CN103803787A - Substrate dividing device - Google Patents
Substrate dividing device Download PDFInfo
- Publication number
- CN103803787A CN103803787A CN201310437088.9A CN201310437088A CN103803787A CN 103803787 A CN103803787 A CN 103803787A CN 201310437088 A CN201310437088 A CN 201310437088A CN 103803787 A CN103803787 A CN 103803787A
- Authority
- CN
- China
- Prior art keywords
- substrate
- platform
- brisement
- adsorption plate
- absorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/027—Scoring tool holders; Driving mechanisms therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a substrate dividing device, comprising an etching device (D) forming etching lines on the surface of brittle material substrate (W); a conveying mechanism (E) which transmits the etched substrate (W) to an absorbing inversion mechanism (G); the absorbing inversion mechanism (G) which has an absorbing plate (29) which can be inversely rotated up and down through a rotating shaft (28), and which takes the substrate (W) from the conveying mechanism (E) and enables the substrate (W) to be inversely rotated up and down and to be placed on a platform (15) of a breaking device (F); and the breaking device (F) which breaks the substrate (W) taken from the absorbing inversion mechanism (G). The rotating shaft (28) of the absorbing plate (29) of the absorbing inversion mechanism (G) is disposed at the end part of the absorbing plate (29) in an extending manner along a direction approximately orthogonal to the conveying direction of the substrate (W). The absorbing plate (29) absorbed with the substrate (W) is inversely rotated with the rotating shaft (28) being the fulcrum. The rotating shaft (28) is disposed near the platform (15) of the breaking device (F) in a manner that the inversely-rotated substrate (W) can be disposed on the platform (15) of the breaking device.
Description
Technical field
The invention relates to the substrate breaking apparatus of the brittle substrates such as glass substrate, particularly about the substrate breaking apparatus that forms delineation line and carry out disjunction along this delineation line on substrate.
Background technology
Knownly for example in patent documentation 1 grade, disclosed by existing, known have a following method: to loading the large-area mother substrate on platform, the thermal strain etc. that utilizes scoring device to make break bar (claiming again scribe wheel) rotate, utilize the irradiation of laser beam to produce, and form many mutually orthogonal parallel delineation lines, afterwards, mother substrate is reversed and load in the platform of brisement device by absorption reversing device, make substrate deflection from brisement bar being pressed with the face that is provided with this delineation line face that is opposition side, disjunction substrate whereby, takes out unit goods.
In addition in the situation of the mother substrate that is fitted with 2 pieces of glass substrates being carried out to disjunction, to loading the mother substrate on the platform of scoring device, by break bar is rotated, be that A face forms delineation line in the one side of substrate.Then, utilize absorption reversing device to adsorb substrate and make, after its reversion, on the platform of brisement device, to utilize brisement bar etc. to press and disjunction substrate A face the substrate B face at the back side that becomes substrate A face substrate-placing.Then, with similarly above-mentioned, form delineation line at substrate B face, make after substrate reversion, utilize brisement bar etc. to press and disjunction substrate B face substrate A face.Afterwards, the method for example having disclosed at patent documentation 2 (Figure 45) etc., divides a word with a hyphen at the end of a line the substrate of disjunction from brisement device removal and toward next step.
Patent documentation 1: International Publication W02005/053925 communique
Patent documentation 2: International Publication W02002/057192 communique
Summary of the invention
Generally speaking, delineate the absorption reversing device of the scoring device of processing, the substrate reversion that makes to have delineated and the substrate having reversed carried out in the substrate breaking apparatus of brisement device of brisement possessing to have in substrate, in order to seek the efficient activity of operation, be preferably substrate so that the shorter activity duration is carried out conveyance toward the microscope carrier of each step as far as possible.But, the existing known absorption reversing device in substrate breaking apparatus that packs into, for example, shown in above-mentioned patent documentation 1, form in such a way: pick up and utilize the substrate after scoring device delineation and make after its reversion, move to brisement device platform action and toward the action of falling on this platform, and by the substrate-placing having reversed in the platform of brisement device.Therefore, have following problem: making the conveyance of the past brisement device after substrate reversion quite time-consuming, and make in required whole activity duration of substrate-cutting elongated.In addition, necessitate due to the travel mechanism to brisement device or toward the hoisting appliance of platform, therefore have the problem that structure complicates and cost uprises of device.
Therefore, the present invention is because above-mentioned existing known problem, object be to provide a kind of possess have the substrate breaking apparatus that can make the substrate reverse and load the absorption reversing device of the activity duration shortening till the platform of next step.
