CN103822605A - One-time splicing measurement device of large-aperture optical element profile - Google Patents
One-time splicing measurement device of large-aperture optical element profile Download PDFInfo
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- CN103822605A CN103822605A CN201410098960.6A CN201410098960A CN103822605A CN 103822605 A CN103822605 A CN 103822605A CN 201410098960 A CN201410098960 A CN 201410098960A CN 103822605 A CN103822605 A CN 103822605A
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- 238000000034 method Methods 0.000 abstract description 11
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- 230000004886 head movement Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 5
- 239000010438 granite Substances 0.000 description 5
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- 230000005622 photoelectricity Effects 0.000 description 1
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Abstract
The invention provides a one-time splicing measurement device of a large-aperture optical element profile, relating to a measurement device of an optical element profile. The one-time splicing measurement device is provided with a Y-axis linear motor, Y-axis linear guide rails, a base, a movement controller, a stand column, a cross beam, a measurement sensor, a linear motion lead screw nut pair, a coupling, a measuring head movement driving motor, Z-axis linear guide rails, a Z-axis linear motor, a measuring head connecting base, a Z-axis workbench, an X-axis workbench, X-axis linear guide rails, an X-axis linear motor, a workpiece, a workpiece rotary table, a connecting base, a rotary motor, a Y-axis workbench and a computer. The one-time splicing measurement device can realize one-time splicing measurement; particularly specific to a large-aperture workpiece, measurement steps are reduced by adopting the measurement device; the one-time splicing measurement device is simple in measurement process, high in measurement efficiency, simple and compact in structure and convenient to operate.
Description
Technical field
The present invention relates to a kind of measurement mechanism of optical element profile, especially relate to an a kind of splicing measuring device of optical elements of large caliber profile.
Background technology
In recent years, along with the development of photoelectricity and advanced manufacturing technology, the application of optical element on dual-use product is more and more universal, especially aperture aspherical optical elements, because having aberration correction, improve system relative aperture, expanding the superior functions such as field of view angle, simplied system structure, weight reduction, reduced volume, is widely used among In Astro-optical Systems, medical system, thermonuclear fusion, large telescope, Strong laser weapon system.
Be accompanied by the development of Computer Control Technology, the characterization processes of optical element has also obtained great promotion.The most frequently used in contact is exactly high-precision surface contourgraph, and measuring accuracy is high, but range is little, and this kind equipment is very expensive, maintenance and environment for use require very highly, cannot meet the measurement demand of optical elements of large caliber.In various contactless measurements, interferometric method is highly sensitive with it, and the appearance of the advanced technology such as compensating glass, calculation holographic, phase shift, heterodyne, phase-locked, strip-scanning becomes the main path that optical element detects always in addition.Interferometry is high to the requirement on machining accuracy of surface of the work, measure application limited, and bigbore interferometry equipment exist equally expensive, maintenance requirement is high, to problems such as domestic technique embargoes.Therefore the measurement that adopts existing small-bore high-acruracy survey equipment to carry out optical elements of large caliber is very necessary, namely splices measuring method.(referring to document: 1, Zhang Rongzhu, Yang Chunlin, Xu Qiao, Cai Bangwei. use stitching interferometry to detect optical elements of large caliber [J], optical technology, 2001,27(6): 516-517.)
The existing splicing measuring device of optical elements of large caliber and method are mainly sub-aperture stitching interferometer methods.Its ultimate principle is that tested bore is divided into some more small-bore sub-apertures, and the measurement range in sub-aperture can cover whole element, and slightly overlapping between each sub-aperture; Carry out zero-bit with the small-bore high precision interferometer antithetical phrase aperture of standard at every turn and interfere detection, by mobile tested element or interferometer aperture, record whole sub-aperture plane shapes, then adopt splicing to obtain unified testing result.Due to the limitation of interferometric method, the aspects such as cost, precision, efficiency and the demand to environment control of composite measurement instrument are considered, if adopt little stroke and high precision coordinate measurment instrument to carry out heavy caliber measurement, and carry out the recovery of face shape, for optical elements of large caliber, measurement has very strong realistic meaning, can facilitate quantification surface, improve processing and detect whole efficiency; Also greatly expand coordinate device measuring scope, and increase substantially use cost performance simultaneously.
Summary of the invention
The object of the invention is the problem existing while measuring optical elements of large caliber for existing coordinate measurment instrument, an a kind of splicing measuring device can realizing by once splicing the optical elements of large caliber profile that measurement can obtain optical elements of large caliber surface profile is provided.
