, be arranged on by tested planar lens on five dimension adjustment racks 5, then be arranged on guide rail 8 by five dimension adjustment racks 5, between five dimension adjustment racks 5 and interferometer 1, symmetry installs two-way distance measuring interferometer 4 simultaneously, adjustment distance measuring interferometer 4 measuring beam and guide rail parallel.Known correlation parameter, it mainly comprises air refraction n
0=1 and tested planar lens 3 refractive index n
1=1.51466.
Then, interferometer 1 is opened; Adjust tested planar lens 3 coaxial with standard object lens 2, and adjust standard object lens 2 with tested planar lens 3 perpendicular to incoming parallel beam; Known standard object lens 2 clear aperture D=100mm, focal distance f '=80mm.Be divided into two parts by the parallel beam of interferometer 1 outgoing, a part of light directly reflects on standard object lens 2 surface, and another part light beam reflects after converging at tested planar lens 3 surface by standard object lens 2.Two bundle reflected light meet in interferometer 1, produce interference fringe.
In measuring process, tested planar lens 3 scans movement in the direction of the optical axis along guide rail 8.Overlap with tested planar lens 3 front and rear surfaces by observing interference fringe and the face shape error out of focus item size object lens 2 outgoing beam summit that settles the standard, and be recorded in the position coordinates z of two tested planar lenss 3 in coincide point place with this
1, z
2and face shape error out of focus item p
1, p
2, tested planar lens upper and lower surface interference pattern as shown in Figure 5.
According to known parameters: air refraction n
0, tested planar lens 3 refractive index n
1, numerical aperture angle U=arctan (D/2f ') of combined standard object lens 2 measuring beam, twice location amount of movement L=|z
2-z
1+ 8 × (f '/D)
2× (p
2-p
1) |, use following formula:
Calculate the center thickness d of tested planar lens 3.
The present embodiment gained position coordinates is respectively z
1=-259.7471mm, z
2=-269.8988mm, face shape error out of focus item is respectively p
1=-3.7nm, p
2=8827.6nm.Substitute into computing formula, lens center thickness d=16.9106mm can be obtained.
This embodiment achieves the non-cpntact measurement of sphere and planar lens center thickness by a series of measure, achieves the method for lens center thickness interferometry, has not injured surface, structure simple, the advantages such as sense cycle is short, easy to use.
Non-elaborated part of the present invention belongs to the known technology of those skilled in the art.
The above; be only the embodiment in the present invention; but protection scope of the present invention is not limited thereto; protection scope of the present invention is limited by the claims of enclosing; protection scope of the present invention is limited by the claims of enclosing, and any change on the claims in the present invention basis is all protection scope of the present invention.
Claims (6)
1. a lens center thickness interferometric method, is characterized in that: its concrete steps are as follows:
Step one, measured lens is arranged on five dimension adjustment racks (5), again five dimensions adjustment rack (5) are arranged on guide rail (8), between five dimension adjustment racks and interferometer, symmetry installs two-way distance measuring interferometer (4) simultaneously, and adjustment distance measuring interferometer (4) measuring beam is parallel with guide rail (8);
Step 2, open interferometer (1), produce horizontal survey light beam; Adjustment measured lens (3) is coaxial with standard object lens (2), and adjusts standard object lens (2) with measured lens (3) perpendicular to parallel beam;
Step 3, measuring beam is made to focus on measured lens front surface (6); Detailed process is:
On the basis of step one, two operations, measuring beam is assembled by standard object lens (2), arrive measured lens front surface (6), after measured lens front surface (6) reflection, to return along symmetrical light path position, reflection ray, through standard object lens (2), forms interference fringe with the reference beam in interferometer; Move measured lens (3) in the direction of the optical axis, the face shape error out of focus item that interferometer is detected is approximately zero, and now measuring beam focuses on measured lens front surface (6), records now face shape error out of focus item p
1, and the position z of now measured lens (3) is recorded by distance measuring interferometer (4)
1;
Step 4, measuring beam is made to focus on measured lens rear surface (7); Detailed process is:
On the basis of step one, two operations, measuring beam is assembled by standard object lens (2), arrive measured lens rear surface (7), after the reflection of measured lens rear surface (7), to return along symmetrical light path position, reflection ray, through standard object lens (2), forms interference fringe with the reference beam in interferometer; Move measured lens (3) in the direction of the optical axis, the face shape error out of focus item that interferometer is detected is approximately zero, and now measuring beam focuses on measured lens rear surface (7), records now face shape error out of focus item p
2, and the position z of now measured lens (3) is recorded by distance measuring interferometer (4)
2;
Step 5, obtain the center thickness d of measured lens (3);
The position z of the measured lens (3) obtained by step 3, four
1and z
2, and measured lens front surface (6) and rear surface (7) face shape error out of focus item p
1and p
2, in conjunction with radius-of-curvature r, the air refraction n of measured lens front surface (6)
0, measured lens refractive index n
1, standard object lens focal distance f ' and clear aperture D, use the method for ray tracing to obtain the center thickness of measured lens (3).