The object of the invention to solve the technical problems realizes by the following technical solutions.
According to substrate breaking apparatus of the present invention, be provided with: scoring device, take the main path of conveyance brittle substrate sequentially as the 1st direction, in the way of this main path, forms delineation line in the surface of brittle substrate; Transport mechanism, transfers from the platform of this scoring device this brittle substrate that is formed with delineation line by scoring device toward following absorption reversing device; Absorption reversing device, possess by turning axle and be formed as the adsorption plate that can reverse up and down, and from this transport mechanism, this brittle substrate is got and is placed in this adsorption plate and it is reversed up and down, this brittle substrate after reversion is loaded in the platform of following brisement device; And brisement device, this brittle substrate of accepting from this absorption reversing device is carried out to brisement along this delineation line; This turning axle of this adsorption plate in this absorption reversing device, become following formation: along with the 1st direction roughly orthogonal direction extend an end that is arranged at this adsorption plate, make absorption have after this adsorption plate reversion of this brittle substrate take this turning axle as fulcrum, this brittle substrate after reversion can be loaded to the mode on the platform of this brisement device, this turning axle is disposed near the position platform of this brisement device.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid substrate breaking apparatus, is characterized in that the adsorption plate of this absorption reversing device, and being formed as can up-down adjustment position.
Aforesaid substrate breaking apparatus, it is characterized in that this transport mechanism, be formed as doubling as action that this brittle substrate is supplied with toward the platform of this scoring device, with platform from brisement device by this this brittle substrate of brisement toward the action of next step removal.
By technique scheme, substrate breaking apparatus of the present invention at least has following advantages and beneficial effect:
Substrate breaking apparatus of the present invention, though as above form, only make the reversion of this adsorption plate take this turning axle as fulcrum, can side by side carry out the reversion action of substrate, with the action on the platform of this brisement device by the substrate-placing after reversion, whereby, the activity duration can be shortened significantly.In addition, absorption reversing device, can become the simple formation of utilizing adsorption plate and being arranged at the turning axle of an end of adsorption plate, and have the effect of seeking miniaturization and cost degradation.
In the present invention, the adsorption plate of this absorption reversing device, can be formed as can up-down adjustment position.Whereby, in the time making adsorption plate absorption substrate and make its reversion, in the mode on the platform of brisement device by substrate-placing correctly, the upper-lower position of capable of regulating adsorption plate.
In the present invention, this transport mechanism, can be formed as doubling as action that this brittle substrate is supplied with toward the platform of this scoring device, with platform from this brisement device by this this brittle substrate of brisement toward the action of next step removal.Whereby, can omit be provided in addition respectively mechanism that this brittle substrate is supplied with toward the platform of this scoring device and for this brisement device by the substrate of brisement the mechanism toward next step removal, and there is the effect that can form to exquisitenessization substrate breaking apparatus.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to better understand technique means of the present invention, and can be implemented according to the content of specification sheets, and for above and other object of the present invention, feature and advantage can be become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.
Accompanying drawing explanation
Fig. 1 is the stereographic map that represents the summary of the entirety formation of substrate breaking apparatus of the present invention.
Fig. 2 is the vertical view of the summary of the substrate breaking apparatus of Fig. 1.
Fig. 3 is the side-view of the transport mechanism in the substrate breaking apparatus of Fig. 1.
Fig. 4 is the stereographic map of the scoring device in the substrate breaking apparatus of Fig. 1.
Fig. 5 is the stereographic map of the brisement device in the substrate breaking apparatus of Fig. 1.
Fig. 6 is the side-view of the absorption reversing device in the substrate breaking apparatus of Fig. 1.
Fig. 7 is the explanatory view that represents the summary in the 1st stage of the disjunction step of utilizing substrate breaking apparatus of the present invention.
Fig. 8 is the explanatory view that represents the summary in the 2nd stage of substrate-cutting step.
Fig. 9 is the explanatory view that represents the summary in the 3rd stage of substrate-cutting step.
Figure 10 is the explanatory view that represents the summary in the 4th stage of substrate-cutting step.
Figure 11 is the explanatory view that represents the summary in the 5th stage of substrate-cutting step.
Figure 12 is the explanatory view that represents the summary in the 6th stage of substrate-cutting step.
Fig. 13 is the explanatory views that represent the summary in the 7th stage of substrate-cutting step.