The present invention is provided with Y-axis linear electric motors, Y-axis line slideway, base, motion controller, column, crossbeam, survey sensor, rectilinear motion feed screw nut pair, shaft coupling, gauge head motion drive motor, Z axis line slideway, Z axis linear electric motors, gauge head Connection Block, Z axis worktable, X-axis worktable, X-axis line slideway, X-axis linear electric motors, workpiece, work piece revolving platform, Connection Block, electric rotating machine, Y-axis worktable and computing machine;
Described Y-axis linear electric motors and Y-axis line slideway are located on base, column is positioned on base, in order to supporting traverse, X-axis worktable is fixed on crossbeam and by X-axis linear electric motors and drives, X-axis linear electric motors are located on X-axis line slideway, Z axis worktable is positioned on X-axis worktable and by Z axis linear electric motors and drives, Z axis linear electric motors are located on Z axis line slideway, gauge head Connection Block is positioned on Z axis worktable, shaft coupling connects gauge head motion drive motor and rectilinear motion feed screw nut pair, for the motion of control survey sensor, electric rotating machine is positioned on Y-axis worktable, electric rotating machine drives work piece revolving platform to rotate by Connection Block, computing machine and motion controller are all positioned on base, computing machine is measured track interlock interpolation by motion controller control X-axis linear electric motors and gauge head motion drive motor speed, making splicing areal survey track and the workpiece profile line of survey sensor is equal space line.
Described X-axis linear electric motors can adopt X-axis flat plate type linear motor, and described Y-axis linear electric motors can adopt Y-axis flat plate type linear motor, and described Z axis linear electric motors can adopt Z axis flat plate type linear motor.
The main body of described work piece revolving platform can adopt granite material.
Driving because X/Y/Z axle motion module adopts flat plate type linear motor, is a kind of electric energy to be directly changed into rectilinear motion mechanical energy, and without any need for the gearing of intermediate conversion mechanism, precision is high, without backlash.
Because the main body of work piece revolving platform adopts granite material, after grouan workplace is collided or scratches, only can produce pit, do not produce burr, burr, therefore on measuring accuracy without impact, linear expansion coefficient is little, temperature influence is little.The principal feature of granite flat board is stable accuracy, easy to maintenance, and the dull and stereotyped institutional framework of granite is dense, smooth surface is wear-resisting, roughness value is little.
Principle of work of the present invention and beneficial effect are as follows:
Once splice while measurement, first according to aperture of workpiece size, set splicing section length L and segmentation number N, select N survey sensor and corresponding once splicing gauge head motion, by certain size-spacing D(D<L) be fixed on gauge head Connection Block.Then according to the surface outline equation of workpiece, X-axis motor and the gauge head motion drive motor speed of controlling three-axis measurement platform via motion controller by computing machine are measured track interlock interpolation, and making the splicing areal survey track of each survey sensor and workpiece profile line is equal space line.The present invention is as long as mobile splicing section length L just can complete L+(N-1) the disposable splicing measurement of * D bore optical element profile.The present invention can realize once splicing and measure, and has reduced measuring process especially for large aperture workpiece, and measuring process is simple, measures efficiency high, simple and compact for structure, easy to operate.
Accompanying drawing explanation
Fig. 1 is the main TV structure schematic diagram of the embodiment of the present invention.
Fig. 2 is the once splicing segmenting principle figure of the embodiment of the present invention.
Fig. 3 is that reference position schematic diagram is measured in the once splicing of the embodiment of the present invention.
Fig. 4 is that end position schematic diagram is measured in the once splicing of the embodiment of the present invention.
Fig. 5 is that the concentric circles of the embodiment of the present invention is measured profile reference position schematic diagram.
Fig. 6 is that the concentric circles of the embodiment of the present invention is measured profile end position schematic diagram.
Below provide the mark of the each main accessory of each figure:
1-Y axle linear electric motors, 2-Y axle line slideway, 3-base, 4-motion controller, 5-column, 6-crossbeam, 7-survey sensor, 8-rectilinear motion feed screw nut pair, 9-shaft coupling, 10-gauge head motion drive motor, 11-Z axle line slideway, 12-Z axle linear electric motors, 13-gauge head Connection Block, 14-Z axle worktable, 15-X axle worktable, 16-X axle line slideway, 17-X axle linear electric motors, 18-workpiece, 19-work piece revolving platform, 20-Connection Block, 21-electric rotating machine, 22-Y axle worktable, 23-computing machine.
Embodiment
The present invention is further illustrated in connection with accompanying drawing for following examples.