2. a kind of lens center thickness interferometric method as claimed in claim 1, is characterized in that: the concrete steps that described use ray tracing method accurately obtains the center thickness d of measured lens (3) are:
U＝arctan(D/2f′) (1)
Wherein, U is angle and the numerical aperture angle of measured lens front surface (6) incident ray and optical axis; The clear aperture of parallel beam when D is measurement;
L＝|z
2-z
1+8×(f′/D)
2×(p
2-p
1)| (2)
Wherein, L is the distance of intersection point to measured lens front surface (6) and optical axes crosspoint of measured lens front surface (6) incident ray and optical axis;
When measured lens is spherical lens,
Wherein, r is the radius-of-curvature of measured lens front surface (6); n
0for air refraction, n
1for the refractive index of measured lens (3); The angle that U ' is measured lens front surface (6) emergent ray and optical axis; The intersection point that L ' is measured lens front surface (6) emergent ray and optical axis is to the distance of measured lens front surface (6) with optical axes crosspoint, that is: measured lens front surface (6) and optical axes crosspoint are to measured lens rear surface (7) distance with optical axes crosspoint, are also the center thickness d of measured lens (3);
By bringing formula 1 and formula 2 into formula 3 and formula 4, the center thickness of tested spherical lens (3) can be obtained;
When measured lens is planar lens,
Wherein, n
0for air refraction, n
1for the refractive index of measured lens (3); U is the angle of measured lens front surface (6) incident ray and optical axis; The focus that L ' is measured lens front surface (6) emergent ray and optical axis is to the distance of measured lens front surface (6) with optical axes crosspoint, that is: measured lens front surface (6) and optical axes crosspoint are to measured lens rear surface (7) distance with optical axes crosspoint, are also the center thickness d of measured lens (3);
By bringing formula 1 and formula 2 into formula 5, the center thickness of tested planar lens (3) can be obtained.
3. a kind of lens center thickness interferometric method as claimed in claim 1 or 2, it is characterized in that: the face shape error out of focus item location being measured measured lens front surface (6) and rear surface (7) obtained by interferometer (1), and utilize face shape error out of focus item correction distance measuring interferometer (4) to measure the position coordinates obtained.
4. a kind of lens center thickness interferometric method as claimed in claim 1 or 2, is characterized in that: the center thickness can measuring concavees lens, convex lens and planar lens.
5. a kind of lens center thickness interferometric method as claimed in claim 1, it is characterized in that: described symmetrical two-way distance measuring interferometer (4) can also be replaced with single channel distance measuring interferometer, and this single channel distance measuring interferometer directly can be installed on the five dimension adjustment rack back sides along optical axis.