[nomenclature]
C: move into and use transfer roller D: scoring device
E: transport mechanism F: brisement device
G: absorption reversing device H: discharge transfer roller
W: mother substrate (brittle substrate)
3: the adsorption plate 5 of transport mechanism: the platform of scoring device
15: the platform 28 of brisement device: the turning axle of adsorption plate
29: the adsorption plate of absorption reversing device
Embodiment
Technique means and effect of taking for reaching predetermined goal of the invention for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to its embodiment of substrate breaking apparatus, structure, feature and effect thereof of proposing according to the present invention, be described in detail as follows.
Below, graphic according to implementing, the details of substrate breaking apparatus of the present invention is described.Fig. 1 represents the stereographic map of the summary of the entirety formation of substrate breaking apparatus of the present invention.Fig. 2 represents the vertical view of its summary.
Substrate breaking apparatus in the present embodiment, as shown in Figure 1 and Figure 2, by moving into transfer roller (conveyer) C, scoring device D, brisement device F, transport mechanism E, absorption reversing device G and discharging the formation with transfer roller H.For the substrate W of processing, become from moving into and use transfer roller C to use transfer roller H via scoring device D, brisement device F to discharging, sequentially divide a word with a hyphen at the end of a line along the straight line L extending in the 1st direction.The 1st direction represents with directions X on graphic.Along the transport path processing line of the substrate of the 1st direction, be called in the present invention " main path of substrate ".In addition, will be called the 2nd direction with the orthogonal direction of the 1st direction.
Scoring device D, as shown in Figure 4, possess have along in the main path direction of described substrate (that is, directions X) orthogonal in the plane the 2nd direction (Y-direction) extends the platform 5 that the track 4 that arranges moves, and drives by the screw shaft 7 being rotated with motor 6.Further, platform 5, becoming can be by the rotary driving part of built-in motor 8 and turn in horizontal plane.In addition, by the pillar 9,9 of pair of right and left and possess the support that has crane span structure to form door type in the beam 11 of the guiding element 10 extending at directions X of these pillars 9,9.At guiding element 10, the engraving head 13 with break bar 12 is mounted to and can be moved in directions X along guiding element 10.
Brisement device F, as shown in Figure 5, possess and have along in extending with orthogonal in the plane the 2nd direction (Y-direction) of the main path direction (directions X) of substrate the platform 15 that the track 14 that arranges moves, and drive by the screw shaft 17 being rotated with motor 16.Further, platform 15, becoming can be by the rotary driving part of built-in motor 18 and turn in horizontal plane.In addition, by the pillar 19,19 of pair of right and left and possess the support that has crane span structure to form door type in the beam 21 of the crossbearer 20 extending at directions X of these pillars 19,19.At crossbearer 20, the brisement bar 22 extending at directions X is mounted to and can carries out lifting by cylinder 23.
Transport mechanism E, as shown in Figure 3, by guide rail 1, the sliding component 2 moving along this guide rail 1 of straight line L (the consulting Fig. 2) configuration along the 1st direction that is directions X and be mounted to liftable adsorption plate 3 in sliding component 2 with flat-hand position and formed.Adsorption plate 3, possesses multiple adsorption holes in below, and has the reliever of vacuum pump to be connected with the pipe arrangement (diagram is outer) of air-breathing use with use, is formed as adsorbing substrate W and carrying out conveyance by the attraction air of reliever generation.Guide rail 1, not hinder the mode of action of scoring device D or brisement device F, absorption reversing device G to be disposed at the top position of break-up device.
Absorption reversing device G, as shown in Figure 6, by be fixed on vertical position the pillar 25 of the quadrangular prism of supporting platform 24, this pillar 25 by upper-lower position regulating mechanism (outside icon) be mounted to can upper-lower position adjusting can mover 26, be installed on can mover 26 one-tenth can be formed by the adsorption plate 29 that is arranged at the turning axle 28 of the level that inner rotating mechanism 27 rotates and is fixed on the level of turning axle 28.Adsorption plate 29, possesses the adsorption plane 29a that has multiple adsorption holes in one mask, and the pipe arrangement (diagram is outer) by air-breathing use has the reliever of vacuum pump to be connected with use, be formed as adsorbing substrate W and reversing by the attraction air of reliever generation.In addition the upper-lower position regulating mechanism of the upper-lower position that adjusting can mover 26, driving mechanism that for example can be by the driving mechanism of the combination using tooth bar and pinion(gear) (pinion) or fluid cylinder as propulsion source and forming.The turning axle 28 of adsorption plate 29, along with the 1st direction roughly orthogonal direction extend and arrange, and be arranged at an end of adsorption plate 29.And, absorption is had after adsorption plate 29 reversion of substrate W, can load the mode on the platform 15 of brisement device F through the substrate W of reversion, turning axle 28 is disposed near the position side of platform 15 of brisement device F.