The embodiment of the present invention is provided with Y-axis linear electric motors 1, Y-axis line slideway 2, base 3, motion controller 4, column 5, crossbeam 6, survey sensor 7, rectilinear motion feed screw nut pair 8, shaft coupling 9, gauge head motion drive motor 10, Z axis line slideway 11, Z axis linear electric motors 12, gauge head Connection Block 13, Z axis worktable 14, X-axis worktable 15, X-axis line slideway 16, X-axis linear electric motors 17, workpiece 18, work piece revolving platform 19, Connection Block 20, electric rotating machine 21, Y-axis worktable 22 and computing machine 23.
Described Y-axis linear electric motors 1 and Y-axis line slideway 2 are located on base 3, column 5 is positioned on base 3, in order to supporting traverse 6, X-axis worktable 15 is fixed on crossbeam 6 and by X-axis linear electric motors 17 and drives, X-axis linear electric motors 17 are located on X-axis line slideway 16, Z axis worktable 14 is positioned on X-axis worktable 15 and by Z axis linear electric motors 12 and drives, Z axis linear electric motors 12 are located on Z axis line slideway 11, gauge head Connection Block 13 is positioned on Z axis worktable 14, shaft coupling 9 connects gauge head motion drive motor 10 and rectilinear motion feed screw nut pair 8, for the motion of control survey sensor 7, electric rotating machine 21 is positioned on Y-axis worktable 22, electric rotating machine 21 drives work piece revolving platform 19 to rotate by Connection Block 20, computing machine 23 and motion controller 4 are all positioned on base 3, computing machine 23 controls X-axis linear electric motors 17 by motion controller 4 and gauge head motion drive motor 10 speed are measured track interlock interpolation, making splicing areal survey track and the workpiece profile line of survey sensor 7 is equal space line.
Described X-axis linear electric motors can adopt X-axis flat plate type linear motor, and described Y-axis linear electric motors can adopt Y-axis flat plate type linear motor, and described Z axis linear electric motors can adopt Z axis flat plate type linear motor.
The main body of described work piece revolving platform can adopt granite material.
Be described further below in conjunction with 500mm bore optical element.
Fig. 2 provides the present invention and once splices segmenting principle figure, be 500mm according to aperture of workpiece size, setting splicing section length is 200mm, be that X-axis feeding distance is 200mm, setting segmentation number is 3, select 3 survey sensors and corresponding once splicing gauge head motion, be fixed on gauge head Connection Block by certain size-spacing 150mm, can calculate thus each lap A spacing is 50mm, then according to the surface outline equation of workpiece, X-axis motor and the gauge head motion drive motor speed of controlling three-axis measurement platform via motion controller by computing machine are measured track interlock interpolation, making splicing areal survey track and the workpiece profile line of each survey sensor is equal space line, in a splicing, have twice overlapping, three sections of equal space lines.In Fig. 2, mark B is for measuring end position.
Fig. 3 provides the present invention and once splices measurement reference position schematic diagram, and end position schematic diagram is measured in the once splicing that Fig. 4 is the embodiment of the present invention.According to the surface outline equation of workpiece, drive X/Y/Z spindle motor by computing machine via motion controller, part edge to be measured optical element is placed in to survey sensor 7 belows, gauge head motion drive motor control rectilinear motion feed screw nut pair, 3 survey sensors are placed in to part surface to be measured, as Fig. 3, be 200mm by the good X-axis feeding distance of computer settings, can start to detect, feed back part face shape outline data to be measured by 3 survey sensors, measure track interlock interpolation by controlling gauge head motion drive motor speed, making splicing areal survey track and the workpiece profile line of each survey sensor is equal space line, finally obtain as Fig. 4.In Fig. 3, mark C is for measuring reference position, and in Fig. 4, mark B is for measuring end position.
Fig. 5 provides concentric circles of the present invention and measures profile schematic diagram, and the concentric circles that Fig. 6 is the embodiment of the present invention is measured profile end position schematic diagram.The workpiece for measurement 18 that is 500mm by bore is placed on workpiece universal stage 19, 4 survey sensors are set, gauge head spacing is made as 60mm, once splicing under metering system, drive electric rotating machine, as Fig. 5, make workpiece rotation platform drive workpiece to rotate with certain speed, then by computer settings well each X-axis feeding distance be 20mm, mobile 16 times altogether, can obtain 64 element under test surface concentric circless, finally obtain as Fig. 6, can obtain by the method the face shape outline data of surface of the work, to be used for matching element under test three-dimensional surface, can measure as required several concentric circless, and concentric circles is more, the precision that is used for fitting to three-dimensional surface can be higher.