6. a kind of lens center thickness interferometric method as claimed in claim 1 or 2, it is characterized in that: comprise interferometer (1), standard object lens (2), measured lens (3), distance measuring interferometer (4), five dimension adjustment rack (5) and guide rails (8), wherein standard object lens (2) and measured lens (3) are successively placed on interferometer (1) emergent ray direction, and standard object lens (2) and measured lens (3) are perpendicular to interferometer (1) emergent ray direction; Measuring beam, the guide rail (8) of distance measuring interferometer (4) are all parallel to interferometer (1) emergent ray direction.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105203036A (en) * | 2015-10-22 | 2015-12-30 | 茂莱（南京）仪器有限公司 | Device and method for measuring thickness of center of lens according to non-contact method |
| CN105466345A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical lens center thickness measuring method based on thickness reference transmission |
| CN106441122A (en) * | 2016-10-09 | 2017-02-22 | 佛山市北创光电科技有限公司 | Thickness gauge |
| CN108895972A (en) * | 2018-06-27 | 2018-11-27 | 中国科学院光电技术研究所 | A kind of method and apparatus based on the optical element vertex radius measurement for calculating holography |
| CN110375669A (en) * | 2019-07-18 | 2019-10-25 | 武汉优光科技有限责任公司 | A kind of test method and test device of focal length lens curvature |
| CN111272085A (en) * | 2020-03-13 | 2020-06-12 | 南京理工大学 | Automatic detection device and method for center thickness of optical part |
| CN113029022A (en) * | 2021-02-25 | 2021-06-25 | 中国人民解放军国防科技大学 | Shape and position error interference measurement device and method for transparent hemispherical shell part |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009158067A (en) * | 2007-12-27 | 2009-07-16 | Toshiba Corp | Spherical aberration correction apparatus and spherical aberration correction method |
| CN101769821A (en) * | 2010-02-04 | 2010-07-07 | 北京理工大学 | Lens refractive index and thickness measuring method and device based on differential confocal technology |
| US20100177401A1 (en) * | 2009-01-15 | 2010-07-15 | Kabushiki Kaisha Toshiba | Erect life-size lens array |
| CN102435146A (en) * | 2011-12-08 | 2012-05-02 | 广州标旗电子科技有限公司 | Optical lens center thickness measuring system and method |
-
2014
- 2014-10-27 CN CN201410586538.5A patent/CN104315985B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009158067A (en) * | 2007-12-27 | 2009-07-16 | Toshiba Corp | Spherical aberration correction apparatus and spherical aberration correction method |
| US20100177401A1 (en) * | 2009-01-15 | 2010-07-15 | Kabushiki Kaisha Toshiba | Erect life-size lens array |
| CN101769821A (en) * | 2010-02-04 | 2010-07-07 | 北京理工大学 | Lens refractive index and thickness measuring method and device based on differential confocal technology |
| CN102435146A (en) * | 2011-12-08 | 2012-05-02 | 广州标旗电子科技有限公司 | Optical lens center thickness measuring system and method |
Non-Patent Citations (2)
| Title |
|---|
| 史立波等: "激光差动共焦透镜中心厚度测量系统的研制", 《仪器仪表学报》 * |
| 杜炎雄等: "玻片厚度对迈克尔孙干涉仪干涉条纹的影响", 《物理实验》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105203036A (en) * | 2015-10-22 | 2015-12-30 | 茂莱（南京）仪器有限公司 | Device and method for measuring thickness of center of lens according to non-contact method |
| CN105203036B (en) * | 2015-10-22 | 2018-08-28 | 茂莱（南京）仪器有限公司 | The device and method that eyes with non-contact method measures lens centre thickness |
| CN105466345A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical lens center thickness measuring method based on thickness reference transmission |
| CN106441122A (en) * | 2016-10-09 | 2017-02-22 | 佛山市北创光电科技有限公司 | Thickness gauge |
| CN108895972A (en) * | 2018-06-27 | 2018-11-27 | 中国科学院光电技术研究所 | A kind of method and apparatus based on the optical element vertex radius measurement for calculating holography |
| CN110375669A (en) * | 2019-07-18 | 2019-10-25 | 武汉优光科技有限责任公司 | A kind of test method and test device of focal length lens curvature |
| CN110375669B (en) * | 2019-07-18 | 2020-12-29 | 武汉优光科技有限责任公司 | Method and device for testing curvature of telephoto lens |
| CN111272085A (en) * | 2020-03-13 | 2020-06-12 | 南京理工大学 | Automatic detection device and method for center thickness of optical part |
| CN113029022A (en) * | 2021-02-25 | 2021-06-25 | 中国人民解放军国防科技大学 | Shape and position error interference measurement device and method for transparent hemispherical shell part |
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