Then,, for the disjunction step of mother substrate W of utilizing above-mentioned substrate breaking apparatus, use Fig. 2, Fig. 7-Figure 13 sequentially to describe.By moving into the substrate W supplying with transfer roller C, as shown in Figure 7, adsorb and load on the platform 5 of delivery position that is positioned at scoring device D by the adsorption plate 3 of transport mechanism E.Then, make platform 5 move to the position of engraving head 13 (consulting Fig. 1, Fig. 2) and after break bar forms the delineation line of the X-Y direction of mutually reporting to the leadship after accomplishing a task, platform 5 returned to home position (delivery position).
The substrate W that completes the formation of delineation line, as shown in Figure 8, utilizes the adsorption plate 3 of transport mechanism E adsorb and lift from platform 5, moves to the top of the adsorption plate 29 of absorption reversing device G.The adsorption plate 29 of absorption reversing device G is so that adsorption plane 29a state standby upward, on this adsorption plane 29a, as shown in Figure 9, Figure 10, makes the adsorption plate 3 of transport mechanism E decline and load substrate W.
Then, as shown in figure 11, make to adsorb the adsorption plate 29 of reversing device G, after rotating using turning axle 28 as fulcrum and the substrate W that shows back side reversion being loaded on the platform 15 of brisement device F, as shown in figure 12, adsorption plate 29 reverts to and makes adsorption plane 29a standby posture upward.In brisement device F, make the platform 15 that is placed with substrate W move to the below of brisement bar 22 (consulting Fig. 1, Fig. 2) and by brisement bar 22 along delineating line by after substrate W brisement, platform 15 be returned to original delivery position.Afterwards, as shown in figure 13, again, by the adsorption plate 3 of carrying device E, the substrate W of brisement is adsorbed and uses transfer roller H removal toward discharging from platform 15.
Above, though be sequentially illustrated for the step of disjunction 1 plate base W, but in the situation of disjunction substrate W continuously, during the brisement operation of initial substrate W is carried out in brisement device F, make the follow-up substrate adsorption standby of delineating via the step of above-mentioned Fig. 7-Figure 10 on the adsorption plate 29 of absorption reversing device G.Then, toward discharging with after transfer roller H removal, make to adsorb reversing device G reversion at initial substrate W, and by follow-up substrate by the step of carrying out Figure 11-Figure 13, and can carry out continuously the disjunction of substrate by link-up operation.
In the above-described embodiments, though record for the situation of the substrate W of disjunction veneer, but disjunction is fitted with the situation of the adhesive substrates of 2 sheet glass substrates, if following mode: completed in brisement device F by above-mentioned step after the brisement of one side (A face) of substrate W, adsorbed substrate W and again load on the platform 5 of scoring device D with the adsorption plate 3 of carrying device E.Afterwards, via with Fig. 7-Figure 12 same steps by after the another side of substrate (B face) brisement, as shown in figure 13, with the adsorption plate 3 of carrying device E by substrate W removal from the platform 15 of brisement device F.
In the above-described embodiment, transport mechanism E, become dual-purpose by substrate W from move into transfer roller C toward the action of platform 5 removals of scoring device D, with platform 15 from brisement device F by the substrate W of brisement toward the action of discharging with transfer roller H removal, therefore the mechanism toward next step removal without the substrate W of the mechanism that is provided in addition respectively substrate W to supply with toward the platform 5 of scoring device D and the brisement for utilizing brisement device F, can form substrate breaking apparatus in exquisitenessization ground.
In the present invention, in above-mentioned substrate-cutting step, make the adsorption plate 29 that adsorbs reversing device G to be placed with after the state reversion of substrate W, the substrate W having reversed can be loaded to the mode on the platform 15 of brisement device F, turning axle 28 is disposed near the position of the platform 15 of brisement device F, therefore only so that adsorption plate 29 reverse, can side by side utilize the reversion action of the substrate W of absorption reversing device G, with the substrate W after reversion is loaded to the action on platform 15.Whereby, the activity duration can be shortened significantly.In addition, absorption reversing device G, can become utilize adsorption plate 29, with the simple formation of turning axle 28 of an end that is arranged at adsorption plate 29, therefore can seek both of miniaturization and cost degradation.
Though be illustrated for the representational embodiment of the present invention above, the present invention is not only defined in above-mentioned enforcement kenel person, can suitably revise, change reaching object of the present invention and do not depart from the scope of scope of request.
The present invention is to be used in the substrate breaking apparatus that forms delineation line and carry out brisement along this delineation line on substrate.