Claims (2)
1. optical elements of large caliber profile splicing measuring device, is characterized in that being provided with Y-axis linear electric motors, Y-axis line slideway, base, motion controller, column, crossbeam, survey sensor, rectilinear motion feed screw nut pair, shaft coupling, gauge head motion drive motor, Z axis line slideway, Z axis linear electric motors, gauge head Connection Block, Z axis worktable, X-axis worktable, X-axis line slideway, X-axis linear electric motors, workpiece, work piece revolving platform, Connection Block, electric rotating machine, Y-axis worktable and computing machine;
Described Y-axis linear electric motors and Y-axis line slideway are located on base, column is positioned on base, in order to supporting traverse, X-axis worktable is fixed on crossbeam and by X-axis linear electric motors and drives, X-axis linear electric motors are located on X-axis line slideway, Z axis worktable is positioned on X-axis worktable and by Z axis linear electric motors and drives, Z axis linear electric motors are located on Z axis line slideway, gauge head Connection Block is positioned on Z axis worktable, shaft coupling connects gauge head motion drive motor and rectilinear motion feed screw nut pair, for the motion of control survey sensor, electric rotating machine is positioned on Y-axis worktable, electric rotating machine drives work piece revolving platform to rotate by Connection Block, computing machine and motion controller are all positioned on base, computing machine is measured track interlock interpolation by motion controller control X-axis linear electric motors and gauge head motion drive motor speed, making splicing areal survey track and the workpiece profile line of survey sensor is equal space line.
2. optical elements of large caliber profile splicing measuring device as claimed in claim 1, it is characterized in that described X-axis linear electric motors adopt X-axis flat plate type linear motor, described Y-axis linear electric motors adopt Y-axis flat plate type linear motor, and described Z axis linear electric motors adopt Z axis flat plate type linear motor.
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| CN201410098960.6A CN103822605B (en) | 2014-03-18 | 2014-03-18 | Splicing measuring device of optical elements of large caliber profile |
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| CN201410098960.6A CN103822605B (en) | 2014-03-18 | 2014-03-18 | Splicing measuring device of optical elements of large caliber profile |
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Cited By (8)
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| CN104588699A (en) * | 2015-01-06 | 2015-05-06 | 池州共康汽车零部件有限公司 | On-line detection device for turning |
| CN104898413A (en) * | 2015-03-27 | 2015-09-09 | 上海大学 | Large-stroke high-resolution driver system |
| CN106643626A (en) * | 2016-12-27 | 2017-05-10 | 烟台拓伟智能科技股份有限公司 | Food surface contour measurement system |
| CN106643585A (en) * | 2017-01-05 | 2017-05-10 | 四川永森航空材料科技有限公司 | Turbine blade flatness measuring tool |
| CN107063098A (en) * | 2017-03-23 | 2017-08-18 | 苏州市职业大学 | A kind of modified production line |
| CN114440771A (en) * | 2022-01-24 | 2022-05-06 | 苏州佳祺仕信息科技有限公司 | Size offset detection device |
| CN116295212A (en) * | 2023-05-17 | 2023-06-23 | 中国科学院长春光学精密机械与物理研究所 | Contour detection device and method for assisting in-situ integrated processing |
| WO2023123560A1 (en) * | 2021-12-27 | 2023-07-06 | 浙江大学 | Inner wall measurement system and method based on deep vector height workpiece |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104588699A (en) * | 2015-01-06 | 2015-05-06 | 池州共康汽车零部件有限公司 | On-line detection device for turning |
| CN104898413A (en) * | 2015-03-27 | 2015-09-09 | 上海大学 | Large-stroke high-resolution driver system |
| CN106643626A (en) * | 2016-12-27 | 2017-05-10 | 烟台拓伟智能科技股份有限公司 | Food surface contour measurement system |
| CN106643585A (en) * | 2017-01-05 | 2017-05-10 | 四川永森航空材料科技有限公司 | Turbine blade flatness measuring tool |
| CN107063098A (en) * | 2017-03-23 | 2017-08-18 | 苏州市职业大学 | A kind of modified production line |
| CN107063098B (en) * | 2017-03-23 | 2023-11-03 | 池州市琼琚信息技术服务有限公司 | Improved generation production line |
| WO2023123560A1 (en) * | 2021-12-27 | 2023-07-06 | 浙江大学 | Inner wall measurement system and method based on deep vector height workpiece |
| CN114440771A (en) * | 2022-01-24 | 2022-05-06 | 苏州佳祺仕信息科技有限公司 | Size offset detection device |
| CN116295212A (en) * | 2023-05-17 | 2023-06-23 | 中国科学院长春光学精密机械与物理研究所 | Contour detection device and method for assisting in-situ integrated processing |
| CN116295212B (en) * | 2023-05-17 | 2023-08-11 | 中国科学院长春光学精密机械与物理研究所 | Contour detection device and method for assisting in-situ integrated processing |
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