The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, but not in order to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (3)
1. a substrate breaking apparatus, is characterized in that:
Be provided with:
Scoring device, take the main path of conveyance brittle substrate sequentially as the 1st direction, in the way of this main path, forms delineation line on the surface of brittle substrate;
Transport mechanism, transfers from the platform of this scoring device this brittle substrate that is formed with delineation line by scoring device toward following absorption reversing device;
Absorption reversing device, possess by turning axle and be formed as the adsorption plate that can reverse up and down, and from this transport mechanism, this brittle substrate is got and is placed in this adsorption plate and it is reversed up and down, this brittle substrate after reversion is loaded in the platform of following brisement device; And
Brisement device, carries out brisement to this brittle substrate of accepting from this absorption reversing device along this delineation line;
This turning axle of this adsorption plate in this absorption reversing device, along with the 1st direction roughly orthogonal direction extend the end that is arranged at this adsorption plate, make absorption have after this adsorption plate reversion of this brittle substrate take this turning axle as fulcrum, this brittle substrate after reversion can be loaded to the mode on the platform of this brisement device, this turning axle is disposed near the position platform of this brisement device.
2. substrate breaking apparatus as claimed in claim 1, is characterized in that the adsorption plate of this absorption reversing device, and being formed as can up-down adjustment position.
3. the substrate breaking apparatus as described in arbitrary claim in claim 1 to 2, it is characterized in that this transport mechanism, be formed as doubling as action that this brittle substrate is supplied with toward the platform of this scoring device, with platform from brisement device by this this brittle substrate of brisement toward the action of next step removal.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012243232A JP2014091652A (en) | 2012-11-05 | 2012-11-05 | Substrate segmentation apparatus |
| JP2012-243232 | 2012-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103803787A true CN103803787A (en) | 2014-05-21 |
Family
ID=50701235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310437088.9A Pending CN103803787A (en) | 2012-11-05 | 2013-09-17 | Substrate dividing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2014091652A (en) |
| KR (1) | KR20140058328A (en) |
| CN (1) | CN103803787A (en) |
| TW (1) | TW201418533A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105439436A (en) * | 2014-09-22 | 2016-03-30 | 发那科株式会社 | Device for releasing catch between precut substrates, robot, and robot system therefor |
| CN107265839A (en) * | 2016-04-07 | 2017-10-20 | 塔工程有限公司 | Scribing equipment |
| CN108147062A (en) * | 2016-12-05 | 2018-06-12 | 三星钻石工业股份有限公司 | Convey body, conveying device and scoring system |
| CN110405962A (en) * | 2019-07-23 | 2019-11-05 | 上海理工大学 | Automatic turnover semiconductor cleavage device and processing method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6435669B2 (en) * | 2014-07-04 | 2018-12-12 | 三星ダイヤモンド工業株式会社 | Substrate processing equipment |
-
2012
- 2012-11-05 JP JP2012243232A patent/JP2014091652A/en active Pending
-
2013
- 2013-06-17 TW TW102121276A patent/TW201418533A/en unknown
- 2013-09-17 CN CN201310437088.9A patent/CN103803787A/en active Pending
- 2013-09-25 KR KR1020130113713A patent/KR20140058328A/en not_active Application Discontinuation
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105439436A (en) * | 2014-09-22 | 2016-03-30 | 发那科株式会社 | Device for releasing catch between precut substrates, robot, and robot system therefor |
| CN105439436B (en) * | 2014-09-22 | 2020-05-15 | 发那科株式会社 | Entanglement releasing device, robot, and robot system |
| CN107265839A (en) * | 2016-04-07 | 2017-10-20 | 塔工程有限公司 | Scribing equipment |
| CN107265839B (en) * | 2016-04-07 | 2021-07-06 | 塔工程有限公司 | Scribing equipment |
| CN108147062A (en) * | 2016-12-05 | 2018-06-12 | 三星钻石工业股份有限公司 | Convey body, conveying device and scoring system |
| CN108147062B (en) * | 2016-12-05 | 2021-11-30 | 三星钻石工业股份有限公司 | Conveyance body, conveyance device, and scribing system |
| CN110405962A (en) * | 2019-07-23 | 2019-11-05 | 上海理工大学 | Automatic turnover semiconductor cleavage device and processing method |
| CN110405962B (en) * | 2019-07-23 | 2021-11-19 | 上海理工大学 | Automatic turnover type semiconductor cleavage device and processing method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201418533A (en) | 2014-05-16 |
| JP2014091652A (en) | 2014-05-19 |
| KR20140058328A (en) | 2014-05-14 |
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Application publication date: 20140521 |